CN107045361A - Double-loop temperature control module and electronic element testing equipment with same - Google Patents

Double-loop temperature control module and electronic element testing equipment with same Download PDF

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Publication number
CN107045361A
CN107045361A CN201611035746.1A CN201611035746A CN107045361A CN 107045361 A CN107045361 A CN 107045361A CN 201611035746 A CN201611035746 A CN 201611035746A CN 107045361 A CN107045361 A CN 107045361A
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CN
China
Prior art keywords
temperature
loop
working fluid
switching valve
supply
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Granted
Application number
CN201611035746.1A
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Chinese (zh)
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CN107045361B (en
Inventor
吴信毅
骆建宏
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Chroma ATE Inc
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Chroma ATE Inc
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851Testing of integrated circuits [IC]
    • G01R31/2855Environmental, reliability or burn-in testing
    • G01R31/2872Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation
    • G01R31/2874Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation related to temperature
    • G01R31/2875Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation related to temperature related to heating
    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05DSYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D23/00Control of temperature
    • G05D23/19Control of temperature characterised by the use of electric means
    • G05D23/20Control of temperature characterised by the use of electric means with sensing elements having variation of electric or magnetic properties with change of temperature
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28HEAT EXCHANGE IN GENERAL
    • F28DHEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
    • F28D15/00Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851Testing of integrated circuits [IC]
    • G01R31/2855Environmental, reliability or burn-in testing
    • G01R31/2872Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation
    • G01R31/2874Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation related to temperature
    • G01R31/2877Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation related to temperature related to cooling
    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05DSYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D23/00Control of temperature
    • G05D23/19Control of temperature characterised by the use of electric means
    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05DSYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D23/00Control of temperature
    • G05D23/19Control of temperature characterised by the use of electric means
    • G05D23/1919Control of temperature characterised by the use of electric means characterised by the type of controller
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25BREFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B21/00Machines, plants or systems, using electric or magnetic effects
    • F25B21/02Machines, plants or systems, using electric or magnetic effects using Peltier effect; using Nernst-Ettinghausen effect
    • F25B21/04Machines, plants or systems, using electric or magnetic effects using Peltier effect; using Nernst-Ettinghausen effect reversible
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25BREFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B2321/00Details of machines, plants or systems, using electric or magnetic effects
    • F25B2321/02Details of machines, plants or systems, using electric or magnetic effects using Peltier effects; using Nernst-Ettinghausen effects
    • F25B2321/021Control thereof
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25BREFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B2321/00Details of machines, plants or systems, using electric or magnetic effects
    • F25B2321/02Details of machines, plants or systems, using electric or magnetic effects using Peltier effects; using Nernst-Ettinghausen effects
    • F25B2321/021Control thereof
    • F25B2321/0212Control thereof of electric power, current or voltage
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25BREFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B2321/00Details of machines, plants or systems, using electric or magnetic effects
    • F25B2321/02Details of machines, plants or systems, using electric or magnetic effects using Peltier effects; using Nernst-Ettinghausen effects
    • F25B2321/025Removal of heat
    • F25B2321/0252Removal of heat by liquids or two-phase fluids

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Environmental & Geological Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • General Engineering & Computer Science (AREA)
  • Toxicology (AREA)
  • Health & Medical Sciences (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Automation & Control Theory (AREA)
  • Thermal Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Control Of Temperature (AREA)

Abstract

The invention relates to a double-loop temperature control module and electronic element testing equipment with the same, wherein a first working fluid with a first temperature flows in a first loop, a second working fluid with a second temperature flows in a second loop, a controller controls a first switching valve to enable the first working fluid or the second working fluid to flow through a temperature adjusting control, and controls a second switching valve to enable the working fluid flowing through the temperature adjusting control to flow back to the first loop or the second loop. Therefore, the thermoelectric cooling element can be adjusted to two different reference temperatures by the temperature adjusting part heated or cooled by the working fluid, and the thermoelectric cooling element can provide a larger temperature difference range and more accurate temperature adjustment and control for the element to be detected based on the reference temperatures so as to facilitate high and low temperature detection.

Description

Double loop temperature control modules and the electronic components test equipment for possessing the module
Technical field
The present invention relates to a kind of double loop temperature control modules and possesses the electronic components test equipment of the module, particularly A kind of temperature control modules and electronic components test equipment for providing and quickly and significantly switching high/low temperature detection temperature are provided.
Background technology
For currently available technology, the technology phase of the bigger temperature detection range of electronic component detection equipment can be assigned When rare, for example, low temperature detection and high temperature test can be handled simultaneously.
U.S. Patent Application Publication No. 2015/0007973A1 discloses one kind " wide area temperature control equipment " (WIDE RANGE OF TEMPERATURE CONTROL EQUIPMENT), there is disclosed the modulation that temperature is provided with thermoelectric cooling module, And the fiducial temperature of the thermoelectric cooling module is provided with heat-conducting plate, so that thermoelectric cooling module is based on the fiducial temperature, carry out more Accurate and larger range of temperature adjusting.However, in above-mentioned patent application, being utilized respectively heating unit and cooling element coming The regulation and control of fiducial temperature are carried out to the heat-conducting plate, wherein heating unit is the heating coil being embedded in heat-conducting plate, and cool down member Part is then the cooling device being additional in addition on heat-conducting plate, the cooling being for example made up of evaporator, compressor and condenser Equipment.
Furthermore, for the technological means disclosed in above-mentioned patent document, when carrying out high/low temperature change detection, for example When heat-conducting plate is in -40 DEG C of state, and after the completion of low-temperature test, it is necessary to by heating unit heats to high temperature (such as 80 DEG C), To carry out high temperature test.However, the transfer process of whole high/low temperature is relatively slow, and if each element under test is set It is set to and carries out high/low temperature test in same board, will be so repeated continuously and heat-conducting plate is heated up and cooled, and not only delay Whole test time-histories, and its heating unit and cooling device will also expend the substantial amounts of energy.
The content of the invention
It is a primary object of the present invention to provide a kind of double loop temperature control modules, rapidly to switch at least two Individual temperature range, allows temperature adjusting part to carry out the conversion between different temperatures, and its transfer process in a short period of time Caused energy loss is very low.
To reach above-mentioned purpose, double loop temperature control modules of the invention mainly include:First loop, second servo loop, Temperature adjusting part, the first switching valve, the second switching valve and controller.Flowing has first with the first temperature in first loop Flowing has the second working fluid with second temperature in working fluid, second servo loop;And temperature adjusting part include entrance and Outlet;First switching valve is connected with the entrance in the first loop, second servo loop and temperature adjusting part;Second switching valve with first time The outlet on road, second servo loop and temperature adjusting part;Controller and the first switching valve and the second switching valve are electrically connected with. Wherein, controller controls the first switching valve at least one of the first working fluid and the second working fluid is flowed through temperature adjusting Part is to carry out temperature adjusting to it, and the second switching valve of control flows through the first working fluid and the second work of temperature adjusting part At least one of fluid is back at least one of the first loop and second servo loop.
Accordingly, the present invention controls the first switching valve and the second switching valve by controller, so switch the first loop or Second servo loop or allotment be somebody's turn to do the two, the first working fluid, the second working fluid or the fluid-mixing of the two is come to temperature Degree regulation piece is heated up or cooled.
Even more preferably, double loop temperature control modules of the invention may also include cooling device, and it may be disposed at first Loop simultaneously is used to cool down the first working fluid.In other words, the first working fluid can be cooled down by cooling device is set up, The working fluid of low temperature is provided with profit.
In addition, the first loop of the double loop temperature control modules of the present invention may also include first fluid source of supply, it is used In first working fluid of the supply with the first temperature, and first fluid source of supply may include the first supply opening and the first backflow Mouthful;And cooling device may be disposed at first fluid source of supply;Wherein, the first switching valve is communicated to the first of first fluid source of supply Supply opening, the second switching valve is communicated to the first refluxing opening of first fluid source of supply.Accordingly, the present invention can be supplied by first fluid Answer source and more low temperature and the more stable working fluid of state of temperature are provided.
Even more preferably, double loop temperature control modules of the invention may also include heat abstractor, and it is arranged at second time Road, and for being radiated to the second working fluid.In other words, can by set up heat abstractor come to the second working fluid carry out Radiating, state of temperature more stable normal temperature working fluid is provided with profit.
Furthermore, double loop temperature control modules of the invention may also include heater, and it may be disposed at second servo loop simultaneously For being heated to the second working fluid.In other words, the second working fluid can be heated by heater is set up, The working fluid of high temperature is provided with profit.
Also, the second servo loop of the double loop temperature control modules of the present invention may also include second fluid source of supply, it is used for Second working fluid of the supply with second temperature, and second fluid source of supply includes the second supply opening and the second refluxing opening; And heater is arranged at second fluid source of supply;Wherein, the first switching valve is communicated to the second supply of second fluid source of supply Mouthful, the second switching valve is communicated to the second refluxing opening of second fluid source of supply.Accordingly, the present invention can be by second fluid source of supply And working fluid at higher temperature and more stable state of temperature is provided.
Further, double loop temperature control modules of the invention may also include pump, and it is electrically connected to controller, and sets It is placed between the first switching valve and temperature adjusting part.Accordingly, the present invention can drive the first working fluid and second by pump Working-fluid flow.
In addition, another main purpose of the present invention is to provide a kind of electronic component for possessing double loop temperature control modules Test equipment, can provide the fiducial temperature that at least two temperature spreads are big, enables thermoelectric cooling element to be based on the fiducial temperature Bigger temperature difference scope and more accurate temperature adjusting are provided to element under test, is detected with the high/low temperature that profit carries out electronic component.
To reach above-mentioned purpose, the electronic components test equipment for possessing double loop temperature control modules of the invention is mainly wrapped Include:Foregoing double loop temperature control modules and thermoelectric cooling element.Thermoelectric cooling element is electrically connected to controller, and with Temperature adjusting part is contacted.Wherein, temperature adjusting part adjustable heat electric refrigerating element is to fiducial temperature, and controller can control thermoelectricity Cooling element is based on fiducial temperature to carry out temperature adjusting to element under test.
Accordingly, the electronic components test equipment for possessing double loop temperature control modules of the invention can be by double loop temperature Control module carrys out the temperature of modulation temperature adjusting part, and the temperature will constitute fiducial temperature, makes thermoelectric cooling element in benchmark temperature On the basis of degree, further expand the scope of temperature adjusting and the detection temperature of element under test is more accurately provided.
Even more preferably, the electronic components test equipment for possessing double loop temperature control modules of the invention may also include survey Fixture is tried, it is contacted with thermoelectric cooling element, and element under test is loaded into test fixture.In other words, thermoelectric cooling element pair Test fixture carries out temperature adjusting, and when being tested, element under test is placed in test fixture, therefore the test of the present invention Fixture can build the test environment of a variety of different temperatures.On the other hand, the present invention can also make not using test fixture as necessity The direct contact measured element of thermoelectric cooling element, makes thermoelectric cooling element directly carry out temperature adjusting to element under test.
Furthermore, the electronic components test equipment for possessing double loop temperature control modules of the invention may also include temperature sensing Unit, it is electrically connected to controller, and for measuring the temperature of test fixture.That is, the present invention can be by temperature sensing list Member senses the temperature of test fixture, is controlled with the feedback that supply controller enters trip temperature, so that more accurate control element under test Detection temperature.
Brief description of the drawings
Fig. 1 is the system framework figure of first embodiment of the invention.
Fig. 2 is the schematic diagram of first embodiment of the invention.
Schematic diagram when Fig. 3 A run for the first loop in first embodiment of the invention.
Schematic diagram when Fig. 3 B run for second servo loop in first embodiment of the invention.
Fig. 4 is the system framework figure of second embodiment of the invention.
Fig. 5 is the schematic diagram of second embodiment of the invention.
Embodiment
The present invention double loop temperature control modules and possess the electronic components test equipment of the module in the present embodiment Before being described in detail, it is important to note that in the following description, similar element will carry out table with identical component symbol Show.Furthermore, accompanying drawing of the invention is only as schematically illustrate, and it is not necessarily drawn to scale, and all details also may not be all presented In accompanying drawing.
Please refer to Fig. 1, Fig. 2, Fig. 1 possesses the electronic components test equipment of double loop temperature control modules for the present invention The system framework figure of first embodiment, Fig. 2 is the electronic components test equipment for possessing double loop temperature control modules of the invention The schematic diagram of first embodiment.As shown in FIG., the double loop temperature control modules of the present embodiment mainly include the first loop 11, Second servo loop 12, first fluid source of supply 2, heat abstractor 30, the first switching valve 4, the second switching valve 5, temperature adjusting part 6 and Controller 7.
Wherein, being flowed in the first loop 11 has the first working fluid F1 with the first temperature T1, and the first working fluid F1 is supplied by first fluid source of supply 2.Also, first fluid source of supply 2 includes cooling device 20, and it is used for cooling first Working fluid F1, is allowed to be maintained at the first temperature T1;And the cooling device 20 of the present embodiment can be general fluid cooling device, The cooling device being for example made up of compressor, condenser, expansion valve and evaporator.
In other words, first fluid source of supply 2 provides the first working fluid F1 of low temperature, to carry out low-temperature test.In addition, First fluid source of supply 2 includes the first workflow in the first supply opening 21 and the first refluxing opening 22, that is, the first loop 11 Body F1 flows out from the first supply opening 21, and flows back to first fluid source of supply 2 from the first refluxing opening 22, is circulated so as to constituting.
Furthermore, flowing has the second working fluid F2 with second temperature T2 in second servo loop 12, and in second servo loop 12 Heat abstractor 30 is installed, it is used to radiate to the second working fluid F2, is allowed to be maintained at second temperature T2.The present embodiment Heat abstractor 30 can for general air cooling, water cooling or it is other it is any form of can with normal temperature air carry out heat exchange radiator. In other words, the heat abstractor 30 of the present embodiment can provide the first working fluid F1 of normal temperature state.
In addition, the first working fluid F1 used in the present embodiment and the second working fluid F2 can be general low temperature resistant molten Liquid, the non-freezing solution such as known to methanol, ethanol, ethylene glycol, propyl alcohol, propane diols;Or made by water, antifreezing agent, additive mixing Into.Moreover, can be divided into Alcohol type, glycerol type and ethylene glycol type coolant according to antifreeze component difference, and ethylene glycol type is cooled down Liquid is spent glycol as antifreezing agent, and adds the composite additives such as a small amount of anti-foaming, anticorrosion.
In addition, temperature adjusting part 6 is the subject matter being adjusted in the double loop temperature control modules of the present embodiment, it includes Entrance 61 and outlet 62, and the inside of temperature adjusting part 6 of the present embodiment includes snakelike passage (not shown), the passage Both ends are entrance 61 and outlet 62.But, the present invention is not limited with internal serpentine channel, also can be other pipeline forms Or other arbitrary heat exchanger forms are replaced in the way of attaching on temperature adjusting part 6 or being built in temperature adjusting part 6.
Again as shown in FIG., the first switching valve 4 and the second switching valve 5 can be controlled by controller 7 for the magnetic valve of threeway.Its In, the first switching valve 4 is communicated to the first supply opening 21, heat abstractor 30 and the temperature adjusting part 6 of first fluid source of supply 2 Entrance 61;Also, the first refluxing opening 22, heat abstractor 30 and temperature that the second switching valve 5 is communicated to first fluid source of supply 2 are adjusted The outlet 62 of control 6.
Moreover, as shown in FIG., pump 9 is arranged between the first switching valve 4 and temperature adjusting part 6, and is electrically connected to control Device 7 processed.In other words, controller 7 can be with the operating of controlling pump 9, and pushes by pump 9 work of first working fluid F1 or second Fluid F2 flows in loop, circulated.
Furthermore, the controller 7 of the present embodiment is electrically connected to the first switching valve 4 and the second switching valve 5 again.Wherein, control Device 7 controls the first switching valve 4 to make the first working fluid F1 or the second working fluid F2 flow through temperature adjusting part 6 to carry out temperature to it Degree regulation and control, and the second switching valve 5 of control flows through the first working fluid F1 or the second working fluid F2 backflow of temperature adjusting part 6 To the first loop 11 or second servo loop 12.
And shown in as shown in Figure 1, Figure 2, the electronic components test equipment of the present embodiment is except including above-mentioned double loop temperature Outside control module, in addition to thermoelectric cooling element 8 (Thermo-Electric Cooler, TEC), test fixture 81, temperature sense Survey unit 82 and pump 9.Wherein, thermoelectric cooling element 8 is electrically connected to controller 7, and is directly contacted with temperature adjusting part 6. However, the temperature adjusting part 6 of the present embodiment is used to adjust thermoelectric cooling element 8 to fiducial temperature, and controller 7 is then control heat Electric refrigerating element 8 is based on fiducial temperature to carry out element under test C wider and more accurate temperature adjusting.
In other words, the running theoretical foundation of thermoelectric cooling element 8 used in the present embodiment is to utilize Pi Teer effects (Peltier Effect), this is a kind of pyroelectric effect, can cause side temperature by the heat transmission of the element side to opposite side Degree reduction, the rise of opposite side temperature;Side is absorbed heat, and to opposite side heat release.In general, the knot of thermoelectric cooling element 8 Structure is mutually to be concatenated arrangement by some to N-type and P-type semiconductor crystal grain and formed, and after energization, the P-type semiconductor will be inhaled Heat, and N-type semiconductor will heat release, therefore just there is heat to be delivered to other side by side " heat absorbing end " in each N/P unit " release end of heat ", to complete the transmission of heat.Accordingly, the present embodiment utilizes this effect, when high temperature to be carried out or low-temperature test, Temperature adjusting part 6 will adjust thermoelectric cooling element 8 to fiducial temperature, and the temperature adjusting part 6 will be constantly from thermoelectric cooling member Part 8, which takes away heat or provides heat, gives thermoelectric cooling element 8, to maintain the fiducial temperature.
On the other hand, test fixture 81 is used to load element under test C, such as test jack (socket), and thermoelectric cooling Element 8 is is mounted directly on test fixture 81, therefore thermoelectric cooling element 8 can be heated up or be cooled to test fixture 81, and then The detection environment of specified temp (high temperature, normal temperature or low temperature) is built, element under test C is entered in the state of the specified temp Row test.In addition, the present embodiment also separately sets temperature sensing unit 82, it is electrically connected to controller 7, temperature sensing unit 82 It is mainly used in measuring the temperature of test fixture 81.That is, Temperature Quantity measured value of the present embodiment by temperature sensing unit 82 Feedback, controller 7 is carried out more accurate temperature control to thermoelectric cooling element 8.
What is particularly worth mentioning is that, controller 7 is responsible for the control of all electronic devices in the present embodiment, including first cuts The components such as valve 4, the second switching valve 5, cooling device 20, thermoelectric cooling element 8 and pump 9 are changed, and control element under test C's whole The progress of test.But, the present invention is not limited thereto, and separate members can also possess respective controller, such as cooling device 20 controller is full-time in controlling its operating, the first working fluid F1 is maintained at the first temperature T1.
Signal when being run please refer to Fig. 3 A and Fig. 3 B, Fig. 3 A for the first loop 11 in first embodiment of the invention Figure, schematic diagram when Fig. 3 B run for second servo loop 12 in first embodiment of the invention.Illustrate the running stream of the present embodiment below Journey, illustrates low-temperature test first, and second servo loop 12, i.e. the first switching valve 4 and the second switching valve 5 are closed in the wherein control of controller 7 Close respectively and be communicated to the runner of heat abstractor 30, and open the first supply opening 21 for being communicated to first fluid source of supply 2 and the The runner of one refluxing opening 22, so as to constitute circulation loop, as shown in fig. 3.
However, due to the first working fluid F1 in the first loop 11 to be cooled down through apparatus for supercooling 20, therefore low temperature is presented, The present embodiment is illustrated exemplified by -20 DEG C.Accordingly, after the first working fluid F1 of low temperature flows through temperature adjusting part 6, its Chilling temperature regulation piece 6, is allowed to equally be maintained at -20 DEG C.Accordingly, the fiducial temperature for giving thermoelectric cooling element 8 just can be provided For -20 DEG C, but according to the characteristic of thermoelectric cooling element 8, its temperature that -40 DEG C to+80 DEG C can be provided in fiducial temperature is adjusted Become, in other words, the temperature range that can be precisely controlled is -60 DEG C to 60 DEG C.
Furthermore, after element under test C completes low-temperature test, immediately into high temperature test.Wherein, the control of controller 7 is closed First loop 11, i.e. the first switching valve 4 and the second switching valve 5 are closed respectively is communicated to the runner of first fluid source of supply 2, and opens The runner for being communicated to heat abstractor 30 is opened, so as to constitute circulation loop, as shown in Figure 3 B.
However, due to when the second working fluid F2 in second servo loop 12 flows through temperature adjusting part 6, by script through first time Road 11 is cooled down and the temperature adjusting part 6 in low-temperature condition is rapidly warming up to normal temperature, and through the running of heat abstractor 30 Also it can be continuously kept in normal temperature, the present embodiment is illustrated exemplified by 25 DEG C.Accordingly, when the second working fluid F2 of low temperature flows After temperature adjusting part 6, it makes the temperature adjusting part 6 of cooling be maintained at 25 DEG C.Accordingly, second servo loop 12 just can provide and give thermoelectricity The fiducial temperature of cooling element 8 is 25 DEG C;In other words, under this loop, the Range of measuring temp that controller 7 can be precisely controlled For -15 DEG C to 105 DEG C.
Furthermore, by taking the present embodiment as an example, the test temperature of high and low temperature is respectively -40 DEG C and 85 DEG C, and when from first time When road 11 switches to second servo loop 12, i.e., 85 DEG C of high temperature test are warming up to from -40 DEG C of low-temperature test, actual test only consumes Take about 64 seconds.In other words, whole temperature-rise period is about rapidly heated with 2 DEG C per second of speed.On the other hand, when from second servo loop 12 When switching to the first loop 11, i.e., -40 DEG C of low-temperature test are cooled to from 85 DEG C of high temperature test, actual test also only expends About 117 seconds.In other words, whole temperature-fall period is with the speed fast cooling per second more than 1 DEG C.Accordingly, it should be apparent that, it is high and low Temperature test can quickly be changed on same board, without being transported to other boards, need not more expend very long heating or drop The stand-by period of temperature, and the loss that will greatly save the energy.
Please refer to Fig. 4 and Fig. 5, Fig. 4 is the electronic components test for possessing double loop temperature control modules of the invention The system framework figure of equipment second embodiment, Fig. 5 is the electronic components test for possessing double loop temperature control modules of the invention The schematic diagram of equipment second embodiment.The present embodiment is that the present embodiment can be provided with aforementioned first embodiment Main Differences The high temperature test of higher temperature.
Further illustrate, as shown in FIG., the present embodiment, which is mainly, normal temperature working fluid is provided in first embodiment Heat abstractor 30 is substituted for second fluid source of supply 3 and its internal heater 33 included.Wherein, second fluid source of supply 3 include the second supply opening 31 and the second refluxing opening 32, that is, the second working fluid F2 systems in second servo loop 12 supply from second Mouth 31 flows out, and flows back to second fluid source of supply 3 from the second refluxing opening 32, is circulated so as to constituting.
However, the present embodiment can provide work at higher temperature and more stable state of temperature by second fluid source of supply 3 The heater 33 of fluid, wherein the present embodiment is used to heat up to the second working fluid F2, and thermoelectric cooling member is given to provide The higher fiducial temperature of part 8, allows thermoelectric cooling element 8 to build test environment at higher temperature.
Above-described embodiment is illustrated only for conveniently explanation, and the interest field that the present invention is advocated should be wanted with right certainly Ask protected scope to be defined, rather than be only limitted to above-described embodiment.
Symbol description
11 first loops
12 second servo loops
2 first fluid sources of supply
20 cooling devices
21 first supply openings
22 first refluxing openings
3 second fluid sources of supply
30 heat abstractors
31 second supply openings
32 second refluxing openings
33 heaters
4 first switching valves
5 second switching valves
6 temperature adjusting parts
61 entrances
62 outlets
7 controllers
8 thermoelectric cooling elements
81 test fixtures
82 temperature sensing units
9 pumps
C element under tests
The working fluids of F1 first
The working fluids of F2 second
The temperature of T1 first
T2 second temperatures.

Claims (10)

1. a kind of double loop temperature control modules, including:
- the first loop, flowing has the first working fluid with the first temperature in it;
- second servo loop, flowing has the second working fluid with second temperature in it;
- temperature adjusting part, it is included an inlet and an outlet;
- the first switching valve, it is communicated to the entrance in first loop, the second servo loop and the temperature adjusting part;
- the second switching valve, it is communicated to the outlet in first loop, the second servo loop and the temperature adjusting part;And
- controller, it is electrically connected to first switching valve and second switching valve;
Wherein, the controller controls first switching valve to make at least one of first working fluid and second working fluid The temperature adjusting part is flowed through to carry out it temperature adjusting, and control second switching valve flow through the temperature adjusting part this At least one of one working fluid and second working fluid are back at least one in first loop and the second servo loop Person.
2. double loop temperature control modules as claimed in claim 1, it also includes cooling device, and the cooling device is arranged at this First loop simultaneously is used to cool down first working fluid.
3. double loop temperature control modules as claimed in claim 2, wherein, first loop also includes first fluid and supplied Source, it supplies the first working fluid with first temperature, and the first fluid source of supply includes the first supply opening and first time Head piece;The cooling device is arranged at the first fluid source of supply;First switching valve is communicated to the of the first fluid source of supply One supply opening, second switching valve is communicated to the first refluxing opening of the first fluid source of supply.
4. double loop temperature control modules as claimed in claim 1, it also includes heat abstractor, and the heat abstractor is arranged at this Second servo loop simultaneously is used to radiate to second working fluid.
5. double loop temperature control modules as claimed in claim 1, it also includes heater, and the heater is arranged at this Second servo loop simultaneously is used to heat second working fluid.
6. double loop temperature control modules as claimed in claim 5, wherein, the second servo loop also includes second fluid and supplied Source, it supplies the second working fluid with the second temperature, and the second fluid source of supply includes the second supply opening and second time Head piece;The heater is arranged at the second fluid source of supply;First switching valve is communicated to the of the second fluid source of supply Two supply openings, second switching valve is communicated to second refluxing opening of the second fluid source of supply.
7. double loop temperature control modules as claimed in claim 1, it also includes pump, and the pump is electrically connected to the controller, And be arranged between first switching valve and the temperature adjusting part.
8. a kind of electronic components test equipment for possessing double loop temperature control modules, including:
Such as double loop temperature control modules according to any one of claims 1 to 7;And
- thermoelectric cooling element, it is electrically connected to the controller, and is contacted with the temperature adjusting part;
Wherein, the temperature adjusting part is adjusts the thermoelectric cooling element to fiducial temperature, and the controller controls thermoelectric cooling member Part is based on the fiducial temperature to carry out temperature adjusting to element under test.
9. the electronic components test equipment as claimed in claim 8 for possessing double loop temperature control modules, it also includes test Fixture, the test fixture is contacted with the thermoelectric cooling element, and the element under test is loaded into the test fixture.
10. the electronic components test equipment as claimed in claim 9 for possessing double loop temperature control modules, it also includes temperature Sensing unit, the temperature sensing unit is electrically connected to the controller, and for measuring the temperature of the test fixture.
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