CN107024274B - A kind of analyzing method suitable for light orientation equipment - Google Patents
A kind of analyzing method suitable for light orientation equipment Download PDFInfo
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- CN107024274B CN107024274B CN201610067096.2A CN201610067096A CN107024274B CN 107024274 B CN107024274 B CN 107024274B CN 201610067096 A CN201610067096 A CN 201610067096A CN 107024274 B CN107024274 B CN 107024274B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J4/00—Measuring polarisation of light
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Abstract
The present invention provides a kind of analyzing method suitable for light orientation equipment, it will carry out after carrying out primary detection to extinction ratio and polarization direction, it is rechecked, 45 ° are rotated in the polarization direction of primary detection, sliding window value is carried out in its vicinity, and is carried out curve fitting, until finding out the variation with angle, slope variation maximum angle of the light intensity relative to angle, then be accurate polarization direction after compensating 45 °.This detection method, after carrying out primary detection, it just no longer needs to find multiple sampled points progress repetition tests, but the mode of computer curve fitting is used, measurement method is simplified, sliding window value is carried out at the same time, slope calculating is carried out in the central point of each window, find out the angle corresponding to the maximum point of slope variation, this sliding window value can improving measurement accuracy, weaken influence of the interference to measurement of noise.
Description
Technical field
The present invention relates to semiconductor applications, more particularly to a kind of analyzing method suitable for light orientation equipment.
Background technology
Using on the ultraviolet source irradiation substrate of linear polarization alignment film or both alignment layers (hereinafter referred to as " light alignment film ") realize
Light alignment technique is known as to the technology of liquid crystal alignment.The technology due to it is contactless, without electrostatic pollution, without dust pollution, match
It is good to effect, being suitable for many advantages such as advanced lines producing line, just gradually substitution friction matching technology becomes liquid crystal display panel allocating process
Mainstream technology.
High orientation quality is obtained in light allocating process, it is desirable to the delustring of the linearly polarized light at light orientation film surface
It is more high than relatively high and polarization direction (namely polarization angle) uniformity, this requires can carry out high-precision extinction ratio and partially
It shakes the measurement in direction, so as to the high-precision extinction ratio adjusted at light orientation film surface and polarization direction.It is current to measure partially
The major technique of light of shaking is to measure the Stokes vectors of polarised light, when measuring the relatively high linearly polarized light of extinction ratio, by
The error of Stokes Vector operation polarised light extinction ratios is larger.Meanwhile the measuring technique of Stokes vectors is frequently with wave plate etc. pair
The optical element of incident angle sensitivity, this allows for its corresponding measuring device and is difficult to use in linearly polarized light in light orientation equipment
The high-acruracy survey of polarization extinction ratio and polarization direction.
The main means of polarization extinction ratio and polarization direction that linearly polarized light is currently measured in light orientation equipment are rotation
Polarizing film.In Chinese patent CN103575400A (application numbers：CN201310303088.X, publication date：On 2 12nd, 2014) it is public
In the technology opened, the measurement of polarization direction is fitted to obtain by the wave crest or trough curve for obtaining measurement.
However by the way that the study found that the luminous power at wave crest or wave trough position is slow with angle change, the presence of noise makes
It obtains signal to be difficult to accurately measure, and due to the presence of noise so that the fluctuation of many burrs is generated on the signal curve measured,
This just produces large effect to measurement accuracy.
It, can it is therefore desirable to invent a kind of polarization extinction ratio and polarization direction measurement method suitable for light orientation equipment
It is easily obtained high measurement accuracy, it is low to the requirement of power meter measurement accuracy, and influence of the interference of noise to measurement is smaller.
Invention content
To solve the above problems, the present invention proposes a kind of analyzing method suitable for light orientation equipment, offseted
After light ratio and polarization direction carry out primary detection, rechecked, rotate 45 ° in the polarization direction of primary detection, in its vicinity into
Row sliding window value, and carry out curve fitting, until finding out the variation with angle, slope variation of the light intensity relative to angle
Maximum angle, then be accurate polarization direction after subtracting 45 °.
In order to achieve the above objectives, the present invention provides a kind of analyzing method suitable for light orientation equipment, includes the following steps：
Step 1：Polarizing film is placed in the light path of light to be measured, polarizing film rotates a circle around rotary shaft, is measured by power
It obtains when polarizing film rotates a circle, light to be measured penetrates the changed power curve after polarizing film；
Step 2：Computer fitting is carried out to the changed power curve that step 1 obtains, after obtaining corresponding fitting parameter,
Polarization extinction ratio and the first measured value of polarization direction is calculated；
Step 3：The first measured value of polarization direction is rechecked, using measured value at the beginning of obtained polarization direction as starting point, by it
Reverification test point is used as after 45 ° of rotation, with step angle Δ θ within the scope of reverification test point position d θ2It rotates and records corresponding
Light intensity under corner forms the graph of relation between the angle and light intensity that stepping obtains, in reverification test point position d θ ranges
Interior progress sliding window value, by the central point of each sliding window and its corresponding slope value system on the graph of relation
It is made slope distribution figure；
Step 4：The slope distribution figure formed to step 3 carries out curve fitting, and forms matched curve, then matched curve
Extreme value is that polarization direction rotates the angle value after 45 °, then polarization direction is the angle after 45 ° on the corresponding angle compensation of extreme value
Angle value.
Preferably, also increasing step 2 11 between step 2 and step 3：Step 1 and step 2 repetition is several
It is secondary, the first measured value of the polarization extinction ratio measured every time and polarization direction is averaged respectively, obtains being averaged for polarization extinction ratio
The preliminary survey average value of value and polarization direction, using the preliminary survey average value of polarization direction as starting point in step 3.
Preferably, further including step 5：By step 1 to step 4 repeated several times, the polarization direction that will be measured every time
It is averaged, as the final average value of polarization direction.
Preferably, polarizing film is rotated a circle around rotary shaft at the uniform velocity to rotate in step 1.
Preferably, the power in step 1 in changed power curve
Wherein a0、a1、a2All it is fitting parameter, θ is that polarizing film is revolved around rotary shaft
The angle turned.
Preferably, carrying out the polarization extinction ratio PER=(a that computer fitting obtains to changed power curve in step 20
+v)/(a0- v), wherein v be intermediate parameters and
Preferably, carrying out computer fitting to changed power curve in step 2 obtains the first measured value of polarization direction
Preferably, step 3 carries out five times or more sliding window values within the scope of reverification test point position d θ.
Preferably, θ≤20 ° d in step 3, Δ θ2≤ 0.05 °, the width Delta θ of sliding window3≤0.5°。
Compared with prior art, the beneficial effects of the invention are as follows：
The present invention provides a kind of analyzing method suitable for light orientation equipment, includes the following steps：
Step 1：Polarizing film is placed in the light path of light to be measured, polarizing film rotates a circle around rotary shaft, is measured by power
It obtains when polarizing film rotates a circle, light to be measured penetrates the changed power curve after polarizing film；
Step 2：Computer fitting is carried out to the changed power curve that step 1 obtains, after obtaining corresponding fitting parameter,
Polarization extinction ratio and the first measured value of polarization direction is calculated；
Step 3：The first measured value of polarization direction is rechecked, using measured value at the beginning of obtained polarization direction as starting point, by it
Reverification test point is used as after 45 ° of rotation, with step angle Δ θ within the scope of reverification test point position d θ2It rotates and records corresponding
Light intensity under corner forms the graph of relation between the angle and light intensity that stepping obtains, in reverification test point position d θ ranges
Interior progress sliding window value, by the central point of each sliding window and its corresponding slope value system on the graph of relation
It is made slope distribution figure；
Step 4：The slope distribution figure formed to step 3 carries out curve fitting, and forms matched curve, then matched curve
Minimum is that polarization direction rotates the angle value after 45 °, then polarization direction is after the corresponding angle of minimum subtracts 45 °
Angle value.
The present invention will be rechecked, after carrying out carrying out primary detection to extinction ratio and polarization direction in primary detection
Polarization direction rotates 45 °, carries out sliding window value in its vicinity, and carry out curve fitting, until finding out the change with angle
Change, slope variation maximum angle of the light intensity relative to angle, then is accurate polarization direction after compensating 45 °.This detection
Method just no longer needs to find multiple sampled points progress repetition tests, but uses computer curve quasi- after carrying out primary detection
The mode of conjunction, simplifies measurement method, is carried out at the same time sliding window value, and slope calculating is carried out in the central point of each window,
Find out the angle corresponding to the maximum point of slope variation, this sliding window value can improving measurement accuracy, weaken noise
Influence of the interference to measurement.
Description of the drawings
Fig. 1 is Calibrator structural schematic diagram used in analyzing method provided by the invention；
Fig. 2 is analyzing method flow diagram provided by the invention；
Fig. 3 is that polarizing film provided by the invention rotates a circle the power curve measured；
Fig. 4 is the central point and its Slope relationship figure of sliding window provided by the invention；
Fig. 5 is the matched curve that slope of curve value provided by the invention is fitted.
In figure：1- polarizing films, 11- rotary shafts, 2- power meters.
Specific implementation mode
In order to make the foregoing objectives, features and advantages of the present invention clearer and more comprehensible, below in conjunction with the accompanying drawings to the present invention
Specific implementation mode be described in detail.
Fig. 1 is please referred to, Calibrator includes used in the analyzing method provided by the invention suitable for light orientation equipment
One polarizing film 1, polarizing film 1 have central shaft, that is, rotary shaft 11, rotary shaft 11 of the polarizing film 1 around itself
Rotation；
One power meter 2, center are located on the extended line of rotary shaft 11, for measuring the work(through the light after polarizing film 1
Rate；
One control system (not shown) is connect, the rotation for controlling polarizing film 1 with polarizing film 1 and all circuits of power meter 2
And calculate light extraction through after polarizing film 1 polarization extinction ratio and polarization direction.
Fig. 2 is please referred to, the analyzing method provided by the invention suitable for light orientation equipment includes the following steps：
Step 1：Please refer to Fig. 1, polarizing film 1 be placed in the light path of light to be measured, polarizing film 1 around rotary shaft 11 at the uniform velocity
It rotates a circle, step angle is Δ θ1, measured by power meter 2 when polarizing film 1 rotates a circle, after light to be measured penetrates polarizing film
Changed power curve, obtain Fig. 3, the changed power curve in Fig. 3 meets following formula：
Wherein P is power, corresponds in Fig. 3 often rotation and obtains an angle, θ, the optical signal measured, a0、a1、a2All it is fitting ginseng
Number, meanwhile, derivation is carried out to the power curve, obtains the curve where dotted line.
Step 2：In the power curve that step 1 obtains, optical signal angle corresponding when being 0 is the first of polarization direction
Measured value, specific calculation formula areWherein α is the first measured value of polarization direction, v be intermediate parameters andPolarization extinction ratio PER=(a additionally can be obtained0+v)/(a0- v), step 1 to step 2 is repeated several
It is secondary, the first measured value of the polarization extinction ratio measured every time and polarization direction is averaged respectively, obtains being averaged for polarization extinction ratio
The preliminary survey average value of value and polarization direction.
Due to the interference of noise, Fig. 3 is please referred to, there are many burrs in record power curve, therefore is 0 in optical signal
There are many small fluctuations, it is all 0 to lead to will appear more angle value its corresponding optical signal, it is therefore desirable to right near point
The above results are rechecked.
Step 3：The preliminary survey average value of polarization direction is rechecked, it, will using polarization direction preliminary survey average value as starting point
It rotates 45 ° (can be+45 degree, can also be -45 degree) and is used as reverification test point afterwards, is illustrated by taking+45 degree of rotation as an example,
The intersection point for please referring to the straight line where being 0 with optical signal after Fig. 3 namely power curve derivation, as reverification test point,
With step angle Δ θ within the scope of reverification test point position d θ2Rotate and record the light intensity under corresponding corner, reverification test point position
Five times or more sliding window values are carried out within the scope of d θ, the wherein width of sliding window is Δ θ3, obtain corresponding sliding window
Relation curve (not shown) between light intensity, records the central point of each sliding window and corresponding slope value on the figure,
It is fabricated to slope distribution figure as shown in Figure 4, step value when abscissa is every time mobile sliding window in Fig. 4, ordinate is
Correspond to the corresponding slope of each sliding window central point, wherein Δ θ2Much smaller than Δ θ1；
Step 4：The slope distribution figure formed to step 3 carries out curve fitting, and forms matched curve, as shown in figure 5, figure
5 be to carry out derivation to the curve of Fig. 4, then the minimum point namely minimum of Fig. 5 curves are after polarization direction rotates+45 °
Angle value, then polarization direction is that the corresponding angle of minimum subtracts the angle value after 45 °, correspondingly, the peak of curve
I.e. maximum is that polarization direction rotates the angle value after -45 °, then polarization direction is that the corresponding angle of maximum adds 45 °
Angle value afterwards.
Step 5：By step 1 to step 4 repeated several times, the angle value measured every time is averaged, is as polarized
The final average value in direction.
θ≤20 ° d in step 3, Δ θ2≤ 0.05 °, the width Delta θ of sliding window3It≤0.5 °, is found through experiments that, step
θ=20 ° d in three, Δ θ2=0.05 °, the width Delta θ of sliding window3At=0.5 °, by step 1 to step 4 repetition ten times, most
The final average value of the polarization direction measured afterwards and the deviation of actual value only have 0.003 °, therefore use this analyzing method, survey
The precision of amount is significantly promoted.
Above-described embodiment is described in the present invention, but the present invention is not limited only to above-described embodiment, it is clear that this field
Technical staff can carry out various modification and variations without departing from the spirit and scope of the present invention to invention.If in this way, this hair
These bright modifications and variations within the scope of the claims of the present invention and its equivalent technology, then the present invention be also intended to include
Including these modification and variations.
Claims (6)
1. a kind of analyzing method of Calibrator suitable for light orientation equipment, which is characterized in that include the following steps：
Step 1：Polarizing film is placed in the light path of light to be measured, polarizing film rotates a circle around rotary shaft, is measured by power meter
When polarizing film rotates a circle, light to be measured penetrates the changed power curve after polarizing film, the power in the changed power curvea0、a1、a2All it is fitting parameter, θ is the angle that polarizing film is rotated around rotary shaft；
Step 2：Computer fitting is carried out to the changed power curve that step 1 obtains, after obtaining corresponding fitting parameter, is calculated
Obtain polarization extinction ratio PER=(a0+v)/(a0- v) and polarization direction first measured valueWherein,
Step 3：The first measured value of polarization direction is rechecked, is rotated using measured value at the beginning of obtained polarization direction as starting point
Reverification test point is used as after 45 °, with step angle Δ θ within the scope of reverification test point position d θ2It rotates and records corresponding corner
Under light intensity, form the graph of relation between stepping obtained angle and light intensity, within the scope of reverification test point position d θ into
Row sliding window value, by the central point of each sliding window and its on the graph of relation, corresponding slope value is fabricated to
Slope distribution figure；
Step 4：The slope distribution figure formed to step 3 carries out curve fitting, and forms matched curve, then the extreme value of matched curve
As polarization direction rotates the angle value after 45 °, then polarization direction is the angle after 45 ° on the corresponding angle compensation of extreme value
Value.
2. analyzing method as described in claim 1, which is characterized in that also increase step 2 ten between step 2 and step 3
One：By step 1 and step 2 repeated several times, the first measured value of the polarization extinction ratio measured every time and polarization direction is taken respectively
Average value, obtains the average value of polarization extinction ratio and the preliminary survey average value of polarization direction, by the preliminary survey of polarization direction in step 3
Average value is as starting point.
3. analyzing method as described in claim 1, which is characterized in that further include step 5：Step 1 to step 4 is repeated
Several times, the polarization direction measured every time is averaged, as the final average value of polarization direction.
4. analyzing method as described in claim 1, which is characterized in that it is even that polarizing film rotates a circle around rotary shaft in step 1
Speed rotation.
5. analyzing method as described in claim 1, which is characterized in that step 3 carries out within the scope of reverification test point position d θ
Five times or more sliding window values.
6. analyzing method as described in claim 1, which is characterized in that θ≤20 ° d in step 3, Δ θ2≤ 0.05 °, sliding window
The width Delta θ of mouth3≤0.5°。
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