CN107014752A - Piezoelectric sensor surface ripple test experience optical path adjusting servicing unit - Google Patents
Piezoelectric sensor surface ripple test experience optical path adjusting servicing unit Download PDFInfo
- Publication number
- CN107014752A CN107014752A CN201710336706.9A CN201710336706A CN107014752A CN 107014752 A CN107014752 A CN 107014752A CN 201710336706 A CN201710336706 A CN 201710336706A CN 107014752 A CN107014752 A CN 107014752A
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- CN
- China
- Prior art keywords
- neck
- optical path
- piezoelectric
- path adjusting
- sensor surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/1702—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N2021/0106—General arrangement of respective parts
- G01N2021/0112—Apparatus in one mechanical, optical or electronic block
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/1702—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids
- G01N2021/1708—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids with piezotransducers
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- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
Abstract
The present invention relates to a kind of piezoelectric sensor surface ripple test experience optical path adjusting servicing unit, its main body is card, it is characterized in that, card is the U-shaped card piece for being provided with neck, the width of neck is identical with the piezoelectric probe width of piezoelectric transducer, one group of boost line parallel with neck bottom is respectively arranged with the both sides of neck, two groups of boost lines are identical.
Description
Technical field
The invention belongs to Non-Destructive Testing and ultrasonic surface wave technical field.
Background technology
The fast development of super large-scale integration proposes bigger challenge to ULSI interconnection wiring systems.International half
Conductor technology way for development line chart middle finger goes out, the parameter such as mechanical property, adhesion characteristics in order to correctly characterize low-k interconnection films,
Need to develop advanced measuring technology.Traditional method has scarification, four-point bending method, glues and take off method, pulling method etc..But these sides
Method can all cause damage, and the abundant difference of reliability of measurement result to film.Therefore, accurate, the reliable Non-Destructive Testing side of development is needed badly
Method is applied to thin film study and the on-line checking of preparation process.Surface acoustic wave method has that lossless, experimental system is easy to operate, detection is fast
It is fast accurately to wait outstanding advantage.Piezoelectric transducer detection technique is the representative of surface acoustic wave detection technique.Its general principle is：Referring to
Fig. 1, sends an of short duration laser pulse by pulse laser 1 and is fluctuated in 2 surface excitation of solid sample, one broadband, absorbed
Laser emission causes local heating, and occurs thermal expansion in the surface of solids, and then produces surface acoustic wave 3, and surface wave is being propagated through
The information that sample is carried in journey is received by piezoelectric probe 4.The level of optical path adjusting is to experimental result in whole experiment process
There is vital influence.Optical path adjusting refers to that the parallel laser for sending laser by adjusting prism 5 and cylindrical mirror 6 turns
Turn to the incandescent beaten on print and superfine light.Also light is set to meet following requirement simultaneously：
Firstth, pulse laser light and piezoelectric probe are wide；
Secondth, pulse laser light is with piezoelectric probe keeping parallelism；
3rd, pulse laser light and piezoelectric probe alignment.
Regulation light path can only lean on the observation of experimenter at present, and it is cumbersome, slow thus to cause optical path adjusting process, adjust
Section effect does not often reach most preferably.Therefore the alignment device of an auxiliary optical path regulation can be greatly enhanced the effect of optical path adjusting
Rate.
The content of the invention
Adjusted it is an object of the invention to provide a kind of light path that can improve suitable for piezoelectric sensor surface ripple test experience
The efficiency of section and the alignment device of accuracy.Technical scheme is as follows：
A kind of piezoelectric sensor surface ripple test experience optical path adjusting servicing unit, its main body is card, it is characterised in that
Card is the U-shaped card piece for being provided with neck, and the width of neck is identical with the piezoelectric probe width of piezoelectric transducer, the two of neck
Side is respectively arranged with one group of boost line parallel with neck bottom, and two groups of boost lines are identical.
Preferably, described boost line is colored alternate boost line.
Brief description of the drawings
Fig. 1 piezoelectric sensor surface ripple detection principle diagrams
Fig. 2 optical path adjusting servicing unit schematic diagrames
Schematic diagram is implemented in the operation of Fig. 3 light path regulating devices
Embodiment
Such as Fig. 2, device profile：The present apparatus is a U-shaped card.Card long 40mm, wide 30mm.Have one long on card
30mm, wide 10mm neck 7, the width of neck 7 are identical with piezoelectric probe width.Card thickness is about 1mm.
Device details：There is one group of colored alternate boost line 8 parallel with neck bottom on neck both sides.The purpose is to side
Just light regulating and piezoelectric probe keeping parallelism.Because boost line is than comparatively dense, the colored alternate boost line 8 of selection is in order to anti-
Only light targeted by the boost line of dislocation and then cause light can not be parallel with piezoelectric probe.
As shown in figure 3, during using present apparatus auxiliary adjustment light path, device 1 is placed on sample, and by piezoelectric probe
A boost line in 4 alignment necks.Because piezoelectric probe and neck are with wide, such neck is equivalent to by the width of piezoelectric probe
Extended to position at laser.Under the auxiliary of neck, light regulation is arrived with piezoelectric probe with width and aligns and just becomes very
Easily.A boost line further, since piezoelectric probe has alignd, so boost line all in neck is flat all with piezoelectric probe
Capable.So light any one boost line of aliging is ensured that into light is parallel with piezoelectric probe again.So, device is just very
Good facilitates optical path adjusting.Drastically increase the accuracy and efficiency of regulation.
Claims (2)
1. a kind of piezoelectric sensor surface ripple test experience optical path adjusting servicing unit, its main body is card, it is characterised in that card
Piece is the U-shaped card piece for being provided with neck, and the width of neck is identical with the piezoelectric probe width of piezoelectric transducer, in the both sides of neck
One group of boost line parallel with neck bottom is respectively arranged with, two groups of boost lines are identical.
2. device according to claim 1, it is characterised in that described boost line is colored alternate boost line.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710336706.9A CN107014752A (en) | 2017-05-13 | 2017-05-13 | Piezoelectric sensor surface ripple test experience optical path adjusting servicing unit |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710336706.9A CN107014752A (en) | 2017-05-13 | 2017-05-13 | Piezoelectric sensor surface ripple test experience optical path adjusting servicing unit |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN107014752A true CN107014752A (en) | 2017-08-04 |
Family
ID=59449563
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710336706.9A Pending CN107014752A (en) | 2017-05-13 | 2017-05-13 | Piezoelectric sensor surface ripple test experience optical path adjusting servicing unit |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107014752A (en) |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05315409A (en) * | 1992-05-12 | 1993-11-26 | Ibiden Co Ltd | Auxiliary inspecting equipment for continuous length film carrier |
| CN201429569Y (en) * | 2009-07-03 | 2010-03-24 | 广州市计量检测技术研究院 | Element spectrum analysis device for simultaneously detecting signal and background wavelength |
| JP2013048813A (en) * | 2011-08-31 | 2013-03-14 | Panasonic Corp | Ultrasonic diagnostic apparatus |
| CN103336062A (en) * | 2013-06-26 | 2013-10-02 | 钢研纳克检测技术有限公司 | Electromagnetic ultrasonic transducer for detecting rail head tread defect of steel rail |
| CN204177733U (en) * | 2014-11-21 | 2015-02-25 | 国家电网公司 | Based on the excitation formula passive source gas sensor of surface acoustic wave principle |
| CN205210293U (en) * | 2015-11-27 | 2016-05-04 | 沈阳工业大学 | Novel electric equipment surperficial magnetic characteristic test probe unshakable in one's determination |
| CN106526390A (en) * | 2016-12-23 | 2017-03-22 | 安徽华东光电技术研究所 | Electronic compatible EMC conduction simple test method |
| CN207181277U (en) * | 2017-05-13 | 2018-04-03 | 天津大学 | A kind of rayleigh waves inspection tests optical path adjusting supplementary card |
-
2017
- 2017-05-13 CN CN201710336706.9A patent/CN107014752A/en active Pending
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05315409A (en) * | 1992-05-12 | 1993-11-26 | Ibiden Co Ltd | Auxiliary inspecting equipment for continuous length film carrier |
| CN201429569Y (en) * | 2009-07-03 | 2010-03-24 | 广州市计量检测技术研究院 | Element spectrum analysis device for simultaneously detecting signal and background wavelength |
| JP2013048813A (en) * | 2011-08-31 | 2013-03-14 | Panasonic Corp | Ultrasonic diagnostic apparatus |
| CN103336062A (en) * | 2013-06-26 | 2013-10-02 | 钢研纳克检测技术有限公司 | Electromagnetic ultrasonic transducer for detecting rail head tread defect of steel rail |
| CN204177733U (en) * | 2014-11-21 | 2015-02-25 | 国家电网公司 | Based on the excitation formula passive source gas sensor of surface acoustic wave principle |
| CN205210293U (en) * | 2015-11-27 | 2016-05-04 | 沈阳工业大学 | Novel electric equipment surperficial magnetic characteristic test probe unshakable in one's determination |
| CN106526390A (en) * | 2016-12-23 | 2017-03-22 | 安徽华东光电技术研究所 | Electronic compatible EMC conduction simple test method |
| CN207181277U (en) * | 2017-05-13 | 2018-04-03 | 天津大学 | A kind of rayleigh waves inspection tests optical path adjusting supplementary card |
Non-Patent Citations (1)
| Title |
|---|
| 严刚 等: "利用PVDF检测激光声表面波的实验方法" * |
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