CN107065233B - Electro-optical tunable filter based on sub-wavelength high-contrast grating - Google Patents
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- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/03—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
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Abstract
The invention discloses an electro-optic tunable filter based on a sub-wavelength high-contrast grating, and relates to the technical field of photoelectrons. The electro-optic tunable filter is sequentially laminated with a substrate, an interdigital sub-wavelength grating, a transparent conducting layer and an electrode from bottom to top, wherein: the exposed part of the surface of the substrate is provided with an electro-optic material layer which is flush with the transparent conductive layer, the two electrodes are connected with an external circuit so as to form an electric field between the grating ridges, and the refractive index of the interdigital sub-wavelength grating material is far greater than that of the substrate material, the electro-optic material layer material and the transparent conductive layer material. The tunable electro-optic material has reasonable structural design, can obtain high-quality factor resonance and adjustable filtering spectral range by reasonably selecting grating parameters, can tune the filtering wavelength by voltage modulation, and further adjusts and controls the refractive index of the electro-optic material based on the action of an electric field. The invention has simple structure and easily obtained materials, and is beneficial to large-scale production and application.
Description
Technical Field
The invention belongs to the technical field of photoelectron, and particularly relates to a filter capable of realizing an adjustable filtering function of an optical communication waveband through external voltage.
Background
In the digital age today, optical communication technology is developing at an ultra-imaginable speed, and Wavelength Division Multiplexing (WDM) has enabled the capacity of optical communication systems to increase greatly. With the application of Wavelength Division Multiplexing (WDM) technology, the optical communication technology is rapidly developed, and the optical communication technology will be developed in a direction of being more intelligent and efficient in the future. The tunable optical filter has been paid more and more attention and research as a key device in the wavelength division multiplexing technology. The tunable optical filter is a wavelength selective device, and functions to select an optical signal with a specific wavelength from a section of input optical signals with different wavelengths according to requirements. Thus, tunable optical filters can be used to dynamically allocate wavelength signals among different optical channels, or to selectively filter wavelengths at the receiving end.
The existing mature tunable filter has a fiber grating tunable filter, which realizes wavelength tuning through temperature change or a mechanical device, and belongs to a manual tunable filter. However, the filter tuned by temperature has a slow tuning speed, and the filter tuned by machine has strict requirements on mechanical stability and accuracy, so that the improvement of the tuning filtering accuracy is limited.
In order to overcome the disadvantages of the fiber grating Tunable Filters described above, tunable active Filters controlled by circuits, such as Liquid Crystal Tunable Filters, have been proposed by Morris H R et al, "Imaging Spectrometers for Fluorescence and Raman Crystal Tunable Filters" (Imaging Spectrometers for Fluorescence and Raman microscopes: acousto-Optic and Liquid Crystal Tunable Filters); and based on Ti: liNbO 3 An Electro-optic tunable filter of waveguide grating, zhang D L et al, published thereon "Electro-optically tunable super-broadband filter based on long-period tuning in Ti LiNbO 3 waveguide (& ltbasis Ti: liNbO & gt) 3 Electro-optically tunable ultra-wideband filter of waveguide long period grating structure). The liquid crystal tunable filter mentioned above is based on the principle of F-P cavity interferometer and electric control of liquid crystalThe frequency selection principle of the birefringence effect realizes electrically controlled tuning filtering by applying voltage at two ends of a liquid crystal layer, however, the liquid crystal tunable filter has the defects of very low transmissivity (about 25%), large full width at half maximum, low tuning speed and the like. While the above is mentioned based on Ti: liNbO 3 The electro-optic tunable filter of the waveguide grating has the problem of over-high driving voltage, so that the application of the electro-optic tunable filter in practice is limited, the manufacturing process is complex, and the manufacturing cost is increased.
Compared with the grating with the optical fiber structure, the grating with the waveguide structure is more advantageous in material selection, geometric parameter selection and type selection of the grating and the waveguide when being applied to the field of tunable optical filters, and can realize wider filtering spectral range and lower insertion loss. The Chang-Hasnain C.J. subject group, university of Berkeley, calif., 2004 proposed a sub-wavelength grating device with high reflectivity in a Broad spectrum, as published by Mateus, C.F.R., in Broad-band mirror (1.12-1.62 μm) using a subwavelength grating (broadband (1.12-1.62 μm) mirror using sub-wavelength gratings). Subsequently, a single-layer sub-wavelength High-refractive-index grating (HCG) was proposed in this group, which is described in the publication "a surface-emitting laser in High-index-contrast grating" (a surface emitting laser including a sub-wavelength High-contrast grating) by Michael c.y.huang et al. Unlike a typical grating, a sub-wavelength High-contrast grating (HCG) is a grating structure in which a High-index grating medium structure is completely surrounded by a low-index material and the grating period is much smaller than the wavelength, and the HCG structure can produce two unique properties: one is that a broadband high reflectance or high transmittance (reflectance or transmittance) can be obtained>99%); second, resonance (Q) capable of generating high quality factor>10 5 ). Recently, subwavelength high contrast gratings have been used in quantum cavity, vertical Cavity Surface Emitting Laser (VCSEL), opto-mechanical nanooscillators, and the like applications. Because of the High-contrast sub-wavelength gratings (HCG), cui X et al have published High-index-contrast subwavelength gratings and filters (based on sub-wavelength gratings)Reflectors and filters of wavelength high-refractivity differential gratings), the quality factor of the filter can reach 10 by theoretical analysis 4 The defect in the art is that the filter can only realize the filtering function of a specific wavelength.
In view of the above, in order to implement the practical use of optical communication and the flexibility and controllability of the optical communication system, it is a technical problem to be solved in the art how to design an optical filter capable of flexibly tuning a filtering wavelength, and further, to provide a tunable optical filter to reduce the operation cost of the system, and on this basis, the optical filter has better performance such as tunability, tuning range, and precision, so as to improve the performance of the entire optical communication network.
Disclosure of Invention
The tunable electro-optical filter can overcome the defects of the prior art, is based on the sub-wavelength high-contrast grating and can be modulated by external voltage, has higher accuracy and shorter tuning time compared with the traditional manual tunable filter, simultaneously overcomes the defects of low transmissivity, large driving voltage and the like of the traditional tunable electro-optical filter, and realizes tunable filtering of optical communication wave bands.
In order to achieve the purpose, the invention provides the following technical scheme:
an electro-optic tunable filter based on a subwavelength high-contrast grating, comprising: an interdigital sub-wavelength grating is arranged on the surface of the substrate and the surface of the substrate, a transparent conductive layer is arranged on the surface of the interdigital sub-wavelength grating, and an electro-optic material layer is arranged on the surface of the substrate, which is not covered with the interdigital sub-wavelength grating; the surface of the transparent conducting layer is provided with electrodes which are respectively and electrically communicated with the two fingers of the interdigital sub-wavelength grating; wherein: the two electrodes are connected with an external circuit so as to form an electric field between grating ridges in the interdigital sub-wavelength grating, the thickness of the electro-optical material layer is equal to the sum of the thicknesses of the interdigital sub-wavelength grating and the transparent conductive layer, and the refractive index of the interdigital sub-wavelength grating material is larger than that of the substrate material, the photoelectric material layer material and the transparent conductive layer material.
According to an embodiment of the present invention, the ratio of the refractive index of the grating material to the refractive index of the remaining structural layer material should be greater than 1.75.
As a preferred embodiment, the material of the substrate in the present invention is silicon dioxide.
As a preferred embodiment, the material of the grating of the present invention is silicon because silicon has a high refractive index, has a small absorption loss, and has zero dispersion from the infrared band to the terahertz band.
Defining the refractive index of the grating material as n 1 The refractive index of the substrate material is n 2 And the incident wavelength is lambda, the period lambda of the interdigital sub-wavelength grating provided by the invention should satisfy the following conditions: lambda/n 1 ＜Λ＜λ/n 2 (ii) a The thickness of the interdigital sub-wavelength grating should be as small as possible to reduce the difficulty of the process.
The transparent conductive layer of the invention is transparent to infrared band and has high conductivity, and can adopt transparent conductive film glass, such as Indium Tin Oxide (ITO), tin dioxide coating (FTO) and zinc oxide based film (AZO).
The electrode material can be any suitable material, one or more of gold, silver, copper, platinum, nickel and aluminum are usually adopted, and the two electrodes are taken as extraction electrodes and are connected with an external control circuit, so that voltage is loaded between the two electrodes.
As a preferred embodiment, the electro-optic coefficient of the electro-optic material layer should be greater than 200pm/V for the purpose of greatly reducing the driving voltage, and specifically, an electro-optic polymer may be used, and preferably, the electro-optic material layer should also have temperature stability.
In the invention, the grating ridges of the interdigital sub-wavelength grating (2) are equidistantly and parallelly arranged, and according to the specific embodiment of the invention, the section of the grating ridge is rectangular.
Compared with the prior art, the invention has the following beneficial effects:
1. the electro-optical tunable filter based on the sub-wavelength high-contrast grating is reasonable in structural design, the filtering wavelength is tuned through voltage modulation, the refractive index of an electro-optical material is further regulated and controlled based on the electric field effect, and compared with a mechanical typeThe tunable filter greatly improves the tuning precision and the tuning speed; in addition, the invention optimizes the performance of the filter by reasonably selecting materials, wherein: the invention selects the electro-optical material with larger electro-optical coefficient, can greatly reduce the driving voltage, and can improve the tuning rate of the device due to the quick action of the photoelectric effect; silicon is selected as a grating material, the grating material has the advantages of high refractive index, extremely low infrared light absorption loss and insensitivity to temperature, can effectively reduce the loss of devices and the influence of temperature on the devices, and silicon dioxide (SiO) is selected 2 ) As a substrate, the method is compatible with a CMOS process and has the advantage of easy integration.
2. The electro-optic tunable filter based on the sub-wavelength high-contrast grating provided by the invention can reasonably select grating parameters (grating period lambda and grating thickness t) g Duty ratio) to obtain resonance with high quality factor, thereby realizing the function of filtering, realizing adjustable filtering spectral range by designing grating parameters, and designing a reflective or transmissive filter by selecting proper grating thickness.
3. The electro-optical tunable filter based on the sub-wavelength high-contrast grating has the advantages of simple structure, easily obtained materials, greatly reduced cost and contribution to large-scale production and application.
Drawings
FIG. 1 is a schematic structural diagram of an electro-optic tunable filter based on a sub-wavelength high-contrast grating according to the present invention;
FIG. 2 is a schematic cross-sectional view of the structure shown in FIG. 1;
FIG. 3 is a graph showing a simulation of the reflectivity contour of example 1 of the present invention;
FIG. 4 is a simulation diagram of the reflection spectrum of example 1 of the present invention;
FIG. 5 is a simulation diagram of the reflection spectrum of example 2 of the present invention;
FIG. 6 is a simulation diagram of the reflection spectrum of example 3 of the present invention;
wherein: 1 is substrate, 2 is grating, 3 is electrode, 4 is electro-optic material layer, and 5 is transparent conducting layer.
Detailed Description
The invention is described in detail below by means of specific embodiments and with reference to the accompanying drawings:
as shown in fig. 1, an electro-optical tunable filter based on a subwavelength high-contrast grating includes: the surface of the substrate 1 and the surface of the substrate 1 are provided with interdigital sub-wavelength gratings 2, the surface of the interdigital sub-wavelength grating 2 is provided with a transparent conducting layer 5, the surface of the substrate 1, which is not covered with the interdigital sub-wavelength grating part, is provided with an electro-optic material layer 4, namely, the interdigital sub-wavelength grating 2 and the transparent conducting layer 5 are both contacted with the electro-optic material layer 4; the surface of the transparent conducting layer 5 is provided with electrodes 3 which are respectively and electrically communicated with the two interdigital parts of the interdigital sub-wavelength grating 2; wherein: the two electrodes 3 are connected with an external circuit so that an electric field perpendicular to the electro-optical material layer 4 is formed between grating ridges in the interdigital sub-wavelength grating 2, the thickness of the electro-optical material layer 4 is equal to the sum of the thicknesses of the interdigital sub-wavelength grating 2 and the transparent conducting layer 5, and the refractive index of the interdigital sub-wavelength grating material is larger than that of the substrate material, the photoelectric material layer material and the transparent conducting layer material.
In the embodiment of the present invention, the substrate 1 is preferably made of silicon dioxide, the grating 2 is preferably made of silicon, the transparent conductive layer 5 is made of indium tin oxide, and the electro-optic material layer 4 is preferably made of electro-optic polymer;
wherein: the ratio of the refractive index of the material of the interdigital sub-wavelength grating 2 to the refractive indexes of the material of the substrate 1 and the electro-optic material layer 4 is more than 1.75, and the refractive indexes can be reasonably set according to the knowledge and the actual needs in the field;
defining the refractive index of the grating material as n 1 The refractive index of the substrate material is n 2 And the incident wavelength is lambda, the period lambda of the interdigital subwavelength grating provided by the invention should satisfy the following condition: lambda/n 1 ＜Λ＜λ/n 2 ；
The thickness of the interdigital sub-wavelength grating should be as small as possible to reduce the difficulty of the process.
Based on the electro-optic effect of the electro-optic material, the invention can tune the electric field intensity through external voltage, further control the refractive index of the material of the electro-optic material layer 4, so as to change the resonance wavelength of the sub-wavelength high-contrast grating filter and realize electric control adjustable filtering. The invention adopts the electro-optical material with high electro-optical coefficient, preferably the electro-optical coefficient of the electro-optical material is more than 200, on one hand, the driving voltage can be reduced, on the other hand, the electro-optical effect of the electro-optical material has quick action, and the tuning speed of the device is improved.
The working principle of the invention is as follows:
the incident light is in an incident mode perpendicular to the grating, after the incident light irradiates the sub-wavelength high-refractive-index grating, a guided mode of the grating is excited, two low-order modes are excited in the array waveguide, and due to an interference effect between the two low-order modes, the sub-wavelength high-contrast grating (HCG) shows high reflection characteristics, high transmission characteristics and high quality factor resonance characteristics. After selecting proper grating structure parameters, when the incident wavelength reaches the resonance wavelength, the resonance condition is satisfied, and the resonance filtering effect appears. The refractive index of an electro-optical material around a sub-wavelength high-contrast grating (HCG) is changed through the modulation of external voltage, so that the resonance wavelength is changed along with the change of the refractive index, and the electric-control tunable filter characteristic is realized.
The invention is further illustrated by the following specific examples:
example 1:
the simulation parameters in this embodiment are set as follows: in this embodiment, the substrate 1 is made of silicon dioxide, and the grating 2 is made of silicon; the grating period Lambda is 650nm, the duty ratio is 0.5, and the grating thickness is 1100nm; the refractive index of the grating material is 3.48, the refractive index of the substrate material is 1.44, and the refractive index of the electro-optic material layer material is n 0 (when the driving voltage is zero) is 1.60.
In the embodiment, TM polarized light is incident, and since the thickness of the transparent conductive layer 5 is small, the influence of the thickness of the transparent conductive layer 5 can be ignored in the simulation process. In this embodiment, a strict coupled wave analysis method is adopted for simulation, and a reflectivity contour map of the electro-optic tunable filter based on the sub-wavelength high-contrast grating as shown in fig. 3 is obtained by using Matlab simulation software.
The gradient color in FIG. 3 represents the magnitude of the reflectivity, according to the lighter the color in the graphThe closer the reflectivity is represented by 1, the darker the color the closer the reflectivity is represented by 0. The white dashed area in fig. 3 is the high quality factor resonance region of the subwavelength high contrast grating. Selecting proper grating thickness t g Satisfies the ratio (t) of the grating thickness to the grating period g Λ) is within the white dotted area in fig. 3, so that the resonance wavelength of the electro-optical tunable filter of the present embodiment is estimated to be within the range of 1510nm to 1580 nm.
In the embodiment, TM polarized light is incident, simulation is performed by a strict coupled wave analysis method, and a reflection spectrum shown in fig. 4 is obtained by using Matlab simulation software, where a small diagram at the upper right corner is an enlarged reflection spectrum of a filtering wavelength region of the electro-optic tunable filter. The black dashed area in the figure is the filtering wavelength area of the electro-optical tunable filter, and it can be known from the figure that: the center wavelength of the electro-optically tunable filter of this embodiment is about 1514.5nm.
Example 2:
the simulation parameters in this embodiment are set as follows: in this embodiment, the substrate 1 is made of silicon dioxide, and the grating 2 is made of silicon; the grating period Lambda is 650nm, the duty ratio is 0.5, and the grating thickness is 1100nm; the refractive index of the grating material is 3.48, the refractive index of the substrate material is 1.44, and the refractive index of the electro-optical material layer material is 1.65 (at this time, the driving voltage is not zero); electro-optic material selective electro-optic coefficient r 33 300pm/V of electro-optic polymer.
In this embodiment, TM polarized light is incident, simulation is performed according to a strict coupled wave analysis method, and a reflection spectrum shown in fig. 5 is obtained by using Matlab simulation software, where a small diagram at the upper right corner is an enlarged reflection spectrum of a filtering wavelength region of the electro-optic tunable filter.
According to the formula given by the pockels effect:
Δ n is the refractive index variation of the electro-optic material layer material, n 0 To obtain a refractive index of the electro-optic material layer at zero driving voltage, it can be obtained that the driving voltage applied at this time is 25V.
The black dashed area in fig. 5 is the filtering wavelength area of the electro-optical tunable filter, and it can be known from the figure that: the center wavelength of the electro-optical tunable filter of the present embodiment is about 1526nm.
Example 3:
the simulation parameters in this embodiment are set as follows: in this embodiment, the substrate 1 is made of silicon dioxide, and the grating 2 is made of silicon; the grating period Lambda is 650nm, the duty ratio is 0.5, and the grating thickness is 1100nm; the refractive index of the grating material is 3.48, the refractive index of the substrate material is 1.44, and the refractive index of the electro-optic material layer material is 1.70 (at this time, the driving voltage is not zero); electro-optic material selective electro-optic coefficient r 33 300pm/V of electro-optic polymer.
In this embodiment, TM polarized light is incident, simulation is performed according to a strict coupled wave analysis method, and a reflection spectrum shown in fig. 6 is obtained by using Matlab simulation software, where a small diagram at the upper right corner is an enlarged reflection spectrum of a filtering wavelength region of the electro-optic tunable filter.
According to the formula given by the pockels effect:
Δ n is the refractive index variation of the electro-optic material layer material, n 0 To obtain the refractive index of the electro-optic material layer at zero driving voltage, it can be obtained that the driving voltage applied at this time is 50V.
The black dashed area in fig. 6 is the filtering wavelength area of the electro-optical tunable filter, and it can be seen from the figure that: the center wavelength of the electro-optically tunable filter of this embodiment is about 1535nm.
In summary, according to the simulation results, it can be obtained that: the refractive index of the electro-optical material layer 5 is changed by 0.1 by changing the driving voltage, so that the adjustable filtering range of the center wavelength of the electro-optical adjustable filter from 1514.5nm to 1535nm can be realized; further, as the refractive index of the electro-optical material layer 5 increases, the resonance wavelength increases, and thus the resonance wavelength can be modulated by controlling the electric field intensity, thereby realizing the function of the electro-optical tunable filter.
The method for realizing the tunable filtering of the optical communication waveband based on the sub-wavelength high-contrast grating is explained and explained in detail, specific examples are applied in simulation to explain and analyze the principle and the implementation scheme of the invention, and parameters designed in the simulation can be properly changed in actual engineering design. The above embodiments are merely provided to help understand the method of the present invention and its core idea; meanwhile, for a student or a technician in the research field, according to the idea provided by the invention, the structure can be optimized in the specific implementation scheme and the application range, and the improvement of the invention is possible. In view of the above, the foregoing description of the specific embodiments should not be construed to limit the invention.
Claims (5)
1. An electro-optic tunable filter based on a sub-wavelength high-contrast grating, comprising: the surface of the substrate (1) and the surface of the substrate (1) are provided with interdigital sub-wavelength gratings (2), the surface of the interdigital sub-wavelength grating (2) is provided with a transparent conducting layer (5), and the surface of the substrate (1) which is not covered with the interdigital sub-wavelength grating part is provided with an electro-optic material layer (4); the surface of the transparent conducting layer (5) is provided with electrodes (3) which are respectively and electrically communicated with the two interdigital parts of the interdigital sub-wavelength grating (2); wherein: the two electrodes (3) are connected with an external circuit so that an electric field is formed between grating ridges in the interdigital sub-wavelength grating (2), the thickness of the electro-optic material layer (4) is equal to the sum of the thicknesses of the interdigital sub-wavelength grating (2) and the transparent conducting layer (5), and the refractive index of the interdigital sub-wavelength grating material is larger than that of the substrate material, that of the electro-optic material layer material and that of the transparent conducting layer material.
2. The electro-optic tunable filter according to claim 1, wherein the material of the grating is silicon.
3. The sub-wavelength high-contrast grating-based electro-optic tunable filter of claim 1, wherein the material of the substrate is silicon dioxide.
4. The electro-optic tunable filter based on sub-wavelength high-contrast grating as claimed in claim 1, wherein the material of the transparent conductive layer is transparent conductive film glass.
5. Electro-optical tunable filter based on sub-wavelength high-contrast gratings according to claim 1, characterized in that the grating ridges of the interdigital sub-wavelength grating (2) are equidistantly arranged in parallel.
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| CN110346997B (en) * | 2019-07-08 | 2023-04-07 | 深圳大学 | Resonant cavity type terahertz device and preparation method thereof |
| CN110441936B (en) * | 2019-08-14 | 2022-05-13 | 京东方科技集团股份有限公司 | Filter, filtering device, driving method of filter and preparation method of driving method |
| CN111384923A (en) * | 2020-04-09 | 2020-07-07 | 中国电子科技集团公司第二十六研究所 | Miniaturized lattice type crystal filter |
| WO2022039670A1 (en) * | 2020-08-21 | 2022-02-24 | Agency For Science, Technology And Research | Electro-optic modulator and method of forming the same |
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