CN106404912B - A kind of internal passive acoustic sensing system and its method for sensing - Google Patents
A kind of internal passive acoustic sensing system and its method for sensing Download PDFInfo
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- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/04—Analysing solids
- G01N29/07—Analysing solids by measuring propagation velocity or propagation time of acoustic waves
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- G—PHYSICS
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Abstract
The invention discloses a kind of internal passive acoustic sensing system and its method for sensing.Sensor-based system of the invention includes: control circuit, active ultrasonic transducer, passive type ultrasonic transducer and surface acoustic wave sensor, control circuit and active ultrasonic transducer are arranged in outside measurand, and passive type ultrasonic transducer and surface acoustic wave sensor are arranged inside measurand；In method provided by the invention, the device of the part inside measurand is not necessarily to power supply power supply, therefore the problem of can solve long lasting for work；The present invention is decayed in measurand small using sound wave, and it is deeper to propagate depth, harmless to measurands such as human bodies, and sound wave there are also directive property good, the advantage of high conversion efficiency；Internal passive acoustic sensing system of the invention can be used for content of material or the physical parameter detection of tissue, fuel tank, sink and nuclear reactor internal, realize harmless operation for a long time.
Description
Technical field
The invention belongs to detect sensory field, and in particular to a kind of internal passive acoustic sensing system and its method for sensing.
Background technique
The life signal of organization internal includes blood pressure, cerebral, electrocardio, brain electricity, pulse, blood oxygen and various biochemical substances
Content etc..These life signals characterize the health status of life entity, and carry a large amount of vital signs information.Accurate Determining
These life signals, it will help judge vital movement signal, the health status of life entity is diagnosed and protected, it can be with
According further to the signal of acquisition, disease is targetedly treated and prevented.
Such as: pass through the real-time reading of the life entity brain electricity handicapped to plant person etc., it can be determined that tested life entity
Brain activity, and predict its behavior be intended to, and then can by external mechanical assist its activity；By to internal electrocardiosignal
Read, it can be determined that whether human body occurs cardiac arrhythmia and atrial fibrillation, and can in time by heart apply extraneous electro photoluminescence with
Prevent the generation of sudden death；By the real-time reading to intracorporal blood glucose signal, with real-time judge blood-sugar content and can remind tested
Object control diet, the insulin syringe insulin injection of acceptable further auto-control.
But external sensor is currently depended on to the traditional measurement method of life signal, such as the blood pressure of body surface more
Meter or ECG detecting equipment etc..The problem of measuring device of this kind of body surface is: measuring point is not the origin of biochemical signals, non-original
Position measurement；Measurement inaccuracy；There is delay in measured signal；Vulnerable to outside noise, human motion and body surface deformation interference etc..
If desired accurately these signals are measured, then needs to develop the vital sign signals original for being placed in organization internal
Level sensor and its signal transmission system.And the sensor for being placed in organization internal needs to solve following two challenge: energy supply
And signal transmission issues.Due to organizing the operative complications problem of inner sensor, operation replacement electricity can not be often carried out
Pond, and in view of there are biological tissue's hazardous materials for inside battery, so preferably developing passive senser element.Due to biological group
Mostly aqueous tissue abundant is knitted, therefore electromagnetic wave can there can not be effect spread because of deep fades within the organization, need at this time
It will be using the new method for transmitting signals being suitable in tissue.
Summary of the invention
In order to realize the real-time in-situ detection of life signal in tissue, and solve energy supply and the signal of respective sensor
Transmission problem, the present invention provides a kind of novel internal passive acoustic sensing system and its method for sensing, this method is based on sound
The small feature of signal transmission attenuation in measurand provides acoustical signal, quilt using the ultrasonic transducer of measurand outer surface
It surveys inside object and is equipped with the surface acoustic wave sensor that energy converter receives the energy and is supplied to inside, surface acoustic wave sensor will be taken
Signal with measurand detection information returns to internal ultrasonic transducer, and the ultrasonic transducer inside measurand takes this
Using outside sonic transmissions to measurand, the energy converter outside measurand carries out signal receiving and decodes the signal of information.
An object of the present invention is to provide a kind of internal passive acoustic sensing systems.
Internal passive acoustic sensing system of the invention includes: control circuit, active ultrasonic transducer, passive type ultrasound
Energy converter and surface acoustic wave sensor；Wherein, control circuit and active ultrasonic transducer are arranged in outside measurand, the two
It is connected by electric wire；The surface of emission of active ultrasonic transducer is close to the surface of measurand；Passive type ultrasonic transducer harmony
Surface wave sensor is arranged inside measurand, is connected by conducting wire therebetween, the receiving plane of passive type ultrasonic transducer
The surface of emission of the active ultrasonic transducer of face；Control circuit issues control signal to active ultrasonic transducer, controls signal
Form be electric signal, active ultrasonic transducer converts the electrical signal to acoustical signal, and is transmitted by the surface of measurand
To the inside of measurand；Passive type ultrasonic transducer receives acoustical signal, and converts acoustic signals into electric signal transmission to sound table
Wave sensor, surface acoustic wave sensor convert the electrical signal to acoustical signal and propagate on surface, the inside object with measurand
Matter or physical environment interaction, cause the change of acoustical signal, surface acoustic wave sensor will carry measurand internal information
Acoustical signal be converted into electric signal transmission to passive type ultrasonic transducer, passive type ultrasonic transducer converts acoustic signals into telecommunications
Launch after number, active ultrasonic transducer receives acoustical signal and converts acoustic signals into electric signal transmission to control circuit, control
Processing of circuit analysis processed, extracts the information of measurand.
Control circuit includes: that energy issues module and signal analysis module；Wherein, energy issues module and issues with energy
Control signal, such as transient pulse etc., and be transmitted to active ultrasonic transducer；The active ultrasound of signal analysis module processing
The information of measurand is extracted and analyzed to the acoustical signal that energy converter receives.
Piezoelectric layer before active ultrasonic transducer includes: external acoustic matching layer, is external, it is external after piezoelectric layer, outside hub
Elastic layer and external high quality support construction；Wherein, the piezoelectricity before outside is respectively set in two surfaces of external central elastic layer
Layer and it is external after piezoelectric layer, it is external before behind piezoelectric layer and outside the polarization direction of piezoelectric layer it is identical；Piezoelectric layer and outside before outside
Opposite outer central elastic layer is arranged symmetrically in piezoelectric layer geometric dimension afterwards；The front surface of piezoelectric layer is the surface of emission before outside,
External acoustic matching layer is arranged in the front surface of piezoelectric layer before outside；Outside hub elastic layer is placed on external high quality support construction
On, and external high quality support construction is far from the surface of emission；Before outside piezoelectric layer and it is external after piezoelectric layer respectively with control circuit
It is electrically connected；Both the electric signal sent from control circuit is transmitted separately to piezoelectric layer and piezoelectric layer behind outside before outside, cause
Vibration, and ensure that mode of vibration is bending vibration, piezoelectric layer and piezoelectric layer behind outside convert electrical signals to acoustical signal before outside；
External high quality support construction far from surface of emission one end guarantees that energy is predominantly forward when vibration, and then acoustical signal is specified
It propagates forward；External acoustic matching layer on the surface of emission is set, reduces acoustical signal from active ultrasonic transducer to tested pair
Energy attenuation when as propagating improves propagation efficiency；When passive type ultrasonic transducer sends back to acoustical signal, pass through external acoustic matching
Layer, piezoelectric layer and piezoelectric layer behind outside, which are experienced, before outside vibrates and acoustical signal is converted to electric signal, is transmitted to control circuit.
It here forward, is the direction relative to the surface of emission of active ultrasonic transducer for forward.
Piezoelectric layer before passive type ultrasonic transducer includes: internal acoustic matching layer, is internal, it is internal after piezoelectric layer, inside center
Elastic layer and internal high quality support construction；Wherein, the piezoelectricity before inside is respectively set in two surfaces of internal central elastic layer
Layer and it is internal after piezoelectric layer, it is internal before the polarization direction of piezoelectric layer is identical behind piezoelectric layer and inside, and the two is geometrically in
Elastic layer is symmetrical；The front surface of piezoelectric layer is receiving plane before inside, and internal sound is arranged in the front surface of piezoelectric layer before inside
Matching layer；Inside center elastic layer is placed in high quality support construction, and high quality support construction is received far from receiving plane
Face is opposite with the surface of emission of active ultrasonic transducer；Piezoelectric layer and piezoelectric layer behind inside are connected to sound table by conducting wire before inside
Wave sensor；Active ultrasonic transducer launches acoustical signal, and piezoelectric layer and piezoelectric layer behind inside experience vibration before inside
And acoustical signal is converted into electric signal, and by electric signal transmission to surface acoustic wave sensor；It is returned from surface acoustic wave sensor
Carry before the electric signal transmission to inside of measurand internal information piezoelectric layer and it is internal after piezoelectric layer, both cause to vibrate,
Acoustical signal is converted electrical signals to, the high quality support construction far from receiving plane one end guarantees that energy is predominantly previous when vibration,
And then acoustical signal is specified propagation forward；Inside acoustic matching layer on the receiving surface is set, reduces acoustical signal from tested
Energy attenuation when object is propagated to the active ultrasonic transducer of solid, improves propagation efficiency.Here forward, be relative to
The direction of the receiving plane of passive type ultrasonic transducer is forward.
Surface acoustic wave sensor includes: piezoelectric substrate, sensitive layer and interdigital electrode；Wherein, piezoelectric substrate uses piezoresistive material
Material；Sensitive layer and interdigital electrode are separately positioned in piezoelectric substrate；Interdigital electrode is arranged in the centre of piezoelectric substrate, or arrangement
It is located at the both ends of sensitive layer in piezoelectric substrate；Sensitive layer uses the material with the biochemical substances interaction inside measurand
Material；Interdigital electrode uses metal material；Electric signal from passive type ultrasonic transducer is converted to acoustical signal simultaneously by interdigital electrode
It is propagated on the surface of piezoelectric substrate, the biochemical substances or physical environment inside sensitive layer and measurand interact, and cause quick
Sense layer physical characteristic itself changes, and corresponding quantitative variation occurs so as to cause the velocity of wave or resonant frequency of acoustical signal；
When interdigital electrode is located at the both ends of sensitive layer, the variation of velocity of wave in acoustical signal is detected；When interdigital electrode is arranged in piezoelectricity base
When the centre at bottom, the variation of resonant frequency in acoustical signal is detected, to carry measurand internal information in acoustical signal；Pressure
Acoustical signal is converted to electric signal by electric substrate, is transmitted to passive type ultrasonic transducer.
It is another object of the present invention to provide a kind of internal passive acoustics sensor methods.
Internal passive acoustics sensor method of the invention, comprising the following steps:
1) control circuit issues control signal to active ultrasonic transducer, and control signal form is electric signal；
2) surface of emission of active ultrasonic transducer is close to the surface of measurand, converts the electrical signal to acoustical signal, and
The inside of measurand is transmitted to by the surface of measurand；
3) the passive type ultrasonic transducer inside measurand is set and receives acoustical signal, and converts acoustic signals into telecommunications
Number it is transmitted to surface acoustic wave sensor；
4) surface acoustic wave sensor converts the electrical signal to acoustical signal and propagates on its surface, the inner material of measurand
Or physical environment interacts with the acoustical signal propagated on surface, causes the change of acoustical signal；
5) acoustical signal for carrying measurand internal information is converted into electric signal transmission to interior by surface acoustic wave sensor
The passive type ultrasonic transducer in portion；
6) passive type ultrasonic transducer is launched after converting acoustic signals into electric signal, active ultrasonic transducer reception sound
Signal simultaneously converts acoustic signals into electric signal transmission to control circuit；
7) control circuit processing analysis, extracts the information of measurand.
Wherein, in step 2), active ultrasonic transducer converts the electrical signal to acoustical signal and is transmitted to measurand
Inside, specifically includes the following steps:
A) piezoelectric layer and piezoelectric layer behind outside before the electric signal transmission to outside sent from control circuit, cause the two to be shaken
It is dynamic, convert electrical signals to acoustical signal；
B) the external high quality support construction far from surface of emission one end guarantees that energy is predominantly forward when vibration, and then sound is believed
Number for specified propagation forward；
C) external acoustic matching layer on the surface of emission is set, so that acoustical signal energy propagates in measurand unattenuatedly
Portion.
In step 3), passive type ultrasonic transducer converts acoustic signals into electric signal transmission to surface acoustic wave sensor,
Specifically includes the following steps:
A) acoustic matching layer damply to be transmitted to passive type ultrasonic transduction from active ultrasonic transducer acoustical signal is low
Device；
B) preceding piezoelectric layer and rear piezoelectric layer, which are experienced, vibrates and acoustical signal is converted to electric signal；
C) electric signal transmission is to surface acoustic wave sensor.
In step 4), the inner material or physical environment of surface acoustic wave sensor and measurand interact, specifically
The following steps are included:
A) electric signal from passive type ultrasonic transducer is converted to acoustical signal and in the table of piezoelectric substrate by interdigital electrode
It propagates in face；
B) it is located at the sensitive layer of piezoelectric substrate performance and the substance inside measurand or physical environment interacts, causes
Sensitive layer physical characteristic itself changes；
C) physical characteristic of sensitive layer, which changes, causes the velocity of wave of acoustical signal or resonant frequency to occur accordingly quantitatively
Variation.
In step 5), surface acoustic wave sensor converts acoustic signals into electric signal transmission to passive type ultrasonic transducer,
Specifically includes the following steps:
A) when interdigital electrode is arranged in the both ends for being located at sensitive layer in piezoelectric substrate, the change of velocity of wave in acoustical signal is detected
Change；When interdigital electrode is arranged in the centre of piezoelectric substrate, the variation of resonant frequency in acoustical signal is detected, thus in acoustical signal
Carry measurand internal information；
B) acoustical signal for carrying measurand internal information is converted to electric signal by piezoelectric substrate, and it is super to be transmitted to passive type
Sonic transducer.
In step 6), passive type ultrasonic transducer is launched after converting acoustic signals into electric signal, and active ultrasound is changed
Can device receive acoustical signal and convert acoustic signals into electric signal transmission to control circuit, specifically includes the following steps:
A) it is pressed before the electric signal transmission to inside for carrying measurand internal information returned from surface acoustic wave sensor
Piezoelectric layer after electric layer and inside, causes the two to be vibrated, converts electrical signals to acoustical signal；
B) the inside high quality support construction far from receiving plane one end guarantees that energy is predominantly previous when vibration, and then sound is believed
Number for specified propagation forward；
C) the inside acoustic matching layer of setting on the receiving surface damply propagates to actively from measurand so that acoustical signal is low
Formula ultrasonic transducer；
D) pass through the external acoustic matching layer of active ultrasonic transducer, piezoelectric layer and piezoelectric layer behind outside are experienced before outside
It vibrates and acoustical signal is converted into electric signal；
E) electric signal transmission is to control circuit.
In step 7), control circuit processing analysis extracts the information of measurand, specifically includes: control circuit
Signal analysis module handles the acoustical signal that active ultrasonic transducer receives, between the acoustical signal medium wave peak returned by monitoring
The spectral characteristic of time difference or acoustical signal judges the feature of the inner material of measurand.
Internal passive acoustic sensing system of the invention can be used for tissue, fuel tank, sink and nuclear reactor internal
Content of material or physical parameter detection, the part inside measurand be that can work without power supply, therefore may be implemented
Harmless operation for a long time.
The present invention uses a special designing sound system, realizes the real-time passive detection to internal PM signals.This
Invent in the method provided, the device of the part inside measurand is not necessarily to power supply power supply, therefore can solve long lasting for
The problem of work.Compared with traditional passive measuring method based on electromagnetic transmission, the present invention uses acoustical signal as inside
The carrier of energy supply and signal transmission, it is advantageous that:
1, electromagnetic wave has apparent decaying in many substance inside, and 2.45GHz electromagnetic wave is in the tissue of 10cm
75dB is decayed to, the simple transmission power that increases will lead to the problems such as power supply fever；Low, the 1MHz sound wave and sound wave is decayed in human body
Decaying is only 10dB in the tissue of 10cm；
2, Electromagnetic Wave Propagation depth is limited, and the skin depth of 2.5GHz~5GHz electromagnetic wave is lower than 2cm；And the propagation of sound wave
Depth can reach 10cm or more；
3, electromagnetic wave may have injury to human body, and electromagnetic wave firm power is 10mW/cm2, the World Health Organization is by electromagnetism
Wave is classified as " being potentially carcinogenic "；And sound wave is harmless, firm power 720mW/cm2；
4, electromagnetic wave is easy the interference by other wireless signals and medical instrument；To the interference source of communication sound wave in human body
It is extremely limited, and sound wave there are also directive property good, the advantage of high conversion efficiency.
Detailed description of the invention
Fig. 1 is the schematic diagram of internal passive acoustic sensing system of the invention；
Fig. 2 be in internal passive acoustic sensing system of the invention control circuit and active ultrasonic transducer be arranged in it is soft
Property substrate on schematic diagram, wherein (a) be top view, (b) be sectional view；
Fig. 3 is active ultrasonic transducer and surface acoustic wave sensor in internal passive acoustic sensing system of the invention
Schematic diagram, wherein (a) is top view, (b) is sectional view；
Fig. 4 is the vertical view of one embodiment of the surface acoustic wave sensor of internal passive acoustic sensing system of the invention
Figure；
Fig. 5 is the wave of surface acoustic wave sensor when internal passive acoustic sensing system of the invention is used to detect inhibition of HIV
The relational graph of speed or the content of resonant frequency and inhibition of HIV.
Specific embodiment
With reference to the accompanying drawing, by specific embodiment, the present invention is further explained.
As shown in Figure 1, the internal passive acoustic sensing system of the present embodiment includes: control circuit 1, active ultrasonic transduction
Device 2, passive type ultrasonic transducer 3 and surface acoustic wave sensor 4；Wherein, control circuit 1 and active ultrasonic transducer 2 are arranged
In the outside of measurand 5, the two is connected by electric wire；The surface of emission of active ultrasonic transducer 2 is close to the table of measurand 5
Face；Passive type ultrasonic transducer 3 and surface acoustic wave sensor 4 are arranged inside measurand 1, are connected by conducting wire therebetween
It connects, the surface of emission of the active ultrasonic transducer 2 of the receiving plane face of passive type ultrasonic transducer 3.
As shown in Fig. 2, control circuit 1 and active ultrasonic transducer 2 are collectively arranged in external flexible substrate 6.
Piezoelectric layer 22 before active ultrasonic transducer 2 includes external acoustic matching layer 21, is external, it is external after piezoelectric layer 24, outer
Portion's central elastic layer 23 and external high quality support construction 25；Wherein, it is set respectively on two surfaces of external central elastic layer 23
Set before outside piezoelectric layer 22 and it is external after piezoelectric layer 23, the two geometric dimension is arranged symmetrically, it is external before piezoelectric layer 22 and it is external after
The polarization direction of piezoelectric layer 23 is identical；The front surface of piezoelectric layer 22 is the surface of emission, the front surface of piezoelectric layer before outside before outside
External acoustic matching layer 21 is set；Outside hub elastic layer 23 is placed in external high quality support construction 35, and external high-quality
Support construction 25 is measured far from the surface of emission；Piezoelectric layer 22 and piezoelectric layer 23 behind outside are connected to control circuit 1 before outside.
As shown in figure 3, passive type ultrasonic transducer 3 is connected by flexible extendable conducting wire 8 with surface acoustic wave sensor 4
It connects, passive type ultrasonic transducer 3 is placed in inner flexible substrate 7.
Piezoelectric layer 32 before passive type ultrasonic transducer 3 includes: internal acoustic matching layer 31, is internal, it is internal after piezoelectric layer 34, interior
Portion's central elastic layer 33 and internal high quality support construction 35；Wherein, it is set respectively on two surfaces of internal central elastic layer 33
Set before inside piezoelectric layer 31 and it is internal after piezoelectric layer 34, the two geometric dimension is arranged symmetrically, it is internal before piezoelectric layer 32 and it is internal after
The polarization direction of piezoelectric layer 34 is identical；The front surface of piezoelectric layer is receiving plane before inside, and the front surface of piezoelectric layer is set before inside
Set internal acoustic matching layer；In the internally placed high quality support construction 35 of inside center elastic layer 33, and internal high quality branch
For support structure far from receiving plane, receiving plane is opposite with the surface of emission of active ultrasonic transducer；Inside center elastic layer 33 and sound table
Wave sensor 4 is electrically connected.
As shown in figure 4, surface acoustic wave sensor 4 includes: piezoelectric substrate 41, sensitive layer 42 and interdigital electrode 43；Wherein, it presses
Electric substrate 41 uses piezoelectric material；Sensitive layer 42 and interdigital electrode 43 are separately positioned in piezoelectric substrate 41；43 cloth of interdigital electrode
It sets and is located at sensitive 41 layers of both ends in piezoelectric substrate.
To the detection of inhibition of HIV in the present embodiment, illustrate surface acoustic wave sensor of the invention to internal biochemical signals
Testing principle:
If measurand is inhibition of HIV (human immunodeficiency virus), being attached to sensitive object on sensitive layer 42 can be with
It is the complementary RNA segment specifically bound with inhibition of HIV Ribonucleic RNA, is also possible to and inhibition of HIV capsid is specifically bound
Antibody or it is special can in conjunction with inhibition of HIV host and protein structure.
When having inhibition of HIV in measurand tissue or in blood, the RNA and capsid of HIV specific can be integrated to
On sensitive layer 42, this combines the speed of sound wave in the change piezoelectric substrate 41 that can be quantified, or changes surface acoustic wave sensor 4
Resonant frequency.As shown in figure 5, the proportional pass of content of the knots modification and inhibition of HIV of surface acoustic wave device velocity of wave or resonant frequency
System.
Therefore, the signal received from control circuit 1, can analyze the knots modification of wave beam or resonant frequency, and then give
The specific value of the presence or absence of inhibition of HIV and its content out, and can realize prolonged real-time detection.
It is finally noted that the purpose for publicizing and implementing example is to help to further understand the present invention, but this field
Technical staff be understood that without departing from the spirit and scope of the invention and the appended claims, it is various replacement and repair
It is all possible for changing.Therefore, the present invention should not be limited to embodiment disclosure of that, and the scope of protection of present invention is to weigh
Subject to the range that sharp claim defines.
Claims (10)
1. a kind of internal passive acoustic sensing system, which is characterized in that the sensor-based system includes: control circuit, active super
Sonic transducer, passive type ultrasonic transducer and surface acoustic wave sensor；Wherein, the control circuit and active ultrasonic transducer
It is arranged in outside measurand, the two is connected by electric wire；The surface of emission of the active ultrasonic transducer is close to measurand
Surface；The passive type ultrasonic transducer and surface acoustic wave sensor are arranged inside measurand, therebetween by leading
Line connection, the surface of emission of the active ultrasonic transducer of receiving plane face of passive type ultrasonic transducer；The control circuit issues
Signal is controlled to active ultrasonic transducer, the form for controlling signal is electric signal, and active ultrasonic transducer turns electric signal
It changes acoustical signal into, and is transmitted to the inside of measurand by the surface of measurand；Passive type ultrasonic transducer reception sound letter
Number, and electric signal transmission is converted acoustic signals into surface acoustic wave sensor, surface acoustic wave sensor converts the electrical signal to sound
Signal is simultaneously propagated on surface, is interacted with the inner material or physical environment of measurand, is caused the change of acoustical signal, sound table
The acoustical signal for carrying measurand internal information is converted into electric signal transmission to passive type ultrasonic transducer by wave sensor,
Passive type ultrasonic transducer is launched after converting acoustic signals into electric signal, and active ultrasonic transducer receives acoustical signal and by sound
Signal is converted into electric signal transmission to control circuit, and control circuit processing analysis extracts the information of measurand.
2. sensor-based system as described in claim 1, which is characterized in that the control circuit includes: that energy issues module and letter
Number analysis module；Wherein, energy issues module and issues the control signal for having energy, and is transmitted to active ultrasonic transducer；
Signal analysis module handles the acoustical signal that active ultrasonic transducer receives, and extracts and analyze the information of measurand.
3. sensor-based system as described in claim 1, which is characterized in that the active ultrasonic transducer includes: external sound
With piezoelectric layer, outside hub elastic layer and external high quality support construction behind piezoelectric layer, outside before layer, outside；Wherein, in outside
Piezoelectric layer and piezoelectric layer behind outside before outside, piezoelectric layer and outside before the outside is respectively set in two surfaces of central elastic layer
The polarization direction of piezoelectric layer is identical afterwards；Piezoelectric layer and opposite outer central elastic in piezoelectric layer geometric dimension behind outside before the outside
Property layer is arranged symmetrically；The front surface of piezoelectric layer is the surface of emission before the outside, before outside outside the front surface setting of piezoelectric layer
Acoustic matching layer；The outside hub elastic layer is placed in external high quality support construction, and external high quality support construction
Far from the surface of emission；Before the outside piezoelectric layer and it is external after piezoelectric layer be electrically connected respectively with control circuit；It is sent out from control circuit
The electric signal come is transmitted separately to piezoelectric layer and piezoelectric layer behind outside before outside, causes the two to be vibrated, and ensure that mode of vibration is
Bending vibration, it is external before piezoelectric layer and it is external after piezoelectric layer convert electrical signals to acoustical signal；Outside far from surface of emission one end
High quality support construction guarantees that energy is predominantly forward when vibration, and then acoustical signal is specified propagation forward；Setting is emitting
External acoustic matching layer on face reduces energy attenuation when acoustical signal is propagated from active ultrasonic transducer to measurand；
When passive type ultrasonic transducer sends back to acoustical signal, by external acoustic matching layer, piezoelectric layer and piezoelectric layer behind outside are experienced before outside
To vibrating and acoustical signal being converted to electric signal, it is transmitted to control circuit.
4. sensor-based system as described in claim 1, which is characterized in that the passive type ultrasonic transducer includes: internal sound
With piezoelectric layer, inside center elastic layer and internal high quality support construction behind piezoelectric layer, inside before layer, inside；Wherein, in inside
Piezoelectric layer and piezoelectric layer behind inside before inside, piezoelectric layer and inside before the inside is respectively set in two surfaces of central elastic layer
The polarization direction of piezoelectric layer is identical afterwards, and the two is geometrically symmetrical along middle elastic layer；The front surface of piezoelectric layer before inside
For receiving plane, internal acoustic matching layer is arranged in the front surface of piezoelectric layer before inside；The inside center elastic layer is placed on high-quality
It measures in support construction, and high quality support construction is far from receiving plane, the surface of emission phase of receiving plane and active ultrasonic transducer
It is right；Piezoelectric layer and piezoelectric layer behind inside are connected to surface acoustic wave sensor by conducting wire before the inside；Active ultrasonic transduction
Device launches acoustical signal, and piezoelectric layer and piezoelectric layer behind inside, which are experienced, before inside vibrates and acoustical signal is converted to electric signal, and
By electric signal transmission to surface acoustic wave sensor；The electricity for carrying measurand internal information returned from surface acoustic wave sensor
Signal is transmitted to piezoelectric layer and piezoelectric layer behind inside before inside, causes the two to be vibrated, converts electrical signals to acoustical signal, separate to connect
The high quality support construction of receipts face one end guarantees that energy is predominantly previous when vibration, and then acoustical signal is specified propagation forward；
Inside acoustic matching layer on the receiving surface is set, reduces acoustical signal in the active ultrasonic transducer from measurand to solid
Energy attenuation when propagation.
5. sensor-based system as described in claim 1, which is characterized in that the surface acoustic wave sensor includes: piezoelectric substrate, quick
Feel layer and interdigital electrode；Wherein, the piezoelectric substrate uses piezoelectric material；The sensitive layer and interdigital electrode are separately positioned on pressure
In electric substrate；The interdigital electrode is arranged in the centre of piezoelectric substrate, or is arranged in piezoelectric substrate and is located at the two of sensitive layer
End；The sensitive layer uses the material with the biochemical substances interaction inside measurand；The interdigital electrode uses metal
Material；Electric signal from passive type ultrasonic transducer is converted to acoustical signal and passed on the surface of piezoelectric substrate by interdigital electrode
It broadcasts, the biochemical substances or physical environment inside sensitive layer and measurand interact, and sensitive layer physical characteristic itself is caused to be sent out
So as to cause the velocity of wave or resonant frequency of acoustical signal corresponding quantitative variation occurs for changing；When interdigital electrode is located at sensitivity
When the both ends of layer, the variation of velocity of wave in acoustical signal is detected；When interdigital electrode is arranged in the centre of piezoelectric substrate, sound is detected
The variation of resonant frequency in signal, to carry measurand internal information in acoustical signal；Piezoelectric substrate converts acoustical signal
At electric signal, it is transmitted to passive type ultrasonic transducer.
6. a kind of internal passive acoustics sensor method, which is characterized in that the method for sensing the following steps are included:
1) control circuit issues control signal to active ultrasonic transducer, and control signal form is electric signal；
2) surface of emission of active ultrasonic transducer is close to the surface of measurand, converts the electrical signal to acoustical signal, and pass through
The surface of measurand is transmitted to the inside of measurand；
3) the passive type ultrasonic transducer inside measurand is set and receives acoustical signal, and converts acoustic signals into electric signal biography
Transport to surface acoustic wave sensor；
4) surface acoustic wave sensor converts the electrical signal to acoustical signal and propagates on its surface, the inner material or object of measurand
It manages environment and interacts with the acoustical signal propagated on surface, cause the change of acoustical signal；
5) acoustical signal for carrying measurand internal information is converted into electric signal transmission to inside by surface acoustic wave sensor
Passive type ultrasonic transducer；
6) passive type ultrasonic transducer is launched after converting acoustic signals into electric signal, and active ultrasonic transducer receives acoustical signal
And electric signal transmission is converted acoustic signals into control circuit；
7) control circuit processing analysis, extracts the information of measurand.
7. method for sensing as claimed in claim 6, which is characterized in that in step 2), active ultrasonic transducer is by telecommunications
Number it is converted into the inside that acoustical signal is transmitted to measurand, specifically includes the following steps:
A) piezoelectric layer and piezoelectric layer behind outside before the electric signal transmission to outside sent from control circuit, cause the two to be vibrated, will
Electric signal is converted into acoustical signal；
B) the external high quality support construction far from surface of emission one end guarantees that energy is predominantly forward when vibration, and then acoustical signal is
Specified propagation forward；
C) external acoustic matching layer on the surface of emission is set, so that acoustical signal energy propagates to inside measurand unattenuatedly.
8. method for sensing as claimed in claim 6, which is characterized in that in step 3), passive type ultrasonic transducer believes sound
Electric signal transmission number is converted into surface acoustic wave sensor, specifically includes the following steps:
A) acoustic matching layer damply to be transmitted to passive type ultrasonic transducer from active ultrasonic transducer acoustical signal is low；
B) preceding piezoelectric layer and rear piezoelectric layer, which are experienced, vibrates and acoustical signal is converted to electric signal；
C) electric signal transmission is to surface acoustic wave sensor.
9. method for sensing as claimed in claim 6, which is characterized in that in step 4), surface acoustic wave sensor and tested pair
The inner material or physical environment of elephant interact, specifically includes the following steps:
A) electric signal from passive type ultrasonic transducer is converted to acoustical signal and passed on the surface of piezoelectric substrate by interdigital electrode
It broadcasts；
B) it is located at the sensitive layer of piezoelectric substrate performance and the substance inside measurand or physical environment interacts, causes sensitivity
Physical characteristic of layer itself changes；
C) physical characteristic of sensitive layer, which changes, causes the velocity of wave of acoustical signal or resonant frequency that corresponding quantitative variation occurs.
10. method for sensing as claimed in claim 6, which is characterized in that in step 5), surface acoustic wave sensor is by acoustical signal
Electric signal transmission is converted into passive type ultrasonic transducer, specifically includes the following steps:
A) when interdigital electrode is arranged in the both ends for being located at sensitive layer in piezoelectric substrate, the variation of velocity of wave in acoustical signal is detected；
When interdigital electrode is arranged in the centre of piezoelectric substrate, the variation of resonant frequency in acoustical signal is detected, to take in acoustical signal
With measurand internal information；
B) acoustical signal for carrying measurand internal information is converted to electric signal by piezoelectric substrate, is transmitted to passive type ultrasound and is changed
It can device.
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