CN107089808A - A kind of pressure sensor material and preparation method thereof - Google Patents
A kind of pressure sensor material and preparation method thereof Download PDFInfo
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- C04B35/453—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zinc, tin, or bismuth oxides or solid solutions thereof with other oxides, e.g. zincates, stannates or bismuthates
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- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/18—Measuring force or stress, in general using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material
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- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/02—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
- G01L9/06—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of piezo-resistive devices
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- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
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- C04B2235/3231—Refractory metal oxides, their mixed metal oxides, or oxide-forming salts thereof
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Abstract
The invention discloses a kind of pressure sensor material, it is characterised in that includes the raw material of following parts by weight：5 10 parts of bismuth oxide, 5 10 parts of sodium carbonate, 10 20 parts of titanium dioxide, 55 65 parts of zinc oxide, 0.5 1 parts of cobalt sesquioxide, 46 parts of strontium titanates, 5 10 parts of rare earth oxide, 25 parts of aluminum nitrate, 36 parts of silica, 10 20 parts of polyvinyl alcohol.The pressure sensor material of the present invention has higher nonlinear factor, relatively low Leakage Current, stronger heavy current ability and higher voltage gradient, its density is small, intensity is high simultaneously, resistance to blunt excellent performance, heat resistance are good, and the preparation method of the pressure sensor material of the present invention is simple, raw material is easy to get, production cost is low, has a good application prospect.
Description
Technical field
The present invention relates to sensor material technical field, and in particular to a kind of pressure sensor material and preparation method thereof.
Background technology
Pressure sensor is the most commonly used a kind of sensor in industrial practice, and it is widely used in various industrial automatic control rings
Border, be related to water conservancy and hydropower, railway traffic, intelligent building, production automatic control, Aero-Space, military project, petrochemical industry, oil well, electric power, ship,
Numerous industries such as lathe, pipeline, traditional pressure sensor is referred to based on the device of mechanical structure type with the deformation of flexible member
Show pressure, but this physical dimension is big, quality weight, it is impossible to electricity output is provided.With the development of semiconductor technology, semiconductor pressure
Force snesor also arises at the historic moment.It is characterized in small volume, light weight, degree of accuracy height, good temp characteristic.In particular with MEMS skills
The development of art, semiconductor transducer is towards miniaturization, and its small power consumption, reliability are high.It is the most normal in industrial practice
A kind of sensor, general usual pressure sensor is output as analog signal, and analog signal refers to information parameter given
In the range of show as continuous signal.Or in one section of continuous time interval, the characteristic quantity of its representative information can be any
Moment is rendered as the signal of any number.And our usually used pressure sensors mainly use piezo-electric effect to be fabricated by
, such sensor is also referred to as piezoelectric transducer.
But, with the development and progress of science and technology, the fast development of especially extensive smart circuit so as to first device
The requirement of part, especially sensor is more and more tighter, and its use environment is also more and more extensive and harsh, the sensor of novel high-performance
Material receives extensive research, and pressure sensor material is one of them important research direction.
The content of the invention
For the defect of prior art, it is an object of the invention to provide a kind of pressure sensor material, the pressure sensor
Material has higher nonlinear factor, relatively low Leakage Current, stronger heavy current ability and higher voltage gradient, together
When its density is small, intensity is high, resistance to blunt excellent performance, heat resistance are good, and the preparation method of the pressure sensor material of the present invention
Simply, raw material be easy to get, production cost it is low, have a good application prospect.
The present invention solves technical problem and adopted the following technical scheme that：
The invention provides a kind of pressure sensor material, include the raw material of following parts by weight：
5-10 parts of bismuth oxide, 5-10 parts of sodium carbonate, 10-20 parts of titanium dioxide, 55-65 parts of zinc oxide, cobalt sesquioxide
0.5-1 parts, 4-6 parts of strontium titanates, 5-10 parts of rare earth oxide, 2-5 parts of aluminum nitrate, 3-6 parts of silica, polyvinyl alcohol
10-20 parts.
Preferably, the pressure sensor material includes the raw material of following parts by weight：
8 parts of bismuth oxide, 8 parts of sodium carbonate, 15 parts of titanium dioxide, 60 parts of zinc oxide, 0.8 part of cobalt sesquioxide, strontium titanates 5
Part, 8 parts of rare earth oxide, 3 parts of aluminum nitrate, 4.5 parts of silica, 15 parts of polyvinyl alcohol.
Preferably, the rare earth oxide is the one or more in lanthana, yittrium oxide, rheium oxide, ytterbium oxide.
Present invention also offers a kind of preparation method of pressure sensor material, comprise the following steps：
Step one, bismuth oxide, sodium carbonate, titanium dioxide are mixed, addition deionized water, ball milling 10-15 hours, then
It is dried and obtains powder, the powder is obtained into mixture A in 3-5 hours in insulation at 880-950 DEG C under air ambient；
Step 2, rare earth oxide is preheated 1-2 hours at 350-450 DEG C, then temperature is 950- in nitrogen atmosphere
Calcining obtains sinter B in 1-3 hours at 1050 DEG C；
Step 3, by mixture B, zinc oxide, cobalt sesquioxide, metatitanic acid made from mixture A made from step one, step 2
Strontium, aluminum nitrate, silica carry out ball milling 1-2 hours, are washed with deionized water 2-4 times, then remix isometric deionization
Water is added in planetary ball mill, with 800-900r/min wet-millings 10-12 hours, is taken out the mixture after wet-milling, is placed in
Toasted 1-2 hours in 200-250 DEG C, sieving obtains powder C, it is ensured that obtained diameter of particle is in 90-110nm；
Step 4, by powder made from step 3 and polyvinyl alcohol, the deionized water of the quality such as addition is put into mixer
Stirring 8-10 hours, rotating speed 1000-1200r/min after stirring, carries out mist projection granulating to the mixture, obtains pressure
Sensor material.
Preferably, Ball-milling Time is 13 hours, 910 DEG C of holding temperature, soaking time 4 hours in the step one.
Preferably, in the step 2 preheating temperature be 400 DEG C, preheating time be 1.5 hours, 1000 DEG C of calcining heat,
Calcination time 2 hours.
Preferably, the step 3 is：By mixture B made from mixture A made from step one, step 2, zinc oxide,
Cobalt sesquioxide, strontium titanates, aluminum nitrate, silica carry out ball milling 1.5 hours, are washed with deionized water 3 times, then remix
The deionized water of volume is added in planetary ball mill, with 850r/min wet-millings 11 hours, is taken out the mixture after wet-milling, is put
In being toasted 1.5 hours in 225 DEG C, sieving obtains powder C, it is ensured that obtained diameter of particle is in 90-110nm.
Preferably, mixing time is 9 hours, rotating speed 1100r/min in the step 4.
Compared with prior art, the present invention has following beneficial effect：
（1）The pressure sensor material of the present invention is by introducing rare earth element so that prepared pressure sensor material has
Higher nonlinear factor, relatively low Leakage Current, stronger heavy current ability and higher voltage gradient.
（2）The pressure sensor density of material small intensity of the present invention is high, and specific strength is big, resistance to blunt excellent performance, heat resistance
It is good, at a high temperature of 600 DEG C, still keep preferable performance.
（3）The present invention pressure sensor material by oikocryst material, semi-conducting material and help burn material composition
Adjustment is optimized with proportioning, test indicate that, the heating of the voltage of preparation-obtained annular voltage-sensitive resistor at 0-300 DEG C
Change is no more than 8% in environment, can be worked under higher operating ambient temperature.
（4）The preparation method of the pressure sensor material of the present invention is simple, material is easy to get, production cost is relatively low, it is big to be adapted to
Prepared by technical scale, with wide application prospect.
Embodiment
With reference to specific embodiment, the technical scheme in the embodiment of the present invention is clearly and completely described, shown
So, described embodiment is only a part of embodiment of the invention, rather than whole embodiments.Based on the reality in the present invention
Example is applied, the every other embodiment that those of ordinary skill in the art are obtained under the premise of creative work is not made all belongs to
In the scope of protection of the invention.
Embodiment 1.
The pressure sensor material of the present embodiment, includes the raw material of following parts by weight：
5 parts of bismuth oxide, 5 parts of sodium carbonate, 10 parts of titanium dioxide, 55 parts of zinc oxide, 0.5 part of cobalt sesquioxide, strontium titanates 4
Part, 5 parts of yittrium oxide, 2 parts of aluminum nitrate, 3 parts of silica, 10 parts of polyvinyl alcohol.
The preparation method of the pressure sensor material of the present embodiment, comprises the following steps：
Step one, bismuth oxide, sodium carbonate, titanium dioxide are mixed, adds deionized water, then ball milling 10 hours is carried out
Powder is dried to obtain, the powder is obtained into mixture A in 3 hours in insulation at 880 DEG C under air ambient；
Step 2, yittrium oxide is preheated 1 hour at 350 DEG C, then temperature is obtained for 1 hour for calcining at 950 DEG C in nitrogen atmosphere
To sinter B；
Step 3, by mixture B, zinc oxide, cobalt sesquioxide, metatitanic acid made from mixture A made from step one, step 2
Strontium, aluminum nitrate, silica carry out ball milling 1 hour, are washed with deionized water 2 times, then remix isometric deionized water and add
Enter into planetary ball mill, with 800r/min wet-millings 10 hours, take out the mixture after wet-milling, be placed in 200 DEG C and toast 1
Hour, sieving obtains powder C, it is ensured that obtained diameter of particle is in 90nm；
Step 4, by powder made from step 3 and polyvinyl alcohol, the deionized water of the quality such as addition is put into mixer
Stirring 8 hours, rotating speed 1000r/min after stirring, carries out mist projection granulating to the mixture, obtains pressure sensing equipment
Material.
Embodiment 2.
The pressure sensor material of the present embodiment, includes the raw material of following parts by weight：
10 parts of bismuth oxide, 10 parts of sodium carbonate, 20 parts of titanium dioxide, 65 parts of zinc oxide, 1 part of cobalt sesquioxide, strontium titanates 6
Part, 10 parts of lanthana, 5 parts of aluminum nitrate, 6 parts of silica, 20 parts of polyvinyl alcohol.
The preparation method of the pressure sensor material of the present embodiment, comprises the following steps：
Step one, bismuth oxide, sodium carbonate, titanium dioxide are mixed, adds deionized water, then ball milling 15 hours is carried out
Powder is dried to obtain, the powder is obtained into mixture A in 5 hours in insulation at 950 DEG C under air ambient；
Step 2, lanthana is preheated 2 hours at 450 DEG C, then temperature is obtained for 3 hours for calcining at 1050 DEG C in nitrogen atmosphere
To sinter B；
Step 3, by mixture B, zinc oxide, cobalt sesquioxide, metatitanic acid made from mixture A made from step one, step 2
Strontium, aluminum nitrate, silica carry out ball milling 2 hours, are washed with deionized water 4 times, then remix isometric deionized water and add
Enter into planetary ball mill, with 900r/min wet-millings 12 hours, take out the mixture after wet-milling, be placed in baking 2 in 250 DEG C small
When, sieving obtains powder C, it is ensured that obtained diameter of particle is in 110nm；
Step 4, by powder made from step 3 and polyvinyl alcohol, the deionized water of the quality such as addition is put into mixer
Stirring 10 hours, rotating speed 1200r/min after stirring, carries out mist projection granulating to the mixture, obtains pressure sensing equipment
Material.
Embodiment 3.
The pressure sensor material of the present embodiment, includes the raw material of following parts by weight：
8 parts of bismuth oxide, 8 parts of sodium carbonate, 15 parts of titanium dioxide, 60 parts of zinc oxide, 0.8 part of cobalt sesquioxide, strontium titanates 5
Part, 8 parts of ytterbium oxide, 3 parts of aluminum nitrate, 4.5 parts of silica, 15 parts of polyvinyl alcohol.
The preparation method of the pressure sensor material of the present embodiment, comprises the following steps：
Step one, bismuth oxide, sodium carbonate, titanium dioxide are mixed, adds deionized water, then ball milling 13 hours is carried out
Powder is dried to obtain, the powder is obtained into mixture A in 4 hours in insulation at 910 DEG C under air ambient；
Step 2, ytterbium oxide is preheated 1.5 hours at 400 DEG C, then temperature is calcining 2 hours at 1000 DEG C in nitrogen atmosphere
Obtain sinter B；
Step 3, by mixture B, zinc oxide, cobalt sesquioxide, metatitanic acid made from mixture A made from step one, step 2
Strontium, aluminum nitrate, silica carry out ball milling 1.5 hours, are washed with deionized water 3 times, then remix isometric deionized water
It is added in planetary ball mill, with 850r/min wet-millings 11 hours, takes out the mixture after wet-milling, be placed in 225 DEG C and toast
1.5 hours, sieving obtained powder C, it is ensured that obtained diameter of particle is in 90-110nm；
Step 4, by powder made from step 3 and polyvinyl alcohol, the deionized water of the quality such as addition is put into mixer
Stirring 9 hours, rotating speed 1100r/min after stirring, carries out mist projection granulating to the mixture, obtains pressure sensing equipment
Material.
Embodiment 4.
The pressure sensor material of the present embodiment, includes the raw material of following parts by weight：
6 parts of bismuth oxide, 6 parts of sodium carbonate, 13 parts of titanium dioxide, 58 parts of zinc oxide, 0.7 part of cobalt sesquioxide, strontium titanates 5
Part, 7 parts of rheium oxide, 3 parts of aluminum nitrate, 4 parts of silica, 18 parts of polyvinyl alcohol.
The preparation method of the pressure sensor material of the present embodiment, comprises the following steps：
Step one, bismuth oxide, sodium carbonate, titanium dioxide are mixed, adds deionized water, then ball milling 14 hours is carried out
Powder is dried to obtain, the powder is obtained into mixture A in 4.5 hours in insulation at 900 DEG C under air ambient；
Step 2, rheium oxide is preheated 1.7 hours at 380 DEG C, then temperature is small for calcining 1.5 at 1020 DEG C in nitrogen atmosphere
When obtain sinter B；
Step 3, by mixture B, zinc oxide, cobalt sesquioxide, metatitanic acid made from mixture A made from step one, step 2
Strontium, aluminum nitrate, silica carry out ball milling 1.5 hours, are washed with deionized water 3 times, then remix isometric deionized water
It is added in planetary ball mill, with 850r/min wet-millings 11 hours, takes out the mixture after wet-milling, be placed in 220 DEG C and toast
1.5 hours, sieving obtained powder C, it is ensured that obtained diameter of particle is in 100nm；
Step 4, by powder made from step 3 and polyvinyl alcohol, the deionized water of the quality such as addition is put into mixer
Stirring 8.5 hours, rotating speed 1100r/min after stirring, carries out mist projection granulating to the mixture, obtains pressure sensor
Material.
The pressure sensor material of the present invention is by introducing rare earth element so that prepared pressure sensor material has
Higher nonlinear factor, relatively low Leakage Current, stronger heavy current ability and higher voltage gradient, while material is close
Spend small intensity high, specific strength is big, and resistance to blunt excellent performance, heat resistance is good, at a high temperature of 600 DEG C, still keeps preferable performance.
The preparation method of the pressure sensor material of the present invention is simple, material is easy to get, production cost is relatively low, be adapted to large-scale industry system
It is standby, with wide application prospect.
It is obvious to a person skilled in the art that the invention is not restricted to the details of above-mentioned one exemplary embodiment, Er Qie
In the case of without departing substantially from spirit or essential attributes of the invention, the present invention can be realized in other specific forms.Therefore, no matter
From the point of view of which point, embodiment all should be regarded as exemplary, and be nonrestrictive, the scope of the present invention is by appended power
Profit is required rather than described above is limited, it is intended that all in the implication and scope of the equivalency of claim by falling
Change is included in the present invention.Any reference in claim should not be considered as to the claim involved by limitation.
Moreover, it will be appreciated that although the present specification is described in terms of embodiments, not each embodiment is only wrapped
Containing an independent technical scheme, this narrating mode of specification is only that for clarity, those skilled in the art should
Using specification as an entirety, the technical solutions in the various embodiments may also be suitably combined, forms those skilled in the art
It may be appreciated other embodiment.
Claims (8)
1. a kind of pressure sensor material, it is characterised in that include the raw material of following parts by weight：
5-10 parts of bismuth oxide, 5-10 parts of sodium carbonate, 10-20 parts of titanium dioxide, 55-65 parts of zinc oxide, cobalt sesquioxide
0.5-1 parts, 4-6 parts of strontium titanates, 5-10 parts of rare earth oxide, 2-5 parts of aluminum nitrate, 3-6 parts of silica, polyvinyl alcohol
10-20 parts.
2. pressure sensor material according to claim 1, it is characterised in that the pressure sensor material includes following
The raw material of parts by weight：
8 parts of bismuth oxide, 8 parts of sodium carbonate, 15 parts of titanium dioxide, 60 parts of zinc oxide, 0.8 part of cobalt sesquioxide, strontium titanates 5
Part, 8 parts of rare earth oxide, 3 parts of aluminum nitrate, 4.5 parts of silica, 15 parts of polyvinyl alcohol.
3. pressure sensor material according to claim 1 or 2, it is characterised in that the rare earth oxide is oxygen
Change the one or more in lanthanum, yittrium oxide, rheium oxide, ytterbium oxide.
4. the preparation method of pressure sensor material according to claim 1 or 2, it is characterised in that comprise the following steps：
Step one, bismuth oxide, sodium carbonate, titanium dioxide are mixed, addition deionized water, ball milling 10-15 hours, then
It is dried and obtains powder, the powder is obtained into mixture A in 3-5 hours in insulation at 880-950 DEG C under air ambient；
Step 2, rare earth oxide is preheated 1-2 hours at 350-450 DEG C, then temperature is 950- in nitrogen atmosphere
Calcining obtains sinter B in 1-3 hours at 1050 DEG C；
Step 3, by mixture B, zinc oxide, cobalt sesquioxide, metatitanic acid made from mixture A made from step one, step 2
Strontium, aluminum nitrate, silica carry out ball milling 1-2 hours, are washed with deionized water 2-4 times, then remix isometric deionization
Water is added in planetary ball mill, with 800-900r/min wet-millings 10-12 hours, is taken out the mixture after wet-milling, is placed in
Toasted 1-2 hours in 200-250 DEG C, sieving obtains powder C, it is ensured that obtained diameter of particle is in 90-110nm；
Step 4, by powder made from step 3 and polyvinyl alcohol, the deionized water of the quality such as addition is put into mixer
Stirring 8-10 hours, rotating speed 1000-1200r/min after stirring, carries out mist projection granulating to the mixture, obtains pressure
Sensor material.
5. the preparation method of pressure sensor material according to claim 4, it is characterised in that ball milling in the step one
Time is 13 hours, 910 DEG C of holding temperature, soaking time 4 hours.
6. the preparation method of pressure sensor material according to claim 4, it is characterised in that preheated in the step 2
Temperature is 400 DEG C, preheating time is 1.5 hours, 1000 DEG C of calcining heat, calcination time 2 hours.
7. the preparation method of pressure sensor material according to claim 4, it is characterised in that the step 3 is：Will
Mixture A made from step one, mixture B, zinc oxide, cobalt sesquioxide, strontium titanates, aluminum nitrate, dioxy made from step 2
SiClx carries out ball milling 1.5 hours, is washed with deionized water 3 times, then remixes isometric deionized water and be added to planetary ball
In grinding machine, with 850r/min wet-millings 11 hours, the mixture after wet-milling is taken out, is placed in 225 DEG C and toasts 1.5 hours, sieve
To powder C, it is ensured that obtained diameter of particle is in 90-110nm.
8. the preparation method of pressure sensor material according to claim 4, it is characterised in that stirred in the step 4
Time is 9 hours, rotating speed 1100r/min.
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| CN110407515A (en) * | 2019-06-04 | 2019-11-05 | 中电鼎康（天长）科技有限公司 | A kind of heat-resisting pressure sensor material and preparation method thereof |
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| CN103319171A (en) * | 2013-06-14 | 2013-09-25 | 广东风华高新科技股份有限公司 | Annular piezoresistor ceramic and preparation method thereof, and annular piezoresistor and preparation method thereof |
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Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103319171A (en) * | 2013-06-14 | 2013-09-25 | 广东风华高新科技股份有限公司 | Annular piezoresistor ceramic and preparation method thereof, and annular piezoresistor and preparation method thereof |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110407515A (en) * | 2019-06-04 | 2019-11-05 | 中电鼎康（天长）科技有限公司 | A kind of heat-resisting pressure sensor material and preparation method thereof |
| CN110407515B (en) * | 2019-06-04 | 2021-10-29 | 中电鼎康（天长）科技有限公司 | Heat-resistant pressure sensor material and preparation method thereof |
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