CN107192536A - One kind is without burnt conjugated optical channels MTF test devices and method of testing - Google Patents
One kind is without burnt conjugated optical channels MTF test devices and method of testing Download PDFInfo
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- CN107192536A CN107192536A CN201710255802.0A CN201710255802A CN107192536A CN 107192536 A CN107192536 A CN 107192536A CN 201710255802 A CN201710255802 A CN 201710255802A CN 107192536 A CN107192536 A CN 107192536A
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- rotary table
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
- G01M11/0292—Testing optical properties of objectives by measuring the optical modulation transfer function
Abstract
The invention discloses one kind without burnt conjugated optical channels MTF test devices, including positioned at the same target light source turned back on optical axis, optical filter, parabola collimating mirror, turn back level crossing, standard lens and as analyzer, it is described as analyzer and standard lens are arranged on can be on fixed pivot left-right rotation rotary table, the first aperture and second orifice diaphragm are disposed with front of standard lens, the center of circle of first aperture and second orifice diaphragm is on the axis of standard lens, first aperture is located at the entrance pupil of standard lens, the bore of first aperture is the mm of φ 2, center and the entrance pupil center superposition of standard lens, the bore of second orifice diaphragm is the mm of φ 5, at 100 150mm in front of standard lens entrance pupil center;Also disclose its method of testing, the present invention without burnt conjugated optical channels MTF test devices by building, solve and participate in whole novel optical imaging system images without burnt light path, but the problem of image quality evaluation is directly used in without Common Testing device, be adapted to be operated in visible ray, medium-wave infrared and long wave infrared region without burnt light path system.
Description
Technical field
The invention belongs to optical metrology and measurement field, and in particular to a kind of non-focus optical system MTF(Optical modulation is transmitted
Function)Test device, and its method of testing.
Background technology
With the fast development of electro-optical equipment, it is high-precision, multi-functional, complicate novel optical imaging system meet the tendency of and
It is raw.Imaging class system is divided by light channel structure, generally includes infinity conjugated optical channels, limited remote conjugated optical channels and without Jiao's conjugation
Three kinds of light path, wherein infinity, limited remote two kinds of conjugated optical channels structures directly can be imaged in its image space, and external ripe development is high-precision
Spend the producer of MTF test equipments such as:U.S. OPTIKOS, Germany TRIOPTICS and Israel CI SYSTEMS, have complete
Equipment is directly used in test, and the country has no professional production producer.
Image planes without burnt conjugated optical channels structure are located at infinite point, are not imaged directly in its image space, MTF method of testings
It is totally different from infinity, limited remote two types.Though it is not imaged directly without burnt conjugated optical channels, usually as new light
The subsystem for learning imaging system is placed in the front end of whole system, and participates in the distribution of system geometrical aberration, and it debugs the direct shadow of quality
That rings whole system is ultimately imaged quality, it is therefore necessary to which measure the MTF without the burnt sub- imaging optical path of conjugation is with objective evaluation the whole series
The picture matter of system.
Be limited by built without burnt conjugated optical channels MTF test benchmarks, that testing process complexity and measuring accuracy ensure etc. is all
Multifactor influence, the MTF tests without burnt conjugated optical channels are always a technical barrier, are also to be difficult in assembling process
Test.Current foreign vendor only whether there is burnt conjugated optical channels as the sketch of matter testing scheme, there are no method of testing and is seen in report,
Directly test can not be completed by buying existing equipment.
The content of the invention
It is a primary object of the present invention to the deficiency according to existing measuring technology and means of testing, by without burnt conjugate beam
The analysis of road MTF test philosophies, has built one kind without burnt conjugated optical channels MTF test devices, can be in assembling, test phase handle comprehensively
The picture matter without burnt conjugated optical channels is held, is assembled as the high novel optical imaging system of good, reliability of fine quality.
The technical solution adopted for the present invention to solve the technical problems is:One kind is without burnt conjugated optical channels MTF test devices, bag
Include positioned at the same target light source turned back on optical axis, optical filter, parabola collimating mirror, level crossing of turning back, standard lens and picture
Analyzer, it is described as analyzer and standard lens are arranged on can be on fixed pivot left-right rotation rotary table, standard mirror
Head front is disposed with the first aperture and second orifice diaphragm, and the center of circle of the first aperture and second orifice diaphragm exists
On the axis of standard lens, the first aperture is located at the entrance pupil of standard lens, and the bore of the first aperture is the mm of φ 2,
Center and the entrance pupil center superposition of standard lens, the bore of second orifice diaphragm is the mm of φ 5, positioned at standard lens entrance pupil center
At the 100-150mm of front.
Described is a kind of without burnt conjugated optical channels MTF test devices, and its standard lens is arranged on flexible abutment sleeve.
Described is a kind of without burnt conjugated optical channels MTF test devices, and its standard lens is infinity conjugate optical system structure.
Described is a kind of without burnt conjugated optical channels MTF test devices, and its target light source is the alternative light source of embedded circular hole targets.
It is described a kind of without burnt conjugated optical channels MTF test devices, centered on its first aperture and second orifice diaphragm
The circular of saturating circular hole, target surface is black.
Described a kind of without burnt conjugated optical channels MTF test devices, it is arranged on as analyzer and standard lens by guide rail
On rotary table, described rotary table anglec of rotation > ± 90 °.
The second object of the present invention is that there is provided a kind of non-focus optical system MTF test sides according to the deficiencies in the prior art
Method.
a)The fixation of standard lens position
Standard lens is put in rotary table, makes the visible collimated light beam that target light source is sent successively through parabola collimating mirror and folding
Turn level crossing reflection, then the second orifice diaphragm through the mm of φ 5 and the mm of φ 2 the first aperture are transmitted, and control to rotate work
Make platform drive standard lens and as analyzer around fulcrum respectively along it is suitable, rotate counterclockwise appropriate low-angle, observation incides first
The mm visible light spots of φ 5 on aperture move left and right situation, then front, rear, left and right four-way micro-shifting standard lens, until
Untill hot spot is not moved when rotary table is rotated, last fixed standard camera lens;
b)As the fixation of analyzer
Moved along front, rear, left and right four-way as analyzer finds the optimum image plane of standard lens, and by measured value and known standard
Value is compared, and confirms to fix behind optimal focal plane position as analyzer, records as the zero point position of analyzer;
c)The tested fixation without burnt light path position
Place tested without burnt light path, the flexible abutment sleeve of centre insertion, it is ensured that tested without burnt light path in the front of rotary table
Emergent pupil, the entrance pupil of optical axis and standard lens, optical axis match, it is fixed tested without burnt light path, then extract flexible abutment sleeve;
d)The test of angle enlargement ratio
The regulation position that level crossing and rotary table be presently in of turning back is zero-bit, and turning angle is respectively defined as、, when
Level crossing of turning back rotates smallerDuring angle value, according to it is tested without burnt light channel structure Type Control rotary table along or reverse turn
It is dynamicAngle, until receiving Energy maximum value again as analyzer, by angle enlargement ratio formulaAdjustIt is worth and sets
Whether evaluation is consistent;
e)Carry out MTF tests
Tested combined without burnt light path with standard lens is equivalent to infinity conjugated optical channels structure, 0 w visual fields MTF on axle is carried out and surveys
Examination, test result unit is Lp/mrad;
The level crossing that will turn back is rotatedAngle,Value be Zhou Wai half field-of-views respective corners angle value half, rotary table according to
FormulaRotated after calculatingAngle, carries out the outer 1.0 w visual fields MTF tests of outer 0.7 w of axle, axle, and test result unit is
Lp/mrad;
Carry out mutually converting between Lp/mrad and Lp/mm units according to following formula, show that test result unit is
Lp/mm's is tested without 1.0 w visual fields MTF test results outside 0.7 w outside 0 w visual fields on burnt optical path axis, axle, axle:In formula:For standard lens focal length, unit mm.
Main advantages of the present invention are:
1, the present invention is by being built without burnt conjugated optical channels MTF test devices, solving and participating in whole new light without burnt light path
Imaging system images are learned, the problem of image quality evaluation is but directly used in without Common Testing device, is adapted to be operated in visible ray, medium wave
Infrared and long wave infrared region without burnt light path system;
2, by the analysis to test philosophy, a whole set of testing process is subdivided into five steps, 0 w visual fields, axle on axle is realized
The outer 1.0 w visual fields MTF of outer 0.7 w, axle test, it is ensured that the correctness of measuring accuracy.
Brief description of the drawings
Fig. 1 is the schematic diagram of apparatus of the present invention;
Fig. 2 is the first apertures of mm of φ 2 of the present invention, the mm second orifice diaphragm schematic diagrames of φ 5;
Fig. 3 is the principle adjustment figure that standard lens position of the present invention is fixed;
After Fig. 4 is the flexible abutment sleeve of present invention insertion, the schematic diagram fixed without burnt conjugated optical channels position;
Fig. 5 is that turn back level crossing and rotary table of the present invention coordinates and rotated, and carries out outer 0.7 w, 1.0 w visual fields the MTF test of axle
Schematic diagram;
Fig. 6 is the test result of 0 w MTF on axle of the present invention(Unit is Lp/mrad);
Fig. 7 is 0.7 w MTF of the invention test result(Unit is Lp/mrad);
Fig. 8 is 1.0 w MTF of the invention test result(Unit is Lp/mrad);
Fig. 9 is the test result after 0 w MTF conversions unit on axle of the present invention;
Figure 10 is that 0.7 w MTF of the invention convert the test result after unit;
Figure 11 is that 1.0 w MTF of the invention convert the test result after unit.
Each reference is:1-target light source, 2-optical filter, 3-parabola collimating mirror, 4-level crossing of turning back, 5-
Rotary table, 6-as analyzer, 7-standard lens, the 8-the first aperture, 9-second orifice diaphragm, 10-flexible fixed
Position sleeve.
Embodiment
The present invention is described in further detail below in conjunction with the accompanying drawings.
Referring to figs. 1 to shown in Fig. 5, the invention discloses one kind without burnt conjugated optical channels MTF test devices, conventional nothing is solved
The whole optical system imaging of focus optical system participation, the problem that can not but test, including positioned at the same target turned back on optical axis
Mark light source 1, optical filter 2, parabola collimating mirror 3, level crossing 4 of turning back, standard lens 7 and as analyzer 6, described picture analyzer
6 and standard lens 7 be arranged on can be on fixed pivot left-right rotation rotary table 5, the front of standard lens 7 is disposed with the
Axle of the center of circle of one aperture 8 and second orifice diaphragm 9, the first aperture 8 and second orifice diaphragm 9 in standard lens 7
On line, the first aperture 8 is located at the entrance pupil of standard lens 7, and the bore of the first aperture 8 is the mm of φ 2, center and mark
The entrance pupil center superposition of quasi- camera lens 7, the bore of second orifice diaphragm 9 is the mm of φ 5, in front of the entrance pupil center of standard lens 7
At 100-150mm.The target light source 1 of this patent, optical filter 2, parabola collimating mirror 3, level crossing 4 of turning back, rotary table 5,
As analyzer 6 is that foreign countries' high accuracy MTF test equipments have component by oneself, belong to universal component;Selected optical filter 2 and as analysis
Instrument 6 is replaceable, should be adapted with tested without burnt light path service band.
Further, described standard lens 7 is arranged on flexible abutment sleeve 10, and the stack shell band for the abutment sleeve 10 that stretches is carved
Degree, internal scalable, an end interface is matched with the entrance pupil of standard lens 7, another end interface and the tested emergent pupil without burnt light path
Match somebody with somebody;Standard lens 7 be infinity conjugate optical system structure, entrance pupil be located at the first lens on, focal length with without burnt conjugated optical channels after
The preferable lens focus of side's design is consistent, and object space bore is more than without burnt conjugated optical channels image space emergent pupil bore, and standard lens is on axle
And mtf value reaches diffraction limit in the range of paraxial ± 3 °, and there are standard comparison data, to eliminate as much as standard lens to without Jiao
The aberration harm that subsystem comes as matter calibration tape;In addition the bore of parabola collimating mirror 3 and level crossing 4 of turning back is more than tested without Jiao
Light path bore, it is tested to look in the distance structure without burnt light path for Ke Pule types or Galilean type is looked in the distance optical texture.
Further, described target light source 1 is the alternative light source of embedded circular hole targets, is operated in visible ray, medium-wave infrared
And long wave infrared region;The circular of saturating circular hole centered on the first described aperture 8 and second orifice diaphragm 9, target surface is
Black.
Further, described picture analyzer 6 and standard lens 7 are arranged on rotary table 5 by guide rail, described
Anglec of rotation > ± 90 ° of rotary table 5.
The present invention is comprised the following steps based on the method for testing without burnt conjugated optical channels MTF test devices
The fixation of standard lens position
Standard lens 7 is put in rotary table 5, the visible light wave range light source of target light source 1 is opened, makes what target light source 1 was sent
A branch of visible collimated light beam of heavy caliber reflects through parabola collimating mirror 3 and level crossing 4 of turning back successively, then second through the mm of φ 5 is small
Hole diaphragm 9 and the mm of φ 2 the first aperture 8 are transmitted, and control rotary table 5 to drive standard lens 7 and as analyzer 6
Around fulcrum respectively along it is suitable, rotate counterclockwise appropriate low-angle, the mm visible ray light of φ 5 on the first aperture 8 is incided in observation
Spot moves left and right situation, if hot spot is moved left and right with the rotation of rotary table 5, represent standard lens 7 entrance pupil not with rotation
Revolving worktable 5 rotates overlapping of axles, then front, rear, left and right four-way micro-shifting standard lens 7, and by rotary table 5 repeatedly
Rotate checking visible light spot moves left and right situation, untill hot spot is not moved when rotary table 5 is rotated, and eliminates
The Beam Walk problems that the outer visual field collimated light beam calibration tape of axle comes, last fixed standard camera lens 7.
Fixation as analyzer along optical axis direction position
Moved along front, rear, left and right four-way as analyzer 6 finds the optimum image plane of standard lens 7, and by measured value and known mark
Quasi- value is compared, and confirms to fix as analyzer 6 behind optimal focal plane position)Record is as the zero point position of analyzer 6;To be comprehensive
True MTF measured value of the reflection without burnt conjugated optical channels system, as analyzer should strictly be fixed on standard mirror during follow-up test
The optimum image plane position of head.
The tested fixation without burnt light path position
Independently place tested without burnt light path, the flexible abutment sleeve 10 of centre insertion, it is ensured that tested nothing in the front of rotary table 5
Emergent pupil, the entrance pupil of optical axis and standard lens 7, the optical axis of burnt light path match, and fixed tested without burnt light path, it is flexible fixed then to extract
Position sleeve 10.
The test of angle enlargement ratio
The regulation position that level crossing 4 and rotary table 5 be presently in of turning back is zero-bit, and turning angle is respectively defined as、,
As analyzer energy maximum during zero-bit, now、, when turning back, level crossing 4 rotates smallerDuring angle value, according to quilt
Survey without burnt light channel structure Type Control rotary table 5 along or backwards rotationAngle, until receiving energy again as analyzer 6
Maximum is measured, by angle enlargement ratio formulaAdjustWhether value is consistent with design load;If, for Ke Pule type light
Line structure, works as design loadWhen, then, now as analyzer is acted in accordance with to rotationTimes;For Galilean type light path knot
Structure, works as design loadWhen, then, now as analyzer is changed into backwards rotationTimes.Angle enlargement ratioNumerical value is direct
The depth of parallelism without burnt light path incident beam and outgoing beam is influenceed, if multiplier valueIt is not inconsistent with design objective, should be according to drawing weight
Empty, focusing to theoretical installation site is drawn in the inclination of new inspection optical element, the eccentric and center size of space, or adjustment, only
When angle enlargement ratioWhen meeting optical design requirements index, MTF tests just can most reflect the quality without burnt light path imaging quality.
Carry out MTF tests
Tested combined without burnt light path with standard lens 7 is equivalent to infinity conjugated optical channels structure, 0 w visual fields MTF on axle is carried out
Test, test result unit is Lp/mrad.
The level crossing 4 that will turn back is rotatedAngle,Value is the half of Zhou Wai half field-of-views respective corners angle value, rotary table
5 according to formulaRotated after calculatingAngle, carries out the outer 1.0 w visual fields MTF tests of outer 0.7 w of axle, axle, test result
Unit is Lp/mrad.
Carry out mutually converting between Lp/mrad and Lp/mm units according to following formula, draw test result unit
For the tested without 1.0 w visual fields MTF test results outside 0.7 w outside 0 w visual fields on burnt optical path axis, axle, axle of Lp/mm:In formula:For standard lens focal length, unit mm.
When carrying out MTF tests, the test pattern of traditional infinity conjugated optical channels is Infinity, the statement of spatial frequency unit
For Lp/mm, infinity conjugated optical channels test pattern is Afocal, and spatial frequency unit is expressed as Lp/mrad, finally should be according to upper
State formula mutually convert between Lp/mrad and Lp/mm units, it is the tested without burnt light path of Lp/mm to draw test result unit
0 w visual fields, outer 0.7 w of axle, the outer 1.0 w visual fields MTF test results of axle on axle.
So that focal length is 50 mm standard lens as an example, the Lp/mm values corresponding to 0~0.8 Lp/mrad see the table below 1.
Using representative a set of wavelength as 3.7~4.8 μm, F is 2, and angle enlargement ratio is 6.5XMedium-wave infrared without
Exemplified by burnt conjugated optical channels test, test result is as shown in Fig. 6, Fig. 7, Fig. 8 and table 2, through the final test knot after the unit conversion of table 1
Fruit is as shown in Fig. 9, Figure 10, Figure 11.Test result shows:Without burnt light path in 16 Lp/mm, MTF >=0.49,0.7 w at 0 w
Locate MTF >=0.13 at MTF >=0.32,1.0 w, meet design objective.
The Lp/mrad of table 1 mutually converts the table of comparisons with Lp/mm units
The medium-wave infrared of table 2 is without burnt conjugated optical channels MTF test values
The above-described embodiments merely illustrate the principles and effects of the present invention, and the embodiment that part is used, for ability
For the those of ordinary skill in domain, without departing from the concept of the premise of the invention, various modifications and improvements can be made,
These belong to protection scope of the present invention.
Claims (7)
1. one kind is without burnt conjugated optical channels MTF test devices, it is characterised in that:Including positioned at the same target light turned back on optical axis
Source(1), optical filter(2), parabola collimating mirror(3), level crossing of turning back(4), standard lens(7)With picture analyzer(6), it is described
As analyzer(6)And standard lens(7)Being arranged on can be around fixed pivot left-right rotation rotary table(5)On, standard lens(7)
Front is disposed with the first aperture(8)With second orifice diaphragm(9), the first aperture(8)With second orifice diaphragm
(9)The center of circle in standard lens(7)Axis on, the first aperture(8)Positioned at standard lens(7)Entrance pupil at, first is small
Hole diaphragm(8)Bore be the mm of φ 2, center and standard lens(7)Entrance pupil center superposition, second orifice diaphragm(9)Bore
For the mm of φ 5, positioned at standard lens(7)In front of entrance pupil center at 100-150mm.
2. one kind according to claim 1 is without burnt conjugated optical channels MTF test devices, it is characterised in that described standard mirror
Head(7)Installed in flexible abutment sleeve(10)On.
3. one kind according to claim 2 is without burnt conjugated optical channels MTF test devices, it is characterised in that described standard mirror
Head(7)For infinity conjugate optical system structure.
4. one kind according to Claims 2 or 3 is without burnt conjugated optical channels MTF test devices, it is characterised in that described target
Light source(1)To embed the alternative light source of circular hole targets.
5. one kind according to Claims 2 or 3 is without burnt conjugated optical channels MTF test devices, it is characterised in that described first
Aperture(8)With second orifice diaphragm(9)Centered on thoroughly circular hole circular, target surface is black.
6. one kind according to Claims 2 or 3 is without burnt conjugated optical channels MTF test devices, it is characterised in that described picture point
Analyzer(6)And standard lens(7)Rotary table is arranged on by guide rail(5)On, described rotary table(5)The anglec of rotation
> ± 90 °.
7. a kind of method of testing without burnt conjugated optical channels MTF test devices as claimed in claim 1, it is characterised in that:Including such as
Lower step
a)The fixation of standard lens position
Put standard lens(7)In rotary table(5), make target light source(1)The visible collimated light beam sent is successively through parabola
Collimating mirror(3)With level crossing of turning back(4)Reflection, then the second orifice diaphragm through the mm of φ 5(9)With the mm of φ 2 the first aperture light
Door screen(8)Transmission, and control rotary table(5)Drive standard lens(7)With picture analyzer(6)Around fulcrum respectively along the suitable, inverse time
Pin rotates appropriate low-angle, and the first aperture is incided in observation(8)On the mm visible light spots of φ 5 move left and right situation, so
Front, rear, left and right four-way micro-shifting standard lens afterwards(7), until rotary table(5)Untill hot spot is not moved during rotation, most
Fixed standard camera lens afterwards(7);
b)As the fixation of analyzer
Moved along front, rear, left and right four-way as analyzer(6)Find standard lens(7)Optimum image plane, and by measured value with
Know that standard value is compared, confirm to fix as analyzer behind optimal focal plane position(6), record as analyzer(6)Zero point position
Put;
c)The tested fixation without burnt light path position
In rotary table(5)Front place tested without burnt light path, the flexible abutment sleeve of centre insertion(10), it is ensured that tested nothing
Emergent pupil, optical axis and the standard lens of burnt light path(7)Entrance pupil, optical axis match, it is fixed tested without burnt light path, then extract flexible
Abutment sleeve(10);
d)The test of angle enlargement ratio
Provide level crossing of turning back(4)And rotary table(5)The position being presently in is zero-bit, and turning angle is respectively defined as、, when level crossing of turning back(4)Rotate smallerDuring angle value, according to tested without burnt light channel structure Type Control rotary table(5)
Suitable or backwards rotationAngle, until as analyzer(6)Energy maximum value is received again, by angle enlargement ratio formulaAdjustWhether value is consistent with design load;
e)Carry out MTF tests
Will be tested without burnt light path and standard lens(7)Combination is equivalent to infinity conjugated optical channels structure, carries out 0 w visual fields on axle
MTF is tested, and test result unit is Lp/mrad;
To be turned back level crossing(4)RotateAngle,Value is the half of Zhou Wai half field-of-views respective corners angle value, rotary table(5)
According to formulaRotated after calculatingAngle, carries out the outer 1.0 w visual fields MTF tests of outer 0.7 w of axle, axle, test result list
Position is Lp/mrad;
Carry out mutually converting between Lp/mrad and Lp/mm units according to following formula, it is Lp/mm's to draw test result unit
It is tested without 1.0 w visual fields MTF test results outside 0.7 w outside 0 w visual fields on burnt optical path axis, axle, axle:
In formula:For standard lens focal length, unit mm.
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CN107782697A (en) * | 2017-09-27 | 2018-03-09 | 北京理工大学 | The confocal Infrared Lens element refractive index measurement method of broadband and device |
CN110186651A (en) * | 2018-02-23 | 2019-08-30 | 宁波舜宇车载光学技术有限公司 | MTF test equipment for camera lens |
CN110186651B (en) * | 2018-02-23 | 2021-08-03 | 宁波舜宇车载光学技术有限公司 | MTF test equipment for lens |
CN112304574A (en) * | 2020-09-22 | 2021-02-02 | 华中光电技术研究所(中国船舶重工集团公司第七一七研究所) | Image quality testing device and method for optical system with optical despin assembly |
CN112304574B (en) * | 2020-09-22 | 2022-11-01 | 华中光电技术研究所(中国船舶重工集团公司第七一七研究所) | Image quality testing device and method for optical system with optical despin assembly |
CN112683494A (en) * | 2020-12-03 | 2021-04-20 | 西安科佳光电科技有限公司 | Device and method for testing comprehensive performance parameters of optical lens |
CN116718356A (en) * | 2023-08-09 | 2023-09-08 | 浙江荷湖科技有限公司 | Testing method and device of finite far conjugate imaging system |
CN116718356B (en) * | 2023-08-09 | 2023-11-14 | 浙江荷湖科技有限公司 | Testing method and device of finite far conjugate imaging system |
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