CN205542718U - Wafer edge module of measurationing - Google Patents
Wafer edge module of measurationing Download PDFInfo
- Publication number
- CN205542718U CN205542718U CN201620097686.5U CN201620097686U CN205542718U CN 205542718 U CN205542718 U CN 205542718U CN 201620097686 U CN201620097686 U CN 201620097686U CN 205542718 U CN205542718 U CN 205542718U
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- China
- Prior art keywords
- crystal round
- round fringes
- light source
- edge
- wafer edge
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Abstract
The utility model provides a wafer edge module of measurationing, includes: at least one linear smear camera sets up the book office at the wafer edge, at least convex lens groups is located the place ahead of linear trace video camera, makes the linear trace video camera see through convex lens group back, and the middle -end edge to the wafer edge carries out the linear trace again, at least speculum group is close the wafer edge, and its first and the second mirror constitutes by one to make the plane of reflection forward, at least three light source component group, its light source throw the pixel on the inclined plane edge under marginal the reaching of last inclined plane edge, middle -end at want linear trace wafer edge respectively to form different details in a play not acted out on stage, but told through dialogues light sources respectively, make whole pixels at wafer edge present low gray value region, when the marginal partial pixel of linear trace video camera linear trace wafer presents high gray value region, the regional defect that is the wafer edge of the high gray value of then measurationing out. The utility model discloses has the efficiency that promotes the wafer edge speed of measurationing and find the defect in real time.
Description
Technical field
The utility model is that relevant a kind of crystal round fringes measures module, espespecially a kind of integration linear scan
Video camera, convex lens, speculum and dark field, also can promote measurement crystal round fringes speed and reality
Shi Faxian defect.
Background technology
Mass-produced wafer was measured in the past, be mostly to use substantial amounts of manpower, and used and permitted
The most different measurers, makees the work measured in the way of artificial.The mode of this manual detection,
In addition to having the too high shortcoming of personnel costs expense, carry out the work detected with human eye, do not only have
Dry as dust, eyes are the most tired and flow of personnel rate crosses height etc. outside problem, the stability of quality
Also it is the problem being worth inquiring into, therefore, gradually replaces artificial vision with machine vision, take the photograph in industry
Shadow machine aspect, distinguishes with capture principle, mainly includes the technology of line scan-type and upper thread scan-type,
This line scan-type be pictorial element be one-dimensional the linear alignment, the shadow of row can only be obtained during capture every time
As data, when industrial photography machine and when being photographed between object generation relative motion, and obtain two dimension
View data；This upper thread scan-type refers to that the image sensing component being implanted in industrial photography machine uses two
Dimension matrix form.The optics geometry aspect of machine vision again, it utilizes speculum, concavees lens, convex
The different mirror body combination such as lens, focus lamp, planoconvex spotlight carries out optical reflection, refraction, but combines
The unlabored thing of people of not usual knowledge, need to be through considerable degree of research.Machine regards again
The illumination geometry aspect felt, its lighting source is divided into bright field light source and dark field, this bright field
Light source is that light source reflection is directly entered camera lens；This dark field is that light source reflection not directly enters camera lens.
Secondary person, wafer measures main on effective area, not in invalid, usual wafer limit
Edge belongs to invalid, rather than the emphasis measured, but due to wafer material gradually vitrifying and expansion
Area, if there is defect in crystal round fringes, then at lithography, spread, clean, chemically-mechanicapolish polish
And the multiple fabrication steps of chemical vapors deposition carries out processing, transfer, the process of carrying, when being subject to
Slight physical impacts, easily make wafer split to effective area from invalid, then crystal round fringes
Defect becomes the defect that yield is limited the most stealthily.
Not yet it is taken seriously therefore crystal round fringes measures, but how to integrate the industrial photography of computer vision
Machine technology, optics geometry technology and illumination geometry technology, effective hoisting load surveys crystal round fringes speed
Degree and the problem finding defect in real time.Therefore, will there is bigger improvement space.
Utility model content
The problem measuring crystal round fringes for solving prior art, the utility model provides a kind of wafer limit
Edge measures module, and it integrates line scan-type of industrial photography machine, the geometric convex lens of optics, anti-
Penetrate mirror and illuminate geometric dark field, there is lifting and measure crystal round fringes speed and find in real time
Effect of defect.
The utility model solves its technical problem and be the technical scheme is that
A kind of crystal round fringes measures module, including: at least one line scan camera, it is erected at wafer
The book office at edge；At least one convex lens group, is positioned at the front of this line scan camera, makes this
After line scan camera passes through this convex lens group, the middle end margin of this crystal round fringes is carried out line
Property scanning；At least one speculum group, close to this crystal round fringes, and it is by first and second reflection
Mirror is constituted, and makes reflecting surface forward, and this first and second speculum is photographed with this linear scan again
Machine is central reference, symmetrically shape and make both sides turn forward, make this line scan camera pass through
After the reflecting surface of this first and second speculum, more respectively to the ramp edge of this crystal round fringes and
Lower inclined plane edge carries out linear scan；And at least three light source component group, its light source projects respectively
To the ramp edge of wanted this crystal round fringes of linear scan, middle end margin and lower inclined plane edge
Pixel, to form different dark field respectively, makes whole pixels of this crystal round fringes present low gray scale
Value region, when the partial pixel of this line scan camera this crystal round fringes of linear scan presents high ash
During angle value region, then measure the defect (decfect) that this high gray value region is this crystal round fringes.
According to front taking off feature, this light source component group is made up of first and second light source assembly, its
Close to this crystal round fringes, and make light source projects forward, and this first and second light source assembly is with this line
Property smear camera is central reference, symmetrically shape and make both sides turn forward, make this first and
Two light source assemblies present non-180 ° of parallel light source angles, and make this light source angle at 60 °～
Between 160 °.
According to front taking off feature, this first and second speculum presents non-180 ° of parallel reflection angles,
And make this reflection angle between 60 °～160 °.
According to front taking off feature, also include a screen, observe the defect of this crystal round fringes.
According to front taking off feature, also include a defect dipoles unit, lacking of this crystal round fringes of automatic decision
Fall into.
Take off technological means on by, the utility model select this line scan camera quickly scanning,
The dark field of this convex lens group, the mirror body of speculum group and this light source component group is integrated, row
Unless quickly the upper thread scan-type of scanning, this convex lens group non-, the mirror body of speculum group and non-can be in
Existing comparative high bright field light source, also may replace artificial measurement and application crystal round fringes, and then has
Promote and measure crystal round fringes speed and find effect of defect in real time.
The beneficial effects of the utility model are, its integration line scan-type of industrial photography machine, optics are several
The convex lens of He Xue, speculum and illuminate geometric dark field, have lifting and measure wafer limit
Effect of edge speed and in real time discovery defect.
Accompanying drawing explanation
With embodiment, the utility model is further illustrated below in conjunction with the accompanying drawings.
Fig. 1 is the schematic diagram of the utility model linear scan crystal round fringes.
Fig. 2 is the schematic diagram that the utility model measures defects of wafer edge.
Label declaration in figure:
10 line scan cameras
20 convex lens groups
30 speculum groups
31 first speculums
32 second speculums
33 reflectings surface
40 light source component groups
41 first light source assemblies
42 secondary light source assemblies
50 screens
60 defect dipoles unit
D defect
E crystal round fringes
E1Ramp edge
E2Middle end margin
E3Lower inclined plane edge
F dark field
P pixel
P1Low gray value region
P2High gray value region
θ1Reflection angle
θ2Light source angle
Detailed description of the invention
First, referring to shown in Fig. 1, crystal round fringes of the present utility model measures module preferred embodiment
Include: at least one line scan camera 10, be erected at the book office of crystal round fringes (E), use
The linear scan technique of industrial photography machine, can will be incident upon the image on sensing component through camera lens,
Can quickly scan this crystal round fringes (E), but be not limited to this.
At least one convex lens group 20, is positioned at the front of this line scan camera 10, makes this linearly sweep
Retouch video camera 10 through after this convex lens group 20, the middle end margin (E to this crystal round fringes (E)2) enter
Line linearity scans, but is not limited to this.
At least one speculum group 30, close to this crystal round fringes (E), and it is by first and second reflection
Mirror 31,32 is constituted, and makes reflecting surface 33 forward, again this first and second speculum 31,32 with
This line scan camera 10 is central reference, symmetrically shape and make both sides turn forward, make this line
Property smear camera 10 through the reflecting surface 33 of this first and second speculum 31,33 after, then distinguish
Ramp edge (E to this crystal round fringes (E)1) and lower inclined plane edge (E3) carry out linear scan, this
In embodiment, this first and second speculum 31,32 presents non-180 ° of parallel reflection angle (θ1),
And make this reflection angle (θ1) between 60 °～160 °, but it is not limited to this.
At least three light source component group 40, its light source is projected to this wafer limit of wanted linear scan respectively
Ramp edge (the E of edge1), middle end margin (E2) and lower inclined plane edge (E3Pixel on), with respectively
Form different dark field (F), make whole pixels (P) of this crystal round fringes (E) present low gray value district
Territory (P1), when the partial pixel (P) of this line scan camera 10 this crystal round fringes of linear scan (E)
Present high gray value region (P2) time, then measure this high gray value region (P2) it is this crystal round fringes
(E) defect (D), in the present embodiment, this light source component group 40 is by first and second light source assembly
41,42 are constituted, and it is close to this crystal round fringes (E), and makes light source projects forward, and this first and
Secondary light source assembly 41,42 with this line scan camera 10 as central reference, symmetrically shape and make
Both sides turn forward, and make this first and second light source assembly 41,42 present non-180 ° of parallel light sources
Angle (θ2), and make this light source angle (θ2) between 60 °～160 °.
Additionally, also include the hardware unit of a screen 50, observe the defect (D) of this crystal round fringes (E),
Or more can include the software service of a defect dipoles unit 60, lacking of this crystal round fringes of automatic decision (E)
Fall into (D), be analyzed, distinguishing image differentiation, but be not limited to this.
Taking off technological means on by, the utility model effectively integrates the fast of this line scan camera 10
Speed scanning, this convex lens group 20, the mirror body of speculum group 30 and the dark field light of this light source component group 40
Source, not only promotes and measures this crystal round fringes (E) speed and find this defect (D) in real time, meanwhile, and can
Coordinate hardware unit or software service, promote defect (D) discrimination power of this crystal round fringes (E), the most just
Really judge this defect (D) kind, and carry out different disposal according to different defects (D), reach human cost
And the optimization of equipment cost.
The above, be only preferred embodiment of the present utility model, not to the utility model
Make any pro forma restriction, every according to technical spirit of the present utility model to above example institute
Any simple modification, equivalent variations and the modification made, all still falls within technical solutions of the utility model
In the range of.
In sum, the utility model designs in structure, uses in practicality and cost benefit, complete
Structure needed for entirely meeting industry development and disclosed is also to have unprecedented innovative structure,
There is novelty, creativeness, practicality, meet the regulation about new patent important document, therefore in accordance with the law
Mention application.
Claims (5)
1. a crystal round fringes measures module, it is characterised in that including:
At least one line scan camera, is erected at the book office of crystal round fringes；
At least one convex lens group, is positioned at the front of this line scan camera, makes this linear scan take the photograph
After shadow machine passes through this convex lens group, the middle end margin of this crystal round fringes is carried out linear scan；
At least one speculum group, close to this crystal round fringes, and it is by first and second speculum institute
Constituting, and make reflecting surface forward, this first and second speculum with this line scan camera is again
Central reference, symmetrically shape and make both sides turn forward, make this line scan camera through this
One and second speculum reflecting surface after, then ramp edge and declivity to this crystal round fringes respectively
Edge, face carries out linear scan；And
At least three light source component group, its light source is projected to this crystal round fringes of wanted linear scan respectively
Ramp edge, middle end margin and lower inclined plane edge on pixel, to form different details in a play not acted out on stage, but told through dialogues respectively
Light source, makes whole pixels of this crystal round fringes present low gray value region, when this linear scan is photographed
When the partial pixel of machine this crystal round fringes of linear scan presents high gray value region, then measure this height
Gray value region is the defect (decfect) of this crystal round fringes.
Crystal round fringes the most according to claim 1 measures module, it is characterised in that described light source
Element group is made up of first and second light source assembly, and it is close to this crystal round fringes, and makes light source
Project forward, and this first and second light source assembly be with this line scan camera as central reference,
Symmetrically shape and make both sides turn forward, make this first and second light source assembly present non-180 ° parallel
Light source angle, and make this light source angle between 60 °～160 °.
Crystal round fringes the most according to claim 1 and 2 measures module, it is characterised in that described
First and second speculum presents non-180 ° of parallel reflection angles, and makes this reflection angle exist
Between 60 °～160 °.
Crystal round fringes the most according to claim 3 measures module, it is characterised in that also include one
Screen, observes the defect of this crystal round fringes.
Crystal round fringes the most according to claim 3 measures module, it is characterised in that also include one
Defect dipoles unit, the defect of this crystal round fringes of automatic decision.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620097686.5U CN205542718U (en) | 2016-02-01 | 2016-02-01 | Wafer edge module of measurationing |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620097686.5U CN205542718U (en) | 2016-02-01 | 2016-02-01 | Wafer edge module of measurationing |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205542718U true CN205542718U (en) | 2016-08-31 |
Family
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620097686.5U Expired - Fee Related CN205542718U (en) | 2016-02-01 | 2016-02-01 | Wafer edge module of measurationing |
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| Country | Link |
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| CN (1) | CN205542718U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107026095A (en) * | 2016-02-01 | 2017-08-08 | 易发精机股份有限公司 | Crystal round fringes measure module |
-
2016
- 2016-02-01 CN CN201620097686.5U patent/CN205542718U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107026095A (en) * | 2016-02-01 | 2017-08-08 | 易发精机股份有限公司 | Crystal round fringes measure module |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20160831 Termination date: 20190201 |