CN107030108A - A kind of rafifinal target heavy reduction rolling method - Google Patents
A kind of rafifinal target heavy reduction rolling method Download PDFInfo
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- CN107030108A CN107030108A CN201710263926.3A CN201710263926A CN107030108A CN 107030108 A CN107030108 A CN 107030108A CN 201710263926 A CN201710263926 A CN 201710263926A CN 107030108 A CN107030108 A CN 107030108A
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- rolling
- single pass
- ingot casting
- reduction
- target
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- 238000005096 rolling process Methods 0.000 title claims abstract description 47
- 238000000034 method Methods 0.000 title claims abstract description 26
- 238000005266 casting Methods 0.000 claims abstract description 35
- 230000002441 reversible effect Effects 0.000 claims abstract description 18
- 239000000839 emulsion Substances 0.000 claims abstract description 12
- 238000005461 lubrication Methods 0.000 claims abstract description 6
- 238000003801 milling Methods 0.000 claims abstract description 6
- 238000002789 length control Methods 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 description 6
- 239000010408 film Substances 0.000 description 5
- 238000005240 physical vapour deposition Methods 0.000 description 4
- 238000004544 sputter deposition Methods 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 239000013077 target material Substances 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000005242 forging Methods 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000004411 aluminium Substances 0.000 description 1
- 239000000039 congener Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000008676 import Effects 0.000 description 1
- 238000010849 ion bombardment Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B21—MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
- B21B—ROLLING OF METAL
- B21B1/00—Metal-rolling methods or mills for making semi-finished products of solid or profiled cross-section; Sequence of operations in milling trains; Layout of rolling-mill plant, e.g. grouping of stands; Succession of passes or of sectional pass alternations
- B21B1/22—Metal-rolling methods or mills for making semi-finished products of solid or profiled cross-section; Sequence of operations in milling trains; Layout of rolling-mill plant, e.g. grouping of stands; Succession of passes or of sectional pass alternations for rolling plates, strips, bands or sheets of indefinite length
- B21B1/30—Metal-rolling methods or mills for making semi-finished products of solid or profiled cross-section; Sequence of operations in milling trains; Layout of rolling-mill plant, e.g. grouping of stands; Succession of passes or of sectional pass alternations for rolling plates, strips, bands or sheets of indefinite length in a non-continuous process
- B21B1/32—Metal-rolling methods or mills for making semi-finished products of solid or profiled cross-section; Sequence of operations in milling trains; Layout of rolling-mill plant, e.g. grouping of stands; Succession of passes or of sectional pass alternations for rolling plates, strips, bands or sheets of indefinite length in a non-continuous process in reversing single stand mills, e.g. with intermediate storage reels for accumulating work
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B21—MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
- B21B—ROLLING OF METAL
- B21B3/00—Rolling materials of special alloys so far as the composition of the alloy requires or permits special rolling methods or sequences ; Rolling of aluminium, copper, zinc or other non-ferrous metals
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B21—MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
- B21B—ROLLING OF METAL
- B21B3/00—Rolling materials of special alloys so far as the composition of the alloy requires or permits special rolling methods or sequences ; Rolling of aluminium, copper, zinc or other non-ferrous metals
- B21B2003/001—Aluminium or its alloys
Abstract
The present invention relates to a kind of rafifinal target heavy reduction rolling method, it is characterised in that：Its technical process is：1）Reversible mill roll gap is set as to the half of single pass rolling reduction；2）Reversible mill emulsion lubrication is closed, and ingot casting is bitten with the speed for being not more than 0.5m/s；3）Ingot casting bites rear milling train to be stopped immediately, and head mill length is controlled within 500mm, and roll reversion, ingot casting retracts to entrance side；4）Mill roll-gap is set as single pass rolling reduction, and emulsion is opened, and casting head is bitten with single pass half drafts, and rear portion ingot casting is rolled with single pass rolling reduction.Rafifinal target heavy reduction rolling method of the present invention can avoid low temperature（Less than 350 DEG C）Occur the phenomenon for biting skidding during heavy reduction rolling, it is ensured that heavy reduction rolling is smoothed out, improve target rolling success rate, reduce because plate ingot scraps and caused by massive losses.
Description
Technical field：
The present invention relates to a kind of rafifinal target heavy reduction rolling method.
Background technology：
TFT-LCD (Thin film transistor-Liquid crystal display) Thin Film Transistor-LCD,
Liquid crystal panel is commonly called as, is widely used in the various products such as mobile phone, display, television set.TFT-LCD produces the work of most critical
Skill is physical vapour deposition (PVD)（PVD）, PVD is that semiconductor chip production and TFT-LCD prepare process with splash-proofing sputtering metal boots material
In one of most important raw material.
The technique of target as sputter deposition film is the common method for producing function film, and sputtering method is to use high-energy ion bombardment
Target material surface, makes the atom or molecular jet of target material surface in substrate surface, forms the process of one layer of dense film.Splash-proofing sputtering metal
What consumption was maximum in target is ultra-pure aluminum and the pure alloy of superelevation.
Rafifinal target（5N~6N ultra-pure aluminum）, purity ＞ 99.999%, product specification exists：12~20mmx180~
1731mmx1700~2650mm, added value of product is high, but production difficulty is big, equal to crystallite dimension, crystal grain in addition to purity requirement
Evenness and texture orientation etc. have strict demand, and crystallite dimension is typically required within 200um, needed for domestic target manufacture
With external industry prosperity in terms of purity, the control of target microstructure, target and the backboard welding technique of the rafifinal to be used
There is a big difference for country, at present the rafifinal target used in semiconductor Display Technique enterprise of the country, and especially TFT-LCD is with large-scale
Aluminium target, whole dependence on import, expensive, the delivery cycle is long.
In recent years, the market scale of target expands day by day.Global about 3,200,000,000 dollars of target sales volume in 2000,2004
Nearly 4,000,000,000 dollars of annual sales amount, 2006 about 47.2 hundred million dollars, average annual growth is up to 8%.Global target in 2010
The sales volume of material reaches 6,500,000,000 dollars, and target has been developing progressively a professional industry.With IC market scale
Rapid to expand, the industrial circle such as information storage industry, flat display industry, IC industry and plated film needs to use not
Congener target, China is increasingly becoming one of greatest requirements area of film target in the world.
5N rafifinal targets market is concentrated mainly on Japan, South Korea, TaiWan, China and continent, and South Korea is current maximum target
Material market, continent target market demand accounts for global about 20% market share at present in 60~70 tons/month；Major customer is
BOE（BOE）, magnificent starlight electricity, this 2 account for the share of domestic market 70%；Predicted according to professional institution, with the producer such as BOE production capacity
Expansion, the staple market of target progressively will be transferred to China from South Korea after 2017, and continental market target demand will increase
To about 200 tons/month, global about 40% market share is accounted for；Constantly increase with the size of LCD screen, thickness is constantly thinned, TFT-
LCD rafifinal target demands will further expand.
Rafifinal target preparation method mainly has at present：(1) equal channel angular hubbing（Equal Channel
Angular Drawing abbreviation ECAD), (2) multiway forging method（Multiple Forging, abbreviation MF), (3) rolling,
Preceding 2 kinds of processing methods can only process the target of small size, for large-size target, such as 1950x1580x14mm and 2650*210*
The target of 18.3mm specifications, can only be using rolling production.
Rolling produces rafifinal target, and deformation temperature need to be controlled to reach good deformation effect, during rolling and is tried one's best
Single pass deformation drafts is improved, to control the crystallite dimension and orientation of target finished product；Deformation temperature general control exists during rolling
Less than 350 DEG C, single pass rolling reduction easily occurs biting skidding scene in 20~60mm, rolling, and drafts need to be adjusted temporarily,
Heavy reduction rolling can not be realized, causes target finished product crystallite dimension undesirable, it is impossible to meets and requires, cause ingot casting to drop when serious
Failure is rolled after temperature, plate ingot is scrapped, and causes huge loss.
The content of the invention：
It is an object of the invention to provide a kind of rafifinal target heavy reduction rolling method, the rafifinal target heavy reduction rolls
Method processed can avoid the phenomenon for occurring biting skidding during low temperature heavy reduction rolling, realize the rolling work of target low temperature heavy reduction
Skill, improves target rolling success rate.
Rafifinal target heavy reduction rolling method of the present invention, it is characterised in that：Its technical process is：
1）Reversible mill roll gap is set as to the half of single pass rolling reduction；
2）Reversible mill emulsion lubrication is closed, and ingot casting is bitten with the speed for being not more than 0.5m/s；
3）Ingot casting bites rear milling train to be stopped immediately, head mill length control within 500mm, roll reversion, ingot casting retract to
Entrance side；
4）Mill roll-gap is set as single pass rolling reduction, and emulsion is opened, and casting head is bitten with single pass half drafts, rear portion
Ingot casting is rolled with single pass rolling reduction.
Further, above-mentioned single pass rolling reduction is 20~60mm.
Further, above-mentioned reversible mill roll gap is the spacing between the topping roll and bottom roll on reversible mill.
Rafifinal target heavy reduction rolling method of the present invention can avoid low temperature（Less than 350 DEG C）Go out during heavy reduction rolling
Now bite the phenomenon of skidding, it is ensured that being smoothed out for heavy reduction rolling, improve target rolling success rate, reduce because plate ingot is scrapped
And the massive losses caused.
Brief description of the drawings：
The organigram bitten at the beginning of Fig. 1 ingot castings；
The organigram of backed off after random is bitten at the beginning of Fig. 2 ingot castings；
The organigram that Fig. 3 is that ingot casting is secondary when biting；
Fig. 4 is the secondary organigram for biting process of ingot casting.
Embodiment：
The present invention will be further described in detail with reference to the accompanying drawings and detailed description.
Rafifinal target heavy reduction rolling method of the present invention, it is characterised in that：Its technical process is：
1）Reversible mill roll gap is set as to the half of single pass rolling reduction；
2）Reversible mill emulsion lubrication is closed, and ingot casting is bitten with the speed for being not more than 0.5m/s；
3）Ingot casting bites rear milling train to be stopped immediately, head mill length control within 500mm, roll reversion, ingot casting retract to
Entrance side；
4）Mill roll-gap is set as single pass rolling reduction, and emulsion is opened, and casting head is bitten with single pass half drafts, rear portion
Ingot casting is rolled with single pass rolling reduction.
Further, above-mentioned single pass rolling reduction is 20~60mm.
Further, above-mentioned reversible mill roll gap is the spacing between the topping roll and bottom roll on reversible mill.
Specific embodiment one：
1）Reversible mill roll gap is set as 20mm；2）Reversible mill emulsion lubrication is closed, and ingot casting is with 0.3m/s speed
Bite；3）Ingot casting, which bites milling train after 400mm, to be stopped, and formation once bites section, and then roll is inverted, and ingot casting retracts to entrance side；
4）Mill roll-gap is set as 40mm, and emulsion is opened, and the section that once bites of casting head is bitten with 20 mm drafts, rear portion ingot casting
Rolled with the mm drafts of single pass 40.
Specific embodiment two：
1）Reversible mill roll gap is set as 30mm；2）Reversible mill emulsion lubrication is closed, and ingot casting is with 0.2m/s speed
Bite；3）Ingot casting, which bites milling train after 500mm, to be stopped, and formation once bites section, and then roll is inverted, and ingot casting retracts to entrance side；
4）Mill roll-gap is set as 60mm, and emulsion is opened, and the section that once bites of casting head is bitten with 30 mm drafts, rear portion ingot casting
Rolled with the mm drafts of single pass 60.
Rafifinal target heavy reduction rolling method of the present invention can avoid low temperature（Less than 350 DEG C）Stung during heavy reduction rolling
Enter the phenomenon of skidding, it is ensured that being smoothed out for heavy reduction rolling, improve target rolling success rate, reduction is made because being scrapped plate ingot
Into massive losses.
The foregoing is only presently preferred embodiments of the present invention, all equivalent changes done according to scope of the present invention patent with
Modification, should all belong to the covering scope of the present invention.
Claims (3)
1. a kind of rafifinal target heavy reduction rolling method, it is characterised in that：Its technical process is：
1）Reversible mill roll gap is set as to the half of single pass rolling reduction；
2）Reversible mill emulsion lubrication is closed, and ingot casting is bitten with the speed for being not more than 0.5m/s；
3）Ingot casting bites rear milling train to be stopped immediately, head mill length control within 500mm, roll reversion, ingot casting retract to
Entrance side；
4）Mill roll-gap is set as single pass rolling reduction, and emulsion is opened, and casting head is bitten with single pass half drafts, rear portion
Ingot casting is rolled with single pass rolling reduction.
2. rafifinal target heavy reduction rolling method according to claim 1, it is characterised in that：The single pass pressure
Measure as 20~60mm.
3. rafifinal target heavy reduction rolling method according to claim 1, it is characterised in that：The reversible mill
Roll gap is the spacing between topping roll and bottom roll on reversible mill.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710263926.3A CN107030108A (en) | 2017-04-21 | 2017-04-21 | A kind of rafifinal target heavy reduction rolling method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710263926.3A CN107030108A (en) | 2017-04-21 | 2017-04-21 | A kind of rafifinal target heavy reduction rolling method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN107030108A true CN107030108A (en) | 2017-08-11 |
Family
ID=59536566
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710263926.3A Pending CN107030108A (en) | 2017-04-21 | 2017-04-21 | A kind of rafifinal target heavy reduction rolling method |
Country Status (1)
| Country | Link |
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| CN (1) | CN107030108A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110205590A (en) * | 2019-05-08 | 2019-09-06 | 东莞市欧莱溅射靶材有限公司 | A kind of ultra-pure aluminum sputtering target material and its milling method |
| CN110788146A (en) * | 2018-08-01 | 2020-02-14 | 合肥江丰电子材料有限公司 | Target material rolling device and rolling method |
| CN113061852A (en) * | 2021-03-17 | 2021-07-02 | 宁波江丰电子材料股份有限公司 | High-purity aluminum or aluminum alloy target material and preparation method thereof |
| CN114682749A (en) * | 2022-02-28 | 2022-07-01 | 首钢京唐钢铁联合有限责任公司 | Casting blank top bending treatment method for thin slab continuous casting machine |
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| JPS60102208A (en) * | 1983-11-07 | 1985-06-06 | Kawasaki Steel Corp | Reversible rolling method of plate |
| JP2009274113A (en) * | 2008-05-15 | 2009-11-26 | Mitsubishi Alum Co Ltd | Method of manufacturing rolled stock |
| CN102126006A (en) * | 2010-01-14 | 2011-07-20 | 宝山钢铁股份有限公司 | Roll gap control method for soft reduction technology for continuous casting |
| JP2013010132A (en) * | 2011-06-30 | 2013-01-17 | Jfe Steel Corp | Method for rolling billet |
| CN103203358A (en) * | 2012-01-13 | 2013-07-17 | 宝山钢铁股份有限公司 | Rolling method capable of improving biting condition in rolling process of reversible rolling mill |
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| CN103801565A (en) * | 2013-11-27 | 2014-05-21 | 张家港浦项不锈钢有限公司 | Gauge control technique for top and tail of hot rolled strip steel of Steckel mill |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110788146A (en) * | 2018-08-01 | 2020-02-14 | 合肥江丰电子材料有限公司 | Target material rolling device and rolling method |
| CN110205590A (en) * | 2019-05-08 | 2019-09-06 | 东莞市欧莱溅射靶材有限公司 | A kind of ultra-pure aluminum sputtering target material and its milling method |
| CN113061852A (en) * | 2021-03-17 | 2021-07-02 | 宁波江丰电子材料股份有限公司 | High-purity aluminum or aluminum alloy target material and preparation method thereof |
| CN114682749A (en) * | 2022-02-28 | 2022-07-01 | 首钢京唐钢铁联合有限责任公司 | Casting blank top bending treatment method for thin slab continuous casting machine |
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| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20170811 |
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