CN107037516A - Adjustable-size mask plate automatic switchover translation system - Google Patents
Adjustable-size mask plate automatic switchover translation system Download PDFInfo
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- CN107037516A CN107037516A CN201710432475.1A CN201710432475A CN107037516A CN 107037516 A CN107037516 A CN 107037516A CN 201710432475 A CN201710432475 A CN 201710432475A CN 107037516 A CN107037516 A CN 107037516A
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- plate
- mask plate
- clamp device
- translation stage
- adjustable
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- 238000013519 translation Methods 0.000 title claims abstract description 49
- 230000008602 contraction Effects 0.000 claims description 13
- 238000003466 welding Methods 0.000 claims description 4
- 239000011230 binding agent Substances 0.000 claims description 3
- 239000000203 mixture Substances 0.000 claims description 3
- 239000011159 matrix material Substances 0.000 claims description 2
- 230000005611 electricity Effects 0.000 claims 1
- 239000000835 fiber Substances 0.000 abstract description 18
- 238000000034 method Methods 0.000 abstract description 12
- 238000006073 displacement reaction Methods 0.000 abstract description 4
- 230000004888 barrier function Effects 0.000 abstract 1
- 239000002086 nanomaterial Substances 0.000 abstract 1
- 239000013307 optical fiber Substances 0.000 description 7
- 230000033001 locomotion Effects 0.000 description 6
- 230000008878 coupling Effects 0.000 description 5
- 238000010168 coupling process Methods 0.000 description 5
- 238000005859 coupling reaction Methods 0.000 description 5
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- 238000005516 engineering process Methods 0.000 description 4
- 238000001914 filtration Methods 0.000 description 4
- 238000009434 installation Methods 0.000 description 4
- 238000003199 nucleic acid amplification method Methods 0.000 description 4
- 230000003287 optical effect Effects 0.000 description 4
- 239000004033 plastic Substances 0.000 description 3
- 229920003023 plastic Polymers 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- 230000003139 buffering effect Effects 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000004891 communication Methods 0.000 description 2
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- 239000000463 material Substances 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 238000005070 sampling Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 229910000975 Carbon steel Inorganic materials 0.000 description 1
- 206010034960 Photophobia Diseases 0.000 description 1
- 239000004696 Poly ether ether ketone Substances 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 238000010923 batch production Methods 0.000 description 1
- JUPQTSLXMOCDHR-UHFFFAOYSA-N benzene-1,4-diol;bis(4-fluorophenyl)methanone Chemical compound OC1=CC=C(O)C=C1.C1=CC(F)=CC=C1C(=O)C1=CC=C(F)C=C1 JUPQTSLXMOCDHR-UHFFFAOYSA-N 0.000 description 1
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Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
- G02B5/1847—Manufacturing methods
- G02B5/1857—Manufacturing methods using exposure or etching means, e.g. holography, photolithography, exposure to electron or ion beams
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70216—Mask projection systems
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
- G03F7/70491—Information management, e.g. software; Active and passive control, e.g. details of controlling exposure processes or exposure tool monitoring processes
Abstract
The invention discloses adjustable-size mask plate automatic switchover translation system.The mechanical clamp device of designed size adjustable as mask plate clamping device, rack-and-pinion is displacement input equipment, the simple translation stage constituted as system translation instrument, the drive system that stepper motor and its driver/drive circuit are constituted is inputted as the power of translation stage, the control upper strata that the control system that host computer and controller are constituted is inputted as parameter.The adjustable-size mask plate automatic switchover translation system of the present invention is full-featured, it is with low cost, the automatic switchover between freely clamp of different size mask plates, mask plate can be achieved, the displacement of mask plate is finely tuned and persistently traversing, solve currently related technical barrier, fiber grating inscription is cannot be only used for, the mask plate method grating for being also applied to film and other micro Nano materials is inscribed.
Description
Technical field
The present invention relates to adjustable-size mask plate automatic switchover translation system, belong to Fiber Bragg Grating technology field.
Background technology
With the progress of science and technology, fiber grating turns into the study hotspot in fiber optic communication field, and the making of grating is carved
Writing technology turns into the key of problem, and the method for grating fibers is inscribed at present and is mainly had：Standing wave interferometric method, horizontal holographic interferometry,
Point-to-point writing method, phase/amplitude mask means etc..Wherein, mask means inscribing fiber grating have technique simple, low manufacture cost,
Optical stability is good, be easy to batch production the advantages of, be widely adopted, greatly promoted fiber grating in fiber optic communication
Using.
Fiber grating is the light sensitivity using fiber optic materials, and incident light is concerned with field pattern by the method for ultraviolet photoetching
Fibre core is write, the refractive index periodic change along fibre core axial direction is produced in fibre core, so as to form the phase grating in space, it is made
With (transmission or reflection) wave filter or speculum for being substantially one arrowband of formation in fibre core.When a beamwidth light passes through optical fiber
During grating, reflection will be produced by meeting the wavelength of fiber grating Bragg condition, and remaining wavelength continues to transmit through fiber grating.
Phase mask plate method inscribing fiber grating mainly uses+1 rank that laser is produced after mask plate and -1 rank diffraction light institute shape
Into interference fringe, i.e., the period profile of light intensity, scribes grating in fibre core.And amplitude mask method utilizes the amplitude of periodically transmission
Mask plate modulated light source is to form grating.
Although mask plate method has lot of advantages, its main shortcoming is exactly underaction.The light of each parameter
Fine grating is required for the mask plate of parameter corresponding thereto, and its replacing is moved into for the main cause of dumb factor.Generally
When inscribing grating, mask plate is installed in above fixed clamping utensil, according to the difference of applicable cases, and inscribing optical fiber needs
The parameters such as different centre wavelength are sought, while can also be related to the grating that different wavelength are inscribed on same section of grating.Because big
It is that mask plate needs to be customized mostly, its size has a certain degree of error, and demand is different, mask board size also phase not to the utmost
Together, this causes serious puzzlement to the replacing of mask plate, wastes the plenty of time.
Furthermore, amplitude mask method used in long-period gratings optical fiber is inscribed, its system is built and the short split-phase of cycle ten
Seemingly, its maximum defect is exactly that customized mask plate is only used for LPFG, it is impossible to general with the short cycle.
The content of the invention
In view of the above-mentioned problems, being it is an object of the invention to provide a kind of replaceable, removable, size adjustable automatically control
System.
The present invention a kind of adjustable-size mask plate automatic switchover translation system, it be mask installing plate as substrate,
New mask plate clamp device designed by this paper is as critical piece, and pinion-and-rack system is made as translation mechanism, stepper motor
For drive device, including driver and drive circuit, host computer and controller are used as control system.
Building for the adjustable-size mask plate automatic switchover translation system comprises the following steps：
1) mask plate size range (substrate, grid region) is selected, determines mask plate clamp device adjustable extent (to ensure full-size
For design considerations).Fine type plastics (material is optional) are added to carry out clamp device processing and fabricating using PPS or PEEK etc., it is ensured that it is certainly
By spending；
2) selection respective range meets national standard stage clip, and ordinary carbon steel or high strength plastic plastics may be selected in material,
Together assembled with mask plate clamp device remaining part, it is ensured that minimum dimension installation pretightening force；
3) mask plate clamp device is installed on designed translation stage, translation stage size is designed according to clamp device.Clamp device
Surplus should be reserved on the right side of installation site to ensure that gear ＆ rack structure is installed in the middle of the clamp device x-axis direction free degree, translation stage, it is selected
Take according to for inscription grating maximum moving range, the position of light source and optical fiber writing area position, the scope moved left and right
It should ensure that the above.The selection of its size should be corresponding with translation stage, and bearing capacity is in the range of translation stage.
4) driving stepper motor is used, rotating shaft connection gear can be horizontal movement directly by convert rotational motion.Translation stage
Motion mainly driven by rack-and-pinion, complete switching or minute movement.Drive system includes driver and drive circuit, needs
To be matched with motor；
5) building for control system is completed by host computer and controller.The effect of host computer is the volume for carrying out software program
Write, realization is automatically controlled.Controller mainly exports electric signal and sent and drive system.
The device have the advantages that：
The present invention can carry out clamping and the switching of various sizes of mask plate.The replacing of mask plate always is that grating is carved
Subject matter in writing, and the replacing between different size mask plates is more difficult to solve.Size can not only be realized herein
Change, additionally it is possible to realize the automatic switchover of different size mask plates.The software program write in host computer can be completed automatically
Handoff functionality, only needs user's input to need the corresponding target position switched, and system can be acted automatically.Meanwhile, the system can be with
Be finely adjusted translation, this for inscribe grating it is in larger distance when grating is even inscribed using point-to-point writing method when, without mobile light
Grid, translation stage movement in the range of mask plate grid region can be completed.Be it is powerful, control it is flexible, easy to operate.
Brief description of the drawings
Fig. 1 is adjustable-size mask plate automatic switchover translation system overall structure figure of the present invention.
Fig. 2 is adjustable-size mask plate automatic switchover translation system system overall schematic of the present invention.
Fig. 3 .1 be adjustable-size mask plate automatic switchover translation system front end mask plate clamp device of the present invention, translation stage,
Rack-and-pinion and electric motor mounting structure model front elevation.
Fig. 3 .2 be adjustable-size mask plate automatic switchover translation system front end mask plate clamp device of the present invention, translation stage,
Rack-and-pinion and electric motor mounting structure model back view.
Fig. 4 .1 are mask plate clamp device structural model front elevations of the present invention.
Fig. 4 .2 are mask plate clamp device structural model back views of the present invention.
Fig. 5 is motor driver circuit entire block diagram.
Fig. 6 is controller composition frame chart.
Embodiment
Below in conjunction with the drawings and specific embodiments, the invention will be further described, but implements the invention is not restricted to following
Example.
Adjustable-size mask plate automatic switchover translation system, is shown in Fig. 1, Fig. 2, by simple translation stage 1, gear 2, mask plate
Clamp device 3, motor 4, motor driver 5, controller 6, PC host computers 7 are constituted.Mask plate clamp device 3 is installed or is solidificated in simply
On translation stage 1, mask plate clamp device 3 is system core device.The bottom of simple translation stage 1 is provided with rack structure, rack and tooth
Wheel 2 is meshed, and simple translation stage 1 is driven by gear 2, and simple translation stage 1 is connected with rack structure by rigid bolt and nut, root
The size of sawteeth bar lays standard threaded aperture at rack two ends.The output revolving shaft of motor 4 is connected with gear 2, and motor 4 is with moving gear
2 rotations.Motor 4 is connected with motor driver 5, and motor driver 5 is connected with controller 6, and controller 6 is connected with host computer 7；Letter
Easy translation stage 1, mask plate clamp device 3, gear 2 and motor 4 constitute the front end of system, and simple translation stage 1, which is provided with, includes four
(Parameter adjustable) mask plate clamp device 3, the side of simple translation stage 1 is provided with the mask plate clamp device 3 of two parallel arrangements, simply
The opposite side of translation stage 1 is provided with the mask plate clamp device 3 of two other parallel arrangement；The mask plate clamp device 3 of both sides is mutually 180
Angle is spent, different light source positions can be installed on simultaneously.In the design process, the stroke of rack can carry out any regulation, to meet most
It is big to require to be standard.
Clamp device model is as shown in figure 4, mask plate clamp device 3 includes clamp device shell 3.1, Y-axis secured adjusted plate
3.2nd, mask plate installing plate puts 3.3, three-level contraction/drawing plate 3.4, X axis secured adjusted plate 3.5, X axis secured adjusted spring
3.6 and Y-axis secured adjusted spring 3.7.Clamp device shell 3.1 is matrix, and clamp device shell 3.1 is circumferentially with guide rail；Y-axis
The front of clamp device shell 3.1, three-level contraction/drawing plate are arranged on to secured adjusted plate 3.2 and three-level contraction/drawing plate 3.4
3.4 sidepiece is provided with guide rail, and the end of Y-axis secured adjusted plate 3.2 is stuck in three-level contraction/side rail of drawing plate 3.4；Three
Level contraction/drawing plate 3.4 completes to be fixedly connected by being caught in the side rail of clamp device shell 3.1；X axis secured adjusted plate
3.5 are arranged in the guide rail of the end of clamp device shell 3.1；X axis secured adjusted spring 3.6 is fixed on dress by the way of spot welding
On binder shell 3.1；Y-axis secured adjusted spring 3.7 is fixed on Y-axis secured adjusted plate 3.2 by the way of spot welding.Dress
Binder shell 3.1 is provided with screwed hole, and the third level fixed plate of three-level contraction/drawing plate 3.4 passes through screw and clamp device shell
3.1 are fastenedly connected, and the second level fixed plate of three-level contraction/drawing plate 3.4 passes sequentially through what guide rail was connected with first order fixed plate
Mode is installed.Spring is installed in clamp device shell 3.1, the chucking power installed by the use of the elastic force of stage clip as mask plate.
Embodiment：
1) when working, certain size mask plate is positioned over the installation site shown in Fig. 3, during installation, the adjustment edge of size
The direction of arrow in Fig. 3, after the completion of mask plate is blocked using two solid phase adjustable plates.In the simple translation stage shown in Fig. 2 its
He installs various sizes of mask plate in plate position；
2) light source position is adjusted, adjustment fiber position (optical fiber should be located in the range of mask plate grid region) makes light source and optical fiber
Fixed with the relative position of front end system.Meanwhile, motor should be tested, including rotating speed, stroke etc.；
3) by host computer input parameter, including plate position number (counting on the left of the translation stage, be arranged in order), range,
The contents such as motor speed, interval time, after the completion of can start grating inscription；
4) when plate position is changed, it should be understood that needing the plate position number changed, and stroke distances and the locking of upper plate position are determined in advance
Time, inputted by host computer.When performing this operation, respective panels position can be moved to original 1 to the left or to the right by translation stage
At number plate position；
5) when needing to carry out point-to-point writing method or long writing area, it usually needs carry out the movement of optical fiber.It is at this
Operated in system without this, motor control rotating speed is inputted by host computer, displacement stroke needed for calculating, setup parameter realizes motor tooth
The operation of rack is taken turns, particular displacement action is completed；
6) after the completion of inscribing, when unloading mask plate, first x-axis shown in Fig. 3 is moved down to secured adjusted plate by arrow,
Y-axis secured adjusted is motionless, when x-axis is to secured adjusted plate no longer contact mask plate, mobile Y-axis secured adjusted, removes and covers
Template.
Drive circuit shown in Fig. 5 is compared by pulse direction signal 10, optical coupling isolator 11, RC filter circuits 12, filtering
Device 13, SVPWM output circuits 14, current rectifying and wave filtering circuit 15, amplification and filter circuit 16, current sampling circuit 17 and the structure of motor 4
Into pulse direction signal 10, optical coupling isolator 11, RC filter circuits 12 are sequentially connected with, RC filter circuits 12 and filter comparator
13 connections, filter comparator 13 is connected with SVPWM output circuits 14, and filter comparator 13 is connected with amplification and filter circuit 16,
Amplification and filter circuit 16 are connected with current sampling circuit 17, and current rectifying and wave filtering circuit 15 is adopted by SVPWM output circuits 14, electric current
It is connected after sample circuit 17 with motor 4.
Pulse direction signal 10, which is directly entered in optical coupling isolator, to carry out going interference, subsequently into RC filter circuits 12, disappears
Compare except filter comparator progress electric current band is entered after voltage ripple, while calculating amplification and filter circuit 16 and current sample
Exported after the current signal of circuit 17 by SVPWM output circuits 14 and 220V friendships are passed through before PWM controls ripples, current rectifying and wave filtering circuit 15
Flow voltage, controlled motor 4.
The composition of controller shown in Fig. 6 includes PC host computers 7, buffering isolation and control circuit 19,8255 control chips 20, list
Piece machine 21, crystal oscillating circuit 22, reset circuit 23, Phototube Coupling and drive circuit 24, decoding circuit 25, RAM memory 26.On PC
The coded command that sends of position machine 7 or user instruction are isolated and control circuit 19,8255 chips 20, decoding circuit 25 by buffering
Processing enters to be calculated in slave computer single-chip microcomputer 21, and RAM memory 26 uses 8K or higher, and single-chip microcomputer 21 is defeated after computing
Outgoing direction signal and step-by-step impulse, Phototube Coupling and the feedback limit signal of drive circuit 24, constitute closed-loop control.By photoelectricity every
From and drive circuit 24 after output signal to driver, motor 4 is controlled in real time.
The contents such as plate position number, screw thread hole count, number of springs, plate shape size in all diagrams only do quantitative explanation, no
The protection domain of the patent can be limited according to this.
Claims (2)
1. adjustable-size mask plate automatic switchover translation system, it is characterised in that：The system is by simple translation stage (1), gear
(2), mask plate clamp device (3), motor (4), motor driver (5), controller (6), PC host computers (7) composition；Mask plate is filled
Binder (3) is installed or is solidificated on simple translation stage (1), and mask plate clamp device (3) is system core device；Simple translation stage
(1) bottom is provided with rack structure, and rack and pinion (2) is meshed, and simple translation stage (1) is driven by gear (2), simple translation
Platform (1) is connected with rack structure by rigid bolt and nut, and standard threaded aperture is laid at rack two ends according to the size of rack；Electricity
The output revolving shaft of machine (4) is connected with gear (2), motor (4) band moving gear (2) rotation；Motor (4) is connected with motor driver
(5), motor driver (5) is connected with controller (6), and controller (6) is connected with host computer (7)；Simple translation stage (1), mask
Plate clamp device (3), gear (2) and motor (4) constitute the front end of system, and simple translation stage (1), which is provided with, includes four mask plates
Clamp device (3), the side of simple translation stage (1) is provided with the mask plate clamp device (3) of two parallel arrangements, simple translation stage (1)
Opposite side be provided with two other parallel arrangement mask plate clamp device (3)；The mask plate clamp device (3) of both sides is mutually 180 degree
Angle, while being installed on different light source positions.
2. adjustable-size mask plate automatic switchover translation system according to claim 1, it is characterised in that：Mask plate is filled
Binder (3) include clamp device shell (3.1), Y-axis secured adjusted plate (3.2), mask plate installing plate put (3.3), three-level shrink/
Drawing plate (3.4), X axis secured adjusted plate (3.5), X axis secured adjusted spring (3.6) and Y-axis secured adjusted spring
(3.7)；Clamp device shell (3.1) is matrix, and clamp device shell (3.1) is circumferentially with guide rail；Y-axis secured adjusted plate
(3.2) and three-level contraction/drawing plate (3.4) be arranged on clamp device shell (3.1) front, three-level contraction/drawing plate (3.4)
Sidepiece is provided with guide rail, and the end of Y-axis secured adjusted plate (3.2) is stuck in three-level contraction/drawing plate (3.4) side rail；Three
Level contraction/drawing plate (3.4) completes to be fixedly connected by being caught in the side rail of clamp device shell (3.1)；X axis, which is fixed, to be adjusted
Plate (3.5) is saved to be arranged in the guide rail of clamp device shell (3.1) end；X axis secured adjusted spring (3.6) uses the side of spot welding
Formula is fixed on clamp device shell (3.1)；Y-axis secured adjusted spring (3.7) is fixed on Y-axis by the way of spot welding and fixed
On adjustable plate (3.2)；Clamp device shell (3.1) is provided with screwed hole, the third level fixed plate of three-level contraction/drawing plate (3.4)
It is fastenedly connected by screw with clamp device shell (3.1), the second level fixed plate and the first order of three-level contraction/drawing plate (3.4)
The mode that fixed plate passes sequentially through guide rail connection is installed；Spring is installed in clamp device shell (3.1), the bullet of stage clip is utilized
Masterpiece is the chucking power that mask plate is installed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710432475.1A CN107037516A (en) | 2017-06-09 | 2017-06-09 | Adjustable-size mask plate automatic switchover translation system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710432475.1A CN107037516A (en) | 2017-06-09 | 2017-06-09 | Adjustable-size mask plate automatic switchover translation system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN107037516A true CN107037516A (en) | 2017-08-11 |
Family
ID=59542129
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710432475.1A Pending CN107037516A (en) | 2017-06-09 | 2017-06-09 | Adjustable-size mask plate automatic switchover translation system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107037516A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115157841A (en) * | 2022-06-28 | 2022-10-11 | 温州强大新材料科技有限公司 | Laser film seamless die pressing equipment and preparation process |
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| US20090208876A1 (en) * | 2008-02-18 | 2009-08-20 | National Chiao Tung University | Long-length fiber Bragg creating sequential UV writing by probing phase mask |
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| CN104459875A (en) * | 2014-12-19 | 2015-03-25 | 中国科学院上海光学精密机械研究所 | Automatic phase mask plate switching device |
| CN104553235A (en) * | 2015-01-12 | 2015-04-29 | 深圳清溢光电股份有限公司 | Film sticking machine |
| CN204515341U (en) * | 2015-03-18 | 2015-07-29 | 深圳市龙图光电有限公司 | A kind of clamping device of mask |
| CN104894534A (en) * | 2015-06-26 | 2015-09-09 | 京东方科技集团股份有限公司 | Vapor deposition equipment |
| CN205703152U (en) * | 2016-05-01 | 2016-11-23 | 盐城雄伟汽车部件有限公司 | Automatic clamping device is pressed under a kind of improved automotive suspension bracket or skeleton |
| CN207164287U (en) * | 2017-06-09 | 2018-03-30 | 北京工业大学 | Adjustable-size mask plate automatic switchover translation system |
-
2017
- 2017-06-09 CN CN201710432475.1A patent/CN107037516A/en active Pending
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20090208876A1 (en) * | 2008-02-18 | 2009-08-20 | National Chiao Tung University | Long-length fiber Bragg creating sequential UV writing by probing phase mask |
| CN103737519A (en) * | 2013-12-31 | 2014-04-23 | 江苏南铸科技股份有限公司 | Bi-directionally driven fixing clamp |
| CN104459875A (en) * | 2014-12-19 | 2015-03-25 | 中国科学院上海光学精密机械研究所 | Automatic phase mask plate switching device |
| CN104553235A (en) * | 2015-01-12 | 2015-04-29 | 深圳清溢光电股份有限公司 | Film sticking machine |
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| CN104894534A (en) * | 2015-06-26 | 2015-09-09 | 京东方科技集团股份有限公司 | Vapor deposition equipment |
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| CN207164287U (en) * | 2017-06-09 | 2018-03-30 | 北京工业大学 | Adjustable-size mask plate automatic switchover translation system |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115157841A (en) * | 2022-06-28 | 2022-10-11 | 温州强大新材料科技有限公司 | Laser film seamless die pressing equipment and preparation process |
| CN115157841B (en) * | 2022-06-28 | 2023-11-03 | 温州强大新材料科技有限公司 | Seamless compression molding equipment for laser film and preparation process |
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Application publication date: 20170811 |
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