CN109433737A - A kind of laser cleaning output end adjustment width device - Google Patents

A kind of laser cleaning output end adjustment width device Download PDF

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Publication number
CN109433737A
CN109433737A CN201811250282.5A CN201811250282A CN109433737A CN 109433737 A CN109433737 A CN 109433737A CN 201811250282 A CN201811250282 A CN 201811250282A CN 109433737 A CN109433737 A CN 109433737A
Authority
CN
China
Prior art keywords
laser cleaning
output shaft
output
support rod
cleaning head
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201811250282.5A
Other languages
Chinese (zh)
Inventor
周世平
张坚发
王燕
宋文浩
柯顺琦
廖新胜
沈宏华
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Qingdao Hai He Laser Technology Co Ltd
Original Assignee
Qingdao Hai He Laser Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Qingdao Hai He Laser Technology Co Ltd filed Critical Qingdao Hai He Laser Technology Co Ltd
Priority to CN201811250282.5A priority Critical patent/CN109433737A/en
Publication of CN109433737A publication Critical patent/CN109433737A/en
Pending legal-status Critical Current

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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B7/00Cleaning by methods not provided for in a single other subclass or a single group in this subclass
    • B08B7/0035Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like
    • B08B7/0042Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like by laser
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B13/00Accessories or details of general applicability for machines or apparatus for cleaning

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  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Laser Beam Processing (AREA)

Abstract

The invention discloses a kind of laser cleaning output end adjustment width devices, including laser cleaning head, workbench, laser cleaning head includes output port, laser cleaning head is connected on the table by lifting device, range sensor and Width adjusting device are set on output port, lifting device includes support rod and rotary positioning mechanism rotary positioning mechanism includes input shaft and output shaft, output shaft is driven with support rod by transmission mechanism, input shaft is coaxially provided with worm screw, output shaft is coaxially provided with worm gear, what worm gear and worm screw cooperatively formed is self-locking performance worm gear mechanism, Width adjusting device includes the second motor, substrate, actuating ring and the multiple blades being arranged along substrate week.The device can real-time monitoring institute's cleaning of objects with cleaning laser head at a distance from, adjust the height of laser cleaning head in time by lifting device.Width adjusting device is adjusted output bore by actuating annulus movable vane piece, helps to reach ideal cleaning effect.

Description

A kind of laser cleaning output end adjustment width device
Technical field
The present invention relates to laser cleaning equipment technical fields, specifically kind laser cleaning output end adjustment width device.
Background technique
Laser cleaning is a kind of untouchable, environmentally protective cleaning method, have without grinding, it is non-contact, without fuel factor The cleaning characteristics such as object with various materials are suitable for, facilitate realization remote-controlled operation, it is not readily accessible to clean conventional method Position, it can be ensured that the safety of personnel is widely used in the industries such as machine-building, aircraft and painting dressing automobiles, semiconductor electronic.With Conventional cleaning methods are compared, and laser cleaning has clear advantage, it is without the use of any chemical agent and cleaning solution, under cleaning The waste material come is essentially all solid powder, small in size, and easily stored and recycling can solve chemical cleaning bring ring easily Border pollution problem.Current laser cleaning machine matched cleaning head be mostly the fixed form of cleaning width, when for cleaning When the very big occasion of area, do not influence.When the product relatively narrow for cleaning width, wave will cause if cleaning width is too wide Take, can even the place for not needing cleaning be cleaned by reducing cleaning efficiency, cause adverse effect.Simultaneously in cleaning head right When product is cleaned, the distance between cleaning head and product also will affect the effect of cleaning, in cleaning, be easy to produce more Dust, cause the blocking to cleaning head, long-time dust accretions influence laser cleaning effect, cause product cleaning unqualified, There are also being exactly that product is fixed in product cleaning extraneous fixing piece is needed to be fixed, fixing piece is easy to cause laser cleaning pair The damage of fixing piece influences working efficiency, and built on the sand to the fixation of product, causes the damage of product.
Summary of the invention
The purpose of the present invention is to provide a kind of laser cleaning output end adjustment width device, which can not only be realized To the laser cleaning of different in width product, while the height of laser cleaning head is adjusted in the process of cleaning, keep it effectively poly- always Coke improves working efficiency in product surface, easy to use and operate.
In order to achieve the above objectives, using following technical scheme.
A kind of laser cleaning output end adjustment width device, including laser cleaning head, workbench, the laser cleaning head packet Shell, light source are included, the shell includes output port, and the laser cleaning head is connected on the table by lifting device, institute State and set range sensor and Width adjusting device on output port, the lifting device include controller, the first motor, support rod with And rotary positioning mechanism, the support rod are connected to the lower end of laser cleaning head, the rotary positioning mechanism include input shaft and Output shaft, the output shaft are driven with support rod by transmission mechanism, and the transmission mechanism is by the rotary motion of output shaft It is changed into pumping for support rod, the input shaft is coaxially provided with worm screw, and the output shaft is coaxially provided with worm gear, described What worm gear and the worm screw cooperatively formed is self-locking performance worm gear mechanism, and first motor is connected with input shaft, described Controller is used to receive the signal of range sensor transmission and controls the starting of the first motor, and the Width adjusting device includes the second horse It reaching, substrate, the multiple blades for activating ring and being arranged along substrate week, one end of the blade is rotatably connected on substrate, Middle part is equipped with actuating column, and the actuating ring is equipped with cambered way, and actuating ring is carried out by cambered way, actuating column band movable vane piece It swings.
The rotary positioning mechanism further includes sheath body, and the input shaft and output shaft are mutually perpendicular to and are all mounted on the set In shell, the sheath body carries out axially position and radial positioning to input shaft and output shaft and is rotatablely connected with the two.At this time should Rotary positioning mechanism has self-locking performance, it can be achieved that reverse self-locking, i.e., can only be driven worm gear by worm screw, and cannot drive snail by worm gear Bar.
The range sensor includes the CCD camera for taking pictures and carrying out binary conversion treatment, the upper table of the workbench Face is equipped with two-dimensional stage, and the two-dimensional stage is driven by X-axis servo motor and Y-axis servo motor respectively, be may be implemented to object Automatic cleaning.The two-dimensional stage is equipped with X-axis grating scale and Y-axis grating scale.By carrying out binaryzation to the image of shooting It handles and is contrasted, the size of laser facula can be monitored in real time, effectively adjust the width of output facula.
The pixel value of the CCD camera is not less than 5,000,000.
The transmission mechanism includes pitch wheel and rack gear, and the gear is arranged on output shaft, the rack gear It is arranged on support rod.
Beneficial effect is: compared with prior art, which uses range sensor, and institute's cleaning of objects can be monitored in real time At a distance from cleaning laser head, the height of laser cleaning head is adjusted in time by lifting device.Width adjusting device passes through actuating annulus Movable vane piece carries out the adjustment of degree of precision to the bore of output, helps to reach ideal cleaning effect.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of embodiment;
Fig. 2 is the structure chart of rotary positioning mechanism;
Fig. 3 is the structure chart of Width adjusting mechanism.
Specific embodiment
Embodiments of the present invention are illustrated by particular specific embodiment below, those skilled in the art can be by this explanation Content disclosed by book is understood other advantages and efficacy of the present invention easily.
Please refer to Fig. 1.Structure, ratio, size depicted in this specification institute attached drawing etc., only to cooperate specification institute The content of announcement is not intended to limit the invention enforceable qualifications so that those skilled in the art understands and reads, Therefore not having technical essential meaning, the modification of any structure, the change of proportionate relationship or the adjustment of size are not influencing this hair Under bright the effect of can be generated and the purpose that can reach, the model that disclosed technology contents can be covered should all be still fallen in In enclosing.Meanwhile cited such as "upper" in this specification, "lower", "left", "right", " centre " and " one " term, be also only Convenient for being illustrated for narration, rather than to limit the scope of the invention, relativeness is altered or modified, in no essence It changes under technology contents, when being also considered as the enforceable scope of the present invention.
As shown in Figure 1, Figure 2, Figure 3 shows, a kind of laser cleaning output end adjustment width device, including laser cleaning head 1, work Platform 2, the laser cleaning head 1 include shell, light source, and the shell includes output port 3, and the laser cleaning head 1 passes through liter Falling unit 4 is connected on workbench 2, and range sensor 5 and Width adjusting device 6, the lifting device are set on the output port 3 4 include controller, the first motor, support rod 45 and rotary positioning mechanism, and the support rod 45 is connected to laser cleaning head 1 Lower end, the rotary positioning mechanism include input shaft 42 and output shaft 44, and the output shaft 44 passes through driver with support rod 45 Structure is driven, and the rotary motion of output shaft 44 is changed into pumping for support rod 45 by the transmission mechanism, described Input shaft 42 is coaxially provided with worm screw 47, and the output shaft 44 is coaxially provided with worm gear 43, and the worm gear 43 cooperates with the worm screw 47 What is formed is 43 worm screw of self-locking performance worm gear, 47 mechanism, and first motor is connected with input shaft 42, and the controller is for connecing Receive range sensor 5 send signal and control the first motor starting, the Width adjusting device 6 include the second motor, substrate 61, Actuating ring 63 and the multiple blades 62 being arranged along substrate 61 weeks, one end of the blade 62 are rotatably connected on substrate 61, Its middle part is equipped with actuating column 65, and the actuating ring 63 is equipped with cambered way 64, and actuating ring 63 passes through cambered way 64, actuating column 65 band movable vane pieces 62 are swung.
As shown in Fig. 2, the rotary positioning mechanism further includes sheath body 41, the input shaft 42 and output shaft 44 are mutually perpendicular to And be all mounted in the sheath body 41, the sheath body 41 carries out axially position and radial positioning simultaneously to input shaft 42 and output shaft 44 It is rotatablely connected with the two.The rotary positioning mechanism has self-locking performance, it can be achieved that reverse self-locking at this time, i.e., can only be by 47 band of worm screw Dynamic worm gear 43, and worm screw 47 cannot be driven by worm gear 43.
The range sensor 5 includes the CCD camera for taking pictures and carrying out binary conversion treatment, the workbench 2 it is upper Surface is equipped with two-dimensional stage 21, and the two-dimensional stage 21 is driven by X-axis servo motor 22 and Y-axis servo motor 23 respectively, described Two-dimensional stage 21 is equipped with X-axis grating scale 24 and Y-axis grating scale 25.By carrying out binary conversion treatment to the image of shooting and carrying out It contrasts, the size of laser facula can be monitored in real time, effectively adjust the width of output facula.X-axis grating scale 24 and Y-axis grating scale 25 are used for the displacement information of Real-time Feedback two-dimensional stage 21,
The pixel value of the CCD camera is not less than 5,000,000.
The transmission mechanism includes pitch wheel 46 and rack gear 47, and the gear 46 is arranged on output shaft 44, The rack gear 47 is arranged on support rod 45.
When work, object to be cleaned is prevented in two-dimensional stage 21, the CCD camera in range sensor 5 is to object It takes pictures, binary conversion treatment is carried out to the image of acquisition, judge that object brings out distance to output by program, while also can Judge the size of glossing up on a surface of an focus strength;Adjust the height of laser cleaning head 1 in time by lifting device 4 Degree, Width adjusting device 6 are carried out the adjustment of degree of precision by the bore that actuating ring 63 is exported with 62 Duis of movable vane piece, help to reach reason The cleaning effect thought.
The above-described embodiments merely illustrate the principles and effects of the present invention, and is not intended to limit the present invention.It is any ripe The personage for knowing this technology all without departing from the spirit and scope of the present invention, carries out modifications and changes to above-described embodiment.Cause This, institute is complete without departing from the spirit and technical ideas disclosed in the present invention by those of ordinary skill in the art such as At all equivalent modifications or change, should be covered by the claims of the present invention.

Claims (5)

1. a kind of laser cleaning output end adjustment width device, including laser cleaning head, workbench, the laser cleaning head include Shell, light source, the shell include output port, it is characterised in that: the laser cleaning head is connected to work by lifting device Make on platform, range sensor and Width adjusting device are set on the output port, the lifting device includes controller, the first horse It reaches, support rod and rotary positioning mechanism, the support rod are connected to the lower end of laser cleaning head, the rotary positioning mechanism packet Input shaft and output shaft are included, the output shaft is driven with support rod by transmission mechanism, and the transmission mechanism is by output shaft Rotary motion be changed into pumping for support rod, the input shaft is coaxially provided with worm screw, and the output shaft is coaxially set There is worm gear, what the worm gear and the worm screw cooperatively formed is self-locking performance worm gear mechanism, first motor and input shaft It is connected, the controller is used to receive the signal of range sensor transmission and controls the starting of the first motor, the wide dress of the tune It sets including the second motor, substrate, actuating ring and the multiple blades being arranged along substrate week, one end rotation connection of the blade On substrate, middle part is equipped with actuating column, and the actuating ring is equipped with cambered way, and actuating ring passes through cambered way, actuating column Band movable vane piece is swung.
2. laser cleaning output end adjustment width device according to claim 1, it is characterised in that: the rotary positioning mechanism Further include sheath body, the input shaft and output shaft are mutually perpendicular to and are all mounted in the sheath body, the sheath body to input shaft and Output shaft carries out axially position and radial positioning and is rotatablely connected with the two.
3. laser cleaning output end adjustment width device according to claim 1, it is characterised in that: the range sensor packet The CCD camera for taking pictures and carrying out binary conversion treatment is included, the upper surface of the workbench is equipped with two-dimensional stage, and the two dimension is flat Platform is driven by X-axis servo motor and Y-axis servo motor respectively, and the two-dimensional stage is equipped with X-axis grating scale and Y-axis grating scale.
4. laser cleaning output end adjustment width device according to claim 3, it is characterised in that: the picture of the CCD camera Element value is not less than 5,000,000.
5. laser cleaning output end adjustment width device according to claim 1, it is characterised in that: the transmission mechanism includes Pitch wheel and rack gear, the gear are arranged on output shaft, and the rack gear is arranged on support rod.
CN201811250282.5A 2018-10-25 2018-10-25 A kind of laser cleaning output end adjustment width device Pending CN109433737A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201811250282.5A CN109433737A (en) 2018-10-25 2018-10-25 A kind of laser cleaning output end adjustment width device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201811250282.5A CN109433737A (en) 2018-10-25 2018-10-25 A kind of laser cleaning output end adjustment width device

Publications (1)

Publication Number Publication Date
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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111871964A (en) * 2020-06-10 2020-11-03 中国电力科学研究院有限公司 Laser cleaning device and method for cleaning surface of workpiece with axisymmetric structure
CN112934859A (en) * 2021-01-29 2021-06-11 泉芯集成电路制造(济南)有限公司 Photomask impurity removing apparatus and photomask impurity removing method
CN115007560A (en) * 2022-06-08 2022-09-06 圣同智能机械设备(上海)有限公司 Laser cleaning equipment mobile device

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Publication number Priority date Publication date Assignee Title
US5947134A (en) * 1996-09-23 1999-09-07 Samsung Electronics Co., Ltd. Scrubbing equipment for a semiconductor device using laser distance sensor to automatically adjust brush height above the wafer
CN201978912U (en) * 2010-12-07 2011-09-21 林云飞 Automatic elevating cleaning device
CN205157821U (en) * 2015-10-30 2016-04-13 中山联合光电科技股份有限公司 Multiple -blade light ring system of manual regulation
CN107007190A (en) * 2017-05-16 2017-08-04 南华大学 A kind of size-adjustable toilet seat and matched toilet device
CN107297365A (en) * 2017-08-09 2017-10-27 温州职业技术学院 A kind of desk-top laser accurate cleaning device of dual wavelength composite energy profile
CN107361736A (en) * 2017-07-10 2017-11-21 北京大学第三医院 The function visual test method of adjustable sighting target surface illuminance
CN206936852U (en) * 2017-04-25 2018-01-30 上海亘乐机械制造有限公司 A kind of frock clamp
CN207494145U (en) * 2017-10-25 2018-06-15 青岛海镭激光科技有限公司 It is a kind of can be in the fixed laser cleaning mechanism converted between hand-held
CN207521380U (en) * 2017-06-01 2018-06-22 武汉绝顶光电科技有限公司 A kind of hand variable formula laser cleaning rifle
CN207806104U (en) * 2017-12-19 2018-09-04 青岛海镭激光科技有限公司 A kind of adjustment width device of laser cleaning output end

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5947134A (en) * 1996-09-23 1999-09-07 Samsung Electronics Co., Ltd. Scrubbing equipment for a semiconductor device using laser distance sensor to automatically adjust brush height above the wafer
CN201978912U (en) * 2010-12-07 2011-09-21 林云飞 Automatic elevating cleaning device
CN205157821U (en) * 2015-10-30 2016-04-13 中山联合光电科技股份有限公司 Multiple -blade light ring system of manual regulation
CN206936852U (en) * 2017-04-25 2018-01-30 上海亘乐机械制造有限公司 A kind of frock clamp
CN107007190A (en) * 2017-05-16 2017-08-04 南华大学 A kind of size-adjustable toilet seat and matched toilet device
CN207521380U (en) * 2017-06-01 2018-06-22 武汉绝顶光电科技有限公司 A kind of hand variable formula laser cleaning rifle
CN107361736A (en) * 2017-07-10 2017-11-21 北京大学第三医院 The function visual test method of adjustable sighting target surface illuminance
CN107297365A (en) * 2017-08-09 2017-10-27 温州职业技术学院 A kind of desk-top laser accurate cleaning device of dual wavelength composite energy profile
CN207494145U (en) * 2017-10-25 2018-06-15 青岛海镭激光科技有限公司 It is a kind of can be in the fixed laser cleaning mechanism converted between hand-held
CN207806104U (en) * 2017-12-19 2018-09-04 青岛海镭激光科技有限公司 A kind of adjustment width device of laser cleaning output end

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111871964A (en) * 2020-06-10 2020-11-03 中国电力科学研究院有限公司 Laser cleaning device and method for cleaning surface of workpiece with axisymmetric structure
CN112934859A (en) * 2021-01-29 2021-06-11 泉芯集成电路制造(济南)有限公司 Photomask impurity removing apparatus and photomask impurity removing method
CN112934859B (en) * 2021-01-29 2022-06-07 泉意光罩光电科技(济南)有限公司 Photomask impurity removing apparatus and photomask impurity removing method
CN115007560A (en) * 2022-06-08 2022-09-06 圣同智能机械设备(上海)有限公司 Laser cleaning equipment mobile device
CN115007560B (en) * 2022-06-08 2024-01-26 深圳市楚韵激光科技有限公司 Laser cleaning equipment mobile device

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Application publication date: 20190308