CN107064436A - Gas detection method, sensor and the storage medium of MEMS sensor - Google Patents
Gas detection method, sensor and the storage medium of MEMS sensor Download PDFInfo
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Abstract
The invention discloses a kind of gas detection method of MEMS sensor, gas sensor and computer read/write memory medium, the gas detection method includes：The micro-heater that MEMS sensor controls it internal first is operated in the first temperature value, and obtain the first detected value that detection is obtained, determine to obtain second temperature value then according to the first detected value, here second temperature is worth corresponding detection sensitivity and is higher than the corresponding detection sensitivity of the first temperature value, second temperature value is more than the first temperature value, then the micro-heater that MEMS sensor controls it internal is operated in second temperature value, and gas detection method of the invention can improve the accuracy of detected value under the requirement for taking into account low-power consumption compared with the prior art.
Description
Technical field
The present invention relates to MEMS sensor detection field, more particularly to a kind of gas detection method of MEMS sensor, gas
Body sensor and computer read/write memory medium.
Background technology
MEMS (Micro-Electro-Mechanical System, MEMS) sensor is increasingly subject to sensor
Producer and popular concern, the various MEMS sensors based on micro-heater are gradually attempted on electronic product, to improve
Miniaturization, ease for use and the intelligent demand of electronic product.Existing its sensitivity of MEMS sensor generally existing is floated with temperature
Move phenomenon, in working sensor more than its internal micro-heater heating is controlled using steady temperature, thus can not obtain automatically not
With the sensitive condition of work of concentration, therefore there is a situation where that sensitivity is in poor and influences it to detect the standard of output valve during detection
True property.
The above is only used for auxiliary and understands technical scheme, does not represent and recognizes that the above is existing skill
Art.
The content of the invention
It is a primary object of the present invention to provide a kind of gas detection method of MEMS sensor, gas sensor and calculating
Machine read/write memory medium, it is intended to when solving existing MEMS sensor detection gas parameter, because its sensor internal is used
The inaccurate problem of detection that steady temperature heating tape is come.
To achieve the above object, the gas detection method for a kind of MEMS sensor that the present invention is provided, the gas detection
Method includes：
Step S10, the acquisition MEMS sensor detect the first obtained detected value when being operated in the first temperature value；
Step S20, determine second temperature value according to first detected value, the corresponding detection of the second temperature value is sensitive
Degree is higher than the corresponding detection sensitivity of first temperature value；
Step S30, the control MEMS sensor are operated in the second temperature value and obtain the second inspection that detection is obtained
Measured value；
Step S40, output second detected value are current actually detected value；
Step S50, the control MEMS sensor are operated in first temperature value.
It is preferred that, the step S20 is specifically included：
Step S21, the corresponding detected value of acquisition first detected value and sensitivity mapping relations, obtain the detected value
With the default Sensitirity va1ue in sensitivity mapping relations；
The corresponding second temperature value of Sensitirity va1ue is preset in step S22, the acquisition detected value and sensitivity mapping relations.
It is preferred that, it is the maximum in the detected value and sensitivity mapping relations that the second temperature, which is worth corresponding sensitivity,
Sensitirity va1ue.
It is preferred that, also include after the step S50：
The 3rd detected value that step S60, the acquisition MEMS sensor current detection are obtained；
Step S70, judge whether the 3rd detected value is identical with first detected value,
When the 3rd detected value is identical with first detected value, step S50 is continued executing with；
When the 3rd detected value is different from first detected value, returns and perform step S20.
It is preferred that, also include after also integrated flow sensor, the step S30 inside the MEMS sensor：
The flow speed value that step S80, the acquisition flow sensor detection are obtained；
Step S90, judge flow speed value whether exceed pre-set threshold value；
When the flow velocity of gas is less than the pre-set threshold value, the step S40 is performed；
Step S100, when gas flow velocity be more than the pre-set threshold value when, export prompt message.
It is preferred that, also include before Integrated Humidity Sensor, the step S40 are gone back inside the MEMS sensor：
Step S110, the ambient humidity for obtaining the MEMS sensor work；
Step S120, according to environmental wet angle value second detected value is modified；
The step S40 also includes：
Step S130, output revised second detected value are current actually detected value.
It is preferred that, the step S40 also includes：
Second detected value is carried out being converted into gas concentration value and exported.
To achieve the above object, the present invention also provides a kind of MEMS sensor, and the MEMS sensor includes：
Temperature sensor；
Flow sensor；
Humidity sensor；
Controller；
Output interface；
Memory；And
The application program of the gas detection method of MEMS sensor, wherein the application program is stored in the memory
In, the step of application program realizes the gas detection method of described MEMS sensor.
To achieve the above object, the present invention also provides a kind of computer read/write memory medium, the embodied on computer readable
Storage medium be stored with MEMS sensor gas detection method application program, the application program realizes that described MEMS is passed
The step of gas detection method of sensor.
The gas detection method for the MEMS sensor that the present invention is provided, MEMS sensor controls its internal micro- heating first
Device is operated in the first temperature value, and obtains corresponding first detected value, determines to obtain second temperature then according to the first detected value
Value, second temperature here is worth corresponding detection sensitivity higher than the corresponding detection sensitivity of the first temperature value, second temperature value
More than the first temperature value, the micro-heater that then MEMS sensor controls it internal is operated in second temperature value, gas of the invention
Body detecting method can improve the accuracy of detected value under the requirement for taking into account low-power consumption compared with the prior art.
Brief description of the drawings
Fig. 1 is the schematic flow sheet of the first embodiment of the gas detection method of MEMS sensor of the present invention；
Fig. 2 is the relation schematic diagram of heating-up temperature, sensitivity and the test limit of MEMS sensor；
Fig. 3 is the detection sensitivity and operating temperature relation schematic diagram under gas with various concentration；
Fig. 4 is the schematic flow sheet of the second embodiment of the gas detection method of MEMS sensor of the present invention；
The schematic flow sheet of the 3rd embodiment of the gas detection method of Fig. 5 MEMS sensors of the present invention；
The schematic flow sheet of the fourth embodiment of the gas detection method of Fig. 6 MEMS sensors of the present invention；
The high-level schematic functional block diagram of Fig. 7 MEMS sensors of the present invention；
Fig. 8 is MEMS sensor of the present invention and the connection diagram of computer-readable recording medium.
Embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is carried out clear, complete
Site preparation is described, it is clear that described embodiment is only a part of embodiment of the present invention, rather than whole embodiments.Base
Embodiment in the present invention, those of ordinary skill in the art obtained under the premise of creative work is not made it is all its
His embodiment, belongs to the scope of protection of the invention.
It is to be appreciated that the description for being related to " first ", " second " etc. in the present invention is only used for describing purpose, without being understood that
To indicate or implying its relative importance or the implicit quantity for indicating indicated technical characteristic.Thus, define " first ",
At least one this feature can be expressed or be implicitly included to the feature of " second ".In the description of embodiments of the present invention,
" multiple " are meant that two or more, unless otherwise specifically defined.In addition, the technology between each embodiment
Scheme can be combined with each other, but must can be implemented as basis with those of ordinary skill in the art, when the knot of technical scheme
It will be understood that the combination of this technical scheme is not present, also not in application claims when conjunction appearance is conflicting or can not realize
Within protection domain.
Fig. 1 is the schematic flow sheet figure of the gas detection method of the MEMS sensor according to the embodiment of the present invention, with reference to figure
1, the gas detection method of the MEMS sensor comprises the following steps:
Step S10, obtains when MEMS sensor is operated in the first temperature value and detects the first obtained detected value；
Temperature sensor is integrated with MEMS sensor design, preferable temperature sensor material is Pt, and tolerable high temperature adds
Heat, design for temperature sensor position can be formed in the region in temperature field in micro-heater, can directly or indirectly measure gas
Actual temperature on sensor electrode.The integrated said temperature sensor construction of MEMS sensor is prior art, can be according to public affairs
The MEMS sensor structure design known is recognized.
MEMS sensor also includes the controller being internally integrated, and can control micro-heater work, in MEMS sensor work
When detecting gas parameter value, controller control micro-heater heating, and by temperature sensor detector heating-up temperature, make its work
Make temperature control in an initial temperature value, this initial temperature value is an empirical value, is determined according to previous experiments, difference detection
Its empirical value of gas may be different, after temperature field is heated to initial temperature value by micro-heater, by a response time, control
Device processed by interlock circuit obtain gas sensors electrode on magnitude of voltage, i.e. the first detected value, this magnitude of voltage is current gas
Parameter value, its size illustrates the size of its concentration, and the general response time, this detection process also might be used in the range of a few tens of milliseconds
To be recognized by known technology.
Further, MEMS sensor in the course of the work can the directly for example above-mentioned magnitude of voltage of output detection value as expression
In gas concentration value, the equipment of now MEMS sensor application, the MCU of its equipment is read after the detected value that expires, and is converted into numeral
Amount carries out internal conversion again, corresponding gas concentration value can be such as obtained by formula or the list data of storage inside such as with
Ppm is the concentration value of unit.Certainly due to also including controller inside MEMS sensor, its controller can also itself conversion
Concentration value is obtained to communicate output to application apparatus, needs to increase data processing due to being related to switch process, this is to controller
It is required that improving.
Step S20, second temperature value is determined according to the first detected value, and second temperature is worth corresponding detection sensitivity higher than the
The corresponding detection sensitivity of one temperature value；
By understanding the characteristic of existing MEMS sensor it is recognised that sensitivity and the gas sensor interior work of its detection
There are much relations as temperature, sensitivity here refers to for same gas concentration, gas sensor is exported under different temperatures
Parameter values for detection it is of different sizes, such as above-mentioned magnitude of voltage is different, and when sensitivity is higher, the magnitude of voltage of output is higher, due to defeated
The noise figure of interference is contained in the waveform voltage signal gone out, if the magnitude of voltage of output is bigger, the signal to noise ratio of relative noise
Higher therefore easier and noise figure is distinguished, and more distinguishes the corresponding detected value of different concentration, therefore obtained testing result
It is more accurate.It is horizontal to sit in the relation schematic diagram of the heating-up temperature of MEMS sensor as shown in Figure 2 a kind of, sensitivity and test limit
Mark represents the changing value of heating-up temperature value, and the ordinate in left side represents the changing value of test limit, and right side ordinate represents sensitivity
Changing value, test limit here refers to the corresponding ginseng of least concentration that MEMS sensor can be detected under a certain operating temperature
Numerical value, if the least concentration that can be detected is lower, i.e. the performance of the smaller explanation sensor of test limit is better.It can be seen in figure
Go out, when the heating-up temperature of MEMS sensor is that operating temperature is higher, its L1 curve is that detection limit value is smaller, and L2 curves are spirit
Sensitivity value is higher, for a MEMS sensor, if sensitivity is higher and detection limit value is smaller, illustrates that its performance is better,
The gas concentration parameters value accuracy that can be detected is higher.But if when the operating temperature of MEMS sensor is higher, its power consumption
Also it is bigger, and also influence its device operational lifetime, this to it is many apply at present with battery powered miniaturized electronic product such as
It is very unfavorable on mobile or smart machine, because it requires that part power consumption is more low better, the power consumption of whole product can be reduced with this,
Extend its battery working time.Therefore in actual applications, it is impossible to allow MEMS sensor to be operated in very high temperature, usually pin
The moderate relative low temperature angle value of a comparison is selected empirical value, is advisable so that rational detection parameter can be exported.
But MEMS sensor of the prior art is only operated in a stationary temperature value, it is impossible to meet gas various dense
The consistent requirement of the accuracy of degree, particularly when in the case of low concentration, the parameter values for detection that it is exported is small, the influence of its level of noise
The accuracy of its detected value.
In view of the above-mentioned problems, in the second step S20 of the present embodiment, initial temperature i.e. the first temperature is operated according to above-mentioned
The lower detected value obtained of value determines second temperature value, and second temperature here is worth corresponding detection sensitivity than the first temperature value
Corresponding detection sensitivity is high.I.e. MEMS sensor formerly controls temperature sensor to be operated in after the first initial temperature value and obtain
Obtain after the first detected value, may proceed to be worth to second temperature value according to the first detection, be specifically：According to the inquiry pair of the first detected value
The detected value and sensitivity mapping table answered, obtain corresponding highly sensitive angle value；Corresponding spirit is inquired about according to highly sensitive angle value
Sensitivity and temperature map relation table, obtain second temperature value.
In detection sensitivity and operating temperature relation schematic diagram under gas with various concentration as shown in Figure 3, curve L1-L5
Represent certain corresponding detection sensitivity (ordinate) of detection gas under various concentrations with operating temperature (abscissa) respectively
1-5ppm gas concentration correspondence change curve is represented in change curve, figure respectively.For certain gas concentration here is accurate
It is a value range close to nominal value, is not exact value, because the detection parameter that different sensitivity is measured is different, correspondence
Concentration value can be variant.The curvilinear motion rule that this figure is represented can be acquired by experiment.Such as current MEMS sensor work
The initial temperature value of work is the corresponding temperature value of A dotted lines in 315 DEG C, i.e. figure, when detecting parameter for 1ppm corresponding concentration parameters,
1ppm homologous thread L1 are now determined, its detection sensitivity is A dotted lines and L1 intersection point i.e. X1 positions, has figure may know that, now
Detection sensitivity compare relatively low, therefore other can be obtained according to this curve with respect to its corresponding temperature of big detection sensitivity
Angle value is second temperature value.It is 350 DEG C that second temperature value, which can such as be taken, by figure it is known that its corresponding detection sensitivity value ratio
X1 positions are corresponding big.Further by will also realize that the operating temperature under corresponding maximum detection sensitivity at this concentration in figure
X2 positions are peak response in value, such as figure, and its operating temperature is B points position, is a temperature value close to 400 DEG C, is such as had
Body is 390 DEG C., can be by advance in the memory of controller because the curvilinear motion rule in figure can be acquired by experiment
Other corresponding highly sensitive angle value of the concentration value worked under initial temperature are prestored, that is, store detected value and sensitivity mapping
Relation table and sensitivity and temperature map relation table, preferably can store the temperature value of corresponding peak response, if
Sensor can at this temperature can be if normal work, naturally it is also possible to store other lower temperature of relative maximum sensitivity
Value, these temperature values can allow sensor long-term work more to be stablized due to relatively low；So reflected by obtaining detected value and sensitivity
Penetrate relation table, you can to obtain the i.e. relative first detected value correspondence of corresponding default sensitivity sensitive to be called according to the first detected value
The big Sensitirity va1ue of degree, the corresponding temperature value of big sensitivity can be finally given by then inquiring about sensitivity and temperature map relation table
That is second temperature value.
Step S30, control MEMS sensor is operated in second temperature value and obtains the second detected value that detection is obtained；
Step S40, the second detected value of output is current actually detected value；
After second temperature value is determined, the controller control micro-heater operating temperature inside MEMS sensor is transformed into
Second temperature value, i.e., the temperature value that corresponding detection sensitivity detection sensitivity corresponding with respect to the first temperature value will be big,
When being improved due to detection sensitivity, its corresponding operating temperature is also improved, therefore to improve operating temperature, preferably can control micro-
Heater is operated in 390 DEG C of the B location in the corresponding operating temperature of highest detection sensitivity, such as Fig. 3, at this temperature equally
By a response time, corresponding detected value i.e. the second detected value can be externally exported, the detected value illustrates the operating temperature
Under concentration value or directly export corresponding actual concentrations value.Second detected value is accurate with respect to the first detected value, with this
Exported as the actually detected value of the gas.Therefore the detected value compared with the prior art only work at the first temperature first
Detected value is high, if it is maximum sensitivity that second temperature value is corresponding, and corresponding second detected value accuracy improves bright
It is aobvious a lot.
Step S50, control MEMS sensor is operated in the first temperature value.
When being operated in due to MEMS sensor under high temperature value, its power consumption is obviously improved, and is unfavorable for the low work(of application apparatus
Consumption is required, therefore working sensor is detected in second temperature value after the second relatively accurate detected value, then controls the micro- of inside
Heater is operated in the first relatively low temperature value of temperature, reduces the power consumption of gas sensor with this and then reduce whole application setting
Standby power consumption is to meet low-power consumption requirement.What deserves to be explained is, it is above-mentioned from step S10 into this step process, undergone when
Between mainly micro-heater be heated to correspondence operating temperature and the response time to export corresponding detected value, typically all in milli
Second level, i.e., be executable completion whole work process by tens or up to a hundred milliseconds.
In the present embodiment, the micro-heater that MEMS sensor controls it internal first is operated in the first temperature value, and obtains
Corresponding first detected value is taken, determines to obtain second temperature value then according to the first detected value, second temperature value correspondence here
Detection sensitivity be higher than the corresponding detection sensitivity of the first temperature value, second temperature value is more than the first temperature value, then MEMS
The micro-heater that sensor controls it internal is operated in second temperature value, and obtains corresponding second detected value as current reality
Border detected value, finally controls micro-heater work to return to the first temperature value.Because the present invention is to be operated in height with MEMS sensor
The second detected value detected under the second temperature value of sensitivity is as the detected value of real gas, therefore its detected value degree of accuracy
It is higher than the detected value being only operated under a steady temperature compared with the prior art, simultaneously as MEMS sensor is
Get and returned after the second detected value under original the first relatively low temperature value under two temperature values, its power consumption can be controlled in fair
Perhaps in the range of, the low-power consumption requirement of application apparatus has been taken into account, therefore the embodiment of the present invention can take into account low work(compared with the prior art
The accuracy of detected value is improved under the requirement of consumption.
Further, with reference to Fig. 4, Fig. 4 is the second embodiment of the gas detection method of MEMS sensor of the present invention, MEMS
The gas detection method first embodiment of sensor, in the present embodiment, also includes after step S50：
The 3rd detected value that step S60, acquisition MEMS sensor current detection are obtained；
Step S70, judge whether the 3rd detected value is identical with the first detected value, when the 3rd detected value and the first detected value phase
Meanwhile, continue executing with step S50；When the 3rd detected value is different from the first detected value, returns and perform step S20.
MEMS sensor is controlling the work of the micro-heater inside it to rework after the first temperature value, continues to obtain inspection
Measured value is the 3rd detected value, by judging whether the detected value is identical with the first detected value, if the same thinks current gas
Body state is that concentration does not change, therefore need not remove to allow working sensor again again in higher second temperature value,
The the first relatively low temperature value that currently compares is maintained, the operating power consumption of MEMS sensor so can be further reduced；And
When the 3rd detected value is different from the first detected value, illustrate that current gas concentration is changed, therefore can know by Fig. 3
Road, when gas concentration changes, its corresponding sensitivity and temperature curve are also different, if for example the 3rd detected value becomes
2ppm, different with the 1ppm of the first detected value, corresponding curve has changed to L2 by L1, now needs to redefine sensitivity phase
To high temperature value, it is therefore desirable to return and perform step S20 and redefine the higher second temperature value of new remolding sensitivity, and after
The continuous subsequent step that performs is to regain the degree of accuracy high detected value relatively and be exported as actual value.
What deserves to be explained is, in the present embodiment, when judging the 3rd detected value and whether identical the first detected value, Ke Yishi
Compared by repeatedly obtaining the 3rd detected value with the first detected value, so can more be accurately obtained judged result.
Corresponding 3rd detected value when the present embodiment is operated in the first temperature value by continuing acquisition MEMS sensor, and with
Whether identical the first detected value before compares, and if the same illustrates that current gas concentration does not change without task again
In the operating temperature of higher sensitivity, illustrate that gas concentration changes, it is necessary to the step of before returning again if differing
It is secondary to determine second temperature value and control working sensor again in sensitivity high temperature value relatively, and obtain corresponding detected value
Exported with this as actually detected value.Scheme of the embodiment of the present invention can be determined further directed to whether gas concentration changes
The operating temperature of MEMS sensor whether is adjusted, its power consumption so can be further reduced.
Further, with reference to Fig. 5, Fig. 5 is the 3rd embodiment of the gas detection method of MEMS sensor of the present invention, MEMS
The gas detection method first embodiment of sensor, in the present embodiment, also integrated flow sensor inside MEMS sensor, step
Also include after rapid S30：
The flow speed value that step S80, acquisition flow sensor detection are obtained；
Step S90, judge gas flow velocity whether exceed preset range；
When the flow velocity of gas is less than pre-set threshold value, step S40 is performed；
Step S100, when gas flow velocity be more than pre-set threshold value when, the second detected value is not exported, and provide prompt message.
In the present embodiment, also integrated flow sensor inside MEMS sensor, for detecting in gas sensor encapsulation
Gas mobility status, controller can get current gas flow speed data by flow sensor.Because if current gas
When the flow velocity of detection gas is too fast in sensor, then the accuracy of detection can be influenceed, a valve can be determined especially by experiment
Value, if it exceeds threshold values, then it is assumed that other current flow velocitys are too fast so that the gas concentration detected value currently measured is inaccurate,
This detected value is not exported as output valve；If being not above threshold values, just think that this detected value is accurate and output is done
For actually detected value.After execution of step S43 or S44, to reduce the power consumption of MEMS sensor, step is all continued executing with
S50 is to allow MEMS sensor to be operated in the first temperature value.
Further, with reference to Fig. 6, Fig. 6 is the fourth embodiment of the gas detection method of MEMS sensor of the present invention, MEMS
The gas detection method first embodiment of sensor, in the present embodiment, goes back Integrated Humidity Sensor inside MEMS sensor, step
Also include before rapid S40：
Step S110, the ambient humidity for obtaining MEMS sensor work；
Step S120, according to environmental wet angle value the second detected value is modified；
Step S40 also includes：
Step S130, revised second detected value of output are current actually detected value.
In the present embodiment, Integrated Humidity Sensor is gone back inside MEMS sensor, humidity sensor can be located at micro-heater institute
Formed outside temperature field, ambient humidity is detected in real time, that is, detect the background ring that micro-heater is formed outside temperature field
The humidity in border, controller is modified after the humidity value of background environment is got to the second detected value.Can be specifically
The size of humidity value has influence on correction factor value in big little structure fitting formula based on humidity value, fitting formula, is come pair with this
Second detected value is modified so that the detected value of the sign gas concentration finally exported is more accurate.
The present invention also proposes a kind of MEMS sensor 100, as shown in fig. 7, MEMS sensor 100 includes：Basic test section
Part 10, temperature sensor 20, controller 30, memory 70 and application program 60.
Wherein basic detection part 10 includes being integrated in the portions such as micro-heater, the detecting electrode inside MEMS sensor 100
Part, can represent other by detection parameter such as direct can be exported by detecting electrode of the basic output gas of detection part 10
The voltage signal of concentration.The inside of MEMS sensor 100 also integrated temperature sensor 20, can directly or indirectly measure gas biography
Actual temperature on sensor electrode.Controller 30 can control the micro-heater work of basic detection part 10, and can be by basic
The detecting electrode of detection part 10 obtains detectable voltage signals value.Memory 70 is stored with the application that can be run on a controller 30
Program 60, memory 70 can also store other parameters.Certain holder 70 can also be arranged within controller 30, controlled
The process chip of device 30 has been internally integrated memory.
Further, MEMS sensor 100 also includes flow sensor 40, the humidity sensor 50 and defeated being internally integrated
Outgoing interface 80.Wherein flow sensor 40 is used to detect the gas mobility status in gas sensor encapsulation, and controller 30 can be with
Current gas flow speed data is got by flow sensor 40.Humidity sensor 50 is used to detect that micro-heater forms temperature
The humidity of background environment outside.Output interface 80 is the interface that MEMS sensor 100 externally exports detected value, and it is exported
Mode can directly export detected signal value such as magnitude of voltage；Or detected signal value is converted into gas concentration by via controller 30
Value output, now other circuits of application apparatus can read concentration Value Data based on the mode of communication.
Controller 30 realizes the gas based on MEMS sensor 100 provided in above-described embodiment when performing application program 60
Detection method.
For example, application program 60 can be used for performing the gas detection method based on MEMS sensor 100 in following steps
Instruction：
Step S10, obtains when MEMS sensor 100 is operated in the first temperature value and detects the first obtained detected value；
Step S20, second temperature value is determined according to the first detected value, and second temperature is worth corresponding detection sensitivity higher than the
The corresponding detection sensitivity of one temperature value；
Step S30, control MEMS sensor 100 is operated in second temperature value and obtains the second detected value that detection is obtained；
Step S40, the second detected value of output is current actually detected value；
Step S50, control MEMS sensor 100 is operated in the first temperature value.
The present invention also proposes a kind of computer read/write memory medium 200, as shown in figure 8, the meter of embodiment of the present invention
Calculation machine read/write memory medium 200, including the application program 60 being used in combination with MEMS sensor 100, application program 60 can quilt
Controller 30 performs the gas detection method based on MEMS sensor 100 for completing any of the above-described embodiment of the invention.
For example, application program 60 can be used for performing the gas detection method based on MEMS sensor 100 in following steps
Instruction：
Step S10, obtains when MEMS sensor 100 is operated in the first temperature value and detects the first obtained detected value；
Step S20, second temperature value is determined according to the first detected value, and second temperature is worth corresponding detection sensitivity higher than the
The corresponding detection sensitivity of one temperature value；
Step S30, control MEMS sensor 100 is operated in second temperature value and obtains the second detected value that detection is obtained；
Step S40, the second detected value of output is current actually detected value；
Step S50, control MEMS sensor 100 is operated in the first temperature value.
It is pointed out that computer read/write memory medium 200 can be the storage being built in MEMS sensor 100
Medium or it is arranged on outside MEMS sensor 100 and can be led to based on wired or wireless mode and MEMS sensor 100
Interrogate the storage medium that can be read.
, it is necessary in explanation, flow chart or described otherwise above herein in the description of embodiments of the present invention
Any process or method description be construed as, expression includes one or more for realizing specific logical function or mistake
Module, fragment or the part of the code of the executable instruction of the step of journey, and the scope bag of the preferred embodiment of the present invention
Include other realization, wherein can not by order that is shown or discussing, including according to involved function by it is basic simultaneously
Mode or in the opposite order, carrys out perform function, this should be managed by embodiments of the invention person of ordinary skill in the field
Solution.
Represent in flow charts or logic and/or step described otherwise above herein, for example, being considered use
In the order list for the executable instruction for realizing logic function, it may be embodied in any computer-readable medium, for
Instruction execution system, device or equipment (such as computer based system including the system of processing module or other can be from instruction
The system of execution system, device or equipment instruction fetch and execute instruction) use, or combine these instruction execution systems, device or
Equipment and use.For the purpose of this specification, " computer-readable medium " can any can be included, store, communicating, propagating
Or transmission procedure uses for instruction execution system, device or equipment or with reference to these instruction execution systems, device or equipment
Device.The more specifically example (non-exhaustive list) of computer-readable medium includes following：With one or more wirings
Electrical connection section (electronic installation), portable computer diskette box (magnetic device), random access memory (RAM), read-only storage
(ROM), erasable edit read-only storage (EPROM or flash memory), fiber device, and portable optic disk is read-only deposits
Reservoir (CDROM).In addition, can even is that can be in the paper of printing described program thereon or other are suitable for computer-readable medium
Medium because can for example by carrying out optical scanner to paper or other media, then enter edlin, interpretation or if necessary with
Other suitable methods are handled electronically to obtain described program, are then stored in computer storage.
The preferred embodiments of the present invention are these are only, are not intended to limit the scope of the invention, it is every to utilize this hair
Equivalent structure or equivalent flow conversion that bright specification and accompanying drawing content are made, or directly or indirectly it is used in other related skills
Art field, is included within the scope of the present invention.
Claims (9)
1. a kind of gas detection method of MEMS sensor, the MEMS sensor is internally integrated TEMP
Device, the temperature sensor is used to detect the operating temperature inside the MEMS sensor, it is characterised in that the gas
Body detecting method includes：
Step S10, the acquisition MEMS sensor detect the first obtained detected value when being operated in the first temperature value；
Step S20, determine second temperature value according to first detected value, it is high that the second temperature is worth corresponding detection sensitivity
In the corresponding detection sensitivity of first temperature value；
Step S30, the control MEMS sensor are operated in the second temperature value and obtain second for detecting and obtaining
Detected value；
Step S40, output second detected value are current actually detected value；
Step S50, the control MEMS sensor are operated in first temperature value.
2. the gas detection method of MEMS sensor as claimed in claim 1, it is characterised in that the step S20
Specifically include：
Step S21, the corresponding detected value of acquisition first detected value and sensitivity mapping relations, obtain the detected value and spirit
Default Sensitirity va1ue in sensitivity mapping relations；
The corresponding second temperature value of Sensitirity va1ue is preset in step S22, the acquisition detected value and sensitivity mapping relations.
3. the gas detection method of MEMS sensor as claimed in claim 2, it is characterised in that described default sensitive
Spend for the peak response value in the detected value and sensitivity mapping relations.
4. the gas detection method of MEMS sensor as claimed in claim 1, it is characterised in that the step S50
Also include afterwards：
The 3rd detected value that step S60, the acquisition MEMS sensor current detection are obtained；
Step S70, judge whether the 3rd detected value is identical with first detected value,
When the 3rd detected value is identical with first detected value, step S50 is continued executing with；
When the 3rd detected value is different from first detected value, returns and perform step S20.
5. the gas detection method of MEMS sensor as claimed in claim 1, it is characterised in that the micro-electro-mechanical systems
Also include after the system also integrated flow sensor of sensor internal, the step S30：
The flow speed value that step S80, the acquisition flow sensor detection are obtained；
Step S90, judge the flow speed value whether exceed pre-set threshold value；
When the flow speed value is less than the pre-set threshold value, the step S40 is performed；
Step S100, when gas flow velocity be more than the pre-set threshold value when, export prompt message.
6. the gas detection method of MEMS sensor as claimed in claim 1, it is characterised in that the micro-electro-mechanical systems
Also include before system sensor internal also Integrated Humidity Sensor, the step S40：
Step S110, the ambient humidity for obtaining the MEMS sensor work；
Step S120, according to the environmental wet angle value second detected value is modified；
The step S40 also includes：
Step S130, output revised second detected value are current actually detected value.
7. the gas detection method of the MEMS sensor as described in any one of claim 1 to 6, it is characterised in that institute
Stating step S40 also includes：
Second detected value is carried out being converted into gas concentration value and exported.
8. a kind of MEMS sensor, it is characterised in that the MEMS sensor includes：
Temperature sensor；
Flow sensor；
Humidity sensor；
Controller；
Output interface；
Memory；And
The application program of the gas detection method of MEMS sensor, wherein the application program is stored in the storage
In device, the application program realizes the gas detection side of the MEMS sensor as any one of claim 1 to 7
The step of method.
9. a kind of computer read/write memory medium, it is characterised in that the computer read/write memory medium is stored with microcomputer
The application program of the gas detection method of electric system sensor, the application program is realized such as any one of claim 1 to 7 institute
The step of gas detection method for the MEMS sensor stated.
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| CN201710457067.1A CN107064436B (en) | 2017-06-15 | 2017-06-15 | Gas detection method for micro-electromechanical system sensor, sensor and storage medium |
| PCT/CN2017/113401 WO2018227892A1 (en) | 2017-06-15 | 2017-11-28 | Gas detection method for micro-electro-mechanical system sensor, sensor and storage medium |
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| WO2018227892A1 (en) * | 2017-06-15 | 2018-12-20 | 广东美的制冷设备有限公司 | Gas detection method for micro-electro-mechanical system sensor, sensor and storage medium |
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| CN107064436B (en) | 2020-04-03 |
| WO2018227892A1 (en) | 2018-12-20 |
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