CN107097154B - Simple polishing solution flow control supply device and control method thereof - Google Patents
Simple polishing solution flow control supply device and control method thereof Download PDFInfo
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- CN107097154B CN107097154B CN201710294157.3A CN201710294157A CN107097154B CN 107097154 B CN107097154 B CN 107097154B CN 201710294157 A CN201710294157 A CN 201710294157A CN 107097154 B CN107097154 B CN 107097154B
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- 238000005498 polishing Methods 0.000 title claims abstract description 69
- 238000000034 method Methods 0.000 title claims abstract description 12
- 239000007788 liquid Substances 0.000 claims abstract description 37
- 238000000605 extraction Methods 0.000 claims abstract description 12
- 230000002441 reversible effect Effects 0.000 claims description 8
- 239000003831 antifriction material Substances 0.000 claims description 6
- 239000000463 material Substances 0.000 claims description 5
- 230000000694 effects Effects 0.000 claims description 4
- 238000007517 polishing process Methods 0.000 claims description 4
- 230000005484 gravity Effects 0.000 claims description 3
- 238000002360 preparation method Methods 0.000 claims description 3
- 238000009434 installation Methods 0.000 claims 3
- 238000004140 cleaning Methods 0.000 abstract description 2
- 238000002474 experimental method Methods 0.000 description 3
- 238000004891 communication Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B57/00—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents
- B24B57/02—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents for feeding of fluid, sprayed, pulverised, or liquefied grinding, polishing or lapping agents
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/10—Greenhouse gas [GHG] capture, material saving, heat recovery or other energy efficient measures, e.g. motor control, characterised by manufacturing processes, e.g. for rolling metal or metal working
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- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
The invention relates to a simple polishing solution flow control supply device and a control method thereof, wherein the simple polishing solution flow control supply device comprises a polishing solution extraction part, a control part, a flow control device, a turbine flowmeter and an execution device; the control part is connected with the polishing liquid extraction part, the flow control device and the turbine flowmeter through data wires, the execution device is connected with the flow control device through brake wires, and the execution device is sleeved outside the guide pipe II of the polishing liquid extraction part. The device has simple structure, economy, practicability and convenient use; the suction and flow control of the polishing solution can be effectively realized; part of the device can be detached and replaced, so that the cleaning difficulty can be reduced.
Description
Technical Field
The invention relates to a simple polishing solution flow control supply device and a control method thereof, belonging to the technical field of material machining.
Background
With the continuous improvement of green energy, integrated circuits and other technologies, the requirements on the surface flatness of the substrate material are becoming more stringent, and meanwhile, the requirements on the material removal rate and other requirements in the polishing behavior are also increasing, so that the chemical mechanical polishing technology is widely applied. In the chemical mechanical polishing process, the polishing solution has great influence on the surface quality, the material removal rate and the like. In order to obtain the polishing solution with good effect, a large number of experiments are required, strict requirements are imposed on factors such as the flow rate of the polishing solution, the adding time and the like in a large number of experimental processes, and meanwhile, the device is difficult to clean after the proportioning experiment is finished. The related devices on the market can only realize partial control of experimental factors influencing the polishing solution, and the manufacturing cost is high. There is a need for a device that is inexpensive to manufacture and that provides overall control over the above factors.
Disclosure of Invention
The invention provides a simple polishing solution flow control supply device and a control method thereof, which are used for realizing the problems of polishing solution suction, flow control and the like in experiments.
The technical scheme of the invention is as follows: a simple polishing liquid flow control supply device comprises a polishing liquid extraction part, a control part 11, a flow control device 12, a turbine flowmeter 13 and an execution device 15; the control part 11 is connected with the polishing liquid extraction part, the flow control device 12 and the turbine flowmeter 13 through data wires, the execution device 15 is connected with the flow control device 12 through a brake wire 26, and the execution device 15 is sleeved outside the guide pipe II 14 of the polishing liquid extraction part;
the polishing solution extracting part comprises a test bed 1, a polishing solution container 2, a guide pipe I4, a buffer container 5, a plug cover 6, an air pipe I7, an electromagnetic directional valve 8, an air pipe II 9, an air pump 10, a guide pipe II 14 and a guide pipe III 16; the control part 11 is connected with the electromagnetic directional valve 8 and the air pump 10 through data wires, the buffer container 5 is hung on the test bed 1, the plug cover 6 is arranged at the opening of the upper end of the buffer container 5, one ends of the guide pipe I4 and the air pipe I7 are respectively inserted into the buffer container 5 from two openings on the plug cover 6, the other end of the guide pipe I4 is inserted into the polishing solution container 2 arranged on the test bed 1, the other end of the air pipe I7 is connected with the electromagnetic directional valve 8, the lower end of the buffer container 5 is connected with the guide pipe III 16, the lower end of the guide pipe III 16 is provided with the turbine flowmeter 13, the lower end of the turbine flowmeter 13 is connected with the guide pipe II 14, the air pump 10 is arranged on the mounting seat 25, one end of the air pipe II 9 is inserted into the air suction port of the air pump 10, and the other end of the air pipe II 9 is inserted into the electromagnetic directional valve 8;
the flow control device 12 comprises a gear 17, a flat key 18, a direct current motor 19, a rack 20, a left lead seat 21, a rack mounting seat 22, an antifriction material 23, a right lead seat 24, a mounting seat 25 and a brake cable 26; the control part 11 is connected with the direct current motor 19 through a data line, the direct current motor 19 is arranged on the mounting seat 25, a flat key 18 is arranged on a key groove of a shaft of the direct current motor 19, a gear 17 is arranged on the shaft of the direct current motor 19, a gear hole penetrates through the flat key 18, a rack 20 is arranged on the rack mounting seat 22, two sides of the rack mounting seat 22 are designed to be convex, a concave shape matched with the left lead seat 21 and the right lead seat 24 is arranged on the mounting seat 25, and a brake wire 26 is fixed at one end of the rack mounting seat 20 and is used for being connected with the execution device 15;
the actuator 15 comprises a spring 27, an inner ring 28, an upper outer ring 29 and a lower outer ring 30; wherein the actuating device 15 is sleeved outside the guide pipe II 14 through openings on the inner ring 28, the upper outer ring 29 and the lower outer ring 30, the inner ring 28 is connected with the brake cable 26, a spring 27 is arranged on one side of the inner ring 28, the upper outer ring 29 is engaged with the lower outer ring 30, and the inner ring 28 and the spring 27 are fixed inside the outer ring.
The contact surfaces of the left lead seat 21 and the right lead seat 24 with the rack mounting seat 22 are provided with antifriction materials 23 to reduce friction of the two parts.
A control method of a simple polishing solution flow control supply device comprises the steps of preparing, working and stopping three parts;
preparation: the flow control device 12 and the execution device 15 work, the direct current motor 19 in the execution device 12 rotates to drive the gear 17 to rotate, the gear 17 drives the rack 20 to pull the brake wire 26 along the left lead seat 21 and the right lead seat 24, the brake wire 26 pulls the inner ring 28 in the execution device 15 to translate in the upper outer ring 29 and the lower outer ring 30, the through-flow section of the conduit II 14 is changed by changing the relative opening area of the inner ring and the outer ring, the through-flow section of the conduit II 14 is minimized, the electromagnetic directional valve 8 is used for reversing the position R1, the buffer container 5 is communicated with the air pump 10, the air pump 10 starts to work and pump air suction after the communication, vacuum negative pressure is formed in the buffer container 5, the polishing liquid 3 in the container 2 is sucked into the buffer container 5 along the conduit I4 due to the effect of the vacuum negative pressure, a certain amount of the polishing liquid 3 is sucked into the buffer container 5 at the moment after the air pump 10 works for a period of time, the flow control device 12 and the execution device 15 perform the reverse action for a period of time but not reset, the through-flow section of the conduit II 14 is relatively increased, the air pressure in the buffer container 5 is enabled to be lower than atmospheric pressure, and the polishing liquid III cannot flow from the buffer container 5 to the conduit 16 is enabled to be a value of 0 when the turbine flowmeter 13 is enabled to flow value;
work: the electromagnetic directional valve 8 is switched to the middle position, the buffer container 5 is communicated with indoor air, the internal air pressure is equal to the atmospheric pressure value, so that the polishing liquid 3 can flow out from the buffer container 5 through the guide pipe III 16 and the guide pipe II 14 under the action of gravity, at the moment, the numerical value of the turbine flowmeter 13 is not 0, the control part 11 receives a signal which is not 0 and then controls the electromagnetic directional valve to be switched to the R1 position so as to isolate the buffer container 5 from the external environment, the polishing liquid 3 in the container 2 is continuously sucked into the buffer container 5 along the guide pipe I4 by utilizing the siphon phenomenon, the turbine flowmeter 13 transmits measured data to the singlechip of the control part 11, compares the measured data with the pre-input data and controls the flow control device 12:
if the data is larger than the pre-input data, the buzzer of the control part 11 sounds once, the singlechip of the control part 11 sends a signal to enable the direct current motor 19 to start working, the direct current motor 19 rotates positively, the direct current motor 19 drives the gear 17 to work, the power of the direct current motor 19 is transmitted to the rack 20 through the gear 17 to drive the rack 20 to do linear motion, the rack 20 drives the rack mounting seat 22 to move, the rack mounting seat 22 pulls the brake wire 26, the brake wire 26 pulls the inner ring 28 of the execution device 15, the relative area of the inner ring and the outer ring is reduced to change the through-flow section of the conduit II 14 so as to achieve the purpose of changing the flow, the turbine flowmeter 13 transmits the changed measured data to the control part 11 until the measured data is consistent with the input flow, the direct current motor 19 stops working and enables the rack 20 to stay at the existing position, and the inner ring 28 of the execution device 15 stays at the existing position at the moment, and the timing function is started;
if the data is smaller than the pre-input data, the buzzer of the control part 11 sounds once, the singlechip of the control part 11 sends out a signal to enable the direct current motor 19 to start working, the direct current motor 19 reverses, the flow control device 12 and the execution device 15 restore the pipe diameter of the pipe II 14 due to the elastic action of the pipe II 14 and increase the flow section of the pipe II 14 by executing the action opposite to the condition of being larger than the pre-input data, the turbine flowmeter 13 transmits the changed measured data to the control part 11 until the measured data is consistent with the input flow, the direct current motor 19 stops working and enables the rack 20 to stay at the existing position, the inner ring 28 of the execution device 15 stays at the existing position, and the timing function is started at the moment;
stopping: when the timing shows that the work stops, the buzzer sounds twice, the electromagnetic reversing valve 8 reverses to the middle position, so that the air pressure of the buffer container 5 is consistent with the air pressure, the siphoning phenomenon cannot be generated, the polishing liquid 3 cannot be sucked, the singlechip sends out a signal to enable the direct current motor 19 to reverse, the direct current motor 19 reverse to enable the gear 17 and the rack 20 to reset and pull the brake cable 26, the inner ring 28 of the execution device 15 pulls the brake cable 26 to reset under the action of the spring 27, and the whole polishing process is finished.
If the value of the turbine flowmeter 13 is zero when the value of the counter is not zero, the buzzer alarms to prompt the experimenter to add the polishing liquid 3, and then the whole system stops working.
The beneficial effects of the invention are as follows: the device has simple structure, economy, practicability and convenient use; the suction and flow control of the polishing solution can be effectively realized; part of the device can be detached and replaced, so that the cleaning difficulty can be reduced.
Drawings
FIG. 1 is a schematic view of the overall structure of the present invention;
FIG. 2 is a front view of a flow control device of the present invention;
FIG. 3 is a cross-sectional view of a flow control device A-A of the present invention;
FIG. 4 is a top view of the present invention with the upper outer race removed from the actuator;
FIG. 5 is a cross-sectional view of an actuator B-B of the present invention;
FIG. 6 is a schematic circuit diagram of a control portion of the present invention;
the reference numerals in the figures are: the device comprises a test bed, a 2-polishing solution container, a 3-polishing solution, a 4-guide pipe I, a 5-buffer container, a 6-plug cover, a 7-air pipe I, an 8-electromagnetic directional valve, a 9-air pipe II, a 10-air pump, an 11-control part, a 12-flow control device, a 13-turbine flowmeter, a 14-guide pipe II, a 15-execution device, a 16-guide pipe III, a 17-gear, an 18-flat key, a 19-direct current motor, a 20-rack, a 21-left lead seat, a 22-rack fixing seat, a 23-antifriction material, a 24-right lead seat, a 25-mounting seat, a 26-brake wire, a 27-spring, a 28-inner ring, a 29-upper outer ring and a 30-lower outer ring.
Detailed Description
The invention will be further described with reference to the drawings and examples, but the invention is not limited to the scope.
Example 1: as shown in fig. 1 to 6, a simple polishing liquid flow control supply device comprises a polishing liquid extraction part, a control part 11, a flow control device 12, a turbine flowmeter 13 and an execution device 15; the control part 11 is connected with the polishing liquid extraction part, the flow control device 12 and the turbine flowmeter 13 through data wires, the execution device 15 is connected with the flow control device 12 through a brake wire 26, and the execution device 15 is sleeved outside the guide pipe II 14 of the polishing liquid extraction part;
the polishing solution extracting part comprises a test bed 1, a polishing solution container 2, a guide pipe I4, a buffer container 5, a plug cover 6, an air pipe I7, an electromagnetic directional valve 8, an air pipe II 9, a small air pump 10, a guide pipe II 14 and a guide pipe III 16; the control part 11 is connected with the electromagnetic directional valve 8 and the air pump 10 through data wires, the buffer container 5 is hung on the test bed 1, the plug cover 6 is arranged at the opening of the upper end of the buffer container 5, one ends of the guide pipe I4 and the air pipe I7 are respectively inserted into the buffer container 5 from two openings on the plug cover 6, the other end of the guide pipe I4 is inserted into the polishing solution container 2 arranged on the test bed 1, the other end of the air pipe I7 is connected with the electromagnetic directional valve 8, the lower end of the buffer container 5 is connected with the guide pipe III 16, the lower end of the guide pipe III 16 is provided with the turbine flowmeter 13, the lower end of the turbine flowmeter 13 is connected with the guide pipe II 14, the air pump 10 is arranged on the mounting seat 25, one end of the air pipe II 9 is inserted into the air suction port of the air pump 10, and the other end of the air pipe II 9 is inserted into the electromagnetic directional valve 8;
the control section 11 includes: the device comprises a singlechip, a keyboard, a digital display screen, a direct current motor driver, an electromagnetic reversing valve amplifying circuit and a buzzer;
the flow control device 12 comprises a gear 17, a flat key 18, a direct current motor 19, a rack 20, a left lead seat 21, a rack mounting seat 22, an antifriction material 23, a right lead seat 24, a mounting seat 25 and a brake cable 26; the control part 11 is connected with the direct current motor 19 through a data line, the direct current motor 19 is arranged on the mounting seat 25, a flat key 18 is arranged on a key groove of a shaft of the direct current motor 19, a gear 17 is arranged on the shaft of the direct current motor 19, a gear hole penetrates through the flat key 18, a rack 20 is arranged on the rack mounting seat 22, two sides of the rack mounting seat 22 are designed to be convex, a concave shape matched with the left lead seat 21 and the right lead seat 24 is arranged on the mounting seat 25, and a brake wire 26 is fixed at one end of the rack mounting seat 20 and is used for being connected with the execution device 15;
the actuator 15 comprises a spring 27, an inner ring 28, an upper outer ring 29 and a lower outer ring 30; wherein the actuating device 15 is sleeved outside the guide pipe II 14 through openings on the inner ring 28, the upper outer ring 29 and the lower outer ring 30, the inner ring 28 is connected with the brake cable 26, a spring 27 is arranged on one side of the inner ring 28, the upper outer ring 29 is engaged with the lower outer ring 30, and the inner ring 28 and the spring 27 are fixed inside the outer ring.
The contact surfaces of the left lead seat 21 and the right lead seat 24 with the rack mounting seat 22 can be provided with antifriction materials 23 to reduce friction of the two parts.
A control method of a simple polishing solution flow control supply device comprises the steps of preparing, working and stopping three parts;
preparation: the flow control device 12 and the execution device 15 work, the direct current motor 19 in the execution device 12 rotates to drive the gear 17 to rotate, the gear 17 drives the rack 20 to pull the brake wire 26 along the left lead seat 21 and the right lead seat 24, the brake wire 26 pulls the inner ring 28 in the execution device 15 to translate in the upper outer ring 29 and the lower outer ring 30, the through-flow section of the conduit II 14 is changed by changing the relative opening area of the inner ring and the outer ring, the through-flow section of the conduit II 14 is minimized, the electromagnetic directional valve 8 is used for reversing the position R1, the buffer container 5 is communicated with the air pump 10, the air pump 10 starts to work and pump air suction after the communication, vacuum negative pressure is formed in the buffer container 5, the polishing liquid 3 in the container 2 is sucked into the buffer container 5 along the conduit I4 due to the effect of the vacuum negative pressure, a certain amount of the polishing liquid 3 is sucked into the buffer container 5 at the moment after the air pump 10 works for a period of time, the flow control device 12 and the execution device 15 perform the reverse action for a period of time but not reset, the through-flow section of the conduit II 14 is relatively increased, the air pressure in the buffer container 5 is enabled to be lower than atmospheric pressure, and the polishing liquid III cannot flow from the buffer container 5 to the conduit 16 is enabled to be a value of 0 when the turbine flowmeter 13 is enabled to flow value;
work: the electromagnetic directional valve 8 is switched to the middle position, the buffer container 5 is communicated with indoor air, the internal air pressure is equal to the atmospheric pressure value, so that the polishing liquid 3 can flow out from the buffer container 5 through the guide pipe III 16 and the guide pipe II 14 under the action of gravity, at the moment, the numerical value of the turbine flowmeter 13 is not 0, the control part 11 receives a signal which is not 0 and then controls the electromagnetic directional valve to be switched to the R1 position so as to isolate the buffer container 5 from the external environment, the polishing liquid 3 in the container 2 is continuously sucked into the buffer container 5 along the guide pipe I4 by utilizing the siphon phenomenon, the turbine flowmeter 13 transmits measured data to the singlechip of the control part 11, compares the measured data with the pre-input data and controls the flow control device 12:
if the data is larger than the pre-input data, the buzzer of the control part 11 sounds once, the singlechip of the control part 11 sends a signal to enable the direct current motor 19 to start working, the direct current motor 19 rotates positively, the direct current motor 19 drives the gear 17 to work, the power of the direct current motor 19 is transmitted to the rack 20 through the gear 17 to drive the rack 20 to do linear motion, the rack 20 drives the rack mounting seat 22 to move, the rack mounting seat 22 pulls the brake wire 26, the brake wire 26 pulls the inner ring 28 of the execution device 15, the relative area of the inner ring and the outer ring is reduced to change the through-flow section of the conduit II 14 so as to achieve the purpose of changing the flow rate (when the relative area of the inner ring and the outer ring is reduced, the size of the flexible conduit II 14 can be extruded), the turbine flowmeter 13 transmits the changed measured data to the control part 11 until the measured data is consistent with the input flow rate, the direct current motor 19 stops working and enables the rack 20 to stay at the existing position, and the inner ring 28 of the execution device 15 stays at the existing position, and at the time the timing function is started;
if the data is smaller than the pre-input data, the buzzer of the control part 11 sounds once, the singlechip of the control part 11 sends out a signal to enable the direct current motor 19 to start working, the direct current motor 19 reverses, the flow control device 12 and the execution device 15 restore the pipe diameter of the pipe II 14 due to the elastic action of the pipe II 14 and increase the flow section of the pipe II 14 by executing the action opposite to the condition of being larger than the pre-input data, the turbine flowmeter 13 transmits the changed measured data to the control part 11 until the measured data is consistent with the input flow, the direct current motor 19 stops working and enables the rack 20 to stay at the existing position, the inner ring 28 of the execution device 15 stays at the existing position, and the timing function is started at the moment;
stopping: when the timing shows that the work stops, the buzzer sounds twice, the electromagnetic reversing valve 8 reverses to the middle position, so that the air pressure of the buffer container 5 is consistent with the air pressure, the siphoning phenomenon cannot be generated, the polishing liquid 3 cannot be sucked, the singlechip sends out a signal to enable the direct current motor 19 to reverse, the direct current motor 19 reverse to enable the gear 17 and the rack 20 to reset and pull the brake cable 26, the inner ring 28 of the execution device 15 pulls the brake cable 26 to reset under the action of the spring 27, and the whole polishing process is finished.
If the value of the turbine flowmeter 13 is zero when the value of the counter is not zero, the buzzer alarms to prompt the experimenter to add the polishing liquid 3, and then the whole system stops working.
While the present invention has been described in detail with reference to the drawings, the present invention is not limited to the above embodiments, and various changes can be made without departing from the spirit of the present invention within the knowledge of those skilled in the art.
Claims (3)
1. A control method of a simple polishing solution flow control supply device is characterized in that: the simple polishing liquid flow control and supply device comprises a polishing liquid extraction part, a control part (11), a flow control device (12), a turbine flowmeter (13) and an execution device (15); the control part (11) is connected with the polishing liquid extraction part, the flow control device (12) and the turbine flowmeter (13) through data wires, the execution device (15) is connected with the flow control device (12) through a brake wire (26), and the execution device (15) is sleeved outside the guide pipe II (14) of the polishing liquid extraction part;
the polishing solution extracting part comprises a test bed (1), a polishing solution container (2), a guide pipe I (4), a buffer container (5), a plug cover (6), an air pipe I (7), an electromagnetic directional valve (8), an air pipe II (9), an air pump (10), a guide pipe II (14) and a guide pipe III (16); the control part (11) is connected with the electromagnetic directional valve (8) and the air pump (10) through a data line, the buffer container (5) is hung on the test bed (1), the plug cover (6) is arranged at the opening of the upper end of the buffer container (5), one end of the guide pipe I (4) and one end of the air pipe I (7) are respectively inserted into the buffer container (5) from two openings on the plug cover (6), the other end of the guide pipe I (4) is inserted into the polishing liquid container (2) arranged on the test bed (1), the other end of the air pipe I (7) is connected with the electromagnetic directional valve (8), the lower end of the buffer container (5) is connected with the guide pipe III (16), the lower end of the guide pipe III (16) is provided with the turbine flowmeter (13), the lower end of the turbine flowmeter (13) is connected with the guide pipe II (14), the air pump (10) is arranged on the mounting seat (25), one end of the air pipe II (9) is inserted into the air suction port of the air pump (10), and the other end of the air pipe II (9) is inserted into the electromagnetic directional valve (8).
The flow control device (12) comprises a gear (17), a flat key (18), a direct current motor (19), a rack (20), a left lead seat (21), a rack fixing seat (22), an antifriction material (23), a right lead seat (24), an installation seat (25) and a brake cable (26); the control part (11) is connected with the direct current motor (19) through a data wire, the direct current motor (19) is installed on the installation seat (25), a flat key (18) is installed on a shaft key groove of the direct current motor (19), a gear (17) is installed on a shaft of the direct current motor (19), a gear hole penetrates through the flat key (18), a rack (20) is installed on the rack fixing seat (22), two sides of the rack fixing seat (22) are designed to be in a convex shape, a concave shape matched with the left lead seat (21) and the right lead seat (24) is installed on the installation seat (25), and a brake wire (26) is fixed at one end of the rack fixing seat (22) and is used for being connected with the execution device (15);
the actuating device (15) comprises a spring (27), an inner ring (28), an upper outer ring (29) and a lower outer ring (30); the execution device (15) is sleeved outside the guide pipe II (14) through openings in the inner ring (28), the upper outer ring (29) and the lower outer ring (30), the inner ring (28) is connected with the brake cable (26), a spring (27) is arranged on one side of the inner ring (28), the upper outer ring (29) is connected with the lower outer ring (30), and the inner ring (28) and the spring (27) are fixed inside the outer ring;
the control method comprises the steps of preparing, working and stopping three parts;
preparation: the flow control device (12) and the execution device (15) work, a direct current motor (19) in the execution device (12) rotates to drive a gear (17) to rotate, the gear (17) drives a rack (20) to pull a brake wire (26) along the left lead seat (21) and the right lead seat (24), an inner ring (28) in the execution device (15) is pulled by the brake wire (26) to translate in an upper outer ring (29) and a lower outer ring (30), the through-flow section of a conduit II (14) is changed by changing the relative opening area of the inner ring and the outer ring, so that the through-flow section of the conduit II (14) is minimized, an electromagnetic reversing valve (8) reverses the R1 position to communicate a buffer container (5) with an air pump (10), the air pump (10) starts working and exhausting after being communicated, vacuum negative pressure is formed in the buffer container (5), the polishing solution (3) in the polishing solution container (2) is sucked into the buffer container (5) along the guide pipe I (4) due to the effect of the vacuum negative pressure, a certain amount of polishing solution (3) is sucked into the buffer container (5) at the moment after the air pump (10) works for a period of time, the flow control device (12) and the execution device (15) execute actions opposite to the previous actions for a period of time but do not reset, the through flow section of the guide pipe II (14) is relatively increased, the air pressure in the buffer container (5) is smaller than the atmospheric pressure due to the continuous working of the air pump, the polishing liquid cannot flow out from the buffer container (5) along the guide pipe III (16), so that the value of the turbine flowmeter (13) is 0;
work: the electromagnetic reversing valve (8) is reversed to the middle position, the buffer container (5) is communicated with indoor air, the internal air pressure is equal to the atmospheric pressure value, so that the polishing liquid (3) can flow out from the buffer container (5) through the guide pipe III (16) and the guide pipe II (14) under the action of gravity, the numerical value of the turbine flowmeter (13) is not 0 at the moment, the control part (11) receives a signal which is not 0 and then controls the electromagnetic reversing valve to be reversed to the R1 position, so that the buffer container (5) is isolated from the external environment, the polishing liquid (3) in the polishing liquid container (2) is continuously sucked into the buffer container (5) along the guide pipe I (4) by utilizing the siphon phenomenon, the turbine flowmeter (13) transmits measured data to the singlechip of the control part (11), compares the measured data with the pre-input data and controls the data through the flow control device (12):
if the data is larger than the pre-input data, the buzzer of the control part (11) sounds once, the singlechip of the control part (11) sends a signal to enable the direct current motor (19) to start working, the direct current motor (19) rotates positively, the direct current motor (19) drives the gear (17) to work, the power of the direct current motor (19) is transmitted to the rack (20) through the gear (17) to drive the rack (20) to do linear motion, the rack (20) drives the rack fixing seat (22) to move, the rack fixing seat (22) pulls the brake wire (26), the brake wire (26) pulls the inner ring (28) of the execution device (15), the relative area of the inner ring and the outer ring is reduced to change the through-flow section of the guide pipe II (14) so as to achieve the purpose of changing the flow, the turbine flowmeter (13) transmits the changed measured data to the control part (11) until the measured data is consistent with the input flow, the direct current motor (19) stops working, the rack (20) stays at the existing position at the moment, the inner ring (28) stays at the existing position, and the timing function starts;
if the flow rate of the pipe II (14) is smaller than the pre-input data, a buzzer of the control part (11) sounds once, a singlechip of the control part (11) sends a signal to enable the direct current motor (19) to start working, the direct current motor (19) reverses, the flow rate control device (12) and the execution device (15) restore the pipe diameter due to the elastic action of the pipe II (14) by executing the action opposite to the condition of being larger than the pre-input data, the flow cross section of the pipe II (14) is increased, the turbine flowmeter (13) transmits the changed measured data to the control part (11) until the flow rate is consistent with the input flow rate, the direct current motor (19) stops working and enables the rack (20) to stay at the existing position, and the inner ring (28) of the execution device (15) stays at the existing position, and the timing function is started at the moment;
stopping: when the timing shows that the work is stopped, the buzzer sounds twice, the electromagnetic reversing valve (8) reverses to the middle position, the air pressure of the buffer container (5) is consistent with the air pressure, the siphoning phenomenon cannot be generated, the polishing liquid (3) cannot be sucked, the singlechip sends out a signal to enable the direct current motor (19) to reverse, the direct current motor (19) reverse enables the gear (17) and the rack (20) to reset and pull the brake wire (26), the inner ring (28) of the execution device (15) pulls the brake wire (26) to reset under the action of the spring (27), and the whole polishing process is finished.
2. The control method of the simple polishing liquid flow rate control supply device according to claim 1, characterized in that: the friction reducing materials (23) are arranged on the contact surfaces of the left lead seat (21) and the right lead seat (24) and the rack fixing seat (22) so as to reduce friction of the two parts.
3. The control method of the simple polishing liquid flow rate control supply device according to claim 1, characterized in that: if the value of the turbine flowmeter (13) is zero when the value of the counter is not zero, the buzzer alarms to prompt an experimenter to add the polishing liquid (3), and then the whole system stops working.
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Application publication date: 20170829 Assignee: Yunnan Zhengbo Machinery Manufacturing Co.,Ltd. Assignor: Kunming University of Science and Technology Contract record no.: X2024980014651 Denomination of invention: A simple polishing fluid flow control supply device and its control method Granted publication date: 20230613 License type: Open License Record date: 20240914 |