CN107091480A - Silicone hydride waste gas incinerating and purifying system - Google Patents
Silicone hydride waste gas incinerating and purifying system Download PDFInfo
- Publication number
- CN107091480A CN107091480A CN201710444939.0A CN201710444939A CN107091480A CN 107091480 A CN107091480 A CN 107091480A CN 201710444939 A CN201710444939 A CN 201710444939A CN 107091480 A CN107091480 A CN 107091480A
- Authority
- CN
- China
- Prior art keywords
- furnace shell
- waste gas
- silicone hydride
- purifying system
- incinerating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 150000004678 hydrides Chemical class 0.000 title claims abstract description 31
- 229920001296 polysiloxane Polymers 0.000 title claims abstract description 31
- 239000002912 waste gas Substances 0.000 title claims abstract description 31
- 239000000428 dust Substances 0.000 claims abstract description 17
- 239000007789 gas Substances 0.000 claims description 21
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 claims description 10
- 238000002485 combustion reaction Methods 0.000 claims description 10
- 229910000077 silane Inorganic materials 0.000 claims description 10
- 238000001816 cooling Methods 0.000 claims description 9
- 238000009987 spinning Methods 0.000 claims description 9
- 238000002156 mixing Methods 0.000 claims description 7
- 239000003034 coal gas Substances 0.000 claims description 2
- 239000004744 fabric Substances 0.000 claims 2
- 230000009286 beneficial effect Effects 0.000 abstract description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
- 229910052710 silicon Inorganic materials 0.000 description 5
- 239000010703 silicon Substances 0.000 description 5
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 4
- 239000003546 flue gas Substances 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 239000011819 refractory material Substances 0.000 description 3
- 239000000779 smoke Substances 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 238000007664 blowing Methods 0.000 description 2
- 239000003245 coal Substances 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000012774 insulation material Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000004377 microelectronic Methods 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 230000002269 spontaneous effect Effects 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 230000006978 adaptation Effects 0.000 description 1
- 239000012620 biological material Substances 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 235000019504 cigarettes Nutrition 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 230000036461 convulsion Effects 0.000 description 1
- 229910021419 crystalline silicon Inorganic materials 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000013067 intermediate product Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000013081 microcrystal Substances 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 230000005693 optoelectronics Effects 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000000746 purification Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 229910021332 silicide Inorganic materials 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000009827 uniform distribution Methods 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
- F23G7/00—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
- F23G7/06—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
- F23G7/061—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating
- F23G7/065—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating using gaseous or liquid fuel
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23J—REMOVAL OR TREATMENT OF COMBUSTION PRODUCTS OR COMBUSTION RESIDUES; FLUES
- F23J15/00—Arrangements of devices for treating smoke or fumes
- F23J15/006—Layout of treatment plant
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23J—REMOVAL OR TREATMENT OF COMBUSTION PRODUCTS OR COMBUSTION RESIDUES; FLUES
- F23J15/00—Arrangements of devices for treating smoke or fumes
- F23J15/02—Arrangements of devices for treating smoke or fumes of purifiers, e.g. for removing noxious material
- F23J15/022—Arrangements of devices for treating smoke or fumes of purifiers, e.g. for removing noxious material for removing solid particulate material from the gasflow
- F23J15/025—Arrangements of devices for treating smoke or fumes of purifiers, e.g. for removing noxious material for removing solid particulate material from the gasflow using filters
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
- F23G2204/00—Supplementary heating arrangements
- F23G2204/10—Supplementary heating arrangements using auxiliary fuel
- F23G2204/103—Supplementary heating arrangements using auxiliary fuel gaseous or liquid fuel
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
- F23G2209/00—Specific waste
- F23G2209/14—Gaseous waste or fumes
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Environmental & Geological Engineering (AREA)
- Incineration Of Waste (AREA)
Abstract
The invention discloses a kind of silicone hydride waste gas incinerating and purifying system, it includes incinerator (2), multi-tube dust cleaner (3), sack cleaner (4), blower fan (5) and the chimney (6) being sequentially connected.Incinerator (2) front end is provided with burner (1).Reasonable in design of the present invention, safe and reliable, silicone hydride waste gas treatment effeciency is high, and non-secondary pollution is both economically and environmentally beneficial.
Description
Technical field
It is specifically a kind of to be used for battery, microelectronics, photoelectron work the present invention relates to a kind of silicone hydride waste gas CIU
The silicone hydride waste gas treatment and purification system of industry.
Background technology
Silane as it is a kind of provide silicon components gas source, available for manufacture high-purity polycrystalline silicon, monocrystalline silicon, microcrystal silicon,
Non-crystalline silicon, silicon nitride, silica, heterogeneous silicon, various metal silicides.Because its high-purity and precise controlling can be realized, it has also become
The important special gas that many other silicon sources can not replace.Silane is widely used in microelectronics, optoelectronics industry, for manufacturing too
Positive electricity pond, flat-panel monitor, glass and steel coating, and be uniquely to mass produce granular high purity silicon in the world so far
Intermediate product.The high-tech application of silane is also continuously emerging, including for manufacturing advanced ceramics, composite, function material
Material, biomaterial, high energy material etc., as many new technologies, new material, new device basis.Silane is again distinctive with it
Spontaneous combustion, explosivity and it is famous.Silane has the spontaneous ignition scope and extremely strong burning capacity of non-constant width, and it is a kind of high to determine it
Dangerous gas.
The content of the invention
Goal of the invention:It is an object of the invention to provide a kind of silicone hydride waste gas incinerating and purifying system, reasonable in design, safety
Reliably, silicone hydride waste gas treatment effeciency is high, and non-secondary pollution is both economically and environmentally beneficial.
Technical scheme:In order to realize the above object the present invention is adopted the following technical scheme that:
A kind of silicone hydride waste gas incinerating and purifying system, it includes incinerator, multi-tube dust cleaner, sack cleaner, blower fan and cigarette
Chimney.
Preferably, above-described silicone hydride waste gas incinerating and purifying system, described incinerator afterbody is removed with multitube
Dirt device air inlet is connected, and multi-tube dust cleaner gas outlet is connected with sack cleaner air inlet, sack cleaner gas outlet and blower fan
Air inlet is connected, and fan outlet is connected with chimney.
Preferably, above-described silicone hydride waste gas incinerating and purifying system, described incinerator front end center axis
On be horizontally mounted burner, described burner is provided with silane gas entrance, combustion-supporting gas entry, combustion air entrance and indifferent gas
Entrance;Purged under emergency situations with indifferent gas, safety and reliability.
Preferably, above-described silicone hydride waste gas incinerating and purifying system, described incinerator is horizontal twin furnace shell
Structure, by the interior furnace shell combustion chamber constituted inside interior furnace shell nested with outer furnace shell, the mixing chamber of outer furnace shell rearward end and interior furnace shell
Chuck layer between outer furnace shell.Described outer furnace shell front end is provided with cooling air inlet.Cooling wind in chuck layer and chuck layer
Interior furnace shell and outer furnace shell, substitution refractory material and insulation material are cooled down simultaneously, reduce cost.In addition, without refractory material, opening stove
Without temperature protection when blowing out, can jerk suddenly open, be easy to tackle emergency situations, increase operation flexibility ratio.Combustion chamber can be protected
Demonstrate,prove silicone hydride waste gas and burn complete, burn the flue gas produced and cooled down into mixing chamber, be reduced to and suitably enter multi-tube dust cleaner
Temperature.
Preferably, above-described silicone hydride waste gas incinerating and purifying system, described interior furnace shell and outer furnace shell front end
Panel is overlapped and same central shaft.The length and radius of interior furnace shell and outer furnace shell according to silicone hydride waste gas amount, combustion-supporting coal tolerance and can stop
Stay Time Calculation.
Preferably, above-described silicone hydride waste gas incinerating and purifying system, between described interior furnace shell and outer furnace shell
Provided with some spinning disks, spinning disk is located at interior furnace shell afterbody, circumference uniform distribution.Spinning disk not only acts as support interior furnace shell and outer furnace shell
Effect, cooling wind is rotated into mixing chamber at an angle, strengthen mixed effect, improve cooling effectiveness, effectively reduction
The temperature of flue gas after burning.
The silicone hydride waste gas incinerating and purifying system that the present invention is provided, practical operation principle is:
The silicone hydride waste gas that is produced in silane enterprise production process introduces burner, and coal gas combustion-supporting is had by oneself with plant area, into burning
Burned the combustion chamber burnt in stove.Combustion-supporting coal tolerance ensures that silicone hydride waste gas burns completely.Burn the heat smoke produced and enter mixed
Room is closed, while entering mixing chamber through chuck layer and spinning disk using normal temperature air as cooling wind.Cool down wind simultaneously cool down interior furnace shell and
Outer furnace shell, instead of refractory material and insulation material, saves cost, increase operation flexibility ratio.Spinning disk makes cooling wind and combustion chamber
Heat smoke out is mixed in mixing chamber in eddy flow shape, strengthens mixed effect.Whole incinerator keeps micro-vacuum state, it is ensured that
Gas No leakage, it is safe and reliable.Flue gas after cooling enters multi-tube dust cleaner, removes large-size particles, enters back into bag-type dust
Device removes remaining solid particle, and efficiency of dust collection is improved while reducing the abrasion to upstream device.After two-stage dust removal process
Flue gas up to standard eventually enters into smoke stack emission.If running into emergency situations, promptly blowing out and it can be purged with indifferent gas.
Beneficial effect:Compared to the prior art there is advantages below in the silicone hydride waste gas incinerating and purifying system that the present invention is provided:
(1) silicone hydride waste gas that the present invention is provided is burned and cleaning system, to silane gas fluctuation of concentration wide adaptation range, is used
Multi-tube dust cleaner and sack cleaner two-stage dedusting, efficiency of dust collection are high, equipment life length and operating cost is low.
(2) the silicone hydride waste gas incinerating and purifying system that the present invention is provided, technique advantages of simple is safe and reliable, at silicone hydride waste gas
Efficiency high is managed, non-secondary pollution is both economically and environmentally beneficial.
Brief description of the drawings
The structural representation for the silicone hydride waste gas incinerating and purifying system that Fig. 1 provides for the present invention.
Embodiment
Below in conjunction with the accompanying drawings and specific embodiment, the present invention is furture elucidated, it should be understood that these embodiments are merely to illustrate
The present invention rather than limitation the scope of the present invention, after the present invention has been read, those skilled in the art are each to the present invention's
The modification for planting the equivalent form of value falls within the application appended claims limited range.
As shown in figure 1, a kind of silicone hydride waste gas incinerating and purifying system, it includes incinerator 2, multi-tube dust cleaner 3, bag-type dust
Device 4, blower fan 5 and chimney 6.
The afterbody of incinerator 2 is connected with the air inlet of multi-tube dust cleaner 3, the gas outlet of multi-tube dust cleaner 3 and the air inlet of sack cleaner 4
Mouth is connected, and the gas outlet of sack cleaner 4 is connected with the air inlet of blower fan 5, and the air outlet of blower fan 5 is connected with chimney 6.
Burner 1 is horizontally installed with the described front end center axis of incinerator 2, described burner 1 is provided with silane gas
Entrance 1-1, combustion-supporting gas entry 1-2, combustion air entrance 1-3 and indifferent gas entrance 1-4.
Described incinerator 2 is horizontal twin furnace shell structure, and combustion chamber 2- is constituted by interior furnace shell 2-1 is nested with outer furnace shell 2-2
4th, mixing chamber 2-5 and chuck layer 2-6.
Described outer furnace shell 2-2 front ends are provided with cooling air inlet 2-7.
Described interior furnace shell 2-1 and outer furnace shell 2-2 front consoles are overlapped, and interior furnace shell 2-1 and the same centers of outer furnace shell 2-2
Axle.
Some spinning disk 2-3 are provided between described interior furnace shell 2-1 and outer furnace shell 2-2, spinning disk 2-3 is located at interior furnace shell 2-
1 afterbody, circumferentially uniformly.
Described above is only the preferred embodiment of the present invention, it is noted that for the ordinary skill people of the art
For member, under the premise without departing from the principles of the invention, some improvements and modifications can also be made, these improvements and modifications also should
It is considered as protection scope of the present invention.
Claims (6)
1. a kind of silicone hydride waste gas incinerating and purifying system, it is characterised in that it includes incinerator (2), multi-tube dust cleaner (3), cloth bag
Deduster (4), blower fan (5) and chimney (6).
Incinerator (2) afterbody is connected with multi-tube dust cleaner (3) air inlet, multi-tube dust cleaner (3) gas outlet and sack cleaner (4)
Air inlet is connected, and sack cleaner (4) gas outlet is connected with blower fan (5) air inlet, and blower fan (5) air outlet is connected with chimney (6).
2. silicone hydride waste gas incinerating and purifying system according to claim 1, it is characterised in that incinerator (2) front end
It is horizontally installed with central axis on burner (1), described burner (1) and offers silane gas entrance (1-1), combustion-supporting coal gas
Entrance (1-2), combustion air entrance (1-3) and indifferent gas entrance (1-4).
3. silicone hydride waste gas incinerating and purifying system according to claim 1, it is characterised in that described incinerator (2) is sleeping
Formula twin furnace shell structure, combustion chamber (2-4), mixing chamber (2-5) and chuck are constituted by interior furnace shell (2-1) is nested with outer furnace shell (2-2)
Layer (2-6).
4. silicone hydride waste gas incinerating and purifying system according to claim 3, it is characterised in that before described outer furnace shell (2-2)
End is provided with cooling air inlet (2-7).
5. the silicone hydride waste gas incinerating and purifying system according to right wants 4, it is characterised in that described interior furnace shell (2-1) and outer
Furnace shell (2-2) front console is overlapped, interior furnace shell (2-1) and outer furnace shell (2-2) same to central shaft.
6. the silicone hydride waste gas incinerating and purifying system according to claim 1-5, it is characterised in that described interior furnace shell (2-1)
Spinning disk (2-3) is provided between outer furnace shell (2-2), spinning disk (2-3) is located at interior furnace shell (2-1) afterbody, circumferentially uniform point
Cloth.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201710444939.0A CN107091480A (en) | 2017-06-12 | 2017-06-12 | Silicone hydride waste gas incinerating and purifying system |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201710444939.0A CN107091480A (en) | 2017-06-12 | 2017-06-12 | Silicone hydride waste gas incinerating and purifying system |
Publications (1)
Publication Number | Publication Date |
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CN107091480A true CN107091480A (en) | 2017-08-25 |
Family
ID=59640013
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CN201710444939.0A Pending CN107091480A (en) | 2017-06-12 | 2017-06-12 | Silicone hydride waste gas incinerating and purifying system |
Country Status (1)
Country | Link |
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CN (1) | CN107091480A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108151036A (en) * | 2018-02-08 | 2018-06-12 | 上海第升环保科技有限公司 | Volatile organic gases incineration disposal complexes |
CN108837633A (en) * | 2018-08-31 | 2018-11-20 | 江苏久朗高科技股份有限公司 | A kind of online coating film on glass tail gas embrane method high-temperature process system and technique |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101968226A (en) * | 2010-10-26 | 2011-02-09 | 陕西天宏硅材料有限责任公司 | Burning treatment process of waste gas and waste liquid containing chlorosilane in polysilicon production |
CN102757148A (en) * | 2011-04-28 | 2012-10-31 | 陕西天宏硅材料有限责任公司 | System and method for processing waste gas and waste liquor in polysilicon production |
CN103528076A (en) * | 2013-10-21 | 2014-01-22 | 昆山市盛兴设备安装有限公司 | Exhaust gas incineration disposal system |
CN203533565U (en) * | 2013-09-26 | 2014-04-09 | 深圳市汇清科技有限公司 | Household refuse incineration and auxiliary smoke processing system |
CN206094037U (en) * | 2016-08-31 | 2017-04-12 | 苏州迪森生物能源有限公司 | Air and adjustable type biomass boiler system of backward flow flue gas ratio |
CN207146414U (en) * | 2017-06-12 | 2018-03-27 | 南京博纳能源环保科技有限公司 | Silicone hydride waste gas incinerating and purifying system |
-
2017
- 2017-06-12 CN CN201710444939.0A patent/CN107091480A/en active Pending
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101968226A (en) * | 2010-10-26 | 2011-02-09 | 陕西天宏硅材料有限责任公司 | Burning treatment process of waste gas and waste liquid containing chlorosilane in polysilicon production |
CN102757148A (en) * | 2011-04-28 | 2012-10-31 | 陕西天宏硅材料有限责任公司 | System and method for processing waste gas and waste liquor in polysilicon production |
CN203533565U (en) * | 2013-09-26 | 2014-04-09 | 深圳市汇清科技有限公司 | Household refuse incineration and auxiliary smoke processing system |
CN103528076A (en) * | 2013-10-21 | 2014-01-22 | 昆山市盛兴设备安装有限公司 | Exhaust gas incineration disposal system |
CN206094037U (en) * | 2016-08-31 | 2017-04-12 | 苏州迪森生物能源有限公司 | Air and adjustable type biomass boiler system of backward flow flue gas ratio |
CN207146414U (en) * | 2017-06-12 | 2018-03-27 | 南京博纳能源环保科技有限公司 | Silicone hydride waste gas incinerating and purifying system |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108151036A (en) * | 2018-02-08 | 2018-06-12 | 上海第升环保科技有限公司 | Volatile organic gases incineration disposal complexes |
CN108837633A (en) * | 2018-08-31 | 2018-11-20 | 江苏久朗高科技股份有限公司 | A kind of online coating film on glass tail gas embrane method high-temperature process system and technique |
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Application publication date: 20170825 |