CN204515341U - A kind of clamping device of mask - Google Patents
A kind of clamping device of mask Download PDFInfo
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- CN204515341U CN204515341U CN201520154596.0U CN201520154596U CN204515341U CN 204515341 U CN204515341 U CN 204515341U CN 201520154596 U CN201520154596 U CN 201520154596U CN 204515341 U CN204515341 U CN 204515341U
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- mask
- clamping device
- adjustable support
- support frame
- fixture
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Abstract
The utility model relates to mask technical field, is specifically related to a kind of clamping device of mask, comprises main frame, also comprise: fixation kit, it comprises adjustable support and mask fixture, and this mask fixture is arranged on adjustable support, for permanent mask version; Bottom support frame, it is connected with adjustable support, and is rotationally connected with main frame, and this adjustable support is swung on certain angle of inclination by bottom support frame.The utility model, by the clamping device of a kind of mask of design, at inspection mask front clamp mask, realizes carrying out artificial visual examination to large scale mask plate, reduces costs; Mask carries out angle rotation by clamping device simultaneously, improves and checks accuracy, improves checking efficiency.
Description
Technical field
The utility model relates to mask technical field, is specifically related to a kind of clamping device of mask.
Background technology
Mask is a kind of on film, plastics or glass matrix material, make various functional graphic and accurately locate, be coated with the structure of layer-selective exposure for use in photoresist, it also claims light shield or optical mask version, and common mask has chromium plate, dry plate and the film etc.
Mask, can produce some defect at reticle surface among production, transport, installing or use, and as scratched, top wound, rubs wound, white defect, black defect etc., therefore after production completes or after using a period of time, tackle reticle surface and check.
Existing test mode comprises self-verifying and hand inspection, and wherein self-verifying is checked by automatic checkout equipment, but its input cost is high, and checking efficiency is low, inspection accuracy is low; And hand inspection is generally carry out checking whether existing defects under high light, but it can not the open defect of normal inspection large scale mask plate.
Utility model content
The technical problems to be solved in the utility model is, for the above-mentioned defect of prior art, provides a kind of clamping device of mask, improves the checking efficiency of mask.
The utility model solves the technical scheme that its technical matters adopts: the clamping device providing a kind of mask, comprises main frame, also comprises:
Fixation kit, it comprises adjustable support and mask fixture, and this mask fixture is arranged on adjustable support, for permanent mask version;
Bottom support frame, it is connected with adjustable support, and is rotationally connected with main frame, and this adjustable support is swung on certain angle of inclination by bottom support frame.
Wherein, preferred version is: this bottom support frame comprises a moving assembly, and this adjustable support is connected with moving assembly, and this adjustable support is moved on bottom support frame by moving assembly.
Wherein, preferred version is: this moving assembly comprises the first locking piece.
Wherein, preferred version is: this moving assembly comprises the moving track be arranged on bottom support frame, and the bottom of this adjustable support comprises the position limiting structure coordinated with moving track, and this adjustable support is moved on moving track by position limiting structure.
Wherein, preferred version is: this mask fixture comprises the bottom mask fixture be arranged on bottom movable stand, and is arranged on the top mask version fixture at movable stand top.
Wherein, preferred version is: this mask fixture comprises a fixed groove.
Wherein, preferred version is: bottom this, mask fixture is " L " type structure.
Wherein, preferred version is: also comprise a turning axle, and this bottom support frame is rotatably connected with main frame by turning axle.
Wherein, preferred version is: this main frame comprises a limited impression, and this bottom support frame is arranged in limited impression.
Wherein, preferred version is: also comprise the second locked component be connected with bottom support frame.
The beneficial effects of the utility model are, compared with prior art, the utility model, by the clamping device of a kind of mask of design, at inspection mask front clamp mask, realizes carrying out artificial visual examination to large scale mask plate, reduces costs; Mask carries out angle rotation by clamping device simultaneously, improves and checks accuracy, improves checking efficiency.
Accompanying drawing explanation
Below in conjunction with drawings and Examples, the utility model is described in further detail, in accompanying drawing:
Fig. 1 is the cross-section front view of the utility model clamping device;
Fig. 2 is the section left view of the utility model clamping device;
Fig. 3 is the profile of the utility model clamping device;
Fig. 4 is the cross-section front view of the utility model mask fixture;
Fig. 5 is the section left view of the utility model mask fixture.
Embodiment
Now by reference to the accompanying drawings, preferred embodiment of the present utility model is elaborated.
As depicted in figs. 1 and 2, the utility model provides a kind of preferred embodiment of clamping device of mask, and wherein, Fig. 1 is the cross-section front view of clamping device; Fig. 2 is the section left view of clamping device
A clamping device for mask, comprises main frame 30, also comprises fixation kit 10 and bottom support frame 20, and mask is fixed by fixation kit 10, and by bottom support frame 20 driven rotary, is convenient to the inspection of mask.
Wherein, fixation kit 10, it comprises adjustable support 11 and mask fixture 12, and mask fixture 12 is arranged on adjustable support 11, for permanent mask version; Bottom support frame 20, it is connected with adjustable support 11, and is rotationally connected with main frame 30, and adjustable support 11 is swung on certain angle of inclination by bottom support frame 20.
Particularly, adjustable support 11 is the bracing frames at the two ends be arranged on bottom support frame 20, comprises the first adjustable support 11 and the second adjustable support 11, and mask is fixed between the first adjustable support 11 and the second adjustable support 11.
Mask fixture 12 comprises the bottom mask fixture 121 be arranged on bottom movable stand, with the top mask version fixture 122 being arranged on movable stand top, namely comprise two bottom mask fixtures 121 and two top mask version fixtures 122, by four mask fixtures 12, mask is fixed between the first adjustable support 11 and the second adjustable support 11.
Bottom support frame 20 is connection bridges of adjustable support 11 and main frame 30, in the present embodiment, bottom support frame 20 and main frame 30 are rotationally connected, bottom support frame 20 is fixedly connected with adjustable support 11, therefore adjustable support 11 is rotationally connected by bottom support frame 20 and main frame 30, preferably, clamping device comprises a turning axle 40, and this bottom support frame 20 is rotatably connected with main frame 30 by turning axle 40; Or bottom support frame 20 is fixedly connected with main frame 30, bottom support frame 20 and adjustable support 11 are rotationally connected.
As shown in Figure 3, the utility model provides a kind of preferred embodiment of clamping device of mask, and wherein, Fig. 3 is the profile of clamping device.
Bottom support frame 20 and main frame 30 are rotationally connected, and bottom support frame 20 is fixedly connected with adjustable support 11, and this bottom support frame 20 is rotatably connected with main frame 30 by turning axle 40.Wherein, main frame 30 also comprises a limited impression 31, and this bottom support frame 20 is arranged in limited impression 31, and limited impression 31 is class " V " type structure, and bottom and the bottom support frame 20 of limited impression 31 are fitted.
Particularly, bottom support frame 20 swings around turning axle 40 in limited impression 31, and wherein limited impression 31 comprises two sides, and for limiting the swing of bottom support frame 20, its rotary oscillation angle is preferably-10 and spends between 10 degree.
Clamping device in the present embodiment, also comprises the second locked component be connected with bottom support frame 20, for when bottom support frame 20 swings to certain angle, locks.
As shown in Figure 4 and Figure 5, the utility model provides a kind of preferred embodiment of mask fixture, and wherein, Fig. 4 is the cross-section front view of mask fixture; Fig. 5 is the section left view of mask fixture.
Mask fixture 12 comprises the bottom mask fixture 121 be arranged on bottom movable stand, with the top mask version fixture 122 being arranged on movable stand top, wherein, bottom mask fixture 121 is " L " type structure, and top mask version fixture 122 is " I " type structure.
Wherein, mask fixture 12 comprises a fixed groove 1223, and mask is placed in fixed groove 1223, and is clamped.And consider fastness and the resistance to acids and bases of mask fixture 12, mask fixture 12 adopts Teflon material to make.
Wherein, bottom mask fixture 121 comprises the first screw hole 1221 and the second screw hole 1222, and it is also fixed on adjustable support 11 by the first screw hole 1221 and the second screw hole 1222.
Further, according to the size dimension of mask, top mask version fixture 122 can move on adjustable support 11.
In the utility model, bottom support frame 20 comprises a moving assembly, and adjustable support 11 is connected with moving assembly, and according to the size dimension of mask, adjustable support 11 is moved on bottom support frame 20 by moving assembly.Wherein, moving assembly comprises the first locking piece, for when adjustable support 11 moves to certain position, locks.
Preferably, moving assembly comprises the moving track be arranged on bottom support frame 20, and the bottom of adjustable support 11 comprises the position limiting structure coordinated with moving track, and as pulley, adjustable support 11 is moved on moving track by position limiting structure.
In the utility model, integral support all adopts 304 stainless steels to make, and consider the safety and stability after loading mask plate, main frame 30 is designed to tripod shape simultaneously, and installs the castor of 4 bands self-locking bottom main frame 30, is convenient to mobile.
As described above, be only the utility model most preferred embodiment, and not for limiting scope of the present utility model, all equivalences done according to the utility model claim change or modify, and are all the utility model and contain.
Claims (10)
1. a clamping device for mask, comprises main frame, it is characterized in that, also comprises:
Fixation kit, it comprises adjustable support and mask fixture, and this mask fixture is arranged on adjustable support, for permanent mask version;
Bottom support frame, it is connected with adjustable support, and is rotationally connected with main frame, and this adjustable support is swung on certain angle of inclination by bottom support frame.
2. clamping device according to claim 1, is characterized in that: this bottom support frame comprises a moving assembly, and this adjustable support is connected with moving assembly, and this adjustable support is moved on bottom support frame by moving assembly.
3. clamping device according to claim 2, is characterized in that: this moving assembly comprises the first locking piece.
4. clamping device according to claim 2, it is characterized in that: this moving assembly comprises the moving track be arranged on bottom support frame, the bottom of this adjustable support comprises the position limiting structure coordinated with moving track, and this adjustable support is moved on moving track by position limiting structure.
5. clamping device according to claim 1, is characterized in that: this mask fixture comprises the bottom mask fixture be arranged on bottom movable stand, and is arranged on the top mask version fixture at movable stand top.
6. clamping device according to claim 5, is characterized in that: this mask fixture comprises a fixed groove.
7. clamping device according to claim 5, is characterized in that: bottom this, mask fixture is " L " type structure.
8. clamping device according to claim 1, is characterized in that: also comprise a turning axle, and this bottom support frame is rotatably connected with main frame by turning axle.
9. clamping device according to claim 8, is characterized in that: this main frame comprises a limited impression, and this bottom support frame is arranged in limited impression.
10. clamping device according to claim 9, is characterized in that: also comprise the second locked component be connected with bottom support frame.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520154596.0U CN204515341U (en) | 2015-03-18 | 2015-03-18 | A kind of clamping device of mask |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520154596.0U CN204515341U (en) | 2015-03-18 | 2015-03-18 | A kind of clamping device of mask |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204515341U true CN204515341U (en) | 2015-07-29 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201520154596.0U Active CN204515341U (en) | 2015-03-18 | 2015-03-18 | A kind of clamping device of mask |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN204515341U (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106444302A (en) * | 2016-11-23 | 2017-02-22 | 南京华东电子信息科技股份有限公司 | Movable mask carrying table |
| CN107037516A (en) * | 2017-06-09 | 2017-08-11 | 北京工业大学 | Adjustable-size mask plate automatic switchover translation system |
| CN107399613A (en) * | 2017-08-03 | 2017-11-28 | 武汉华星光电技术有限公司 | A kind of mask plate handling device |
| CN107672936A (en) * | 2017-09-06 | 2018-02-09 | 武汉华星光电半导体显示技术有限公司 | A kind of mask plate clip and its fixing device |
| CN118348750A (en) * | 2024-05-13 | 2024-07-16 | 江苏明芯微电子股份有限公司 | High-precision photoetching exposure system and image recognition device |
-
2015
- 2015-03-18 CN CN201520154596.0U patent/CN204515341U/en active Active
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106444302A (en) * | 2016-11-23 | 2017-02-22 | 南京华东电子信息科技股份有限公司 | Movable mask carrying table |
| CN107037516A (en) * | 2017-06-09 | 2017-08-11 | 北京工业大学 | Adjustable-size mask plate automatic switchover translation system |
| CN107399613A (en) * | 2017-08-03 | 2017-11-28 | 武汉华星光电技术有限公司 | A kind of mask plate handling device |
| CN107399613B (en) * | 2017-08-03 | 2019-06-25 | 武汉华星光电技术有限公司 | A kind of mask plate handling device |
| CN107672936A (en) * | 2017-09-06 | 2018-02-09 | 武汉华星光电半导体显示技术有限公司 | A kind of mask plate clip and its fixing device |
| CN118348750A (en) * | 2024-05-13 | 2024-07-16 | 江苏明芯微电子股份有限公司 | High-precision photoetching exposure system and image recognition device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CP01 | Change in the name or title of a patent holder | ||
| CP01 | Change in the name or title of a patent holder |
Address after: 518000 The first floor of plant 4 #, Shengzuozhi Science and Technology Industrial Park, north of Xinyu Road, Shajing Street, Bao'an District, Shenzhen, Guangdong Patentee after: Shenzhen Longtu Optical Mask Co.,Ltd. Address before: 518000 The first floor of plant 4 #, Shengzuozhi Science and Technology Industrial Park, north of Xinyu Road, Shajing Street, Bao'an District, Shenzhen, Guangdong Patentee before: SHENZHEN LONGTU PHOTOMASK CO.,LTD. |