CN107065233A - A kind of electric light tunable filter based on sub-wavelength high-contrast grating - Google Patents
A kind of electric light tunable filter based on sub-wavelength high-contrast grating Download PDFInfo
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/03—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
- G02F1/0305—Constructional arrangements
- G02F1/0311—Structural association of optical elements, e.g. lenses, polarizers, phase plates, with the crystal
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Abstract
The invention discloses a kind of electric light tunable filter based on sub-wavelength high-contrast grating, it is related to photoelectron technical field.Electric light tunable filter of the present invention is sequentially laminated with substrate, interdigital sub-wave length grating, transparency conducting layer and electrode from the bottom to top, wherein：Substrate surface exposed part is provided with the electro-optical material layer flushed with transparency conducting layer, two electrodes are connected with external circuit with so that form electric field between grating ridge, and the refractive index of interdigitated sub-wave length grating material is much larger than the refractive index of backing material, photoelectric material layer material and electrically conducting transparent layer material.Reasonable in design of the present invention, high-quality-factor resonance and adjustable filtering spectrum scope can either be obtained by Rational choice grating parameter, filter wavelength can be tuned by voltage modulated again, and then the refractive index of electrooptical material is regulated and controled based on electric field action, compared to mechanical tunable filter, the precision and tuned speed of tuning are substantially increased.Simple in construction, material of the invention is easy to get, and is conducive to large-scale production and applies.
Description
Technical field
The invention belongs to photoelectron technical field, specially one kind can realize that optical communicating waveband can by external voltage
Adjust the wave filter of filter function.
Background technology
In today of digital Age, optical communication technique is developed with speed beyond imagination, wavelength-division multiplex
(Wavelength division multiplexer, WDM) causes the capacity of optical communication system to increase significantly.As wavelength-division is multiple
With the application of (WDM) technology, optical communication technique is rapidly developed, and following optical communication technique will be to more intelligently, efficiently
Direction is developed.And tunable optical filter has obtained increasing concern and ground as the Primary Component in wavelength-division multiplex technique
Study carefully.Tunable optical filter is a kind of wavelength selecting device, its function be from one section of input optical signal containing different wave length,
The optical signal of a specific wavelength is selected as needed.Therefore, tunable optical filter can be used in different optical channels
Wavelength signals are dynamically distributed, or selection filtering is carried out to wavelength in receiving terminal.
The more ripe tunable filter of research has fiber grating tunable filter at present, and it is by temperature change or machine
Tool device realizes wavelength tuning, belongs to a kind of hand tunable filter.However, the filter tuner speed for passing through thermal tuning
Degree is slower, and has very strict requirements to the stability and accuracy of machinery by the wave filter of mechanical tuning, it is therefore provided that adjusting
The raising of humorous filtering accuracy is restricted.
In order to overcome the weak point that above-mentioned fiber grating tunable filter is present, it is proposed that by circuit control it is adjustable
Humorous active filter, such as liquid crystal tunable filter, Morris H R et al. are delivered this《Imaging
Spectrometers for Fluorescence and Raman Microscopy:Acousto-Optic and Liquid
Crystal Tunable Filters》(《For fluorescence and the imaging spectrometer of Raman microscope：Acousto-optic and liquid crystal tunable filtering
Device》)；And based on Ti：LiNbO3The electric light tunable filter of waveguide optical grating, Zhang D L et al. are delivered this
《Electro-optically tunable super-broadband filter based on long period
grating in Ti:LiNbO3waveguide》(《Based on Ti:LiNbO3The electro-optic tunable of waveguide long-period gratings structure surpasses
Broadband filter》).Liquid crystal tunable filter mentioned above is the electrically conerolled birefringence based on F-P cavity interferometer principle and liquid crystal
The frequency-selecting principle of effect, realizes automatically controlled tuning filtering, however, liquid crystal tunable filter is deposited by applying voltage at liquid crystal layer two ends
Very low (about 25%), the shortcomings of halfwidth is larger, tuned speed is slow in transmissivity.And carry above based on Ti：LiNbO3Waveguide
The electric light tunable filter of grating, due to there is the problem of driving voltage is too high, limits its application in practice, and
Complex manufacturing technology, adds cost of manufacture.
Compared to the grating of optical fiber structure, the grating of waveguiding structure is applied in adjustable light wave-filter field in material choosing
Select, geometric parameter selection and grating and the type selecting of waveguide on more advantage, broader filtering spectrum scope can be realized,
And lower insertion loss.Univ. of California, Berkeley Chang-Hasnain C.J. seminars propose a kind of wide spectrum within 2004
The sub-wave length grating device of interior high reflection, is shown in Mateus, what C.F.R et al. was delivered《Broad-band mirror(1.12-1.62
μm)using a subwavelength grating》(《The reflection of (1.12-1.62 μm) of the broadband made using sub-wave length grating
Mirror》).Then, the seminar has also been proposed a kind of grating (High-contrast of sub-monolayer wavelength high index-contrast
Grating, HCG), the article delivered referring to Michael C.Y.Huang et al.《A surface-emitting laser
incorporating a high-index-contrast subwavelength grating》(《One kind is high comprising sub-wavelength
The surface-emitting laser of contrast grating》).Sub-wavelength high-contrast grating (High-contrast grating, HCG) is tool
There is low-index material to surround high index of refraction VPG medium structure completely, and screen periods are much smaller than a kind of grating knot of wavelength
Structure, and unlike general grating, HCG structures can produce two kinds of unique properties：One is that can obtain the high reflection in broadband
Rate or high-transmission rate (reflectivity or transmissivity>99%)；Two be that can produce the resonance (Q of high-quality-factor>105).Recently, it is sub-
Wavelength high-contrast grating is used for the application such as quantum cavity, vertical cavity surface emitting laser (VCSEL), ray machine nanometer oscillator
In.Because sub-wavelength high-contrast grating (High-contrast grating, HCG) has the characteristic of high-quality-factor, Cui
X et al. is delivered《High-index-contrast subwavelength grating reflectors and filters》
(《Reflector and wave filter based on the poor grating of sub-wavelength and high refractive index》), the quality factor of the theory analysis wave filter is reachable
104, only drawback is that the wave filter can only realize the filter action of a certain specific wavelength.
In view of it is described above, in order to realize practical and optical communication system the flexibility and controllableization of optic communication, such as
What design it is a kind of be capable of the optical filter of flexible tuning filtering wavelength, and then adjustable light wave-filter can be provided be to reduce
The operation cost of system, has the performances such as more excellent tunability, tuning range and precision concurrently on this basis, to improve whole light
The performance of communication network, as technical problem to be solved in this area.
The content of the invention
The present invention can overcome the deficiencies in the prior art there is provided one kind based on sub-wavelength high-contrast grating and can lead to
The electric light tunable filter of external voltage modulation is crossed, compared with conventional manual tunable filter, the present invention has higher essence
Exactness and shorter tuning period, while also solving existing electric light tunable filter has that transmissivity is low, driving voltage is big
Deng deficiency, the adjustable filtering of optical communicating waveband is realized.
To achieve the above object, the present invention provides following technical scheme：
A kind of electric light tunable filter based on sub-wavelength high-contrast grating, it is characterised in that including：Substrate, substrate
Surface is provided with interdigitated sub-wave length grating, and the interdigitated sub-wave length grating surface is provided with transparency conducting layer, and substrate does not cover
The surface of lid interdigitated sub-wave length grating part is provided with electro-optical material layer；The layer at transparent layer is provided with and interdigitated
Two interdigital electrodes electrically communicated respectively of sub-wave length grating；Wherein：Two electrode is connected to cause fork with external circuit
Form electric field in finger-like sub-wave length grating between grating ridge, the thickness of electro-optical material layer and interdigitated sub-wave length grating and transparent lead
The thickness of both electric layer and quite, and interdigitated sub-wave length grating material refractive index be more than backing material, electro-optic material layer
The refractive index of material and electrically conducting transparent layer material.
According to the specific embodiment of the invention, the refractive index of grating material and the refractive index of remaining structural material in the present invention
The ratio between should be greater than 1.75.
Preferably, the material of substrate is silica in the present invention.
Preferably, the material of grating of the present invention is silicon, because the refractive index of silicon is high, is absorbed with less
Loss, and be zero to the dispersion of infrared band to terahertz wave band.
The refractive index for defining grating material is n1, the refractive index of backing material is n2, incident wavelength is λ, then of the invention interdigital
The periods lambda of shape sub-wave length grating should be met：λ/n1＜ Λ ＜ λ/n2；The thickness of interdigitated sub-wave length grating should be as far as possible small, to subtract
Small technologic difficulty.
The material of transparency conducting layer should be transparent to infrared band and have high conductivity in the present invention, can use transparent
Electropane, such as tin indium oxide (ITO), tin ash plated film (FTO), Zinc oxide based film (AZO).
Electrode material can be any suitable material in the present invention, generally using one in gold, silver, copper, platinum, nickel, aluminium
Plant or several, two electrodes are connected as extraction electrode with external control circuit so that be loaded with voltage between two electrodes.
Preferably, the electro-optic coefficient of electro-optical material layer should be greater than 200pm/V, be considerably reduced with reaching
The purpose of driving voltage, can specifically use electro-optic polymer, it is preferable that electro-optical material layer should also have temperature stability.
The grating ridge equidistant parallel arrangement of interdigitated sub-wave length grating (2) in the present invention, according to the specific embodiment of the invention,
Grating ridge tangent plane is rectangle.
Compared with prior art, the invention has the advantages that：
First, the electric light tunable filter provided by the present invention based on sub-wavelength high-contrast grating, reasonable in design,
Filter wavelength is tuned by voltage modulated, and then the rate of penetrating that electrooptical material is rolled over regulated and controled based on electric field action, phase
Than in mechanical tunable filter, substantially increasing the precision and tuned speed of tuning；In addition, the present invention passes through reasonable selection
Material is optimized to the performance of wave filter, wherein：The present invention can significantly be dropped from the larger electrooptical material of electro-optic coefficient
Low driving voltage, and because photoelectric effect effect is rapid, it is possible to increase the tuning speed of device；Grating material is used as from silicon
Material, has infrared Absorption loss extremely low and temperature-resistant advantage, Neng Gouyou while higher refractive index is met
Influence of the loss and temperature of effect reduction device to device, from silica (SiO2) as substrate, can be with CMOS works
Skill is compatible, with the advantage being easily integrated.
2nd, the electric light tunable filter provided by the present invention based on sub-wavelength high-contrast grating, can be by reasonable
Choose grating parameter (grating period A, grating thickness tg, dutycycle) and then obtain high-quality-factor resonance, so as to realize filter
The function of ripple, also, can realize that filtering spectrum scope is adjustable by designing grating parameter, and it is thick by choosing suitable grating
Degree can be designed to the wave filter of reflection-type or transmission-type.
3rd, the electric light tunable filter provided by the present invention based on sub-wavelength high-contrast grating have it is simple in construction,
Material is easy to get, and greatly reduces cost, is conducive to large-scale production and applies.
Brief description of the drawings
Fig. 1 is the structural representation of the electric light tunable filter provided by the present invention based on sub-wavelength high-contrast grating；
Fig. 2 is the cross-sectional view of structure shown in Fig. 1；
Fig. 3 is the reflectivity contour analogous diagram of the embodiment of the present invention 1；
Fig. 4 is the reflectance spectrum analogous diagram of the embodiment of the present invention 1；
Fig. 5 is the reflectance spectrum analogous diagram of the embodiment of the present invention 2；
Fig. 6 is the reflectance spectrum analogous diagram of the embodiment of the present invention 3；
Wherein：1 is substrate, and 2 be grating, and 3 be electrode, and 4 be electro-optical material layer, and 5 be transparency conducting layer.
Embodiment
Below by way of specific embodiment combination Figure of description, the present invention is described in detail：
As shown in figure 1, a kind of electric light tunable filter based on sub-wavelength high-contrast grating, including：Substrate 1, substrate 1
Surface is provided with interdigitated sub-wave length grating 2, and the surface of interdigitated sub-wave length grating 2 is provided with transparency conducting layer 5, substrate 1
The surface for not covering interdigitated sub-wave length grating part is provided with electro-optical material layer 4, that is, causes interdigitated sub-wave length grating 2 and saturating
Bright conductive layer 5 is in contact with electro-optical material layer 4；The surface of transparency conducting layer 5 is provided with and interdigitated sub-wave length grating 2
Two interdigital electrodes 3 electrically communicated respectively；Wherein：Two electrode 3 is connected to cause interdigitated sub-wavelength with external circuit
The electric field perpendicular to electro-optical material layer 4, thickness and the interdigitated sub-wavelength of electro-optical material layer 4 are formed in grating 2 between grating ridge
Both thickness of grating 2 and transparency conducting layer 5 and quite, and the refractive index of interdigitated sub-wave length grating material is more than substrate material
The refractive index of material, photoelectric material layer material and electrically conducting transparent layer material.
The material of substrate 1 is preferably silica in the embodiment of the present invention, and the material of grating 2 is preferably silicon, electrically conducting transparent
The material of layer 5 is tin indium oxide, and electro-optical material layer 4 is preferably electro-optic polymer；
Wherein：The refractive index of the material of interdigitated sub-wave length grating 2 and the material of substrate 1 and the refractive index of electro-optical material layer 4
The ratio between be all higher than 1.75, according to ability domain knowledge and be actually needed and can carry out reasonable set；
The refractive index for defining grating material is n1, the refractive index of backing material is n2, incident wavelength is λ, then of the invention interdigital
The periods lambda of shape sub-wave length grating should be met：λ/n1＜ Λ ＜ λ/n2；
The thickness of interdigitated sub-wave length grating should be as far as possible small, to reduce technologic difficulty.
Electrooptic effect of the invention based on electrooptical material, can be tuned by external voltage to electric-field intensity, and then
The refractive index of the material of electro-optical material layer 4 is controlled, it is real to reach the resonant wavelength for changing sub-wavelength high-contrast grating filter
Existing automatically controlled adjustable filtering.The present invention uses the electrooptical material of high electro-optic coefficient, and the electro-optic coefficient of preferably electrooptical material is more than
200, driving voltage on the one hand can be reduced, the photoelectric effect effect of another aspect electrooptical material is rapid, improves device
Tuning speed.
Operation principle of the present invention is as follows：
Incident light is used so that perpendicular to the incidence of grating, incident light is exposed to after sub-wavelength and high refractive index grating, light
The guided mode of grid is excited, and two low step modes have been encouraged in Waveguide array, due to the interference effect between two low step modes,
Sub-wavelength high-contrast grating (HCG) will show high reflection characteristic, highly transmissive characteristic and high-quality-factor resonance characteristics.Choosing
Take after suitable grating structural parameter, when incident wavelength reaches resonant wavelength, meet resonance condition, that is, resonator, filter effect occur
Really.By the modulation of external voltage, change the refractive index of sub-wavelength high-contrast grating (HCG) surrounding electrooptical material, reach altogether
The wavelength shaken changes therewith, so as to realize automatically controlled tunable filtering characteristic.
With reference to specific embodiment, the present invention will be further described：
Embodiment 1：
The setting of simulation parameter is as follows in the present embodiment：The material of substrate 1 is silica in the present embodiment, grating 2
Material is silicon；Grating period A is 650nm, and dutycycle is 0.5, and grating thickness is 1100nm；The refractive index of grating material is
3.48, the refractive index of backing material is 1.44, the refractive index n of electrooptical material layer material0(when driving voltage is zero) is 1.60.
The present embodiment is incident using TM polarised lights, due to the thickness very little of transparency conducting layer 5, can be neglected in simulation process
The slightly influence of the thickness of transparency conducting layer 5.The present embodiment is emulated using rigorous couple-wave analysis method, is emulated using Matlab soft
Part draws the reflectivity contour map for obtaining the electric light tunable filter as shown in Figure 3 based on sub-wavelength high-contrast grating.
Graduated colors represent reflectivity size in Fig. 3, according to the more shallow reflectivity that represents of color in figure closer to 1, color
The deeper reflectivity that represents is closer to 0.White dashed line region is resonated for the high-quality-factor of sub-wavelength high-contrast grating in Fig. 3
Region.Choose suitable grating thickness tg, meet the ratio (t of grating thickness and screen periodsg/ Λ) white dashed line area in figure 3
In the range of domain, the resonant wavelength of the present embodiment electric light tunable filter is estimated in the range of 1510nm~1580nm with this.
The present embodiment is incident using TM polarised lights, is emulated, is emulated using Matlab by rigorous couple-wave analysis method
Software on Drawing obtains reflectance spectrum as shown in Figure 4, wherein, the small figure in the upper right corner is that the filter wavelength region of electric light tunable filter is anti-
Penetrate spectrum enlarged drawing.Black dotted lines region is the filter wavelength region of electric light tunable filter in figure, as seen from the figure：The present embodiment electricity
The centre wavelength of optic tunable filter is about 1514.5nm.
Embodiment 2：
The setting of simulation parameter is as follows in the present embodiment：The material of substrate 1 is silica in the present embodiment, grating 2
Material is silicon；Grating period A is 650nm, and dutycycle is 0.5, and grating thickness is 1100nm；The refractive index of grating material is
3.48, the refractive index of backing material is 1.44, and the refractive index of electrooptical material layer material is 1.65 (now driving voltage is not zero)；
Electrooptical material selection electro-optic coefficient r33For 300pm/V electro-optic polymer.
The present embodiment is incident using TM polarised lights, is emulated, is emulated using Matlab according to rigorous couple-wave analysis method
Software on Drawing obtains reflectance spectrum as shown in Figure 5, wherein, the small figure in the upper right corner is that the filter wavelength region of electric light tunable filter is anti-
Penetrate spectrum enlarged drawing.
The formula provided according to bubble Kerr effect：
Δ n is the refractive index variable quantity of electrooptical material layer material, n0The refraction of electro-optical material layer when for driving voltage being zero
Rate, the driving voltage that can be now applied is 25V.
Black dotted lines region is the filter wavelength region of electric light tunable filter in Fig. 5, as seen from the figure：The present embodiment electric light
The centre wavelength of tunable filter is about 1526nm.
Embodiment 3：
The setting of simulation parameter is as follows in the present embodiment：The material of substrate 1 is silica in the present embodiment, grating 2
Material is silicon；Grating period A is 650nm, and dutycycle is 0.5, and grating thickness is 1100nm；The refractive index of grating material is
3.48, the refractive index of backing material is 1.44, and the refractive index of electrooptical material layer material is 1.70 (now driving voltage is not zero)；
Electrooptical material selection electro-optic coefficient r33For 300pm/V electro-optic polymer.
The present embodiment is incident using TM polarised lights, is emulated, is emulated using Matlab according to rigorous couple-wave analysis method
Software on Drawing obtains reflectance spectrum as shown in Figure 6, wherein, the small figure in the upper right corner is that the filter wavelength region of electric light tunable filter is anti-
Penetrate spectrum enlarged drawing.
The formula provided according to bubble Kerr effect：
Δ n is the refractive index variable quantity of electrooptical material layer material, n0The refraction of electro-optical material layer when for driving voltage being zero
Rate, the driving voltage that can be now applied is 50V.
Black dotted lines region is the filter wavelength region of electric light tunable filter in Fig. 6, as seen from the figure：The present embodiment electric light
The centre wavelength of tunable filter is about 1535nm.
In summary, it can be obtained according to simulation result：By changing driving voltage so that the refractive index of electro-optical material layer 5 occurs
The change of 0.1 size, can be achieved with the centre wavelength of electric light tunable filter by 1514.5nm to 1535nm adjustable filtering model
Enclose；Also, increase with the refractive index of electro-optical material layer 5, resonant wavelength increases therewith, it is possible thereby to by controlling electric-field intensity
To modulate resonant wavelength, so as to realize the function of the adjustable filtering of electric light.
The adjustable filter of optical communicating waveband is realized based on sub-wavelength high-contrast grating to one kind provided by the present invention above
The method of ripple has carried out detailed introduction and explanation, applies principle and implementation of the specific case to the present invention in simulations herein
Scheme is set forth and analyzed, and the parameter designed in emulation can make appropriate change in actual engineering design.The above is real
The explanation for applying example is only intended to the method and its core concept for helping to understand the present invention；Simultaneously for the scholar of research this area
Or technical staff, the thought provided according to the present invention, structure can be carried out in specific embodiment and application excellent
Change, improvement of the present invention is possible.In summary, the content of above-mentioned specific embodiment should not be understood the paired present invention's
Limitation.
Claims (5)
1. a kind of electric light tunable filter based on sub-wavelength high-contrast grating, it is characterised in that including：Substrate (1), substrate
(1) surface is provided with interdigitated sub-wave length grating (2), and interdigitated sub-wave length grating (2) surface is provided with transparency conducting layer
(5), substrate (1) does not cover the surface of interdigitated sub-wave length grating part and is provided with electro-optical material layer (4)；The transparency conducting layer
(5) surface is provided with two interdigital electrodes (3) electrically communicated respectively with interdigitated sub-wave length grating (2)；Wherein：Described two
Electrode (3) is connected with external circuit with so that forming electric field, electro-optical material layer between grating ridge in interdigitated sub-wave length grating (2)
(4) thickness of thickness and both interdigitated sub-wave length grating (2) and transparency conducting layer (5) and suitable, and interdigitated Asia ripple
The refractive index of long grating material is more than the refractive index of backing material, photoelectric material layer material and electrically conducting transparent layer material.
2. a kind of electric light tunable filter based on sub-wavelength high-contrast grating according to claim 1, it is characterised in that
The material of grating is silicon.
3. a kind of electric light tunable filter based on sub-wavelength high-contrast grating according to claim 1, it is characterised in that
The material of the substrate is silica.
4. a kind of electric light tunable filter based on sub-wavelength high-contrast grating according to claim 1, it is characterised in that
The material of the transparency conducting layer is transparent conducting film glass.
5. a kind of electric light tunable filter based on sub-wavelength high-contrast grating according to claim 1, it is characterised in that
The grating ridge equidistant parallel arrangement of the interdigitated sub-wave length grating (2).
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| CN109856087A (en) * | 2018-12-29 | 2019-06-07 | 复旦大学 | Sensing chip and preparation method thereof, detection system, detection method |
| CN110441936A (en) * | 2019-08-14 | 2019-11-12 | 京东方科技集团股份有限公司 | Filter, filtering device, driving method of filter and preparation method of driving method |
| CN111384923A (en) * | 2020-04-09 | 2020-07-07 | 中国电子科技集团公司第二十六研究所 | Miniaturized lattice type crystal filter |
| WO2021004183A1 (en) * | 2019-07-08 | 2021-01-14 | 深圳大学 | Resonant cavity-based terahertz device, and manufacturing method for same |
| WO2022039670A1 (en) * | 2020-08-21 | 2022-02-24 | Agency For Science, Technology And Research | Electro-optic modulator and method of forming the same |
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| CN110441936B (en) * | 2019-08-14 | 2022-05-13 | 京东方科技集团股份有限公司 | Filter, filtering device, driving method of filter and preparation method of driving method |
| CN111384923A (en) * | 2020-04-09 | 2020-07-07 | 中国电子科技集团公司第二十六研究所 | Miniaturized lattice type crystal filter |
| WO2022039670A1 (en) * | 2020-08-21 | 2022-02-24 | Agency For Science, Technology And Research | Electro-optic modulator and method of forming the same |
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