CN107026095A - Crystal round fringes measure module - Google Patents
Crystal round fringes measure module Download PDFInfo
- Publication number
- CN107026095A CN107026095A CN201610069517.5A CN201610069517A CN107026095A CN 107026095 A CN107026095 A CN 107026095A CN 201610069517 A CN201610069517 A CN 201610069517A CN 107026095 A CN107026095 A CN 107026095A
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- CN
- China
- Prior art keywords
- crystal round
- round fringes
- light source
- speculum
- line scan
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/10—Measuring as part of the manufacturing process
- H01L22/12—Measuring as part of the manufacturing process for structural parameters, e.g. thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions
Abstract
A kind of crystal round fringes measure module, including：An at least line scan camera, is erected at the book office of crystal round fringes；An at least convex lens group, positioned at the front of line scan camera, makes line scan camera pass through after convex lens group, then carries out linear scan to the middle end margin of crystal round fringes；An at least speculum group, close to crystal round fringes, and its by one, first and second speculum is constituted, and make reflection forward-facing；At least three light source component groups, its light source is projected to the pixel on the ramp edge of wanted linear scan crystal round fringes, middle end margin and lower inclined plane edge respectively, to form different dark fields respectively, make whole pixels of crystal round fringes that low gray value region is presented, when high gray value region is presented in the partial pixel of line scan camera linear scan crystal round fringes, then the defect that high gray value region is crystal round fringes is measured.The present invention has effects that lifting measures crystal round fringes speed and finds defect in real time.
Description
Technical field
The present invention is that a kind of relevant crystal round fringes measure module, espespecially a kind of to integrate linear scan photography
Machine, convex lens, speculum and dark field, can also lift measurement crystal round fringes speed and in real time hair
Existing defect.
Background technology
Measured in the past for the wafer largely produced, and be mostly to use substantial amounts of manpower, using perhaps
The more different measurers, the work that Come works are measured in a manual manner.This mode manually detected,
In addition to having the shortcomings that occurrences in human life cost is too high, the work detected with human eye does not only have
Dry as dust, eyes easily tired Labor and the problems such as too high flow of personnel rate outside, the stability of quality
It is also the problem of being worth inquiring into, therefore, artificial vision gradually to be replaced with machine vision, taken the photograph in industry
In terms of shadow machine, distinguished with capture principle, the main technology including line scan-type with upper thread scan-type,
The line scan-type is that pictorial element is in one-dimensional the linear alignment, can only obtain the shadow of a row during capture every time
As data, when industrial photography machine and when being produced relative motion between photographic objects, and two dimension is obtained
View data；The upper thread scan-type refers to that the image sensing component for being implanted in industrial photography machine uses two
Tie up matrix form.Again in terms of the optics geometry of machine vision, it utilizes speculum, concavees lens, convex
The difference mirror body combination such as lens, focus lamp, planoconvex spotlight carries out optical reflection, refraction, but combination
The unlabored thing of people institute of not usual knowledge, need to pass through considerable degree of research.Machine is regarded again
In terms of the illumination geometry of feel, its lighting source is divided into bright field light source and dark field, the bright field
Light source is that light source reflection is directly entered camera lens；The dark field is that light source reflection not directly enters camera lens.
Secondary person, wafer is measured mainly on effective area, not in invalid, usual wafer side
Edge belongs to invalid, rather than the emphasis measured, but due to wafer material gradually vitrifying and expansion
Area, if defect occur in crystal round fringes, in lithography, diffusion, cleaning, chemically mechanical polishing
And chemical vapors deposition multiple fabrication steps in handled, transfer, carry process, when by
Slight physical impacts, easily make wafer be split from invalid to effective area, then crystal round fringes
Defect stealthily turns into the defect that yield is limited.
Not yet it is taken seriously therefore crystal round fringes are measured, but how integrates the industrial photography of computer vision
Machine technology, optics geometry technology and illumination geometry technology, effective hoisting load survey crystal round fringes speed
The problem of degree and in real time discovery defect.Therefore, there will be bigger improvement space.
The content of the invention
To solve the problem of prior art measures crystal round fringes, the present invention provides a kind of crystal round fringes amount
Module is surveyed, it integrates the geometric convex lens of line scan-type, optics, the speculum of industrial photography machine
And geometric dark field is illuminated, measure crystal round fringes speed with lifting and find defect in real time
Effect.
The technical solution adopted for the present invention to solve the technical problems is：
A kind of crystal round fringes measure module, including：At least a line scan camera, is erected at wafer
The book office at edge；An at least convex lens group, positioned at the front of the line scan camera, makes this
Line scan camera is passed through after the convex lens group, then carries out line to the middle end margin of the crystal round fringes
Property scanning；An at least speculum group, close to the crystal round fringes, and it is by first and second reflection
Mirror is constituted, and makes reflection forward-facing, and first and second speculum is photographed with the linear scan
Machine is central reference, both sides is turned forward in symmetry shape, passes through the line scan camera
After the reflecting surface of first and second speculum, then ramp edge respectively to the crystal round fringes and
Lower inclined plane edge carries out linear scan；And at least three light source component groups, its light source projects respectively
Extremely want on the ramp edge, middle end margin and lower inclined plane edge of the linear scan crystal round fringes
Pixel, to form different dark fields respectively, makes whole pixels of the crystal round fringes that low gray scale is presented
It is worth region, when high ash is presented in the partial pixel of the line scan camera linear scan crystal round fringes
During angle value region, then the defect (decfect) that the high gray value region is the crystal round fringes is measured.
According to feature is before taken off, by one, first and second light source assembly is constituted the light source component group, its
Close to the crystal round fringes, and make light source projects forward, and first and second light source assembly is with the line
Property smear camera be central reference, both sides is turned forward in symmetry shape, make this first and the
Two light source assemblies are presented non-180 ° of parallel light source angles, and make the light source angle 60 °~
Between 160 °.
According to feature is before taken off, non-180 ° of parallel reflection angles are presented in first and second speculum,
And the reflection angle is made between 60 °~160 °.
According to feature, in addition to a screen is before taken off, the defect of the crystal round fringes is observed.
According to before taking off feature, in addition to a defect dipoles unit, the automatic decision crystal round fringes lack
Fall into.
By technological means is above taken off, the present invention selectes the quick scanning of the line scan camera, is somebody's turn to do
The dark field of convex lens group, the mirror body of speculum group and the light source component group is integrated, and is excluded
Upper thread scan-type, the non-convex lens group, the mirror body of speculum group and the non-energy of non-rapid scanning are presented
Comparative high bright field light source, also may replace it is artificial measure and apply crystal round fringes, and then with carrying
Rising amount surveys crystal round fringes speed and finds effect of defect in real time.
The beneficial effects of the invention are as follows it integrates line scan-type, the optics geometry of industrial photography machine
Convex lens, speculum and illuminate geometric dark field, measure crystal round fringes speed with lifting
Degree and the effect for finding defect in real time.
Brief description of the drawings
The present invention is further described with reference to the accompanying drawings and examples.
Fig. 1 is the schematic diagram of linear scan crystal round fringes of the present invention.
Fig. 2 is the schematic diagram that the present invention measures defects of wafer edge.
Label declaration in figure：
10 line scan cameras
20 convex lens groups
30 speculum groups
31 first speculums
32 second speculums
33 reflectings surface
40 light source component groups
41 first light source assemblies
42 secondary light source components
50 screens
60 defect dipoles units
D defects
E crystal round fringes
E1Ramp edge
E2Middle end margin
E3Lower inclined plane edge
F dark fields
P pixels
P1Low gray value region
P2High gray value region
θ1Reflect angle
θ2Light source angle
Embodiment
First, refer to shown in Fig. 1, crystal round fringes of the invention, which measure module preferred embodiment, to be included
Have：At least a line scan camera 10, is erected at crystal round fringes (E) book office, using industry
The linear scan technique of video camera, the image that will can be incident upon by camera lens on sensing component, can be fast
Speed scans the crystal round fringes (E), but is not limited to this.
At least a convex lens group 20, positioned at the front of the line scan camera 10, makes this linearly sweep
Video camera 10 is retouched to pass through after the convex lens group 20, then to the middle end margin (E of the crystal round fringes (E)2) enter
Row linear scan, but it is not limited to this.
An at least speculum group 30, close to the crystal round fringes (E), and it is by first and second reflection
Mirror 31,32 is constituted, and make reflecting surface 33 forward, and first and second speculum 31,32 with
The line scan camera 10 is central reference, both sides is turned forward in symmetry shape, makes the line
Property smear camera 10 through the reflecting surface 33 of first and second speculum 31,33 after, then distinguish
To the ramp edge (E of the crystal round fringes (E)1) and lower inclined plane edge (E3) linear scan is carried out, this
In embodiment, non-180 ° of parallel reflection angle (θ are presented in first and second speculum 31,321),
And make the reflection angle (θ1) between 60 °~160 °, but it is not limited to this.
At least three light source component groups 40, its light source is projected to the wanted linear scan wafer side respectively
Ramp edge (the E of edge1), middle end margin (E2) and lower inclined plane edge (E3) on pixel, with respectively
Different dark fields (F) are formed, make whole pixels (P) of the crystal round fringes (E) that low gray value area is presented
Domain (P1), when the partial pixel (P) of the linear scan of line scan camera 10 crystal round fringes (E)
High gray value region (P is presented2) when, then measure the high gray value region (P2) it is the crystal round fringes
(E) in defect (D), the present embodiment, the light source component group 40 is by first and second light source assembly
41st, 42 constituted, its close to the crystal round fringes (E), and make light source projects forward, and this first and
Secondary light source component 41,42 is central reference with the line scan camera 10, is made in symmetry shape
Both sides turn forward, and make first and second light source assembly 41,42 that non-180 ° of parallel light sources are presented
Angle (θ2), and make the light source angle (θ2) between 60 °~160 °.
In addition, also including the hardware unit of a screen 50, the defect (D) of the crystal round fringes (E) is observed,
Or more may include the software service of a defect dipoles unit 60, the automatic decision crystal round fringes (E) lack
Fall into (D), analyzed, distinguishing image differentiation, but be not limited to this.
By technological means is above taken off, the present invention effectively integrates the quick of the line scan camera 10 and swept
Retouch, the dark field of the convex lens group 20, the mirror body of speculum group 30 and the light source component group 40,
Not only lifting measures crystal round fringes (E) speed and finds the defect (D) in real time, meanwhile, it can coordinate
Hardware unit or software service, lift defect (D) discrimination power of the crystal round fringes (E), also correctly sentence
Fixed defect (D) species, and different disposal is carried out according to different defects (D), reach human cost and set
The optimization of standby cost.
The above described is only a preferred embodiment of the present invention, not making any shape to the present invention
Limitation in formula, it is any simple that every technical spirit according to the present invention is made to above example
Modification, equivalent variations and modification, in the range of still falling within technical solution of the present invention.
In summary, the present invention is accorded with completely in structure design, using in practicality and cost benefit
Needed for conjunction industry development, and disclosed structure is also, with unprecedented innovative structure, to have
Novelty, creativeness, practicality, meet the regulation about patent of invention important document, therefore lift in accordance with the law
Application.
Claims (5)
1. a kind of crystal round fringes measure module, it is characterised in that including：
An at least line scan camera, is erected at the book office of crystal round fringes；
An at least convex lens group, positioned at the front of the line scan camera, takes the photograph the linear scan
Shadow machine is passed through after the convex lens group, then carries out linear scan to the middle end margin of the crystal round fringes；
An at least speculum group, close to the crystal round fringes, and it is by first and second speculum institute
Constitute, and make reflection forward-facing, but first and second speculum using the line scan camera as
Central reference, makes both sides turn forward in symmetry shape, make the line scan camera through this
One and second speculum reflecting surface after, then ramp edge respectively to the crystal round fringes and oblique
Face edge carries out linear scan；And
At least three light source component groups, its light source is projected to the wanted linear scan crystal round fringes respectively
Ramp edge, middle end margin and lower inclined plane edge on pixel, to form different details in a play not acted out on stage, but told through dialogues respectively
Light source, makes whole pixels of the crystal round fringes that low gray value region is presented, when linear scan photography
When high gray value region is presented in the partial pixel of the machine linear scan crystal round fringes, then the height is measured
Gray value region is the defect (decfect) of the crystal round fringes.
2. crystal round fringes according to claim 1 measure module, it is characterised in that the light source
By one, first and second light source assembly is constituted element group, and it makes light source close to the crystal round fringes
Projection is facing forward, and first and second light source assembly is using the line scan camera as central reference,
Both sides is turned forward in symmetry shape, make non-180 ° of first and second light source assembly presentation parallel
Light source angle, and make the light source angle between 60 °~160 °.
3. crystal round fringes according to claim 1 or 2 measure module, it is characterised in that described
Non- 180 ° of parallel reflection angles are presented in first and second speculum, and make the reflection angle exist
Between 60 °~160 °.
4. crystal round fringes according to claim 3 measure module, it is characterised in that also including one
Screen, observes the defect of the crystal round fringes.
5. crystal round fringes according to claim 3 measure module, it is characterised in that also including one
Defect dipoles unit, the defect of the automatic decision crystal round fringes.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610069517.5A CN107026095A (en) | 2016-02-01 | 2016-02-01 | Crystal round fringes measure module |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610069517.5A CN107026095A (en) | 2016-02-01 | 2016-02-01 | Crystal round fringes measure module |
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| Publication Number | Publication Date |
|---|---|
| CN107026095A true CN107026095A (en) | 2017-08-08 |
Family
ID=59524305
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
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| CN201610069517.5A Pending CN107026095A (en) | 2016-02-01 | 2016-02-01 | Crystal round fringes measure module |
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Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000046537A (en) * | 1998-07-24 | 2000-02-18 | Kobe Steel Ltd | Defect inspection equipment |
| US20100053603A1 (en) * | 2007-05-14 | 2010-03-04 | Nikon Corporation | Surface inspection apparatus and surface inspection method |
| US20100066998A1 (en) * | 2007-04-27 | 2010-03-18 | Shibaura Mechatronics Corporation | Surface inspection apparatus |
| US20110141267A1 (en) * | 2007-06-15 | 2011-06-16 | Michael Lev | Optical inspection system using multi-facet imaging |
| CN102830123A (en) * | 2012-08-16 | 2012-12-19 | 北京科技大学 | On-line detection method of small defect on metal plate strip surface |
| CN105067639A (en) * | 2015-07-20 | 2015-11-18 | 丹阳市精通眼镜技术创新服务中心有限公司 | Device and method for automatically detecting lens defects through modulation by optical grating |
| CN205542718U (en) * | 2016-02-01 | 2016-08-31 | 易发精机股份有限公司 | Wafer edge module of measurationing |
-
2016
- 2016-02-01 CN CN201610069517.5A patent/CN107026095A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000046537A (en) * | 1998-07-24 | 2000-02-18 | Kobe Steel Ltd | Defect inspection equipment |
| US20100066998A1 (en) * | 2007-04-27 | 2010-03-18 | Shibaura Mechatronics Corporation | Surface inspection apparatus |
| US20100053603A1 (en) * | 2007-05-14 | 2010-03-04 | Nikon Corporation | Surface inspection apparatus and surface inspection method |
| US20110141267A1 (en) * | 2007-06-15 | 2011-06-16 | Michael Lev | Optical inspection system using multi-facet imaging |
| CN102830123A (en) * | 2012-08-16 | 2012-12-19 | 北京科技大学 | On-line detection method of small defect on metal plate strip surface |
| CN105067639A (en) * | 2015-07-20 | 2015-11-18 | 丹阳市精通眼镜技术创新服务中心有限公司 | Device and method for automatically detecting lens defects through modulation by optical grating |
| CN205542718U (en) * | 2016-02-01 | 2016-08-31 | 易发精机股份有限公司 | Wafer edge module of measurationing |
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Application publication date: 20170808 |