CN107091480A - Silicone hydride waste gas incinerating and purifying system - Google Patents

Silicone hydride waste gas incinerating and purifying system Download PDF

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Publication number
CN107091480A
CN107091480A CN201710444939.0A CN201710444939A CN107091480A CN 107091480 A CN107091480 A CN 107091480A CN 201710444939 A CN201710444939 A CN 201710444939A CN 107091480 A CN107091480 A CN 107091480A
Authority
CN
China
Prior art keywords
furnace shell
waste gas
silicone hydride
purifying system
incinerating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201710444939.0A
Other languages
Chinese (zh)
Inventor
端午祥
赵娟
赵忠良
张龑
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nanjing Bona Energy Environmental Technology Co Ltd
Original Assignee
Nanjing Bona Energy Environmental Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nanjing Bona Energy Environmental Technology Co Ltd filed Critical Nanjing Bona Energy Environmental Technology Co Ltd
Priority to CN201710444939.0A priority Critical patent/CN107091480A/en
Publication of CN107091480A publication Critical patent/CN107091480A/en
Pending legal-status Critical Current

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Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23GCREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G7/00Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
    • F23G7/06Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
    • F23G7/061Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating
    • F23G7/065Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating using gaseous or liquid fuel
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23JREMOVAL OR TREATMENT OF COMBUSTION PRODUCTS OR COMBUSTION RESIDUES; FLUES 
    • F23J15/00Arrangements of devices for treating smoke or fumes
    • F23J15/006Layout of treatment plant
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23JREMOVAL OR TREATMENT OF COMBUSTION PRODUCTS OR COMBUSTION RESIDUES; FLUES 
    • F23J15/00Arrangements of devices for treating smoke or fumes
    • F23J15/02Arrangements of devices for treating smoke or fumes of purifiers, e.g. for removing noxious material
    • F23J15/022Arrangements of devices for treating smoke or fumes of purifiers, e.g. for removing noxious material for removing solid particulate material from the gasflow
    • F23J15/025Arrangements of devices for treating smoke or fumes of purifiers, e.g. for removing noxious material for removing solid particulate material from the gasflow using filters
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23GCREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G2204/00Supplementary heating arrangements
    • F23G2204/10Supplementary heating arrangements using auxiliary fuel
    • F23G2204/103Supplementary heating arrangements using auxiliary fuel gaseous or liquid fuel
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23GCREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G2209/00Specific waste
    • F23G2209/14Gaseous waste or fumes

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Incineration Of Waste (AREA)

Abstract

The invention discloses a kind of silicone hydride waste gas incinerating and purifying system, it includes incinerator (2), multi-tube dust cleaner (3), sack cleaner (4), blower fan (5) and the chimney (6) being sequentially connected.Incinerator (2) front end is provided with burner (1).Reasonable in design of the present invention, safe and reliable, silicone hydride waste gas treatment effeciency is high, and non-secondary pollution is both economically and environmentally beneficial.

Description

Silicone hydride waste gas incinerating and purifying system
Technical field
It is specifically a kind of to be used for battery, microelectronics, photoelectron work the present invention relates to a kind of silicone hydride waste gas CIU The silicone hydride waste gas treatment and purification system of industry.
Background technology
Silane as it is a kind of provide silicon components gas source, available for manufacture high-purity polycrystalline silicon, monocrystalline silicon, microcrystal silicon, Non-crystalline silicon, silicon nitride, silica, heterogeneous silicon, various metal silicides.Because its high-purity and precise controlling can be realized, it has also become The important special gas that many other silicon sources can not replace.Silane is widely used in microelectronics, optoelectronics industry, for manufacturing too Positive electricity pond, flat-panel monitor, glass and steel coating, and be uniquely to mass produce granular high purity silicon in the world so far Intermediate product.The high-tech application of silane is also continuously emerging, including for manufacturing advanced ceramics, composite, function material Material, biomaterial, high energy material etc., as many new technologies, new material, new device basis.Silane is again distinctive with it Spontaneous combustion, explosivity and it is famous.Silane has the spontaneous ignition scope and extremely strong burning capacity of non-constant width, and it is a kind of high to determine it Dangerous gas.
The content of the invention
Goal of the invention:It is an object of the invention to provide a kind of silicone hydride waste gas incinerating and purifying system, reasonable in design, safety Reliably, silicone hydride waste gas treatment effeciency is high, and non-secondary pollution is both economically and environmentally beneficial.
Technical scheme:In order to realize the above object the present invention is adopted the following technical scheme that:
A kind of silicone hydride waste gas incinerating and purifying system, it includes incinerator, multi-tube dust cleaner, sack cleaner, blower fan and cigarette Chimney.
Preferably, above-described silicone hydride waste gas incinerating and purifying system, described incinerator afterbody is removed with multitube Dirt device air inlet is connected, and multi-tube dust cleaner gas outlet is connected with sack cleaner air inlet, sack cleaner gas outlet and blower fan Air inlet is connected, and fan outlet is connected with chimney.
Preferably, above-described silicone hydride waste gas incinerating and purifying system, described incinerator front end center axis On be horizontally mounted burner, described burner is provided with silane gas entrance, combustion-supporting gas entry, combustion air entrance and indifferent gas Entrance;Purged under emergency situations with indifferent gas, safety and reliability.
Preferably, above-described silicone hydride waste gas incinerating and purifying system, described incinerator is horizontal twin furnace shell Structure, by the interior furnace shell combustion chamber constituted inside interior furnace shell nested with outer furnace shell, the mixing chamber of outer furnace shell rearward end and interior furnace shell Chuck layer between outer furnace shell.Described outer furnace shell front end is provided with cooling air inlet.Cooling wind in chuck layer and chuck layer Interior furnace shell and outer furnace shell, substitution refractory material and insulation material are cooled down simultaneously, reduce cost.In addition, without refractory material, opening stove Without temperature protection when blowing out, can jerk suddenly open, be easy to tackle emergency situations, increase operation flexibility ratio.Combustion chamber can be protected Demonstrate,prove silicone hydride waste gas and burn complete, burn the flue gas produced and cooled down into mixing chamber, be reduced to and suitably enter multi-tube dust cleaner Temperature.
Preferably, above-described silicone hydride waste gas incinerating and purifying system, described interior furnace shell and outer furnace shell front end Panel is overlapped and same central shaft.The length and radius of interior furnace shell and outer furnace shell according to silicone hydride waste gas amount, combustion-supporting coal tolerance and can stop Stay Time Calculation.
Preferably, above-described silicone hydride waste gas incinerating and purifying system, between described interior furnace shell and outer furnace shell Provided with some spinning disks, spinning disk is located at interior furnace shell afterbody, circumference uniform distribution.Spinning disk not only acts as support interior furnace shell and outer furnace shell Effect, cooling wind is rotated into mixing chamber at an angle, strengthen mixed effect, improve cooling effectiveness, effectively reduction The temperature of flue gas after burning.
The silicone hydride waste gas incinerating and purifying system that the present invention is provided, practical operation principle is:
The silicone hydride waste gas that is produced in silane enterprise production process introduces burner, and coal gas combustion-supporting is had by oneself with plant area, into burning Burned the combustion chamber burnt in stove.Combustion-supporting coal tolerance ensures that silicone hydride waste gas burns completely.Burn the heat smoke produced and enter mixed Room is closed, while entering mixing chamber through chuck layer and spinning disk using normal temperature air as cooling wind.Cool down wind simultaneously cool down interior furnace shell and Outer furnace shell, instead of refractory material and insulation material, saves cost, increase operation flexibility ratio.Spinning disk makes cooling wind and combustion chamber Heat smoke out is mixed in mixing chamber in eddy flow shape, strengthens mixed effect.Whole incinerator keeps micro-vacuum state, it is ensured that Gas No leakage, it is safe and reliable.Flue gas after cooling enters multi-tube dust cleaner, removes large-size particles, enters back into bag-type dust Device removes remaining solid particle, and efficiency of dust collection is improved while reducing the abrasion to upstream device.After two-stage dust removal process Flue gas up to standard eventually enters into smoke stack emission.If running into emergency situations, promptly blowing out and it can be purged with indifferent gas.
Beneficial effect:Compared to the prior art there is advantages below in the silicone hydride waste gas incinerating and purifying system that the present invention is provided:
(1) silicone hydride waste gas that the present invention is provided is burned and cleaning system, to silane gas fluctuation of concentration wide adaptation range, is used Multi-tube dust cleaner and sack cleaner two-stage dedusting, efficiency of dust collection are high, equipment life length and operating cost is low.
(2) the silicone hydride waste gas incinerating and purifying system that the present invention is provided, technique advantages of simple is safe and reliable, at silicone hydride waste gas Efficiency high is managed, non-secondary pollution is both economically and environmentally beneficial.
Brief description of the drawings
The structural representation for the silicone hydride waste gas incinerating and purifying system that Fig. 1 provides for the present invention.
Embodiment
Below in conjunction with the accompanying drawings and specific embodiment, the present invention is furture elucidated, it should be understood that these embodiments are merely to illustrate The present invention rather than limitation the scope of the present invention, after the present invention has been read, those skilled in the art are each to the present invention's The modification for planting the equivalent form of value falls within the application appended claims limited range.
As shown in figure 1, a kind of silicone hydride waste gas incinerating and purifying system, it includes incinerator 2, multi-tube dust cleaner 3, bag-type dust Device 4, blower fan 5 and chimney 6.
The afterbody of incinerator 2 is connected with the air inlet of multi-tube dust cleaner 3, the gas outlet of multi-tube dust cleaner 3 and the air inlet of sack cleaner 4 Mouth is connected, and the gas outlet of sack cleaner 4 is connected with the air inlet of blower fan 5, and the air outlet of blower fan 5 is connected with chimney 6.
Burner 1 is horizontally installed with the described front end center axis of incinerator 2, described burner 1 is provided with silane gas Entrance 1-1, combustion-supporting gas entry 1-2, combustion air entrance 1-3 and indifferent gas entrance 1-4.
Described incinerator 2 is horizontal twin furnace shell structure, and combustion chamber 2- is constituted by interior furnace shell 2-1 is nested with outer furnace shell 2-2 4th, mixing chamber 2-5 and chuck layer 2-6.
Described outer furnace shell 2-2 front ends are provided with cooling air inlet 2-7.
Described interior furnace shell 2-1 and outer furnace shell 2-2 front consoles are overlapped, and interior furnace shell 2-1 and the same centers of outer furnace shell 2-2 Axle.
Some spinning disk 2-3 are provided between described interior furnace shell 2-1 and outer furnace shell 2-2, spinning disk 2-3 is located at interior furnace shell 2- 1 afterbody, circumferentially uniformly.
Described above is only the preferred embodiment of the present invention, it is noted that for the ordinary skill people of the art For member, under the premise without departing from the principles of the invention, some improvements and modifications can also be made, these improvements and modifications also should It is considered as protection scope of the present invention.

Claims (6)

1. a kind of silicone hydride waste gas incinerating and purifying system, it is characterised in that it includes incinerator (2), multi-tube dust cleaner (3), cloth bag Deduster (4), blower fan (5) and chimney (6).
Incinerator (2) afterbody is connected with multi-tube dust cleaner (3) air inlet, multi-tube dust cleaner (3) gas outlet and sack cleaner (4) Air inlet is connected, and sack cleaner (4) gas outlet is connected with blower fan (5) air inlet, and blower fan (5) air outlet is connected with chimney (6).
2. silicone hydride waste gas incinerating and purifying system according to claim 1, it is characterised in that incinerator (2) front end It is horizontally installed with central axis on burner (1), described burner (1) and offers silane gas entrance (1-1), combustion-supporting coal gas Entrance (1-2), combustion air entrance (1-3) and indifferent gas entrance (1-4).
3. silicone hydride waste gas incinerating and purifying system according to claim 1, it is characterised in that described incinerator (2) is sleeping Formula twin furnace shell structure, combustion chamber (2-4), mixing chamber (2-5) and chuck are constituted by interior furnace shell (2-1) is nested with outer furnace shell (2-2) Layer (2-6).
4. silicone hydride waste gas incinerating and purifying system according to claim 3, it is characterised in that before described outer furnace shell (2-2) End is provided with cooling air inlet (2-7).
5. the silicone hydride waste gas incinerating and purifying system according to right wants 4, it is characterised in that described interior furnace shell (2-1) and outer Furnace shell (2-2) front console is overlapped, interior furnace shell (2-1) and outer furnace shell (2-2) same to central shaft.
6. the silicone hydride waste gas incinerating and purifying system according to claim 1-5, it is characterised in that described interior furnace shell (2-1) Spinning disk (2-3) is provided between outer furnace shell (2-2), spinning disk (2-3) is located at interior furnace shell (2-1) afterbody, circumferentially uniform point Cloth.
CN201710444939.0A 2017-06-12 2017-06-12 Silicone hydride waste gas incinerating and purifying system Pending CN107091480A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201710444939.0A CN107091480A (en) 2017-06-12 2017-06-12 Silicone hydride waste gas incinerating and purifying system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201710444939.0A CN107091480A (en) 2017-06-12 2017-06-12 Silicone hydride waste gas incinerating and purifying system

Publications (1)

Publication Number Publication Date
CN107091480A true CN107091480A (en) 2017-08-25

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108151036A (en) * 2018-02-08 2018-06-12 上海第升环保科技有限公司 Volatile organic gases incineration disposal complexes
CN108837633A (en) * 2018-08-31 2018-11-20 江苏久朗高科技股份有限公司 A kind of online coating film on glass tail gas embrane method high-temperature process system and technique

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101968226A (en) * 2010-10-26 2011-02-09 陕西天宏硅材料有限责任公司 Burning treatment process of waste gas and waste liquid containing chlorosilane in polysilicon production
CN102757148A (en) * 2011-04-28 2012-10-31 陕西天宏硅材料有限责任公司 System and method for processing waste gas and waste liquor in polysilicon production
CN103528076A (en) * 2013-10-21 2014-01-22 昆山市盛兴设备安装有限公司 Exhaust gas incineration disposal system
CN203533565U (en) * 2013-09-26 2014-04-09 深圳市汇清科技有限公司 Household refuse incineration and auxiliary smoke processing system
CN206094037U (en) * 2016-08-31 2017-04-12 苏州迪森生物能源有限公司 Air and adjustable type biomass boiler system of backward flow flue gas ratio
CN207146414U (en) * 2017-06-12 2018-03-27 南京博纳能源环保科技有限公司 Silicone hydride waste gas incinerating and purifying system

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101968226A (en) * 2010-10-26 2011-02-09 陕西天宏硅材料有限责任公司 Burning treatment process of waste gas and waste liquid containing chlorosilane in polysilicon production
CN102757148A (en) * 2011-04-28 2012-10-31 陕西天宏硅材料有限责任公司 System and method for processing waste gas and waste liquor in polysilicon production
CN203533565U (en) * 2013-09-26 2014-04-09 深圳市汇清科技有限公司 Household refuse incineration and auxiliary smoke processing system
CN103528076A (en) * 2013-10-21 2014-01-22 昆山市盛兴设备安装有限公司 Exhaust gas incineration disposal system
CN206094037U (en) * 2016-08-31 2017-04-12 苏州迪森生物能源有限公司 Air and adjustable type biomass boiler system of backward flow flue gas ratio
CN207146414U (en) * 2017-06-12 2018-03-27 南京博纳能源环保科技有限公司 Silicone hydride waste gas incinerating and purifying system

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108151036A (en) * 2018-02-08 2018-06-12 上海第升环保科技有限公司 Volatile organic gases incineration disposal complexes
CN108837633A (en) * 2018-08-31 2018-11-20 江苏久朗高科技股份有限公司 A kind of online coating film on glass tail gas embrane method high-temperature process system and technique

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Application publication date: 20170825