CN107175467A - A kind of micro- deep trouth ultrasonic cavitation auxiliary milling polishing combined machining method and device - Google Patents
A kind of micro- deep trouth ultrasonic cavitation auxiliary milling polishing combined machining method and device Download PDFInfo
- Publication number
- CN107175467A CN107175467A CN201710388909.2A CN201710388909A CN107175467A CN 107175467 A CN107175467 A CN 107175467A CN 201710388909 A CN201710388909 A CN 201710388909A CN 107175467 A CN107175467 A CN 107175467A
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- micro
- ultrasonic
- abrasive material
- deep trouth
- milling
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23P—METAL-WORKING NOT OTHERWISE PROVIDED FOR; COMBINED OPERATIONS; UNIVERSAL MACHINE TOOLS
- B23P15/00—Making specific metal objects by operations not covered by a single other subclass or a group in this subclass
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23P—METAL-WORKING NOT OTHERWISE PROVIDED FOR; COMBINED OPERATIONS; UNIVERSAL MACHINE TOOLS
- B23P23/00—Machines or arrangements of machines for performing specified combinations of different metal-working operations not covered by a single other subclass
- B23P23/04—Machines or arrangements of machines for performing specified combinations of different metal-working operations not covered by a single other subclass for both machining and other metal-working operations
Abstract
The present invention discloses a kind of micro- deep trouth ultrasonic cavitation auxiliary milling polishing combined machining method and device, and fine milling cutter is arranged on milling spindle；By workpiece to be processed fixed placement in the bottom of gullet equipped with the abrasive material suspension containing micro- abrasive material, abrasive material suspension is set to cover workpiece, ultrasonic vibration of ultrasonic transducer is placed in the front portion of fine milling cutter direction of feed and its pose is adjusted by multi-DOF platform, apply axial ultrasonic to ticker by supersonic generator to vibrate, excite the ultrasound cavitation effect of abrasive material suspension while also so that micro- abrasive material mechanical oscillation.The microjet and shock wave produced by ultrasound cavitation effect washes away workpiece surface and micro- abrasive material vibrates the disposal molding Precision Machining that the polishing action produced realizes micro- deep trouth.
Description
Technical field
A kind of micro- deep trouth ultrasonic cavitation milling polishing combined machining method and device, belong to precision manufactureing field, specifically relate to
And a kind of micro- deep trouth disposable Precision Machining forming process and realize device.
Background technology
Micro- deep trouth part is widely used in the national important industry such as Aero-Space, automobile ship, microelectronics and field, such as
Fluid channel, diesel cylinder sleeve surface very low power texture, the micro slot array structure fringe of solar cell, use in aero-engine
Advanced-wide than deep trench micro structure array of feature etc. in having for advanced dynamic RAM, these have the zero of microflute
Part is generally that high temperature resistant, corrosion-resistant, hardness is high, high intensity difficult-to-machine material.With high-performance, new difficult-to-machine material it is continuous
Occur and parts are towards miniaturization, for the requirement on machining accuracy more and more higher of microflute, traditional milling process is
The crudy demand of microflute can not be met.
Micro- deep trouth width is small, depth-to-width ratio big, and extreme difficulties are brought to milling equipment and technique.Micro- deep trouth minuteness milling adds
In man-hour, due to fine milling cutter poor rigidity, milling tangential force is big, and cutter radial power is uneven, easily produces cutter flutter and point of a knife
Jumping phenomena, causes to be processed the size of groove, form accuracy reduction, simultaneously as micro- deep trouth depth-to-width ratio is big, chip removal is difficult, easily
Block, friction and scuffing between aggravation chip and cell wall easily produce the defect such as burr and crackle, have a strong impact on cutter
Life-span and groove surface quality；Traditional diamond-making technique needs individually carry out the processes such as grinding-polishing and entered again after Milling Process
One step improves its surface quality, therefore complex procedures are tediously long；Processing characteristic for above-mentioned micro- deep trouth is, it is necessary to traditional processing
Process is improved, milling scheme reasonable in design and device, realizes high efficiency, the high accuracy processing of micro- deep trouth.
The content of the invention
The characteristics of for micro- deep trouth Milling Process, in order to reduce surface spikes, extend cutter life, improve profound and subtle groove
Size shape precision and surface quality, improve processing efficiency and are applied to micro- deep trouth ultrasonic cavitation auxiliary milling polishing there is provided one kind
Combined machining method and device is realized, the fine precision milling one-shot forming of micro- deep trouth can be achieved in the invention.The technology is mainly special
Levy including：
(1) micro- deep trouth workpiece is placed on equipped with the abrasive material suspension for containing micro- abrasive material, makes workpiece and ultrasonic vibration
It is completely submerged in abrasive material suspension.Ultrasonic vibration is carried out to abrasive material suspension using ultrasonic vibration, mainly there are two effects：
On the one hand crumbled and fall using ultrasound cavitation effect bubble the microjet and strong shock wave of generation, wash away workpiece and tool surface,
Reduce the microtriche thorn of workpiece surface and the viscous bits on cutter and twine bits, so that improving the machined surface quality and cutter of micro- deep trouth makes
Use the life-span；Abrasive material in another aspect abrasive material suspension produces the mechanical oscillation of high-amplitude high frequency under ultrasonic vibration, constantly impact
The surface of very low power, plays a part of polishing, further improves crudy.
(2) ultrasonic vibration must assure that the front for being placed in fine milling cutter direction of feed, and in certain angle of inclination,
Ultrasonic vibration subheader portion ensures and groove certain distance, and the adjustment and fixation of ultrasonic vibration are realized for convenience, is devised a set of
The multi-DOF platform being made up of servo translation unit, pivot angle adjustment pair and revolute pair, ultrasonic vibration is flat by multiple degrees of freedom
Platform is fixed on support frame, can be realized ultrasonic vibration and cutter synchronizing moving, it is ensured that distance between the two, can be realized
The longer profound and subtle groove processing of length.
(3) ultrasonic transducer is made up of power supply, supersonic generator, power amplifier and ultrasonic vibration, ultrasonic vibration
Son applies ultrasonic vibration to the abrasive material suspension containing micro- abrasive material, and vibration frequency is more than 18kHz, direction of vibration and ultrasonic vibration
Axis direction it is consistent, ultrasonic vibration can be one or more arrangements.
(4) abrasive material suspension uses water-base cutting fluid, and abrasive species, granularity, concentration need to be fitted depending on concrete condition, and abrasive material is hard
Degree selection is more than workpiece material hardness and is less than cutter material hardness.
Specific technical scheme is as follows：
(1) fine milling cutter is loaded on milling spindle.
(2) workpiece to be processed is fixed on the bottom of gullet platform equipped with abrasive material suspension, makes abrasive material suspension
Water level exceedes workpiece height.
(3) the adjustment sub- position of ultrasonic vibration and posture, it is ensured that ultrasonic vibration subheader portion is located at fine milling cutter direction of feed
Front, and the axis of ultrasonic vibration has angle with fine milling cutter axis.
(4) ultrasonic vibration applies ultrasonic vibration to the abrasive material suspension containing micro- abrasive material, and vibration frequency is more than 18kHz,
Direction of vibration is consistent with the axis direction of ultrasonic vibration.
(5) from the rotating speed and feed speed of milling spindle, the feed speed of adjustment ultrasonic vibration is entered with fine milling cutter
It is identical to speed, process a profound and subtle groove.
(6) repeat step (3)~(5) process next micro- deep trouth.
Brief description of the drawings
Fig. 1 polishes Compound Machining schematic diagram for micro- deep trouth ultrasonic cavitation auxiliary milling of the present invention.1 is tank in figure, and 2 are
Workpiece, 3 be abrasive material suspension, and 4 be ultrasonic vibration, and 5 be support frame, and 6 be that pivot angle adjustment is secondary, and 7 be revolute pair, and 8 is flat for servo
Moving cell, 9 be milling spindle, and 10 be fine milling cutter, and 11 be cavitation bubble, and 12 be abrasive grain.
5th, embodiment
The present invention will now be described in detail with reference to the accompanying drawings and examples.
(1) fine milling cutter 10 is loaded on milling spindle 9.
(2) workpiece 2 that will process micro- deep trouth is fixed on and is positioned in the bottom platform of tank 1 equipped with abrasive material suspension 3,
The water level of abrasive material suspension 3 is set to exceed the height of workpiece 2.
(3) pose of ultrasonic vibration 4 of ultrasonic transducer is adjusted by revolute pair 6,7, it is ensured that ultrasonic vibration 4 is located at
The front of milling cutter direction of advance simultaneously ensures that the axis of ultrasonic vibration 4 and the axis of milling spindle have angle, ultrasonic vibration 4
Head keeps small distance with profound and subtle groove.
(4) supersonic generator implements ultrasonic wave axial vibration to ultrasonic vibration 4, and vibration frequency is more than 18kHz, vibration
Direction is consistent with the sub- axial direction of ultrasonic vibration.
(5) from milling spindle rotating speed 8000r/min~100000r/min, milling feed is 5mm/min~10mm/
Min, while the translational speed that adjustment moves horizontally servo unit 8 is consistent with feed speed, processes a wide 0.5mm, deep
3.5mm, long 10mm micro- deep trouth.
(6) repeat step (3)~(5) process next micro- deep trouth.
In summary, presently preferred embodiments of the present invention is these are only, is not intended to limit the scope of the present invention.
Within the spirit and principles of the invention, any modification, equivalent substitution and improvements made etc., should be included in the present invention's
Within protection domain.
Claims (6)
1. a kind of micro- deep trouth ultrasonic cavitation auxiliary milling polishing complex machining device, the device mainly includes tank, to be processed
Workpiece, abrasive material suspension, ultrasonic transducer, support frame, multi-DOF platform, milling spindle and fine milling cutter, fine milling cutter dress
It is stuck on milling spindle, ultrasonic transducer is arranged on support frame by multi-DOF platform, and ultrasonic transducer is by power supply, ultrasound
Wave producer, power amplifier and ultrasonic vibration son composition, the head of ultrasonic vibration is located at before fine milling cutter direction of feed
Side, and the axis of ultrasonic vibration has angle with fine milling cutter axis.
2. according to micro- deep trouth ultrasonic cavitation auxiliary milling polishing complex machining device described in claim 1, it is characterised in that described
Multi-DOF platform includes secondary pivot angle adjustment, revolute pair and servo translation unit.
3. according to micro- deep trouth ultrasonic cavitation auxiliary milling polishing complex machining device described in claim 1, it is characterised in that described
The quantity of ultrasonic transducer is two or more.
4. a kind of micro- deep trouth ultrasonic cavitation auxiliary milling polishing combined machining method, the processing method is used in claim 1-3
Micro- deep trouth ultrasonic cavitation auxiliary milling polishing complex machining device described in any one, mainly comprises the following steps：
(1) fine milling cutter is loaded on milling spindle；
(2) workpiece to be processed is fixed on the bottom of gullet platform equipped with abrasive material suspension, makes the water level of abrasive material suspension
More than workpiece height；
(3) position of adjustment ultrasonic vibration and posture, it is ensured that the head of ultrasonic vibration is located at fine milling cutter direction of feed
Front, and the axis of ultrasonic vibration has angle with fine milling cutter axis；
(4) ultrasonic vibration applies ultrasonic vibration to the abrasive material suspension containing micro- abrasive material, and vibration frequency is more than 18kHz, vibration
Direction is consistent with the axis direction of ultrasonic vibration；
(5) rotating speed and feed speed of setting milling spindle, the feed speed of adjustment ultrasonic vibration and the feeding of fine milling cutter
Speed is identical, processes a profound and subtle groove；
(6) repeat step (3)~(5) process next micro- deep trouth.
5. micro- deep trouth ultrasonic cavitation auxiliary milling polishing combined machining method according to claim 4, it is characterised in that super
Sound and vibration mover can realize ultrasonic vibration with adjustment position and posture by multi-DOF platform in Milling Processes
Follow tool motion.
6. micro- deep trouth ultrasonic cavitation auxiliary milling polishing combined machining method according to claim 4 or 5, its feature exists
In the hardness of micro- abrasive material is more than workpiece material and is less than cutter material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN201710388909.2A CN107175467B (en) | 2017-05-25 | 2017-05-25 | A kind of micro- deep trouth ultrasonic cavitation auxiliary milling polishing combined machining method and device |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201710388909.2A CN107175467B (en) | 2017-05-25 | 2017-05-25 | A kind of micro- deep trouth ultrasonic cavitation auxiliary milling polishing combined machining method and device |
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| CN107175467A true CN107175467A (en) | 2017-09-19 |
| CN107175467B CN107175467B (en) | 2019-11-12 |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109324567A (en) * | 2018-09-29 | 2019-02-12 | 湖南工学院 | A kind of processing of ultrasonic vibrating machining workpiece surface appearance and control method |
| CN111215970A (en) * | 2020-01-24 | 2020-06-02 | 北京理工大学 | Ultrasonic cavitation assisted ultrasonic magnetic polishing method for microstructure mold |
| CN114749932A (en) * | 2022-04-21 | 2022-07-15 | 江苏大学 | Cavitation-assisted milling device and method |
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| CN203636513U (en) * | 2014-01-03 | 2014-06-11 | 吉林大学 | Ultra-precision machining system with function of ultrasonic vibration assisted grinding/polishing |
| RU2013103392A (en) * | 2013-01-25 | 2014-08-10 | Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Московский государственный технологический университет "СТАНКИН" (ФГБОУ ВПО МГТУ "СТАНКИН") | DEVICE FOR VIBRATING MACHINING OF PARTS |
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| CN105312607A (en) * | 2015-11-27 | 2016-02-10 | 北京理工大学 | Micro-hole drilling method based on combination of cutting fluid ultrasonic cavitation and tool vibration |
| US20160091307A1 (en) * | 2014-09-26 | 2016-03-31 | Chuan Liang Industrial Co., Ltd. | Ultrasonic positioning device for five-axis machine |
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| CN202428012U (en) * | 2012-01-09 | 2012-09-12 | 山东大学 | Device for applying supersonic vibration along feed direction to assist milling surface texturing |
| RU2013103392A (en) * | 2013-01-25 | 2014-08-10 | Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Московский государственный технологический университет "СТАНКИН" (ФГБОУ ВПО МГТУ "СТАНКИН") | DEVICE FOR VIBRATING MACHINING OF PARTS |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN109324567A (en) * | 2018-09-29 | 2019-02-12 | 湖南工学院 | A kind of processing of ultrasonic vibrating machining workpiece surface appearance and control method |
| CN109324567B (en) * | 2018-09-29 | 2020-05-22 | 湖南工学院 | Control method for processing surface appearance of ultrasonic vibration processing workpiece |
| CN111215970A (en) * | 2020-01-24 | 2020-06-02 | 北京理工大学 | Ultrasonic cavitation assisted ultrasonic magnetic polishing method for microstructure mold |
| CN114749932A (en) * | 2022-04-21 | 2022-07-15 | 江苏大学 | Cavitation-assisted milling device and method |
| CN114749932B (en) * | 2022-04-21 | 2023-02-17 | 江苏大学 | Cavitation-assisted milling device and method |
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| CN107175467B (en) | 2019-11-12 |
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