CN110407515B - Heat-resistant pressure sensor material and preparation method thereof - Google Patents
Heat-resistant pressure sensor material and preparation method thereof Download PDFInfo
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- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B18/00—Use of agglomerated or waste materials or refuse as fillers for mortars, concrete or artificial stone; Treatment of agglomerated or waste materials or refuse, specially adapted to enhance their filling properties in mortars, concrete or artificial stone
- C04B18/02—Agglomerated materials, e.g. artificial aggregates
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- C04B26/00—Compositions of mortars, concrete or artificial stone, containing only organic binders, e.g. polymer or resin concrete
- C04B26/30—Compounds having one or more carbon-to-metal or carbon-to-silicon linkages ; Other silicon-containing organic compounds; Boron-organic compounds
- C04B26/32—Compounds having one or more carbon-to-metal or carbon-to-silicon linkages ; Other silicon-containing organic compounds; Boron-organic compounds containing silicon
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- C04B40/00—Processes, in general, for influencing or modifying the properties of mortars, concrete or artificial stone compositions, e.g. their setting or hardening ability
- C04B40/0028—Aspects relating to the mixing step of the mortar preparation
- C04B40/0039—Premixtures of ingredients
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- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/18—Measuring force or stress, in general using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/26—Auxiliary measures taken, or devices used, in connection with the measurement of force, e.g. for preventing influence of transverse components of force, for preventing overload
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
- G01L19/0681—Protection against excessive heat
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/02—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
- G01L9/06—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of piezo-resistive devices
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C7/00—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material
- H01C7/10—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material voltage responsive, i.e. varistors
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- C—CHEMISTRY; METALLURGY
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- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2103/00—Function or property of ingredients for mortars, concrete or artificial stone
- C04B2103/40—Surface-active agents, dispersants
- C04B2103/408—Dispersants
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2111/00—Mortars, concrete or artificial stone or mixtures to prepare them, characterised by specific function, property or use
- C04B2111/00474—Uses not provided for elsewhere in C04B2111/00
- C04B2111/00844—Uses not provided for elsewhere in C04B2111/00 for electronic applications
Abstract
The invention provides a heat-resistant pressure sensor material and a preparation method thereof, and relates to the technical field of pressure sensors. The heat-resistant pressure sensor material is prepared from the following raw materials in parts by weight: 12-14 parts of chromium, 3-5 parts of carbon, 8-10 parts of titanium dioxide, 1-2 parts of graphene, 2-4 parts of rare earth elements, 6-10 parts of silicon carbide, 2-4 parts of silicon dioxide, 3-5 parts of aluminum oxide, 3-5 parts of barium titanate, 6-8 parts of titanium tetrachloride, 1-2 parts of sodium hydroxide, 0.2-0.4 part of ethylenediamine tetraacetic acid, 0.8-1.2 parts of magnesium oxide, 2-3 parts of a dispersing agent and 6-10 parts of an adhesive. The invention overcomes the defects of the prior art, improves the heat-resistant performance of the sensor material, reduces the influence of high-temperature environment on the detection of the sensor, enhances the aging resistance of the product, and is suitable for popularization, production and use.
Description
Technical Field
The invention relates to the technical field of pressure sensor processing, in particular to a heat-resistant pressure sensor material and a preparation method thereof.
Background
The pressure sensor is the most common sensor in industrial practice, is widely applied to various industrial automatic control environments, and relates to various industries such as water conservancy and hydropower, railway transportation, intelligent buildings, production automatic control, aerospace, military industry, petrifaction, oil wells, electric power, ships, machine tools, pipelines and the like. With the development of semiconductor technology, semiconductor pressure sensors have come to be developed. Its advantages are small size, light weight, high accuracy and high temp. Particularly, with the development of MEMS technology, the semiconductor sensor is miniaturized, and has low power consumption and high reliability. The sensor is the most commonly used sensor in industrial practice, and the output of a common pressure sensor is an analog signal, which means that an information parameter shows a continuous signal in a given range. Or in a continuous time interval, the characteristic quantity representing the information may be present as a signal of any value at any instant. While the pressure sensors that we commonly use are mainly manufactured using the piezoelectric effect, such sensors are also referred to as piezoelectric sensors.
However, with the development and progress of science and technology, especially the rapid development of large-scale intelligent circuits, the requirements on components, especially sensors, are getting tighter and tighter, the use environments of the components, especially the sensors, are getting wider and more severe, novel high-performance sensor materials are widely researched, and pressure sensor materials are an important research direction.
Disclosure of Invention
Aiming at the defects of the prior art, the invention provides the heat-resistant pressure sensor material and the preparation method thereof, which improve the heat-resistant performance of the sensor material, reduce the influence of high-temperature environment on the detection of the sensor, simultaneously enhance the aging resistance of the product, and are suitable for popularization, production and use.
In order to achieve the above purpose, the technical scheme of the invention is realized by the following technical scheme:
a heat-resistant pressure sensor material is prepared from the following raw materials in parts by weight: 12-14 parts of chromium, 3-5 parts of carbon, 8-10 parts of titanium dioxide, 1-2 parts of graphene, 2-4 parts of rare earth elements, 6-10 parts of silicon carbide, 2-4 parts of silicon dioxide, 3-5 parts of aluminum oxide, 3-5 parts of barium titanate, 6-8 parts of titanium tetrachloride, 1-2 parts of sodium hydroxide, 0.2-0.4 part of ethylenediamine tetraacetic acid, 0.8-1.2 parts of magnesium oxide, 2-3 parts of a dispersing agent and 6-10 parts of an adhesive.
Preferably, the rare earth element is at least one of lanthanum, cerium, neodymium, gadolinium, terbium, dysprosium, ytterbium and lutetium.
Preferably, the dispersant is a mixture of polyacrylamide, sodium dodecyl sulfate and methyl amyl alcohol in a mass ratio of 3: 2: 1.
Preferably, the adhesive is a mixture of polyvinyl alcohol and polydimethylsiloxane in a mass ratio of 5: 2.
The preparation method of the heat-resistant pressure sensor material comprises the following steps:
(1) mixing titanium tetrachloride, sodium hydroxide and magnesium oxide in a ball mill, ball-milling for a period of time, adding ethylene diamine tetraacetic acid, preheating at the temperature of 350-;
(2) adding chromium into aluminum oxide, silicon dioxide and silicon carbide, mixing, adding deionized water, performing wet ball milling in a ball mill for a period of time, and performing high-temperature forging in a high-pressure forging furnace at 920-980 ℃ for 1-1.2h to obtain a mixture B for later use;
(3) adding the mixture B into the mixture A and barium titanate, performing ball milling in a ball mill, uniformly stirring, sintering at the temperature of 600-;
(4) adding carbon into the mixture C, performing ball milling in a ball mill, adding rare earth elements, and performing heat preservation for a period of time in an argon protection atmosphere at the temperature of 500-600 ℃ to obtain a mixture D for later use;
(5) adding titanium dioxide, graphene and a dispersing agent into the mixture D, performing ball milling in a ball mill, adding a binder and deionized water after ball milling, stirring at a high speed in a stirrer, uniformly stirring, and performing spray granulation on the mixture to obtain the pressure sensor material.
Preferably, the ball milling time in the step (1) is 6-8h, the preheating time is 1-2h, and the high-temperature sintering time is 2-2.5 h.
Preferably, the ball milling time in the step (3) is 60-80min, and the sintering time is 80-100 min.
Preferably, the ball milling time in the step (4) is 25-30min, and the heat preservation time is 2-3 h.
Preferably, the ball milling time in the step (5) is 6-8h, the high-speed stirring rotation speed is 1200-1400r/min, and the stirring time is 2-3 h.
The invention provides a heat-resistant pressure sensor material and a preparation method thereof, and compared with the prior art, the heat-resistant pressure sensor material has the advantages that:
(1) according to the invention, substances such as chromium, carbon, titanium dioxide, graphene, rare earth elements, silicon carbide, silicon dioxide, aluminum oxide, barium titanate and the like are added and mixed to prepare the sensor material, so that the heat resistance and the ageing resistance of the product can be effectively improved, the stability of the product in an extreme environment is improved, and the economic value of the product is enhanced.
(2) According to the invention, titanium tetrachloride, sodium hydroxide and magnesium oxide are mixed and added into ethylenediamine tetraacetic acid, and the mixture is preheated and then sintered at high temperature, so that the high-temperature resistance of the raw materials is effectively improved, and the dielectric loss of the product is reduced by matching with the addition of barium titanate, and the overall performance is improved.
(3) The invention adopts multiple ball milling and calcining mixing, effectively and fully and uniformly mixes various components, and improves the stability of the product.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention are clearly and completely described below in conjunction with the embodiments of the present invention, and it is obvious that the described embodiments are some embodiments of the present invention, but not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Example 1:
a heat-resistant pressure sensor material is prepared from the following raw materials in parts by weight: 12 parts of chromium, 3 parts of carbon, 8 parts of titanium dioxide, 1 part of graphene, 2 parts of rare earth elements, 6 parts of silicon carbide, 2 parts of silicon dioxide, 3 parts of aluminum oxide, 3 parts of barium titanate, 6 parts of titanium tetrachloride, 1 part of sodium hydroxide, 0.2 part of ethylene diamine tetraacetic acid, 0.8 part of magnesium oxide, 2 parts of a dispersing agent and 6 parts of an adhesive.
The rare earth element is at least one of lanthanum, cerium, neodymium, gadolinium, terbium, dysprosium, ytterbium and lutetium; the dispersant is a mixture of polyacrylamide, sodium dodecyl sulfate and methyl amyl alcohol in a mass ratio of 3: 2: 1; the adhesive is a mixture of polyvinyl alcohol and polydimethylsiloxane in a mass ratio of 5: 2.
The preparation method of the heat-resistant pressure sensor material comprises the following steps:
(1) mixing titanium tetrachloride, sodium hydroxide and magnesium oxide in a ball mill, ball-milling for a period of time, adding ethylene diamine tetraacetic acid, preheating at the temperature of 350-;
(2) adding chromium into aluminum oxide, silicon dioxide and silicon carbide, mixing, adding deionized water, performing wet ball milling in a ball mill for a period of time, and performing high-temperature forging in a high-pressure forging furnace at 920-980 ℃ for 1-1.2h to obtain a mixture B for later use;
(3) adding the mixture B into the mixture A and barium titanate, performing ball milling in a ball mill, uniformly stirring, sintering at the temperature of 600-;
(4) adding carbon into the mixture C, performing ball milling in a ball mill, adding rare earth elements, and performing heat preservation for a period of time in an argon protection atmosphere at the temperature of 500-600 ℃ to obtain a mixture D for later use;
(5) adding titanium dioxide, graphene and a dispersing agent into the mixture D, performing ball milling in a ball mill, adding a binder and deionized water after ball milling, stirring at a high speed in a stirrer, uniformly stirring, and performing spray granulation on the mixture to obtain the pressure sensor material.
Wherein, the ball milling time in the step (1) is 6-8h, the preheating time is 1-2h, and the high-temperature sintering time is 2-2.5 h; in the step (3), the ball milling time is 60-80min, and the sintering time is 80-100 min; the ball milling time in the step (4) is 25-30min, and the heat preservation time is 2-3 h; the ball milling time in the step (5) is 6-8h, the high-speed stirring speed is 1200-1400r/min, and the stirring time is 2-3 h.
Example 2:
a heat-resistant pressure sensor material is prepared from the following raw materials in parts by weight: 14 parts of chromium, 5 parts of carbon, 10 parts of titanium dioxide, 2 parts of graphene, 4 parts of rare earth elements, 10 parts of silicon carbide, 4 parts of silicon dioxide, 5 parts of aluminum oxide, 5 parts of barium titanate, 8 parts of titanium tetrachloride, 2 parts of sodium hydroxide, 0.4 part of ethylene diamine tetraacetic acid, 1.2 parts of magnesium oxide, 3 parts of a dispersing agent and 10 parts of an adhesive.
The rare earth element is at least one of lanthanum, cerium, neodymium, gadolinium, terbium, dysprosium, ytterbium and lutetium; the dispersant is a mixture of polyacrylamide, sodium dodecyl sulfate and methyl amyl alcohol in a mass ratio of 3: 2: 1; the adhesive is a mixture of polyvinyl alcohol and polydimethylsiloxane in a mass ratio of 5: 2.
The preparation method of the heat-resistant pressure sensor material comprises the following steps:
(1) mixing titanium tetrachloride, sodium hydroxide and magnesium oxide in a ball mill, ball-milling for a period of time, adding ethylene diamine tetraacetic acid, preheating at the temperature of 350-;
(2) adding chromium into aluminum oxide, silicon dioxide and silicon carbide, mixing, adding deionized water, performing wet ball milling in a ball mill for a period of time, and performing high-temperature forging in a high-pressure forging furnace at 920-980 ℃ for 1-1.2h to obtain a mixture B for later use;
(3) adding the mixture B into the mixture A and barium titanate, performing ball milling in a ball mill, uniformly stirring, sintering at the temperature of 600-;
(4) adding carbon into the mixture C, performing ball milling in a ball mill, adding rare earth elements, and performing heat preservation for a period of time in an argon protection atmosphere at the temperature of 500-600 ℃ to obtain a mixture D for later use;
(5) adding titanium dioxide, graphene and a dispersing agent into the mixture D, performing ball milling in a ball mill, adding a binder and deionized water after ball milling, stirring at a high speed in a stirrer, uniformly stirring, and performing spray granulation on the mixture to obtain the pressure sensor material.
Wherein, the ball milling time in the step (1) is 6-8h, the preheating time is 1-2h, and the high-temperature sintering time is 2-2.5 h; in the step (3), the ball milling time is 60-80min, and the sintering time is 80-100 min; the ball milling time in the step (4) is 25-30min, and the heat preservation time is 2-3 h; the ball milling time in the step (5) is 6-8h, the high-speed stirring speed is 1200-1400r/min, and the stirring time is 2-3 h.
Example 3:
a heat-resistant pressure sensor material is prepared from the following raw materials in parts by weight: 13 parts of chromium, 4 parts of carbon, 9 parts of titanium dioxide, 1.5 parts of graphene, 3 parts of rare earth elements, 8 parts of silicon carbide, 3 parts of silicon dioxide, 4 parts of aluminum oxide, 4 parts of barium titanate, 7 parts of titanium tetrachloride, 1.5 parts of sodium hydroxide, 0.3 part of ethylene diamine tetraacetic acid, 1 part of magnesium oxide, 2.5 parts of a dispersing agent and 8 parts of an adhesive.
The rare earth element is at least one of lanthanum, cerium, neodymium, gadolinium, terbium, dysprosium, ytterbium and lutetium; the dispersant is a mixture of polyacrylamide, sodium dodecyl sulfate and methyl amyl alcohol in a mass ratio of 3: 2: 1; the adhesive is a mixture of polyvinyl alcohol and polydimethylsiloxane in a mass ratio of 5: 2.
The preparation method of the heat-resistant pressure sensor material comprises the following steps:
(1) mixing titanium tetrachloride, sodium hydroxide and magnesium oxide in a ball mill, ball-milling for a period of time, adding ethylene diamine tetraacetic acid, preheating at the temperature of 350-;
(2) adding chromium into aluminum oxide, silicon dioxide and silicon carbide, mixing, adding deionized water, performing wet ball milling in a ball mill for a period of time, and performing high-temperature forging in a high-pressure forging furnace at 920-980 ℃ for 1-1.2h to obtain a mixture B for later use;
(3) adding the mixture B into the mixture A and barium titanate, performing ball milling in a ball mill, uniformly stirring, sintering at the temperature of 600-;
(4) adding carbon into the mixture C, performing ball milling in a ball mill, adding rare earth elements, and performing heat preservation for a period of time in an argon protection atmosphere at the temperature of 500-600 ℃ to obtain a mixture D for later use;
(5) adding titanium dioxide, graphene and a dispersing agent into the mixture D, performing ball milling in a ball mill, adding a binder and deionized water after ball milling, stirring at a high speed in a stirrer, uniformly stirring, and performing spray granulation on the mixture to obtain the pressure sensor material.
Wherein, the ball milling time in the step (1) is 6-8h, the preheating time is 1-2h, and the high-temperature sintering time is 2-2.5 h; in the step (3), the ball milling time is 60-80min, and the sintering time is 80-100 min; the ball milling time in the step (4) is 25-30min, and the heat preservation time is 2-3 h; the ball milling time in the step (5) is 6-8h, the high-speed stirring speed is 1200-1400r/min, and the stirring time is 2-3 h.
Example 4:
the materials obtained in the above examples 1 to 3 were prepared into ring-shaped piezoresistors, and the change rate of the voltage of each set of piezoresistors in various temperature environments compared with the voltage at normal temperature was measured, and the results are shown in the following table:
as shown in the table, the voltage change rates of the annular piezoresistors prepared by the product obtained in the embodiment of the invention are less than 10% within the temperature range of 50-400 ℃, that is, the product obtained in the embodiment of the invention has higher stability when used within the temperature range of 400 ℃, the product can effectively resist high temperature, and the test data of the product obtained in the embodiment 2 is optimal.
It is noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising an … …" does not exclude the presence of other identical elements in a process, method, article, or apparatus that comprises the element.
The above examples are only intended to illustrate the technical solution of the present invention, but not to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; and such modifications or substitutions do not depart from the spirit and scope of the corresponding technical solutions of the embodiments of the present invention.
Claims (8)
1. The heat-resistant pressure sensor material is characterized by being prepared from the following raw materials in parts by weight: 12-14 parts of chromium, 3-5 parts of carbon, 8-10 parts of titanium dioxide, 1-2 parts of graphene, 2-4 parts of rare earth elements, 6-10 parts of silicon carbide, 2-4 parts of silicon dioxide, 3-5 parts of aluminum oxide, 3-5 parts of barium titanate, 6-8 parts of titanium tetrachloride, 1-2 parts of sodium hydroxide, 0.2-0.4 part of ethylenediamine tetraacetic acid, 0.8-1.2 parts of magnesium oxide, 2-3 parts of a dispersing agent and 6-10 parts of an adhesive;
the preparation method of the heat-resistant pressure sensor material comprises the following steps:
(1) mixing titanium tetrachloride, sodium hydroxide and magnesium oxide in a ball mill, ball-milling for a period of time, adding ethylene diamine tetraacetic acid, preheating at the temperature of 350-;
(2) adding chromium into aluminum oxide, silicon dioxide and silicon carbide, mixing, adding deionized water, performing wet ball milling in a ball mill for a period of time, and performing high-temperature forging in a high-pressure forging furnace at 920-980 ℃ for 1-1.2h to obtain a mixture B for later use;
(3) adding the mixture B into the mixture A and barium titanate, performing ball milling in a ball mill, uniformly stirring, sintering at the temperature of 600-;
(4) adding carbon into the mixture C, performing ball milling in a ball mill, adding rare earth elements, and performing heat preservation for a period of time in an argon protection atmosphere at the temperature of 500-600 ℃ to obtain a mixture D for later use;
(5) adding titanium dioxide, graphene and a dispersing agent into the mixture D, performing ball milling in a ball mill, adding a binder and deionized water after ball milling, stirring at a high speed in a stirrer, uniformly stirring, and performing spray granulation on the mixture to obtain the pressure sensor material.
2. A thermally-resistant pressure sensor material according to claim 1, wherein: the rare earth element is at least one of lanthanum, cerium, neodymium, gadolinium, terbium, dysprosium, ytterbium and lutetium.
3. A thermally-resistant pressure sensor material according to claim 1, wherein: the dispersant is a mixture of polyacrylamide, sodium dodecyl sulfate and methyl amyl alcohol in a mass ratio of 3: 2: 1.
4. A thermally-resistant pressure sensor material according to claim 1, wherein: the adhesive is a mixture of polyvinyl alcohol and polydimethylsiloxane in a mass ratio of 5: 2.
5. A thermally-resistant pressure sensor material according to claim 1, wherein: the ball milling time in the step (1) is 6-8h, the preheating time is 1-2h, and the high-temperature sintering time is 2-2.5 h.
6. A thermally-resistant pressure sensor material according to claim 1, wherein: in the step (3), the ball milling time is 60-80min, and the sintering time is 80-100 min.
7. A thermally-resistant pressure sensor material according to claim 1, wherein: the ball milling time in the step (4) is 25-30min, and the heat preservation time is 2-3 h.
8. A thermally-resistant pressure sensor material according to claim 1, wherein: the ball milling time in the step (5) is 6-8h, the high-speed stirring speed is 1200-1400r/min, and the stirring time is 2-3 h.
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