CN107192913B - Base board checking device and substrate inspecting method - Google Patents
Base board checking device and substrate inspecting method Download PDFInfo
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- CN107192913B CN107192913B CN201710144128.9A CN201710144128A CN107192913B CN 107192913 B CN107192913 B CN 107192913B CN 201710144128 A CN201710144128 A CN 201710144128A CN 107192913 B CN107192913 B CN 107192913B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2801—Testing of printed circuits, backplanes, motherboards, hybrid circuits or carriers for multichip packages [MCP]
- G01R31/281—Specific types of tests or tests for a specific type of fault, e.g. thermal mapping, shorts testing
- G01R31/2812—Checking for open circuits or shorts, e.g. solder bridges; Testing conductivity, resistivity or impedance
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
- G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
- G01R27/16—Measuring impedance of element or network through which a current is passing from another source, e.g. cable, power line
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/12—Testing dielectric strength or breakdown voltage ; Testing or monitoring effectiveness or level of insulation, e.g. of a cable or of an apparatus, for example using partial discharge measurements; Electrostatic testing
- G01R31/1227—Testing dielectric strength or breakdown voltage ; Testing or monitoring effectiveness or level of insulation, e.g. of a cable or of an apparatus, for example using partial discharge measurements; Electrostatic testing of components, parts or materials
- G01R31/1263—Testing dielectric strength or breakdown voltage ; Testing or monitoring effectiveness or level of insulation, e.g. of a cable or of an apparatus, for example using partial discharge measurements; Electrostatic testing of components, parts or materials of solid or fluid materials, e.g. insulation films, bulk material; of semiconductors or LV electronic components or parts; of cable, line or wire insulation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2801—Testing of printed circuits, backplanes, motherboards, hybrid circuits or carriers for multichip packages [MCP]
- G01R31/2806—Apparatus therefor, e.g. test stations, drivers, analysers, conveyors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/50—Testing of electric apparatus, lines, cables or components for short-circuits, continuity, leakage current or incorrect line connections
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- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Engineering & Computer Science (AREA)
- Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)
Abstract
Substrate inspecting method of the invention, electric current is flowed through to survey electrical characteristics value by inspection probe to the conductive pattern formed on circuit substrate, measured value decision circuit substrate based on the electrical characteristics value it is qualified or not, the following steps are included: being determined as qualification in the case where measured value is in permissible range, measurement is repeated in the case where not being judged as qualification, it is determined as in the case where pendulous frequency has reached the upper limit unqualified, simultaneously in the case where the 1st measured value deviates permissible range, change carries out the 2nd measurement to the sense of current for checking probe, in the case where the 2nd measured value deviates permissible range, sense of current when measured value to measure the smaller side of difference of the deviation permissible range among the 1st measured value and the 2nd measured value carries out the 3rd later measurement.
Description
Technical field
The present invention relates to the inspections of the substrate of electrically conducting state or state of insulation for checking the conductive pattern of circuit substrate
Look into device and substrate inspecting method.
This application claims on March 14th, 2016 in Patent 2016-50233 priority of Japanese publication, and content draws
For this.
Background technique
The broken string of conductive pattern or the electrically conducting state of short circuit etc. in the circuit substrate for checking printed base plate etc. or
In the case where state of insulation, makes the exposed portion at the both ends for checking that probe abuts conductive pattern, flows through electric current between checking probe,
Or between voltage is applied two conductive patterns, measurement checks the electrical characteristics value of resistance value between probe etc., from the measured value inspection
On state or state of insulation.
In this case, there are the misgivings for checking that the contact condition between probe and conductive pattern has an impact measured value.
Particularly, due to miniaturization quality (deviation of resistance value is small) requirement be continuously improved in recent years in, contact condition is to measurement
Influence caused by value becomes larger problem.
In order to solve the influence of such contact condition, in patent document 1, disclose in measurement conductive pattern etc.
When resistance value, it is secondary in the extremely continuous L (natural number that L is 2 or more) of measurement for the poor contact etc. for checking probe in cause of occurrence
When, pendulous frequency reached M (natural number that M is L or more) it is secondary when and continuous N (N be 2 or more, the nature lower than M
Number) secondary meet do not occur that measurement is abnormal and the which when measured value of parameter measured is converged in the condition in permissible range
Until when a more early, the measurement of parameter is repeated.
According to this method, the measurement exception that can not detect notconnect state etc. is described, and in the variation of measured value
When less, terminated measurement processing before pendulous frequency reaches M times, can be improved measurement efficiency.
Existing technical literature
Patent document
Patent document 1: Japanese Unexamined Patent Publication 2008-151554 bulletin
Summary of the invention
Problems to be solved by the invention
But in method described in Patent Document 1, describes and be set as defined pendulous frequency M times, it is different measuring
Often it is not detected, and when the variation of measured value is few, measurement processing can be made to terminate before reaching this M times, and even if in the situation
Under, if measured value is converged in the condition in permissible range and is unsatisfactory for continuous n times, measurement processing cannot be made to terminate.
Given this situation the present invention completes, it is therefore intended that reduce circuit substrate conductive pattern and check probe it
Between contact condition influence, and rapidly check.
Solution to problem
Substrate inspecting method of the invention, the conductive pattern formed on to circuit substrate, based on by checking probe stream
The current measurement electrical characteristics value crossed, and the measured value based on the electrical characteristics value determines the qualified or not substrate of the circuit substrate
In inspection method, comprising the following steps: in the case where the 1st measured value deviates permissible range, change and visited to the inspection
The sense of current of needle carries out the 2nd measurement, in the case where the 2nd measured value deviates the permissible range, to survey
Measure the measurement of the smaller side of difference of the deviation permissible range among the 1st measured value and the 2nd measured value
Sense of current when value carries out the 3rd later measurement.
In addition, base board checking device of the invention, the electric current that is flowed through in the conductive pattern formed on based on circuit substrate
Measure electrical characteristics value, and the measured value based on the electrical characteristics value determines the qualified or not inspecting substrate dress of the circuit substrate
In setting, comprising: a pair checks probe, touches the conductive pattern；Switching part, for switching between the inspection probe
The sense of current flowed through；It checks judging unit, the measured value and predetermined threshold value, is to hold in the measured value
Perhaps in the case that range is interior, the circuit substrate is determined as qualification；And current direction control unit, in the 1st measurement
In the case that value is not determined as qualification by the inspection judging unit, the switching part is controlled, so that changing to the inspection
The sense of current for nosing into needle, in the case where the 2nd measured value is not determined as qualification by the inspection judging unit, control
The switching part is made, is held so that becoming the deviation measured among the 1st measured value and the 2nd measured value
Perhaps the sense of current when measured value of the smaller side of difference of range.
Even if can also pass through 2 in the case where measured value deviates permissible range because checking the poor contact etc. of probe
The secondary above measurement, reduces the influence of contact condition and is correctly checked.It then, should when measured value is in permissible range
Circuit substrate is judged as qualification.
In addition, in the case where carrying out multiple measurement, if changing sense of current to carry out the 1st measurement and the 2nd
Secondary measurement, then it is poor to generate in its measured value.In the state that this is assumed to be because will check that probe touches conductive pattern
Electrical path, conductor and insulator (such as contact portion) mixing, electric current all easily flows through in which direction.In addition, if anti-
It measures again, then measured value is constantly slowly converged towards specified value as pendulous frequency is overlapped.Therefore, if on one side alternately
One planar survey of direction of switching electric current, then measured value is constantly slowly converged towards specified value, but biggish measured value and lesser
Measured value is alternately measured.It is alternately switched in a planar survey this on one side, until measured value enters in permissible range
Need the time.
In the present invention, by comparing initial 2 measured values and to measure the smaller side of difference for deviateing permissible range
Measured value when sense of current carry out the 3rd later measurement, with the measuring condition of the smaller side of influence of contact condition
It measures, can be more accurate and reaches in permissible range as soon as possible, can will shorten the corresponding time review time.
In substrate inspecting method of the invention, can also the measured value in the permissible range in the case where determine
For qualification, measurement is repeated in the case where not being judged as qualification, sentences in the case where pendulous frequency has reached the upper limit
It is set to unqualified.
In addition, also may include: the condition setting for the upper limit for setting pendulous frequency in base board checking device of the invention
Unit；And in the case where not being determined as qualification by the inspection judging unit, until the pendulous frequency reaches the upper limit
Until the repetitive control unit of measurement is repeated, the inspection judging unit be not judged as the qualified and described measurement time
Number is determined as unqualified in the case where having reached the upper limit.
The effect of invention
In accordance with the invention it is possible to reduce the conductive pattern of circuit substrate and check the influence of the contact condition between probe,
And it rapidly checks.
Detailed description of the invention
Fig. 1 is the flow chart for indicating the conduction inspection method of circuit substrate of the 1st embodiment of the invention.
Fig. 2 is the block diagram for indicating the check device of circuit substrate of the 1st embodiment of the invention.
Fig. 3 A and Fig. 3 B are to indicate the case where having checked circuit substrate with the conduction inspection method of the 1st embodiment and right
The pendulous frequency and measured value for the case where being measured circuit substrate checking every time when alternately switching current direction
Between relationship curve graph.
Fig. 4 is in the case where indicating to flow through checking of the electric current to carry out circuit substrate always with identical current direction
Pendulous frequency and measured value between relationship curve graph.
Fig. 5 is the flow chart for indicating the insulation inspecting method of circuit substrate of the 2nd embodiment of the invention.
Fig. 6 is the block diagram for indicating the check device of circuit substrate of the 2nd embodiment of the invention.
Fig. 7 A and Fig. 7 B are to indicate the case where having checked circuit substrate with the insulation inspecting method of the 2nd embodiment and right
The pendulous frequency and measured value for the case where measurement checks circuit substrate insulation when alternately switching current direction every time
Between relationship curve graph.
Specific embodiment
Hereinafter, being described with reference to embodiments of the present invention.
[base board checking device]
Base board checking device 11 in 1st embodiment carries out the checking to the conductive pattern 2 of circuit substrate 1, such as
Shown in Fig. 2, comprising: the DC current source 12 of DC current as defined in occurring；Touch the conductor figure exposed on circuit substrate 1
The a pair of of the both ends of case 2 checks probe 13；It is located at the switching switch (switching part checked between probe 13 and DC current source 12
Part) 14；For detecting the potentiometric detection unit 15 of the current potential between checking probe 13；Control is powered and carries out to inspection probe 13
The control unit 16 of the qualified or not judgement of circuit substrate 1；And the display unit 17 for showing the judgement result etc..
As inspection probe 13, such as using the probe of two-terminal, each probe is made to touch conductive pattern 2 to examine
It surveys.Potentiometric detection unit 15 make two inspection probes 13 touch circuit substrate 1 conductive pattern 2 both ends, detection from
DC current source 12 flows through the current potential checked between probe 13 when certain electric current, which is carried out A/D conversion and as number
Word signal is sent to control unit 16.
Switching switch 14 has DC current source 12 and checks connection conducting (ON), the disconnection (OFF) between probe 13
And it starts or stops the function to the energization for checking probe 13 and switches in these DC current sources 12 and check probe 13
Two functions of the function of the flow direction of the electric current to two inspection probes 13 when being set as connection status.But in this hair
In bright, the two functions can also be respectively set.
Control unit 16 is made of CPU, memory etc., controls DC current source 12 and switching switch 14, and according to electricity
The detection current potential of position detection unit 15 carries out the qualified or not judgement of circuit substrate 1, and be equipped with: the condition for setting various conditions etc. is set
The qualified or not repetitive control unit repeatedly for checking judging unit 24, control measurement of order member 23, decision circuit substrate 1
25, the communication of the data between the current direction control unit 26 of current direction when control measurement, progress and each unit is logical
Believe unit 27.
Condition setting unit 23 can set the constant current value occurred by DC current source 12, check judging unit 24 in be used for
Determine measured value whether permissible range threshold value, the upper limit of pendulous frequency etc..These constant current values, threshold value, pendulous frequency it is upper
Limit etc. is set to suitably be worth according to the characteristic as the circuit substrate of check object.
Check judging unit 24 be taken into from potentiometric detection unit 15 transmission come data (current potential), from for DC current
The relationship between constant current value that source 12 is set calculates resistance value, and by the resistance value, (on state is in good situation with threshold value
Maximum allowable resistance value) compare, carry out the qualified or not of decision circuit substrate 1 from which for lesser comparison result.
Repetitive control unit 25 is controlled, so that in the case where not examined judging unit 24 is determined as qualification,
Under rated condition, stipulated number is repeated in measurement.
Current direction control unit 26 controls the case where measurement is repeated by the control of repetitive control unit 25
Under sense of current.
Details in relation to the control in above control unit 16, illustrates in the explanation of substrate inspecting method below.
[substrate inspecting method]
Illustrate substrate inspecting method according to the flow chart of Fig. 1.
In the case where carrying out the checking of circuit substrate 1, make the both ends for checking that probe 13 touches conductive pattern 2
The sense of current flowed in conductive pattern 2 is set as any one state (S1: current direction is initial by portion firstly, becoming
Setting).
Then, pendulous frequency i is set as 1 (S2), is set as being connected by the way that switch 14 will be switched, started to inspection probe 13
Between energization (S3).If flowing through defined electric current in checking the conductive pattern 2 between probe 13, the current potential of this period is by current potential
Detection unit 15 detects (S4), and after potentiometric detection, electric current is disconnected (S5).Then, from the current potential and for DC current source
12 preset current value operation resistance values (S6).Alternatively, can also in addition prepare current detecting part in the S6, make
The current value surveyed in energization calculates resistance value.
Electric current is flowed through in checking the conductive pattern 2 between probe 13 and detects current potential, from the potential calculation resistance value, by this
Resistance value in next step S7 compared with threshold value R0 until process as primary measurement, the resistance value that will calculate during this period
As measured value Ri (i=1~n).
Judge that measured value Ri (i=1~n) whether in preset threshold value R0 or less (S7), is being judged as Ri≤R0
In the case where, i.e., in the case where being judged as that measured value Ri is in permissible range, which is determined as " qualification "
(S8)。
It is not judged as whether measured value Ri in the case where (Ri≤R0), judges the measurement below threshold value R0 in S7
The circuit substrate is determined as " unqualified " (S10) in the case where being judged is n-th for the measurement (S9) of n-th.The N
Secondary value is set by condition setting unit 23 in advance.So-called pendulous frequency is n-th, measured value during referring to until to it
Even if Ri once all without for threshold value R0 hereinafter, in the n times for reaching the upper limit and measured value Ri be still not up to threshold value R0 the case where
Under, which is determined as unqualified.
In the case that be judged as pendulous frequency in S9 not be n-th, judge the measurement whether the measurement for being the 1st time
(S11), in the case where being judged is the 1st time, make to switch the movement of switch 14 by current direction control unit 26 to carry out electricity
Flow the processing (S12) of direction switching.It is not judged in S11 in the case where be the 1st measurement, proceeds to next step S13.
It is not judged in S11 in the case where be the 1st measurement, judges whether it is the 2nd measurement (S13).In
It is judged in the case where being the 2nd measurement, compares the 1st measured value (resistance value) R1 and the 2nd measured value (resistance
Value) R2, judge the 1st time measured value R1 whether the measured value R2 small (S14) than the 2nd time.Not being judged in S13 is the 2nd
In the case where secondary measurement, next step (S15) is proceeded to.
In the case where being judged as that the 1st measured value R2 of the measured value R1 than the 2nd time is small in S14, pass through current direction
Control unit 26 makes to switch the movement of switch 14 to carry out current direction hand-off process (S16).The 1st is not judged as in S14
In the case that measured value R2 of the secondary measured value R1 than the 2nd time is small, not switching electric current direction, and proceed to next step (S15).
That is, in the 1st lesser situation of measured value (and the value of the difference of the threshold value R0 of the 1st measured value is less than the survey with the 2nd time
The case where value of the difference of the threshold value R0 of magnitude) selection measurement the 1st time when current direction, it is smaller than the 1st time in the 2nd measured value
In the case where (and the value of the difference of the threshold value R0 of the 2nd measured value is less than and the value of the difference of the threshold value R0 of the 1st measured value
Situation) selection measurement the 2nd time when current direction, be set as implement the 3rd later inspection in the case where condition (electric current side
To).
In S15, by repetitive control unit 25, pendulous frequency i is counted and is increased, the repeated measurement from S3 again.In
During this period, it checks that probe 13 is maintained the state for touching the conductive pattern 2 of check object, is only switched the control of switch 14.
In this series of processing, by being judged as measured value Ri in S7 in threshold value R0 hereinafter, being conjunction in S8
When lattice determine, and even if repeated measurement, also due to measured value Ri is not below threshold value R0 in S9 pendulous frequency regardless of whether
The n times for reaching the upper limit, in S10 all be unqualified judgement when, inspection terminates.Checking the case where terminating because of qualification determination
Under, such as at the 1st time terminate to check with primary measurement in the case where being measured as qualification determination, it is not to wait for pendulous frequency i
Checking when for qualification determination for n times terminates.
In addition, current direction when for measurement, from most when having carried out 2 measurements, judging the 1st time
Measured value R1 whether the measured value R2 small (S14) than the 2nd time, be judged as the 1st measured value of the measured value R1 than the 2nd time
In the case that R2 is small, switches the current direction (S16) of current direction when should use the 1st measurement, be not judged
Not change current direction in the 1st lesser situation of measured value R1, in other words, electric current when the 2nd measurement is maintained
Direction carries out later measurement.That is, with the measurement of the smaller side of the value of the difference of the deviation permissible range among 2 measured values
The current direction when measurement of value carries out the 3rd later measurement.If alternately switching sense of current on one side to each measurement
One planar survey, although then measured value constantly slowly converges to specified value, biggish measured value and lesser measured value are handed over
Alternately measure.Therefore, the time is needed until measured value is threshold value or less, but the inspection method by being set as present embodiment,
Measured value when earlier with regard on the basis of value R0 or less.
Fig. 3 A and Fig. 3 B are to be set as pendulous frequency n 10 times, using measurement repeatedly caused by measured value variation as
The figure of curve.Fig. 3 A indicates the big situation of the 1st measured value of the measured value than the 2nd time, and Fig. 3 B indicates the 2nd measured value ratio
The big situation of 1st measured value.In addition, dotted line all indicates alternately to change electric current to each measurement one side in two figures
The case where one planar survey of direction.Same as present embodiment, solid line indicates to switch electricity in initial measurement and the 2nd measurement
Flow direction, but after the 3rd time, among the measured value for measuring the 1st time and the 2nd measured value lesser measured value,
The case where current direction when deviateing the measured value of the smaller side of value of the difference of permissible range measures.The upper segment table of each figure
Show the variation of the current direction in the case where checking when alternately switching current direction, lower section indicates present embodiment
The variation of the current direction of inspection method.
In the inspection method of present embodiment, since the 2nd time in the example shown in Fig. 3 A measured value is than the 1st time
Measured value is small, so identical current direction (- direction) carries out the 3rd later measurement in the measurement with the 2nd time.In Fig. 3 B
Shown in example, the measured value due to the 1st measured value than the 2nd time is small, so identical electric current when with the 1st measurement
Direction (+direction) carries out the 3rd later measurement.
As shown in these Fig. 3 A and Fig. 3 B, the case where alternately switching one planar survey of current direction on one side is measured with to each
(with situation shown in dotted line) is compared, it is known that the measured value until more initial 2 times deviates allowing for measured value using measuring
The current direction when measured value of the smaller side of the value of the difference of range, one checked later with the current direction streaming current
Side's (the case where being indicated with solid line) is lower than threshold value R0 when earlier (in the case where Fig. 3 A and Fig. 3 B, the measurement of the 5th).
By the way, Fig. 4 expression does not change current direction completely, and (shown in Fig. 4 in identical direction from initially
In example+direction) in flow through the variation of electric current and the measured value in the case where the identical conductive pattern of repeated measurement.Even if at this
In the case of, pendulous frequency more increases, and measured value is smaller, but the time is needed until threshold value R0 or less.
In this way, by repeated measurement, can reduce the contact condition for checking probe 13 in the checking of circuit substrate
Deng influence, accurately measure the resistance value of conductive pattern 2, in this case, switching electric current direction measures initial 2 times,
By measuring among the 1st measured value and the 2nd measured value and permissible range (threshold value) the lesser measurement of difference
Current direction when value can reach threshold value R0 hereinafter, can shorten inspection to measuring after the 3rd time when earlier
Time.
Further more, in the foregoing embodiment, as substrate inspecting method and base board checking device of the invention, suitable for making
The both ends for checking probe contact conductive pattern check the checking of broken string of conductive pattern etc., but make to check that probe connects
An other conductive pattern is touched, checking in the insulation inspection of the state of insulation between conductive pattern can also be applied the present invention.
Fig. 5 and Fig. 6 indicates the present invention that suitable for the 2nd embodiment checked that insulate, Fig. 5 is for the base checked that insulate
The flow chart of plate inspection method, Fig. 6 are the system block diagrams of base board checking device.
In the base board checking device 11 ' of the 2nd embodiment, replace the base board checking device 11 of the 1st embodiment
DC current source 12 and be equipped with DC voltage source 12, replace potentiometric detection unit 15 and be equipped with current potential and current detecting unit 15 '.
Moreover, its structure is detected and is visited in the inspection for being respectively contacted two conductive patterns 2 by current potential and current detecting unit 15 '
The current potential and electric current checked between probe 13 when being applied with voltage from DC voltage source 12 ' between needle 13.Other structures, in addition to correspondence
In the part that these DC voltage sources 12 ', current potential and current detecting unit 15 ' are changed (in aftermentioned insulation inspecting method
Illustrate) other than, the base board checking device 11 with the 1st embodiment is likewise, adding same label to common ground and omitting
Explanation.
In the case where the insulation for being carried out circuit substrate 1 using the base board checking device 11 ' is checked, firstly, passing through switching
Switch 14 is set in the voltage (and sense of current by applying voltage flowing) (S1 ') applied between conductive pattern 2.It connects
, pendulous frequency i is set as 1 (S2), is connected by the way that switch 14 will be switched, applies voltage (electric current) between checking probe 13
(S3′).If being applied defined voltage between checking two conductive patterns 2 that probe 13 contacts, the current potential and electricity between the pattern
It flows (flowing to the electric current of low potential side from hot side) and (S4 ') is detected by current potential and current detecting unit 15 ', in the current potential and electricity
After the detection of stream, stop the application (S5 ') of voltage.Then, according to the current potential and electric current come operation resistance value (measured value Ri)
(S6)。
In the case where the insulation checks, substrate is the measured value that can be obtained in defined permissible range in normal situation
(resistance value).If the threshold value of the lower limit of the permissible range is set as Ra, the threshold value of the upper limit is set as Rb, then substrate is normal feelings
Ra≤Ri≤Rb under condition.Therefore, the threshold value Ra of the upper limit and the threshold value Rb of lower limit are preset, judges whether measured value Ri enters
The permissible range (S7 '), in the case where being judged as entering permissible range (Ra≤Ri≤Rb) as qualification determination (S8).
After, each step until from S9 to S15, is likewise, in S15 with the case where 1 embodiment above-mentioned
By pendulous frequency i count increase, again repeatedly from S3 ' the step of.
In insulation inspection, make to check that probe 13 is respectively contacted two conductive patterns 2, by crossing over these conductor figures
Case 2 applies voltage, checks the state of insulation between conductive pattern 2.Further, since apply voltage from DC voltage source 12 ', so
In the step of current direction of S12 and S16 switches, the application direction by switching voltage is set as to switch the electric current of flowing
Direction.That is, applying voltage in insulation inspection, measurement flows to the electric current of low potential side from hot side, is changed using passing through
The sense of current in the application direction of the voltage, flowing changes to be checked.
In insulation inspection, range (Ra≤Ri of the threshold value Ra of the upper limit and the threshold value Rb of lower limit are also entered in measured value
≤ Rb) in the case where be determined as qualification, in the case where not being judged as entering the permissible range, in the 1st measurement and
Change the direction of voltage in 2nd measurement to measure, to measure lesser measured value among the two, that is, deviate and allow model
The sense of current flowed when the measured value of the smaller side of the value for the difference enclosed carries out later measurement.
If the resistivity dependent on the material being arranged between parallel conductive pattern is set as ρ, by (space) between conductive pattern
Length be set as L, the sidewall area of the conductive pattern between conductive pattern is set as A, then the insulated electro between parallel conductive pattern
Resistance value Rx is indicated with Rx=ρ L/A.
The threshold value Ra of the upper limit above-mentioned and threshold value Rb of lower limit is it is also contemplated that the deviation of L, A, ρ determine.Alternatively, tired
In measured value in product insulation inspection, it can also be determined from statistical analysis.
Fig. 7 A and Fig. 7 B are the curve graphs for indicating the passage of the measured value in insulation inspection, and being will be with the 2nd embodiment
Insulation inspecting method has checked the case where circuit substrate and measures when alternately switching current direction to roadbed each
Plate carry out insulation check the case where compare, show the curve graph of the relationship between pendulous frequency and measured value.Fig. 7 A and Fig. 7 B
All it is the 2nd measured value value small for the measured value than the 1st time, but because of the influence of contact resistance etc., but shows and compare threshold value
(Ra, Rb) high resistance value.Moreover, in fig. 7, by with the 2nd time small current direction of measured value, measure deviation
Current direction when small the 2nd measured value of measured value of the value of the difference of permissible range than the 1st time carries out repeated measurement, measurement
Value is converged in the range of the threshold value Rb of the upper limit and threshold value Ra of lower limit, and as in permissible range, state of insulation is judged as good
It is good.In the case where alternately switching one planar survey of current direction on one side, shown in dotted line, needed until reaching in permissible range
Want the time.
On the other hand, in figure 7b, indicate that short circuit occurs and has the substrate of defective insulation to carry out insulation inspection between conductive pattern
The example looked into.It is immediately short-circuit electricity after the obstacle of the stage contact resistance at measurement initial stage etc. is eliminated in the case where Fig. 7 B
Resistance value (resistance value lower than the threshold value Ra of lower limit), is determined as defective insulation.
The insulation check in the case where, also with checking the case where it is same, by using the measured value for measuring the 1st time
With when among the 2nd measured value, lesser measured value, measure and deviate the survey of the smaller side of value of difference of permissible range
Current direction when magnitude carries out the 3rd later measurement, and qualified or not judgement can be carried out in the stage earlier.
The permissible range of the measured value in the case where checking in 1st embodiment above-mentioned, uses a threshold value
Judge, so-called measured value refers to that measured value is threshold value or less in permissible range.On the other hand, the insulation of the 2nd embodiment
Range in the case of inspection is the range between the threshold value of the upper limit and the threshold value of lower limit, and so-called measured value is in permissible range
Refer to measured value between the threshold value of the upper limit and the threshold value of lower limit.
Further more, the threshold value of the upper limit and the threshold value of lower limit can also be set in the case where checking, enter in measured value
It is judged as qualified product in the case where between the threshold value of the upper limit and the threshold value of lower limit.
Further more, whichever embodiment, all calculates resistance value according to the current potential and electric current that check between probe 13, by this
Resistance value decision circuit substrate it is qualified or not, but can also be detected according between checking probe 13 for example in the 1st embodiment
The value of current potential out itself is qualified or not to determine, in the present invention, is used as electrical characteristics value comprising these current potentials and resistance value etc..
Label declaration
1... circuit substrate, 2... conductive pattern, 11,11 ' ... base board checking devices, 12... DC current source,
12 ' ... DC voltage sources, 13... check probe, 14... switching switch (switching part), 15... potentiometric detection unit,
15 ' ... current potentials and current detecting unit, 16... control unit, 17... display unit, 23... condition setting unit, 24...
Check judging unit, 25... repetitive control unit, 26... current direction control unit, 27... communication unit
Claims (4)
1. a kind of substrate inspecting method, the conductive pattern formed on to circuit substrate, based on the electricity flowed through by checking probe
Flow measurement electrical characteristics value, and the measured value based on the electrical characteristics value determines the qualified or not inspecting substrate side of the circuit substrate
In method, comprising the following steps:
In the case where the 1st measured value deviates permissible range, changes and the 2nd is carried out to the sense of current for checking probe
Secondary measurement,
In the case where the 2nd measured value deviates the permissible range, to measure the 1st measured value and described
The sense of current when measured value of the smaller side of difference of deviation permissible range among the 2nd measured value carry out the 3rd time with
Measurement afterwards.
2. substrate inspecting method as described in claim 1,
It is determined as qualification in the case where the measured value is in the permissible range, in the case where not being judged as qualification
Measurement is repeated, is determined as in the case where pendulous frequency has reached the upper limit unqualified.
3. a kind of base board checking device, the electric current that flows through in the conductive pattern formed on based on circuit substrate measures electrical characteristics
Value, and the measured value based on the electrical characteristics value determines in the qualified or not base board checking device of the circuit substrate, comprising:
A pair checks probe, touches the conductive pattern；
Switching part, for switching in the sense of current flowed through between the inspection probe；
It checks judging unit, the measured value and predetermined threshold value, is the feelings in permissible range in the measured value
Under condition, the circuit substrate is determined as qualification；And
Current direction control unit, in the case where the 1st measured value is not determined as qualification by the inspection judging unit,
The switching part is controlled, so that change to the sense of current for checking probe, it is not described in the 2nd measured value
In the case where checking that judging unit is determined as qualification, the switching part is controlled, so that the sense of current for checking probe
For the difference smaller side for measuring the deviation permissible range among the 1st measured value and the 2nd measured value
Sense of current when measured value.
4. base board checking device as claimed in claim 3, further includes:
Condition setting unit sets the upper limit of pendulous frequency；And
Repetitive control unit, in the case where not being determined as qualification by the inspection judging unit, be repeated measurement until
Until the pendulous frequency reaches the upper limit,
The inspection judging unit is not being judged as being determined as in the case that the qualified and described pendulous frequency has reached the upper limit
It is unqualified.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2016-050233 | 2016-03-14 | ||
| JP2016050233A JP6633949B2 (en) | 2016-03-14 | 2016-03-14 | Substrate inspection device and substrate inspection method |
Publications (2)
| Publication Number | Publication Date |
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| CN107192913A CN107192913A (en) | 2017-09-22 |
| CN107192913B true CN107192913B (en) | 2019-11-12 |
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| CN201710144128.9A Active CN107192913B (en) | 2016-03-14 | 2017-03-10 | Base board checking device and substrate inspecting method |
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| Country | Link |
|---|---|
| JP (1) | JP6633949B2 (en) |
| KR (1) | KR101961536B1 (en) |
| CN (1) | CN107192913B (en) |
| TW (1) | TWI621863B (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JP6965110B2 (en) * | 2017-11-09 | 2021-11-10 | 日置電機株式会社 | Inspection equipment and inspection method |
| JP7517680B2 (en) * | 2020-04-15 | 2024-07-17 | ヤマハファインテック株式会社 | Inspection device and inspection method |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2723382B2 (en) * | 1983-06-13 | 1998-03-09 | ヒューレット・パッカード・カンパニー | Circuit test equipment |
| EP0919820A2 (en) * | 1997-10-30 | 1999-06-02 | Nidec-Read Corporation | Circuit board testing apparatus and method |
| JP2004101275A (en) * | 2002-09-06 | 2004-04-02 | Nidec-Read Corp | Substrate inspection apparatus and substrate inspection method |
| CN103257285A (en) * | 2012-02-21 | 2013-08-21 | 日本电产理德株式会社 | Terminal discrimination method and terminal discrimination device of built-in substrate |
| JP2013257259A (en) * | 2012-06-14 | 2013-12-26 | Hioki Ee Corp | Resistance measuring device and circuit board inspection device |
| CN104950182A (en) * | 2014-03-26 | 2015-09-30 | 日本电产理德股份有限公司 | Resistance measurement device, substrate inspection device, and inspection method and maintenance method |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2002086520A1 (en) * | 2001-04-19 | 2002-10-31 | Oht Inc. | Inspection apparatus and inspection method |
| JP2003098213A (en) * | 2001-09-20 | 2003-04-03 | Oht Inc | Inspection device and inspection method |
| JP4919787B2 (en) * | 2006-12-15 | 2012-04-18 | 日置電機株式会社 | measuring device |
| DE112008002615B4 (en) * | 2007-10-10 | 2015-02-19 | Cascade Microtech, Inc. | Method for testing a test substrate under defined thermal conditions and thermally conditionable prober |
| CN101799516A (en) * | 2010-02-24 | 2010-08-11 | 海洋王照明科技股份有限公司 | Circuit board detection device |
-
2016
- 2016-03-14 JP JP2016050233A patent/JP6633949B2/en active Active
-
2017
- 2017-02-21 TW TW106105795A patent/TWI621863B/en active
- 2017-03-07 KR KR1020170028662A patent/KR101961536B1/en active IP Right Grant
- 2017-03-10 CN CN201710144128.9A patent/CN107192913B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2723382B2 (en) * | 1983-06-13 | 1998-03-09 | ヒューレット・パッカード・カンパニー | Circuit test equipment |
| EP0919820A2 (en) * | 1997-10-30 | 1999-06-02 | Nidec-Read Corporation | Circuit board testing apparatus and method |
| JP2004101275A (en) * | 2002-09-06 | 2004-04-02 | Nidec-Read Corp | Substrate inspection apparatus and substrate inspection method |
| CN103257285A (en) * | 2012-02-21 | 2013-08-21 | 日本电产理德株式会社 | Terminal discrimination method and terminal discrimination device of built-in substrate |
| JP2013257259A (en) * | 2012-06-14 | 2013-12-26 | Hioki Ee Corp | Resistance measuring device and circuit board inspection device |
| CN104950182A (en) * | 2014-03-26 | 2015-09-30 | 日本电产理德股份有限公司 | Resistance measurement device, substrate inspection device, and inspection method and maintenance method |
Also Published As
| Publication number | Publication date |
|---|---|
| TWI621863B (en) | 2018-04-21 |
| JP2017166875A (en) | 2017-09-21 |
| CN107192913A (en) | 2017-09-22 |
| JP6633949B2 (en) | 2020-01-22 |
| TW201732309A (en) | 2017-09-16 |
| KR20170106917A (en) | 2017-09-22 |
| KR101961536B1 (en) | 2019-03-22 |
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