CN107167668A - 1 40GHz is in piece S parameter measuring method - Google Patents
1 40GHz is in piece S parameter measuring method Download PDFInfo
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- CN107167668A CN107167668A CN201710379464.1A CN201710379464A CN107167668A CN 107167668 A CN107167668 A CN 107167668A CN 201710379464 A CN201710379464 A CN 201710379464A CN 107167668 A CN107167668 A CN 107167668A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
- G01R27/28—Measuring attenuation, gain, phase shift or derived characteristics of electric four pole networks, i.e. two-port networks; Measuring transient response
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Abstract
The invention discloses a kind of 1 40GHz in piece S parameter measuring method, it is related to microwave/millimeter wave in piece S parameter field of measuring techniques, including step：1）, design piece S parameter verify part way of realization；2）, design piece S parameter verify part structure；3）, simulation optimization piece S parameter verify part；4）, piece S parameter checking part calibration；5）, the calibration results uncertainty evaluation；The present invention is by designing 1 40GHz in piece S parameter measuring method, verify that the way of realization of part, design verify that the structure of part, simulation optimization verify part in piece S parameter, verify measurement of the steps such as part calibration, the calibration results uncertainty evaluation realization in piece S parameter in piece S parameter in piece S parameter in piece S parameter by designing, such a method temperature in use is 55 DEG C 125 DEG C simultaneously, increases Range of measuring temp.
Description
Technical field
The present invention relates to microwave/millimeter wave in piece S parameter field of measuring techniques, more particularly to a kind of 1-40GHz is in piece S
Measurement method of parameters.
Background technology
The instrument measured in piece S parameter (namely scattering parameter, is an important parameter in microwave transmission) is referred to as
In piece S parameter measuring system, its mainly constitute including：Vector network analyzer and microwave probe platform, wherein vector network analysis
Instrument is measuring instrument, and the coaxial or waveguide input/output end port of net will be sweared by microwave cable, the spy of microwave probe platform is connected to
Syringe needle, so as to realize the connection of measurement signal and semiconductor chip.Due to being the S parameter measurement of chip-scale, call it as in the industry
In the measurement of piece S parameter.
Before microwave probe platform invention, the test of the S parameter of chip all after packaging test fixture (it is generally coaxial or
Waveguide interface, so as to be directly connected to vector network analyzer) on carry out, it is clear that its measurement result contains the shadow of test fixture
Ring, measurement result is there is larger uncertainty, set up to chip model and quality evaluation brings puzzlement.Microwave probe platform
Invention, realizes the direct measurement to bare chip, is sought peace quality control so as to reduce chip measurement cost, particularly chip list
Cost.By the development of decades, have become examination semiconductor core tablet quality in piece S parameter measuring system and level is most important
Survey tool.
At present, domestic measurement technology mechanism has been set up the metrology capability of vector network analyzer, that is, solves coaxial
The S parameter magnitude tracing problem of (67GHz) and waveguide (110GHz) measurement pattern.But, lack the metering skill " in piece S parameter "
Art means, cause " in piece S parameter " measurement data can not effectively trace to the source to National primary standard.This metering present situation constrains semiconductor
The development of chip industry, have impact on the research and development progress of high-end microelectronic component.
In the world, the advanced quantitative study mechanism by representative of U.S. NIST, solved within 40GHz in piece meter
Amount problem.Its overall plan is：The design philosophy of " on-wafer classes " calibrating device and checking part is proposed, i.e., the two is using with partly leading
Body chip same substrate material, identical traffic cable architecture, same process, and make on the same chip, so as to eliminate substrate
The influence amounts such as material, transmission linear dimension, probe pinpoint transition influence on the accuracy of measurement finally in piece S parameter.Eventually through testing
Certificate realizes the gage work in piece S parameter.The deficiency of external scheme is mainly reflected in, can only realize normal temperature in piece S parameter
Transmission of quantity value.
The content of the invention
The technical problem to be solved in the present invention is to join for above-mentioned the deficiencies in the prior art there is provided a kind of 1-40GHz in piece S
Number measuring method, such a measuring method temperature applicable range is -55 DEG C -125 DEG C, is solved accurate in piece S parameter measuring system value
The problem of exactness is verified.
In order to solve the above technical problems, the technical solution used in the present invention is：A kind of 1-40GHz is measured in piece S parameter
Method, including step：1), the way of realization of part is verified in design in piece S parameter；2), the structure of part is verified in design in piece S parameter；
3), simulation optimization verifies part in piece S parameter；4), in the checking part calibration of piece S parameter；5), the calibration results uncertainty evaluation；
It is characterized in that：The step 2) in design piece S parameter verify part structure include substrate, metal tape line and nickel
Chromium resistance；
The step 3) in calculated using the LineCalc software for calculation in ADS and obtain effective dielectric constant εeff, utilize
Imitate permittivity εeffCalculate microwave signal relative phase change Δ Pdegree。
Preferably, it is rapid 2) in piece S parameter checking part structure 400 μm -600 μm of substrate thickness, metal tape line thickness is
100nm-300nm, nichrome resistance resistance is 50 Ω/.
Preferably, backing material is GaAs.
Preferably, metal tape line is made using evaporation of metal manufacture craft.
Preferably, nichrome resistance is made using sputtering technology.
Preferably, step 4) comprise the following steps in the checking part calibration of piece S parameter：
A, determine environment temperature meet 23 DEG C ± 5 DEG C, ambient humidity≤80, and determine piece S parameter examine part calibration
Temperature；
B, use vector network analyzer, microwave probe platform, temperature controller, various meterings level microwave cable and mismatch device
Set up in piece S parameter scaling system；
C, adjustment temperature controller to predetermined temperature, and microwave probe decometer is monitored in real time using the film platinum resistor demarcated
The temperature variations of disk；
D, after after the temperature stabilization of microwave probe decometer disk, use the multiline TRL calibrating devices school developed and defined
Standard is in piece S parameter scaling system；
After the completion of E, calibration, the remainder error that scaling system is measured in piece standard component of the subsidiary technical indicator of selection, only
When remainder error measurement result meets setting, scale operation could be carried out, otherwise needs to recalibrate scaling system；
F, using piece S parameter scaling system measurement examine part, to examine part calibration.
It is using the beneficial effect produced by above-mentioned technical proposal：The present invention is surveyed by designing 1-40GHz in piece S parameter
Amount method, verifies that the way of realization of part, design verify that the structure of part, simulation optimization exist in piece S parameter by designing in piece S parameter
Piece S parameter verifies part, verifies that the steps such as part calibration, the calibration results uncertainty evaluation realize the survey in piece S parameter in piece S parameter
Amount, while such a method temperature in use is -55 DEG C -125 DEG C, increases Range of measuring temp.
Brief description of the drawings
Fig. 1 is the logical flow chart of the present invention.
Fig. 2 is the profile of CPW transmission lines.
Fig. 3 is the electric field of co-planar waveguide, magnetic field schematic diagram.
Fig. 4 is the transport module curve map of the thick ceramic co-planar waveguides of 0.254mm.
Embodiment
As shown in figure 1, being the logical flow chart of the present invention, altogether including 5 steps：1), design verifies part in piece S parameter
Way of realization；2), the structure of part is verified in design in piece S parameter；3), simulation optimization verifies part in piece S parameter；4), in piece S parameter
Verify part calibration；5), the calibration results uncertainty evaluation.
1), the way of realization of part is verified in design in piece S parameter：
Currently, domestic metering vector network analyzer, coaxial/waveguide checking part of selection has three kinds, is respectively：Standard
Mismatch device, for measuring reflectance factor；Standard attenuator, for measuring transmission coefficient；Normal air line, for measuring transmission phase
Position.
For the integrality of guarantee system, we are designed when piece S parameter verifies part way of realization, have used for reference existing skill
Art.Specifically include：In piece mismatch device, for measuring reflectance factor；In piece attenuator, for measuring transmission coefficient；In piece transmission
Line, for measuring transmission phase.Specific value and the technical indicator of design are shown in Table 1.
Table 1 verifies the way of realization and value, index of part in piece S parameter
2), the structure of part is verified in design in piece S parameter：
Co-planar waveguide (Coplanar Waveguide, abbreviation CPW) structure is that NIST exploitation normal temperature in the U.S. verifies part in piece
Way of realization, its main advantage is to be easy to characterize and process.Below exemplified by piece transmission line, main design thought is described.
A kind of symmetrical structure planar transmission line in piece transmission line checking part, its center conductor on dielectric substrate and with
What two ground connection conductive planes of center conductor the same side were constituted, there is no conductor coating in the another side of dielectric substrate.CPW is passed
The profile of defeated line is as shown in Figure 2.The wherein width Wg of ground wire, the width W of center conductor, groove width S between center conductor and ground wire,
The relative dielectric constant ε of substrater, metal layer thickness t and electrical conductivity k, substrate thickness H, length of transmission line L.
Co-planar waveguide belongs to two-conductor Transmission system, transmits quasi- TEM ripples, its electric field, Distribution of Magnetic Field such as Fig. 3 in cross section
It is shown.The media plate of co-planar waveguide is considered as the waveguide with open boundary, its support surface wave propagation mode.Surface wave
Mould be along perpendicular to interface direction, exponentially rate decays in the waveform transmitted along dielectric surface, air of the electromagnetic field outside medium,
Field absorption is called surface wave in proximate dielectric.Surface wave is divided into two kinds of TE ripple and TM ripple.Surface wave has cut-off frequency.
The cut-off frequency of wherein TE ripples is
The cut-off frequency of TM ripples is
C is the light velocity in upper two formula, and H is substrate thickness, εrFor the relative dielectric constant of substrate, n=1 in formula (1), 3,
5 ..., n=0,1,2,3 ... in formula (2).The most cutoff wavelength of low order TM0 ripples is infinity, therefore TM0 ripples are in all working ripple
All exist under length.But it should be noted is that, when working frequency is less than the cut-off frequency of surface wave, ripple is not in cut-off
State and be in order at radiation regimes.
When frequency is very low, co-planar waveguide is in CPW patterns, and other patterns of getting along well produce interaction, transmit quasi- TEM
Ripple.With the rise of frequency, when less than surface wave critical frequency, there is " class surface wave mode ", surface wave passes through radiation energy
Amount and CPW moulds produce certain coupling, obvious dispersion characteristics occur.As frequency is further raised, when the biography of CPW moulds
The propagation phase constant for broadcasting phase constant and TM0 moulds is equal, the close coupling for occurring both of which, causes the decay of CPW patterns, this
Individual close coupling frequency is called critical frequency.This critical frequency is relevant with surface wave modulus, substrate thickness and substrate boundary condition.
The critical frequency of TM0 ripples is
Fig. 4 is the transport module curve map of the thick ceramic co-planar waveguides of 0.254mm, and wherein left figure is that potsherd is suspended in sky
In gas, right figure is that potsherd is placed on ground level, and Surface wave mode is TE0, TM0, TE1 and TM1 mould, and wherein TE0 and TM0 are
Even mould, not cut-off frequency, TE1 and TM1 are strange moulds, there is cut-off frequency.There is ground level under right figure substrate, passed without TE0 moulds
Broadcast.
In addition, co-planar waveguide has intrinsic resonant frequency, the frequency and intensity of resonance and its material and geometry in itself
Size is relevant.
Analyzed more than, the major influence factors of coplanar waveguide transmission line characteristic include dispersion, surface wave and resonance, its
Middle dispersion and surface wave are mainly influenceed for 25GHz-50GHz, and are also influenced each other from each other.We consider the above because
Element, it is considered to flow technique, it is determined that using 400 μm -600 μm of substrate thickness, metal layer thickness 100nm- in piece S parameter checking part
300nm, metal level is made using evaporation technology, and resistance uses 50 Ω/ nichrome resistance, silicon nitride is added after completing blunt
Change layer, anti-oxidation.
3), simulation optimization verifies part in piece S parameter：
The making for verifying part in piece transmission line will ensure microstrip line characteristic impedance value Z as far as possible0Equal to the impedance value 50 of system
Ω.According to manufacture craft parameter, the dielectric constant of gallium arsenide substrate is 12.9,500 μm of thickness, and metal layer thickness is 300nm, profit
With the LineCalc software for calculation in ADS, it may be determined that characteristic impedance be 50 Ω under, piece transmission line verify part width be 64
μm, 44 μm of spacing between center conductor and ground wire.
The effective dielectric constant ε of known delay lineeffWith the speed c of light in a vacuum, it is known that electromagnetic wave is in microstrip line
Spread speed vp：
ε in formulaeffFor effective dielectric constant, it considers an electromagnetic wave part and propagated in media as well, and a part is in atmosphere
Propagation the fact that, εeffThe LineCalc softwares that can be provided with ADS are calculated and obtained.So length is relative for l transmission line
Time delay tdelayFor：
Frequency is transmitted for f microwave signal in the transmission line, then after transmission line, microwave signal relative phase
Changes delta PdegreeIt can be calculated with below equation：
4), in the checking part calibration of piece S parameter：
To examining part calibration to include following three part in piece S parameter：
1) standing-wave ratio under each frequency values of piece mismatch device of standing-wave ratio 1.1,1.50 and 2.00；
2) attenuation is 3dB, 10dB and 20dB attenuation under each frequency of piece attenuator；
3) the transmission phase under each frequency of piece transmission line.
In calibration process, in order to obtain the higher calibration degree of accuracy, it is necessary to strictly control calibration process.It is specific as follows：
1) 23 DEG C ± 5 DEG C of environment temperature satisfaction, ambient humidity≤80 are determined, and determine to examine the calibration of part in piece S parameter
Temperature；
2) preferred PNA-X sequence of vectors Network Analyzers, Cascade microwave probe platforms, Temptronic temperature controls system
System, and various metering level microwave cables, mismatch device are set up in piece S parameter scaling system；
3) adjustment high-low temperature controller is to predetermined temperature, and uses the real-time monitoring probe decometer of film platinum resistor demarcated
The temperature variations of disk.
4) after temperature stabilization, system is calibrated in piece S parameter using the multiline TRL calibrating devices calibration developed and defined
System；
5) after the completion of calibrating, the remainder error that scaling system is measured in piece standard component of the subsidiary technical indicator of selection, only
When remainder error measurement result meets table 2 and required, scale operation could be carried out, otherwise needs to recalibrate scaling system；
6) part is examined using in the measurement of piece S parameter scaling system, to examining part calibration.
Remainder error after the calibration of the scaling system of table 2
5), the calibration results uncertainty evaluation：
The uncertainty of measurement of part the calibration results is examined in piece S parameter and after piece S parameter examines the calibration of part scaling system
Remainder error, dynamic accuracy with examine part S parameter it is relevant, mathematical modeling is as follows：
Wherein：ΔS11(mag)、ΔS22(mag)--- the uncertainty of measurement of reflection amplitudes；
ΔS21(mag)、ΔS12(mag)--- the uncertainty of measurement of transmission amplitude；
ΔS21(phase)、ΔS12(phase)--- for the uncertainty of measurement of transmission phase；
EDF--- direction；EDR--- inverse direction；
ESF--- positive source matching；ESR--- reverse source matching；
ELF--- positive load matched；ELR--- reverse load is matched；
ERF--- righting reflex is tracked；ERR--- back reflection is tracked；
ETF--- forward direction transmission tracking；ETR--- reverse transfer is tracked；
EXF--- positive crosstalk；EXR--- reverse crosstalk；
AM--- amplitude dynamic accuracy；AP--- phase dynamic accuracy.
Wherein remainder error is calculated by the index of charter, and dynamic accuracy is calculated by the index of arrow net, specifically such as the institute of table 3
Show：
Table 3 examines the parameter value of part the calibration results uncertainty of measurement in piece high/low temperature S parameter
| Parameter | Symbol | 23℃ | -55℃ | 125℃ |
| Directionality | ED | -33dB | -27dB | -30dB |
| Source is matched | ES | -30dB | -24dB | -25dB |
| Load matched | EL | -27dB | -25dB | -25dB |
| Skin tracking | ER | ±0.20dB | ±0.24dB | ±0.28dB |
| Transmission tracking | ET | ±0.14dB | ±0.19dB | ±0.18dB |
| Crosstalk | EX | -90dB | -90dB | -90dB |
| Amplitude dynamic accuracy | AM | 0.05dB | 0.05dB | 0.05dB |
| Phase dynamic accuracy | AP | 0.5° | 0.5° | 0.5° |
The uncertainty of measurement for examining part the calibration results in piece S parameter has two sources：
1) remainder error of part scaling system, dynamic accuracy is examined to introduce in piece high/low temperature S parameter, using uBRepresent；
2) introduced due to factors such as the repeatability and noise of measuring system, the repeatability sign of measurement result can be used,
Using uARepresent.
Below only so that the 3dB in examining part in piece S parameter is in piece attenuator as an example, illustrate that calibration uncertainty is specifically evaluated
Process.
After piece S parameter examines part scaling system to be calibrated respectively at 23 DEG C, -55 DEG C and 125 DEG C, part is examined in connection
S parameters of the 3dB under piece attenuator, measurement different temperatures.
1. examine the u that part scaling system is introduced in piece S parameterB
The uncertainty of measurement u that part scaling system is introduced is examined in piece S parameterBAs shown in table 4.
The 3dB of table 4 transmits the partial uncertainty u of amplitude in piece attenuatorB
2. the u that measurement reproducibility is introducedA
Part scaling system is examined at 23 DEG C, -55 DEG C and 125 DEG C in piece S parameter, and after being calibrated respectively, 6 repetitions are surveyed
The 3dB at 26.5GHz, 34GHz and 40GHz is measured in piece attenuator, measurement result is as shown in table 5.
The 3dB of table 5 transmits the repetition measurement result of amplitude in piece attenuator
According to data above, determine that measurement reproducibility is introduced not at each temperature by frequency 26.5GHz, 34GHz and 40GHz
Degree of certainty component uA, as shown in table 6.
The 3dB of table 6 transmits the partial uncertainty u of amplitude in piece attenuatorA
3. the u of combined standard uncertaintycWith the U of expanded uncertainty
Because each component is mutually orthogonal, therefore its combined standard uncertaintyExpanded uncertainty U
=kuc, k=2, as shown in table 7.
The 3dB of table 7 transmits the standard uncertainty evaluation result of amplitude in piece attenuator
The foregoing is merely illustrative of the preferred embodiments of the present invention, is not intended to limit the invention, all essences in the present invention
Any modifications, equivalent substitutions and improvements made within refreshing and principle etc., should be included in the scope of the protection.
Claims (6)
1. a kind of 1-40GHz is in piece S parameter measuring method, including step：1）, design piece S parameter verify part way of realization；
2）, design piece S parameter verify part structure；3）, simulation optimization piece S parameter verify part；4）, piece S parameter checking part determine
Mark；5）, the calibration results uncertainty evaluation；
It is characterized in that：The step 2）Middle design verifies that the structure of part includes substrate, metal tape line and nickel chromium triangle electricity in piece S parameter
Resistance；
The step 3）LineCalc software for calculation in middle utilization ADS, which is calculated, obtains effective dielectric constant, utilizes equivalent dielectric
Constant calculations go out microwave signal relative phase change.
2. 1-40GHz according to claim 1 is in piece S parameter measuring method, it is characterised in that：The step 2）In in piece
450 μm -550 μm of substrate thickness in S parameter checking part structure, metal tape line thickness is 200nm-300nm, and nichrome resistance resistance is
50Ω/□。
3. 1-40GHz according to claim 1 is in piece S parameter measuring method, it is characterised in that：The backing material is
GaAs。
4. 1-40GHz according to claim 1 is in piece S parameter measuring method, it is characterised in that：The metal tape line is used
Evaporation of metal technique makes.
5. 1-40GHz according to claim 1 is in piece S parameter measuring method, it is characterised in that：The nichrome resistance is used
Sputtering technology makes.
6. 1-40GHz according to claim 1 is in piece S parameter measuring method, it is characterised in that：The step 4）In piece S
The calibration of Verification part comprises the following steps：
A, determine environment temperature meet 23 DEG C ± 5 DEG C, ambient humidity≤80, and determine piece S parameter examine part calibration temperature；
B, use vector network analyzer, microwave probe platform, temperature controller, various meterings level microwave cable and mismatch device set up
In piece S parameter scaling system；
C, adjustment temperature controller to predetermined temperature, and microwave probe decometer disk is monitored in real time using the film platinum resistor demarcated
Temperature variations；
D, after after the temperature stabilization of microwave probe decometer disk, existed using the multiline TRL calibrating devices calibration developed and defined
Piece S parameter scaling system；
After the completion of E, calibration, the remainder error that scaling system is measured in piece standard component of the subsidiary technical indicator of selection, only surplus
When remaining error measurement meets setting, scale operation could be carried out, otherwise needs to recalibrate scaling system；
F, using piece S parameter scaling system measurement examine part, to examine part calibration.
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Cited By (3)
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| CN113609813A (en) * | 2021-10-09 | 2021-11-05 | 深圳飞骧科技股份有限公司 | Microstrip line modeling method, microstrip line modeling device and related equipment |
| CN115630617A (en) * | 2022-12-22 | 2023-01-20 | 成都华兴汇明科技有限公司 | S2P data conversion S2D model and ADS simulation file construction method |
| CN116341470A (en) * | 2023-03-29 | 2023-06-27 | 南京米乐为微电子科技有限公司 | Scattering parameter measurement method, design method and simulation method of connection structure |
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| CN113609813A (en) * | 2021-10-09 | 2021-11-05 | 深圳飞骧科技股份有限公司 | Microstrip line modeling method, microstrip line modeling device and related equipment |
| CN115630617A (en) * | 2022-12-22 | 2023-01-20 | 成都华兴汇明科技有限公司 | S2P data conversion S2D model and ADS simulation file construction method |
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| CN116341470A (en) * | 2023-03-29 | 2023-06-27 | 南京米乐为微电子科技有限公司 | Scattering parameter measurement method, design method and simulation method of connection structure |
| CN116341470B (en) * | 2023-03-29 | 2023-11-03 | 南京米乐为微电子科技有限公司 | Scattering parameter measurement method, design method and simulation method of connection structure |
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