CN107154748B - A kind of piezoelectric motor and Differential Control method - Google Patents
A kind of piezoelectric motor and Differential Control method Download PDFInfo
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- CN107154748B CN107154748B CN201710423082.4A CN201710423082A CN107154748B CN 107154748 B CN107154748 B CN 107154748B CN 201710423082 A CN201710423082 A CN 201710423082A CN 107154748 B CN107154748 B CN 107154748B
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- 238000000034 method Methods 0.000 title claims abstract description 19
- 238000005086 pumping Methods 0.000 claims abstract description 15
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims abstract description 13
- 238000003475 lamination Methods 0.000 claims description 4
- 230000009467 reduction Effects 0.000 claims description 3
- 238000004904 shortening Methods 0.000 claims description 3
- 238000006073 displacement reaction Methods 0.000 abstract description 8
- 238000010586 diagram Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000036244 malformation Effects 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 230000036316 preload Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000008439 repair process Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/04—Constructional details
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/06—Drive circuits; Control arrangements or methods
- H02N2/062—Small signal circuits; Means for controlling position or derived quantities, e.g. for removing hysteresis
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- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
A kind of piezoelectric motor provided by the invention and Differential Control method, are related to piezoelectric actuated technical field.Wherein, piezoelectric motor includes pedestal and the mover and stator for being set to pedestal, mover is set to pedestal by sliding rail and can slide along sliding rail, and stator includes first vibration section part, second vibration section part, the first laminated piezoelectric, the second laminated piezoelectric and third laminated piezoelectric.First laminated piezoelectric and the second laminated piezoelectric are used for flexible with by first vibration section part drive mover, along sliding rail sliding, third laminated piezoelectric is used for flexible by the pressure between second vibration section part control first vibration section part and the mover perpendicular to the direction of sliding rail in the control lower edge of pumping signal in the direction that the control lower edge of pumping signal is parallel to sliding rail.By above-mentioned setting, it can solve and there is a problem of that piezoelectric motor positioning accuracy is low due to the displacement of first vibration section part and second vibration section part output cannot be controlled individually in the prior art.
Description
Technical field
The present invention relates to piezoelectric actuated technical fields, in particular to a kind of piezoelectric motor and Differential Control method.
Background technique
With the development of micro-/ nano technology, all there is an urgent need to submicron orders, micro-/to receive for the research of numerous field of engineering technology
The accurate actuator of meter level.But since traditional electromagnetic machine needs deceleration device, it is being miniaturized, in the developing direction of high power to weight ratio
It is difficult to break through.
With the development of material science, new function material is that these applications propose new solution, wherein inverse pressure
The discovery of electrical effect and the appearance of piezoelectric ceramics (PZT) material with superior function are so that Precision Piezoelectric actuator is studied
Extensive concern has been arrived, and has shown broad application prospect in accurate actuation field.
Through inventor the study found that the existing piezoelectric motor using piezoelectric effect generally has at least two vibration sections
Part, each vibration component is because having coupling to be individually controlled without can be carried out in structure, thus existing piezoelectric motor exists
The low problem of positioning accuracy.
Summary of the invention
In view of this, can solve in the prior art the purpose of the present invention is to provide a kind of piezoelectric motor because of the first vibration
The displacement output of dynamic component and second vibration section part cannot be controlled individually and there is a problem of that piezoelectric motor positioning accuracy is low.
It, can be with by carrying out Differential Control to mover another object of the present invention is to provide a kind of Differential Control method
Further increase the positioning accuracy of piezoelectric motor.
To achieve the above object, the embodiment of the present invention adopts the following technical scheme that
A kind of piezoelectric motor including pedestal and is set to the mover and stator of the pedestal, and the stator includes first
Vibration component, second vibration section part, the first laminated piezoelectric, the second laminated piezoelectric and third laminated piezoelectric.
The mover is set to the pedestal by sliding rail and can slide along the sliding rail, first laminated piezoelectric,
Two laminated piezoelectrics and first vibration section part are set to inside the second vibration section part, and the first vibration section part is moved with described
Son contact setting and the two sides in the glide direction of the mover respectively with first laminated piezoelectric and the second laminated piezoelectric
Connection, side of the second vibration section part far from the mover is connect with the third laminated piezoelectric.
First laminated piezoelectric and second laminated piezoelectric are used to be parallel in the control lower edge of pumping signal described
The direction of sliding rail is flexible to drive the mover to slide along the sliding rail by the first vibration section part, the third piezo stack
Layer is flexible to be controlled by the second vibration section part perpendicular to the direction of the sliding rail for the control lower edge in pumping signal
Pressure between the first vibration section part and the mover.
In the embodiment of the present invention preferably selects, in above-mentioned piezoelectric motor, the stator further includes the first preload bullet
Spring, the second preloading spring, fixed plate and baffle, the second vibration section part pass through described first far from the side of the mover
Preloading spring and the second preloading spring are connect with the fixed plate, and the third laminated piezoelectric is far from the second vibration section part
The fixed plate is fixed on by the baffle in side.
In the embodiment of the present invention preferably selects, in above-mentioned piezoelectric motor, the stator further include the first guide pad,
Second guide pad and third guide pad.
Side of first laminated piezoelectric far from the first vibration section part passes through first guide pad and described the
Two vibration components connection, second laminated piezoelectric far from the first vibration section part side by second guide pad with
The second vibration section part connection, the third laminated piezoelectric are led far from the side of the second vibration section part by the third
It is connect to block with the baffle.
In the embodiment of the present invention preferably selects, in above-mentioned piezoelectric motor, the stator further includes weight mass block,
The weight mass block is connect with the fixed plate far from the side of the second vibration section part.
In the embodiment of the present invention preferably selects, in above-mentioned piezoelectric motor, the second vibration section part is U-shaped rigidity
Structure, the first vibration section part contact setting with the mover by the opening of the U-shaped rigid structure.
In the embodiment of the present invention preferably selects, in above-mentioned piezoelectric motor, the stator further includes the first prefabricating plate
Spring, the second precompressed leaf spring and support, the first precompressed leaf spring and the second precompressed leaf spring are arranged in parallel and pass through described
Support is fixed on the pedestal, and the second vibration section part is connect close to the side of the mover with the first precompressed leaf spring,
Side far from the mover is connect with the second precompressed leaf spring.
In the embodiment of the present invention preferably selects, in above-mentioned piezoelectric motor, the first precompressed leaf spring and described
Rigidity of the two precompressed leaf springs in the telescopic direction of first laminated piezoelectric is greater than the flexible side in second laminated piezoelectric
Upward rigidity.
In the embodiment of the present invention preferably selects, in above-mentioned piezoelectric motor, first vibration section part is far from the mover
Side connect with the second vibration section part by flexible mounting arm.
On the basis of the above, the embodiment of the invention also provides a kind of Differential Control methods, are applied to above-mentioned piezoelectric motor,
The described method includes:
Control third laminated piezoelectric elongates or shortens, with by second vibration section part control first vibration section part and mover it
Between pressure increase or reduction；
The third laminated piezoelectric elongation when, control the first laminated piezoelectric extend and control the second laminated piezoelectric shortening with
Make the first vibration section part that the mover be driven to slide along first direction；
When the third laminated piezoelectric shortens, controls first laminated piezoelectric and shorten and control second piezo stack
Layer extends so that the first vibration section part drives the mover to slide in a second direction, and the mover is slided along first direction
Distance is greater than the distance slided along the second direction.
In the embodiment of the present invention preferably selects, in above-mentioned Differential Control method, the control third piezoelectricity
The step of lamination elongates or shortens include:
The pumping signal being positive to third laminated piezoelectric application amplitude is so that the third laminated piezoelectric extends；
To the third laminated piezoelectric apply amplitude be zero pumping signal so that the third laminated piezoelectric shorten.
The present invention provides a kind of piezoelectric motor and Differential Control method, passes through setting the first laminated piezoelectric, the second piezo stack
Layer and third laminated piezoelectric respectively control the displacement output of first vibration section part and second vibration section part, can solve
Certainly there are piezoelectric motors due to the displacement of first vibration section part and second vibration section part output cannot individually control in the prior art
The low problem of positioning accuracy, greatly improves the dependable with function of piezoelectric motor.
Further, by be arranged weight mass block, can the quality according to actual needs to weight mass block adjust
Whole, to control the initial pressure between first vibration section part and mover by second vibration section part, it is fixed to piezoelectric motor to realize
The adjusting of position precision, effectively improves the adaptability of piezoelectric motor.It is tied by setting U-shaped rigidity for second vibration section part
Structure can effectively improve the stability of second vibration section part, avoid causing displacement because of malformation output accuracy is low to ask
Topic.
To enable the above objects, features and advantages of the present invention to be clearer and more comprehensible, preferred embodiment is cited below particularly, and cooperate
Appended attached drawing, is described in detail below.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of piezoelectric motor provided in an embodiment of the present invention.
Fig. 2 is the structural schematic diagram of stator provided in an embodiment of the present invention.
Fig. 3 is another structural schematic diagram of stator provided in an embodiment of the present invention.
Fig. 4 is the cross-sectional view of Section A-A in Fig. 3.
Fig. 5 is the flow diagram of Differential Control method provided in an embodiment of the present invention.
Icon: 10- piezoelectric motor；100- pedestal；120- side plate；140- bottom plate；200- mover；300- stator；310-
One vibration component；320- second vibration section part；The first laminated piezoelectric of 330-；The second laminated piezoelectric of 340-；350- third piezo stack
Layer；The first preloading spring of 360-；The second preloading spring of 370-；380- fixed plate；390- baffle；410- weight mass block；420-
First guide pad；The second guide pad of 430-；440- third guide pad；450- the first precompressed leaf spring；460- the second precompressed leaf spring；
470- support.
Specific embodiment
In order to make the object, technical scheme and advantages of the embodiment of the invention clearer, below in conjunction with the embodiment of the present invention
In attached drawing, technical scheme in the embodiment of the invention is clearly and completely described, it is clear that described embodiment only
It is a part of the embodiments of the present invention, instead of all the embodiments.The present invention being usually described and illustrated herein in the accompanying drawings
The component of embodiment can be arranged and be designed with a variety of different configurations.
Therefore, the detailed description of the embodiment of the present invention provided in the accompanying drawings is not intended to limit below claimed
The scope of the present invention, but be merely representative of selected embodiment of the invention.Based on the embodiments of the present invention, this field is common
Technical staff's every other embodiment obtained without creative efforts belongs to the model that the present invention protects
It encloses.
It should also be noted that similar label and letter indicate similar terms in following attached drawing, therefore, once a certain Xiang Yi
It is defined in a attached drawing, does not then need that it is further defined and explained in subsequent attached drawing.In description of the invention
In, term " first ", " second ", " third " etc. are only used for distinguishing description, and should not be understood as only or imply relative importance.
In the description of the present invention unless specifically defined or limited otherwise, term " setting ", " connected ", " connection " are answered
It is interpreted broadly, for example, it may be being fixedly connected, may be a detachable connection, or be integrally connected；It can be mechanical connect
It connects, is also possible to be electrically connected；It can be directly connected, can also can be in two elements indirectly connected through an intermediary
The connection in portion.For the ordinary skill in the art, the tool of above-mentioned term in the present invention can be understood with concrete condition
Body meaning.
As shown in Figure 1, the embodiment of the invention provides a kind of piezoelectric motor 10, including pedestal 100, mover 200 and fixed
Son 300.The pedestal 100 includes side plate 120 and bottom plate 140, and the mover 200 is set to the side plate 120, the stator
300 are set to the bottom plate 140.
Optionally, the mover 200 be set to the side plate 120 mode it is unrestricted, the stator 300 is set to institute
The mode for stating bottom plate 140 is unrestricted, such as is slidably connected, is fixedly connected, is threadedly coupled, snaps connection.In the present embodiment
In, the side plate 120 is provided with sliding rail, and the mover 200 is set to the side plate 120 by the sliding rail and can be along the cunning
Rail sliding.The stator 300 is fixed by bolts in the bottom plate 140.
In conjunction with Fig. 2, in the present embodiment, the stator 300 include first vibration section part 310, second vibration section part 320,
First laminated piezoelectric 330, the second laminated piezoelectric 340 and third laminated piezoelectric 350.First laminated piezoelectric 330, second is pressed
Electric lamination 340 and first vibration section part 310 are set to inside the second vibration section part 320, the first vibration section part 310
Contacted with the mover 200 setting and the two sides in the glide direction of the mover 200 respectively with first laminated piezoelectric
330 and second laminated piezoelectric 340 connect, side of the second vibration section part 320 far from the mover 200 and the third pressure
Electric lamination 350 connects.
First laminated piezoelectric 330 is used for parallel in the control lower edge of pumping signal with second laminated piezoelectric 340
Flexible to drive the mover 200 to slide along the sliding rail by the first vibration section part 310, the institute in the direction of the sliding rail
It is flexible to pass through described the perpendicular to the direction of the sliding rail for the control lower edge in pumping signal to state third laminated piezoelectric 350
Two vibration components 320 control the pressure between the first vibration section part 310 and the mover 200.
Optionally, the concrete shape structure of the second vibration section part 320 is unrestricted, is configured according to actual needs
, for example, can be according to the first vibration section part 310, the tool of the first laminated piezoelectric 330 and the second laminated piezoelectric 340
Body set-up mode is configured.In the present embodiment, the second vibration section part 320 is U-shaped rigid structure, first vibration
Component 310 contacts setting with the mover 200 by the opening of the U-shaped rigid structure.
Optionally, first laminated piezoelectric 330, the second laminated piezoelectric 340 and first vibration section part 310 are set to institute
The specific set-up mode stated inside second vibration section part 320 is unrestricted.In the present embodiment, first laminated piezoelectric 330,
The side of second laminated piezoelectric 340 and first vibration section part 310 far from the mover 200 passes through flexible mounting arm and described the
The base arm of two vibration components 320 connects.
In conjunction with Fig. 3 and Fig. 4, in the present embodiment, the stator 300 can also include that the first preloading spring 360, second is pre-
Tight spring 370, fixed plate 380, baffle 390 and weight mass block 410.
The second vibration section part 320 passes through first preloading spring 360 and second far from the side of the mover 200
Preloading spring 370 is connect with the fixed plate 380, the third laminated piezoelectric 350 far from the second vibration section part 320 one
The fixed plate 380 is fixed on by the baffle 390 in side, and the weight mass block 410 is with the fixed plate 380 far from described
The side of second vibration section part 320 connects.
It, can be in the third laminated piezoelectric by the way that first preloading spring 360 and the second preloading spring 370 is arranged
350 when needing to shorten, and provides pressure for the third laminated piezoelectric 350 to realize the purpose of shortening, described without being individually for
Third laminated piezoelectric 350 provides driving power, greatly improves the practicability of piezoelectric motor 10.It is described with heavy by being arranged
Gauge block 410, can the quality according to actual needs to the weight mass block 410 be adjusted, to shake by described second
Dynamic component 320 controls the initial pressure between the first vibration section part 310 and the mover 200, realizes to the piezoelectric electro
The adjusting of 10 positioning accuracy of machine effectively improves the adaptability of the piezoelectric motor 10.
Further, in the present embodiment, the stator 300 further include the first guide pad 420, the second guide pad 430 with
And third guide pad 440.First laminated piezoelectric 330 passes through described first far from the side of the first vibration section part 310
Guide pad 420 is connect with the second vibration section part 320, and second laminated piezoelectric 340 is far from the first vibration section part 310
Side connect by second guide pad 430 with the second vibration section part 320, the third laminated piezoelectric 350 is separate
The side of the second vibration section part 320 is connect by the third guide pad 440 with the baffle 390.
By the way that first guide pad 420, the second guide pad 430 and third guide pad 440 is arranged, it is possible to prevente effectively from
Because first laminated piezoelectric 330, the second laminated piezoelectric 340 and third laminated piezoelectric 350 directly with other components or structure
Connection and when deformation occurs for first laminated piezoelectric 330, the second laminated piezoelectric 340 and third laminated piezoelectric 350 to institute
The problem of the first laminated piezoelectric 330, the second laminated piezoelectric 340 and third laminated piezoelectric 350 damage is stated, is greatlyd improve
The service life of piezoelectric motor 10.
Optionally, the connection side of first guide pad 420 and the second guide pad 430 and the second vibration section part 320
Formula is unrestricted, is configured according to actual needs.In the present embodiment, the two side arms of the second vibration section part 320
It is respectively arranged with pretension bolt, and is fixed on first guide pad 420 and the first laminated piezoelectric 330 by a pretension bolt
The side of the first vibration section part 310, by another pretension bolt by second guide pad 430 and the second laminated piezoelectric
340 are fixed on the other side of the first vibration section part 310.
Further, in the present embodiment, the stator 300 can also include the first precompressed leaf spring 450, the second prefabricating plate
Spring 460 and support 470.The first precompressed leaf spring 450 and the second precompressed leaf spring 460 are arranged in parallel and by the branch
Seat 470 is fixed on the pedestal 100, side and first precompressed of the second vibration section part 320 close to the mover 200
Leaf spring 450 connects, and the side far from the mover 200 is connect with the second precompressed leaf spring 460.
Optionally, the rigidity of the first precompressed leaf spring 450 and the second precompressed leaf spring 460 is unrestricted, according to reality
Border demand is configured.In the present embodiment, the first precompressed leaf spring 450 and the second precompressed leaf spring 460 are in institute
The rigidity in the telescopic direction of the first laminated piezoelectric 330 is stated greater than rigid in the telescopic direction of second laminated piezoelectric 340
Degree.
By above-mentioned setting, both it is possible to prevente effectively from the first precompressed leaf spring 450 and the second precompressed leaf spring 460 exist
Deformation is led to the problem of in the telescopic direction of first laminated piezoelectric 330 and mover 200 is caused to be displaced output accuracy decline, also
It can guarantee that the first vibration section part 310 can come into full contact with mover 200, to avoid 310 nothing of first vibration section part
The problem of method effectively drives mover 200 to slide, greatly improves the reliability and safety of the piezoelectric motor 10.
In conjunction with Fig. 5, the embodiment of the present invention also provides a kind of Differential Control method, is applied to above-mentioned piezoelectric motor 10.Below
Detailed process shown in fig. 5 will be described in detail.
Step S110, control third laminated piezoelectric 350 elongate or shorten, to pass through the control of second vibration section part 320 first
Pressure increase or reduction between vibration component 310 and mover 200.
Optionally, it is unrestricted to control the method and step that the third laminated piezoelectric 350 elongates or shortens, such as can lead to
It crosses and different pumping signals is applied to the third laminated piezoelectric 350, to control the elongation of third laminated piezoelectric 350 or contracting
It is short, it can also be by applying external pressure or pulling force to the third laminated piezoelectric 350, to control the third laminated piezoelectric
350 elongate or shorten.In the present embodiment, it can be realized by following steps: apply amplitude to the third laminated piezoelectric 350
The pumping signal being positive is so that the third laminated piezoelectric 350 extends；Applying amplitude to the third laminated piezoelectric 350 is zero
Pumping signal is so that the third laminated piezoelectric 350 shortens.
Step S130, in the third laminated piezoelectric 350 elongation, the first laminated piezoelectric 330 of control extends and controls the
Two laminated piezoelectrics 340 shorten so that the first vibration section part 310 drives the mover 200 to slide along first direction.
Step S150 controls first laminated piezoelectric 330 and shortens and control when the third laminated piezoelectric 350 shortens
The elongation of the second laminated piezoelectric 340 is made so that the first vibration section part 310 drives the mover 200 to slide in a second direction
Dynamic, the mover 200 is greater than the distance slided along the second direction along the distance that first direction slides.
Pass through the above method, it is ensured that the distance and edge that the first vibration section part 310 is moved along the first direction
The distance phase of second direction movement simultaneously as the pressure between the first vibration section part 310 and the mover 200 not
Together, different so as to cause frictional force of the first vibration section part 310 to the mover 200, so that the mover 200 is along first
The distance of direction sliding, which is greater than, to be greatlyd improve along the distance that the second direction is slided to realize the purpose of Differential Control
The positioning accuracy of the piezoelectric motor 10.
In conclusion a kind of piezoelectric motor 10 provided by the invention and Differential Control method, by the way that the first piezo stack is arranged
The 330, second laminated piezoelectric 340 of layer and third laminated piezoelectric 350, respectively to first vibration section part 310 and second vibration section part
320 displacement output is controlled, and can solve in the prior art because of first vibration section part 310 and second vibration section part 320
Displacement output cannot be controlled individually and there is a problem of that 10 positioning accuracy of piezoelectric motor is low, greatly improve piezoelectric motor 10
Dependable with function.Secondly, by setting weight mass block 410, matter that can according to actual needs to weight mass block 410
Amount is adjusted, so that the initial pressure between first vibration section part 310 and mover 200 is controlled by second vibration section part 320,
It realizes the adjusting to 10 positioning accuracy of piezoelectric motor, effectively improves the adaptability of piezoelectric motor 10, have greatly real
With value.By setting U-shaped rigid structure for second vibration section part 320, second vibration section part 320 can be effectively improved
Stability, the problem for avoiding causing displacement output accuracy low because of malformation.Finally, passing through the first guide pad 420 of setting, the
Two guide pads 430 and third guide pad 440, it is possible to prevente effectively from because the first laminated piezoelectric 330, the second laminated piezoelectric 340 with
And third laminated piezoelectric 350 is directly connect and in the first laminated piezoelectric 330, the second laminated piezoelectric 340 with other components or structure
And third laminated piezoelectric 350 is when deformation occurs, to the first laminated piezoelectric 330, the second laminated piezoelectric 340 and third piezo stack
The problem of layer 350 damages, greatly improves the service life of piezoelectric motor 10.
The foregoing is only a preferred embodiment of the present invention, is not intended to restrict the invention, for the skill of this field
For art personnel, the invention may be variously modified and varied.All within the spirits and principles of the present invention, made any to repair
Change, equivalent replacement, improvement etc., should all be included in the protection scope of the present invention.
Claims (2)
1. a kind of Differential Control method, it is applied to piezoelectric motor, which includes pedestal and be set to the pedestal
Mover and stator, the stator include first vibration section part, second vibration section part, the first laminated piezoelectric, the second laminated piezoelectric with
And third laminated piezoelectric, which is characterized in that the mover is set to the pedestal by sliding rail and can slide along the sliding rail, institute
It states the first laminated piezoelectric, the second laminated piezoelectric and first vibration section part to be set to inside the second vibration section part, described
One vibration component contacted with the mover setting and the two sides in the glide direction of the mover respectively with first piezoelectricity
Lamination and the connection of the second laminated piezoelectric, side of the second vibration section part far from the mover and the third laminated piezoelectric connect
It connects；First laminated piezoelectric and second laminated piezoelectric are used to be parallel to the sliding rail in the control lower edge of pumping signal
Direction is flexible to drive the mover to slide along the sliding rail by the first vibration section part, and the third laminated piezoelectric is used for
It is flexible to pass through second vibration section part control described the perpendicular to the direction of the sliding rail in the control lower edge of pumping signal
Pressure between one vibration component and the mover, which comprises
Control third laminated piezoelectric elongates or shortens, to be controlled between first vibration section part and mover by second vibration section part
Pressure increase or reduction；
In third laminated piezoelectric elongation, the first laminated piezoelectric of control, which extends and controls the second laminated piezoelectric, to be shortened so that institute
Stating first vibration section part drives the mover to slide along first direction；
When the third laminated piezoelectric shortens, control first laminated piezoelectric, which shortens and controls second laminated piezoelectric, to be stretched
It is long so that the first vibration section part drives the mover to slide in a second direction, the distance that the mover is slided along first direction
Greater than the distance slided along the second direction.
2. Differential Control method according to claim 1, which is characterized in that the control third laminated piezoelectric elongation
Or the step of shortening, includes:
The pumping signal being positive to third laminated piezoelectric application amplitude is so that the third laminated piezoelectric extends；
To the third laminated piezoelectric apply amplitude be zero pumping signal so that the third laminated piezoelectric shorten.
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| CN201710423082.4A CN107154748B (en) | 2017-06-07 | 2017-06-07 | A kind of piezoelectric motor and Differential Control method |
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| CN108092547A (en) * | 2018-02-26 | 2018-05-29 | 盐城工学院 | A kind of biped type piezoelectricity electromagnetism hybrid linear motor and electric excitation method thereof |
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|---|---|---|---|---|
| JPH0889894A (en) * | 1994-09-27 | 1996-04-09 | Fanuc Ltd | Grip type linear actuator |
| CN103701358A (en) * | 2013-09-26 | 2014-04-02 | 南京航空航天大学 | Balance weight type variable contact force piezoelectric motor |
| CN104741936A (en) * | 2015-04-10 | 2015-07-01 | 上海理工大学 | Pretightening force regulating device of machine table |
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