CN107024274A - A kind of analyzing method suitable for light orientation equipment - Google Patents
A kind of analyzing method suitable for light orientation equipment Download PDFInfo
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- CN107024274A CN107024274A CN201610067096.2A CN201610067096A CN107024274A CN 107024274 A CN107024274 A CN 107024274A CN 201610067096 A CN201610067096 A CN 201610067096A CN 107024274 A CN107024274 A CN 107024274A
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J4/00—Measuring polarisation of light
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Abstract
The present invention provides a kind of analyzing method suitable for light orientation equipment, it will carry out carrying out after primary detection extinction ratio and polarization direction, rechecked, 45 ° are rotated in the polarization direction of primary detection, sliding window value is carried out in its vicinity, and is carried out curve fitting, until finding out the change with angle, the light intensity angle maximum relative to the slope variation of angle, then it is accurate polarization direction to compensate after 45 °.This detection method, after primary detection is carried out, with regard to carrying out repetition test without finding multiple sampled points again, but the mode of computer curve fitting is used, measuring method is simplified, while carrying out sliding window value, slope calculating is carried out in the central point of each window, find out the angle corresponding to the maximum point of slope variation, this sliding window value can improving measurement accuracy, weaken influence of the interference to measurement of noise.
Description
Technical field
The present invention relates to semiconductor applications, more particularly to a kind of analyzing suitable for light orientation equipment
Method.
Background technology
Using the alignment film or both alignment layers on the ultraviolet source irradiation substrate of linear polarization (hereinafter referred to as
" light alignment film ") realize light alignment technique is referred to as to the technology of liquid crystal alignment.The technology
Due to it is contactless, without electrostatic pollution, without dust pollution, orientation effect it is good, suitable for advanced lines
Just progressively substitution friction matching technology turns into liquid crystal panel allocating process to many advantages such as producing line
Mainstream technology.
High orientation quality is obtained in light allocating process, it is desirable at light alignment film surface
The extinction ratio of linearly polarized light is higher and polarization direction (namely polarization angle) uniformity is high,
This requires that the measurement of high-precision extinction ratio and polarization direction can be carried out, so as to high-precision
Extinction ratio and polarization direction at the regulation light alignment film surface of degree.The master of current measurement polarised light
It is the Stokes vectors of measurement polarised light to want technology, in the higher linear polarization of measurement extinction ratio
Light time, the error by Stokes Vector operation polarised light extinction ratios is larger.Meanwhile, Stokes
The e measurement technology of vector is frequently with the optical element sensitive to incident angle such as wave plate, and this is allowed for
Its corresponding measurement apparatus be difficult to use in light orientation equipment the polarization extinction ratio of linearly polarized light and
The high-acruracy survey of polarization direction.
Polarization extinction ratio and the polarization direction of linearly polarized light are currently measured in the light orientation equipment
Main Means are rotatory polarization piece.In Chinese patent CN103575400A (application numbers：
CN201310303088.X, publication date：On 2 12nd, 2014) disclosed in technology, partially
Shake direction measurement by the way that the obtained crest of measurement or trough curve are fitted and obtained.
But found by studying, the luminous power at crest or wave trough position is slow with angle change,
The presence of noise causes signal to be difficult to accurate measurement, and due to the presence of noise so that measure
The fluctuation of many burrs is produced on signal curve, this just generates larger shadow to measurement accuracy
Ring.
It is therefore desirable to invent a kind of polarization extinction ratio suitable for light orientation equipment and polarization side
To measuring method, it is readily able to obtain high measurement accuracy, low is required to power meter measurement accuracy,
And influence of the interference of noise to measurement is smaller.
The content of the invention
To solve the above problems, the present invention proposes a kind of analyzing side suitable for light orientation equipment
Method, after carrying out carrying out primary detection to extinction ratio and polarization direction, is rechecked, first
The polarization direction of detection rotates 45 °, and sliding window value, and march are carried out in its vicinity
Line is fitted, until finding out the change with angle, light intensity is maximum relative to the slope variation of angle
Angle, then subtract after 45 ° be accurate polarization direction.
To reach above-mentioned purpose, the present invention provides a kind of analyzing method suitable for light orientation equipment,
Comprise the following steps：
Step one：Polarizer is placed in the light path for treating light-metering, polarizer rotates around rotary shaft
One week, measured by power meter when polarizer rotates a circle, the work(after light-metering passes through polarizer
Rate change curve；
Step 2：The changed power curve obtained to step one carries out computer fitting, obtains phase
After the fitting parameter answered, calculating obtains polarization extinction ratio and the first measured value of polarization direction；
Step 3：The first measured value of polarization direction is rechecked, with obtained polarization direction preliminary survey
Value is rotated as reverification test point after 45 °, in reverification test point position d θ as starting point
In the range of with step angle Δ θ2Rotate and record the light intensity under corresponding corner, form stepping and obtain
Angle and light intensity between graph of relation, in the range of reverification test point position d θ carry out
Sliding window value is right by the central point of each sliding window and its on the graph of relation
The slope value answered is fabricated to slope distribution figure；
Step 4：The slope distribution figure of step 3 formation is carried out curve fitting, fitting is formed bent
Line, then the extreme value of matched curve is that polarization direction rotates the angle value after 45 °, then polarization side
Angle value on to the corresponding angle compensation of as extreme value after 45 °.
Preferably, also increasing step 2 11 between step 2 and step 3：By step one with
Step 2 repeated several times, by the polarization extinction ratio measured every time and the first measured value of polarization direction point
Do not average, obtain the average value of polarization extinction ratio and the preliminary survey average value of polarization direction, walk
The preliminary survey average value of polarization direction is regard as starting point in rapid three.
Preferably, also including step 5：, will be every by step one to step 4 repeated several times
The secondary polarization direction measured is averaged, as the final average value of polarization direction.
Preferably, polarizer rotates a circle at the uniform velocity to rotate around rotary shaft in step one.
Preferably, the power in step one in changed power curve
Wherein a0、a1、a2All it is fitting parameter, θ is polarizer
The angle rotated around rotary shaft.
Preferably, the polarization that computer fitting is obtained is carried out in step 2 to changed power curve
Extinction ratio PER=(a0+v)/(a0- v), wherein v be intermediate parameters and
Preferably, carrying out computer fitting to changed power curve in step 2 obtains polarization side
To first measured value
Preferably, step 3 carries out more than five times cunnings in the range of reverification test point position d θ
Dynamic window value.
Preferably, d θ≤20 ° in step 3, Δ θ2≤ 0.05 °, the width Delta θ of sliding window3
≤0.5°。
Compared with prior art, the beneficial effects of the invention are as follows：
The present invention provides a kind of analyzing method suitable for light orientation equipment, comprises the following steps：
Step one：Polarizer is placed in the light path for treating light-metering, polarizer rotates around rotary shaft
One week, measured by power meter when polarizer rotates a circle, the work(after light-metering passes through polarizer
Rate change curve；
Step 2：The changed power curve obtained to step one carries out computer fitting, obtains phase
After the fitting parameter answered, calculating obtains polarization extinction ratio and the first measured value of polarization direction；
Step 3：The first measured value of polarization direction is rechecked, with obtained polarization direction preliminary survey
Value is rotated as reverification test point after 45 °, in reverification test point position d θ as starting point
In the range of with step angle Δ θ2Rotate and record the light intensity under corresponding corner, form stepping and obtain
Angle and light intensity between graph of relation, in the range of reverification test point position d θ carry out
Sliding window value is right by the central point of each sliding window and its on the graph of relation
The slope value answered is fabricated to slope distribution figure；
Step 4：The slope distribution figure of step 3 formation is carried out curve fitting, fitting is formed bent
Line, then the minimum of matched curve is that polarization direction rotates the angle value after 45 °, then polarizes
Direction is that the corresponding angle of minimum subtracts the angle value after 45 °.
The present invention will be rechecked after carrying out carrying out primary detection to extinction ratio and polarization direction,
45 ° are rotated in the polarization direction of primary detection, sliding window value is carried out in its vicinity, and
Carry out curve fitting, until finding out the change with angle, light intensity becomes relative to the slope of angle
Change maximum angle, then it is accurate polarization direction to compensate after 45 °.This detection method,
After primary detection is carried out, with regard to carrying out repetition test without finding multiple sampled points again, but make
With the mode of computer curve fitting, measuring method is simplified, while sliding window value is carried out,
Slope calculating is carried out in the central point of each window, is found out corresponding to the maximum point of slope variation
Angle, this sliding window value can improving measurement accuracy, weaken the interference of noise to surveying
The influence of amount.
Brief description of the drawings
Calibrator structural representation used in the analyzing method that Fig. 1 provides for the present invention；
The analyzing method flow diagram that Fig. 2 provides for the present invention；
Fig. 3 rotates a circle the power curve measured for the polarizer that provides of the present invention；
The central point and its Slope relationship figure for the sliding window that Fig. 4 provides for the present invention；
The matched curve that Fig. 5 obtains for the slope of curve value fitting that the present invention is provided.
In figure：1- polarizers, 11- rotary shafts, 2- power meters.
Embodiment
In order to facilitate the understanding of the purposes, features and advantages of the present invention, tie below
Accompanying drawing is closed to be described in detail the embodiment of the present invention.
Fig. 1 is refer to, the analyzing method suitable for light orientation equipment that the present invention is provided is used
Calibrator include
One polarizer 1, polarizer 1 has central shaft, that is, rotary shaft 11, polarizer 1
Rotary shaft 11 around itself rotates；
One power meter 2, it is centrally located on the extended line of rotary shaft 11, is passed through for measuring
The power of light after polarizer 1；
One control system (not shown), is connected with polarizer 1 and all circuits of power meter 2, uses
In control polarizer 1 rotation and calculate light extraction through the polarization extinction ratio after polarizer 1 and partially
Shake direction.
It refer to Fig. 2, the analyzing method suitable for light orientation equipment that the present invention is provided, including
Following steps：
Step one：Fig. 1 is refer to, polarizer 1 is placed in the light path for treating light-metering, is polarized
Piece 1 at the uniform velocity rotates a circle around rotary shaft 11, and its step angle is Δ θ1, measured by power meter 2
When polarizer 1 rotates a circle, the changed power curve after light-metering passes through polarizer is obtained
Changed power curve in Fig. 3, Fig. 3 meets following formula：
Wherein P is power, and it correspond in Fig. 3, and often rotation obtains an angle, θ, the light letter measured
Number, a0、a1、a2All it is fitting parameter, meanwhile, derivation is carried out to the power curve, obtained
Curve where dotted line.
Step 2：In the power curve that step one is obtained, optical signal angle corresponding when being 0
The as first measured value of polarization direction, its specific calculation formula isWherein α is
The first measured value of polarization direction, v be intermediate parameters andIt can additionally be polarized
Extinction ratio PER=(a0+v)/(a0- v), to step one to step 2 repeated several times, it will survey every time
The polarization extinction ratio and the first measured value of polarization direction obtained is averaged respectively, obtains polarization extinction ratio
Average value and polarization direction preliminary survey average value.
Due to the interference of noise, refer to has many burrs in Fig. 3, record power curve,
Therefore there are many small fluctuations for the vicinity of 0 point in optical signal, causes to occur more
Its corresponding optical signal of angle value is all 0, it is therefore desirable to which the above results are rechecked.
Step 3：The preliminary survey average value of polarization direction is rechecked, it is flat with polarization direction preliminary survey
Average is rotated 45 ° of (can be+45 degree or -45 degree) conducts afterwards as starting point
Reverification test point, is illustrated exemplified by rotating+45 degree, refer to Fig. 3, namely power song
It is the intersection point of the straight line where 0 with optical signal after line derivation, as reverification test point,
With step angle Δ θ in the range of reverification test point position d θ2Rotate and record under corresponding corner
More than five times sliding window values are carried out in the range of light intensity, reverification test point position d θ, wherein
The width of sliding window is Δ θ3, obtain the relation curve between corresponding sliding window and light intensity
(not shown), records the central point and corresponding slope value of each sliding window on the figure,
It is mobile sliding window every time to be fabricated to abscissa in slope distribution figure as shown in Figure 4, Fig. 4
When step value, ordinate is the corresponding slope of each sliding window central point of correspondence, wherein Δ θ2
Much smaller than Δ θ1；
Step 4：The slope distribution figure of step 3 formation is carried out curve fitting, fitting is formed bent
Line, as shown in figure 5, Fig. 5 is to carry out derivation to Fig. 4 curve, then Fig. 5 curves are most
Low spot namely minimum are that polarization direction rotates the angle value after+45 °, then polarization direction is
The corresponding angle of minimum subtracts the angle value after 45 °, accordingly, the peak of curve namely
Maximum is that polarization direction rotates the angle value after -45 °, then polarization direction is maximum pair
The angle answered adds the angle value after 45 °.
Step 5：By step one to step 4 repeated several times, the angle value measured every time is taken
The final average value of average value, as polarization direction.
D θ≤20 ° in step 3, Δ θ2≤ 0.05 °, the width Delta θ of sliding window3≤ 0.5 °, lead to
Cross experiment to find, d θ=20 °, Δ θ in step 32=0.05 °, the width Delta θ of sliding window3=0.5 °
When, step one to step 4 is repeated ten times, the final average value of the polarization direction finally measured
And the deviation of actual value only has 0.003 °, therefore uses this analyzing method, the precision of measurement
Significantly lifted.
Above-described embodiment is described the present invention, but the present invention is not limited only to above-described embodiment,
Obvious those skilled in the art can carry out various changes and modification without departing from this to invention
The spirit and scope of invention.So, if these modifications and variations of the present invention belong to the present invention
Within the scope of claim and its equivalent technologies, then the present invention be also intended to include these change and
Including modification.
Claims (9)
1. a kind of analyzing method of Calibrator suitable for light orientation equipment, it is characterised in that
Comprise the following steps：
Step one：Polarizer is placed in the light path for treating light-metering, polarizer rotates around rotary shaft
One week, measured by power meter when polarizer rotates a circle, the work(after light-metering passes through polarizer
Rate change curve；
Step 2：The changed power curve obtained to step one carries out computer fitting, obtains phase
After the fitting parameter answered, calculating obtains polarization extinction ratio and the first measured value of polarization direction；
Step 3：The first measured value of polarization direction is rechecked, with obtained polarization direction preliminary survey
Value is rotated as reverification test point after 45 °, in reverification test point position d θ as starting point
In the range of with step angle Δ θ2Rotate and record the light intensity under corresponding corner, form stepping and obtain
Angle and light intensity between graph of relation, in the range of reverification test point position d θ carry out
Sliding window value is right by the central point of each sliding window and its on the graph of relation
The slope value answered is fabricated to slope distribution figure；
Step 4：The slope distribution figure of step 3 formation is carried out curve fitting, fitting is formed bent
Line, then the extreme value of matched curve is that polarization direction rotates the angle value after 45 °, then polarization side
Angle value on to the corresponding angle compensation of as extreme value after 45 °.
2. analyzing method as claimed in claim 1, it is characterised in that step 2 and step 3
Between also increase step 2 11：By step one and step 2 repeated several times, it will measure every time
Polarization extinction ratio and the first measured value of polarization direction average respectively, obtain polarization extinction ratio
By the preliminary survey average value of polarization direction in average value and the preliminary survey average value of polarization direction, step 3
It is used as starting point.
3. analyzing method as claimed in claim 1, it is characterised in that also including step 5：
By step one to step 4 repeated several times, the polarization direction measured every time is averaged, i.e.,
For the final average value of polarization direction.
4. analyzing method as claimed in claim 1, it is characterised in that polarizer in step one
Rotate a circle at the uniform velocity to rotate around rotary shaft.
5. analyzing method as claimed in claim 1, it is characterised in that power becomes in step one
Change the power in curveWherein a0、a1、a2All it is fitting ginseng
Number, θ is the angle that polarizer rotates around rotary shaft.
6. analyzing method as claimed in claim 5, it is characterised in that to power in step 2
Change curve carries out the polarization extinction ratio PER=(a that computer fitting is obtained0+v)/(a0- v), wherein
V be intermediate parameters and
7. analyzing method as claimed in claim 6, it is characterised in that to power in step 2
Change curve carries out the first measured value that computer fitting obtains polarization direction
8. analyzing method as claimed in claim 1, it is characterised in that step 3 is rechecking inspection
More than five times sliding window values are carried out in the range of point position d θ.
9. analyzing method as claimed in claim 1, it is characterised in that d θ≤20 ° in step 3,
Δθ2≤ 0.05 °, the width Delta θ of sliding window3≤0.5°。
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Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20060014712A (en) * | 2004-08-12 | 2006-02-16 | (주)엘립소테크놀러지 | An apparatus for measuring optic axis off-alignment of polarizing plate and phase retardation plate and method thereof |
| CN102878940B (en) * | 2012-09-29 | 2015-08-19 | 中国科学院微电子研究所 | A kind of calibration steps comprising the ellipsometer test of phase compensator |
| CN102879337B (en) * | 2012-09-29 | 2015-08-19 | 中国科学院微电子研究所 | A kind of calibration steps of ellipsometer test |
-
2016
- 2016-01-29 CN CN201610067096.2A patent/CN107024274B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20060014712A (en) * | 2004-08-12 | 2006-02-16 | (주)엘립소테크놀러지 | An apparatus for measuring optic axis off-alignment of polarizing plate and phase retardation plate and method thereof |
| JP2006053562A (en) * | 2004-08-12 | 2006-02-23 | Ellipso Technology Co Ltd | Apparatus and method for measuring optical axis alignment error in sample comprising polarizing plate and phase retardation plate joined |
| CN102878940B (en) * | 2012-09-29 | 2015-08-19 | 中国科学院微电子研究所 | A kind of calibration steps comprising the ellipsometer test of phase compensator |
| CN102879337B (en) * | 2012-09-29 | 2015-08-19 | 中国科学院微电子研究所 | A kind of calibration steps of ellipsometer test |
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