CN202825544U - Polishing head lifting and revolving actuating device on polishing machine - Google Patents
Polishing head lifting and revolving actuating device on polishing machine Download PDFInfo
- Publication number
- CN202825544U CN202825544U CN201220480490.6U CN201220480490U CN202825544U CN 202825544 U CN202825544 U CN 202825544U CN 201220480490 U CN201220480490 U CN 201220480490U CN 202825544 U CN202825544 U CN 202825544U
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- shaft
- bearing
- polishing head
- polishing
- supporting seat
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Abstract
The utility model discloses a polishing head lifting and revolving actuating device on polishing machine. The polishing head lifting and revolving actuating device on polishing machine comprises a centre shaft, a supporting seat, a centre shaft revolving actuating mechanism and a centre shaft lifting actuating mechanism. A hollow shaft is arranged outside the centre shaft, an engine machine of the centre shaft revolving mechanism is fixedly installed on a route board through a bend board. The technical scheme includes that a cycloidal pin gear speed reducer drives a polishing head to revolve, meanwhile the cylinder control a centre shaft to lift. A plurality of polishing heads can be selected to use no matter in automatic mode or in manual mode, namely, a user can select several polishing heads or one polishing head to polish. The polishing head lifting and revolving actuating device on polishing machine enables the plurality of polishing heads to work independently and non-interferingly and the lifting to be adjustable and controllable. The polishing head lifting and revolving actuating device on polishing machine is further provided with a safety protection device, thus production efficiency is improved, and safety and reliability in use is achieved. A special piston seal not only plays an effective role in sealing, but also achieve the purpose of the low friction in movement, and is a strong guarantee to the accuracy control of polishing head tension.
Description
Technical field
The utility model relates to the single face high accuracy for silicon chip or other hard brittle materials, and the polishing machine equipment technical field of high efficiency polishing is specifically related to a kind of polishing machine upper polishing head lifting device of rotation driving.
Background technology
In recent years, along with developing rapidly of semiconductor industry, constantly towards small size, high circuit closeness, quick, low power consumption future development, integrated circuit has now entered the technological phase of ULSI submicron order to semiconductor wafer.Silicon wafer polishing equipment is the key equipment in the large scale integrated chip manufacturing process below 0.25 micron, its complex structure, and control accuracy is high, and development high starting point, technical difficulty are large, and more and more rapidly development requires increasingly strict to the silicon wafer surface flatness.
The rubbing head of polishing machine equipment of the prior art, rubbing head are the passive type rotations, are lower disc spins, utilize the frictional force between lower wall and the upper dish to drive upper rubbing head rotation; Novel upper polishing head structure, four upper cylinders all have independently drive unit, can make four rubbing head rotating speeds and the main realization Proper Match of dumping by frequency-adjustable speed-adjustable.Speed adjustable range is wide than passive type single side polishing machine speed adjustable range, but and four rubbing head drive, be independent of each other, adapt to widely process program.
The utility model content
The purpose of this utility model is to overcome the above problem that prior art exists, and a kind of polishing machine upper polishing head lifting device of rotation driving is provided.
For realizing above-mentioned technical purpose, reach above-mentioned technique effect, the utility model is achieved through the following technical solutions:
The lifting of a kind of polishing machine upper polishing head is turned, comprise central shaft, supporting seat, described central shaft rotating drive mechanism and central shaft lift drive mechanism, described central shaft outer setting has hollow shaft, the motor of described central shaft rotating drive mechanism is fixedly mounted on the stroke plate by bent plate, by overrun clutch structure the first gear is installed on the motor output shaft, described the first gear is meshed with the second gear on being fixedly mounted on supporting disk, described supporting disk is installed on the supporting seat by clutch shaft bearing, the guide shaft lower end is installed on the described supporting disk, described guide shaft upper end is provided with guide pin bushing, described guide pin bushing is fixedly linked with the rotating disk that is installed on the described central shaft, the upper end of the cylinder body of described central shaft lift drive mechanism is installed in the lower end of described supporting seat, the lower end of described cylinder body is installed on the bearing block of described hollow shaft bottom, is provided with cylinder piston structure on the described hollow shaft in the described cylinder body.
Further, be respectively arranged with the second bearing between described central shaft upper end and the described hollow shaft, described the second bearing is two deep groove ball bearings, two deep groove ball bearings separate by inner spacing collar, outside deep groove ball bearing arranged outside has pressure ring and the first spacer, be provided with the 3rd bearing between described central shaft lower end and the described hollow shaft, described the 3rd bearing is deep groove ball bearing, described the 3rd bearing arranged outside has the clutch shaft bearing lid, and described clutch shaft bearing lid is connected on the described hollow shaft by screw.
Further, described motor and described bent plate are fixedly linked by screw, overrun clutch structure between described motor output shaft and described the first gear comprise star-wheel, the outer hub that is installed on the motor output shaft and be arranged on described star-wheel and described outer hub between spring, ejector pin and roller, the overrun clutch structure upper and lower side is equipped with cover plate, and described cover plate is connected in the upper and lower side of described outer hub by screw; Star-wheel bottom on the described motor output shaft is provided with gasket ring, and the star-wheel top on the described motor output shaft is provided with trim ring, and described trim ring is connected on the motor shaft by screw.
Further, described the first gear is fixedly linked by screw and described outer hub, and described the second gear is fixedly linked by screw and described supporting disk.
Further, be provided with four pull bars between described supporting seat and the bearing block, described cylinder body is fixedly linked with described supporting seat and described bearing block respectively by described four pull bars, the junction, lower end of the upper end of described cylinder body and described supporting seat is provided with an O RunddichtringO, and the lower end of described cylinder body and described bearing block junction are provided with the 2nd O RunddichtringO.
Further, described cylinder piston structure comprises piston bush, L-type sealing ring, upper press ring and the lower pressure ring that is installed on the described hollow shaft.
Further, be provided with the first high accuracy linear bearing between described supporting seat and the described hollow shaft, described the first high accuracy linear bearing lower end is provided with the second spacer and the first locating ring, described the first locating ring is fixedly linked by screw and described supporting seat, and described supporting seat upper end is provided with the first lip-shaped sealed ring with described hollow shaft junction.
Further, be provided with the second high accuracy linear bearing between described bearing block and the described hollow shaft, described the second high accuracy linear bearing upper end is provided with the second locating ring, described the second locating ring is fixedly linked by screw and described bearing block, described bearing block lower end and described hollow shaft junction are provided with the second lip-shaped sealed ring, and described bearing block arranged outside has guide bracket.
The beneficial effects of the utility model are:
Technical solutions of the utility model; by adopting cycloidal planetary gear speed reducer to drive the rubbing head rotation; adopt simultaneously the lifting of lift cylinder control centre axle; no matter under automatic mode or manual mode; all can select use to a plurality of rubbing heads, namely select those several statures or a rubbing head to polish, this apparatus structure works alone a plurality of polishings and does not interfere with each other; lifting is adjustable, controlled, and safety guard is arranged.Enhance productivity, safe and reliable.Special piston seal not only can play effective sealing function, has also realized the low frictional properties of motion, is to realize the accurately strong guarantee of control of upper polishing head pressure.
Above-mentioned explanation only is the general introduction of technical solutions of the utility model, for can clearer understanding technological means of the present utility model, and can be implemented according to the content of specification, below with preferred embodiment of the present utility model and cooperate accompanying drawing to be described in detail as follows.The specific embodiment of the present utility model is provided in detail by following examples and accompanying drawing thereof.
Description of drawings
Accompanying drawing described herein is used to provide further understanding of the present utility model, consists of the application's a part, and illustrative examples of the present utility model and explanation thereof are used for explaining the utility model, do not consist of improper restriction of the present utility model.In the accompanying drawings:
Fig. 1 is axis of no-feathering side schematic diagram of the present utility model;
Fig. 2 is the sectional structure schematic diagram of Fig. 1 of the present utility model.
Number in the figure explanation: 1, central shaft, 2, hollow shaft, 3, bearing block, 4, the second locating ring, 5, cylinder body, 6, piston bush, 7, the second spacer, 8, the first locating ring, 9, supporting seat, 10, the second gear, 11, supporting disk, 12, the second bearing cap, 13, guide shaft, 14, guide pin bushing, 15, rotating disk, 16, pressure ring, 17, inner spacing collar, 18, the first gear, 19, spring, 20, ejector pin, 21, roller, 22, trim ring, 23, star-wheel, 24, cover plate, 25, outer hub, 26, gasket ring, 27, bent plate, 28, the stroke plate, 29, pull bar, 30, guide bracket, 31, the first spacer, 32, gland, 33, upper press ring, 34, lower pressure ring, 35, the clutch shaft bearing lid, 36, the second bearing, 37, the 3rd bearing, 38, clutch shaft bearing, 39, the first high accuracy linear bearing, 40, the second high accuracy linear bearing, 41, motor, 42, the second lip-shaped sealed ring, 43, the first lip-shaped sealed ring, 44, the 2nd O RunddichtringO, 45, the one O RunddichtringO, 46, the L-type sealing ring.
The specific embodiment
Below with reference to the accompanying drawings and in conjunction with the embodiments, describe the utility model in detail.
As shown in the figure, the lifting of a kind of polishing machine upper polishing head is turned, comprise central shaft 1, supporting seat 9, described central shaft 1 rotating drive mechanism and central shaft lift drive mechanism, described central shaft 1 outer setting has hollow shaft 2, the motor 41 of described central shaft 1 rotating drive mechanism is fixedly mounted on the stroke plate 28 by bent plate 27, by overrun clutch structure the first gear 18 is installed on the motor output shaft, described the first gear 18 is meshed with the second gear 10 on being fixedly mounted on supporting disk 11, described supporting disk 11 is installed on the supporting seat 9 by clutch shaft bearing 38, guide shaft 13 lower ends are installed on the described supporting disk 11, described guide shaft 13 upper ends are provided with guide pin bushing 14, described guide pin bushing 14 is fixedly linked with the rotating disk 15 that is installed on the described central shaft 1, the upper end of the cylinder body 5 of described central shaft 1 lift drive mechanism is installed in the lower end of described supporting seat 9, and the lower end of described cylinder body 9 is installed on the bearing block 3 of described hollow shaft 2 bottoms, is provided with cylinder piston structure on the described hollow shaft 2 in the described cylinder body 5.
Further, be respectively arranged with the second bearing 36 between described central shaft 1 upper end and the described hollow shaft 2, described the second bearing 36 is two deep groove ball bearings, two deep groove ball bearings separate by inner spacing collar 17, outside deep groove ball bearing arranged outside has pressure ring 16 and the first spacer 31, be provided with the 3rd bearing 37 between described central shaft 1 lower end and the described hollow shaft 2, described the 3rd bearing 37 is deep groove ball bearing, described the 3rd bearing 37 arranged outside have clutch shaft bearing lid 35, and described clutch shaft bearing lid 35 is connected on the described hollow shaft 2 by screw.
Further, described motor 41 and described bent plate 27 are fixedly linked by screw, overrun clutch structure between described motor output shaft and described the first gear 18 comprise star-wheel 23, the outer hub 25 that is installed on the motor output shaft and be arranged on described star-wheel 23 and described outer hub 25 between spring 19, ejector pin 20 and roller 21, the overrun clutch structure upper and lower side is equipped with cover plate 24, and described cover plate 24 is connected in the upper and lower side of described outer hub 25 by screw; Star-wheel 23 bottoms on the described motor output shaft are provided with gasket ring 26, and star-wheel 23 tops on the described motor output shaft are provided with trim ring 22, and described trim ring 22 is connected on the motor shaft by screw.
Further, described the first gear 18 is fixedly linked by screw and described outer hub 25, and described the second gear 10 is fixedly linked by screw and described supporting disk 11.
Further, the clutch shaft bearing 38 between described supporting disk 11 and the described supporting seat 9 is deep groove ball bearing, and described clutch shaft bearing 38 arranged outside have gland 32 and the second bearing cap 36, and described gland 32 is connected on the described supporting seat 9 by screw.
Further, described guide shaft 13 lower ends link to each other with described supporting disk 11 by screw thread, and the guide pin bushing of described guide shaft 13 upper ends 14 and rotating disk 15 are fixedly linked by screw; Described rotating disk 15 and described central shaft 1 link to each other by double key system.
Further, be provided with four pull bars 29 between described supporting seat 9 and the bearing block 3, described cylinder body 5 is fixedly linked with described supporting seat 9 and described bearing block 3 respectively by described four pull bars 29, the junction, lower end of the upper end of described cylinder body 5 and described supporting seat 9 is provided with an O RunddichtringO 45, and the lower end of described cylinder body 5 and described bearing block 3 junctions are provided with the 2nd O RunddichtringO 44.
Further, described cylinder piston structure comprises piston bush 6, L-type sealing ring 46, upper press ring 33 and the lower pressure ring 34 that is installed on the described hollow shaft 2.
Further, be provided with the first high accuracy linear bearing 39 between described supporting seat 9 and the described hollow shaft 2, described the first high accuracy linear bearing 39 lower ends are provided with the second spacer 7 and the first locating ring 8, described the first locating ring 8 is fixedly linked by screw and described supporting seat 9, and described supporting seat 9 upper ends and described hollow shaft 2 junctions are provided with the first lip-shaped sealed ring 43.
Further, be provided with the second high accuracy linear bearing 40 between described bearing block 3 and the described hollow shaft 2, described the second high accuracy linear bearing 40 upper ends are provided with the second locating ring 4, described the second locating ring 4 is fixedly linked by screw and described bearing block 3, described bearing block 3 lower ends and described hollow shaft 2 junctions are provided with the second lip-shaped sealed ring 42, and described bearing block 3 arranged outside have guide bracket 30.
The above is the preferred embodiment of utility model only, is not limited to the utility model, and for a person skilled in the art, the utility model can have various modifications and variations.All within spirit of the present utility model and principle, any modification of doing, be equal to replacement, improvement etc., all should be included within the protection domain of the present utility model.
Claims (10)
1. polishing machine upper polishing head lifting is turned, comprise central shaft (1), supporting seat (9), described central shaft (1) rotating drive mechanism and central shaft lift drive mechanism, described central shaft (1) outer setting has hollow shaft (2), the motor (41) of described central shaft (1) rotating drive mechanism is fixedly mounted on the stroke plate (28) by bent plate (27), by overrun clutch structure the first gear (18) is installed on the motor output shaft, described the first gear (18) is meshed with the second gear (10) on being fixedly mounted on supporting disk (11), described supporting disk (11) is installed on the supporting seat (9) by clutch shaft bearing (38), guide shaft (13) lower end is installed on the described supporting disk (11), described guide shaft (13) upper end is provided with guide pin bushing (14), described guide pin bushing (14) is fixedly linked with the rotating disk (15) that is installed on the described central shaft (1), the upper end of the cylinder body (5) of described central shaft (1) lift drive mechanism is installed in the lower end of described supporting seat (9), the lower end of described cylinder body (9) is installed on the bearing block (3) of described hollow shaft (2) bottom, is provided with cylinder piston structure on the described hollow shaft (2) in the described cylinder body (5).
2. polishing machine upper polishing head lifting device of rotation driving according to claim 1, it is characterized in that, be respectively arranged with the second bearing (36) between described central shaft (1) upper end and the described hollow shaft (2), described the second bearing (36) is two deep groove ball bearings, two deep groove ball bearings separate by inner spacing collar (17), outside deep groove ball bearing arranged outside has pressure ring (16) and the first spacer (31), be provided with the 3rd bearing (37) between described central shaft (1) lower end and the described hollow shaft (2), described the 3rd bearing (37) is deep groove ball bearing, described the 3rd bearing (37) arranged outside has clutch shaft bearing lid (35), and described clutch shaft bearing lid (35) is connected on the described hollow shaft (2) by screw.
3. polishing machine upper polishing head lifting device of rotation driving according to claim 1, it is characterized in that, described motor (41) is fixedly linked by screw with described bent plate (27), overrun clutch structure between described motor output shaft and described the first gear (18) comprises the star-wheel (23) that is installed on the motor output shaft, outer hub (25) and be arranged on described star-wheel (23) and described outer hub (25) between spring (19), ejector pin (20) and roller (21), the overrun clutch structure upper and lower side is equipped with cover plate (24), and described cover plate (24) is connected in the upper and lower side of described outer hub (25) by screw; Star-wheel on the described motor output shaft (23) bottom is provided with gasket ring (26), and the star-wheel on the described motor output shaft (23) top is provided with trim ring (22), and described trim ring (22) is connected on the motor shaft by screw.
4. polishing machine upper polishing head lifting device of rotation driving according to claim 1, it is characterized in that, described the first gear (18) is fixedly linked by screw and described outer hub (25), and described the second gear (10) is fixedly linked by screw and described supporting disk (11).
5. polishing machine upper polishing head lifting device of rotation driving according to claim 1, it is characterized in that: the clutch shaft bearing (38) between described supporting disk (11) and the described supporting seat (9) is deep groove ball bearing, described clutch shaft bearing (38) arranged outside has gland (32) and the second bearing cap (36), and described gland (32) is connected on the described supporting seat (9) by screw.
6. polishing machine upper polishing head lifting device of rotation driving according to claim 1, it is characterized in that, described guide shaft (13) lower end links to each other with described supporting disk (11) by screw thread, and the guide pin bushing (14) of described guide shaft (13) upper end is fixedly linked by screw with rotating disk (15); Described rotating disk (15) links to each other by double key system with described central shaft (1).
7. polishing machine upper polishing head lifting device of rotation driving according to claim 1, it is characterized in that, be provided with four pull bars (29) between described supporting seat (9) and the bearing block (3), described cylinder body (5) is fixedly linked with described supporting seat (9) and described bearing block (3) respectively by described four pull bars (29), the junction, lower end of the upper end of described cylinder body (5) and described supporting seat (9) is provided with an O RunddichtringO (45), and the lower end of described cylinder body (5) and described bearing block (3) junction are provided with the 2nd O RunddichtringO (44).
8. polishing machine upper polishing head lifting device of rotation driving according to claim 1, it is characterized in that described cylinder piston structure comprises piston bush (6), L-type sealing ring (46), upper press ring (33) and the lower pressure ring (34) that is installed on the described hollow shaft (2).
9. polishing machine upper polishing head lifting device of rotation driving according to claim 1, it is characterized in that, be provided with the first high accuracy linear bearing (39) between described supporting seat (9) and the described hollow shaft (2), described the first high accuracy linear bearing (39) lower end is provided with the second spacer (7) and the first locating ring (8), described the first locating ring (8) is fixedly linked by screw and described supporting seat (9), and described supporting seat (9) upper end is provided with the first lip-shaped sealed ring (43) with described hollow shaft (2) junction.
10. polishing machine upper polishing head lifting device of rotation driving according to claim 1, it is characterized in that, be provided with the second high accuracy linear bearing (40) between described bearing block (3) and the described hollow shaft (2), described the second high accuracy linear bearing (40) upper end is provided with the second locating ring (4), described the second locating ring (4) is fixedly linked by screw and described bearing block (3), described bearing block (3) lower end and described hollow shaft (2) junction are provided with the second lip-shaped sealed ring (42), and described bearing block (3) arranged outside has guide bracket (30).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201220480490.6U CN202825544U (en) | 2012-09-20 | 2012-09-20 | Polishing head lifting and revolving actuating device on polishing machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201220480490.6U CN202825544U (en) | 2012-09-20 | 2012-09-20 | Polishing head lifting and revolving actuating device on polishing machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202825544U true CN202825544U (en) | 2013-03-27 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201220480490.6U Expired - Lifetime CN202825544U (en) | 2012-09-20 | 2012-09-20 | Polishing head lifting and revolving actuating device on polishing machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202825544U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103659596A (en) * | 2012-09-20 | 2014-03-26 | 苏州赫瑞特电子专用设备科技有限公司 | Lifting rotating driving device for upper polishing heads of polishing machine |
-
2012
- 2012-09-20 CN CN201220480490.6U patent/CN202825544U/en not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103659596A (en) * | 2012-09-20 | 2014-03-26 | 苏州赫瑞特电子专用设备科技有限公司 | Lifting rotating driving device for upper polishing heads of polishing machine |
| CN103659596B (en) * | 2012-09-20 | 2016-02-03 | 苏州赫瑞特电子专用设备科技有限公司 | A kind of polishing machine upper polishing head lifting device of rotation driving |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term |
Granted publication date: 20130327 |
|
| CX01 | Expiry of patent term |