JP6216607B2 - Defect detection system and defect detection method - Google Patents

Description

  The present invention relates to a failure detection system and a failure detection method capable of detecting or predicting a failure related to the operation efficiency of an apparatus.

  In semiconductor manufacturing equipment, EES (Equipment Engineering System) has entered a practical stage. The EES is a system that checks whether or not a semiconductor manufacturing apparatus is functioning normally with data and improves the reliability and productivity of the apparatus. The main purpose of EES is failure detection (FD: Fault Detection) and failure prediction (FP: Fault Prediction) for the device itself (see Non-Patent Document 1).

  In FD / FP, there is a way of grasping hierarchies of device control level, module level, subsystem level, and I / O device level. The FD / FP at the device control level is an FD / FP that monitors / detects whether the device function is operating within the allowable range of the device specification based on the processing conditions specified by the host or the operator. The module level FD / FP is FD / FP for monitoring / detecting whether a module constituted by a device or a subsystem can perform processing according to an instruction value. The subsystem level FD / FP is an FD / FP that monitors / detects whether a complex system including a plurality of devices that perform feedback control is operating stably based on some parameter settings. The FD / FP at the I / O device level is FD / FP that monitors / detects whether the sensors and actuators constituting the apparatus are operating stably as designed values. As described above, the main subjects at the I / O device level are sensors and actuators.

Regarding the FD / FP of the actuator, it can be said that the sequence control operation that requires only the bit string data (actuator data) of (0, 1) is in a practical stage.
On the other hand, regarding the FD / FP of the sensor, process quantities such as temperature, pressure, and flow rate become target data. For these data, msec. It is not reasonable to save all data at the level. Therefore, an EES-compliant substrate processing apparatus (see Patent Document 1) that checks the representative value by converting the sensor data into a representative value for each processing unit managed by the apparatus or for a certain period of time has been proposed. ing. The representative value is a maximum value, a minimum value, an average value, or the like. If FD / FP can be realized with these representative values, the amount of communication, the amount of required memory, and the like can be greatly reduced as compared with the case of monitoring all data.

  As FD / FP using a representative value, heater breakage FP due to deterioration, heater breakage FD due to overcurrent, and the like are known. When the heater deteriorates, the average value of the heater resistance value (non-process amount) gradually increases. Therefore, if the average value of the heater resistance value is checked as a representative value, the heater disconnection due to the deterioration is predicted. be able to. In addition, when the heater is disconnected due to an overcurrent, the maximum value of the heater resistance suddenly increases. If the maximum value of the heater resistance is checked as a representative value, the heater disconnection due to the overcurrent is detected. be able to.

JP 2010-219460 A

“Explanation on device function performance confirmation at device level”, Japan Electronics and Information Technology Industries Association, March 23, 2005

  As described above, the FD / FP can be put into practical use if it is a non-process amount. However, since representative values of the process amount are handled only in the physical state and the operation efficiency in the apparatus cannot be handled, the information is not always sufficient. Since the EES distributed arrangement in the device is an effective mounting method for increasing the overall efficiency of the EES, it is required to further strengthen the FD / FP function at the device control level reflecting the operation efficiency in the device. Yes.

  The present invention has been made to solve the above-described problems, and an object of the present invention is to provide a failure detection system and a failure detection method capable of strengthening the FD / FP function for operating efficiency at the device control level. And In other words, the present invention provides a simple FD / FP related function that can be built in or externally attached at the device control level.

The fault detection system of the present invention includes an operation amount calculation means for calculating an operation amount MV based on a set value SP and a control amount PV, and a special mode for switching between a special mode in which automatic control is not executed and a non-special mode in which automatic control is executed. / Special mode management means for managing non-special switching parameters in a state designated from the outside, operation amount output means for outputting the operation amount MV to the control target in the non-special mode, and the operation amount in the special mode A special operation amount output means for outputting the operation amount in the special mode to the control object instead of the MV; an automatic control time measurement means for measuring an automatic control time which is an elapsed time of the operation state in the non-special mode; Special mode time measuring means for measuring the special mode time which is the elapsed time of the operating state in the mode, and when the sum of the automatic control time and the special mode time has elapsed Special mode time rate calculating means for calculating a special mode time rate from the automatic control time and the special mode time when a predetermined reference elapsed time is reached, and a special mode time rate for storing the special mode time rate Storage means and reset means for resetting the automatic control time and the special mode time during measurement to zero when a reset signal is received from the outside or after the special mode time ratio is registered in the special mode time ratio storage means And each special mode management means manages the state of the different special / non-special switching parameters, and further includes priority order registration means in which priority information of a plurality of the special / non-special switching parameters is registered in advance. The manipulated variable output means and the special manipulated variable output means include a plurality of special / non-special switching parameter states and It is characterized in that to determine the operating mode of the control in accordance with the above order.
In addition, the fault detection system of the present invention switches the operation amount calculation means for calculating the operation amount MV based on the set value SP and the control amount PV, and the special mode in which automatic control is not executed and the non-special mode in which automatic control is executed. Special mode management means for managing the special / non-special switching parameters in a state designated from the outside, operation amount output means for outputting the operation quantity MV to the control target in the non-special mode, and the special mode Special operation amount output means for outputting the operation amount in the special mode to the control object instead of the operation amount MV, automatic control time measurement means for measuring the automatic control time which is the elapsed time of the operation state in the non-special mode, Special mode time measuring means for measuring a special mode time which is an elapsed time of the operating state in the special mode, and a sum of the automatic control time and the special mode time Special mode time rate calculating means for calculating a special mode time rate from the automatic control time and the special mode time when an overtime reaches a predetermined reference elapsed time, and a special mode for storing the special mode time rate Reset the automatic control time and the special mode time during measurement to zero when the reset signal is received from the time rate storage means and from the outside or after the special mode time ratio is registered in the special mode time rate storage means A reset unit, a special mode time rate acquisition unit for acquiring the special mode time rate held in the special mode time rate storage unit at a predetermined interval, and the reset unit after acquiring the special mode time rate. A reset signal transmitting means for transmitting a reset signal and a special mode time rate acquired by the special mode time rate acquiring means are stored. Special mode time rate history storage means, and when the amount of increase in the latest special mode time rate with respect to any past special mode time rate stored in the special mode time rate history storage means exceeds a predetermined threshold And a determination means for outputting an alarm.

Additionally, in an example of the failure detection system of the present invention, the special / non-special switching parameter outputs the previous SL manual operation amount for the operator to specify the special mode operation amount and a manual control mode the manipulated variable MV It is intended to include a manual / automatic switching parameter for switching the automatic control mode for outputting the special mode management means, and characterized in that it comprises a manual control mode managing means for managing a state before SL manual / automatic switching parameter To do.

Further, one configuration example of the failure detection system of the present invention further includes an alarm output means for outputting an alarm when the special mode time rate stored in the special mode time rate storage means exceeds a predetermined threshold value. It is characterized by providing .

The defect detection method includes an operation amount calculation step for calculating the operation amount MV based on the set value SP and the control amount PV, a special mode for switching between a special mode in which automatic control is not executed and a non-special mode in which automatic control is executed. An operation amount output step for outputting the operation amount MV to a control target in the non-special mode with reference to a plurality of special mode management means for managing the non-special switching parameter in a state designated from the outside, and the special mode management A special operation amount output step for outputting the operation amount in the special mode to the control object instead of the operation amount MV in the special mode, and an automatic control time which is an elapsed time of the operation state in the non-special mode An automatic control time measuring step for measuring the special mode time measuring step for measuring a special mode time which is an elapsed time of the operation state in the special mode. And the special mode time ratio is calculated from the automatic control time and the special mode time when the elapsed time of the sum of the automatic control time and the special mode time reaches a predetermined reference elapsed time. A special mode time rate calculation step to be registered in the time rate storage means, and when the reset signal is received from the outside or after the registration of the special mode time ratio in the special mode time rate storage means, the saw including a reset step of resetting the special mode time zero, a plurality of said special mode management unit manages the status of each said different special / non-featured switching parameter, the special operation amount output the manipulated variable output step A step is a state of a plurality of special / non-special switching parameters and a plurality of previous parameters registered in the priority order registration means. Depending on the priority information of the special / non-featured switching parameter, it is characterized in including the step of determining the operation mode of the control.
In addition, the defect detection method of the present invention switches between an operation amount calculation step for calculating the operation amount MV based on the set value SP and the control amount PV, a special mode in which automatic control is not executed, and a non-special mode in which automatic control is executed. An operation amount output step for outputting the operation amount MV to a control target in the non-special mode with reference to special mode management means for managing the special / non-special switching parameter of the device in a state designated from the outside, and the special mode A special operation amount output step of referring to the management means and outputting the operation amount in the special mode to the control object instead of the operation amount MV in the special mode, and automatic control that is the elapsed time of the operation state in the non-special mode An automatic control time measurement step for measuring the time, and a special mode time measurement step for measuring the special mode time which is the elapsed time of the operating state in the special mode. And the special mode time ratio is calculated from the automatic control time and the special mode time when the elapsed time of the sum of the automatic control time and the special mode time reaches a predetermined reference elapsed time. Special mode time rate calculation step to be registered in the mode time rate storage means, and the automatic control time being measured when a reset signal is received from the outside or after registration of the special mode time rate in the special mode time rate storage means A reset step for resetting the special mode time to zero, a special mode time rate acquisition step for acquiring the special mode time rate held in the special mode time rate storage means at a predetermined interval, and the special mode. Reset signal transmission step for transmitting the reset signal after acquisition of the time rate, and the special mode time rate acquisition step A special mode time rate history storage step for storing the acquired special mode time rate in the special mode time rate history storage means, and the latest special mode time ratio for any past special mode time ratio stored in the special mode time rate history storage means. And a determination step of outputting an alarm when the amount of increase in the mode time rate exceeds a predetermined threshold value.

  According to the present invention, by providing the automatic control time measuring means, the special mode time measuring means, the special mode time rate calculating means, and the special mode time rate storage means, the FD / The FP function can be strengthened, and a defect related to the operation efficiency of the apparatus can be detected or predicted.

  In the present invention, the operation amount output means and the special operation amount output means determine the priority of the operation by determining the operation mode of the control in accordance with the states of the plurality of special / non-special switching parameters and their priorities. Even when used in a different mode, it is possible to appropriately determine the control operation mode, and depending on the output of the operation amount from the operation amount output means and the special operation amount output means, the automatic control time measurement means and the special operation time The mode time measuring means can appropriately determine the control operation mode. As a result, the special mode time rate can be calculated appropriately.

  In the present invention, by providing the alarm output means, a simple alarm function related to the special mode time rate can be realized at the controller level.

  Further, in the present invention, by providing the special mode time rate acquisition unit, the special mode time rate history storage unit, and the determination unit, it is possible to realize more advanced operation state detection in the apparatus.

It is a block diagram which shows the structure of the malfunction detection system which concerns on the 1st Embodiment of this invention. It is a flowchart which shows operation | movement of the malfunction detection system which concerns on the 1st Embodiment of this invention. It is a flowchart which shows operation | movement of the malfunction detection system which concerns on the 1st Embodiment of this invention. It is a timing chart which shows the operation example of the malfunction detection system which concerns on the 1st Embodiment of this invention. It is a timing chart which shows another operation example of the malfunction detection system which concerns on the 1st Embodiment of this invention. It is a block diagram which shows the structure of the malfunction detection system which concerns on the 2nd Embodiment of this invention. It is a block diagram which shows the structure of the heating apparatus which concerns on the 2nd Embodiment of this invention. It is a flowchart which shows operation | movement of the malfunction detection system which concerns on the 2nd Embodiment of this invention. It is a figure which shows the example of recording of the special mode time rate in the 2nd Embodiment of this invention.

[Principle of Invention 1]
A simple controller such as a commercially available temperature controller has a standby mode and a manual control mode in addition to an automatic control mode in which PID control is actually executed. The standby mode is a mode used for forcibly maintaining the manipulated variable MV in a low state, and is not a mode for maintaining the controlled variable PV (for example, temperature) at a specific set value SP. The manual control mode is a mode in which the operator determines the operation amount MV, and is not a mode in which feedback control for stably maintaining the control amount PV (for example, temperature) at the set value SP is executed.

  In other words, non-automatic control modes such as standby mode and manual control mode (hereinafter referred to as special mode) are indicators that indicate that the components related to automatic control operations were not operating even though the device itself was operating. Focused on becoming. And, in combination with a management function (for example, reset function) for a certain period of time, if the ratio of time (special mode time rate) when the device is set to these special modes is detected, the operating efficiency of the device is improved. I came up with the idea that it can be used as a management function.

[Principle of Invention 2]
The special mode itself is generally specified by the set value of the mode switching parameter. However, when there are a plurality of mode switching parameters, it is necessary to pay attention to the calculation of the special mode time ratio. For example, the standby mode is specified by the standby / execution switching parameter A (A = 0: standby, A = 1: execution), and the manual control mode is specified by the manual / automatic switching parameter B (B = 0: manual). , B = 1: Automatic). If the standby / execution switching parameter A is prioritized over the manual / automatic switching parameter B in this way, when shifting from the standby state to the control execution state, the automatic control is not started but the manual control is carefully started. This is convenient because it is easy to avoid starting from automatic control by mistake when starting. However, if the automatic control mode is designated, it is not simply an operating state.

  Therefore, it is preferable that the priority order information of the plurality of mode switching parameters can be referred to and whether or not the automatic control state is determined based on the priority order information. In this way, the special mode time rate can be appropriately calculated even when the priority is changed by the user.

[First Embodiment]
Hereinafter, embodiments of the present invention will be described with reference to the drawings. FIG. 1 is a block diagram showing a configuration of a failure detection system according to the first embodiment of the present invention. This embodiment is an example corresponding to Principle 1 and Principle 2 of the invention. Here, a description will be given of an example in which the failure detection system is realized by a simple controller (temperature controller). The defect detection system of the present embodiment includes a temperature controller control function unit 1 that is a general configuration provided in a temperature controller, and an FD / FP function unit 2 that is a characteristic configuration of the present embodiment. It consists of.

  The temperature controller control function unit 1 includes a set value input unit 10 that inputs a set value SP from outside the temperature controller, a control amount input unit 11 that inputs a control amount PV from a measuring instrument (not shown), a set value SP, and a control. An operation amount calculation unit 12 that calculates the operation amount MV based on the amount PV, and an operation amount output unit 13 that outputs the operation amount MV to the outside of the temperature controller are provided.

  The FD / FP function unit 2 is a standby / execution switching parameter for switching between a standby mode that outputs a predetermined operation amount MVR (operation amount in a special mode) and an execution mode that executes control automatically or manually. A standby mode management unit 20 that manages A in a state designated from the outside of the temperature controller, and a standby operation amount that outputs a predetermined standby mode operation amount MVR to the control target instead of the operation amount MV in the standby mode The output unit 21 and a manual / automatic switching parameter B for switching between a manual control mode for outputting a manual operation amount MVM (operation amount in special mode) designated by the operator and an automatic control mode for outputting the operation amount MV Manual control mode management unit 22 for managing the state designated from the outside of the meter, and manual operation amount designated by the operator instead of the operation amount MV in the manual control mode A manual operation amount output unit 23 that outputs a VM to a control target, a priority order registration unit 24 in which priority order information of standby / execution switching parameter A and manual / automatic switching parameter B is registered in advance, and an automatic control operation are executed. An automatic control time measuring unit 25 that measures an automatic control time that is an elapsed time in a state in which the operation amount MV is output, and a special mode time that is an elapsed time in a non-automatic control operation state Special mode time measuring unit 26, and a special mode for calculating a special mode time ratio from the automatic control time and the special mode time when the elapsed time of the sum of the automatic control time and the special mode time reaches a predetermined reference elapsed time A time rate calculation unit 27, a special mode time rate storage unit 28 for storing a special mode time rate, and when a reset signal is received from the outside, or a special mode time rate recording After the special mode time rate is registered in the unit 28, the automatic control time during measurement and the reset unit 29 for resetting the special mode time to zero, and an alarm when the special mode time rate exceeds a predetermined threshold value. And an alarm output unit 30 for outputting to the outside of the temperature controller.

  Setting value input unit 10, control amount input unit 11, operation amount calculation unit 12, operation amount output unit 13, standby mode management unit 20, standby operation amount output unit 21, manual control mode management unit 22, and manual operation amount output unit 23 The automatic control time measurement unit 25, the special mode time measurement unit 26, the special mode time rate calculation unit 27, the special mode time rate storage unit 28, the reset unit 29, and the alarm output unit 30 correspond to the principle 1 of the invention. The priority order registration unit 24 corresponds to the second principle of the present invention. The standby mode management unit 20 and the manual control mode management unit 22 constitute a special mode management unit, and the standby operation amount output unit 21 and the manual operation amount output unit 23 constitute a special operation amount output unit.

  Hereinafter, the operation of the defect detection system of the present embodiment will be described with reference to FIGS. 2 and 3 are flowcharts showing the operation of the failure detection system, and FIGS. 4 and 5 are timing charts showing an operation example of the failure detection system. Needless to say, A in FIGS. 2 and 3 are connected, B is connected, and C is connected. Here, an example of processing when the standby mode of the standby / execution switching parameter A is registered as a higher priority than the manual / automatic switching parameter B will be described.

When the reset signal is received from the outside in the initial state, the reset unit 29 of the FD / FP function unit 2 causes the automatic control time measured by the automatic control time measuring unit 25 and the special mode time measured by the special mode time measuring unit 26. Are reset to 0 (step S100 in FIG. 2).
When the control operation of the temperature controller is activated, the operation amount calculation unit 12 of the temperature controller control function unit 1 and the set value SP and the control amount input unit 11 input from the set value input unit 10 according to a known control calculation algorithm. The operation amount MV is calculated so as to coincide with the control amount PV input from (step S101 in FIG. 2). An example of the control arithmetic algorithm is PID.

  In the standby operation amount output unit 21, the standby / execution switching parameter A for switching between the standby mode and the execution mode has a higher priority than the manual / automatic switching parameter B for switching between the manual control mode and the automatic control mode. When the priority information is registered in the priority registration unit 24 (YES in step S102 in FIG. 2), the value of the standby / execution switching parameter A managed by the standby mode management unit 20 is a value indicating the standby mode. When (A = 0) is set (YES in step S103 in FIG. 2), the value of the manual / automatic switching parameter B managed by the manual control mode management unit 22 is 0 (manual control mode) or 1 (automatic). Regardless of the control mode), a predetermined standby mode operation amount MVR is output to the control object instead of the operation amount MV (step in FIG. 2). 104). In the case of the example of FIG. 4, the time period from time t1 to t2 and from t4 to t5 is the time period for outputting the operation amount MVR in the standby mode. When the control target is, for example, a heat treatment furnace, the power regulator that supplies power to the heater of the heat treatment furnace is the actual output destination of the operation amount MVR in the standby mode.

  On the other hand, the manual operation amount output unit 23 is a case where priority information indicating that the standby / execution switching parameter A has a higher priority than the manual / automatic switching parameter B is registered in the priority registration unit 24 (see FIG. 2 in step S102), and the value of the standby / execution switching parameter A managed by the standby mode management unit 20 is set to a value (A = 1) indicating the execution mode (NO in step S103 in FIG. 2). When the value of the manual / automatic switching parameter B managed by the manual control mode management unit 22 is set to a value (B = 0) indicating the manual control mode (YES in step S105 in FIG. 2), the operator designates The manual operation amount MVM to be output is output to the control object instead of the operation amount MV (step S106 in FIG. 2). In the case of the example in FIG. 4, the time zone from time t2 to t3 is the time zone in which the manual operation amount MVM is output.

  The operation amount output unit 13 is a case in which priority information that the standby / execution switching parameter A has a higher priority than the manual / automatic switching parameter B is registered in the priority registration unit 24 (step S102 in FIG. 2). And the value of the standby / execution switching parameter A managed by the standby mode management unit 20 is set to a value (A = 1) indicating the execution mode (NO in step S103 in FIG. 2), and manual control is performed. When the value of the manual / automatic switching parameter B managed by the mode management unit 22 is set to a value (B = 1) indicating the automatic control mode (NO in step S105 in FIG. 2), the operation amount calculation unit 12 The calculated operation amount MV is output to the control target (step S107 in FIG. 2). In the case of the example in FIG. 4, the time zone from time t3 to t4 is the time zone in which the manipulated variable MV is output.

The automatic control time measuring unit 25 updates the automatic control time TX as shown in the following equation when the temperature controller is performing an automatic control operation (a state in which the operation amount MV is output) ( FIG. 2 step S108).
TX ← TX + dT (1)
dT is a control cycle. In this way, it is possible to measure the automatic control time TX, which is the elapsed time when the temperature controller is performing the automatic control operation.

The special mode time measurement unit 26 calculates the special mode time TY as follows when the temperature controller is in a non-automatic control operation state (a state in which the operation amount MVR in the standby mode or the manual operation amount MVM is output). (Step S109 in FIG. 2).
TY ← TY + dT (2)
In this way, the special mode time TY that is the elapsed time of the state of the non-automatic control operation can be measured.

When the elapsed time of the sum of the automatic control time TX and the special mode time TY has reached a predetermined reference elapsed time TR (YES in step S110 in FIG. 2), the special mode time rate calculating unit 27 RS is calculated as follows (step S111 in FIG. 2).
RS (%) = {TY / (TX + TY)} × 100 (3)

The special mode time rate calculation unit 27 registers the calculated special mode time rate RS in the special mode time rate storage unit 28 (step S112 in FIG. 2).
When the latest special mode time rate RS registered in the special mode time rate storage unit 28 exceeds a predetermined threshold value TH (YES in step S113 in FIG. 2), the alarm output unit 30 outputs an alarm to the temperature controller. Output to the outside (step S114 in FIG. 2). As an alarm output mode, for example, an alarm signal is output to a higher-level PC or the like. As a simple definition method of the threshold TH, the special mode time rate RS calculated in the previous reference elapsed time zone is set as the threshold TH, or a value of 120% of the special mode time rate RS is set as the threshold TH. There is a performance-based regulation method.

After registering the special mode time rate RS, the special mode time rate storage unit 28 outputs a reset signal to the reset unit 29 to reset the automatic control time TX and the special mode time TY to 0 (step S115 in FIG. 2). ).
When the priority of the standby / execution switching parameter A is higher than that of the manual / automatic switching parameter B, the processing of steps S101 to S115 as described above is performed by, for example, the operation of the FD / FP function unit 2 according to an instruction from the operator The process is repeatedly executed every control cycle dT until the process is completed (YES in step S116 in FIG. 2).

Next, an example of processing when the automatic control mode of the manual / automatic switching parameter B is registered as having a higher priority than the standby / execution switching parameter A will be described with reference to FIGS. 2, 3, and 5. To do.
The processing in steps S100 and S101 in FIG. 2 is as described above.

  The operation amount output unit 13 is a case where priority information indicating that the manual / automatic switching parameter B has a higher priority than the standby / execution switching parameter A is registered in the priority registration unit 24 (step S102 in FIG. 2). NO) and the value of the manual / automatic switching parameter B managed by the manual control mode management unit 22 is set to a value (B = 1) indicating the automatic control mode (YES in step S117 in FIG. 3). The operation amount MV calculated by the operation amount calculation unit 12 is controlled regardless of whether the value of the standby / execution switching parameter A managed by the standby mode management unit 20 is 0 (standby mode) or 1 (execution mode). (Step S118 in FIG. 3). In the case of the example in FIG. 5, the time zone from time t7 to t9 is the time zone in which the manipulated variable MV is output.

  The standby operation amount output unit 21 is a case where priority information that the manual / automatic switching parameter B has a higher priority than the standby / execution switching parameter A is registered in the priority registration unit 24 (step in FIG. 2). (NO in S102), and the value of the manual / automatic switching parameter B managed by the manual control mode management unit 22 is set to a value (B = 0) indicating the manual control mode (NO in step S117 in FIG. 3). When the value of standby / execution switching parameter A managed by standby mode management unit 20 is set to a value indicating standby mode (A = 0) (YES in step S119 in FIG. 3), standby specified in advance The mode operation amount MVR is output to the control object instead of the operation amount MV (step S120 in FIG. 3). In the case of the example in FIG. 5, the time zone from time t5 to t6 is the time zone in which the standby mode operation amount MVR is output.

  The manual operation amount output unit 23 is a case where priority order information that the manual / automatic switching parameter B has a higher priority than the standby / execution switching parameter A is registered in the priority registration unit 24 (step in FIG. 2). (NO in S102), and the value of the manual / automatic switching parameter B managed by the manual control mode management unit 22 is set to a value (B = 0) indicating the manual control mode (NO in step S117 in FIG. 3). When the value of the standby / execution switching parameter A managed by the standby mode management unit 20 is set to a value (A = 1) indicating the execution mode (NO in step S119 in FIG. 3), the manual specified by the operator The manipulated variable MVM is output to the control object instead of the manipulated variable MV (step S121 in FIG. 3). In the case of the example in FIG. 5, the time period from time t6 to t7 is the time period for outputting the manual operation amount MVM.

When the operation amount MV is output, the process proceeds to step S108 in FIG. 2, and when the operation amount MVR in the standby mode or the manual operation amount MVM is output, the process proceeds to step S109 in FIG. The processes in steps S108 to S115 in FIG. 2 are as described above.
When the priority of the manual / automatic switching parameter B is higher than that of the standby / execution switching parameter A, the processes in steps S101, S102, S117 to S121, and S108 to 115 described above are performed by, for example, an FD according to an instruction from the operator. Until the operation of / FP function unit 2 is completed (YES in step S116 in FIG. 2), the process is repeatedly executed every control cycle dT.

  As described above, in the present embodiment, the simple alarm function related to the special mode time rate RS can be continued at the controller level (temperature controller) by the processing of FIGS.

[Second Embodiment]
Next, a second embodiment of the present invention will be described. This embodiment shows an example in which the failure detection system according to the first embodiment is applied to the temperature control system of the heating device. FIG. 6 is a block diagram showing the configuration of the defect detection system of the present embodiment. The same components as those in FIG. The malfunction detection system of the present embodiment is composed of a temperature controller control function unit 1, an FD / FP function unit 2, and an FD / FP function unit 3. The configurations and operations of the temperature controller control function unit 1 and the FD / FP function unit 2 are as described in the first embodiment.

  The FD / FP function unit 3 includes a special mode time rate acquisition unit 31 that acquires the special mode time rate RS held in the special mode time rate storage unit 28 of the FD / FP function unit 2 at predetermined intervals; A reset signal transmission unit 32 that transmits a reset signal to the reset unit 29 after acquiring the special mode time rate RS, and a special mode time rate history storage unit 33 that stores the special mode time rate RS acquired by the special mode time rate acquisition unit 31. And when the amount of increase in the latest special mode time rate RS with respect to any past special mode time rate RS stored in the special mode time rate history storage unit 33 exceeds a predetermined threshold Tr, automatic control operation And a determination unit 34 that outputs an alarm indicating a risk that the operation efficiency of the constituent element (operation amount output unit 13) is changed to a state where the operation efficiency is impaired.

  FIG. 7 is a block diagram illustrating a configuration of a heating apparatus to which the present embodiment is applied. The heating device includes a heating chamber 100 that heats an object to be processed, an electric heater 101, a temperature sensor 102 that measures the temperature in the heating chamber 100, and a temperature controller 103 that controls the temperature in the heating chamber 100. And a power regulator 104, a power supply circuit 105, and a PLC (Programmable Logic Controller) 106 that controls the entire heating device.

  The temperature controller 103 calculates the operation amount MV so that the temperature PV measured by the temperature sensor 102 matches the temperature set value SP. As described in the first embodiment, the temperature controller 103 outputs one of the operation amount MV, the standby mode operation amount MVR, and the manual operation amount MVM. The power regulator 104 determines power corresponding to the manipulated variables MV, MVR, and MVM, and supplies the determined power to the electric heater 101 through the power supply circuit 105. Thus, the temperature controller 103 controls the temperature of the object to be heated in the heating chamber 100.

  The temperature controller control function unit 1 and the FD / FP function unit 2 in FIG. 6 are mounted on the temperature controller 103, and the FD / FP function unit 3 is mounted on the PLC 106 including a higher-level PC than the temperature controller 103. Is done.

Next, the operation of the FD / FP function unit 3 of the defect detection system of the present embodiment will be described with reference to FIG.
The special mode time rate acquisition unit 31 acquires the special mode time rate RS held in the special mode time rate storage unit 28 of the FD / FP function unit 2 (step S200 in FIG. 8).

After acquiring the special mode time rate RS, the special mode time rate acquisition unit 31 instructs the reset signal transmission unit 32 to transmit a reset signal. In response to this instruction, the reset signal transmission unit 32 transmits a reset signal to the reset unit 29 of the FD / FP function unit 2 (step S201 in FIG. 8). The operation of the reset unit 29 is as described in the first embodiment.
The special mode time rate history storage unit 33 stores the special mode time rate RS acquired by the special mode time rate acquisition unit 31 (step S202 in FIG. 8).

  When the determination unit 34 compares the latest special mode time rate RS acquired by the special mode time rate acquisition unit 31 with any past special mode time rate RS stored in the special mode time rate history storage unit 33. When the latest special mode time rate RS is higher than the past special mode time rate RS, and the increase amount of the latest special mode time rate RS with respect to the past special mode time rate RS exceeds a predetermined threshold Tr (FIG. 8, step S203), an alarm X indicating the risk of transition to a state where the operating efficiency of the components related to the automatic control operation is impaired is output (step S204 in FIG. 8). Examples of the output form of the alarm X include LED lighting, message display, and voice output.

  The processes in steps S200 to S204 as described above are repeatedly executed at regular intervals until, for example, the operation of the FD / FP function unit 3 is terminated by an instruction from the operator (YES in step S205 in FIG. 8). The operation cycle of the FD / FP function unit 3 is set to a value longer than the control cycle dT of the temperature controller control function unit 1 and the FD / FP function unit 2.

[Operation status detection example]
Here, the case where the defect detection system of the present embodiment is applied to the temperature control system of the heating apparatus shown in FIG. 7 will be described. In the production process using a heating device, there are various operation procedures depending on the target product, and there are various changes in operation / non-operation, but the operation pattern is limited, and there is almost a standard operation pattern in one week. It shall be executed at an average frequency. Therefore, the operation cycle of the FD / FP function unit 3 is set to one week. The threshold is Tr = 20%. It is assumed that the special mode time rate RS is recorded in the special mode time rate history storage unit 33 every week as shown in FIG.

As is clear from FIG. 9, in the 28th week, the special mode time rate RS increased by a threshold value Tr = 20% higher than the special mode time rate RS in the third week (37% −16% = 21%). As shown, an alarm X is output.
As described above, in this embodiment, it is possible to detect a more advanced operation state in the apparatus as compared with the first embodiment. According to the present embodiment, the production process manager can recognize the danger that the operating efficiency of the components related to the automatic control operation has been impaired and can take some measures.

  In the first and second embodiments, both the standby / execution switching parameter A and the manual / automatic switching parameter B are special / non-special switching parameters. However, the standby / execution switching parameter A and manual / automatic switching are used. Either one of the parameters B may be a special / non-special switching parameter. When only the standby / execution switching parameter A is used as a special / non-special switching parameter, the manual control mode management unit 22, the manual operation amount output unit 23, and the priority order registration unit 24 are unnecessary. In this case, the standby mode (A = 0) is the special mode, and the execution mode (A = 1) is the non-special mode.

  Further, when only the manual / automatic switching parameter B is used as the special / non-special switching parameter, the standby mode management unit 20, the standby operation amount output unit 21, and the priority order registration unit 24 are unnecessary. In this case, the manual control mode (B = 0) is the special mode, and the automatic control mode (B = 1) is the non-special mode.

  In addition, although the background technology deals with the distributed arrangement of the EES in the apparatus, the first and second embodiments are not limited to the EES, but the apparatus control level used in building air conditioning control, chemical plants, and the like. Also falls within the scope.

  The failure detection system described in the first and second embodiments can be realized by a computer having a CPU (Central Processing Unit), a storage device, and an interface, and a program for controlling these hardware resources. The CPU executes the processing described in the first and second embodiments in accordance with a program stored in the storage device. As described above, when the failure detection system is distributed and arranged in a plurality of devices, the CPU of each device may execute processing according to a program stored in the storage device of the device itself.

  The present invention can be applied to a technique for detecting or predicting a defect related to the operation efficiency of an apparatus.

  DESCRIPTION OF SYMBOLS 1 ... Temperature controller control function part, 2, 3 ... FD / FP function part, 10 ... Setting value input part, 11 ... Control amount input part, 12 ... Operation amount calculation part, 13 ... Operation amount output part, 20 ... Standby Mode management unit, 21 ... Standby operation amount output unit, 22 ... Manual control mode management unit, 23 ... Manual operation amount output unit, 24 ... Priority order registration unit, 25 ... Automatic control time measurement unit, 26 ... Special mode time measurement unit 27 ... Special mode time rate calculation unit, 28 ... Special mode time rate storage unit, 29 ... Reset unit, 30 ... Alarm output unit, 31 ... Special mode time rate acquisition unit, 32 ... Reset signal transmission unit, 33 ... Special mode Time rate history storage unit 34... Determination unit.

Claims (8)

An operation amount calculating means for calculating an operation amount MV based on the set value SP and the control amount PV;
A plurality of special mode management means for managing special / non-special switching parameters for switching between a special mode in which automatic control is not executed and a non-special mode in which automatic control is executed, in a state designated from the outside;
An operation amount output means for outputting the operation amount MV to a control object in the non-special mode;
Special operation amount output means for outputting the operation amount in the special mode to the control object instead of the operation amount MV in the special mode;
Automatic control time measuring means for measuring automatic control time which is the elapsed time of the operating state in the non-special mode;
Special mode time measuring means for measuring a special mode time which is an elapsed time of the operating state in the special mode;
Special mode time rate calculation means for calculating a special mode time rate from the automatic control time and the special mode time when the elapsed time of the sum of the automatic control time and the special mode time reaches a predetermined reference elapsed time When,
Special mode time rate storage means for storing the special mode time rate;
When receiving a reset signal from the outside or after registering the special mode time rate in the special mode time rate storage means, the automatic control time during measurement and the reset means for resetting the special mode time to zero ,
Each special mode management means manages the state of the different special / non-special switching parameters,
Furthermore, a priority order registration means in which priority information of a plurality of the special / non-special switching parameters is registered in advance is provided,
The malfunction detection system, wherein the manipulated variable output means and the special manipulated variable output means determine a control operation mode in accordance with a state of a plurality of the special / non-special switching parameters and their priorities . An operation amount calculating means for calculating an operation amount MV based on the set value SP and the control amount PV;
Special mode management means for managing special / non-special switching parameters for switching between a special mode that does not execute automatic control and a non-special mode that executes automatic control in a state designated from the outside,
An operation amount output means for outputting the operation amount MV to a control object in the non-special mode;
Special operation amount output means for outputting the operation amount in the special mode to the control object instead of the operation amount MV in the special mode;
Automatic control time measuring means for measuring automatic control time which is the elapsed time of the operating state in the non-special mode;
Special mode time measuring means for measuring a special mode time which is an elapsed time of the operating state in the special mode;
Special mode time rate calculation means for calculating a special mode time rate from the automatic control time and the special mode time when the elapsed time of the sum of the automatic control time and the special mode time reaches a predetermined reference elapsed time When,
Special mode time rate storage means for storing the special mode time rate;
When receiving a reset signal from the outside, or after registering the special mode time rate in the special mode time rate storage means, reset means for resetting the automatic control time and the special mode time during measurement to zero,
Special mode time rate acquisition means for acquiring the special mode time rate held in the special mode time rate storage means at predetermined intervals;
Reset signal transmitting means for transmitting the reset signal to the reset means after obtaining the special mode time rate;
Special mode time rate history storage means for storing the special mode time rate acquired by the special mode time rate acquisition means;
A determination means for outputting an alarm when the amount of increase in the latest special mode time ratio with respect to any past special mode time ratio stored in the special mode time ratio history storage means exceeds a predetermined threshold; fault detecting system characterized in that it comprises. In the malfunction detection system according to claim 1 or 2,
The special / non-special switching parameter is pre SL manual / automatic switching parameter for switching the automatic control mode the operator outputs a manual control mode for outputting the manual operation amount for designating the manipulated variable MV as a special mode operation amount Including
The special mode management means, fault detecting system which comprises a manual control mode managing means for managing a state before SL manual / automatic switching parameter. In the malfunction detection system according to any one of claims 1 to 3,
The fault detection system further comprises alarm output means for outputting an alarm when the special mode time rate stored in the special mode time rate storage means exceeds a predetermined threshold value. An operation amount calculating step for calculating an operation amount MV based on the set value SP and the control amount PV;
Refer to a plurality of special mode management means for managing special / non-special switching parameters for switching between a special mode that does not execute automatic control and a non-special mode that executes automatic control in a state designated from the outside, and An operation amount output step of outputting the operation amount MV to the control target in the mode;
A special operation amount output step of referring to the special mode management means and outputting the operation amount in the special mode to the control object instead of the operation amount MV in the special mode;
An automatic control time measuring step for measuring an automatic control time which is an elapsed time of the operating state in the non-special mode;
A special mode time measuring step for measuring a special mode time which is an elapsed time of the operating state in the special mode;
When the elapsed time of the sum of the automatic control time and the special mode time reaches a predetermined reference elapsed time, the special mode time ratio is calculated by calculating the special mode time ratio from the automatic control time and the special mode time. A special mode time ratio calculation step to be registered in the means;
When receiving the reset signal from the outside or the after registration of the special mode time constant of the special mode time ratio storage means, look including a reset step of resetting the automatic control time and the special mode period in the measured zero ,
A plurality of special mode management means for managing different states of the special / non-special switching parameters,
The manipulated variable output step and the special manipulated variable output step include the states of the plurality of special / non-special switching parameters and the priorities of the plurality of special / non-special switching parameters registered in advance in the priority order registering means. A defect detection method comprising a step of determining an operation mode of control according to information . An operation amount calculating step for calculating an operation amount MV based on the set value SP and the control amount PV;
Refer to the special mode management means for managing the special / non-special switching parameters for switching between the special mode that does not execute automatic control and the non-special mode that executes automatic control in a state designated from the outside. An operation amount output step of outputting the operation amount MV to a control target;
A special operation amount output step of referring to the special mode management means and outputting the operation amount in the special mode to the control object instead of the operation amount MV in the special mode;
An automatic control time measuring step for measuring an automatic control time which is an elapsed time of the operating state in the non-special mode;
A special mode time measuring step for measuring a special mode time which is an elapsed time of the operating state in the special mode;
When the elapsed time of the sum of the automatic control time and the special mode time reaches a predetermined reference elapsed time, the special mode time ratio is calculated by calculating the special mode time ratio from the automatic control time and the special mode time. A special mode time ratio calculation step to be registered in the means;
A reset step for resetting the automatic control time during measurement and the special mode time to zero when receiving a reset signal from the outside or after registering the special mode time rate in the special mode time rate storage means;
A special mode time rate acquisition step of acquiring special mode time rates held in the special mode time rate storage means at predetermined intervals;
A reset signal transmission step of transmitting the reset signal after obtaining the special mode time rate;
Special mode time rate history storage step for storing the special mode time rate acquired in the special mode time rate acquisition step in the special mode time rate history storage means;
A determination step of outputting an alarm when the amount of increase in the latest special mode time rate with respect to any past special mode time rate stored in the special mode time rate history storage means exceeds a predetermined threshold; A defect detection method characterized by including . In the malfunction detection method of Claim 5 or 6 ,
The special / non-special switching parameter is pre SL manual / automatic switching parameter for switching the automatic control mode the operator outputs a manual control mode for outputting the manual operation amount for designating the manipulated variable MV as a special mode operation amount Including
The special mode management means, fault detecting method characterized by comprising a manual control mode managing means for managing a state before SL manual / automatic switching parameter. In the malfunction detection method of any one of Claims 5 thru | or 7 ,
The fault detection method further includes an alarm output step of outputting an alarm when the special mode time rate stored in the special mode time rate storage means exceeds a predetermined threshold value.

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