CN107041751A - A kind of surface acoustic wave sensor of breathing state detecting system and wireless and passive - Google Patents
A kind of surface acoustic wave sensor of breathing state detecting system and wireless and passive Download PDFInfo
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- CN107041751A CN107041751A CN201710214153.XA CN201710214153A CN107041751A CN 107041751 A CN107041751 A CN 107041751A CN 201710214153 A CN201710214153 A CN 201710214153A CN 107041751 A CN107041751 A CN 107041751A
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- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B5/00—Measuring for diagnostic purposes; Identification of persons
- A61B5/08—Detecting, measuring or recording devices for evaluating the respiratory organs
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- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B5/00—Measuring for diagnostic purposes; Identification of persons
- A61B5/48—Other medical applications
- A61B5/4806—Sleep evaluation
- A61B5/4818—Sleep apnoea
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- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B5/00—Measuring for diagnostic purposes; Identification of persons
- A61B5/68—Arrangements of detecting, measuring or recording means, e.g. sensors, in relation to patient
- A61B5/6801—Arrangements of detecting, measuring or recording means, e.g. sensors, in relation to patient specially adapted to be attached to or worn on the body surface
- A61B5/6813—Specially adapted to be attached to a specific body part
- A61B5/6814—Head
- A61B5/6819—Nose
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- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B5/00—Measuring for diagnostic purposes; Identification of persons
- A61B5/68—Arrangements of detecting, measuring or recording means, e.g. sensors, in relation to patient
- A61B5/6801—Arrangements of detecting, measuring or recording means, e.g. sensors, in relation to patient specially adapted to be attached to or worn on the body surface
- A61B5/683—Means for maintaining contact with the body
- A61B5/6832—Means for maintaining contact with the body using adhesives
- A61B5/6833—Adhesive patches
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/87—Electrodes or interconnections, e.g. leads or terminals
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- Measurement Of The Respiration, Hearing Ability, Form, And Blood Characteristics Of Living Organisms (AREA)
Abstract
The invention discloses a kind of breathing state detecting system and surface acoustic wave sensor, it is related to the measurement apparatus for checking respiratory apparatus, apnea detection system extracts the signal processing unit for the information for characterizing breathing state in including radio-frequency transmissions receiving unit, sensor unit and the feedback signal received from radio-frequency transmissions receiving unit；Sensor unit includes surface acoustic wave sensor, and surface acoustic wave sensor includes piezoelectric base unit and the antenna being connected with radio-frequency transmissions receiving unit wireless telecommunications；Interdigital electrode and surface acoustic wave reflecting grating are installed with piezoelectric base unit, interdigital electrode is electrically connected with antenna.Apnea detection system operatio of the present invention is simple, and the surface acoustic wave sensor of the wireless and passive used is powered and line without power supply, and whole device weight is small, very light, is powered without power supply, more safe and reliable, and suitable family uses.
Description
Technical field
The present invention relates to the measurement apparatus for checking respiratory apparatus, specifically, it is related to a kind of sound table based on wireless and passive
The breathing state detecting system and the surface acoustic wave sensor of wireless and passive of wave sensor.
Background technology
In recent years, breathing sleeping disorders gradually cause the concern and attention of people, and related data shows, adult population
In, the illness rate of breathing sleeping disorders is 2%~4%.China human mortality radix is big, and insomnia population is close to 300,000,000.
OSAS is a kind of most commonly seen breathing sleeping disorders, is whole by the upper respiratory tract
Or partial blockage is caused.Its clinical manifestation is to occur more than 10s interim apnea in sleep procedure.Obstructive sleep
Apnea syndrome can cause the complication such as hypertension, coronary heart disease, diabetes and cranial vascular disease, or even night sudden death occur
Situation, patient due to insomnia cause the state of mind not good, easily occur traffic accident.In order to find early and treat obstructive
OSAS etc. breathes sleeping disorders patient, can carry out apnea detection to body when people sleep.
Apnea detection method generally has：1) it is monitored by classical polysomnogram instrument；2) by full-computerized without
The polysomnogram of paper record is monitored；3) monitored by the EEG signals in sleep procedure, i.e., AEEG is supervised
Survey.But the instrument that these detection modes are used is all very huge, and it is expensive, it is used in examination in hospital more, is not suitable for usually family
Use.
Publication No. CN101822542A patent document discloses a kind of chest and abdomen apnea detector, by piezoelectric ceramic piece beam
Chest is tied to, thoracic cavity volume changes when measurand is breathed, in turn results in the change of piezoelectric ceramic piece surface pressing, piezoelectricity pottery
Pressure signal is converted to electric signal by ceramics, and is exported by wire.Although this method light and flexible many, fixation is carried
Stronger constraint sense, and transmission line also influences whether the activity of measurand.
Publication No. CN101917903A Chinese patent literatures disclose a kind of apnea detector, including：Capacitor type
Sensor, it is adaptable to which (breathing pattern of such as object) detects variable electric capacity, and detector cell from the motion of object,
Communicated with the sensor；The detector cell is used to receive the electric signal from the capacitance type transducers, and the electric signal is
Instruction to the variable capacitance；When the electric signal received indicates the sign of apnea, the detector cell is also used for
Send alarm signal；The detector cell is attached to the clothing of object, such as diaper.The detector is using kind of a capacitive sensing
Device is detected to human body respiration, it is necessary to which battery is powered, in addition it is also necessary to which power supply is powered, and battery electric quantity deficiency easily occurs and does not have
There is timely replacing, cause information not collect.
The content of the invention
The purpose of the present invention is a kind of breathing state detecting system of the surface acoustic wave sensor based on wireless and passive of offer,
While being easy to be monitored breathing state, the influence slept to measurand is reduced；
Another object of the present invention passes to provide a kind of surface acoustic wave of the wireless and passive used suitable for said detecting system
Sensor.
To achieve these goals, the breathing state detecting system that the present invention is provided includes radio-frequency transmissions receiving unit, passed
The signal transacting for the information for characterizing breathing state is extracted in sensor cell and the feedback signal received from radio-frequency transmissions receiving unit
Unit；Sensor unit includes surface acoustic wave sensor, and surface acoustic wave sensor includes piezoelectric base unit and received with radio-frequency transmissions
The antenna of unit wireless communication connection；Interdigital electrode and surface acoustic wave reflecting grating, interdigital electrode and day are installed with piezoelectric base unit
Line is electrically connected.
In above-mentioned technical proposal, due to, as detection sensor, will need to be only somebody's turn to do using the SAW device with antenna
Sensor is attached under the nose of detected person, without providing it power supply and signal connecting line, as wireless and passive, so that in inspection
During survey, by the influence slept to detected person reduction；In addition, the detection is using device volume is small, cost is low, and operation side
Method is simple, and suitable family usually uses；Because the transducer of the sensor interdigital changes for single-ended provided with surface acoustic wave reflecting grating
Energy device, it is high to the caused environmental change detection sensitivity of breathing, and is easy to lift sign breathing state from feedback signal
Information.
Specific scheme is that sensor unit includes that two or more reflecting grating set location is different and/or bar number sound not etc.
Surface wave sensor；Signal processing unit is additionally operable to extract the sound surface for characterizing diverse location and/or bar number from feedback signal
The time-domain information of wave reflection grid.
When reflecting grating quantity different or reflecting grating from the distance between interdigital electrode is different, extracted from feedback signal
Time-domain information it is different, made a distinction so as to the feedback signal to different measurands, you can it is encoded, to realize
Several detected objects are carried out to monitor simultaneously, the equipment cost detected jointly is effectively reduced.
It is preferred that scheme for piezoelectric base unit surface on deposition have one layer of humidity/temperature-sensitive membrane.Plus last layer humidity/temperature
Degree sensitive membrane causes the sensitivity of surface acoustic wave sensor to greatly improve.In order to realize above-mentioned another object, what the present invention was provided
Surface acoustic wave sensor includes piezoelectric base unit and prepares the interdigital electrode on piezoelectric base unit；Also include electrically connecting with interdigital electrode
Antenna；Surface acoustic wave reflecting grating is prepared on piezoelectric base unit.
In above-mentioned technical proposal, reflecting grating is prepared on the piezoelectric base unit with interdigital electrode, by antenna and interdigital electrode
Electrical connection, is carried out in detection process with it as sensor, need to only use radio-frequency readers to transmit to RF pulse signal,
Antenna receives after RF pulse signal and passes to interdigital electrode, then passes to piezoelectric base unit, and piezoelectric base unit produces inverse pressure
Electrical effect and RF pulse signal is converted into surface acoustic wave, it is anti-that the surface acoustic wave propagated in piezoelectric base unit runs into surface acoustic wave
Grid back reflections is penetrated to return, force piezoelectric base unit produce direct piezoelectric effect and by reflected wave conversion into electric signal, i.e. feedback signal, then by
Interdigital electrode passes to antenna and the feedback signal is transferred back into radio-frequency readers by antenna, and radio-frequency readers are entered to feedback signal
Row receives that the detection of wireless and passive can be realized；And piezoelectric base unit surrounding environment change can change resonance frequency in its feedback signal
The information of rate, insertion loss or phase, so as to carry out detection surrounding environment change using it, such as, is fitted in tested pair
Skin below trunk, the respiratory air flow of measurand can change the acoustic signals on piezoelectric base unit, carry acoustic signals
Upper respiration information, it is possible to use its breathing state to measurand is detected.The surface acoustic wave sensor is easy to use, and
Measurand sleep is not influenceed.
Specific scheme is also includes flexible substrate, and piezoelectric base unit is installed on flexible substrate with antenna.
Using flexible substrate, it is easy to fit with measurand underthe nose skin.
Another specific scheme is that surface acoustic wave reflecting grating is the bonding jumper prepared on piezoelectric base unit, and bonding jumper is located at
It is on the propagation path of surface acoustic wave and orthogonal with its direction of propagation.
Another specific scheme is identical with the finger beam of interdigital electrode for the width of surface acoustic wave reflecting grating, the reflection of sound surface
Distance between grid and interdigital electrode is more than stroke of the surface acoustic wave in 0.5 microsecond.
Another specific scheme is that the quantity of surface acoustic wave reflecting grating is more than two, and spacing is more than pressure between adjacent two
The velocity of sound of electric matrix and the product of signal pulsewidth.
Another specific scheme has one layer of humidity/temperature-sensitive membrane for deposition on the surface of piezoelectric base unit.
Plus last layer humidity/temperature-sensitive membrane causes the sensitivity of surface acoustic wave sensor to greatly improve.
Another specific scheme is that piezoelectric base unit is lithium columbate crystal block.
Change obvious as the resonant frequency of the piezoelectric base unit of material using lithium niobate so that surface acoustic wave sensor has
Very high sensitivity.
Compared with prior art, beneficial effects of the present invention are：
The breathing state detection method of surface acoustic wave sensor of the invention based on wireless and passive is simple to operate, is used
Surface acoustic wave sensor is powered and signal wire without power supply, and whole device weight is small, very light, more safe and reliable, is adapted to
Family usually uses.In addition, the flexible wireless and passive sensor ends size used is small, light weight, in test process hardly
Measurand is impacted.
Brief description of the drawings
Fig. 1 is the structured flowchart of breathing state detecting system in the embodiment of the present invention；
Fig. 2 is the surface acoustic wave sensor of wireless and passive in the embodiment of the present invention；
Fig. 3 is the use process schematic of breathing state detecting system in the embodiment of the present invention；
Fig. 4 be the embodiment of the present invention in feedback signal in the case of not sharing a common fate resonant frequency oscillogram, wherein Fig. 4
(a) it is oscillogram under measurand normal breathing conditions, Fig. 4 (b) is ripple in the case of measurand simulated respiration pause syndrome
Shape figure；
Fig. 5 is the waving map figure of two surface acoustic wave sensors of different coding in the embodiment of the present invention, wherein, Fig. 5
(a) it is tim e- domain detection figure that 11111111 surface acoustic wave sensors are encoded to using eight reflecting gratings, Fig. 5 (b) is to utilize seven
Reflecting grating is encoded to the tim e- domain detection figure of 11110111 surface acoustic wave sensors.
Embodiment
With reference to embodiments and its accompanying drawing the invention will be further described.
Embodiment
Referring to Fig. 1 to Fig. 3, the breathing state detecting system 1 of the surface acoustic wave sensor based on wireless and passive includes radio frequency
Launch receiving unit 11, sensor unit 12, signal processing unit 13 and display unit 14.Radio-frequency transmissions receiving unit 11, letter
Number processing unit 13 and display unit 14 are arranged in radio-frequency readers 6, are user-friendly.By radio-frequency readers 6 to
Sensor unit 12 sends RF pulse signal and receives the radiofrequency signal of feedback.Certainly, also can by signal processing unit 13 and
Display unit 14 is separatedly installed with radio-frequency transmissions receiving unit 11, and by wirelessly realizing communication connection, to need according to the observation
Want and be arranged at diverse location.
Sensor unit 12 includes the surface acoustic wave sensor 10 for being affixed on the underthe nose of measurand, surface acoustic wave sensing
Device 10 includes flexible substrate 7, piezoelectric base unit 8, antenna 9, interdigital electrode 4 and prepares 4 reflecting gratings 3 on piezoelectric base unit 8, fork
Refer to electrode 4 to electrically connect with antenna 9, by antenna 9, realize that radio-frequency readers 6 carry out signal transmission with surface acoustic wave sensor 10.
Flexible substrate 7 is polyimides (PI) film of thickness between 60-200 microns, and piezoelectric base unit 8 is lithium niobate
(LiNbO3) crystal block, its length and width is 7 millimeters, and thickness is 0.5 millimeter, and piezoelectric base unit 8 is with the Hybrid assembling of antenna 9 in flexible liner
On bottom 7, by lithography stripping technology, interdigital electrode 4, reflecting grating 3 are prepared on piezoelectric base unit 8, antenna 9 is flat plane antenna, is had
Effect reduces the size and quality of sensor, and the width of reflecting grating 3 is identical with the finger beam of interdigital electrode 4, adjacent two reflecting gratings 3
Between spacing be more than pressure matrix 8 the velocity of sound and signal pulsewidth product, and distance between first reflecting grating and interdigital electrode 4 etc.
Spacing and more than stroke of the surface acoustic wave in 0.5 microsecond.In the present embodiment, the width and spacing of interdigital electrode 4 are 2.28
Micron, the width of surface acoustic wave reflecting grating 3 is also 2.28 microns, between first surface acoustic wave reflecting grating and interdigital electrode 4
Distance is 1mm, and the resonant frequency of the surface acoustic wave sensor of the present embodiment is 433MHz.The present inventor is to the present embodiment
Middle use lithium columbate crystal block is exhaled as the resonant frequency of the surface acoustic wave sensor of piezoelectric base unit in measurand in difference
The contrast carried out under suction state, Fig. 4 (a) is under measurand normal breathing conditions, lithium niobate surface acoustic wave sensor resonance is frequently
Rate variation diagram.Measurand is exhaled every time can make the resonant frequency of device decline about 2.7MHz, and sensitivity is high, during each air-breathing,
Resonant frequency returns to original level again, reproducible.Fig. 4 (b) be measurand simulated respiration pause syndrome in the case of, niobium
Sour lithium surface acoustic wave sensor resonant frequency variation diagram.Measurand is deliberately ceased breathing at point J and point K, and surface acoustic wave is passed
The resonant frequency of sensor no longer fluctuation.Also had as the surface acoustic wave sensor of piezoelectric base unit using lithium columbate crystal block
Very strong sensitivity, is adapted to detect OSAS.
In addition, can deposit one layer of humidity/temperature-sensitive membrane on the surface of piezoelectric base unit 8 can strengthen surface acoustic wave sensor
Sensitivity.
In addition to the material used in the present embodiment, the material of flexible substrate 7 can also be PET
(PET), polyvinylidene fluoride (PVDF), dimethyl silicone polymer (PDMS) etc..The material of piezoelectric base unit 8 can also be
The piezo-electric crystals such as LiTaO3, LGS, SGG, NCG.
The material of interdigital electrode 4 can be that copper (Cu), silver-colored (Ag), aluminium (Al), golden (Au), platinum (Pt), tungsten (W), carbon are received
One kind in mitron, graphene or the good metal of other electric conductivities or nonmetallic materials.
The material of humidity/temperature-sensitive membrane can be nano material such as graphene, and CNT, ZnO, TiO2, metal are received
Rice material etc. or thin polymer film such as poly vinylpyrrol idone (PVP), polymethyl methacrylate
(PMMA), polyacrylamide (PAM) etc..The material of humidity/temperature-sensitive membrane can be therein a kind of or several
Compound.
During specific works, radio-frequency readers 6 are launched after one section of RF pulse signal, and antenna 9 receives RF pulse signal
And interdigital electrode 4 is passed to, alternating voltage is produced at the two ends of interdigital electrode 4, due to the inverse piezoelectric effect of piezoelectric base unit 8, by electricity
Acoustic energy can be converted to, i.e., the RF pulse signal sent radio-frequency readers 6 is converted into acoustic signals, the tidal air of measurand
Resonant frequency, insertion loss and the phase characteristic that stream can change the acoustic signals on piezoelectric base unit 8 change, and make acoustic signals
Respiration information in carrying.When acoustic signals propagate to reflecting grating 3, the portion of energy of sound wave can be reflected back interdigital by reflecting grating 3
Electrode 4, due to the direct piezoelectric effect of piezoelectric base unit 8, converts acoustic energy into electric energy output, the sound wave that will carry respiration information is believed
Number feedback signal is converted into, and the radiofrequency signal of the feedback is passed back radio-frequency readers 6 by antenna 9.
Surface acoustic wave sensor is encoded by the way that reflecting grating is arranged on into the diverse location on piezoelectric base unit 8, i.e.,
By controlling the spacing between reflecting grating 3 and interdigital electrode 4 to realize, such as Fig. 5 (a) is to be encoded to 11111111 surface acoustic waves sensing
The tim e- domain detection figure of device, is that eight reflecting gratings being continuously equally spaced are obtained, Fig. 5 (b) is to be encoded to 11110111 sound tables
The tim e- domain detection figure of wave sensor, i.e., compared with Fig. 5 (a), it, can be with from Fig. 5 to be not provided with reflecting grating at the 5th
Find out, the surface acoustic wave sensor of different coding is distinguished out in which can be apparent from time domain, therefore can be by setting
Different codings is monitored in real time to realize to several members, greatly reduces the cost that several members are used in conjunction with, and is adapted to
In the family for possessing several apnea syndrome patients, sanatorium, the application in ward etc..
In addition to a plurality of surface acoustic wave reflecting grating is set in the present embodiment, a surface acoustic wave reflecting grating is can be configured as,
In order to reach purpose that many people use, a surface acoustic wave only need to be arranged on to the diverse location on piezoelectric base unit 8, work as pressure
When there is reflecting grating 3 in the somewhere of electric matrix 8, sound wave can be partially reflected back interdigital electrode 4, produce an echo-signal.Because no
The distance between reflecting grating and interdigital electrode 4 on same surface acoustic wave sensor difference, so the echo that each reflecting grating is produced
The time that signal returns to interdigital electrode 4 is also different, and returning for each reflecting grating 3 can be obtained by the time domain parameter of detection sensor
Ripple signal.
In addition it is also possible to by setting the reflecting grating of varying number on different surface acoustic wave sensors come to sound surface
Ripple is encoded, to reach same purpose.
Signal processing unit 13 is used in extracting the feedback signal received from radio-frequency transmissions receiving unit 11 characterize breathing shape
The signal of state information.
Display unit 14 is used for the result for showing detection.
Transmission characteristic and the change of surface acoustic wave sensor are read from feedback signal by radio-frequency readers 6, such as it is humorous
Vibration frequency, insertion loss or phase, extract the information for characterizing breathing state, including respiratory rate, apnea time and breathing
Number of times, the oscillogram that also directly extraction resonant frequency, insertion loss or phase are changed over time is as the letter for characterizing breathing state
Breath, judges measurand whether there is apnea symptom by the analysis to tidal air state duration.
Due to surface acoustic wave sensor insertion loss resume speed faster, during each air-breathing, insertion loss can recover
To original level, it is preferably used for the respiratory disorders such as detection OSAS.For sound table in the present invention
Piezoelectric base unit in wave sensor is also selected from soft piezo-electric crystal, such as flexible piezoelectric film, and its material may be selected from
ZnO, aluminium nitride (AlN), lead zirconate titanate (PZT), polyvinylidene fluoride (PVDF), the polyvinylidene fluoride for adding PbTiO3
(PVTF) or one kind in other piezopolymers, its thickness may be selected from 1~10000 micron, and can prepare antenna in piezoelectricity
On film.
Claims (10)
1. a kind of breathing state detecting system of the surface acoustic wave sensor based on wireless and passive, including radio-frequency transmissions receive single
The information of sign breathing state is extracted in member, sensor unit and the feedback signal received from the radio-frequency transmissions receiving unit
Signal processing unit；
It is characterized in that：
The sensor unit includes surface acoustic wave sensor, and the surface acoustic wave sensor includes piezoelectric base unit and penetrated with described
Take place frequently and penetrate the antenna of receiving unit wireless telecommunications connection；
Interdigital electrode and surface acoustic wave reflecting grating are installed with the piezoelectric base unit, the interdigital electrode is electrically connected with the antenna
Connect.
2. breathing state detecting system according to claim 1, it is characterised in that：
The sensor unit includes the surface acoustic wave that two or more reflecting grating set location is different and/or bar number is not waited and sensed
Device；
The signal processing unit is additionally operable to extract the surface acoustic wave for characterizing diverse location and/or bar number from the feedback signal
The time-domain information of reflecting grating.
3. breathing state detecting system according to claim 1 or 2, it is characterised in that：
Deposition has one layer of humidity/temperature-sensitive membrane on the surface of the piezoelectric base unit.
4. a kind of surface acoustic wave sensor of wireless and passive, including piezoelectric base unit and prepare the interdigital electricity on the piezoelectric base unit
Pole；
It is characterized in that：
Also include the antenna electrically connected with the interdigital electrode；
Surface acoustic wave reflecting grating is prepared on the piezoelectric base unit.
5. surface acoustic wave sensor according to claim 4, it is characterised in that：
Also include flexible substrate, the piezoelectric base unit is installed on the flexible substrate with the antenna.
6. surface acoustic wave sensor according to claim 4, it is characterised in that：
The surface acoustic wave reflecting grating is prepares the bonding jumper on the piezoelectric base unit, and the bonding jumper is located at surface acoustic wave
It is on propagation path and orthogonal with its direction of propagation.
7. surface acoustic wave sensor according to claim 4, it is characterised in that：
The width of the surface acoustic wave reflecting grating is identical with the finger beam of the interdigital electrode, sound surface reflecting grating and the fork
Refer to interelectrode distance more than stroke of the surface acoustic wave in 0.5 microsecond.
8. surface acoustic wave sensor according to claim 4, it is characterised in that：
The quantity of the surface acoustic wave reflecting grating be more than two, adjacent two between spacing be more than the piezoelectric base unit the velocity of sound with
The product of signal pulsewidth.
9. surface acoustic wave sensor according to claim 4, it is characterised in that：
Deposition has one layer of humidity/temperature-sensitive membrane on the surface of the piezoelectric base unit.
10. the surface acoustic wave sensor according to any one of claim 4 to 9, it is characterised in that：
The piezoelectric base unit is lithium columbate crystal block.
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| CN110196124A (en) * | 2019-06-12 | 2019-09-03 | 宁海县浙工大科学技术研究院 | A kind of pressure sensor based on flexible SAW device |
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| CN110261471A (en) * | 2019-06-12 | 2019-09-20 | 宁海县浙工大科学技术研究院 | A kind of humidity sensor based on flexible SAW device |
| CN110277976A (en) * | 2019-06-12 | 2019-09-24 | 宁海县浙工大科学技术研究院 | A kind of flexibility SAW device and preparation method |
| CN112345635A (en) * | 2020-10-28 | 2021-02-09 | 上海交通大学 | Stomach illness diagnostic system based on exhaled gas volatile organic compound analysis |
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