CN107130225B - Self-rotating vertical film coating base frame and film coating equipment - Google Patents
Self-rotating vertical film coating base frame and film coating equipment Download PDFInfo
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- CN107130225B CN107130225B CN201710419898.XA CN201710419898A CN107130225B CN 107130225 B CN107130225 B CN 107130225B CN 201710419898 A CN201710419898 A CN 201710419898A CN 107130225 B CN107130225 B CN 107130225B
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- pedestal
- coating
- support
- guide
- self
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
- C23C14/505—Substrate holders for rotation of the substrates
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Chemically Coating (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The invention discloses a self-rotating vertical type film coating pedestal which comprises a pedestal body and a support, wherein the pedestal body comprises a first guide part at the top and a second guide part at the bottom, and the support is used for bearing a sample to be coated and is rotatably arranged on the pedestal body. The invention also discloses a coating device. The invention can realize the production line type production, can perform film coating on a plurality of surfaces of the sample at one time on the premise of ensuring the film quality, has short time consumption of the film coating process and high industrialization efficiency, and is suitable for large-scale industrial production.
Description
Technical Field
The invention relates to the technical field of vacuum coating, in particular to a self-rotating vertical coating pedestal suitable for assembly lines and coating equipment.
Background
Due to the requirements of modern technological development, vacuum coating technology has been developed rapidly. The vacuum coating technology can change the surface performance of the workpiece, and improve the wear resistance, oxidation resistance, corrosion resistance and other performances of the workpiece, thereby prolonging the service life of the workpiece. The vacuum coating technology can also realize the preparation of optical, electrical and semiconductor thin film devices, and has high economic value. The magnetron sputtering technology can be used for preparing various superhard films, corrosion-resistant friction films, superconducting films, magnetic films, optical films and various films with special functions, and is widely applied in the field of industrial film preparation.
Currently, the industrialized magnetron sputtering equipment is mainly divided into two types:
(1) The assembly line type coating equipment is generally in a linear structure and comprises a sample feeding chamber, a transition chamber (namely a buffer chamber), a coating chamber, another transition chamber, a sample discharging chamber and a return frame guide rail. During production, after a sample is placed in the sample base frame, the sample enters from the sample introduction cavity, enters the coating cavity through the transition cavity, then enters the sample outlet cavity through the transition cavity after the coating process is completed in the coating cavity, the base frame can return to the side of the sample introduction cavity through the frame returning guide rail, after a finished product is taken out, the sample to be coated is placed again, and the sample can enter the sample introduction cavity to complete circulation. The design of the buffer chamber can realize continuous sample feeding and discharging under the vacuum condition of the non-ring-broken coating chamber, and the flow line production is realized.
(2) The single body type film coating equipment is generally a cylindrical structure, the structure is simpler, magnetron sputtering cathode parts are uniformly distributed on the inner side of the cavity wall, the positive center position of the cavity is a main sample frame which can rotate, the main sample frame is generally cylindrical, and a plurality of circular sample frames which can rotate are arranged on the main sample frame. During film coating, the gate valve is opened firstly, a sample is placed on the sample rack, then the gate valve is closed, after the proper vacuum is pumped, the main sample rack and the secondary sample rack rotate simultaneously, the sputtering film coating is started, after the film coating is finished, the temperature is cooled, the cavity is vented, the gate valve is opened, and the sample is taken out.
However, the first device can only realize single-side coating, and when a plurality of surfaces of some samples need to be coated, films can only be coated on different surfaces in sequence, so that the time required by coating is increased, and the uniformity of the films on the surfaces of the workpieces cannot be ensured. In the second equipment, the equipment needs to be re-exposed to the atmosphere every time when the samples are replaced, only one batch of samples can be produced at one time, continuous production cannot be realized, the equipment needs to be heated in the sputtering process, and in order to prevent the equipment from being oxidized at high temperature, the atmosphere can be introduced and the samples can be taken out after the equipment is completely cooled after the coating is finished, so that the process time is increased.
Disclosure of Invention
In view of the defects in the prior art, the invention provides a self-rotating vertical type coating pedestal which is suitable for assembly line type vertical coating equipment and can be used for comprehensively coating the periphery of a sample.
In order to achieve the purpose, the invention adopts the following technical scheme:
the utility model provides a vertical coating film bed frame of autogyration, includes bed frame body and support, the bed frame body includes the first guide part at top and the second guide part of bottom, the support is used for bearing the sample of treating the coating film, rotationally locates on the bed frame body.
As one embodiment, the base frame body is provided with a receiving groove, and the bracket is received in the receiving groove.
In one embodiment, the plurality of brackets are arranged in the accommodating groove at intervals.
As one embodiment, the pedestal body further includes a control switch, a main control circuit board, a secondary power supply, and a transmission mechanism connected to each other, and the rack is driven by the transmission mechanism to rotate relative to the pedestal body under the control of the control switch.
In one embodiment, an engagement seat is further disposed between the transmission mechanism and the support, the transmission mechanism includes a motor, and one end of the engagement seat is connected to a driving shaft of the motor and the other end is connected to the support.
As one embodiment, the adapter seat has a cylindrical structure, one end of which is provided with a partition board which divides the cross section of the adapter seat into two parts which are isolated from each other; the bracket is provided with a slot, the bracket part is embedded in the connecting seat, and the clapboard is inserted in the slot.
In one embodiment, the first guide part comprises a first magnet in a strip shape arranged along the length direction of the base frame and used for being matched with a magnetic guide piece at the top of the coating chamber in a magnetic mutual exclusion and non-contact mode.
In one embodiment, the second guide portion is a cylinder disposed along a length direction of the base frame.
In one embodiment, the outer surface of the second guiding portion is formed with a raised grid-like texture.
Another objective of the present invention is to provide a coating apparatus, which includes a coating chamber, a first guiding mechanism and a second guiding mechanism respectively disposed at the top and the bottom of the coating chamber, and a self-rotating vertical coating pedestal, wherein the first guiding portion and the second guiding portion are respectively engaged with the first guiding mechanism and the second guiding mechanism.
The invention can realize the production line type production, can perform film coating on a plurality of surfaces of the sample at one time on the premise of ensuring the film quality, has short time consumption of the film coating process and high industrialization efficiency, and is suitable for large-scale industrial production.
Drawings
FIG. 1 is a schematic structural diagram of a coating apparatus according to an embodiment of the present invention;
FIG. 2 is a schematic structural diagram of a coated base frame according to an embodiment of the present invention;
FIG. 3 is a schematic view illustrating the operation of a coated base frame according to an embodiment of the present invention;
Fig. 4 is a schematic view of a bracket mounting structure according to an embodiment of the present invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
Referring to fig. 1, the coating apparatus according to the embodiment of the present invention mainly includes a coating chamber 20, a first guiding mechanism 21 and a second guiding mechanism 22 respectively disposed at the top and the bottom of the coating chamber 20, and a self-rotating vertical coating pedestal 10 installed in the coating chamber 20, where the self-rotating vertical coating pedestal 10 can move along the coating chamber 20, and can also realize the self-rotation of a sample, thereby realizing the omnibearing coating of the sample. The top of the base frame 10 has a first guiding portion 11a, the bottom of the base frame 10 has a second guiding portion 11b, and the first guiding portion 11a and the second guiding portion 11b are respectively matched with the first guiding mechanism 21 and the second guiding mechanism 22 to ensure that the base frame 10 moves linearly above the second guiding mechanism 22 without skewing.
Referring to fig. 2, the self-rotating vertical type film-coating pedestal 10 includes a pedestal body 11 and a support 12, the pedestal body 11 includes a first guide portion 11a at the top and a second guide portion 11b at the bottom, the support 12 is used for bearing a sample to be coated and rotatably disposed on the pedestal body 11, and when the film-coating pedestal 10 moves along a straight line, the support 12 drives the sample thereon to rotate so as to realize omnibearing film coating.
Preferably, the first guiding mechanism 21 is a magnetic guiding mechanism, which is in non-contact fit with the first guiding portion 11a on the top of the filming base frame 10, as shown in fig. 2 and 3, a bar-shaped first magnet a is embedded in the first guide portion 11a, the bar-shaped first magnet a is disposed along the length direction of the base frame, the first guide mechanism 21 is installed at the top of the coating chamber 20, and is U-shaped as a whole, magnetic guide members 210 are disposed at two ends of the U-shaped structure, the magnetic guiding members 210 are second magnets symmetrically disposed at both ends of the first magnet a, respectively having the same polarity as the corresponding surface of the first magnet a, after the film-coating bed frame 10 is installed in the U-shaped groove of the first guide mechanism 21, the first magnet a simultaneously receives the repulsive force of the second magnets on both sides, so that the non-contact matching between the first guide mechanism 21 and the first guide part 11a is realized, and the first guide part 11a of the film-coating bed frame 10 is always positioned in the center of the U-shaped groove.
preferably, the second guide mechanism 22 is a roller guide mechanism, the film coating base frame 10 is carried on the roller guide mechanism and is guided and driven by the roller guide mechanism through friction force, and the first guide portion 11a only plays a role in assisting positioning, so as to prevent the film coating base frame 10 from being inclined. Specifically, the second guiding mechanism 22 includes a motor (not shown) and a plurality of rollers 220 arranged in a straight line, wherein the rotating shaft direction of each roller 220 is the same. Under the driving of the motor, the rollers 220 rotate in the same direction to convey the coated base frame 10, and the second guiding mechanism 22 has both guiding and driving functions.
As shown in fig. 3, the second guiding portion 11b is a cylinder disposed along the length direction of the base frame, and the base frame body 11 further has an engaging portion 11c connecting the main body portion and the second guiding portion 11b, and the engaging portion 11c has a substantially elongated shape as a transition portion between the main body portion and the second guiding portion 11 b. Each roller 220 is formed at its circumferential surface with a groove, and the cylindrical second guide portion 11b is inserted into the groove to maintain contact with the roller 220. During the circumferential rotation of the roller 220, the second guide 11b is moved to the plating position in a predetermined direction. It is further preferable that the second guide portion 11b has a raised grid pattern formed on the outer surface thereof, so that the friction force between the second guide portion and the roller 220 can be increased, and the second guide portion can be prevented from slipping.
In addition, in the present embodiment, the base frame body 11 is provided with a receiving groove 110, and the rack 12 is received in the receiving groove 110, preferably, a plurality of racks 12 are provided in the receiving groove 110 at intervals. The pedestal body 11 further has a control switch 111, a main control circuit board 112, an auxiliary power source 113 and a transmission mechanism 114 connected to each other, the main control circuit board 112 is connected to the control switch 111 on the surface of the pedestal body 11 through a communication line, the transmission mechanism 114 can be a motor, the auxiliary power source 113 provides a power source for the transmission mechanism 114, and the support 12 is driven by the transmission mechanism 114 to rotate relative to the pedestal body 11 under the control of the control switch 111. Preferably, each support 12 corresponds to one transmission mechanism 114, so that centralized control can be realized and the coating process of each sample is not influenced mutually.
the control switch 111 includes a power switch 111a and a speed-adjusting knob 111b, the power switch 111a is used for controlling the start and stop of the transmission mechanism 114, and the speed-adjusting knob 111b is used for adjusting the rotation speed of the base frame body 11.
The pedestal body 11 mainly adopts a heat insulating material, and the heat insulating material can be filled in the metal shell structure, so that certain mechanical strength is ensured, a motor, an auxiliary power supply, a circuit board and the like in the pedestal body 11 can be protected, and damage caused by overhigh temperature in a cavity is avoided.
In one embodiment, a joint base 13 is further disposed between the transmission mechanism 114 and the bracket 12, the transmission mechanism 114 includes a motor, one end of the joint base 13 is connected to a driving shaft of the motor, and the other end is connected to the bracket 12. The tubular structure of the connecting seat 13 of this embodiment has a partition 131 at one end, and the partition 131 divides the cross section of the connecting seat 13 into two parts separated from each other; the bracket 12 is provided with a slot 121, part of the bracket 12 is embedded in the connecting seat 13, and the partition plate 131 is inserted in the slot 121, so that the connecting seat 13 and the bracket 12 are reliably connected, and the upper end of the bracket 12 is a bearing surface and is used as a fixing platform for a sample.
During the coating production, a sample is fixed on the cylindrical platform at the upper end of the bracket 12, the bracket 12 can be inserted into the connecting seat 13 and kept fixed through the slot 121, the power switch 111a is turned on, the speed regulating knob 111b is adjusted to a proper gear, the motor of the transmission mechanism 114 can be started, and then the coating base frame 10 enters the coating chamber 20 for coating. After the film coating is finished, the film coating base frame 10 moves out of the film coating chamber 20, the speed regulating knob 111b is adjusted to the minimum gear, the power switch 111a is turned off, the bracket 12 is taken down and the sample is taken away, meanwhile, another bracket 12 with the sample fixed thereon is placed and is inserted into the empty connecting seat 13 again, the power switch 111a is turned on again, the speed regulating knob 111b is adjusted to the proper gear, the film coating base frame 10 enters the film coating chamber 20 again for film coating, and the production line type continuous production is realized.
The invention can realize the production line type production, can perform film coating on a plurality of surfaces of the sample at one time on the premise of ensuring the film quality, has short time consumption of the film coating process and high industrialization efficiency, and is suitable for large-scale industrial production. Compared with traditional monomer coating equipment, the equipment can realize production line type PVD coating production while realizing comprehensive coating of samples, can realize continuous coating in a coating cavity by matching with a sample introduction cavity, a transition cavity, a sample outlet cavity and the like, does not need to only plate a batch of samples like the monomer coating equipment at a time, and greatly improves the production efficiency.
The foregoing is directed to embodiments of the present application and it is noted that numerous modifications and adaptations may be made by those skilled in the art without departing from the principles of the present application and are intended to be within the scope of the present application.
Claims (7)
1. The self-rotating vertical type film coating pedestal is characterized by comprising a pedestal body (11) and a support (12), wherein the pedestal body (11) comprises a first guide part (11a) at the top and a second guide part (11b) at the bottom, and the support (12) is used for bearing a sample to be coated and is rotatably arranged on the pedestal body (11); the pedestal body (11) comprises a transmission mechanism (114) for driving the supports (12) to rotate, a control switch (111) connected with the transmission mechanism, a main control circuit board (112), and a secondary power supply (113) for providing a power source for the transmission mechanism (114), wherein each support (12) corresponds to one transmission mechanism (114), and the supports (12) are driven by the transmission mechanism (114) to rotate relative to the pedestal body (11) under the control of the control switch (111); a joint seat (13) is further arranged between the transmission mechanism (114) and the support (12), the transmission mechanism (114) comprises a motor, one end of the joint seat (13) is connected with a driving shaft of the motor, and the other end of the joint seat is connected with the support (12); one end of the connecting seat (13) is of a cylindrical structure, a partition plate (131) is arranged, and the partition plate (131) divides the section of the connecting seat (13) into two parts which are isolated from each other; the support (12) is provided with a slot (121), the support (12) is partially embedded in the connecting seat (13), and the partition plate (131) is inserted in the slot (121).
2. The self-rotating vertical type coating pedestal of claim 1, wherein the pedestal body (11) is provided with a receiving groove (110), and the support (12) is received in the receiving groove (110).
3. The self-rotating vertical coated pedestal frame according to claim 2, wherein the plurality of supports (12) are arranged in the accommodating groove (110) at intervals.
4. A spin stand coating pedestal according to any one of claims 1 to 3, wherein the first guide portion (11a) comprises a first magnet (a) in the form of a strip disposed along the length of the pedestal for magnetically repelling but non-contacting engagement with a magnetic guide (210) at the top of the coating chamber (20).
5. a self-rotating vertical coated pedestal according to any one of claims 1 to 3, wherein the second guide part (11b) is a cylinder disposed along the length of the pedestal.
6. The spin stand coating pedestal of claim 5, wherein the outer surface of the second guide part (11b) is formed with a raised grid-like texture.
7. a coating apparatus comprising a coating chamber (20), a first guide mechanism (21) and a second guide mechanism (22) respectively provided at the top and bottom of the coating chamber (20), and the self-rotating vertical coating base frame according to any one of claims 1 to 6, wherein the first guide portion (11a) and the second guide portion (11b) are respectively engaged with the first guide mechanism (21) and the second guide mechanism (22).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710419898.XA CN107130225B (en) | 2017-06-06 | 2017-06-06 | Self-rotating vertical film coating base frame and film coating equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710419898.XA CN107130225B (en) | 2017-06-06 | 2017-06-06 | Self-rotating vertical film coating base frame and film coating equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN107130225A CN107130225A (en) | 2017-09-05 |
| CN107130225B true CN107130225B (en) | 2019-12-13 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710419898.XA Active CN107130225B (en) | 2017-06-06 | 2017-06-06 | Self-rotating vertical film coating base frame and film coating equipment |
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| Country | Link |
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| CN (1) | CN107130225B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109609921B (en) * | 2018-12-19 | 2020-03-27 | 中南大学 | Magnetic control device of vacuum system and vacuum equipment |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201116306Y (en) * | 2007-10-24 | 2008-09-17 | 钰衡科技股份有限公司 | Self-rotation carrier for continuous film-plating equipment |
| CN201695084U (en) * | 2010-06-08 | 2011-01-05 | 湘潭宏大真空设备有限公司 | Magnetic steering device of substrate frame of vacuum coating production line |
| CN201962348U (en) * | 2010-12-27 | 2011-09-07 | 亚光耐普罗精密注塑（天津）有限公司 | Transverse insertion type hanging appliance for mobile phone housings |
| CN102211074A (en) * | 2010-04-07 | 2011-10-12 | 鸿富锦精密工业（深圳）有限公司 | Film coating rotary device and film coating equipment |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101838799B (en) * | 2010-06-08 | 2012-07-04 | 湘潭宏大真空技术股份有限公司 | Horizontal high-temperature vacuum coating production line |
| CN203462125U (en) * | 2013-06-25 | 2014-03-05 | 深圳新南亚技术开发有限公司 | Magnetic guiding device for vacuum coating |
| CN203373419U (en) * | 2013-07-26 | 2014-01-01 | 普乐新能源（蚌埠）有限公司 | Substrate rack slewing device |
-
2017
- 2017-06-06 CN CN201710419898.XA patent/CN107130225B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201116306Y (en) * | 2007-10-24 | 2008-09-17 | 钰衡科技股份有限公司 | Self-rotation carrier for continuous film-plating equipment |
| CN102211074A (en) * | 2010-04-07 | 2011-10-12 | 鸿富锦精密工业（深圳）有限公司 | Film coating rotary device and film coating equipment |
| CN201695084U (en) * | 2010-06-08 | 2011-01-05 | 湘潭宏大真空设备有限公司 | Magnetic steering device of substrate frame of vacuum coating production line |
| CN201962348U (en) * | 2010-12-27 | 2011-09-07 | 亚光耐普罗精密注塑（天津）有限公司 | Transverse insertion type hanging appliance for mobile phone housings |
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| CN107130225A (en) | 2017-09-05 |
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