CN114859575A - Modulatable micro-ring optical communication filter based on inverse piezoelectric effect - Google Patents
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Abstract
The invention belongs to the technical field of optical communication, and discloses a modulatable micro-ring optical communication filter based on an inverse piezoelectric effect, which comprises a waveguide, a micro-ring resonator and an electrode interlayer unit, wherein the electrode interlayer unit comprises one or more electrode interlayers; the waveguide is arranged in the side edge area of the micro-ring resonator, and lateral evanescent wave coupling is generated between the micro-ring resonator and the waveguide, so that optical field resonance is generated in the micro-ring resonator; the electrode interlayer is tightly attached to the micro-ring resonator, and the shape and size of the micro-ring resonator or the effective refractive index of the micro-ring resonator are changed by the electrode interlayer based on the inverse piezoelectric effect so as to regulate and control the resonance state of an optical field in the micro-ring resonator. The invention can reduce loss and crosstalk while increasing the modulation range and the adjustment precision, and meets the low-power requirement.
Description
Technical Field
The invention belongs to the technical field of optical communication, and particularly relates to a modulatable micro-ring optical communication filter based on an inverse piezoelectric effect.
Background
Optical communication plays an important role in modern information transmission, and each node in an optical communication network performs data exchange and routing through an optical path. The optical communication filter realizes microwave filtering in an optical domain and is a key component of a photonic integrated circuit and a microwave photonic system. The microwave optical communication filter does not need frequent photoelectric conversion, has good tunability and high Q value characteristics, and has wide application in spectrum modulation, wavelength division multiplexing and spectrum sensing of optical systems because the silicon optical device has high integration level and is perfectly compatible with the current CMOS (complementary metal oxide semiconductor) process.
In planar integrated optical waveguide devices, optical communication filters based on mach-zehnder interferometers and microring resonators have been studied to a considerable extent. The high-performance microwave optical communication filter is mainly embodied in two aspects, and firstly, the central frequency is required to be continuously adjustable, the bandwidth is required to be reconfigurable, the quality factor is required to be high, and high integration level is required to be realized. Due to the requirement of the modern integrated device for miniaturization, the microring resonator with a more compact structure is adopted as a basic unit of the optical communication filter. The traditional optical communication filter based on the micro-ring changes the effective refractive index of a waveguide through the electro-optic effect or the thermo-optic effect to shift a resonance peak, so that the effect of changing the optical power at a specific wavelength is achieved, but the problems of relatively large power consumption, large crosstalk between adjacent wavelengths and relatively limited adjustment range exist.
Disclosure of Invention
The invention provides a modulatable micro-ring optical communication filter based on an inverse piezoelectric effect, and solves the problems that in the prior art, the micro-ring-based optical communication filter is single in adjustment mode, limited in adjustment range, low in adjustment precision, and large in power consumption and crosstalk.
The invention provides a modulatable micro-ring optical communication filter based on inverse piezoelectric effect, which comprises: the waveguide, the microring resonator and the electrode interlayer unit comprise one or more electrode interlayers; the waveguide is arranged in a side area of the micro-ring resonator, and lateral evanescent wave coupling is generated between the micro-ring resonator and the waveguide, so that optical field resonance is generated in the micro-ring resonator; the electrode interlayer is tightly attached to the micro-ring resonator, and the shape and size of the micro-ring resonator or the effective refractive index of the micro-ring resonator are changed by the electrode interlayer based on the inverse piezoelectric effect so as to regulate and control the resonance state of an optical field in the micro-ring resonator.
Preferably, the electrode interlayer is tightly attached to the inner side of the micro-ring resonator in the form of concentric arc segments; the electrode interlayer can adjust the resonant optical field of the micro-ring resonator in an outward expansion mode.
Preferably, the electrode interlayer is tightly attached to the outer side of the micro-ring resonator in the form of concentric arc-shaped sections; the electrode interlayer can adjust the resonant optical field of the micro-ring resonator in a retraction mode.
Preferably, the electrode interlayer comprises a first interlayer component and a second interlayer component which are arranged in pair, the first interlayer component is tightly attached to the inner side of the micro-ring resonator in the form of concentric arc-shaped sections, and the second interlayer component is tightly attached to the outer side of the micro-ring resonator in the form of concentric arc-shaped sections; the electrode interlayer can adjust the resonant optical field of the micro-ring resonator in three modes of extrusion, outward expansion and inward contraction.
Preferably, a plurality of the electrode interlayers are symmetrically arranged about a center of the microring resonator.
Preferably, the electrode interlayer comprises a top electrode, a piezoelectric material layer and a bottom electrode, wherein the piezoelectric material layer is positioned between the top electrode and the bottom electrode.
Preferably, the piezoelectric material in the piezoelectric material layer adopts Sc 0.2 Al 0.8 And N, the top electrode and the bottom electrode are made of Au.
Preferably, the waveguide and the microring resonator both use silicon as a core material and silica as a cladding material.
Preferably, the evanescent coupling is a straight waveguide coupling or a curved waveguide coupling.
Preferably, one micro-ring resonator and the corresponding electrode interlayer unit thereof form a micro-ring structure, the micro-ring optical communication filter includes a plurality of micro-ring structures, and the plurality of micro-ring structures form a transverse array or a longitudinal array.
One or more technical schemes provided by the invention at least have the following technical effects or advantages:
in the invention, the waveguide, the micro-ring resonator and the electrode interlayer unit are included, and the electrode interlayer unit comprises one or more electrode interlayers; the waveguide is arranged in the side edge area of the micro-ring resonator, and lateral evanescent wave coupling is generated between the micro-ring resonator and the waveguide, so that optical field resonance is generated in the micro-ring resonator; the electrode interlayer is tightly attached to the micro-ring resonator, and the shape and size of the micro-ring resonator or the effective refractive index of the micro-ring resonator are changed by the electrode interlayer based on the inverse piezoelectric effect so as to regulate and control the resonance state of an optical field in the micro-ring resonator. The invention adjusts the shape and size of the micro-ring resonator or the effective refractive index of the waveguide by utilizing the deformation generated by the electrode interlayer when voltage is applied through the electrode interlayer arranged closely to the micro-ring resonator, thereby modulating the optical power output by specific wavelength to achieve the aim of a filter, reducing loss and crosstalk while enlarging the modulation range and meeting the low-power requirement. The invention has simple structure, high integration degree, wide regulation range and high regulation precision, reduces the loss and crosstalk in the transmission process and is suitable for the modern on-chip all-optical communication system and the microwave optical subsystem.
Drawings
Fig. 1 is a schematic structural diagram of a modulatable micro-ring optical communication filter based on an inverse piezoelectric effect according to embodiment 1 of the present invention;
fig. 2 is a schematic cross-sectional view of a micro-ring resonator and an electrode interlayer closely attached to the inner and outer sides thereof in embodiment 1 of the present invention;
fig. 3 is a schematic structural diagram of a configuration in which an input/output waveguide, an upload/download waveguide, and a micro-ring resonator are coupled by using a straight waveguide in embodiment 1 of the present invention;
fig. 4 is a schematic structural diagram of a structure in which an input/output waveguide, an upload/download waveguide, and a micro-ring resonator are coupled by using a curved waveguide in embodiment 1 of the present invention;
FIG. 5 is a schematic structural view of a plurality of microring structures forming a lateral array;
fig. 6 is a schematic diagram of adjusting the effective refractive index of the microring resonator in embodiment 1 of the present invention;
fig. 7 is a schematic diagram for adjusting the shape and size (increasing the circumference) of the microring resonator in embodiment 1 of the present invention;
fig. 8 is a schematic diagram for adjusting the shape and size (reducing the circumference) of the microring resonator in embodiment 1 of the present invention;
fig. 9 is a schematic structural diagram of a modulatable micro-ring optical communication filter based on an inverse piezoelectric effect according to embodiment 2 of the present invention;
fig. 10 is a schematic structural diagram of a modulatable micro-ring optical communication filter based on the inverse piezoelectric effect according to embodiment 3 of the present invention.
Detailed Description
The invention provides a modulatable micro-ring optical communication filter based on inverse piezoelectric effect, which comprises: the waveguide, the microring resonator and the electrode interlayer unit comprise one or more electrode interlayers; the waveguide is arranged in a side area of the micro-ring resonator, and lateral evanescent wave coupling is generated between the micro-ring resonator and the waveguide, so that optical field resonance is generated in the micro-ring resonator; the electrode interlayer is tightly attached to the micro-ring resonator, and the shape and size of the micro-ring resonator or the effective refractive index of the micro-ring resonator are changed by the electrode interlayer based on the inverse piezoelectric effect so as to regulate and control the resonance state of an optical field in the micro-ring resonator.
Wherein, the electrode interlayer and the microring resonator are closely attached by the following three methods:
(1) the electrode interlayer is tightly attached to the inner side of the micro-ring resonator in a concentric arc section mode; the electrode interlayer can adjust the resonant optical field of the micro-ring resonator in an outward expansion mode.
(2) The electrode interlayer is tightly attached to the outer side of the micro-ring resonator in a concentric arc section mode; the electrode interlayer can adjust the resonant optical field of the micro-ring resonator in a retraction mode.
(3) The electrode interlayer comprises a first interlayer component and a second interlayer component which are arranged in pair, the first interlayer component is tightly attached to the inner side of the micro-ring resonator in a concentric arc section mode, and the second interlayer component is tightly attached to the outer side of the micro-ring resonator in a concentric arc section mode; the electrode interlayer can adjust the resonant optical field of the micro-ring resonator in three modes of extrusion, outward expansion and inward contraction.
The electrode interlayer comprises a top electrode, a piezoelectric material layer and a bottom electrode, wherein the piezoelectric material layer is located between the top electrode and the bottom electrode.
The length, width, height, number and position of the electrode interlayer can be set according to the requirement. The micro-ring resonator is in the shape of a circular ring, and the radius of the circular ring can be set according to the requirement. In a preferred embodiment, the electrode interlayer unit includes a plurality of electrode interlayers, and the larger the number of the electrode interlayers, the larger the adjustment range, the better the effect. The electrode interlayers are symmetrically arranged around the circle center of the micro-ring resonator, and the symmetrical arrangement enables the shape of the micro-ring resonator to be changed uniformly and the optical field to be more stable.
Sc can be adopted as the piezoelectric material in the piezoelectric material layer 0.2 Al 0.8 N or other materials, and Au may be used for the top electrode and the bottom electrode, but is not limited thereto.
The waveguide and the micro-ring resonator are made of the same core layer material, and the waveguide and the micro-ring resonator are made of the same surrounding cladding material. For example, the waveguide and the microring resonator both adopt silicon as a core layer material and adopt silicon dioxide as a cladding layer material, and due to the adoption of the conventional silicon core waveguide, no other material layer or structure is added, so that extra loss and crosstalk are not caused, and the problems of crosstalk between adjacent wavelengths and loss in a propagation process can be effectively inhibited.
The evanescent wave coupling is straight waveguide coupling or bent waveguide coupling, and the distance between the waveguide and the micro-ring resonator can be set according to requirements. The waveguide may be a single waveguide, which is located at one side of the microring resonator; the waveguide can also comprise an input-output waveguide and an uploading-downloading waveguide, and the two waveguides are arranged on two opposite sides of the micro-ring resonator.
In addition, one micro-ring resonator and the corresponding electrode interlayer unit form a micro-ring structure, the micro-ring optical communication filter comprises a plurality of micro-ring structures, and the plurality of micro-ring structures form a transverse array or a longitudinal array. The array structure can play a role in enhancing the selection effect of the single micro-ring structure.
The electrode interlayer carrying the phase change material is arranged on at least one of the inner side and the outer side of the micro-ring resonator, the piezoelectric material in the electrode interlayer is applied with voltage, and the volume of the piezoelectric material can be changed by utilizing the inverse piezoelectric property of the piezoelectric material, so that the micro-ring resonator is extruded or translated, the effective refractive index or the shape and the size of the micro-ring resonator are changed, the resonance state of an optical field in the micro-ring is changed, and the output port of a signal is regulated and controlled. The invention utilizes the inverse piezoelectric effect, and the device can reduce the propagation loss and the communication crosstalk while enlarging the adjusting range and the adjusting precision.
In order to better understand the technical solution, the technical solution will be described in detail with reference to the drawings and the specific embodiments.
Example 1:
referring to fig. 1, embodiment 1 provides a modulatable microwave optical communication filter based on the inverse piezoelectric effect, and includes an input-output waveguide 1, an upload-download waveguide 2, a microring resonator 3, and an electrode interlayer 4. The input and output waveguides 1 and the uploading and downloading waveguides 2 are parallel linear waveguides and are symmetrically distributed on two sides of the micro-ring resonator 3. The radius of the micro-ring resonator 3 is 4.8um, and the distance between the input/output waveguide 1 and the uploading/downloading waveguide 2 and the nearest distance between the micro-ring resonator 3 are 240 nm. The four pairs of electrode interlayers 4 are symmetrically distributed on the micro-ring resonator 3 at an angular interval of 90 degrees, and are tightly attached to the inner side and the outer side of the micro-ring resonator 3 in a concentric arc section mode, and the subtended central angle is 12 degrees.
Referring to fig. 2, the input/output waveguide 1, the upload/download waveguide 2, and the microring resonator 3 are all silicon nanowires based on silicon-on-insulator materials, wherein the core material 5 is silicon, the deposition thickness is 220nm, and the refractive index is 3.474. And the surrounding cladding materials 6 of the input and output waveguide 1, the uploading and downloading waveguide 2 and the micro-ring resonator 3 are all made of silicon dioxide. The electrode sandwich 4 is specifically in a sandwich configuration and comprises a top electrode 7, a bottom electrode 8 and a piezoelectric material layer 9. The piezoelectric material layer 9 is made of Sc 0.2 Al 0.8 And N, the N is arranged between the top electrode 7 and the bottom electrode 8, the top electrode 7 and the bottom electrode 8 are both made of Au, and the deposition thickness is 40 nm. The widths of the top electrode 7, the bottom electrode 8 and the piezoelectric material layer 9 are all 200 nm.
The micro-ring optical communication filter provided in embodiment 1 has four ports in total, wherein two ends of the input/output optical waveguide 1 are a first port and a second port, and are mainly used for inputting and outputting bus optical signals; and the two ends of the uploading and downloading optical waveguide 2 are a third port and a fourth port, and are used for uploading and downloading local optical signals. Through the action of the micro-ring resonator 3, specific signal components which meet the micro-ring resonance condition in the input/output waveguide 1 are subjected to evanescent wave coupling, and can be downloaded and output from the same side of the uploading/downloading waveguide 2; and after being coupled by evanescent waves, a part of local signals meeting resonance conditions in the uploading and downloading waveguide 2 are uploaded to the input and output waveguide 1 for output.
The electrode interlayer 4 is tightly attached to the inner side and the outer side of the micro-ring resonator 3 in a concentric arc section mode, when the electrode interlayer 4 is electrified, piezoelectric materials on the two sides can deform, and the middle micro-ring resonator 3 is extruded or translated. The electrode interlayer 4 is arranged at a variable position, and the electrode interlayers 4 at different positions are deformed at different positions corresponding to the micro-ring resonator 3. The number of the electrode interlayers 4 and the length of the arc-shaped electrode interlayers 4 are variable, and the effect of modulating the deformation of the micro-ring resonator 3 is more obvious when the number of the electrode interlayers 4 is larger and the arc-shaped length is longer.
The micro-ring resonator 3, the input/output waveguide 1 and the upload/download waveguide 2 may adopt different coupling structures. As shown in fig. 3, the input/output waveguide 1, the upload/download waveguide 2 and the micro-ring resonator 3 are coupled 10 in a straight waveguide structure. As shown in fig. 4, the input/output waveguide 1, the upload/download waveguide 2 and the microring resonator 3 are coupled 11 in a curved waveguide structure.
Referring to fig. 5, the micro-ring optical communication filter may include a plurality of micro-ring structures, which are sequentially arranged between the input/output waveguide 1 and the upload/download waveguide 2 along a direction parallel to the waveguides, to form a lateral array 12. For filter structure applications, the enhancement effect of the transversal array 12 on the wavelength selection is better compared to the longitudinal array.
The working process and principle of example 1 are as follows:
the optical power control of specific wavelength components in the output optical signal is mainly realized by the electrode interlayer 4, and the shape size of the micro-ring resonator 3 or the effective refractive index of the waveguide is changed by applying different voltages to the electrode interlayer 4 to change the cross-sectional shape of the piezoelectric material layer 9 therein. The resonance condition of the micro-ring resonator 3 is as follows:
n eff L＝mλ (1)
wherein L is the actual circumference of the microring resonator, n eff Is the effective refractive index of the micro-ring resonator, m is the resonance order, and λ is the resonance wavelength.
By regulating the shape and size of the microring resonator 3, namely the actual circumference L or the effective refractive index n of the microring resonator 3 eff And further regulate and control the resonance state of the optical field in the micro-ring resonator 3. So that the optical signal satisfying the resonance condition in the microring resonator 3 is strengthened and then output from the output end of the input/output waveguide 1 or the download end of the upload/download waveguide 2; while the optical power of the wavelength components not satisfying the resonance condition of the micro-ring resonator 3 is relatively reduced, thereby achieving the filteringThe effect of the waves.
Due to the inverse piezoelectric effect, when a voltage is applied across the piezoelectric material layer 9, the piezoelectric material is deformed accordingly, which is embodied in the present invention as stretching and compressing in the transverse width.
Referring to fig. 1, 2, and 6, when a voltage opposite to the polarization direction inside the piezoelectric material layer 9 is applied to the electrode interlayers 4 on the inner side and the outer side of the micro-ring resonator 3, the piezoelectric material layers 9 on the two sides of the micro-ring resonator 3 are simultaneously expanded, so that the micro-ring resonator 3 is compressed, and the effective refractive index of the micro-ring resonator 3 is changed.
Referring to fig. 1 and 2, as shown in fig. 7, a left area of fig. 2 shows an outer side of the micro ring resonator 3, and a right area of fig. 2 shows an inner side of the micro ring resonator 3, when a voltage opposite to the internal polarization direction of the piezoelectric material layer 9 is applied to the electrode interlayer 4 inside the micro ring resonator 3, and a voltage identical to the internal polarization direction of the piezoelectric material layer 9 is applied to the electrode interlayer 4 outside the micro ring resonator 3, the piezoelectric material inside the micro ring resonator 3 expands, and the piezoelectric material outside the micro ring resonator 3 compresses, so that the micro ring resonator 3 is translated outward, which corresponds to an increase in radius of the micro ring resonator 3, and an increase in length of the micro ring resonator 3 (i.e., a circumferential length of the micro ring resonator) increases, and a resonance wavelength component increases.
Referring to fig. 1, 2, and 8, when a voltage in the same direction as the polarization direction of the material is applied to the electrode interlayer 4 inside the micro-ring resonator 3 and a voltage in the opposite direction to the polarization direction of the material is applied to the electrode interlayer 4 outside the micro-ring resonator 3, the piezoelectric material inside the micro-ring resonator 3 is compressed and the piezoelectric material outside the micro-ring resonator 3 is expanded, so that the micro-ring resonator 3 is translated inward, which is equivalent to the reduction of the radius of the micro-ring resonator 3, thereby reducing the circumference of the micro-ring resonator 3 and shortening the resonant wavelength component.
In the embodiment 1, the electrode interlayers positioned at two sides of the micro-ring resonator are adjusted to be in different deformation states, so that three different modes of extrusion, outward expansion and inward contraction of the micro-ring waveguide can be adjusted, and the filter can be adjusted in a wider range and more accurately.
Example 2:
referring to fig. 9, embodiment 2 provides a modulatable microwave optical communication filter based on the inverse piezoelectric effect, and differs from embodiment 1 in that an electrode interlayer 4 is provided only on the outer side of a microring resonator 3.
The electrode interlayer 4 in the embodiment 2 is tightly attached to the outer side of the micro-ring resonator 3 in the form of concentric arc segments; the electrode interlayer 4 can adjust the resonant optical field of the micro-ring resonator 3 in a retraction mode. Although embodiment 2 can only realize adjustment in such a way that the micro-ring waveguide is retracted, adjustment of the output wavelength can be realized by adjusting the magnitude and the number of the voltage of the electrode interlayer 4.
Example 3:
referring to fig. 10, embodiment 3 provides a modulatable microwave optical communication filter based on the inverse piezoelectric effect, and differs from embodiment 1 in that an electrode interlayer 4 is provided only inside a microring resonator 3.
The electrode interlayer 4 in the embodiment 2 is tightly attached to the inner side of the micro-ring resonator 3 in the form of concentric arc segments; the electrode interlayer 4 can adjust the resonant optical field of the micro-ring resonator 3 in an outward expansion mode. Although the embodiment 2 can only realize the adjustment of the mode of outward expansion for the micro-ring waveguide, the adjustment of the output wavelength can be realized by adjusting the size and the number of the voltage of the electrode interlayer 4.
The embodiment of the invention provides a modulatable micro-ring optical communication filter based on the inverse piezoelectric effect, which at least comprises the following technical effects:
(1) the invention can change the resonance state of the optical field in the micro-ring resonator by regulating and controlling the electrode interlayer tightly attached to at least one of the inner side and the outer side of the micro-ring resonator, and realize the filtering function at the output port.
(2) The structure that a plurality of counter electrode interlayers are arranged on the inner side and the outer side of the micro-ring resonator in a clinging mode can realize three controllable adjusting modes of extrusion, outward expansion and inward contraction of the micro-ring waveguide, change of the effective refractive index of the micro-ring can be realized, the perimeter of the micro-ring can be increased or reduced, the adjusting range of the output wavelength is further enlarged, and the adjusting sensitivity is also increased.
(3) Because the main body of the invention adopts the conventional silicon core waveguide, and no other material layer or structure is added, the invention can not bring extra loss and crosstalk, and can effectively inhibit the crosstalk between adjacent wavelengths and the loss problem in the transmission process.
(4) The micro-ring resonator is used as a basic structure unit of the optical communication filter, the structure is simple, the stability is good, the manufacturing process is completely compatible with the current CMOS process, and the integration level and the expansibility are high.
Finally, it should be noted that the above embodiments are only for illustrating the technical solutions of the present invention and not for limiting, and although the present invention is described in detail with reference to examples, it should be understood by those skilled in the art that modifications or equivalent substitutions may be made to the technical solutions of the present invention without departing from the spirit and scope of the technical solutions of the present invention, which should be covered by the claims of the present invention.
Claims (10)
1. A modulatable microring optical communication filter based on the inverse piezoelectric effect, comprising: the waveguide, the microring resonator and the electrode interlayer unit comprise one or more electrode interlayers; the waveguide is arranged in a side area of the micro-ring resonator, and lateral evanescent wave coupling is generated between the micro-ring resonator and the waveguide, so that optical field resonance is generated in the micro-ring resonator; the electrode interlayer is tightly attached to the micro-ring resonator, and the shape and size of the micro-ring resonator or the effective refractive index of the micro-ring resonator are changed by the electrode interlayer based on the inverse piezoelectric effect so as to regulate and control the resonance state of an optical field in the micro-ring resonator.
2. The tunable micro-ring optical communication filter based on inverse piezoelectric effect of claim 1, wherein the electrode interlayer is tightly attached to the inner side of the micro-ring resonator in the form of concentric arc segments; the electrode interlayer can adjust the resonant optical field of the micro-ring resonator in an outward expansion mode.
3. The tunable micro-ring optical communication filter based on inverse piezoelectric effect of claim 1, wherein the electrode interlayer is tightly attached to the outside of the micro-ring resonator in the form of concentric arc segments; the electrode interlayer can adjust the resonant optical field of the micro-ring resonator in a retraction mode.
4. The tunable micro-ring optical communication filter based on inverse piezoelectric effect according to claim 1, wherein the electrode interlayer comprises a first interlayer component and a second interlayer component which are arranged in pair, the first interlayer component is tightly attached to the inner side of the micro-ring resonator in the form of concentric arc segments, and the second interlayer component is tightly attached to the outer side of the micro-ring resonator in the form of concentric arc segments; the electrode interlayer can adjust the resonant optical field of the micro-ring resonator in three modes of extrusion, outward expansion and inward contraction.
5. The modulatable microring optical communication filter according to claim 1, wherein a plurality of said electrode interlayers are symmetrically arranged about the center of said microring resonator.
6. The modulatable microring optical communication filter according to claim 1, wherein said electrode sandwich comprises a top electrode, a layer of piezoelectric material and a bottom electrode, said layer of piezoelectric material being located between said top electrode and said bottom electrode.
7. The tunable micro-ring optical communication filter based on inverse piezoelectric effect according to claim 6, wherein the piezoelectric material in the piezoelectric material layer adopts Sc 0.2 Al 0.8 N, the top electrode and the bottomThe electrodes are made of Au.
8. The tunable micro-ring optical communication filter based on the inverse piezoelectric effect according to claim 1, wherein the waveguide and the micro-ring resonator both use silicon as a core material and silica as a cladding material.
9. The inverse-piezoelectric-effect-based, modulatable microring optical communication filter of claim 1, wherein the evanescent coupling is a straight waveguide coupling or a curved waveguide coupling.
10. The tunable micro-ring optical communication filter based on the inverse piezoelectric effect according to claim 1, wherein one micro-ring resonator and the corresponding electrode interlayer unit form a micro-ring structure, the micro-ring optical communication filter comprises a plurality of micro-ring structures, and the plurality of micro-ring structures form a transverse array or a longitudinal array.
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