CN107134448B - Improve the integrability method of visible light communication LED light source modulation bandwidth - Google Patents

Improve the integrability method of visible light communication LED light source modulation bandwidth Download PDF

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Publication number
CN107134448B
CN107134448B CN201710252392.4A CN201710252392A CN107134448B CN 107134448 B CN107134448 B CN 107134448B CN 201710252392 A CN201710252392 A CN 201710252392A CN 107134448 B CN107134448 B CN 107134448B
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integrability
light source
visible light
modulation bandwidth
negative electrode
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CN107134448A (en
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曹海城
杨超
朱石超
林杉
赵丽霞
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Institute of Semiconductors of CAS
University of Chinese Academy of Sciences
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Institute of Semiconductors of CAS
University of Chinese Academy of Sciences
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10Bump connectors; Manufacturing methods related thereto
    • H01L2224/12Structure, shape, material or disposition of the bump connectors prior to the connecting process
    • H01L2224/14Structure, shape, material or disposition of the bump connectors prior to the connecting process of a plurality of bump connectors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10Bump connectors; Manufacturing methods related thereto
    • H01L2224/15Structure, shape, material or disposition of the bump connectors after the connecting process
    • H01L2224/16Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
    • H01L2224/161Disposition
    • H01L2224/16151Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/16221Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/16225Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation

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  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Led Devices (AREA)
  • Led Device Packages (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
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Abstract

A kind of integrability method improving visible light communication LED light source modulation bandwidth, includes the following steps: step 1: intermediate fabrication metal thin film resistor on an insulating substrate;Step 2: making the lower electrode plate an of capacity plate antenna respectively in the two sides of metal thin film resistor;Step 3: the middle dielectric layer in one layer of insulating medium layer of disposed thereon of metal thin film resistor, lower electrode plate and insulating substrate, as capacity plate antenna;Step 4: the intermediate two sides production LED on insulating medium layer seals required positive electrode and negative electrode, and the positive electrode and negative electrode are not connected with;Step 5: the electric pole plate of capacity plate antenna is made on the outside insulating medium layer of positive electrode and negative electrode, two electric pole plates are connected with positive electrode with negative electrode respectively, constitute equalizing circuit in parallel;Step 6: LED chip being sealed on the positive electrode and negative electrode prepared using soldered ball, completes the production of integrated device.

Description

Improve the integrability method of visible light communication LED light source modulation bandwidth
Technical field
The invention belongs to technical field of visible light communication, and in particular to a kind of raising visible light communication LED light source modulation band Wide integrability method.
Background technique
Visible light communication technology refers to the transmission using the light of visible light wave range as the carrier of information, without wire channel Medium directly transmits the communication mode of optical signal in air.Visible light communication has transmission rate height, electromagnetic-radiation-free, energy Consume the distinguishing features such as low, abundant, the confidentiality height of frequency spectrum, it has also become the hot spot of short distance free-space communication.
For visible light communication light source as one of communication system key, effect is the electric signal turn that will carry specific information It is melted into the optical signal of electromagnetic-radiation-free pollution.Visible light communication LED light source of the present invention, which uses, is based on GaN or GaAs material LED chip, Electro-optical Modulation principle is based on the radiation recombination effect in multiple quantum wells, i.e., when periodic modulation additional on LED When signal, the carrier concentration for being injected into multiple quantum wells will change, and the carrier quantity of radiation recombination changes therewith, The visual intensity of outgoing cyclically-varying, final tune realized to emergent light with the carrier number amount variation of radiation recombination System.
Commercial LED is influenced by device RC time itself and carrier lifetime, and available modulation is no more than 40MHZ. Reported raising modulation bandwidth method is that preemphasis circuit is added between signal source and LED.The realization process of this method is So that signal of communication is first passed through high pass mode filter, the lower signal of frequency is decayed, after amplifier amplifies, then is passed through Bias-T is added in constant drive current and is transferred to LED light source, is ultimately converted to optical signal.The preemphasis circuit passes through production The module of pcb board grade is realized.Due to including passive filter module, amplifier module, Bias-T from preemphasis circuit to LED Module, multiple module-cascades significantly improve design difficulty.Meanwhile module number more multiple ic structure is more complicated, it is right The number of plies of PCB circuit board and the requirement of area are also higher, and thus preparation cost will also significantly improve.Therefore, with multiple module levels Preemphasis circuit design difficulty with the characteristics of connection is big, and circuit structure is complicated and preparation cost is high.
Visible light communication LED light source is influenced by self capacity characteristic, and impedance is simultaneously non-constant, but with transmission signal Frequency increase and gradually decrease.Based on the feature, the positive and negative electrode design at LED chip both ends equalizing circuit in parallel can be with Improve the available modulation of LED.The parallel connection equalizing circuit is made of capacitor and resistance.The effect of capacitor is to stop direct current signal Pass through, parallel circuit is avoided to generate DC losses;Resistance is connected in series to the capacitor, and the impedance value of resistance value and LED chip is close, effect It is the low frequency part weakened in input signal, and the high frequency section of input signal will all be transferred to LED, to reach balanced effect Fruit improves modulation bandwidth.Since equalizing circuit structure in parallel is simple, number of processes needed for realization process is few, also compatible Si base integrated technique carries out it with LED chip integrated to make design difficulty and preparation cost greatly and reduce.
Summary of the invention
The purpose of the present invention is to provide it is a kind of improve visible light communication LED light source modulation bandwidth integrability method, The production of this method technique is simple;The Si base integrated technique of compatible maturation, and shadow will not be brought to original LED luminescent properties It rings;After equalizing circuit in parallel is integrated with LED chip, device area is close with not integrated LED component;It can significantly improve visible The available modulation of optic communication LED light source.
The present invention provides a kind of integrability method for improving visible light communication LED light source modulation bandwidth, including walks as follows It is rapid:
Step 1: intermediate fabrication metal thin film resistor on an insulating substrate;
Step 2: making the lower electrode plate an of capacity plate antenna respectively in the two sides of metal thin film resistor;
Step 3: in one layer of insulating medium layer of disposed thereon of metal thin film resistor, lower electrode plate and insulating substrate, making For the middle dielectric layer of capacity plate antenna;
Step 4: the intermediate two sides production LED on insulating medium layer seals required positive electrode and negative electrode, the positive electricity Pole and negative electrode are not connected with;
Step 5: the electric pole plate of capacity plate antenna is made on the outside insulating medium layer of positive electrode and negative electrode, on two Electrode plate is connected with positive electrode with negative electrode respectively, constitutes equalizing circuit in parallel;
Step 6: LED chip being sealed on the positive electrode and negative electrode prepared using soldered ball, completes integrated device Production.
The invention has the advantages that the production of this method technique is simple;The Si base integrated technique of compatible maturation, and will not Original LED luminescent properties are affected;After equalizing circuit in parallel is integrated with LED chip, device area is the same as not integrated LED Device is close;The available modulation of visible light communication LED light source can be significantly improved.
Detailed description of the invention
It is clear to be more clear the object, technical solutions and advantages of the present invention, below in conjunction with specific embodiment, and reference Attached drawing is described in further details the present invention.Here it is illustrated as a preferred embodiment with inverted structure LED chip, In:
Fig. 1 is production flow diagram of the invention;
Fig. 2 is structural schematic diagram of the invention.
Specific embodiment
It please refers to shown in Fig. 1-Fig. 2, the present invention provides a kind of integrating for raising visible light communication LED light source modulation bandwidth Change method, includes the following steps:
Step 1: the intermediate fabrication metal thin film resistor 9 in insulating substrate 1, the material of the insulating substrate 1 are blue precious Stone, silicon, silicon carbide, ceramics or surface have the substrate of insulating layer, and typical resistivity is greater than 300 Ω cm, and thickness is greater than 50um; The material of the metal thin film resistor 9 is nickel, chromium, copper, gold, aluminium, platinum, tungsten, tin or silver, or the combination of the above metal;In addition, golden The resistance value for belonging to film resistor 9 is obtained by changing thickness, width and the length of metallic film 9, and resistance value specific size is with LED core The impedance magnitude of piece 6 is related, such as plan design obtains the modulation bandwidth of 300MHz, the resistance of LED chip 6 under preferable 300MHz Resistance value of the anti-value as metal thin film resistor 9.
Step 2: making the lower electrode plate 2 an of capacity plate antenna respectively in the two sides of metal thin film resistor 9;Two lower electrodes Plate 2 is connected with 9 both ends of metal thin film resistor respectively, for constituting concatenated RC circuit;Lower electrode plate 2 and metal thin film resistor 9 Metal material used can be identical or not identical.
Step 3: in one layer of insulating medium layer of disposed thereon of metal thin film resistor 9, lower electrode plate 2 and insulating substrate 1 8, as the middle dielectric layer of capacity plate antenna, the material of the insulating medium layer 8 is HfO2、Al2O3、SiO2、TiO2Or ZrO2, or The stacked combination of the above material.
Step 4: the intermediate two sides production LED on insulating medium layer 8 seals required positive electrode 7 and negative electrode 4, this is just Electrode 7 and negative electrode 4 are not connected with;
Step 5: the electric pole plate 3 of capacity plate antenna is made on the outside insulating medium layer 8 of positive electrode 7 and negative electrode 4.Two A electric pole plate 3 is connected with positive electrode 7 with negative electrode 4 respectively, with lower electrode plate 2, metal thin film resistor 9 and insulating medium layer 8 Equalizing circuit in parallel is constituted together;Metal used in positive electrode 7, negative electrode 4 and electric pole plate 3 be nickel, chromium, copper, gold, aluminium, platinum, Tungsten, tin or silver, or the combination of the above metal.
The effect of metal thin film resistor 9 is the low frequency part weakened in input signal in the parallel connection equalizing circuit, and defeated The high frequency section for entering signal will all be transferred to LED chip 6, to reach portfolio effect, improve modulation bandwidth.
Electric pole plate 3, lower electrode plate 2 and insulating medium layer 8 constitute capacitor in the parallel connection equalizing circuit, and effect is resistance Gear direct current signal passes through, and parallel circuit is avoided to generate DC losses;The capacitance of the capacitor be by change upper and lower electrode plate 3, The thickness of 2 effective area and the insulating medium layer 8 obtains.
Step 6: LED chip 6 being sealed on the positive electrode 7 and negative electrode 4 prepared using soldered ball 5, completes integrator The production of part, the encapsulating structure of the LED chip 6 are inverted structure, positive assembling structure or vertical structure.
It is worth noting that the above is only a specific embodiment of the present invention, it is not intended to restrict the invention, it is all Within the spirit and principles in the present invention, any modification, equivalent substitution, improvement and etc. done should be included in guarantor of the invention Within the scope of shield.

Claims (8)

1. a kind of integrability method for improving visible light communication LED light source modulation bandwidth, includes the following steps:
Step 1: intermediate fabrication metal thin film resistor on an insulating substrate;
Step 2: making the lower electrode plate an of capacity plate antenna respectively in the two sides of metal thin film resistor;
Step 3: in one layer of insulating medium layer of disposed thereon of metal thin film resistor, lower electrode plate and insulating substrate, as flat The middle dielectric layer of plate capacitor;
Step 4: intermediate two sides on insulating medium layer production LED seal needed for positive electrode and negative electrode, the positive electrode and Negative electrode is not connected with;
Step 5: the electric pole plate of capacity plate antenna, two top electrodes are made on the outside insulating medium layer of positive electrode and negative electrode Plate is connected with positive electrode with negative electrode respectively, constitutes equalizing circuit in parallel;
Step 6: LED chip being sealed on the positive electrode and negative electrode prepared using soldered ball, completes the production of integrated device.
2. the integrability method according to claim 1 for improving visible light communication LED light source modulation bandwidth, wherein step The material of 1 insulating substrate is the substrate that sapphire, silicon, silicon carbide, ceramics or surface have insulating layer.
3. the integrability method according to claim 1 for improving visible light communication LED light source modulation bandwidth, wherein step The material of 1 metal thin film resistor is nickel, chromium, copper, gold, aluminium, platinum, tungsten, tin or silver, or the combination of the above metal;In addition, golden The resistance value for belonging to film resistor is obtained by changing thickness, width and the length of metallic film, and resistance value specific size is with LED chip Impedance magnitude it is related.
4. the integrability method according to claim 1 for improving visible light communication LED light source modulation bandwidth, wherein step The material of 2 insulating medium layers is HfO2、Al2O3、SiO2、TiO2Or ZrO2, or the stacked combination of the above material.
5. the integrability method according to claim 1 for improving visible light communication LED light source modulation bandwidth, wherein described The capacitance of capacity plate antenna is obtained by the thickness of the effective area and the insulating medium layer that change upper and lower electrode plate.
6. the integrability method according to claim 1 for improving visible light communication LED light source modulation bandwidth, wherein step Electric pole plate, lower electrode plate and insulating medium layer constitute capacitor in 5 equalizing circuits in parallel, and effect is to stop direct current signal Pass through, parallel circuit is avoided to generate DC losses.
7. the integrability method according to claim 1 for improving visible light communication LED light source modulation bandwidth, wherein metal Film resistor is connected with lower electrode plate, and the impedance value of impedance value and LED chip is close, and effect is low in decrease input signal Frequency part, and the high frequency section of input signal will all be transferred to LED chip, to reach portfolio effect, improve modulation bandwidth.
8. the integrability method according to claim 1 for improving visible light communication LED light source modulation bandwidth, wherein described The encapsulating structure of LED chip is inverted structure, positive assembling structure or vertical structure.
CN201710252392.4A 2017-04-18 2017-04-18 Improve the integrability method of visible light communication LED light source modulation bandwidth Active CN107134448B (en)

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CN117612997B (en) * 2023-11-23 2024-08-20 中国工程物理研究院电子工程研究所 Thin film resistor type temperature and strain sensing integration method compatible with TSV adapter plate

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20100200941A1 (en) * 2006-12-20 2010-08-12 Junichi Fujikata Photodiode, optical communication device, and optical interconnection module
US20110175138A1 (en) * 2006-04-21 2011-07-21 Koninklijke Philips Electronics N.V. Semiconductor light emitting device with integrated electronic components
EP2437581A1 (en) * 2010-09-30 2012-04-04 Odelo GmbH Light diode on a ceramic substrate basis
CN105895653A (en) * 2016-05-16 2016-08-24 华南师范大学 High-voltage visible light communication LED device and manufacturing method thereof
CN106549031A (en) * 2016-11-25 2017-03-29 复旦大学 A kind of monolithic integrated device based on body GaN material and preparation method thereof

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20110175138A1 (en) * 2006-04-21 2011-07-21 Koninklijke Philips Electronics N.V. Semiconductor light emitting device with integrated electronic components
US20100200941A1 (en) * 2006-12-20 2010-08-12 Junichi Fujikata Photodiode, optical communication device, and optical interconnection module
EP2437581A1 (en) * 2010-09-30 2012-04-04 Odelo GmbH Light diode on a ceramic substrate basis
CN105895653A (en) * 2016-05-16 2016-08-24 华南师范大学 High-voltage visible light communication LED device and manufacturing method thereof
CN106549031A (en) * 2016-11-25 2017-03-29 复旦大学 A kind of monolithic integrated device based on body GaN material and preparation method thereof

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