CN107064436B - Gas detection method for micro-electromechanical system sensor, sensor and storage medium - Google Patents
Gas detection method for micro-electromechanical system sensor, sensor and storage medium Download PDFInfo
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Abstract
The invention discloses a gas detection method of an MEMS sensor, the gas sensor and a computer readable storage medium, wherein the gas detection method comprises the following steps: the MEMS sensor firstly controls the micro-heater inside the MEMS sensor to work at a first temperature value, obtains a first detection value obtained through detection, then determines to obtain a second temperature value according to the first detection value, wherein the detection sensitivity corresponding to the second temperature value is higher than that corresponding to the first temperature value, the second temperature value is higher than the first temperature value, and then the MEMS sensor controls the micro-heater inside the MEMS sensor to work at the second temperature value.
Description
Technical Field
The invention relates to the field of MEMS sensor detection, in particular to a gas detection method of an MEMS sensor, a gas sensor and a computer readable storage medium.
Background
MEMS (Micro-Electro-Mechanical systems) sensors are receiving increasing attention from sensor manufacturers and the public, and various MEMS sensors based on Micro-heaters are being tried to be used in electronic products to improve the miniaturization, usability and intelligence of the electronic products. The existing MEMS sensor generally has the phenomenon that the sensitivity of the existing MEMS sensor drifts along with the temperature, and the constant temperature is mostly adopted to control the heating of a micro-heater in the existing MEMS sensor when the sensor works, so that the sensitive working conditions with different concentrations cannot be automatically obtained, and the accuracy of a detection output value of the existing MEMS sensor is influenced due to the fact that the sensitivity is poor when the sensor works.
The above is only for the purpose of assisting understanding of the technical aspects of the present invention, and does not represent an admission that the above is prior art.
Disclosure of Invention
The invention mainly aims to provide a gas detection method of an MEMS sensor, the gas sensor and a computer readable storage medium, and aims to solve the problem of inaccurate detection caused by the fact that the interior of the sensor is heated at a constant temperature when the existing MEMS sensor detects gas parameters.
In order to achieve the above object, the present invention provides a gas detection method of a MEMS sensor, the gas detection method including:
step S10, acquiring a first detection value detected when the MEMS sensor works at a first temperature value;
step S20, determining a second temperature value according to the first detection value, wherein the detection sensitivity corresponding to the second temperature value is higher than the detection sensitivity corresponding to the first temperature value;
step S30, controlling the MEMS sensor to work at the second temperature value and acquiring a second detected value obtained by detection;
step S40, outputting the second detection value as the current actual detection value;
and step S50, controlling the MEMS sensor to work at the first temperature value.
Preferably, the step S20 specifically includes:
step S21, obtaining a detection value and sensitivity mapping relation corresponding to the first detection value, and obtaining a preset sensitivity value in the detection value and sensitivity mapping relation;
and step S22, acquiring a second temperature value corresponding to the preset sensitivity value in the mapping relation between the detection value and the sensitivity.
Preferably, the sensitivity value corresponding to the second temperature value is a maximum sensitivity value in the mapping relationship between the detection value and the sensitivity.
Preferably, after step S50, the method further includes:
step S60, acquiring a third detection value currently detected by the MEMS sensor;
step S70, determining whether the third detection value is the same as the first detection value,
when the third detection value is the same as the first detection value, continuing to perform step S50;
when the third detection value is different from the first detection value, the execution returns to step S20.
Preferably, a flow rate sensor is further integrated inside the MEMS sensor, and after step S30, the method further includes:
step S80, acquiring a flow velocity value detected by the flow velocity sensor;
step S90, judging whether the flow rate value exceeds a preset threshold value;
when the flow rate of the gas is smaller than the preset threshold value, performing the step S40;
and S100, outputting prompt information when the flow rate of the gas is greater than the preset threshold value.
Preferably, a humidity sensor is further integrated inside the MEMS sensor, and before the step S40, the method further includes:
step S110, acquiring an environment humidity value of the MEMS sensor;
step S120, correcting the second detection value according to the ambient humidity value;
the step S40 further includes:
and step S130, outputting the corrected second detection value as the current actual detection value.
Preferably, the step S40 further includes:
and converting the second detection value into a gas concentration value and outputting the gas concentration value.
To achieve the above object, the present invention also provides a MEMS sensor, comprising:
a temperature sensor;
a flow rate sensor;
a humidity sensor;
a controller;
an output interface;
a memory; and
application program of a gas detection method of a MEMS sensor, wherein said application program is stored in said memory, said application program implementing the steps of said gas detection method of a MEMS sensor.
In order to achieve the above object, the present invention further provides a computer-readable storage medium storing an application program of the gas detection method of the MEMS sensor, the application program implementing the steps of the gas detection method of the MEMS sensor.
The invention provides a gas detection method of an MEMS sensor, the MEMS sensor firstly controls a micro-heater in the MEMS sensor to work at a first temperature value, and obtains a corresponding first detection value, then determines to obtain a second temperature value according to the first detection value, wherein the detection sensitivity corresponding to the second temperature value is higher than that corresponding to the first temperature value, the second temperature value is higher than the first temperature value, and then the MEMS sensor controls the micro-heater in the MEMS sensor to work at the second temperature value.
Drawings
FIG. 1 is a schematic flow chart of a first embodiment of a gas detection method of a MEMS sensor according to the present invention;
FIG. 2 is a diagram illustrating the relationship between the heating temperature, the sensitivity, and the detection limit of the MEMS sensor;
FIG. 3 is a schematic diagram showing the relationship between the detection sensitivity and the operating temperature under different gas concentrations;
FIG. 4 is a schematic flow chart of a gas detection method of the MEMS sensor according to a second embodiment of the invention;
FIG. 5 is a schematic flow chart diagram of a third embodiment of a gas sensing method of the MEMS sensor of the present invention;
FIG. 6 is a schematic flow chart diagram of a fourth embodiment of a gas sensing method of the MEMS sensor of the present invention;
FIG. 7 is a functional block diagram of the MEMS sensor of the present invention;
FIG. 8 is a schematic diagram of the connection of the MEMS sensor and the computer readable storage medium of the present invention.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
It should be noted that the descriptions relating to "first", "second", etc. in the present invention are for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In the description of the embodiments of the present invention, "a plurality" means two or more unless specifically limited otherwise. In addition, technical solutions between various embodiments may be combined with each other, but must be realized by a person skilled in the art, and when the technical solutions are contradictory or cannot be realized, such a combination should not be considered to exist, and is not within the protection scope of the present invention.
Fig. 1 is a schematic flow chart of a gas detection method of a MEMS sensor according to an embodiment of the present invention, and referring to fig. 1, the gas detection method of the MEMS sensor includes the following steps:
step S10, acquiring a first detection value detected when the MEMS sensor works at a first temperature value;
a temperature sensor is integrated in the design of the MEMS sensor, the material of the temperature sensor is preferably Pt, the temperature sensor can resist high-temperature heating, and the design position of the temperature sensor can be in the area of a temperature field formed by a micro-heater, and the actual temperature on the electrode of the gas sensor can be directly or indirectly measured. MEMS sensors integrating the above temperature sensor structure are known in the art and can be understood from known MEMS sensor structure designs.
The MEMS sensor also comprises an internally integrated controller which can control the micro heater to work, when the MEMS sensor works to detect a gas parameter value, the controller controls the micro heater to heat, the temperature is heated by a temperature sensor detector, the working temperature is controlled at an initial temperature value, the initial temperature value is an empirical value, the empirical values of different detected gases are determined according to earlier experiments and may be different, after the micro heater heats a temperature field to the initial temperature value, a response time passes, the controller obtains a voltage value, namely a first detection value, on the electrode of the gas sensor through a related circuit, the voltage value is a parameter value of the current gas, the size of the voltage value represents the concentration of the gas, the general response time is in a range of dozens of milliseconds, and the detection process can also be known through a known technology.
Further, the MEMS sensor may directly output the detected value as the above voltage value as a value representing the gas concentration during the operation, and in the device applied to the MEMS sensor, after the MCU of the device reads the expired detected value, the value is converted into a digital value and then internally converted, for example, the corresponding gas concentration value, such as a concentration value in ppm, may be obtained by a formula or table data stored internally. Of course, since the controller is also included in the MEMS sensor, the controller can also convert itself to obtain the concentration value for communication and output to the application device, and since the conversion step is involved, data processing needs to be added, which increases the requirement for the controller.
Step S20, determining a second temperature value according to the first detection value, wherein the detection sensitivity corresponding to the second temperature value is higher than the detection sensitivity corresponding to the first temperature value;
it can be known from the characteristics of the existing MEMS sensor that the detection sensitivity is greatly related to the internal operating temperature of the gas sensor, where the sensitivity refers to the difference in the detection parameter values output by the gas sensor at different temperatures for the same gas concentration, and as the voltage values are different, the higher the sensitivity is, the higher the output voltage value is, and because the waveform of the output voltage signal contains the noise value of the disturbance, if the output voltage value is larger, the higher the signal-to-noise ratio of the relative noise is, the easier it is to distinguish from the noise value, and cross-distinguish the detection values corresponding to different concentrations, and therefore the more accurate the obtained detection result is. In the relationship diagram of the heating temperature, the sensitivity and the detection limit of the MEMS sensor shown in fig. 2, the abscissa represents the variation value of the heating temperature value, the ordinate on the left side represents the variation value of the detection limit, and the ordinate on the right side represents the variation value of the sensitivity, where the detection limit refers to the parameter value corresponding to the lowest concentration that the MEMS sensor can detect at a certain operating temperature, and if the lowest concentration that can be detected is lower, the smaller the detection limit is, the better the performance of the sensor is. It can be seen from the figure that, when the heating temperature, i.e. the working temperature, of the MEMS sensor is higher, the L1 curve, i.e. the detection limit value, is smaller, and the L2 curve, i.e. the sensitivity value, is higher, for a MEMS sensor, if the sensitivity is higher and the detection limit value is smaller, the performance is better, and the accuracy of the detected gas concentration parameter value is higher. However, if the operating temperature of the MEMS sensor is higher, the power consumption of the MEMS sensor is also higher, and the operating life of the device is also affected, which is disadvantageous for many applications in the current battery-powered miniaturized electronic products such as mobile or smart devices, because it requires the power consumption of the components to be as low as possible, so as to reduce the power consumption of the whole product and prolong the battery operating time of the product. Therefore, in practical applications, the MEMS sensor cannot operate at a high temperature, and a relatively moderate relatively low temperature value is generally selected according to an empirical value, so as to output a reasonable detection parameter.
However, the MEMS sensor in the prior art only works at a constant temperature value, and cannot meet the requirement of consistency in accuracy of various gas concentrations, and particularly, in a low concentration situation, the output detection parameter value is small, and the noise value affects the accuracy of the detection value.
In view of the above problem, in the second step S20 of this embodiment, the second temperature value is determined according to the detection value obtained at the initial temperature, i.e. the first temperature value, where the detection sensitivity corresponding to the second temperature value is higher than the detection sensitivity corresponding to the first temperature value. That is, after the MEMS sensor previously controls the temperature sensor to work at the initial first temperature value and obtains the first detection value, the MEMS sensor may continue to obtain the second temperature value according to the first detection value, specifically: inquiring a corresponding detection value and sensitivity mapping relation table according to the first detection value to obtain a corresponding high-sensitivity value; and inquiring a corresponding sensitivity and temperature mapping relation table according to the high sensitivity value to obtain a second temperature value.
In the diagram of the relationship between the detection sensitivity and the operating temperature under different gas concentrations shown in FIG. 3, curves L1-L5 respectively show the variation curve of the detection sensitivity (ordinate) corresponding to a certain detection gas under different concentrations with the operating temperature (abscissa), and the curves respectively show the variation curves corresponding to gas concentrations of 1-5 ppm. Of course, the gas concentration is a range value close to the nominal value, and is not an accurate value, because the detection parameters measured by different sensitivities are different, and the corresponding concentration values are different. The curve change rule shown in the graph can be obtained through experiments. For example, when the current initial temperature value of the MEMS sensor is 315 ℃, that is, the temperature value corresponding to the dashed line a in the figure, and the detected parameter is the concentration parameter corresponding to 1ppm, a 1ppm corresponding curve L1 is determined, and the detection sensitivity thereof, that is, the intersection point of the dashed line a and L1, that is, the X1 position, is shown in the figure, and it can be known that the detection sensitivity at this time is relatively low, so that other temperature values corresponding to a relatively high detection sensitivity, that is, second temperature values, can be obtained according to the curve. If the second temperature value is 350 ℃, the corresponding detection sensitivity value is larger than that corresponding to the position X1. Further, it can be seen from the graph that the operating temperature value at the maximum detection sensitivity corresponding to the concentration is a temperature value close to 400 ℃, for example, 390 ℃, where the maximum sensitivity is at the X2 position and the maximum sensitivity is at the B point position in the graph. Because the curve change rule in the graph can be obtained by experiments, other high-sensitivity values corresponding to the concentration value working at the initial temperature can be stored in a memory of the controller in advance, namely a detection value and sensitivity mapping relation table and a sensitivity and temperature mapping relation table are stored, the temperature value corresponding to the maximum sensitivity can be preferably stored, if the sensor can normally work at the temperature, other temperature values lower than the maximum sensitivity can be stored, and the temperature values enable the sensor to work more stably for a long time due to low energy; therefore, by acquiring the detection value and sensitivity mapping relation table, the corresponding preset sensitivity, namely the sensitivity value which is higher than the corresponding sensitivity of the first detection value, can be obtained by calling according to the first detection value, and then the sensitivity and temperature mapping relation table is inquired, so that the temperature value which is corresponding to the high sensitivity, namely the second temperature value, can be finally obtained.
Step S30, controlling the MEMS sensor to work at a second temperature value and acquiring a second detected value obtained by detection;
step S40, outputting the second detection value as the current actual detection value;
after the second temperature value is determined, the controller inside the MEMS sensor controls the operating temperature of the micro-heater to be converted to the second temperature value, that is, a temperature value having a detection sensitivity higher than that of the first temperature value, and when the detection sensitivity is increased, the corresponding operating temperature is also increased, so that the operating temperature is increased, preferably, the micro-heater is controlled to operate at the operating temperature corresponding to the highest detection sensitivity, for example, 390 ℃ of the position B in fig. 3, and after a response time at the temperature, a corresponding detection value, that is, the second detection value, can be output to the outside, where the detection value represents a concentration value at the operating temperature or directly outputs a corresponding actual concentration value. The second detection value is accurate with respect to the first detection value and is outputted as an actual detection value of the gas. Therefore, the detection value is higher than the first detection value of the prior art which only works at the first temperature, and if the second temperature value corresponds to the highest sensitivity, the accuracy of the corresponding second detection value is obviously improved.
And step S50, controlling the MEMS sensor to work at a first temperature value.
When the MEMS sensor works at a high temperature value, the power consumption of the MEMS sensor is obviously improved, and the low power consumption requirement of application equipment is not facilitated, so that the sensor works at a second temperature value to detect a relatively accurate second detection value, and then the internal micro-heater is controlled to work at a first temperature value with relatively low temperature, so that the power consumption of the gas sensor is reduced, and the power consumption of the whole application equipment is further reduced to meet the low power consumption requirement. It should be noted that, in the process from step S10 to this step, the time that elapses is mainly the response time for the micro-heater to heat to the corresponding operating temperature and for outputting the corresponding detection value, and the whole operating process can be performed in milliseconds, that is, tens or hundreds of milliseconds.
In this embodiment, the MEMS sensor first controls the micro-heater therein to operate at a first temperature value, and obtains a corresponding first detection value, and then determines to obtain a second temperature value according to the first detection value, where the detection sensitivity corresponding to the second temperature value is higher than the detection sensitivity corresponding to the first temperature value, and the second temperature value is greater than the first temperature value, and then the MEMS sensor controls the micro-heater therein to operate at the second temperature value, and obtains the corresponding second detection value as a current actual detection value, and finally controls the micro-heater to operate back to the first temperature value. The invention takes the second detection value detected by the MEMS sensor working at the second temperature value with high sensitivity as the detection value of the actual gas, so the detection value accuracy is higher than that of the detection value which is only working at a constant temperature in the prior art, meanwhile, because the MEMS sensor returns to the original first temperature value with relatively low after acquiring the second detection value at the second temperature value, the power consumption can be controlled within an allowable range, and the low power consumption requirement of the application equipment is considered, therefore, the embodiment of the invention can improve the detection value accuracy under the requirement of taking into account the low power consumption in comparison with the prior art.
Further, referring to fig. 4, fig. 4 is a second embodiment of the gas detection method of the MEMS sensor of the present invention, and the first embodiment of the gas detection method of the MEMS sensor further includes, after step S50:
step S60, acquiring a third detection value currently detected by the MEMS sensor;
step S70, judging whether the third detection value is the same as the first detection value, and continuing to execute step S50 when the third detection value is the same as the first detection value; when the third detection value is different from the first detection value, execution returns to step S20.
After the MEMS sensor controls the micro heater in the MEMS sensor to work again at the first temperature value, the MEMS sensor continuously acquires a detection value, namely a third detection value, and judges whether the detection value is the same as the first detection value or not, if the detection value is the same as the first detection value, the current gas state, namely the concentration is not changed, so that the MEMS sensor does not need to work again at a second higher temperature value, and the current first lower temperature value is maintained, so that the working power consumption of the MEMS sensor can be further reduced; however, when the third detection value is different from the first detection value, it is indicated that the current gas concentration has changed, so it can be known from fig. 3 that when the gas concentration has changed, the corresponding sensitivity and temperature curve are also different, for example, if the third detection value becomes 2ppm, the corresponding curve is changed from L1 to L2 unlike 1ppm of the first detection value, at this time, the temperature value with relatively high sensitivity needs to be re-determined, so it is necessary to return to execute step S20 to re-determine the second temperature value with relatively high sensitivity, and to continue to execute the subsequent steps to re-obtain the detection value with relatively high accuracy and output the detection value as the actual value.
It should be noted that, in this embodiment, when determining whether the third detection value is the same as the first detection value, the third detection value may be obtained multiple times and compared with the first detection value, so that the determination result can be obtained more accurately.
In the embodiment, a third detection value corresponding to the MEMS sensor working at the first temperature value is continuously obtained, and is compared with the previous first detection value to determine whether the third detection value is the same, if the third detection value is the same, it is indicated that the current gas concentration does not change and does not need to work at the higher-sensitivity working temperature again, and if the third detection value is not the same, it is indicated that the gas concentration changes, it is necessary to return to the previous step to determine the second temperature value again and control the sensor to work at the higher-sensitivity temperature value again, and the corresponding detection value is obtained and output as the actual detection. The embodiment of the invention can further determine whether to adjust the working temperature of the MEMS sensor according to whether the gas concentration changes, so that the power consumption of the MEMS sensor can be further reduced.
Further, referring to fig. 5, fig. 5 is a third embodiment of a gas detection method of a MEMS sensor according to the present invention, and fig. 5 is the first embodiment of the gas detection method of the MEMS sensor, in this embodiment, a flow rate sensor is further integrated in the MEMS sensor, and after step S30, the method further includes:
step S80, acquiring a flow rate value detected by a flow rate sensor;
step S90, judging whether the flow rate of the gas exceeds a preset range;
when the flow rate of the gas is smaller than the preset threshold value, executing step S40;
and S100, when the flow rate of the gas is greater than a preset threshold value, not outputting a second detection value and giving prompt information.
In this embodiment, a flow rate sensor is further integrated inside the MEMS sensor, and is configured to detect a gas flow condition inside the gas sensor package, and the controller may acquire current gas flow rate data through the flow rate sensor. Because the accuracy of detection is affected if the flow rate of gas detected in the current gas sensor is too high, a threshold value can be determined through experiments, and if the flow rate of gas detected in the current gas sensor is over the threshold value, the current other flow rates are considered to be too high, so that the detected value of the concentration of the gas detected at present is inaccurate, and the detected value is not output as an output value; if the detected value does not exceed the threshold value, the detected value is considered to be accurate and is output as an actual detected value. After the step S43 or S44 is completed, the step S50 is continued to operate the MEMS sensor at the first temperature value to reduce the power consumption of the MEMS sensor.
Further, referring to fig. 6, fig. 6 is a fourth embodiment of the gas detection method of the MEMS sensor of the present invention, the first embodiment of the gas detection method of the MEMS sensor, in this embodiment, the MEMS sensor further includes a humidity sensor integrated therein, and before step S40, the method further includes:
s110, acquiring an environment humidity value of the MEMS sensor;
step S120, correcting the second detection value according to the environmental humidity value;
step S40 further includes:
and step S130, outputting the corrected second detection value as the current actual detection value.
In this embodiment, a humidity sensor is further integrated inside the MEMS sensor, the humidity sensor may be located outside the temperature field formed by the micro-heater, and detect the ambient humidity in real time, that is, detect the humidity of the background environment outside the temperature field formed by the micro-heater, and the controller corrects the second detection value after obtaining the humidity value of the background environment. Specifically, a fitting formula may be constructed based on the magnitude of the humidity value, and the magnitude of the humidity value in the fitting formula affects the correction coefficient value, so as to correct the second detection value, so that the finally output detection value representing the gas concentration is more accurate.
The present invention also provides a MEMS sensor 100, as shown in fig. 7, the MEMS sensor 100 including: a basic detection component 10, a temperature sensor 20, a controller 30, a memory 70 and an application 60.
Wherein the basic detecting component 10 includes a micro-heater, a detecting electrode, etc. integrated inside the MEMS sensor 100, and a detecting parameter of the gas can be outputted through the basic detecting component 10, such as a voltage signal representing other concentration levels can be outputted directly through the detecting electrode. Also integrated within the MEMS sensor 100 is a temperature sensor 20 that can directly or indirectly measure the actual temperature on the gas sensor electrodes. The controller 30 may control the micro-heater of the basic sensing part 10 to operate, and may obtain a sensing voltage signal value through the sensing electrode of the basic sensing part 10. The memory 70 stores an application 60 that is operable on the controller 30, and the memory 70 may also store other parameters. Of course, the memory 70 may also be disposed within the controller 30, with the memory integrated within the processing chip of the controller 30.
Further, MEMS sensor 100 also includes an internally integrated flow rate sensor 40, humidity sensor 50, and output interface 80. Wherein the flow sensor 40 is used for detecting the gas flow condition in the gas sensor package, and the controller 30 can obtain the current gas flow rate data through the flow sensor 40. The humidity sensor 50 is used to detect the humidity of the background environment outside the temperature field formed by the micro-heater. The output interface 80 is an interface for outputting the detection value to the outside by the MEMS sensor 100, and the output mode thereof can directly output the detection signal value such as a voltage value; or the detection signal value is converted into a gas concentration value to be output through the controller 30, and other circuits of the application equipment can read the concentration value data based on a communication mode.
The controller 30, when executing the application 60, implements the MEMS sensor 100 based gas detection method provided in the above-described embodiment.
For example, the application 60 may be used to execute the instructions of the gas detection method based on the MEMS sensor 100 in the following steps:
step S10, acquiring a first detection value detected when the MEMS sensor 100 works at a first temperature value;
step S20, determining a second temperature value according to the first detection value, wherein the detection sensitivity corresponding to the second temperature value is higher than the detection sensitivity corresponding to the first temperature value;
step S30, controlling the MEMS sensor 100 to operate at a second temperature value and obtaining a second detected value obtained by detection;
step S40, outputting the second detection value as the current actual detection value;
step S50, controlling the MEMS sensor 100 to operate at the first temperature value.
The present invention further provides a computer readable storage medium 200, as shown in fig. 8, the computer readable storage medium 200 of the present invention includes an application 60 used in conjunction with the MEMS sensor 100, and the application 60 can be executed by the controller 30 to implement the gas detection method based on the MEMS sensor 100 according to any of the above embodiments of the present invention.
For example, the application 60 may be used to execute the instructions of the gas detection method based on the MEMS sensor 100 in the following steps:
step S10, acquiring a first detection value detected when the MEMS sensor 100 works at a first temperature value;
step S20, determining a second temperature value according to the first detection value, wherein the detection sensitivity corresponding to the second temperature value is higher than the detection sensitivity corresponding to the first temperature value;
step S30, controlling the MEMS sensor 100 to operate at a second temperature value and obtaining a second detected value obtained by detection;
step S40, outputting the second detection value as the current actual detection value;
step S50, controlling the MEMS sensor 100 to operate at the first temperature value.
It should be noted that the computer-readable storage medium 200 may be a storage medium built in the MEMS sensor 100, or may be a storage medium that is provided outside the MEMS sensor 100 and can be read by communicating with the MEMS sensor 100 in a wired or wireless manner.
In describing embodiments of the present invention, it should be noted that any process or method descriptions in flow charts or otherwise described herein may be understood as representing modules, segments, or portions of code which include one or more executable instructions for implementing specific logical functions or steps of the process, and that the scope of the preferred embodiments of the present invention includes additional implementations in which functions may be executed out of order from that shown or discussed, including substantially concurrently or in reverse order, depending on the functionality involved, as would be understood by those reasonably skilled in the art of the present invention.
The logic and/or steps represented in the flowcharts or otherwise described herein, such as an ordered listing of executable instructions that can be considered to implement logical functions, can be embodied in any computer-readable medium for use by or in connection with an instruction execution system, apparatus, or device, such as a computer-based system, processing module-containing system, or other system that can fetch the instructions from the instruction execution system, apparatus, or device and execute the instructions. For the purposes of this description, a "computer-readable medium" can be any means that can contain, store, communicate, propagate, or transport the program for use by or in connection with the instruction execution system, apparatus, or device. More specific examples (a non-exhaustive list) of the computer-readable medium would include the following: an electrical connection (electronic device) having one or more wires, a portable computer diskette (magnetic device), a Random Access Memory (RAM), a read-only memory (ROM), an erasable programmable read-only memory (EPROM or flash memory), an optical fiber device, and a portable compact disc read-only memory (CDROM). Additionally, the computer-readable medium could even be paper or another suitable medium upon which the program is printed, as the program can be electronically captured, via for instance optical scanning of the paper or other medium, then compiled, interpreted or otherwise processed in a suitable manner if necessary, and then stored in a computer memory.
The above description is only a preferred embodiment of the present invention, and not intended to limit the scope of the present invention, and all modifications of equivalent structures and equivalent processes, which are made by using the contents of the present specification and the accompanying drawings, or directly or indirectly applied to other related technical fields, are included in the scope of the present invention.
Claims (8)
1. A gas detection method of a mems sensor, the mems sensor having a temperature sensor integrated therein, the temperature sensor being configured to detect an operating temperature inside the mems sensor, the gas detection method comprising:
step S10, acquiring a first detection value detected when the micro-electro-mechanical system sensor works at a first temperature value;
step S20, determining a second temperature value according to the first detection value, wherein the detection sensitivity corresponding to the second temperature value is higher than the detection sensitivity corresponding to the first temperature value;
step S30, controlling the micro-electro-mechanical system sensor to work at the second temperature value and acquiring a second detected value obtained by detection;
step S40, outputting the second detection value as the current actual detection value;
step S50, controlling the micro-electro-mechanical system sensor to work at the first temperature value;
the step S50 is followed by:
step S60, acquiring a third detection value currently detected by the micro-electro-mechanical system sensor;
step S70, determining whether the third detection value is the same as the first detection value,
when the third detection value is the same as the first detection value, continuing to perform step S50;
when the third detection value is different from the first detection value, the execution returns to step S20.
2. The gas detection method of a mems sensor as recited in claim 1, wherein said step S20 specifically comprises:
step S21, obtaining a detection value and sensitivity mapping relation corresponding to the first detection value, and obtaining a preset sensitivity value in the detection value and sensitivity mapping relation;
and step S22, acquiring a second temperature value corresponding to the preset sensitivity value in the mapping relation between the detection value and the sensitivity.
3. The gas detection method of a mems sensor as recited in claim 2, wherein the preset sensitivity value is a maximum sensitivity value in the detection value and sensitivity mapping relationship.
4. The gas detection method of the mems sensor as recited in claim 1, wherein a flow rate sensor is further integrated inside the mems sensor, and the step S30 is followed by further comprising:
step S80, acquiring a flow velocity value detected by the flow velocity sensor;
step S90, judging whether the flow rate value exceeds a preset threshold value;
when the flow rate value is smaller than the preset threshold value, the step S40 is executed;
and S100, outputting prompt information when the flow rate of the gas is greater than the preset threshold value.
5. The gas detection method of the mems sensor as recited in claim 1, wherein a humidity sensor is further integrated inside the mems sensor, and the step S40 is preceded by:
step S110, acquiring an environment humidity value of the micro-electro-mechanical system sensor;
step S120, correcting the second detection value according to the environmental humidity value;
the step S40 further includes:
and step S130, outputting the corrected second detection value as the current actual detection value.
6. The gas detection method of a mems sensor according to any one of claims 1 to 5, wherein the step S40 further includes:
and converting the second detection value into a gas concentration value and outputting the gas concentration value.
7. A mems sensor, comprising:
a basic detection part;
a temperature sensor;
a flow rate sensor;
a humidity sensor;
a controller;
an output interface;
a memory; and
application program of a gas detection method of a micro-electromechanical system sensor, wherein the application program is stored in the memory, the application program implementing the steps of the gas detection method of a micro-electromechanical system sensor according to any of claims 1 to 6.
8. A computer-readable storage medium, characterized in that the computer-readable storage medium stores an application program of a gas detection method of a mems sensor, the application program implementing the steps of the gas detection method of the mems sensor according to any one of claims 1 to 6.
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| CN201710457067.1A CN107064436B (en) | 2017-06-15 | 2017-06-15 | Gas detection method for micro-electromechanical system sensor, sensor and storage medium |
| PCT/CN2017/113401 WO2018227892A1 (en) | 2017-06-15 | 2017-11-28 | Gas detection method for micro-electro-mechanical system sensor, sensor and storage medium |
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| JP2882974B2 (en) * | 1993-06-30 | 1999-04-19 | 財団法人国際超電導産業技術研究センター | Nitrogen oxide detection sensor |
| JP2007322355A (en) * | 2006-06-05 | 2007-12-13 | Hitachi Ltd | Gas sensor and gas detection system |
| JP4974304B2 (en) * | 2007-10-29 | 2012-07-11 | 日本特殊陶業株式会社 | Sensor control device |
| EP2105733A1 (en) * | 2008-03-26 | 2009-09-30 | Micronas GmbH | Method for measuring the concentration of a gas |
| DE102009047354A1 (en) * | 2009-12-01 | 2011-06-09 | Robert Bosch Gmbh | Method and control device for detecting a gas concentration of a gas from a gas mixture |
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| CN102645578A (en) * | 2011-02-18 | 2012-08-22 | 上海诚佳电子科技有限公司 | Automatic simulation calibrating method and device for sensor |
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| CN104034759B (en) * | 2014-06-04 | 2016-09-07 | 苏州能斯达电子科技有限公司 | A kind of MEMS semiconductor gas sensor and manufacture method thereof and gas detection method |
| CN105466452B (en) * | 2015-11-20 | 2019-02-19 | 中船重工西安东仪科工集团有限公司 | MEMS sensor combines output temperature drift_flux model and tests measuring method |
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