CN102211074A - Film coating rotary device and film coating equipment - Google Patents
Film coating rotary device and film coating equipment Download PDFInfo
- Publication number
- CN102211074A CN102211074A CN2010101409455A CN201010140945A CN102211074A CN 102211074 A CN102211074 A CN 102211074A CN 2010101409455 A CN2010101409455 A CN 2010101409455A CN 201010140945 A CN201010140945 A CN 201010140945A CN 102211074 A CN102211074 A CN 102211074A
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- carrier bar
- turntable
- transmission loop
- tangent plane
- plated film
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Abstract
The invention relates to a film coating rotary device for driving a plurality of base materials to be coated with films to rotate. The film coating rotary device comprises a rotating table and a cylindrical carrying bar; the rotating table comprises a body and a rotating rod, wherein the rotating rod is rotationally arranged in the body along the diameter direction of the body; the carrying bar is used for being accessorily provided with the base materials and comprises a first end and a second end which are oppositely arranged; the first end is provided with a tangent plane; a clamping groove extends from the tangent plane along the axial direction of the carrying bar towards the second end; and the carrying bar can extend into the body and enable the rotating rod to be clamped into the clamping groove under the matching of the tangent plane so as to be coupled with the carrying bar and the rotating table. According to the film coating rotary device disclosed by the invention, because the first end of the carrying bar is inserted into the rotating table when the carrying bar is coupled with the rotating table, the tangent plane firstly contacts with the rotating rod so that the rotating rod rotates, and therefore, the direction of the carrying bar is adjusted, the carrying bar is driven to slide into the clamping groove and the condition that the carrying bar can not be smoothly coupled with the rotating table is effectively prevented. Besides, the invention also discloses film coating equipment with the film coating rotary device.
Description
Technical field
The present invention relates to a kind of plated film whirligig and filming equipment.
Background technology
The two-chamber vacuum coating equipment is provided with two chambers, carries out plated film respectively in two chambers for base material.Usually, base material is attached on the carrier bar, and carrier bar is hung on one and strides on the transport sector of establishing two chambers.Base material is after a chamber has plated film, and carrier bar enters another chamber by transport sector, so that the further plated film of base material.Usually, two coating chambers also are respectively arranged with turntable, to be coupled with carrier bar, to drive carrier bar and rotate, and make plated film even.Existing turntable is cylindric, and offers draw-in groove in tip edge.Carrier bar can stretch in the turntable, and an end that stretches into turntable radially is extended with bayonet lock along carrier bar.When carrier bar stretched into turntable, bayonet lock snapped in the draw-in groove, finished the coupling of carrier bar and turntable.Yet bayonet lock is difficult to realization, time-consuming with aiming at of draw-in groove, causes the plated film inefficiency.
Summary of the invention
In view of this, be necessary to provide a kind of high efficiency plated film whirligig and filming equipment.
A kind of plated film whirligig is used to drive a plurality of base materials to be coated and rotates, and it comprises a turntable and a columned carrier bar.Described turntable comprises that a body cylindraceous and the diametric(al) rotation along described body are arranged at described intrinsic swingle.Described carrier bar is used to set up described a plurality of base material, and it comprises first end and second end that is oppositely arranged.Described first end is offered a tangent plane, axially is extended with a draw-in groove towards second end from described tangent plane along carrier bar.Described carrier bar can stretch in the described body and make described swingle snap in described draw-in groove with described carrier bar and the described turntable of being coupled under the cooperation of described tangent plane and described swingle.
A kind of filming equipment that utilizes above-mentioned plated film whirligig, it also comprises two chambers, a gate, two first transmission loops, two the second transmission loops, a plurality of described plated film whirligig, a clamping device and controllers.Described gate is used for separating and is communicated with described two chambers after plated film is finished when plated film.Described two the first transmission loops and the second transmission loop are separately positioned on the top and the bottom of described two chambers.Described a plurality of turntable is separately positioned on described two first transmission loops.The described first transmission loop is used for driving described turntable at coating process and is rotated, and drives described turntable simultaneously and moves along the described first transmission loop.The described second transmission loop is used for driving described a plurality of carrier bars at coating process and moves along the described second transmission loop.Described clamping device is positioned at one of them chamber, is used for when each carrier bar moves to described gate described carrier bar being separated with described turntable and described carrier bar being transmitted between different chambers.Described controller is used to control the switching of described gate and the action of described clamping device, also control the motion in described first transmission loop and the described second transmission loop simultaneously, make when described gate is opened, the carrier bar that described clamping device will be positioned at the gate place moves to another chamber, described then first, second transmission loop motion, thereby drive next carrier bar and move to described gate place, described clamping device moves next carrier bar in another chamber.
Plated film whirligig of the present invention and filming equipment, at carrier bar and turntable when being coupled, first end of described carrier bar inserts described turntable, cause described tangent plane to contact with described swingle earlier, described swingle is rotated, and in described swingle rotation process, adjust the direction of described carrier bar, slip in the described draw-in groove thereby drive described carrier bar, prevent that effectively described carrier bar can not be smoothly and the situation of described turntable coupling, enhance productivity greatly.
Description of drawings
Fig. 1 is the side view of the filming equipment of better embodiment of the present invention;
Fig. 2 is the vertical view of the filming equipment of Fig. 1;
Fig. 3 is the structural representation of plated film whirligig of the filming equipment of Fig. 1;
Fig. 4 is the partial sectional view of plated film whirligig of the filming equipment of Fig. 1;
Fig. 5 is the partial sectional view of another state of plated film whirligig of the filming equipment of Fig. 1.
The main element symbol description
Filming equipment 1
The first transmission loop 21
The second transmission loop 22
Plated film whirligig 30
Swingle 312
Draw-in groove 355
Clamping device 40
The specific embodiment
Below in conjunction with accompanying drawing, the present invention is described in further detail.
See also Fig. 1 and Fig. 2, a kind of filming equipment 1 that provides for better embodiment of the present invention, be used for base material to be coated 2 is carried out plated film, it comprises 12, one gates 13 of first chamber, 11, the second chambers, two first transmission loops 21, two second transmission loops 22, a plurality of plated film whirligig 30 (see figure 3)s, a clamping device 40 and a controller 50.The quantity that is appreciated that described chamber is not limited to two.
Described gate 13 is used for separating described first chamber 11 and second chamber 12 and is communicated with described first chamber 11 and second chamber 12 after plated film is finished when plated film.
Described two first transmission loops 21 and two second transmission loops 22 are circular, are separately positioned on the bottom and the top of described first chamber 11 and second chamber 12.The described first transmission loop 21 equates with described second transmission loop 22 concentric settings and radius.
To shown in Figure 5, described plated film whirligig 30 comprises a turntable 31 and a carrier bar 35 in conjunction with Fig. 3.Described turntable 31 rotates and is arranged on the described first transmission loop 21.The described first transmission loop 21 is used for driving described turntable 31 at coating process and is rotated, and drives described turntable 31 simultaneously and moves along the described first transmission loop 21.Described turntable 31 comprises a body 311 cylindraceous and a swingle 312.Described swingle 312 rotates along the diametric(al) of described body 311 and is arranged in the described body 311.Described carrier bar 35 is a cylindrical-shaped structure, is used to set up described base material 2, and it comprises first end 351 and second end 352 that is oppositely arranged.Described first end 351 is offered an oval-shaped scarf 353.Axially be extended with a draw-in groove 355 from 353 short-axis direction of described oval-shaped scarf along described carrier bar 35 towards described second end 352.First end 351 of described carrier bar 35 can stretch in the described body 311 and make described swingle 312 snap in described draw-in groove 355 under the cooperation of described scarf 353 and described swingle 312, with described carrier bar 35 and the described turntable 31 of being coupled.Described second end 352 is slidingly arranged on the described second transmission loop 22.The described second transmission loop 22 is used for driving described a plurality of carrier bars 35 at coating process and moves along the described second transmission loop 22.The described second transmission loop 22 is identical with the movement velocity in the described first transmission loop 21.Described carrier bar 35 also comprises a flange 357, and described flange 357 stretches out between described first end 351 and second end 352 and along the diametric(al) of described carrier bar 35.The radius of described flange 357 makes described flange 357 can be stuck on the body 311 of described turntable 31 greater than the radius of the body 311 of described turntable 31.
Be appreciated that, also can be along offer a circular tangent plane perpendicular to the bearing of trend of described carrier bar on described first end 351, be extended with the draw-in groove that an opening reduces gradually from the diametric(al) of described circular tangent plane towards described second end, the madial wall that is draw-in groove is the inclined-plane, when making first end 351 of described carrier bar 35 contact with described swingle 312, also can give the external force of 312 1 inclinations of described swingle, make described swingle 312 rotate, drive described carrier bar 35 and be coupled with described swingle 312 smoothly.
Described clamping device 40 is arranged in described first chamber 11, it comprises a pedestal 41 and two mechanical arms 42, described mechanical arm 42 can carry out stretching motion with respect to described pedestal 41, thereby make when each carrier bar 35 moves to described gate 13, described mechanical arm 42 stretches out, described carrier bar 35 is separated with corresponding turntable 31, and described carrier bar 35 is passed to second chamber 12 by first chamber 11; Described then mechanical arm 42 is prepared the next carrier bar 35 of clamping from described first chamber 11 of second chamber, 12 withdrawals.Be appreciated that, in the course of the work, described clamping device 40 is upwards mentioned described carrier bar 35 earlier, make described carrier bar 35 and described turntable 31 break away from, then described carrier bar 35 is delivered to second chamber 12 by first chamber 11, and the turntable 31 in the described carrier bar 35 and second chamber 12 is coupled.
Described controller 50 and the described first transmission loop 21, the second transmission loop 22, gate 13 and described clamping device 40 are electrically connected, be used to control the switching of described gate 13 and the action of described clamping device 40, also control the motion in the first transmission loop 21 and the second transmission loop 22 simultaneously, make when described gate 13 is opened, the carrier bar 35 that described clamping device 40 will be positioned at gate 13 places moves to second chamber 12, described then first transmission loop 21 and 22 motions of the second transmission loop, thereby drive next carrier bar 35 and move to described gate 13 places, described clamping device 40 moves next carrier bar 35 in second chamber 12.
The course of work of described filming equipment 1 is as follows: when described base material 2 after plated film is finished in first chamber 11, described controller 50 is opened described gate 13, and described mechanical arm 42 is clamped be positioned at the carrier bar 35 at described gate 13 places, to carry on the described carrier bar 35, described carrier bar 35 and described turntable 31 are broken away from, by described gate 13, enter described second chamber 12, when described carrier bar 35 moves to the top of a turntable 31 in second chamber 12, described clamping device 40 moves up into described turntable 31 for 35 times with described carrier bar, this moment, the scarf 353 of described carrier bar 35 contacted with described swingle 312, give 312 1 downward-sloping power of described swingle, described swingle 312 is rotated, and in described swingle 312 rotation processes, adjust the direction of described carrier bar 35, slip in the described draw-in groove 355 thereby drive described carrier bar 35, to be coupled with described turntable 31.Then, in described first chamber 11 of described mechanical arm 42 withdrawals, the carrier bar that is positioned at first chamber is rotated further an angle under the drive in the described first transmission loop 21, make another carrier bar 35 move to described gate 13 places, the circulation said process, all carrier bars 35 all are moved in described second chamber 12 successively in first chamber 11.Then, described controller 50 cuts out described gate 13, the described first transmission loop 21 drives described turntable 31 and is rotated, and drive described turntable 31 along described first the transmission loop 21 move, thereby drive that base material 2 on the described carrier bar 35 is rotated and move, make described base material 2 can plated film even along the described first transmission loop 21.
The carrier bar of filming equipment of the present invention and turntable are when being coupled, first end of described carrier bar inserts described turntable, cause described scarf to contact with described swingle earlier, described swingle is rotated, and in described swingle rotation process, adjust the direction of described carrier bar, slip in the described draw-in groove thereby drive described carrier bar, prevent that effectively described carrier bar can not be smoothly and the situation of described turntable coupling, enhance productivity greatly.
Be understandable that, for the person of ordinary skill of the art, can make other various corresponding changes and distortion by technical conceive according to the present invention, and all these change the protection domain that all should belong to claim of the present invention with distortion.
Claims (7)
1. plated film whirligig, being used to drive a plurality of base materials to be coated rotates, it comprises a turntable and a columned carrier bar, described turntable comprises that a body cylindraceous and the diametric(al) rotation along described body are arranged at described intrinsic swingle, described carrier bar is used to set up described base material, it comprises first end and second end that is oppositely arranged, described first end is offered a tangent plane, axially be extended with a draw-in groove towards second end from described tangent plane along carrier bar, described carrier bar can stretch in the described body and make described swingle snap in described draw-in groove with described carrier bar and the described turntable of being coupled under the cooperation of described tangent plane and described swingle.
2. plated film whirligig as claimed in claim 1, it is characterized in that, described tangent plane is the scarf of ovalize, and described tangent plane is cut sth. askew with the direction that is acute angle with described first end and is formed, and described draw-in groove is from minor axis location axially the extending towards second end along carrier bar of described oval-shaped scarf.
3. plated film whirligig as claimed in claim 1, it is characterized in that described tangent plane is rounded, and described tangent plane is along offering perpendicular to described carrier bar, described draw-in groove extends towards described second end from the diametric(al) of described circular tangent plane, and the opening of described draw-in groove reduces gradually.
4. plated film whirligig as claimed in claim 1, it is characterized in that, described carrier bar also comprises a circular flange, described flange is between described first end and second section, and the diametric(al) along described carrier bar stretches out, after described carrier bar and the coupling of described swingle, described flange is fastened on the body of described turntable.
5. filming equipment that utilizes plated film whirligig as claimed in claim 1, it also comprises two chambers, a gate, two first transmission loops, two the second transmission loops, a plurality of described plated film whirligig, a clamping device and controllers; Described gate is used for separating and is communicated with described two chambers after plated film is finished when plated film; Described two the first transmission loops and the second transmission loop are separately positioned on the top and the bottom of described two chambers; Described a plurality of turntable is separately positioned on described two first transmission loops; The described first transmission loop is used for driving described turntable at coating process and is rotated, and drives described turntable simultaneously and moves along the described first transmission loop; The described second transmission loop is used for driving described a plurality of carrier bars at coating process and moves along the described second transmission loop; Described clamping device is positioned at one of them chamber, is used for when each carrier bar moves to described gate described carrier bar being separated with described turntable and described carrier bar being transmitted between different chambers; Described controller is used to control the switching of described gate and the action of described clamping device, also control the motion in described first transmission loop and the described second transmission loop simultaneously, make when described gate is opened, the carrier bar that described clamping device will be positioned at the gate place moves to another chamber, described then first, second transmission loop motion, thereby drive next carrier bar and move to described gate place, described clamping device moves next carrier bar in another chamber.
6. filming equipment as claimed in claim 5 is characterized in that, described clamping device comprises a pedestal and at least one mechanical arm, and described mechanical arm can be done stretching motion with respect to described pedestal.
7. filming equipment as claimed in claim 5 is characterized in that, described second transmission loop and the described first transmission loop are circular, and the radius in the described second transmission loop equates with the radius in the described first transmission loop.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010101409455A CN102211074A (en) | 2010-04-07 | 2010-04-07 | Film coating rotary device and film coating equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010101409455A CN102211074A (en) | 2010-04-07 | 2010-04-07 | Film coating rotary device and film coating equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN102211074A true CN102211074A (en) | 2011-10-12 |
Family
ID=44742742
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010101409455A Pending CN102211074A (en) | 2010-04-07 | 2010-04-07 | Film coating rotary device and film coating equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN102211074A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107130225A (en) * | 2017-06-06 | 2017-09-05 | 深圳先进技术研究院 | A kind of vertical plated film pedestal of spinning and filming equipment |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6384666A (en) * | 1986-09-29 | 1988-04-15 | Haneda Seisakusho:Kk | Rotary coating device |
| JP2003282406A (en) * | 2002-03-22 | 2003-10-03 | Sony Corp | Device and method of manufacturing semiconductor device |
| CN201040767Y (en) * | 2006-03-30 | 2008-03-26 | 潘振强 | Vacuum vertical film plating machine workpiece rotating frame |
| CN101451588A (en) * | 2007-11-30 | 2009-06-10 | 财团法人工业技术研究院 | Valve mechanism and variable damping damper using the same |
| CN201265038Y (en) * | 2008-09-13 | 2009-07-01 | 苏东艺 | Autorotation mechanism of vacuum ion film coater |
-
2010
- 2010-04-07 CN CN2010101409455A patent/CN102211074A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6384666A (en) * | 1986-09-29 | 1988-04-15 | Haneda Seisakusho:Kk | Rotary coating device |
| JP2003282406A (en) * | 2002-03-22 | 2003-10-03 | Sony Corp | Device and method of manufacturing semiconductor device |
| CN201040767Y (en) * | 2006-03-30 | 2008-03-26 | 潘振强 | Vacuum vertical film plating machine workpiece rotating frame |
| CN101451588A (en) * | 2007-11-30 | 2009-06-10 | 财团法人工业技术研究院 | Valve mechanism and variable damping damper using the same |
| CN201265038Y (en) * | 2008-09-13 | 2009-07-01 | 苏东艺 | Autorotation mechanism of vacuum ion film coater |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107130225A (en) * | 2017-06-06 | 2017-09-05 | 深圳先进技术研究院 | A kind of vertical plated film pedestal of spinning and filming equipment |
| CN107130225B (en) * | 2017-06-06 | 2019-12-13 | 深圳先进技术研究院 | Self-rotating vertical film coating base frame and film coating equipment |
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Application publication date: 20111012 |