CN107121898A - A kind of TFT LCD, which are shown, uses developer solution - Google Patents
A kind of TFT LCD, which are shown, uses developer solution Download PDFInfo
- Publication number
- CN107121898A CN107121898A CN201710436615.2A CN201710436615A CN107121898A CN 107121898 A CN107121898 A CN 107121898A CN 201710436615 A CN201710436615 A CN 201710436615A CN 107121898 A CN107121898 A CN 107121898A
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- China
- Prior art keywords
- developer solution
- parts
- tft
- deionized water
- amine
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/30—Imagewise removal using liquid means
- G03F7/32—Liquid compositions therefor, e.g. developers
- G03F7/322—Aqueous alkaline compositions
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
Abstract
Shown the invention discloses a kind of TFT LCD and use developer solution, the developer solution is made up of the component of following parts by weight：42 54 parts of 22 26 parts of alkali compounds, 7 14 parts of nonionic surfactant, 9 15 parts of bleeding agent and deionized water.The developer solution of the present invention overcomes existing developer solution when in use can not be while take into account developability, defoaming, dispersion stabilization and the narrow shortcoming of operating temperature range, the developer solution need not add defoamer, with developing performance it is good, without residue, operating temperature range it is wide, it is low in the pollution of the environment the features such as, in the development preparation technology of photoresist, with extremely important and be widely applied；The developer solution of the present invention has resulting visualization good simultaneously, it is to avoid residue is generated, there is hypotoxicity, do not have inflammability and management easily, liquid waste processing it is easy and with low cost.
Description
Technical field
The present invention relates to TFT-LCD technical field, and in particular to a kind of TFT-LCD, which is shown, uses developer solution.
Background technology
Typically in the preparation technologies such as liquid crystal display, printed circuit board (PCB) and integrated circuit, to obtain fine pattern, commonly use
The radioactive ray such as photoresist sensitivity constituent forms film with coating method on base material, aobvious with alkaline-based developer after overexposure
Picture, remove should not film part, to obtain good figure.
In these offset printing processes, by exposing the photoresist mask for being decorated with circuit pattern being transferred on chip
On, the plane of exposure of above-mentioned photoresist is contacted with developer solution, for positivity, exposure is partially dissolved in developer solution, and right
In negativity, unexposed area is dissolved in developer solution.
First purpose of developing process is that unexposed positive corrosion-resisting agent film should be minimum by developer extent of corrosion.It is actual
Development always have corrosion to a certain degree to unexposed resist, but due to exposure region and unexposed area solubility not
Together so that resist feasible process.In fact, the bigger developer of range of choice also takes longer to complete developed image.
So, when selecting developer, different solubility and production capacity must just be considered.Its production capacity of a developer should be selected to meet will
Ask and do not cause undue resist thinning.In addition, developer also should have enough contents so that technique can be in growing environment
Maintain.
Carrying out development has three kinds of main methods：Immersion, spray and agitation development.
But according to the technology of known developer solution, photonasty resist is after film and pre-baked, exposure, though it can be shown with alkalescence
Shadow liquid come dissolve remove it is unexposed and should not film part, but easily produce and do not develop position particle or undissolved in development
It is relatively difficult to form fine image after the remaining of thing, therefore development, so that the demand in market can not be met.
The content of the invention
The present invention is intended to provide a kind of TFT-LCD shows and uses developer solution.
The present invention provides following technical scheme：
A kind of TFT-LCD, which is shown, uses developer solution, and the developer solution is made up of the component of following parts by weight：Alkali compounds
42-54 parts of 22-26 parts, 7-14 parts of nonionic surfactant, 9-15 parts of bleeding agent and deionized water.
The alkali compounds is inorganic alkaline compound or organic basic compound；Wherein, inorganic alkaline compound is：
One or more in the hydroxide of alkali metal, bicarbonate, carbonate；Organic basic compound is：Monomethyl amine, diformazan
Base amine, Trimethylamine, MEA, diethylamide, triethylamine, MEA, diethanol amine, triethanolamine, hydroxide four
One or more in ammonium methyl, tetraethyl ammonium hydroxide, monoethanol dimethyl amine.
The nonionic surfactant is selected from coconut oil fatty acid monoethanolamide, coco-nut oil fatty acid diethanol acyl
At least one of amine, castor oil polyoxyethylene ether and castor oil polyoxyethylene ether.
The bleeding agent is the polyethylene oxide and the condensation product or phosphoric acid of higher aliphatic in polyethenoxy ether class bleeding agent
Ester.
The deionized water is the water filtered by ion exchange resin, and its resistance is at least 18M Ω.
In the deionized water, total concentration of metal ions is not more than 4000 nanograms/L, and preferably no greater than 500 nanograms/
L, more preferably no more than 50 nanograms/L.
Compared with prior art, the beneficial effects of the invention are as follows：The developer solution of the present invention, which overcomes existing developer solution, to be made
Used time can not take into account developability, defoaming, dispersion stabilization and the narrow shortcoming of operating temperature range simultaneously, and the developer solution need not add
Plus defoamer, with developing performance it is good, without residue, operating temperature range it is wide, it is low in the pollution of the environment the features such as, in photoresist
In the preparation technology that develops, with extremely important and be widely applied；The developer solution of the present invention has resulting visualization good simultaneously, it is to avoid
Residue is generated, and is had the advantages that hypotoxicity, do not have inflammability and is managed easy, liquid waste processing and be easy and with low cost.
Embodiment
Below in conjunction with the embodiment of the present invention, the technical scheme in the embodiment of the present invention is clearly and completely described,
Obviously, described embodiment is only a part of embodiment of the invention, rather than whole embodiments.Based in the present invention
Embodiment, the every other embodiment that those of ordinary skill in the art are obtained under the premise of creative work is not made, all
Belong to the scope of protection of the invention.
A kind of TFT-LCD of embodiment 1, which is shown, uses developer solution, and the developer solution is made up of the component of following parts by weight：Alkali
Property 42 parts of 22 parts of compound, 7 parts of nonionic surfactant, 9 parts of bleeding agent and deionized water.
The alkali compounds is inorganic alkaline compound or organic basic compound；Wherein, inorganic alkaline compound is：
One or more in the hydroxide of alkali metal, bicarbonate, carbonate；Organic basic compound is：Monomethyl amine, diformazan
Base amine, Trimethylamine, MEA, diethylamide, triethylamine, MEA, diethanol amine, triethanolamine, hydroxide four
One or more in ammonium methyl, tetraethyl ammonium hydroxide, monoethanol dimethyl amine.
The nonionic surfactant is selected from coconut oil fatty acid monoethanolamide, coco-nut oil fatty acid diethanol acyl
At least one of amine, castor oil polyoxyethylene ether and castor oil polyoxyethylene ether.
The bleeding agent is the polyethylene oxide and the condensation product or phosphoric acid of higher aliphatic in polyethenoxy ether class bleeding agent
Ester.
The deionized water is the water filtered by ion exchange resin, and its resistance is at least 18M Ω.
In the deionized water, total concentration of metal ions is not more than 4000 nanograms/L, preferably no greater than 500 nanograms/L, more
Preferably no greater than 50 nanograms/L.
A kind of TFT-LCD of embodiment 2, which is shown, uses developer solution, and the developer solution is made up of the component of following parts by weight：Alkali
Property 54 parts of 26 parts of compound, 14 parts of nonionic surfactant, 15 parts of bleeding agent and deionized water.
The alkali compounds is inorganic alkaline compound or organic basic compound；Wherein, inorganic alkaline compound is：
One or more in the hydroxide of alkali metal, bicarbonate, carbonate；Organic basic compound is：Monomethyl amine, diformazan
Base amine, Trimethylamine, MEA, diethylamide, triethylamine, MEA, diethanol amine, triethanolamine, hydroxide four
One or more in ammonium methyl, tetraethyl ammonium hydroxide, monoethanol dimethyl amine.
The nonionic surfactant is selected from coconut oil fatty acid monoethanolamide, coco-nut oil fatty acid diethanol acyl
At least one of amine, castor oil polyoxyethylene ether and castor oil polyoxyethylene ether.
The bleeding agent is the polyethylene oxide and the condensation product or phosphoric acid of higher aliphatic in polyethenoxy ether class bleeding agent
Ester.
The deionized water is the water filtered by ion exchange resin, and its resistance is at least 18M Ω.
In the deionized water, total concentration of metal ions is not more than 4000 nanograms/L, preferably no greater than 500 nanograms/L, more
Preferably no greater than 50 nanograms/L.
A kind of TFT-LCD of embodiment 3, which is shown, uses developer solution, and the developer solution is made up of the component of following parts by weight：Alkali
Property 48 parts of 24 parts of compound, 11 parts of nonionic surfactant, 12 parts of bleeding agent and deionized water.
The alkali compounds is inorganic alkaline compound or organic basic compound；Wherein, inorganic alkaline compound is：
One or more in the hydroxide of alkali metal, bicarbonate, carbonate；Organic basic compound is：Monomethyl amine, diformazan
Base amine, Trimethylamine, MEA, diethylamide, triethylamine, MEA, diethanol amine, triethanolamine, hydroxide four
One or more in ammonium methyl, tetraethyl ammonium hydroxide, monoethanol dimethyl amine.
The nonionic surfactant is selected from coconut oil fatty acid monoethanolamide, coco-nut oil fatty acid diethanol acyl
At least one of amine, castor oil polyoxyethylene ether and castor oil polyoxyethylene ether.
The bleeding agent is the polyethylene oxide and the condensation product or phosphoric acid of higher aliphatic in polyethenoxy ether class bleeding agent
Ester.
The deionized water is the water filtered by ion exchange resin, and its resistance is at least 18M Ω.
In the deionized water, total concentration of metal ions is not more than 4000 nanograms/L, preferably no greater than 500 nanograms/L, more
Preferably no greater than 50 nanograms/L.
It is obvious to a person skilled in the art that the invention is not restricted to the details of the one exemplary embodiment, Er Qie
In the case of without departing substantially from spirit or essential attributes of the invention, the present invention can be realized in other specific forms.Therefore, no matter
From the point of view of which point, embodiment all should be regarded as exemplary, and be nonrestrictive, the scope of the present invention is by appended power
Profit is required rather than the explanation is limited, it is intended that all in the implication and scope of the equivalency of claim by falling
Change is included in the present invention.Although not each moreover, it will be appreciated that the present specification is described in terms of embodiments
Embodiment is only comprising an independent technical scheme, and this narrating mode of specification is only this area for clarity
Technical staff should be using specification as an entirety, and the technical solutions in the various embodiments may also be suitably combined, forms this
Art personnel may be appreciated other embodiment.
Claims (6)
1. a kind of TFT-LCD, which is shown, uses developer solution, it is characterised in that the developer solution is made up of the component of following parts by weight：
42-54 parts of 22-26 parts of alkali compounds, 7-14 parts of nonionic surfactant, 9-15 parts of bleeding agent and deionized water.
2. a kind of TFT-LCD according to claim 1, which is shown, uses developer solution, it is characterised in that：The alkali compounds is
Inorganic alkaline compound or organic basic compound；Wherein, inorganic alkaline compound is：Hydroxide, the bicarbonate of alkali metal
One or more in salt, carbonate；Organic basic compound is：Monomethyl amine, dimethyl amine, Trimethylamine, MEA,
Diethylamide, triethylamine, MEA, diethanol amine, triethanolamine, tetramethyl ammonium hydroxide, tetraethyl ammonium hydroxide, list
One or more in dimethylamino ethanol base amine.
3. a kind of TFT-LCD according to claim 1, which is shown, uses developer solution, it is characterised in that：The non-ionic surface is lived
Property agent be selected from coconut oil fatty acid monoethanolamide, cocoanut fatty acid diethanolamide, castor oil polyoxyethylene ether and castor-oil plant
At least one of oily APEO.
4. a kind of TFT-LCD according to claim 1, which is shown, uses developer solution, it is characterised in that：The bleeding agent is polyoxy
The condensation product or phosphate of polyethylene oxide and higher aliphatic in ethene ethers bleeding agent.
5. a kind of TFT-LCD according to claim 1, which is shown, uses developer solution, it is characterised in that：The deionized water be through
The water of ion exchange resin filtering is crossed, its resistance is at least 18M Ω.
6. a kind of TFT-LCD according to claim 1, which is shown, uses developer solution, it is characterised in that：The deionized water
In, total concentration of metal ions is not more than 4000 nanograms/L, preferably no greater than 500 nanograms/L, more preferably no more than 50 nanograms/L.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710436615.2A CN107121898A (en) | 2017-06-12 | 2017-06-12 | A kind of TFT LCD, which are shown, uses developer solution |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710436615.2A CN107121898A (en) | 2017-06-12 | 2017-06-12 | A kind of TFT LCD, which are shown, uses developer solution |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN107121898A true CN107121898A (en) | 2017-09-01 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710436615.2A Pending CN107121898A (en) | 2017-06-12 | 2017-06-12 | A kind of TFT LCD, which are shown, uses developer solution |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109375482A (en) * | 2018-11-01 | 2019-02-22 | 博罗县东明新材料研究所 | PCB developer solution and preparation method thereof |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102063024A (en) * | 2010-12-24 | 2011-05-18 | 东莞市智高化学原料有限公司 | Developing solution composition |
| CN102096344A (en) * | 2010-12-17 | 2011-06-15 | 合肥茂丰电子科技有限公司 | Developing solution as well as preparation method and application thereof |
-
2017
- 2017-06-12 CN CN201710436615.2A patent/CN107121898A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102096344A (en) * | 2010-12-17 | 2011-06-15 | 合肥茂丰电子科技有限公司 | Developing solution as well as preparation method and application thereof |
| CN102063024A (en) * | 2010-12-24 | 2011-05-18 | 东莞市智高化学原料有限公司 | Developing solution composition |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109375482A (en) * | 2018-11-01 | 2019-02-22 | 博罗县东明新材料研究所 | PCB developer solution and preparation method thereof |
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Application publication date: 20170901 |