CN107037772B - Detection device and method - Google Patents
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- G05B23/02—Electric testing or monitoring
- G05B23/0205—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults
- G05B23/0259—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults characterized by the response to fault detection
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Abstract
the detection device and the method of the invention strengthen the FD/FP function which takes the state of an operator as an object on the controller level. The detection device of the present invention includes: an operation detection unit (1) that detects an operation of the controller by an operator; a display time counting unit (2) that counts and holds the display accumulation time during which the controller displays, in response to the operation of the operator, the basic setting confirmation screen that is supposed not to be normally viewed, based on the detection result of the operation detection unit (1); a reset unit (3) which resets the display accumulation time held in the display time counting unit (2) to 0 when receiving a reset signal from the outside; an information output unit (4) that outputs information indicating the accumulated time to the outside; and an alarm output unit (5) that outputs an alarm to the outside when the display cumulative time exceeds a predetermined threshold value.
Description
Technical Field
The present invention relates to a detection device and a detection method for detecting or predicting a failure in operation of an operator by detecting a state of the operator of an operation target device by summing up display levels of specific screens displayed by the target device such as a controller.
background
In a semiconductor manufacturing apparatus, an EES (Equipment Engineering System) is moving to a practical stage. The EES is a system for checking whether a semiconductor manufacturing apparatus is functioning normally or not by using data, thereby improving the reliability and productivity of the apparatus. Main purposes of the EES are failure Detection (FD: Fault Detection) and failure Prediction (FP: Fault Prediction) for the device itself (see non-patent document 1).
The FD/FP has hierarchical mastering methods such as a device control hierarchy, a module hierarchy, a subsystem hierarchy, an I/O device hierarchy, and the like. The FD/FP of the device control level monitors and detects whether or not the device function operates within an allowable range of the device specification based on the processing condition instructed by the host or the operator. The FD/FP of the module level is to monitor/detect whether a module composed of a device or a subsystem can perform processing according to an indication value. The FD/FP at the subsystem level monitors and detects whether or not a composite system including a plurality of devices performing feedback control stably operates based on a plurality of parameter settings. The FD/FP of the I/O device level monitors and detects whether or not a sensor or an actuator constituting a device is operating stably according to a design value. Thus, the subject of the I/O device hierarchy is a sensor or actuator.
The FD/FP of the actuator is particularly practical in a sequence control operation performed by data (actuator data) of a bit string of (0, 1).
On the other hand, with respect to FD/FP of the sensor, process quantities such as temperature, pressure, flow rate, and the like are target data. With respect to these data, it is not reasonable to save all the data in msec. Therefore, a substrate processing apparatus supporting the EES has been proposed (see patent document 1), and the like: the data of the sensor is represented for each processing unit or every fixed period managed by the apparatus, and the value after the representation is checked. The representative value refers to a maximum value, a minimum value, an average value, and the like. If the FD/FP can be realized by these representative values, the communication amount, the required storage amount, and the like can be significantly reduced compared to the case of monitoring all data, and therefore, the efficiency is high.
as FD/FP using the representative value, FP of heater disconnection due to deterioration, FD of heater disconnection due to overcurrent, and the like are known. When the heater is deteriorated, the average value of the resistance values (non-process amounts) of the heater gradually increases, and therefore, when the average value of the resistance values of the heater is checked as a representative value, it is possible to predict disconnection of the heater due to deterioration. In addition, since the maximum value of the resistance value of the heater suddenly increases when the heater is disconnected due to an overcurrent, it is possible to detect disconnection of the heater due to the overcurrent by checking the maximum value of the resistance value of the heater as a representative value.
Thus, the FD/FP can be put to practical use as long as it is a non-procedural quantity. However, in the typical value conversion of the process amount, only the physical state is a target of processing, and the state of the operator cannot be processed, so that the information is not necessarily sufficient. Since the in-device decentralized configuration of the EES is a mounting method effective for improving the overall efficiency of the EES, it is desirable to further enhance the FD/FP function at the controller level accompanied by the operation of the operator.
In particular, in recent years, in a controller or a manufacturing apparatus that performs, for example, semiconductor manufacturing using the controller, a liquid crystal display or the like is sometimes used as a screen for an operation by an operator (see patent document 2). In the example of fig. 10, a liquid crystal display 101 integrated with a controller (temperature regulator) 100 is shown. In such a controller, there are many switchable screens, and the selectable/adjustable parameters involve many aspects, and therefore, the operation of the operator becomes complicated, and it is desired to strengthen the FD/FP function targeted for the state of the operator.
Therefore, the following defect detection system has been proposed: the FD/FP function targeted for the state of the operator is enhanced by totaling and holding operation frequency information indicating the frequency of changing the set value SP controlled in accordance with the operation of the operator (see patent document 3).
[ Prior art documents ]
[ patent document ]
[ patent document 1 ] Japanese patent application laid-open No. 2010-219460
[ patent document 2 ] Japanese patent laid-open No. 2001-154786
[ patent document 3 ] Japanese patent laid-open No. 2015-64627
[ non-patent literature ]
Non-patent document 1, " に Seki す る interpretation " of device performance of a device レ ベ ル で apparatus, a social company people electronic mood skill stone , 23.2005 (manual related to performance confirmation of device functions at device level, association of society electronic information technology industries, 3.23.2005)
Disclosure of Invention
[ problem to be solved by the invention ]
As described above, in recent years, it is desired in the industry to enhance the FD/FP function at the controller level accompanied by the operation of the operator. On the other hand, in the technique disclosed in patent document 3, the operation frequency information indicating the frequency of changing the set value SP to be controlled in response to the operation of the operator is summed up, but there is a problem that the operation of the operator to be detected is limited to the changing operation of the set value SP.
The present invention has been made to solve the above-mentioned problems, and an object of the present invention is to provide a detection apparatus and method that can enhance FD/FP functions for operator status at a controller level as compared with the conventional detection apparatus and method. In other words, the present invention provides a simple FD/FP related function that can be built in or out of a simple controller hierarchy (a temperature controller with a liquid crystal display function, etc.).
[ MEANS FOR SOLVING PROBLEMS ] A method for producing a semiconductor device
The detection device of the present invention is characterized by comprising: an operation detection unit that detects an operation of the subject apparatus by an operator; a display degree counting unit that counts, based on a detection result of the operation detection unit, a value indicating a degree of display of a specific screen assumed not to be normally viewed by the target device in accordance with an operation by the operator; and an information output unit that outputs information of the display degree to the outside.
In the configuration example of the detection apparatus 1 according to the present invention, the target device is a controller for control, the specific screen is a basic setting confirmation screen of the controller, and the display degree is a display accumulation time for displaying the basic setting confirmation screen.
in the configuration example of the detection apparatus 1 according to the present invention, the target device is a controller for control, the specific screen is a basic setting confirmation screen of the controller, and the display degree is a cumulative number of times of display of the basic setting confirmation screen.
In the configuration example of the detection device 1 according to the present invention, the basic setting confirmation screen is a confirmation screen regarding the installation state of hardware on the controller.
In the configuration example of the detection device 1 according to the present invention, the basic setting confirmation screen is a confirmation screen regarding a setting state of a selectable/adjustable parameter by function of the controller.
further, the configuration example 1 of the detection device of the present invention is characterized by further comprising a reset unit that resets the display degree to an initial state when a reset signal is received from outside.
In addition, the detection device 1 according to the present invention further includes an alarm output unit that outputs an alarm when the value indicating the display degree exceeds a predetermined threshold value.
Further, a detection method according to the present invention includes: an operation detection step of detecting an operation of the subject device by an operator; a display degree counting step of counting, based on a detection result of the operation detecting step, a value indicating a display degree of a specific screen assumed not to be normally viewed by the target device in accordance with an operation by the operator; and an information output step of outputting the information of the display degree to the outside.
[ Effect of the invention ]
According to the present invention, it is possible to enhance the FD/FP function for the operator state at the controller level and detect or predict the operation failure of the operator by providing the operation detection means for detecting the operation of the operator on the target device and the display degree counting means for counting the value indicating the display degree at which the target device displays the specific screen which is supposed not to be normally viewed in accordance with the operation of the operator, based on the detection result of the operation detection means. In the present invention, by summing up the values indicating the degree of display of the specific screen displayed by the target device, the degree of confusion of the operator who operates the target device can be detected without being limited to the operation of changing the set value SP.
Drawings
Fig. 1 is a block diagram showing a configuration of a detection device according to embodiment 1 of the present invention.
Fig. 2 is a block diagram showing a configuration of a heating device to be operated by the controller.
Fig. 3 is a diagram showing an example of an operation monitoring screen of the controller.
Fig. 4 is a diagram showing an example of a manual operation amount setting screen of the controller.
fig. 5 is a flowchart illustrating an operation of the detection device according to embodiment 1 of the present invention.
fig. 6 is a diagram showing an example of a basic setting confirmation screen of the controller.
Fig. 7 is a diagram showing another example of the basic setting confirmation screen of the controller.
Fig. 8 is a block diagram showing the configuration of the detection device according to embodiment 2 of the present invention.
Fig. 9 is a flowchart illustrating an operation of the detection device according to embodiment 2 of the present invention.
Fig. 10 is a diagram showing an example of a liquid crystal display integrated with a controller.
Detailed Description
[ principles of the invention ]
In general, a device such as a controller is used by switching a plurality of operation screens. The inventors noted the following: in such a device including an operation unit for switching between a plurality of operation screens and using the operation unit, there are cases where data such as how long a screen is displayed relates to some work improvement.
For example, after the installation of a manufacturing apparatus for a product such as a semiconductor is completed (after the start of production), it is necessary for the apparatus operator to view a confirmation screen or the like relating to the internal specification of the controller itself. Therefore, the frequency of displaying the confirmation screen of such a property is also a frequency of confusion of the apparatus operator, and may be a sign of a large trouble. On the other hand, there are also problems as follows: in the case where the operator of the apparatus is merely confused by himself/herself, it is difficult for the person in charge of the production line to recognize that the operator is confused by himself/herself. The inventors have conceived the usefulness of the following operations in light of the fact that: after the device is installed (after the start of production), a screen of a property that should not be viewed by the device operator is specified, and the frequency of displaying the screen is counted as an index.
[ embodiment 1 ]
Embodiments of the present invention will be described below with reference to the drawings. Fig. 1 is a block diagram showing a configuration of a detection device according to embodiment 1 of the present invention. In the present embodiment, an example in which the target device is a simple controller (temperature regulator) will be described.
The controller is installed for temperature control of the heating device, for example, as in fig. 2. The heating apparatus includes a heating furnace 10 for heating an object to be heated, which is a processing target, an electric heater 11, a temperature sensor 12 for measuring a temperature in the heating furnace 10, a controller (temperature regulator) 13 for controlling the temperature in the heating furnace 10, a power regulator 14, a power supply circuit 15, and a PLC (Programmable logic controller) 16 for controlling the entire heating apparatus.
The controller 13 calculates the operation amount MV so that the temperature PV measured by the temperature sensor 12 coincides with the temperature set value SP. The power conditioner 14 determines electric power according to the operation amount MV, and supplies the determined electric power to the electric heater 11 through the power supply circuit 15. In this manner, the controller 13 controls the temperature of the object to be heated in the heat treatment furnace 10.
In a normal control state, the operator of the heating apparatus displays, for example, an operation monitoring screen 20 for displaying the temperature set value SP and the temperature measured value PV as shown in fig. 3 or a manual operation amount setting screen 21 for manually setting the operation amount MV as shown in fig. 4 on the controller 13.
As shown in fig. 1, the detection device of the present embodiment, which uses such a controller 13 as a target device, includes: an operation detection unit 1 that detects an operation of the controller 13 by an operator; a display time counting unit 2 (display degree counting means) for counting and holding a display accumulation time during which the controller 13 displays a basic setting confirmation screen, which is supposed not to be normally viewed, in response to an operation of the operator, based on a detection result of the operation detecting unit 1; a reset section 3 which resets the display accumulated time held in the display time counting section 2 to 0 when receiving a reset signal from the outside; an information output unit 4 for outputting information indicating the accumulated time to the outside; and an alarm output unit 5 that outputs an alarm to the outside when the display cumulative time exceeds a predetermined threshold. The display accumulated time is a value indicating how much the controller 13 displays a specific screen that is supposed not to be normally viewed in response to an operation by the operator.
In the present embodiment, the description is given of an example in which the controller 13 as the target device is provided with the display 130 with a touch panel function, and the display 130 with a touch panel function is a display unit that transmits information to the operator and is an input unit that receives an operation from the operator, but the controller 13 may be configured to include a display unit and an input unit separately.
Next, the operation of the detection device according to the present embodiment will be described with reference to the flowchart of fig. 5. In the initial state, the reset unit 3 resets the display accumulated time stored in the display time totaling unit 2 to 0 by receiving a reset signal from the outside (step S100 in fig. 5). As a condition for generating the reset signal, for example, the following condition is considered: inputting a reset signal by an operator or a manager of the heating apparatus along with the completion of the installation of the heating apparatus; alternatively, as the operator is replaced, the replaced operator or the manager of the heating apparatus inputs a reset signal or the like.
The operation detection unit 1 detects an operation of the controller 13 by the operator (in the present embodiment, an operation in which the operator touches the screen of the touch panel function-equipped display 130).
When the operation detection unit 1 detects an operation of the controller 13 by the operator (yes in step S101 in fig. 5) and the operation is an operation of switching the screen of the controller 13 to a basic setting confirmation screen (for example, a confirmation screen related to the internal specification of the controller itself) (yes in step S102 in fig. 5), the display time totaling unit 2 starts to display measurement of the accumulated time with the current value of the displayed accumulated time as an initial value (step S103 in fig. 5).
on the other hand, when the operation detection unit 1 detects an operation of the controller 13 by the operator (yes in step S101) and the operation is an operation of switching the screen of the controller 13 from the basic setting confirmation screen to another screen (yes in step S104 in fig. 5), the display time totaling unit 2 stops the measurement of the display accumulated time (step S105 in fig. 5).
In this manner, while the display 130 with the touch panel function of the controller 13 displays the basic setting confirmation screen (from when there is an operation to switch to the basic setting confirmation screen to when there is an operation to switch to another screen), the measurement and update of the display accumulation time are continued.
Next, when the display accumulated time stored in the display time counting unit 2 exceeds a predetermined threshold value (yes in step S106 in fig. 5), the alarm output unit 5 outputs an alarm (step S107 in fig. 5). As a method of outputting the alarm, for example, a method of displaying the content of notifying the generation of the alarm on the display 130 with a touch panel function of the controller 13 or a method of transmitting information notifying the generation of the alarm to the outside may be used.
Since the display accumulated time is displayed on the screen and can be confirmed even in the control operation of the controller 13, the operation for frequently confirming the display accumulated time does not always match the control operation time (information of a nature different from the operation time management can be extracted). In this sense, it may be linked to the time taken to resolve certain faults, and thus to the low knowledge or skill of the operator's equipment. That is, the display accumulated time is an index of the degree of confusion of the operator. Thus, the alarm may not be output but only the accumulated time may be displayed.
Specifically, when the operation detection unit 1 detects that the operator has operated the controller 13 (yes in step S101) and the operation is an operation for requesting presentation of the display accumulated time (yes in step S108 in fig. 5), the information output unit 4 causes the display 130 with a touch panel function of the controller 13 to display the current display accumulated time stored in the display time counting unit 2 (step S109 in fig. 5).
The processing of steps S101 to S109 described above is repeatedly executed for each operation cycle until the operation of the controller 13 is terminated by an instruction from the operator, for example ("yes" in step S110 in fig. 5).
Specific examples of the basic setting confirmation screen according to the present embodiment include screens shown in fig. 6 and 7. The screen 22 shown in fig. 6 is a basic setting confirmation screen of the controller 13 regarding the installation state of hardware such as replaceable function-specific boards (slots). The screen 23 shown in fig. 7 is a basic setting confirmation screen regarding the setting state of the controller 13 in terms of software, such as selectable/adjustable parameters, which are classified by function.
In the present embodiment, the FD/FP functions that process the display accumulated time of the specific screen displayed by the controller 13 as information indicating the state of the operator can be distributed on a simple controller hierarchy (such as a thermostat). That is, the degree of confusion of the operator who operates the controller 13 is treated as a problem in the process of producing/manufacturing products such as semiconductors using the controller 13, and such a problem can be detected, although locally.
[ 2 nd embodiment ]
Next, embodiment 2 of the present invention will be explained. In the present embodiment, another example in which the target device is a simple controller (temperature regulator) will be described. Fig. 8 is a block diagram showing the configuration of the detection device according to the present embodiment, and the same reference numerals are given to the same configurations as those in fig. 1.
The detection device of the present embodiment includes: an operation detection unit 1; a display count totaling unit 2a (display degree totaling means) for totaling and holding the cumulative number of times of display of the basic setting confirmation screen by the controller 13 in accordance with the operation of the operator, based on the detection result of the operation detecting unit 1; a reset unit 3a that resets the cumulative number of display times held in the display number counting unit 2a to 0 when receiving a reset signal from the outside; an information output unit 4a that outputs information indicating the cumulative count to the outside; and an alarm output unit 5a that outputs an alarm to the outside when the cumulative number of times of display exceeds a predetermined threshold. The cumulative number of times of display is a value indicating how much the controller 13 displays a specific screen that is supposed not to be normally viewed in response to an operation by the operator.
next, the operation of the detection device according to the present embodiment will be described with reference to the flowchart of fig. 9. In the initial state, the reset unit 3a resets the cumulative number of times of display stored in the display number-of-times counting unit 2a to 0 by receiving a reset signal from the outside (step S200 in fig. 9). The situation of generating the reset signal is the same as that described in embodiment 1.
The operation of the operation detection unit 1 is the same as that described in embodiment 1. When the operation detection unit 1 detects an operation of the controller 13 by the operator (yes in step S201 in fig. 9) and the operation is an operation of switching the screen of the controller 13 to a basic setting confirmation screen (for example, a confirmation screen related to the internal specification of the controller itself) (yes in step S202 in fig. 9), the display count totaling unit 2a adds 1 to the value of the display cumulative count (step S203 in fig. 9).
In this manner, the cumulative number of times of display is updated every time the basic setting confirmation screen is displayed on the display 130 with the touch panel function of the controller 13 (every time an operation for switching to the basic setting confirmation screen is performed).
Next, when the cumulative display count stored in the display count totaling unit 2a exceeds a predetermined threshold value (yes in step S204 in fig. 9), the alarm output unit 5a outputs an alarm (step S205 in fig. 9). As in embodiment 1, as a method of outputting an alarm, for example, a method of displaying a content for notifying the generation of an alarm on the touch panel-equipped display 130 of the controller 13 or a method of transmitting information for notifying the generation of an alarm to the outside may be used.
The display cumulative count is an index of the degree of confusion of the operator, as with the display cumulative time of embodiment 1. Thus, the alarm may not be output but only the accumulated number of times may be displayed. That is, when the operation detection unit 1 detects that the operator has operated the controller 13 (yes in step S201) and the operation is an operation for requesting presentation of the cumulative number of times of display (yes in step S206 in fig. 9), the information output unit 4a causes the touch panel function-equipped display 130 of the controller 13 to display the current cumulative number of times of display stored in the cumulative number of times of display counting unit 2a (step S207 in fig. 9).
The processing in steps S201 to S207 is repeatedly executed for each operation cycle until the operation of the controller 13 is terminated by an instruction from the operator, for example ("yes" in step S208 in fig. 9).
As described above, in the present embodiment, the same effects as those in embodiment 1 can be obtained.
Further, although the background art proposes the distributed arrangement of the EESs in the devices, the embodiments 1 and 2 are not limited to the EESs, and the controller hierarchy used in the air conditioning control of the building, the chemical plant, or the like is also within the scope of the present invention.
The detection device described in embodiments 1 and 2 can be realized by a computer equipped with a CPU (Central Processing Unit), a storage device, and an interface, and a program for controlling these hardware resources. The CPU executes the processing described in embodiments 1 and 2 in accordance with the program stored in the storage device.
[ industrial applicability ]
The present invention can be applied to a technique for detecting or predicting a bad condition of an operation of an operator.
Description of the symbols
1 operation detection part, 2 display time summation part, 2a display frequency summation part, 3a resetting part, 4a information output part, 5a alarm output part, 13 controller, 130 display with touch panel function.
Claims (10)
1. A detection device, comprising:
An operation detection unit that detects an operation of the subject apparatus by an operator;
A display degree counting unit that counts, based on a detection result of the operation detection unit, a value indicating a degree of display of a specific screen assumed not to be normally viewed by the target device in accordance with an operation by the operator; and
an information output unit that outputs information of the display degree to the outside,
The subject device is a controller for control,
The specific picture is a basic setting confirmation picture of the controller,
The basic setting confirmation screen is a confirmation screen related to the installation state of the hardware on the controller.
2. The detection apparatus according to claim 1,
The display degree is a display accumulation time for displaying the basic setting confirmation screen.
3. The detection apparatus according to claim 1,
The display degree is a cumulative number of times of displaying the basic setting confirmation screen.
4. The detection device according to any one of claims 1 to 3, further comprising a reset unit that resets the display degree to an initial state upon receiving a reset signal from outside.
5. The detection apparatus according to any one of claims 1 to 3, further comprising an alarm output unit that outputs an alarm when the value representing the degree of display exceeds a prescribed threshold value.
6. a method of detection, comprising:
An operation detection step of detecting an operation of the subject device by an operator;
A display degree counting step of counting, based on a detection result of the operation detecting step, a value indicating a display degree of a specific screen assumed not to be normally viewed by the target device in accordance with an operation by the operator; and
An information output step of outputting the information of the display degree to the outside,
The subject device is a controller for control,
the specific picture is a basic setting confirmation picture of the controller,
The basic setting confirmation screen is a confirmation screen related to the installation state of the hardware on the controller.
7. the detection method according to claim 6,
The display degree is a display accumulation time for displaying the basic setting confirmation screen.
8. The detection method according to claim 6,
The display degree is a cumulative number of times of displaying the basic setting confirmation screen.
9. The detection method according to any one of claims 6 to 8, further comprising a reset step of resetting the display degree to an initial state upon receiving a reset signal from outside.
10. The detection method according to any one of claims 6 to 8, further comprising an alarm output step of outputting an alarm when a value representing the degree of display exceeds a prescribed threshold value.
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| JP2016018629A JP6637319B2 (en) | 2016-02-03 | 2016-02-03 | Detecting device and method |
| JP2016-018629 | 2016-02-03 |
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| Publication Number | Publication Date |
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| CN107037772A CN107037772A (en) | 2017-08-11 |
| CN107037772B true CN107037772B (en) | 2019-12-13 |
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| CN201710063652.3A Expired - Fee Related CN107037772B (en) | 2016-02-03 | 2017-02-03 | Detection device and method |
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| JP (1) | JP6637319B2 (en) |
| KR (1) | KR101946700B1 (en) |
| CN (1) | CN107037772B (en) |
| TW (1) | TW201732472A (en) |
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| JP7295676B2 (en) * | 2019-03-26 | 2023-06-21 | 株式会社日本総合研究所 | Information processing device and program |
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| TW201732472A (en) | 2017-09-16 |
| KR101946700B1 (en) | 2019-05-10 |
| JP2017138758A (en) | 2017-08-10 |
| CN107037772A (en) | 2017-08-11 |
| KR20170092458A (en) | 2017-08-11 |
| JP6637319B2 (en) | 2020-01-29 |
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