CN107153720B - Method and system for filling redundant metal - Google Patents

Method and system for filling redundant metal Download PDF

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CN107153720B
CN107153720B CN201610119214.XA CN201610119214A CN107153720B CN 107153720 B CN107153720 B CN 107153720B CN 201610119214 A CN201610119214 A CN 201610119214A CN 107153720 B CN107153720 B CN 107153720B
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CN107153720A (en
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曹鹤
陈岚
刘建云
石显锋
张贺
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Institute of Microelectronics of CAS
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    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F30/00—Computer-aided design [CAD]
    • G06F30/30—Circuit design
    • G06F30/39—Circuit design at the physical level
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    • H01—ELECTRIC ELEMENTS
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    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics

Abstract

The invention provides a method and a system for filling redundant metal, wherein the method comprises the following steps: carrying out external expansion on the region which cannot be filled according to the design requirement to obtain an external expansion region; performing margin analysis on the outward-expanded region to obtain a region to be filled; performing rectangular treatment on the areas to be filled to obtain each rectangular area to be filled; and carrying out redundant metal filling on each rectangular region to be filled. Because the region which can not be filled is subjected to outward expansion according to the design requirement and the outward expansion region is subjected to margin analysis, the phenomenon that the large blank region can not be filled with redundant metal in the prior art can be avoided.

Description

Method and system for filling redundant metal
Technical Field
The invention relates to the field of semiconductor manufacturing, in particular to a method and a system for filling redundant metal.
Background
With the continuous development of semiconductor technology, semiconductor process nodes are becoming smaller and global planarization becomes more and more important. The Chemical Mechanical Planarization (CMP) process is an important process for maintaining global planarization of the chip surface in the manufacture of very large scale circuits. However, since the removal rate of the metal and oxide media during CMP is not the same, the process itself causes two kinds of planarity defects: metal dishing and oxide erosion. Redundant metal Fill (Dummy Fill) technology is currently the primary means to solve this problem. The principle is that the metal pattern density of the grid is changed by filling small metal blocks which are not communicated with a circuit into the grid, so that the uniformity of the pattern density of the layout is improved, and the flatness and the electrical property of a chip are improved. The core technology mainly comprises two technologies: layout density and filling quantity analysis technology and allowance analysis technology.
However, in the actual process production, due to the special requirements of customers on the chip performance, some large blank areas cannot be filled with redundant metal, so that the flatness of the area cannot be guaranteed, the product yield is affected, and even the chip flow fails.
Disclosure of Invention
The invention provides a method and a system for filling redundant metal, which solve the problem that the existing margin analysis technology can not finish the filling of the redundant metal rapidly on the premise of no leakage of the filling.
The invention provides a method for filling redundant metal, which comprises the following steps:
carrying out external expansion on the region which cannot be filled according to the design requirement to obtain an external expansion region;
performing margin analysis on the outward-expanded region to obtain a region to be filled;
performing rectangular treatment on the areas to be filled to obtain each rectangular area to be filled;
and carrying out redundant metal filling on each rectangular region to be filled.
Preferably, the step of outwardly expanding the unfilled region according to the design requirement to obtain an outwardly expanded region includes:
setting an external expansion parameter L according to design requirements;
performing rectangular processing on the unfilled region to obtain each vertex coordinate of each rectangle of the unfilled region;
and calculating the vertex coordinates of each external expansion area subjected to external expansion according to the external expansion parameter L by using the vertex coordinates of each rectangle of the unfilled area.
Preferably, the performing the margin analysis on the outward-expanded region to obtain the region to be filled includes:
acquiring a minimum unfilled distance d;
expanding the non-filled areas with the overlapped parts with the expanded areas by d/2 to obtain each non-filled expanded area;
and taking the outward expansion area without each non-filled outward expansion area as an area to be filled.
Preferably, after the areas to be filled are subjected to the squaring treatment to obtain the rectangular areas to be filled, the method further includes:
determining the filling priority of each rectangular area to be filled, comprising the following steps:
calculating the distance from the centroid of each rectangular region to be filled to the centroid of the region which can not be filled;
setting the filling priority of the rectangular region to be filled with the larger distance to be higher;
the step of performing redundant metal filling in each rectangular region to be filled comprises the following steps: and filling redundant metal in each rectangular region to be filled according to the filling priority.
Preferably, the calculating, by using the vertex coordinates of each rectangle of the unfilled region, the vertex coordinates of each flared region flared according to the flaring parameter L includes:
calculated in coordinates (x)j，yj) As a vertex, coordinate (x)i，yi) And coordinates (x)k，yk) A first constant C and a second constant D for an out-expanding region that is an unfilled region adjacent to a boundary point with a vertex, wherein:
Figure BDA0000933543940000021
Figure BDA0000933543940000022
determining vertex coordinates (x) from a first constant C and a second constant Dj，yj) Vertex coordinates (x) of the flaring region flaring according to the flaring parameter Ln，yn) Wherein:
if xi＝xj，
Figure BDA0000933543940000031
If xk＝xj，
Figure BDA0000933543940000032
In addition to the above-mentioned others,
Figure BDA0000933543940000033
a redundant metal-filled system comprising:
the external expansion area acquisition module is used for carrying out external expansion on the non-fillable area according to the design requirement to obtain an external expansion area;
the to-be-filled region acquisition module is used for performing margin analysis on the outward-expanded region to obtain the to-be-filled region;
the rectangular module is used for performing rectangular processing on the areas to be filled to obtain each rectangular area to be filled;
and the filling module is used for filling redundant metal in each rectangular region to be filled.
Preferably, the flaring region acquiring module comprises:
the setting unit is used for setting an external expansion parameter L according to the design requirement;
the vertex coordinate acquisition unit is used for performing rectangular processing on the unfilled region to obtain each vertex coordinate of each rectangle of the unfilled region;
and the external expansion vertex coordinate acquisition unit is used for calculating the vertex coordinates of each external expansion area subjected to external expansion according to the external expansion parameter L by using the vertex coordinates of each rectangle of the unfilled area.
Preferably, the to-be-filled region acquiring module includes:
a minimum distance acquisition unit for acquiring a minimum unfilled distance d;
the non-filling external expansion area acquisition unit is used for externally expanding d/2 of a non-filling area which has an overlapped part with the external expansion area to obtain each non-filling external expansion area;
and the to-be-filled region acquisition unit is used for taking the outward-extended regions from which the non-filled outward-extended regions are removed as the to-be-filled regions.
Preferably, the system further comprises:
a priority determining module connected to the squaring module, configured to determine a filling priority of each rectangular region to be filled, where the priority determining module includes:
the centroid distance calculation unit is used for calculating the distance from the centroid of each rectangular region to be filled to the centroid of the region which can not be filled;
the priority setting unit is used for setting the filling priority of the rectangular region to be filled with the larger distance to be higher;
and the filling module is specifically used for filling redundant metal in each rectangular region to be filled according to the filling priority.
Preferably, the extended vertex coordinate acquiring unit includes:
a constant acquisition subunit for calculating the coordinate (x)j，yj) As a vertex, coordinate (x)i，yi) And coordinates (x)k，yk) A first constant C and a second constant D for an out-expanding region that is an unfilled region adjacent to a boundary point with a vertex, wherein:
Figure BDA0000933543940000041
Figure BDA0000933543940000042
an outward-extending vertex coordinate obtaining subunit for determining the vertex coordinate (x) according to the first constant C and the second constant Dj，yj) Vertex coordinates (x) of the flaring region flaring according to the flaring parameter Ln，yn) Wherein:
if xi＝xj，
Figure BDA0000933543940000043
If xk＝xj，
Figure BDA0000933543940000044
In addition to the above-mentioned others,
Figure BDA0000933543940000045
according to the method and the system for filling the redundant metal, provided by the invention, an external expansion area is obtained by externally expanding an unfilled area according to design requirements, then the external expansion area is subjected to allowance analysis to obtain an area to be filled, then the area to be filled is subjected to rectangular treatment to obtain each rectangular area to be filled, and finally the redundant metal filling is carried out on each rectangular area to be filled. Because the region which cannot be filled is subjected to outward expansion according to the design requirement and the outward expansion region is subjected to allowance analysis, the phenomenon that redundant metal filling cannot be carried out on a large blank region in the prior art can be avoided, and the problems that flatness cannot be guaranteed due to large-area missing filling, product yield is influenced, and even chip tape failure is caused are solved; in addition, the region to be filled is subjected to rectangular processing, so that the region to be filled becomes rectangular or square, and the filling speed of redundant metal is further improved.
Further, after the areas to be filled are subjected to the rectangular treatment to obtain the rectangular areas to be filled, the filling priority of the rectangular areas to be filled is determined, and then the rectangular areas to be filled are subjected to redundant metal filling according to the filling priority.
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In order to more clearly illustrate the embodiments of the present application or technical solutions in the prior art, the drawings needed to be used in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments described in the present invention, and other drawings can be obtained by those skilled in the art according to the drawings.
FIG. 1 is a flow chart of a method for filling a redundant metal according to the present invention;
FIG. 2 is a schematic view of an expanded region of a non-fillable area provided in accordance with the present invention;
FIG. 3 is a schematic diagram of a process for performing a margin analysis on an out-diffusion region according to the present invention;
FIG. 4 is a logic diagram of a dummy metal fill provided in accordance with the present invention;
fig. 5 is a schematic structural diagram of a redundant metal filling system according to the present invention.
Detailed Description
Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the drawings are illustrative only and should not be construed as limiting the invention.
Existing redundant metal filling methods are typically based on an array indexing algorithm. The array index algorithm has high calculation speed, but because the size of the array is seriously dependent on the setting of the redundant metal filling parameters, the missing filling phenomenon can be caused when the set filling parameters are inappropriate, and the adjustability is poor.
According to the method and the system for filling the redundant metal, provided by the invention, the initially designed unfilled area is subjected to outward expansion according to the design requirement, and then the allowance analysis is carried out on the outward expanded area, so that the phenomenon that the redundant metal cannot be filled in a large blank area in the prior art can be avoided, and the problem that the flatness cannot be ensured due to large-area missing filling is further solved; and subsequently, the region to be filled is subjected to rectangular treatment, so that the region to be filled becomes rectangular or square, and the filling speed of the redundant metal is further improved.
In order to better understand the technical solution and technical effects of the present invention, the following detailed description will be made with reference to a flowchart and a specific embodiment, where the flowchart is shown in fig. 1.
And step S01, performing an outward expansion on the unfilled region according to the design requirement to obtain an outward expanded region, which is shown in fig. 2.
In this implementation, the step of performing the outward expansion on the unfilled region according to the design requirement to obtain the outward expansion region includes: setting an external expansion parameter L according to design requirements; performing rectangular processing on the unfilled region to obtain each vertex coordinate of each rectangle of the unfilled region; and calculating the vertex coordinates of each external expansion area subjected to external expansion according to the external expansion parameter L by using the vertex coordinates of each rectangle of the unfilled area.
Wherein the calculating, by using the vertex coordinates of each rectangle of the unfilled region, the vertex coordinates of each flared region flared according to the flaring parameter L includes: calculated in coordinates (x)j，yj) As a vertex, coordinate (x)i，yi) And coordinates (x)k，yk) A first constant C and a second constant D of an expanding region of the unfilled region adjacent to the vertex; determining vertex coordinates (x) from a first constant C and a second constant Dj，yj) Vertex coordinates (x) of the flaring region flaring according to the flaring parameter Ln，yn)。
In a specific embodiment, first, an extension parameter L is set, and the extension parameter L may be determined according to layout design requirements, for example, in consideration of electrical performance, redundant metal filling is not required as much as possible in a certain range around some non-fillable regions, and at this time, the extension parameter L may be set according to experience or a lot of experiments, and the like, in consideration of process design requirements and the like comprehensively according to the specific requirements.
Then, the unfilled region is subjected to a squaring process to obtain coordinates of each vertex of each rectangle of the unfilled region, and one vertex is used hereinafterCoordinate (x)j，yj) The description is given for the sake of example.
Next, the vertex coordinates (x) of the rectangle (e.g., the unfilled region S0) are usedj，yj) Calculating the coordinates (x) of each vertex of each extension area for extension according to the extension parameter Ln，yn). Specifically, the method comprises the following steps:
calculated in coordinates (x)j，yj) As a vertex, coordinate (x)i，yi) And coordinates (x)k，yk) A first constant C and a second constant D of an expanding region of the unfilled region adjacent to the vertex, wherein the first constant C is calculated according to the following formula (1):
Figure BDA0000933543940000071
the calculation formula of the second constant D is shown in equation (2):
Figure BDA0000933543940000072
determining vertex coordinates (x) from a first constant C and a second constant Dj，yj) Vertex coordinates (x) of the flaring region flaring according to the flaring parameter Ln，yn) The calculation formula is shown in formula (3):
if xi＝xj，
Figure BDA0000933543940000073
If xk＝xj，
Figure BDA0000933543940000074
In addition to the above-mentioned others,
Figure BDA0000933543940000075
the calculation formula of the first constant C is obtained as shown in formulas (4) and (5):
when x isi＝xjWhen the temperature of the water is higher than the set temperature,
selecting a point R with coordinates of
Figure BDA0000933543940000076
C is an inequality of
Figure BDA0000933543940000077
A constant value of true;
when x isi≠xjTime of flight
The point R is selected to be the point R,
the coordinates are
Figure BDA0000933543940000081
C is an inequality of
Figure BDA0000933543940000082
A constant value of true;
the second constant D is calculated in a similar manner to the first constant C, using (x)k，yk) Replacing (x) in the above formulai，yi) And obtaining a D value.
It should be noted that, in practical application, it is necessary to perform grid division on the integrated circuit design layout first, and then perform redundant metal filling with the grid as a unit. The grid may be rectangular or square, and typically, the size of the grid may be 10 μm × 10 μm, 20 μm × 20 μm, 40 μm × 40 μm, 50 μm × 50 μm, or the like. The initial grid division may affect the acquisition of the subsequent region to be filled, etc., and has an important influence on the yield-driven layout and routing algorithm. In this embodiment, the grid is square and has dimensions of 20 μm by 20 μm.
Step S02, performing margin analysis on the outward-extended region to obtain a region to be filled, as shown in fig. 3.
In this embodiment, the performing the margin analysis on the outward-extended region to obtain the region to be filled includes: acquiring a minimum unfilled distance d; expanding the non-filled areas with the overlapped parts with the expanded areas by d/2 to obtain each non-filled expanded area; and taking the outward expansion area without each non-filled outward expansion area as an area to be filled. The minimum unfilled distance is usually determined according to a process window, for example, a value corresponding to a process defect or an insufficient process precision (e.g., lithography resolution) is known to occur when d is smaller than a certain value.
In a specific embodiment, the minimum unfilled distance d is first set according to experience or a lot of experiments, then all polygons S2 intersecting S1 are expanded by d/2, the calculation method is the same as the calculation method of the vertex coordinates of the expanded region in step S01, after the calculation is finished, all S2 are classified into a polygon set S3, and finally S3 and S0 are subtracted by using S1 boolean operation, that is, the calculation formula of the region to be filled is shown in formula (6):
S4＝S1-S3-S0 (6)
where S0 is an unfilled region.
And step S03, performing rectangle processing on the areas to be filled to obtain each rectangular area to be filled.
In the present embodiment, the squaring process is the same as the prior art, and is not described in detail here.
Further, after the areas to be filled are subjected to the rectangular treatment to obtain the rectangular areas to be filled, the method further comprises the following steps: determining the filling priority of each rectangular region to be filled may include: calculating the distance from the centroid of each rectangular region to be filled to the centroid of the region which can not be filled; the filling priority of the rectangular area to be filled with the larger distance is higher. The rectangular areas to be filled are sorted according to filling priority, so that areas with high priority can be filled preferentially when redundant metal filling is carried out subsequently, and therefore when certain types of areas to be filled are areas which need to be filled, the areas to be filled can be filled preferentially, and the situation that certain important areas are not filled with redundant metal due to the fact that the density reaches a set value and the like, and then defects occur after a CMP process is avoided. Preferably, the present invention determines the filling priority level according to the size of the distance between the centroid of the area to be filled and the centroid of the area that cannot be filled.
In a specific embodiment, the area to be filled S4 is first subjected to a squaring process to obtain each rectangular area to be filled, and then the centroid (x) of each rectangular area to be filled is calculatedr，yr) To the center of mass (x) of the unfilled region S00，y0) Wherein the calculation formula is shown in formula (7):
Dr 2＝(xr-x0)2+(yr-y0)2(7)
finally, according to DrThe size of the value determining the filling priority, e.g. setting DrThe larger the area to be filled, the higher the filling priority of the corresponding rectangular area to be filled.
In step S04, redundant metal filling is performed in each rectangular region to be filled, as shown in fig. 4.
In this implementation, the performing redundant metal filling on each rectangular region to be filled includes: setting a filling parameter; calculating the original density of the region to be filled, and determining the filling area according to the filling parameters; adjusting the filling parameters according to the relation between the density of the current region to be filled and the set filling parameters so that the current region to be filled meets the density requirement when the redundant metal is filled or not filled in the filling area; and outputting the actual filling coordinates of the redundant metal to a layout file to complete the filling of the redundant metal.
In one embodiment, first, step S41: setting a density threshold rhod，ρuRedundant metal size L1 and spacing Δ L, where ρuIs a constant equal to the maximum density, rho, of the layout designdThe limit density value related to the geometric structure of the unfilled region is used, and when the layout density exceeds the limit density value, the unevenness of the region is reduced to a manufacturable range;
step S42: calculating the total density inside S1, the calculation formula is shown in formula (8):
Figure BDA0000933543940000091
step S43: if the condition ρ is satisfied0＜ρd＜ρuThen, the minimum filling area is S5 — S1 × (ρ ═ S1 × (ρ)d-ρ0) The maximum filling area is S6 ═ S1 × (ρ)u-ρ0) And step S46, if not, step S44 is proceeded;
step S44: if the condition ρ is satisfiedd≤ρ0＜ρuIf not, the step is marked as not-needed filling, and the filling step is ended, otherwise, the step is carried out to step S45;
step S45: if the condition ρ is satisfied0≤ρu＜ρdIf so, maximum filling is performed, and the step S47 is proceeded to and marked as a warning area;
step S46: if the maximum filling area S7 > S5 inside the region to be filled S4 meets the condition, adding redundant metal S8 to make the density reach rhodThat is, S8 ≧ S5 ≧ S1 × (ρd-ρ0) If yes, returning to the step S41 if not, increasing the redundant metal size L1 or reducing the interval delta L;
step S47: if the maximum filling area S7 > S5 in the region S4 to be filled meets the condition, adding redundant metal S8 to make the block density as close to rho as possibleuThat is, S8 ≦ S6 ═ S1 × (ρ)u-ρ0) If yes, returning to the step S41 if not, increasing the redundant metal size L1 or reducing the interval delta L;
step S48: and outputting the actual filling coordinates of the redundant metal to a layout file to complete the filling of the redundant metal.
It should be noted that the filling method of the redundant metal is merely exemplary, and the redundant metal filling may also be performed on the region to be filled by using other filling methods, which is not limited herein.
Further, when the filling priority of each rectangular region to be filled is determined after the rectangular region to be filled is subjected to the squaring processing in step S03 to obtain each rectangular region to be filled, the performing the redundant metal filling in each rectangular region to be filled includes: and filling redundant metal in each rectangular region to be filled according to the filling priority. Preferably, the filling priority of the region to be filled, which is far from the centroid of the region not to be filled, is set to a high priority.
In the embodiment of the invention, the redundant filling method carries out external expansion on the region which cannot be filled according to the design requirement and carries out margin analysis on the external expansion region, so that the phenomenon that a large blank region cannot be filled with redundant metal in the prior art can be avoided, and the problems that the flatness cannot be ensured and even the chip flow fails due to large-area missing filling are solved; in addition, the area to be filled is subjected to rectangular processing, so that the area to be filled becomes rectangular or square, and the filling speed of redundant metal can be further improved.
Accordingly, the present invention also provides a system for redundant metal filling, as shown in fig. 5, comprising:
an outward expansion region obtaining module 501, configured to perform outward expansion on the unfilled region according to design requirements, so as to obtain an outward expansion region;
a to-be-filled region obtaining module 502, configured to perform margin analysis on the outward-expanded region to obtain a to-be-filled region;
the rectangularizing module 503 is configured to perform rectangularization processing on the regions to be filled to obtain rectangular regions to be filled;
and the filling module 504 is configured to perform redundant metal filling in each rectangular region to be filled.
In this embodiment, the extended region acquiring module 501 includes:
the setting unit is used for setting an external expansion parameter L according to the design requirement;
the vertex coordinate acquisition unit is used for performing rectangular processing on the unfilled region to obtain each vertex coordinate of each rectangle of the unfilled region;
and the external expansion vertex coordinate acquisition unit is used for calculating the vertex coordinates of each external expansion area subjected to external expansion according to the external expansion parameter L by using the vertex coordinates of each rectangle of the unfilled area.
Wherein the extended vertex coordinate acquiring unit includes:
a constant acquisition subunit for calculating the coordinate (x)j，yj) As a vertex, coordinate (x)i，yi) And coordinates (x)k，yk) A first constant C and a second constant D for an out-expanding region that is an unfilled region adjacent to a boundary point with a vertex, wherein:
Figure BDA0000933543940000111
Figure BDA0000933543940000112
an outward-extending vertex coordinate obtaining subunit for determining the vertex coordinate (x) according to the first constant C and the second constant Dj，yj) Vertex coordinates (x) of the flaring region flaring according to the flaring parameter Ln，yn) Wherein:
if xi＝xj，
Figure BDA0000933543940000121
If xk＝xj，
Figure BDA0000933543940000122
In addition to the above-mentioned others,
Figure BDA0000933543940000123
in order to acquire the region to be filled, the region to be filled acquisition module 502 may include:
a minimum distance acquisition unit for acquiring a minimum unfilled distance d;
the non-filling external expansion area acquisition unit is used for externally expanding d/2 of a non-filling area which has an overlapped part with the external expansion area to obtain each non-filling external expansion area;
and the to-be-filled region acquisition unit is used for taking the outward-extended regions from which the non-filled outward-extended regions are removed as the to-be-filled regions.
Further, in order to ensure that some important areas to be filled do not have missing filling phenomena, the system further comprises:
a priority determining module 605 connected to the squaring module 503, configured to determine a filling priority of each rectangular region to be filled, where the priority determining module 605 includes:
the centroid distance calculation unit is used for calculating the distance from the centroid of each rectangular region to be filled to the centroid of the region which can not be filled;
the priority setting unit is used for setting the filling priority of the rectangular region to be filled with the larger distance to be higher;
the filling module 504 is specifically configured to perform redundant metal filling on each rectangular region to be filled according to the filling priority.
Of course, the system may further include a storage module (not shown) for storing the first constant, the second constant, the filling parameter, and the like, and may also store intermediate processing results, such as vertex coordinates of the outward expansion area, vertex coordinates of each rectangular area to be filled, and the like. Therefore, the layout to be processed can be conveniently and automatically processed by a computer, and the related information of the filling result of the redundant metal and the like can be stored.
The embodiments in this specification are described in a progressive manner, and the same and similar parts among the embodiments can be referred to each other. In particular, as for the system part, since the system part is formed by the method provided by the invention, the description is simple, and the relevant part can be referred to the description of the method part. The embodiments described above are merely illustrative and can be understood and implemented by those skilled in the art without inventive effort.
Although the present invention has been described with reference to the preferred embodiments, it is not intended to be limited thereto. Those skilled in the art can make numerous possible variations and modifications to the present teachings, or modify equivalent embodiments to equivalent variations, without departing from the scope of the present teachings, using the methods and techniques disclosed above. Therefore, any simple modification, equivalent change and modification made to the above embodiments according to the technical essence of the present invention are still within the scope of the protection of the technical solution of the present invention, unless the contents of the technical solution of the present invention are departed.

Claims (8)

1. A method of redundant metal filling, comprising the steps of:
carrying out external expansion on the region which cannot be filled according to the design requirement to obtain an external expansion region;
performing margin analysis on the outward-expanded region to obtain a region to be filled;
performing rectangular treatment on the areas to be filled to obtain each rectangular area to be filled;
redundant metal filling is carried out in each rectangular region to be filled;
the step of externally expanding the region which cannot be filled according to the design requirement to obtain the externally expanded region comprises the following steps:
setting an external expansion parameter L according to design requirements;
performing rectangular processing on the unfilled region to obtain each vertex coordinate of each rectangle of the unfilled region;
and calculating the vertex coordinates of each external expansion area subjected to external expansion according to the external expansion parameter L by using the vertex coordinates of each rectangle of the unfilled area.
2. The method according to claim 1, wherein the performing the residual analysis on the outward-expanded region to obtain the region to be filled comprises:
acquiring a minimum unfilled distance d;
expanding the non-filled areas with the overlapped parts with the expanded areas by d/2 to obtain each non-filled expanded area;
and taking the outward expansion area without each non-filled outward expansion area as an area to be filled.
3. The method according to claim 1, wherein after the rectangular regions to be filled are subjected to the squaring process to obtain each rectangular region to be filled, the method further comprises:
determining the filling priority of each rectangular area to be filled, comprising the following steps:
calculating the distance from the centroid of each rectangular region to be filled to the centroid of the region which can not be filled;
setting the filling priority of the rectangular region to be filled with the larger distance to be higher;
the step of performing redundant metal filling in each rectangular region to be filled comprises the following steps: and filling redundant metal in each rectangular region to be filled according to the filling priority.
4. The method of claim 1, wherein calculating vertex coordinates of each flared region that is flared according to the flaring parameter L using vertex coordinates of each rectangle of the unfilled region comprises:
calculated in coordinates (x)j，yj) As a vertex, coordinate (x)i，yi) And coordinates (x)k，yk) A first constant C and a second constant D for an out-expanding region that is an unfilled region adjacent to a boundary point with a vertex, wherein:
Figure FDA0002544353180000021
c is an inequality of
Figure FDA0002544353180000022
A constant value of true;
Figure FDA0002544353180000023
d is an enable inequality
Figure FDA0002544353180000024
A constant value of true;
determining vertex coordinates (x) from a first constant C and a second constant Dj，yj) Vertex coordinates (x) of the flaring region flaring according to the flaring parameter Ln，yn) Wherein:
if xi＝xj，
Figure FDA0002544353180000025
If xk＝xj，
Figure FDA0002544353180000026
In addition to the above-mentioned others,
Figure FDA0002544353180000027
5. a redundant metal filling system, comprising:
the external expansion area acquisition module is used for carrying out external expansion on the non-fillable area according to the design requirement to obtain an external expansion area;
the to-be-filled region acquisition module is used for performing margin analysis on the outward-expanded region to obtain the to-be-filled region;
the rectangular module is used for performing rectangular processing on the areas to be filled to obtain each rectangular area to be filled;
the filling module is used for filling redundant metal in each rectangular region to be filled;
the external expansion region acquisition module comprises:
the setting unit is used for setting an external expansion parameter L according to the design requirement;
the vertex coordinate acquisition unit is used for performing rectangular processing on the unfilled region to obtain each vertex coordinate of each rectangle of the unfilled region;
and the external expansion vertex coordinate acquisition unit is used for calculating the vertex coordinates of each external expansion area subjected to external expansion according to the external expansion parameter L by using the vertex coordinates of each rectangle of the unfilled area.
6. The system according to claim 5, wherein the to-be-filled region acquiring module comprises:
a minimum distance acquisition unit for acquiring a minimum unfilled distance d;
the non-filling external expansion area acquisition unit is used for externally expanding d/2 of a non-filling area which has an overlapped part with the external expansion area to obtain each non-filling external expansion area;
and the to-be-filled region acquisition unit is used for taking the outward-extended regions from which the non-filled outward-extended regions are removed as the to-be-filled regions.
7. The system of claim 5, further comprising:
a priority determining module connected to the squaring module, configured to determine a filling priority of each rectangular region to be filled, where the priority determining module includes:
the centroid distance calculation unit is used for calculating the distance from the centroid of each rectangular region to be filled to the centroid of the region which can not be filled;
the priority setting unit is used for setting the filling priority of the rectangular region to be filled with the larger distance to be higher;
and the filling module is specifically used for filling redundant metal in each rectangular region to be filled according to the filling priority.
8. The system of claim 5, wherein the extended vertex coordinate acquisition unit comprises:
a constant acquisition subunit for calculating the coordinate (x)j，yj) As a vertex, coordinate (x)i，yi) And coordinates (x)k，yk) A first constant C and a second constant D for an out-expanding region that is an unfilled region adjacent to a boundary point with a vertex, wherein:
Figure FDA0002544353180000031
c is an inequality of
Figure FDA0002544353180000032
A constant value of true;
Figure FDA0002544353180000033
d is an enable inequality
Figure FDA0002544353180000034
A constant value of true;
an outward-extending vertex coordinate obtaining subunit for determining the vertex coordinate (x) according to the first constant C and the second constant Dj，yj) Vertex coordinates (x) of the flaring region flaring according to the flaring parameter Ln，yn) Wherein:
if xi＝xj，
Figure FDA0002544353180000041
If xk＝xj，
Figure FDA0002544353180000042
In addition to the above-mentioned others,
Figure FDA0002544353180000043
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