CN107097154A - A kind of simple polishing flow quantity control feedway and its control method - Google Patents
A kind of simple polishing flow quantity control feedway and its control method Download PDFInfo
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- CN107097154A CN107097154A CN201710294157.3A CN201710294157A CN107097154A CN 107097154 A CN107097154 A CN 107097154A CN 201710294157 A CN201710294157 A CN 201710294157A CN 107097154 A CN107097154 A CN 107097154A
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- 238000005498 polishing Methods 0.000 title claims abstract description 63
- 238000000034 method Methods 0.000 title claims abstract description 13
- 239000012530 fluid Substances 0.000 claims abstract description 43
- 239000000284 extract Substances 0.000 claims abstract description 5
- 230000008859 change Effects 0.000 claims description 10
- 230000000694 effects Effects 0.000 claims description 10
- 238000012360 testing method Methods 0.000 claims description 10
- 238000012546 transfer Methods 0.000 claims description 9
- 230000009471 action Effects 0.000 claims description 7
- 239000003831 antifriction material Substances 0.000 claims description 7
- 239000007788 liquid Substances 0.000 claims description 7
- 230000003139 buffering effect Effects 0.000 claims description 3
- 238000010304 firing Methods 0.000 claims description 3
- 230000005484 gravity Effects 0.000 claims description 3
- 238000003780 insertion Methods 0.000 claims description 3
- 230000037431 insertion Effects 0.000 claims description 3
- 238000007517 polishing process Methods 0.000 claims description 3
- 238000013519 translation Methods 0.000 claims description 3
- 230000015572 biosynthetic process Effects 0.000 claims 1
- 238000004140 cleaning Methods 0.000 abstract description 3
- 239000000463 material Substances 0.000 description 4
- 238000002474 experimental method Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000011084 recovery Methods 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 241000486406 Trachea Species 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000007521 mechanical polishing technique Methods 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 210000003437 trachea Anatomy 0.000 description 1
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B57/00—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents
- B24B57/02—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents for feeding of fluid, sprayed, pulverised, or liquefied grinding, polishing or lapping agents
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/10—Greenhouse gas [GHG] capture, material saving, heat recovery or other energy efficient measures, e.g. motor control, characterised by manufacturing processes, e.g. for rolling metal or metal working
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
Part, control section, volume control device, turbine flowmeter and performs device are extracted the present invention relates to a kind of simple polishing flow quantity control feedway and its control method, including polishing fluid；The control section connects polishing fluid by data wire and extracts part, volume control device, turbine flowmeter, and performs device is connected by brake cable with volume control device, and performs device is enclosed on polishing fluid and extracted outside the conduit II of part.Apparatus of the present invention are structurally simple, economical practical, easy to use；It can effectively realize that polishing fluid is drawn, flow is controlled；Partial devices can be dismantled, replaced, it is possible to reduce cleaning is difficult.
Description
Technical field
The present invention relates to a kind of simple polishing flow quantity control feedway and its control method, belong to material mechanical processing
Technical field.
Background technology
With the continuous improvement of the technologies such as green energy resource, integrated circuit, the requirement to the surface smoothness of substrate material is more
Strictly, meanwhile, in polishing behavior to material removing rate etc. requirement also increase, the extensive use of chemical Mechanical Polishing Technique.
In CMP process, the requirement such as polishing fluid Surface Quality and material removing rate has a great impact.To obtain effect
Preferable polishing fluid needs to carry out substantial amounts of experiment, in substantial amounts of experimentation, to polishing flow quantity, the factor such as addition time
There are strict requirements, meanwhile, it is difficult that a kind of proportioning test terminates rear device cleaning.The related device of in the market can only be realized pair
The part control of polishing fluid influence empirical factor, and cost is higher.It is necessary to have a kind of low cost and can be to above-mentioned
Factor realizes the device controlled comprehensively.
The content of the invention
The invention provides a kind of simple polishing flow quantity control feedway and its control method, in an experiment
Realize the problems such as controlling polishing fluid absorption, flow.
The technical scheme is that：A kind of simple polishing flow quantity control feedway, including polishing fluid extraction part,
Control section 11, volume control device 12, turbine flowmeter 13 and performs device 15；The control section 11 is connected by data wire
Connect polishing fluid and extract part, volume control device 12, turbine flowmeter 13, performs device 15 controls to fill by brake cable 26 and flow
12 connections are put, performs device 15 is enclosed on polishing fluid and extracted outside the conduit II 14 of part；
The polishing fluid extracting part point include testing stand 1, polish liquid container 2, conduit I 4, buffer container 5, gag 6, tracheae I 7,
Solenoid directional control valve 8, tracheae II 9, air pump 10, conduit II 14, conduit III 16；The control section 11 connects electromagnetism by data wire
Reversal valve 8, air pump 10, buffer container 5 are suspended on testing stand 1, equipped with gag 6 at the upper end open of buffer container 5, conduit I 4,
Buffer container 5 is inserted in one end of tracheae I 7 from two mouths on gag 6 respectively, and the other end insertion of conduit I 4 is placed in testing stand 1
On polishing liquid container 2 in, the other end of tracheae I 7 is connected with solenoid directional control valve 8, the lower end connecting conduit III 16 of buffer container 5,
Turbine flowmeter 13 is installed in the lower end of conduit III 16, and the lower end connecting conduit II 14 of turbine flowmeter 13, air pump 10 is arranged on mounting seat
On 25, one end of tracheae II 9 is inserted on the air entry of air pump 10, and the other end of tracheae II 9 is inserted on solenoid directional control valve 8；
The volume control device 12 includes gear 17, flat key 18, direct current generator 19, rack 20, left helical pitch seat 21, rack and installed
Seat 22, antifriction material 23, right helical pitch seat 24, mounting seat 25 and brake cable 26；The control section 11 connects direct current by data wire
Motor 19, direct current generator 19 is arranged in mounting seat 25, and flat key 18 is housed in the shaft key groove of direct current generator 19, and gear 17 is arranged on
On the axle of direct current generator 19, gear hole pass through flat key 18, rack 20 be arranged on rack mounting seat 22 on, the both sides of rack fixing seat 22
" convex " shape is designed as, coordinates left helical pitch seat 21 and " recessed " shape of right helical pitch seat 24 to be arranged in mounting seat 25, rack mounting seat 20
One end fix brake cable 26 be used for be connected with performs device 15；
The performs device 15 includes spring 27, inner ring 28, upper outer ring 29 and lower outer ring 30；Wherein performs device 15 passes through inner ring
28th, the perforate on upper outer ring 29 and lower outer ring 30 is enclosed on outside conduit II 14, and inner ring 28 is connected with brake cable 26, the side dress of inner ring 28
There is spring 27, upper outer ring 29 engages with lower outer ring 30, inner ring 28 and spring 27 are fixed on inside outer ring.
The left helical pitch seat 21 and right helical pitch seat 24 on the contact surface of rack mounting seat 22 equipped with antifriction material 23 with reducing
Two-part friction.
A kind of simple polishing flow quantity controls the control method of feedway, and methods described step includes preparing, working, stopping
Only three parts；
Prepare：Volume control device 12 and performs device 15 are worked, and the direct current generator 19 in performs device 12 is rotated, band moving gear
17 rotate, and gear 17 pulls brake cable 26 with carry-over bar 20 along left helical pitch seat 21 and 24 directions of right helical pitch seat, and brake cable 26, which is pulled, to be performed
The translation in upper outer ring 29 and lower outer ring 30 of inner ring 28 in device 15, by changing the fractional open area of Internal and external cycle, changes
The passage section of conduit II 14, makes the passage section of conduit II 14 reach minimum, solenoid directional control valve 8 commutates R1, connection buffering
Container 5 and air pump 10, air pump 10, which is started working, after connection is evacuated, and negative pressure of vacuum is formed in buffer container 5, due to negative pressure of vacuum
Effect, the polishing fluid 3 in container 2 is inhaled into buffer container 5 along conduit I 4, after the work a period of time of air pump 10, now exists
A certain amount of polishing fluid 3 is sucked in buffer container 5, volume control device 12 and performs device 15 are performed to be moved with opposite before
Make a period of time but do not reset, the passage section of conduit II 14 is relative to be increased, because air pump continuous firing makes the gas in buffer container 5
Pressure is less than atmospheric pressure, polishing fluid can not be flowed out from buffer container 5 along conduit III 16, so when turbine flowmeter 13 numerical value be 0；
Work：Solenoid directional control valve 8 commutates to middle position, buffer container 5 and room air UNICOM, its air pressure inside and atmospheric value phase
Deng making polishing fluid 3 to be flowed out through Action of Gravity Field from buffer container 5 through conduit III 16, conduit II 14, now turbine flowmeter 13
Numerical value be 0, control section 11 receive not for 0 signal after control solenoid directional control valve commutate to R1 make buffer container 5 and
External environment completely cuts off, and continues the polishing fluid 3 in container 2 being inhaled into buffer container 5 along conduit I 4 using siphonage, turbine
The single-chip microcomputer of the data transfer measured to control section 11 is compared by flowmeter 13 with pre-entering data, and passes through stream
Amount control device 12 is controlled：
If than pre-entering, data are big, and the buzzer of control section 11 rings once, and the single-chip microcomputer of control section 11 sends signal
Direct current generator 19 is set to start working, direct current generator 19 is rotated forward, direct current generator 19 works with moving gear 17, the power of direct current generator 19
Rack 20 is delivered to by gear 17, band carry-over bar 20 is moved along a straight line, and rack 20 is moved with carry-over bar mounting seat 22, rack peace
Fill seat 22 and pull brake cable 26, brake cable 26 pulls the inner ring 28 of performs device 15, and the relative area that reduction Internal and external cycle is vacated, which changes, leads
The passage section of pipe II 14 changes the purpose of flow to reach, turbine flowmeter 13 extremely controls the data transfer measured after change
Part 11 processed, until consistent with the flow of input, direct current generator 19 is stopped and rack 20 is rested on existing position, makes
The inner ring 28 of performs device 15 rests on existing position, and now clocking capability starts；
If than pre-entering, data are small, and the buzzer of control section 11 rings once, and the single-chip microcomputer of control section 11 sends signal
Direct current generator 19 is set to start working, direct current generator 19 is inverted, volume control device 12 and performs device 15 are by performing and than " pre-
First input data is big " action of this condition conversely, conduit II 14 is due to natural resiliency effect recovery caliber, increase conduit II 14
Passage section, turbine flowmeter 13 is by the data transfer measured after change to control section 11, until the flow with input
Consistent, direct current generator 19 is stopped and rack 20 is rested on existing position, rests on the inner ring 28 of performs device 15
Existing position, now clocking capability startup；
Stop：Timing shows that buzzer rings twice, and solenoid directional control valve 8 commutates to middle position, makes buffer container when reaching work stopping
The 5 air pressure siphonage that can not produce consistent with atmospheric pressure can not suck polishing fluid 3, and single-chip microcomputer, which sends signal, makes direct current generator 19
Reversion, the reversion of direct current generator 19 resets gear 17, rack 20 and pulls brake cable 26, and the inner ring 28 of performs device 15 is in spring 27
Effect is lower to pull brake cable 26 to reset, and whole polishing process terminates.
If the numerical value of turbine flowmeter 13 is zero when the numerical value of counter is not zero, buzzer warning prompting experimenter
Polishing fluid 3 is added, then whole system is stopped.
The beneficial effects of the invention are as follows：Apparatus structure is simple, economical and practical, easy to use；It can effectively realize that polishing fluid is inhaled
Take, flow is controlled；Partial devices can be dismantled, replaced, it is possible to reduce cleaning is difficult.
Brief description of the drawings
Fig. 1 is the overall structure diagram of the present invention；
Fig. 2 is inventive flow control device front view；
Fig. 3 is inventive flow control device A-A to sectional view；
Fig. 4 is that the present invention takes down the top view behind upper outer ring in performs device；
Fig. 5 is performs device B-B direction sectional view of the present invention；
Fig. 6 is control section circuit theory diagrams of the present invention；
In figure it is each marked as：1- testing stands, 2- polishing liquid containers, 3- polishing fluids, 4- conduits I, 5- buffer containers, 6- gags, 7-
Tracheae I, 8- solenoid directional control valves, 9- tracheaes II, 10- air pumps, 11- control sections, 12- volume control devices, 13- turbine flows
Meter, 14- conduits II, 15- performs devices, 16- conduits III, 17- gears, 18- flat keys, 19- direct current generators, 20- racks, 21- is left
In helical pitch seat, 22- rack fixing seats, 23- antifriction materials, the right helical pitch seats of 24-, 25- mounting seats, 26- brake cables, 27- springs, 28-
Outer ring under circle, the upper outer rings of 29-, 30-.
Embodiment
With reference to the accompanying drawings and examples, the invention will be further described, but present disclosure be not limited to it is described
Scope.
Embodiment 1：As shown in figures 1 to 6, a kind of simple polishing flow quantity control feedway, including polishing fluid extracting part
Point, control section 11, volume control device 12, turbine flowmeter 13 and performs device 15；The control section 11 passes through data
Line connection polishing fluid extracts part, volume control device 12, turbine flowmeter 13, and performs device 15 passes through brake cable 26 and flow control
Device 12 processed is connected, and performs device 15 is enclosed on polishing fluid and extracted outside the conduit II 14 of part；
The polishing fluid extracting part point include testing stand 1, polish liquid container 2, conduit I 4, buffer container 5, gag 6, tracheae I 7,
Solenoid directional control valve 8, tracheae II 9, small air pump 10, conduit II 14, conduit III 16；The control section 11 is connected by data wire
Solenoid directional control valve 8, air pump 10, buffer container 5 are suspended on testing stand 1, and gag 6, conduit are housed at the upper end open of buffer container 5
I 4, buffer container 5 is inserted in one end of tracheae I 7 from two mouths on gag 6 respectively, and the other end insertion of conduit I 4 is placed in experiment
In polishing liquid container 2 on platform 1, the other end of tracheae I 7 is connected with solenoid directional control valve 8, the lower end connecting conduit III of buffer container 5
16, turbine flowmeter 13, the lower end connecting conduit II 14 of turbine flowmeter 13 are installed in the lower end of conduit III 16, and air pump 10, which is arranged on, to be installed
On seat 25, one end of tracheae II 9 is inserted on the air entry of air pump 10, and the other end of tracheae II 9 is inserted on solenoid directional control valve 8；
The control section 11 includes：Single-chip microcomputer, keyboard, digital display screen, DC motor driver, solenoid directional control valve amplification electricity
Road, buzzer；
The volume control device 12 includes gear 17, flat key 18, direct current generator 19, rack 20, left helical pitch seat 21, rack and installed
Seat 22, antifriction material 23, right helical pitch seat 24, mounting seat 25 and brake cable 26；The control section 11 connects direct current by data wire
Motor 19, direct current generator 19 is arranged in mounting seat 25, and flat key 18 is housed in the shaft key groove of direct current generator 19, and gear 17 is arranged on
On the axle of direct current generator 19, gear hole pass through flat key 18, rack 20 be arranged on rack mounting seat 22 on, the both sides of rack fixing seat 22
" convex " shape is designed as, coordinates left helical pitch seat 21 and " recessed " shape of right helical pitch seat 24 to be arranged in mounting seat 25, rack mounting seat 20
One end fix brake cable 26 be used for be connected with performs device 15；
The performs device 15 includes spring 27, inner ring 28, upper outer ring 29 and lower outer ring 30；Wherein performs device 15 passes through inner ring
28th, the perforate on upper outer ring 29 and lower outer ring 30 is enclosed on outside conduit II 14, and inner ring 28 is connected with brake cable 26, the side dress of inner ring 28
There is spring 27, upper outer ring 29 engages with lower outer ring 30, inner ring 28 and spring 27 are fixed on inside outer ring.
The left helical pitch seat 21 and right helical pitch seat 24 with the contact surface of rack mounting seat 22 can equipped with antifriction material 23 with
Reduce two-part friction.
A kind of simple polishing flow quantity controls the control method of feedway, and methods described step includes preparing, working, stopping
Only three parts；
Prepare：Volume control device 12 and performs device 15 are worked, and the direct current generator 19 in performs device 12 is rotated, band moving gear
17 rotate, and gear 17 pulls brake cable 26 with carry-over bar 20 along left helical pitch seat 21 and 24 directions of right helical pitch seat, and brake cable 26, which is pulled, to be performed
The translation in upper outer ring 29 and lower outer ring 30 of inner ring 28 in device 15, by changing the fractional open area of Internal and external cycle, changes
The passage section of conduit II 14, makes the passage section of conduit II 14 reach minimum, solenoid directional control valve 8 commutates R1, connection buffering
Container 5 and air pump 10, air pump 10, which is started working, after connection is evacuated, and negative pressure of vacuum is formed in buffer container 5, due to negative pressure of vacuum
Effect, the polishing fluid 3 in container 2 is inhaled into buffer container 5 along conduit I 4, after the work a period of time of air pump 10, now exists
A certain amount of polishing fluid 3 is sucked in buffer container 5, volume control device 12 and performs device 15 are performed to be moved with opposite before
Make a period of time but do not reset, the passage section of conduit II 14 is relative to be increased, because air pump continuous firing makes the gas in buffer container 5
Pressure is less than atmospheric pressure, polishing fluid can not be flowed out from buffer container 5 along conduit III 16, so when turbine flowmeter 13 numerical value be 0；
Work：Solenoid directional control valve 8 commutates to middle position, buffer container 5 and room air UNICOM, its air pressure inside and atmospheric value phase
Deng making polishing fluid 3 to be flowed out through Action of Gravity Field from buffer container 5 through conduit III 16, conduit II 14, now turbine flowmeter 13
Numerical value be 0, control section 11 receive not for 0 signal after control solenoid directional control valve commutate to R1 make buffer container 5 and
External environment completely cuts off, and continues the polishing fluid 3 in container 2 being inhaled into buffer container 5 along conduit I 4 using siphonage, turbine
The single-chip microcomputer of the data transfer measured to control section 11 is compared by flowmeter 13 with pre-entering data, and passes through stream
Amount control device 12 is controlled：
If than pre-entering, data are big, and the buzzer of control section 11 rings once, and the single-chip microcomputer of control section 11 sends signal
Direct current generator 19 is set to start working, direct current generator 19 is rotated forward, direct current generator 19 works with moving gear 17, the power of direct current generator 19
Rack 20 is delivered to by gear 17, band carry-over bar 20 is moved along a straight line, and rack 20 is moved with carry-over bar mounting seat 22, rack peace
Fill seat 22 and pull brake cable 26, brake cable 26 pulls the inner ring 28 of performs device 15, and the relative area that reduction Internal and external cycle is vacated, which changes, leads
The passage section of pipe II 14 changes the purpose of flow to reach（Soft conduit can be extruded when the relative area that Internal and external cycle is vacated is reduced
II 14 size）, turbine flowmeter 13 is by the data transfer measured after change to control section 11, until the flow with input
Consistent, direct current generator 19 is stopped and rack 20 is rested on existing position, rests on the inner ring 28 of performs device 15
Existing position, now clocking capability startup；
If than pre-entering, data are small, and the buzzer of control section 11 rings once, and the single-chip microcomputer of control section 11 sends signal
Direct current generator 19 is set to start working, direct current generator 19 is inverted, volume control device 12 and performs device 15 are by performing and than " pre-
First input data is big " action of this condition conversely, conduit II 14 is due to natural resiliency effect recovery caliber, increase conduit II 14
Passage section, turbine flowmeter 13 is by the data transfer measured after change to control section 11, until the flow with input
Consistent, direct current generator 19 is stopped and rack 20 is rested on existing position, rests on the inner ring 28 of performs device 15
Existing position, now clocking capability startup；
Stop：Timing shows that buzzer rings twice, and solenoid directional control valve 8 commutates to middle position, makes buffer container when reaching work stopping
The 5 air pressure siphonage that can not produce consistent with atmospheric pressure can not suck polishing fluid 3, and single-chip microcomputer, which sends signal, makes direct current generator 19
Reversion, the reversion of direct current generator 19 resets gear 17, rack 20 and pulls brake cable 26, and the inner ring 28 of performs device 15 is in spring 27
Effect is lower to pull brake cable 26 to reset, and whole polishing process terminates.
If the numerical value of turbine flowmeter 13 is zero when the numerical value of counter is not zero, buzzer warning prompting experimenter
Polishing fluid 3 is added, then whole system is stopped.
Above in conjunction with accompanying drawing to the present invention embodiment be explained in detail, but the present invention be not limited to it is above-mentioned
Embodiment, can also be before present inventive concept not be departed from the knowledge that those of ordinary skill in the art possess
Put that various changes can be made.
Claims (4)
1. a kind of simple polishing flow quantity control feedway, it is characterised in that：Part, control section are extracted including polishing fluid
（11）, volume control device（12）, turbine flowmeter（13）And performs device（15）；The control section（11）Pass through data wire
Connect polishing fluid and extract part, volume control device（12）, turbine flowmeter（13）, performs device（15）Pass through brake cable（26）With
Volume control device（12）Connection, performs device（15）It is enclosed on the conduit II that polishing fluid extracts part（14）Outside；
The polishing fluid extracting part point includes testing stand（1）, polishing liquid container（2）, conduit I（4）, buffer container（5）, gag
（6）, tracheae I（7）, solenoid directional control valve（8）, tracheae II（9）, air pump（10）, conduit II（14）, conduit III（16）；The control
Part（11）Solenoid directional control valve is connected by data wire（8）, air pump（10）, buffer container（5）It is suspended on testing stand（1）On, delay
Rush container（5）Gag is housed at upper end open（6）, conduit I（4）, tracheae I（7）One end respectively from gag（6）On two mouths
Insert buffer container（5）, conduit I（4）The other end insertion be placed in testing stand（1）On polishing liquid container（2）In, tracheae I（7）
The other end and solenoid directional control valve（8）Connection, buffer container（5）Lower end connecting conduit III（16）, conduit III（16）Install lower end
Turbine flowmeter（13）, turbine flowmeter（13）Lower end connecting conduit II（14）, air pump（10）Installed in mounting seat（25）On, gas
Pipe II（9）One end be inserted in air pump（10）Air entry on, tracheae II（9）The other end be inserted in solenoid directional control valve（8）On；
The volume control device（12）Including gear（17）, flat key（18）, direct current generator（19）, rack（20）, left helical pitch seat
（21）, rack mounting seat（22）, antifriction material（23）, right helical pitch seat（24）, mounting seat（25）And brake cable（26）；The control unit
Point（11）Direct current generator is connected by data wire（19）, direct current generator（19）Installed in mounting seat（25）On, in direct current generator
（19）Flat key is housed in shaft key groove（18）, gear（17）Installed in direct current generator（19）Axle on, gear hole pass through flat key（18）,
Rack（20）Installed in rack mounting seat（22）On, rack fixing seat（22）Both sides are designed as " convex " shape, coordinate left helical pitch seat
（21）With right helical pitch seat（24）" recessed " shape be arranged on mounting seat（25）On, rack mounting seat（20）One end fix brake cable（26）
It is used for and performs device（15）Connection；
The performs device（15）Including spring（27）, inner ring（28）, upper outer ring（29）With lower outer ring（30）；Wherein performs device
（15）Pass through inner ring（28）, upper outer ring（29）With lower outer ring（30）On perforate be enclosed on conduit II（14）Outside, inner ring（28）With lock
Line（26）Connection, inner ring（28）Side be equipped with spring（27）, upper outer ring（29）With lower outer ring（30）Engagement, by inner ring（28）With
Spring（27）It is fixed on inside outer ring.
2. simple polishing flow quantity control feedway according to claim 1, it is characterised in that：The left helical pitch seat
（21）With right helical pitch seat（24）With rack mounting seat（22）Antifriction material is housed on contact surface（23）To reduce two-part friction.
3. a kind of simple polishing flow quantity controls the control method of feedway, it is characterised in that：Methods described step includes standard
Standby, work, three parts of stopping；
Prepare：Volume control device（12）And performs device（15）Work, performs device（12）In direct current generator（19）Rotate,
Band moving gear（17）Rotate, gear（17）Band carry-over bar（20）Along left helical pitch seat（21）With right helical pitch seat（24）Direction pulls brake cable
（26）, brake cable（26）Pull performs device（15）In inner ring（28）In upper outer ring（29）With lower outer ring（30）Interior translation, passes through
Change the fractional open area of Internal and external cycle, change conduit II（14）Passage section, make conduit II（14）Passage section reach
Minimum, solenoid directional control valve（8）Commutation R1, connects buffer container（5）With air pump（10）, air pump after connection（10）Start-up operation is taken out
Gas, in buffer container（5）Middle formation negative pressure of vacuum, due to the effect of negative pressure of vacuum, container（2）In polishing fluid（3）Along conduit I
（4）It is inhaled into buffer container（5）In, air pump（10）After work a period of time, now in buffer container（5）In sucked it is a certain amount of
Polishing fluid（3）, volume control device（12）And performs device（15）Perform for a period of time but not multiple with action opposite before
Position, conduit II（14）Passage section is relative to be increased, because air pump continuous firing makes buffer container（5）In air pressure be less than air
Pressure, makes polishing fluid can not be from buffer container（5）Along conduit III（16）Outflow, so when turbine flowmeter（13）Numerical value is 0；
Work：Solenoid directional control valve（8）Commutate to middle position, buffer container（5）With room air UNICOM, its air pressure inside and atmospheric pressure
Value is equal, makes polishing fluid（3）Can be through Action of Gravity Field from buffer container（5）Through conduit III（16）, conduit II（14）Flow out, now whirlpool
Flowmeters（13）Numerical value be 0, control section（11）Receive and do not commutated for control solenoid directional control valve after 0 signal to R1
Position makes buffer container（5）Completely cut off with external environment, continued using siphonage by container（2）In polishing fluid（3）Along conduit I
（4）It is inhaled into buffer container（5）In, turbine flowmeter（13）By the data transfer measured to control section（11）Single-chip microcomputer,
It is compared with pre-entering data, and passes through volume control device（12）It is controlled：
If than pre-entering data greatly, control section（11）Buzzer ring once, control section（11）Single-chip microcomputer send
Signal makes direct current generator（19）Start working, direct current generator（19）Rotate forward, direct current generator（19）Band moving gear（17）Work, direct current
Motor（19）Power pass through gear（17）It is delivered to rack（20）, band carry-over bar（20）Move along a straight line, rack（20）Drive
Rack mounting seat（22）Motion, rack mounting seat（22）Pull brake cable（26）, brake cable（26）Pull performs device（15）Inner ring
（28）, reduce the relative area change conduit II that Internal and external cycle is vacated（14）Passage section with reach change flow purpose, whirlpool
Flowmeters（13）By the data transfer measured after change to control section（11）, until consistent with the flow of input, directly
Flow motor（19）It is stopped and makes rack（20）Existing position is rested on, makes performs device（15）Inner ring（28）Rest on existing
There is position, now clocking capability starts；
If than small, the control section that pre-enters data（11）Buzzer ring once, control section（11）Single-chip microcomputer send
Signal makes direct current generator（19）Start working, direct current generator（19）Reversion, volume control device（12）And performs device（15）It is logical
Cross execution and the action more opposite than " pre-entering data big " this condition, conduit II（14）Because natural resiliency effect recovers pipe
Footpath, increases conduit II（14）Passage section, turbine flowmeter（13）By the data transfer measured after change to control section
（11）, until, direct current generator consistent with the flow of input（19）It is stopped and makes rack（20）Existing position is rested on, is made
Performs device（15）Inner ring（28）Existing position is rested on, now clocking capability starts；
Stop：Timing show reach work stop when, buzzer ring twice, solenoid directional control valve（8）Commutation holds buffering to middle position
Device（5）The air pressure siphonage that can not produce consistent with atmospheric pressure can not suck polishing fluid（3）, single-chip microcomputer, which sends signal, makes direct current
Motor（19）Reversion, direct current generator（19）Reversion makes gear（17）, rack（20）Reset and pull brake cable（26）, performs device
（15）Inner ring（28）In spring（27）Effect is lower to pull brake cable（26）Reset, whole polishing process terminates.
4. simple polishing flow quantity according to claim 3 controls the control method of feedway, it is characterised in that：If
The turbine flowmeter when the numerical value of counter is not zero（13）Numerical value be zero, buzzer warning prompting experimenter addition polishing fluid
（3）, then whole system be stopped.
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Cited By (1)
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|---|---|---|---|---|
| CN109702653A (en) * | 2017-10-26 | 2019-05-03 | 富鼎电子科技(嘉善)有限公司 | Polish liquid supplying device |
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