CN107024453A - A kind of quick humidity method for sensing based on graphene/graphene oxide laminated film - Google Patents
A kind of quick humidity method for sensing based on graphene/graphene oxide laminated film Download PDFInfo
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- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title claims abstract description 156
- 229910021389 graphene Inorganic materials 0.000 title claims abstract description 151
- 238000000034 method Methods 0.000 title claims abstract description 41
- 230000008859 change Effects 0.000 claims abstract description 33
- 230000010287 polarization Effects 0.000 claims abstract description 16
- 238000006243 chemical reaction Methods 0.000 claims abstract description 9
- 239000002131 composite material Substances 0.000 claims abstract description 6
- 230000005693 optoelectronics Effects 0.000 claims abstract description 6
- 239000010408 film Substances 0.000 claims description 76
- 239000000758 substrate Substances 0.000 claims description 18
- 239000012530 fluid Substances 0.000 claims description 10
- 230000003287 optical effect Effects 0.000 claims description 10
- 238000012545 processing Methods 0.000 claims description 9
- 229910002804 graphite Inorganic materials 0.000 claims description 8
- 239000010439 graphite Substances 0.000 claims description 8
- 150000001336 alkenes Chemical class 0.000 claims description 6
- 230000003647 oxidation Effects 0.000 claims description 6
- 238000007254 oxidation reaction Methods 0.000 claims description 6
- -1 graphite alkene Chemical class 0.000 claims description 5
- 230000008569 process Effects 0.000 claims description 4
- 238000010301 surface-oxidation reaction Methods 0.000 claims description 4
- 239000010409 thin film Substances 0.000 claims description 4
- 229910052760 oxygen Inorganic materials 0.000 claims description 3
- 239000001301 oxygen Substances 0.000 claims description 3
- 239000004575 stone Substances 0.000 claims description 3
- 238000010170 biological method Methods 0.000 claims description 2
- 238000001311 chemical methods and process Methods 0.000 claims description 2
- 238000000151 deposition Methods 0.000 claims description 2
- 239000007792 gaseous phase Substances 0.000 claims description 2
- 239000012528 membrane Substances 0.000 claims description 2
- 239000000126 substance Substances 0.000 claims description 2
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 claims 1
- 238000010521 absorption reaction Methods 0.000 abstract description 21
- 238000005259 measurement Methods 0.000 abstract description 10
- 239000000463 material Substances 0.000 abstract description 7
- 238000001514 detection method Methods 0.000 abstract description 6
- 230000004044 response Effects 0.000 abstract description 6
- 238000001179 sorption measurement Methods 0.000 abstract description 4
- 238000013473 artificial intelligence Methods 0.000 abstract description 2
- 239000010453 quartz Substances 0.000 description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 6
- 230000008878 coupling Effects 0.000 description 5
- 238000010168 coupling process Methods 0.000 description 5
- 238000005859 coupling reaction Methods 0.000 description 5
- 239000005357 flat glass Substances 0.000 description 5
- 239000000523 sample Substances 0.000 description 5
- 230000035945 sensitivity Effects 0.000 description 5
- 238000010276 construction Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 239000000835 fiber Substances 0.000 description 3
- 230000009467 reduction Effects 0.000 description 3
- 229920000936 Agarose Polymers 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 230000000644 propagated effect Effects 0.000 description 2
- 239000010421 standard material Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 238000003556 assay Methods 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 238000007385 chemical modification Methods 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 238000000407 epitaxy Methods 0.000 description 1
- 125000000524 functional group Chemical group 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 238000001448 refractive index detection Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 230000010148 water-pollination Effects 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
- G01N2021/4126—Index of thin films
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- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
A kind of quick method for sensing of humidity based on graphene/graphene oxide laminated film, the moisture that the graphene oxide film on laminated film upper strata is used in quick adsorption humidity environment to be measured, and the graphene layer of lower floor is then used for reflecting the Surface absorption ripple change of incident light.Graphene oxide causes the change of composite film material refractive index for the absorption of moisture, and the change of refractive index is then reflected by graphene for Surface absorption ripple quick response and change, and variations in refractive index is changed into voltage signal and is acquired by polarization spectro, opto-electronic conversion, caused by electrical signal collection changes humidity, and then realize real-time and quick measurement of the present invention for humidity.Using method of the invention, it is possible to carry out detection sensing to fast-changing humidity, there is potential application value in fields such as artificial intelligence.
Description
Technical field
The present invention relates to a kind of humidity sensor method based on graphene/graphene oxide laminated film, more particularly to one
The surface wave absorption techniques planted based on graphene/graphene oxide laminated film under reflection coupling structure is fast to be carried out to humidity
The method of speed detection and analysis, belongs to engineering technology, chemistry and Material Field.
Background technology
At present, the method for sensing humidity is mainly the purpose that sensing humidity is reached by measuring hygroscopic material resistance variations.
In order to reach higher sensitivity, hygroscopic material is generally block three-dimensional structure, its adsorb and exchanged water molecule need one compared with
Long time, therefore this sensor quick detection difficult to realize to humidity.
Graphene has shown excellent performance as a kind of two-dimensional material in terms of optics, electricity and chemistry：As thoroughly
Light rate reaches 97.7%, near fully transparent；Electron transport speed reaches the 1/300 of the light velocity;Thermal conductivity reaches 5000Wm-1·K-1;Specific surface area is up to 2630 m2/g.Graphene oxide（GO）As the most important derivative of graphene, graphite maintain
While alkene numerous characteristics, the abundant oxygen-containing functional group in its surface makes it possess good water-wet behavior, and what can be stablized is scattered
In the solution of the aqueous solution or organic solvent, with good hygroscopicity.Therefore, existed in the prior art based on oxidation stone
The light fibre humidity transducer of black alkene film（CN105259139A、CN205317655U）, it, which immerses optical fiber sensing structure, aoxidizes
In the dispersion liquid of graphene or graphene oxide and agarose mix, uniformly plated so as to the surface in fibre optical sensor
Graphene oxide film or graphene oxide/agarose laminated film, utilize the moisture expantion and drying of graphene oxide film
The characteristic being swelled, fiber bragg grating temperature sensor can be made in it.The measurement sensitivity of the sensor is relative to traditional sensing
Device is higher, but graphene film is after moisture is absorbed, and it needs to place in room temperature is spontaneously dried for 48 hours or so, to obtain
The graphene that is swelled is dried, and further interferes it peak intensity to determine to obtain the change curve of humidity, during measurement needed for it
Between it is long, still can not meet the purpose measured for humidity sensitive and quickly.
The applicant of this patent is in patent before（201611076871.7 ）Propose a kind of based on graphenic surface
The ultrafast refractive index detection device of high sensitivity and method of ripple, applicant have found by research, under reflection coupling structure, incident
A part of component of light field can be propagated to form surface wave along graphenic surface, and this surface wave is under particular graphite alkene thickness condition
Some tens of pm can even be propagated remote, i.e. graphenic surface ripple.Because graphene layer is very sensitive to the absorption of surface wave, refraction
The trickle change of rate will all cause graphene for Surface absorption ripple quick response and change, if it is possible to provide one kind
The quick method for changing measured medium refraction index changing, can make the refractive index of measured medium that small change occur in moment,
So that absorption of the graphene to surface wave changes, and then intensity of reflected light is caused to occur respective change, thus just can be with
Realize the high sensitivity of measuring targets refractive index and quick measurement.
In view of the two-dimensional structure of graphene oxide can effectively reduce the time of Water Molecular Adsorption exchange, if further knot
The sensitive refractive index sensing ability that graphenic surface ripple absorption techniques is brought is closed, then can realize quick Humidity Detection.This
There is potential application value in the fields such as artificial intelligence, engineering technology.
The content of the invention
The problem of can not realizing the quick of humidity, sensitive measurement for presence in the prior art, the invention provides one kind
Surface wave absorption techniques based on graphene/graphene oxide laminated film under reflection coupling structure is quick to be carried out to humidity
The method of detection and analysis.Chemical modification is carried out by the surface to graphene film to be combined to form graphene oxide/graphene
Film, the laminated film is provided simultaneously with the graphene oxide adsorptivity good to hydrone and graphene for Surface absorption ripple
Quick response and variation characteristic, thus absorption exchange velocity of the laminated film surface to hydrone can be improved, and strengthen its folding
Rate sensing sensitivity is penetrated, so as to realize that humidity is quick, sensitively measure.
To achieve the above object, the present invention takes following technical scheme：
A kind of humidity sensor method based on graphene/graphene oxide laminated film, methods described includes,
1）The humidity sensor based on graphene/graphene oxide laminated film is prepared, wherein the humidity sensor is from lower
On be followed successively by couple prism, transparent substrates, the graphene film for being bound to substrate surface and the oxidation positioned at graphene membrane surface
Graphene film；The moisture that its graphene oxide film at the middle and upper levels is used in quick adsorption humidity environment to be measured, and the stone of lower floor
Black alkene layer is then used for reflecting the Surface absorption ripple change of incident light, and this is due to that this complex thin film structure could be while realize pair
Absorption in moisture and the absorption for surface wave, and then realize the moisture measurement based on refractive index；
2）Optical system is built：Irradiate and pass sequentially through the couple prism and transparent substrates of humidity sensor using light beam, and
Search coverage is formed on graphene/graphene oxide laminated film, then by the light beam of reflection through sequentially passing through polarization spectro,
Opto-electronic conversion and voltage signal collection device, are changed into voltage signal by the reflected light signal for carrying refractive index information and enter
Row storage；
3）By the graphene/graphene oxide laminated film surface exposure of humidity sensor in measuring moisture atmosphere is treated, to voltage
Signal proceeds collection, so as to obtain humidity collection result.When humidity sensor is placed in humidity atmosphere, sensor surface
Graphene oxide film can be adsorbed due to its hydrophily to the moisture of environment, with surface of graphene oxide absorb and
The increase of moisture build op, its refractive index can constantly change, and the trickle change of these refractive indexes can all pass through graphene
Reflected for Surface absorption ripple quick response and change, and by polarization spectro, opto-electronic conversion, electrical signal collection by humidity
Variations in refractive index is changed into voltage signal and is acquired caused by change, then corresponding to voltage signal by standard humidity instrument
Humidity is demarcated in advance, and the real-time number of humidity just can be obtained after the voltage signal of collection and humidity value are carried out into alignment processing
Value or humidity change with time result.
Preferably, the step 1）The step of humidity sensor for preparing graphene/graphene oxide laminated film, enters one
Step includes：a）Prepare graphene-based bottom：Graphene is directly prepared or is transferred in transparent substrates；b）Prepare graphene/oxidation
Graphene composite film substrate：Surface oxidation treatment is carried out to the graphene film in substrate, with the surface of graphene film
One layer of graphene oxide film is formed, so as to form graphene/graphene oxide laminated film；c）Will by index-matching fluid
Transparent substrates are further fitted with prism.
Preferably, described step 1）The step of humidity sensor for preparing graphene/graphene oxide laminated film, enters
One step includes：a）Prepare graphene-based bottom：Graphene is directly prepared or is transferred to prism；b）Prepare graphene/graphite oxide
Alkene laminated film substrate：Surface oxidation treatment is carried out to the graphene film on prism, formed with the surface in graphene film
One layer of graphene oxide film, so as to form graphene/graphene oxide laminated film.
Preferably, the step 3）Step 4 is still further comprised afterwards）, by standard humidity instrument to voltage signal correspondence
Humidity demarcated in advance, by the voltage signal of collection and humidity value obtained after alignment processing humidity real time value or
Humidity changes with time result.
Preferably, the described graphene film can be chemical gaseous phase depositing process or mechanical stripping method or molecule
Prepared by beam epitaxy method, or prepared by oxide-reduction method.
Preferably, above-mentioned graphene oxide film can be by physics, chemistry or biological method processing with thin in graphene
Film surface forms hydrophilic radical.
Preferably, the light beam can be provided by probe source device, and the light beam can be circularly polarized light, unpolarized
Light, linear polarization or elliptically polarized light.
Preferably, the probe source device further comprises laser, collimater, polarizer and 1/2 wave plate.
Preferably, described couple prism is D-shaped prism, Dove prism or Tp.
Preferably, the light splitting device is polarizer, polarization splitting prism or polarization extractor.
Preferably, the photoelectric conversion device is photodetector, and it is used to receive polarized light component light beam, and will receive
To luminous intensity be converted to magnitude of voltage.
Preferably, described voltage collecting device includes acquisition chip and computer, the electricity of collection photodetector output
Pressure value, and processing is calculated by computer and shown.
The beneficial effects of the invention are as follows：
（1）The defect of fast speed real-time measurement can not be realized relative to the humidity sensor based on graphene oxide in the prior art,
Absorption and graphene of the invention due in combination with graphene oxide to moisture is led to for the advantage of the absorption of surface wave
Cross using this special sensor construction of graphene/graphene oxide laminated film, its graphene oxide film at the middle and upper levels
For the moisture in quick adsorption humidity environment to be measured, and the graphene layer of lower floor is then used for reflecting the Surface absorption ripple of incident light
Change.Graphene oxide causes the change of composite film material refractive index for the absorption of moisture, and the change of refractive index is then led to
Cross graphene to reflect for Surface absorption ripple quick response and change, and received by polarization spectro, opto-electronic conversion, electric signal
Variations in refractive index is changed into voltage signal and is acquired caused by collection changes humidity, and then realizes the present invention for humidity
Measure in real time and quickly.
（2）Because graphene oxide constantly can absorb to the moisture of environment, therefore the change of its humidity
It is a process being continually changing, the real-time change of this refractive index of this patent can also be by graphene for Surface absorption ripple
Quick response and change are reflected, and are collected humidity change by polarization spectro, opto-electronic conversion, electrical signal collection,
So as to the whole change procedure of reaction humidity, and sensitively detect the faint change of humidity during this.
（3）Humidity sensor prepared by the present invention, measurement is directly controlled using computer, simple to operate, easily miniaturization collection
The Humidity Detection of small size, multichannel is realized into array.
Brief description of the drawings
Fig. 1 is that the surface on schematic diagram of the invention, graphene/graphene oxide laminated film sample is graphite oxide
Alkene, is modified with hydrophilic radical thereon, when its it is exposed in humidity atmosphere when, different humidity influence graphene/graphene oxide answer
Change of the film under catoptric arrangement to different polarization light absorbs is closed, can further obtain wet by the change for detecting reflected light
Spend information.
Fig. 2 is the moisture signal that sensor is obtained when humidity atmosphere is changed with 60Hz frequency.
Embodiment
The present invention is described in detail with reference to the accompanying drawings and examples.Embodiment gives detailed embodiment party
Formula and specific operating process, but the present invention is not limited to following examples.
Embodiment 1
It is used to detect that the humidity that frequency is 60Hz changes using graphene/graphene oxide complex thin film structure, including following step
Suddenly：
1）The humidity sensor based on graphene/graphene oxide laminated film is prepared, first by thermal reduction method by graphite
Alkene film combination with oxidizing method to so as to form thermal reduction graphene film/glass structure, then being existed in substrate of glass
Thermal reduction graphene film surface forms one layer of graphene oxide film and then forms graphene oxide/graphene/glass structure,
Sheet glass is attached at prism surface finally by index-matching fluid, the one side that wherein sheet glass does not have graphene passes through refraction
Rate matching fluid is contacted with prism, and the refractive index of prism, index-matching fluid and sheet glass should be close, the humidity sensor needed for being formed
Device, its concrete structure is as shown in Figure 1；
2）Optical system is built：Using laser（Wavelength 633nm）Light beam is radiated at coupling by forming circularly polarized light, light beam after wave plate
Close on prism, index-matching fluid, sheet glass and graphene oxide/graphene composite film and form search coverage, Ran Houli
With polarizing beam splitter by the beam splitter of reflection, the two kinds of polarised lights separated（P-polarization light and s polarised lights）Balance is radiated at respectively
On two probes of detector, balanced detector is controlled to adopt the voltage signal of s polarizations and p-polarization using acquisition chip
Collection；
Wherein optical system build be it is known in the art, its exemplary device referring to this patent inventor in
A kind of refractive index real-time assay and device based on graphene polarization effect disclosed in CN102692393A, herein by it
The exemplary reference as this patent optical system is introduced, but it not constitutes the restriction to this patent optical system, ability
The technical staff in domain will be understood that all building for the optical system that can realize this patent purpose can be included in this patent
Within the scope of the optical system used.
3）Adjustment detects the attenuator before it so that output signal of the balanced detector when not carrying out moisture measurement
It is zero, i.e., the standard material of refractive index is used as using air；
4）By the graphene/graphene oxide laminated film surface exposure of humidity sensor in measuring moisture atmosphere is treated, and pass through
Balanced detector constantly collects the change of output voltage signal.Due to the presence of graphene oxide film, it is placed in humidity atmosphere
Sensor start progressively to absorb the moisture of surrounding, and cause being continually changing for base material refractive index, pass through lower layer graphene
Sensitive refractive index that film absorbs to surface wave relies on effect, the change for the voltage signal that the real-time change of the refractive index passes through polarised light
Change is reflected.
5）Finally, the corresponding humidity of voltage signal is demarcated in advance by standard humidity instrument, the voltage of collection is believed
Number carry out obtaining humidity after alignment processing with humidity value changing with time result（Fig. 2）.
Embodiment 2
It is used to detect that the humidity that frequency is 80Hz changes using graphene/graphene oxide complex thin film structure, including following step
Suddenly：
1）The humidity sensor based on graphene/graphene oxide laminated film is prepared, first will by chemical vapour deposition technique
Graphene film is attached in quartz substrate to form graphene film/quartz construction, then with Ozone oxidation method in graphite
Alkene film surface one layer of graphene oxide film of formation and then formation graphene oxide/graphene/quartz construction, finally by folding
Penetrate rate matching fluid and quartz plate be attached at prism surface, wherein quartz plate do not have the one side of graphene by index-matching fluid with
Prism is contacted, and the refractive index of prism, index-matching fluid and sheet glass should be close, the humidity sensor needed for being formed；
2）Optical system is built：Using laser（Wavelength 670nm）Light beam is radiated at coupling by forming non-polarized light, light beam after wave plate
Close on prism, index-matching fluid, quartz plate and graphene oxide/graphene composite film and form search coverage, Ran Houli
With polarizing beam splitter by the beam splitter of reflection, the two kinds of polarised lights separated（P-polarization light and s polarised lights）Balance is radiated at respectively
On two probes of detector, balanced detector is controlled to adopt the voltage signal of s polarizations and p-polarization using acquisition chip
Collection；
3）Adjustment detects the attenuator before it so that output signal of the balanced detector when not carrying out moisture measurement is zero,
The standard material of refractive index is used as using air；
4）By the graphene/graphene oxide laminated film surface exposure of humidity sensor in measuring moisture atmosphere is treated, and pass through
Balanced detector constantly collects the change of output voltage signal.
5）Finally, the corresponding humidity of voltage signal is demarcated in advance by standard humidity instrument, the voltage of collection is believed
Number carry out obtaining the real time value of humidity after alignment processing with humidity value.
Claims (10)
1. a kind of quick humidity method for sensing based on graphene/graphene oxide laminated film, methods described includes,
1）The humidity sensor based on graphene/graphene oxide laminated film is prepared, wherein the humidity sensor is from lower
On be followed successively by couple prism, transparent substrates, the graphene film for being bound to substrate surface and the oxidation positioned at graphene membrane surface
Graphene film；
2）Optical system is built：Irradiate and pass sequentially through the couple prism and transparent substrates of humidity sensor using light beam, and
Search coverage is formed on graphene/graphene oxide laminated film, then by the light beam of reflection through sequentially passing through polarization spectro,
Opto-electronic conversion and voltage signal collection device, are changed into voltage signal by the reflected light signal for carrying refractive index information and enter
Row storage；
3）By the graphene/graphene oxide laminated film surface exposure of humidity sensor in measuring moisture atmosphere is treated, to voltage
Signal proceeds collection, so as to obtain humidity collection result.
2. quick humidity method for sensing according to claim 1, it is characterised in that the step 1）Prepare graphene/oxygen
The step of humidity sensor of graphite alkene laminated film, further comprises：a）Prepare graphene-based bottom：Graphene is directly made
It is standby or be transferred in transparent substrates；b）Prepare graphene/graphene oxide laminated film substrate：To the graphene film in substrate
Surface oxidation treatment is carried out, to form one layer of graphene oxide film on the surface of graphene film, so as to form graphene/oxygen
Graphite alkene laminated film；c）Transparent substrates are further fitted with prism by index-matching fluid.
3. quick humidity method for sensing according to claim 1, it is characterised in that described step 1）Prepare graphene/
The step of humidity sensor of graphene composite thin film, further comprises：a）Prepare graphene-based bottom：Graphene is direct
Prepare or be transferred to prism；b）Prepare graphene/graphene oxide laminated film substrate：Graphene film on prism is carried out
Surface oxidation treatment, to form one layer of graphene oxide film on the surface of graphene film, so as to form graphene/oxidation stone
Black alkene laminated film.
4. according to any described quick humidity method for sensing of claim 1-3, it is characterised in that the step 3）Also enter afterwards
One step includes step 4）, the corresponding humidity of voltage signal is demarcated in advance by standard humidity instrument, the voltage of collection is believed
Number real time value or humidity that obtained after alignment processing humidity with humidity value change with time result.
5. according to any described quick humidity method for sensing of claim 1-4, it is characterised in that described graphene can be
Prepared by chemical gaseous phase depositing process or mechanical stripping method or molecular beam epitaxial method, or prepared by oxide-reduction method.
6. according to any described quick humidity method for sensing of claim 1-4, it is characterised in that above-mentioned graphene oxide film
Hydrophilic radical can be formed on graphene film surface by physics, chemistry or biological method processing.
7. according to any described quick humidity method for sensing of claim 1-4, it is characterised in that the light beam can be by detecting
Light supply apparatus is provided, and the light beam can be circularly polarized light, non-polarized light, linear polarization or elliptically polarized light.
8. according to any described quick humidity method for sensing of claim 1-4, it is characterised in that the light splitting device is
Polarizer, polarization splitting prism or polarization extractor.
9. according to any described quick humidity method for sensing of claim 1-4, it is characterised in that the photoelectric conversion device is
Photodetector, it is used to receive polarized light component light beam, and the luminous intensity received is converted into magnitude of voltage.
10. according to any described quick humidity method for sensing of claim 1-4, it is characterised in that described voltage acquisition dress
Put including acquisition chip and computer, the magnitude of voltage of collection photodetector output, and processing is calculated by computer and shown.
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108358198A (en) * | 2018-03-07 | 2018-08-03 | 中国工程物理研究院化工材料研究所 | Multiple environment response driving graphene oxide film, preparation method and application |
| CN109596569A (en) * | 2018-12-20 | 2019-04-09 | 南开大学 | A kind of low concentration glucose detection chip and preparation method thereof |
| CN110487729A (en) * | 2019-08-12 | 2019-11-22 | 温州大学 | The highly sensitive periodical sensor-based system of inclined optical fiber grating sensor is integrated based on graphene |
| CN111948423A (en) * | 2020-08-24 | 2020-11-17 | 山东理工大学 | Graphene-based flow velocity sensor optical chip and application thereof |
| CN112557336A (en) * | 2020-12-10 | 2021-03-26 | 中电保力（北京）科技有限公司 | Method for measuring humidity of cable by using double-path infrared spectrum analysis method |
| CN114174807A (en) * | 2019-07-26 | 2022-03-11 | 3M创新有限公司 | Porous fluid sensor |
| CN115005804A (en) * | 2022-06-06 | 2022-09-06 | 华东师范大学 | Breathing monitoring device of flexible all-carbon-based humidity sensor |
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