CN107012444B

CN107012444B - Blowing device of equipment for plating diamond film by chemical vapor deposition

Info

Publication number: CN107012444B
Application number: CN201710313388.4A
Authority: CN
Inventors: 鲍明东; 徐雪波; 吕志甲; 杨梦梦; 冯超; 何骅波; 丁兰
Original assignee: Ningbo University of Technology
Current assignee: Ningbo University of Technology
Priority date: 2017-05-05
Filing date: 2017-05-05
Publication date: 2023-09-15
Anticipated expiration: 2037-05-05
Also published as: CN107012444A

Abstract

The utility model provides a gas blowing device of equipment of chemical vapor deposition plating diamond film, includes spray gun (9), ripple hose (10), first bearing structure (11), second bearing structure (12) and mounting panel (13), second bearing structure (12) include second branch (17), second holder (18) and pulley (19), be equipped with convex spout (20) on mounting panel (13), pulley (19) are connected with convex spout (20) roll. After the blowing device is applied to the diamond film plating equipment, when heterogeneous particles appear on the surface of the substrate sample in the process of plating the diamond film, the heterogeneous particles can be timely removed from the surface of the substrate sample, so that the diamond film plated out is prevented from being influenced by the heterogeneous particles, and the quality of the diamond film plated out is ensured.

Description

Blowing device of equipment for plating diamond film by chemical vapor deposition

Technical Field

The application relates to the technical field of equipment for plating a diamond film by chemical vapor deposition, in particular to an air blowing device of the equipment for plating the diamond film by chemical vapor deposition.

Background

Since the success of low-pressure gas phase synthesis of diamond, gas phase synthesis of diamond has been gradually studied worldwide, and efforts have been made to develop and apply to deposition techniques, synthesis processes, performance studies, development and the like.

The current methods for vapor deposition of diamond are two major categories, chemical vapor deposition CVD and physical vapor deposition PVD. Physical vapor deposition of diamond films is difficult and chemical vapor deposition is the primary method of depositing diamond films. The chemical vapor deposition diamond film is to decompose the material gas at high temperature to produce active particles of carbon atom, methyl radical, etc. and to deposit and grow diamond film on the sample under certain technological condition. The vapor deposition coating equipment generally comprises a coating cavity and an industrial control system, wherein an electrode and a sample table for placing a sample are fixed in the coating cavity, and the sample table is positioned right below the electrode.

When the diamond film is plated, an operator sets the plating parameters on the industrial control system, and the diamond film can be plated on the sample by starting the vapor deposition plating equipment. However, during the diamond film plating process, it was occasionally found that other foreign particles were deposited on the sample surface. Heterogeneous particles, such as carbon particles, deposit on the sample surface as carbon atoms may precipitate in the form of carbon particles. Thus, the coated diamond film is affected by heterogeneous particles, and has defects such as cracking and the like, so that the use requirement is difficult to achieve.

Therefore, there is an urgent need to design an auxiliary system capable of timely removing heterogeneous particles from the surface of a sample when the heterogeneous particles are observed to appear on the surface of the sample during the diamond film plating process, so that the scheme is generated.

Disclosure of Invention

The application aims to solve the technical problem of providing an air blowing device of equipment for plating a diamond film by chemical vapor deposition, which can be used for timely removing heterogeneous particles from the surface of a sample when the heterogeneous particles appear on the surface of the sample in the process of plating the diamond film after being applied to the equipment for plating the diamond film, thereby avoiding the influence of the heterogeneous particles on the plated diamond film and ensuring the quality of the plated diamond film.

In order to solve the technical problems, the air blowing device of the equipment for plating the diamond film by chemical vapor deposition comprises a spray gun, a corrugated hose, a first supporting structure, a second supporting structure and a mounting plate; the spray gun is installed on the mounting plate through a first supporting structure and a second supporting structure, the mounting plate is connected to the mounting table in a sliding mode, the first supporting structure comprises a first supporting rod and a first clamping piece movably connected with the first supporting rod, the second supporting structure comprises a second supporting rod, a second clamping piece and a pulley, the second clamping piece is fixed at one end of the second supporting rod, the pulley is connected with the other end of the second supporting rod, the spray gun is fixed on the first clamping piece and the second clamping piece, an arc-shaped chute is formed in the mounting plate, the pulley is in rolling connection with the arc-shaped chute, a driving mechanism used for driving the pulley to roll in the arc-shaped chute is fixed on the mounting plate, the driving mechanism comprises a first servo motor and a swinging rod, one end of the swinging rod is connected with the first servo motor, the other end of the swinging rod is connected with the second supporting rod, and the first servo motor is connected with an industrial control system of a diamond film plating device for chemical vapor deposition.

The first support rod comprises a first rod body and a second rod body, the first rod body is fixed on the mounting plate, the first clamping piece is connected with one end of the first rod body through a universal joint, the second rod body is in sliding connection with the first rod body, and a driving assembly for driving the second rod body to slide up and down in the first rod body is arranged between the second rod body and the first rod body.

The second body of rod and first body of rod sliding connection mean, the one end that first holder was kept away from to the second body of rod is equipped with the draw runner, be equipped with on the first body of rod with draw runner sliding connection's spout, drive assembly includes third servo motor and gear, third servo motor fixes on the mounting panel, third servo motor's drive end and gear connection, be equipped with the rack on the lateral wall of draw runner, the gear is connected with the rack meshing.

The end of the spray gun is fixedly provided with a baffle plate for shielding the electrode in the equipment.

After adopting the structure, the application has the following advantages: because pulley when rolling in the arc spout, can drive the terminal swing of spray gun to realize that the export one end of spray gun can swing, conveniently adjust the export of spray gun and aim at the heterogeneous particulate matter on sample surface, consequently after the gas blowing device of above-mentioned structure was applied to plating diamond film equipment, in-process plating diamond film, when observing that heterogeneous particulate matter appears on sample surface, can in time clear away heterogeneous particulate matter from sample surface, thereby can avoid plating diamond film that comes out to receive heterogeneous particulate matter's influence, guarantee the quality of plating diamond film that comes out.

Drawings

Fig. 1 is a schematic structural view of an apparatus for plating a diamond film by chemical vapor deposition according to one embodiment of the present application.

Fig. 2 is a schematic view of an apparatus for plating a diamond film by chemical vapor deposition according to one embodiment of the present application in operation.

Fig. 3 is a schematic structural view of an auxiliary chamber of an apparatus for plating a diamond film by chemical vapor deposition according to one embodiment of the present application.

Fig. 4 is a schematic structural view of an air blowing device of an apparatus for chemical vapor deposition plating a diamond film according to the present application.

Fig. 5 is a schematic structural view of a first strut in an air blowing device of an apparatus for chemical vapor deposition plating a diamond film according to the present application.

Fig. 6 is a schematic structural view of a sample stage in an apparatus for plating a diamond film by chemical vapor deposition according to one embodiment of the present application.

Fig. 7 is a schematic view showing a structure of a sample stage according to another embodiment of the present application applied to an apparatus for chemical vapor deposition plating a diamond film.

Fig. 8 is a schematic cross-sectional view of a sample stage including an external gear member in an apparatus for chemical vapor deposition plating a diamond film according to one embodiment of the present application.

Wherein:

1. a film coating cavity; 2. an electrode; 3. a sample; 4. a sample stage; 5. an auxiliary cavity; 6. an electric valve; 7. a mounting table; 8. an air extracting device; 9. a spray gun; 10. a corrugated hose; 11. a first support structure; 12. a second support structure; 13. a mounting plate; 14. a joint; 15. a first strut; 15.1, a first rod body; 15.2, a second rod body; 15.3, sliding strips; 15.4, a chute; 15.5, racks; 16. a first clamping member; 17. a second strut; 18. a second clamping member; 19. a pulley; 20. circular arc chute; 21. a first servo motor; 22. swing rod; 23. a gas filter; 24. a flow control valve; 25. a gas tank; 26. a gas cylinder; 27. a second servo motor; 28. a worm; 29. a nut; 30. guide sleeve; 31. a guide rail; 32. a baffle; 33. a third servo motor; 34. a gear; 35. a turntable; 36. a first rotating shaft; 37. a fourth servo motor; 38. a mounting base; 39. a claw; 40. mounting a rack; 41. a first helical gear; 42. a second helical gear; 43. a second rotating shaft; 44. a roller; 45. an annular slide rail; 46. an outer gear member; 47. an annular inner gear member.

Detailed Description

The application is described in further detail below with reference to the drawings and detailed description.

The inventive concepts of the present disclosure will be described below using terms commonly used by those skilled in the art to convey the substance of their work to others skilled in the art. These inventive concepts may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. These embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of their inclusion to those skilled in the art. It should also be noted that these embodiments are not mutually exclusive. A component, step or element from one embodiment may be conceived that may be present or utilized in another embodiment. The particular embodiments shown and described may be replaced with a wide variety of alternative and/or equivalent implementations without departing from the scope of the embodiments of the present disclosure. This disclosure is intended to cover any adaptations or variations of the embodiments discussed herein. It will be apparent to those skilled in the art that alternative embodiments may be practiced using only some of the described aspects. Specific numbers, materials, and configurations are described herein in the embodiments for purposes of illustration, however, alternative embodiments may be practiced by one skilled in the art without these specific details. In other instances, well-known features may be omitted or simplified in order not to obscure the illustrative embodiments.

Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.

In the description of the present application, it should be noted that, unless explicitly stated and limited otherwise, the terms "provided with," "mounted to," "connected to," and "connected to" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present application will be understood in specific cases by those of ordinary skill in the art.

Referring to fig. 1 to 8, in one embodiment, an apparatus for plating a diamond film by chemical vapor deposition comprises a plating cavity 1, a mounting rack 40 and an industrial control system, wherein the plating cavity 1 is fixed on the mounting rack 40, an electrode 2 and a sample table 4 for clamping a sample 3 are fixed in the plating cavity 1, the sample table 4 is positioned right below the electrode 2, the apparatus for plating a diamond film by chemical vapor deposition further comprises an auxiliary cavity 5, the auxiliary cavity 5 is connected with the plating cavity 1, specifically, the auxiliary cavity 5 is connected with a side wall of the plating cavity 1, an electric valve 6 for separating the auxiliary cavity 5 from the plating cavity 1 is arranged between the auxiliary cavity 5 and the plating cavity 1, the electric valve 6 is electrically connected with the industrial control system, an air blowing device for blowing air to the surface of the sample 3 is arranged in the auxiliary cavity 5, the air blowing device is fixed in the auxiliary cavity 5, the air blowing device is slidably connected with the mounting table 7, the air blowing device is arranged on the air blowing device 7, the air blowing device can be further connected with an air source driving device for driving the air blowing device to the air source 5, and the air blowing device can be connected with the air source device for driving the air source 5 to the air source.

The blowing device comprises a spray gun 9, a corrugated hose 10, a first supporting structure 11, a second supporting structure 12 and a mounting plate 13; the spray gun 9 is mounted on a mounting plate 13 through a first supporting structure 11 and a second supporting structure 12, the mounting plate 13 is slidably connected to the mounting table 7, the mounting plate 13 is connected with the driving device, a connector 14 is fixed on the auxiliary cavity 5, the spray gun 9 is connected with the connector 14 through a corrugated hose 10, and the connector 14 is connected with an air source system. The corrugated hose 10 can be extended and contracted so that the spray gun 9 can move freely when moving back and forth.

The first supporting structure comprises a first supporting rod 15 and a first clamping piece 16 movably connected with the first supporting rod 15, the second supporting structure 12 comprises a second supporting rod 17, a second clamping piece 18 and a pulley 19, the second clamping piece 18 is fixed at one end of the second supporting rod 17, the pulley 19 is connected with the other end of the second supporting rod 17, the spray gun 9 is fixed on the first clamping piece 16 and the second clamping piece 18, the mounting plate 13 is provided with a circular arc chute 20, the pulley 19 is in rolling connection with the circular arc chute 20, the mounting plate 13 is fixedly provided with a driving mechanism for driving the pulley 19 to roll in the circular arc chute 20, the driving mechanism comprises a first servo motor 21 and a swinging rod 22, one end of the swinging rod 22 is connected with the first servo motor 21, the other end of the swinging rod 22 is connected with the second supporting rod 17, and the first servo motor 21 is connected with an industrial control system of a diamond film plating device for chemical vapor deposition. Like this, pulley 19 when rolling in arc spout 20, can drive the terminal swing of spray gun 9 to realize that the export one end of spray gun 9 can swing, conveniently adjust the export of spray gun 9 and aim at the heterogeneous particulate matter on sample 3 surface, thereby conveniently blow off heterogeneous particulate matter.

The first support rod 15 comprises a first rod body 15.1 and a second rod body 15.2, the first rod body 15.2 is fixed on the mounting plate 13, the first clamping piece 16 is connected with one end of the first rod body 15.1 through a universal joint, the second rod body 15.2 is in sliding connection with the first rod body 15.1, and a driving assembly for driving the second rod body 15.2 to slide up and down in the first rod body 15.1 is arranged between the second rod body 15.2 and the first rod body 15.1. The second rod body 15.2 and the first rod body 15.1 are in sliding connection, one end, far away from the first clamping piece 16, of the second rod body 15.2 is provided with a sliding bar 15.3, the first rod body 15.1 is provided with a sliding groove 15.4 in sliding connection with the sliding bar 15.3, the driving assembly comprises a third servo motor 33 and a gear 34, the third servo motor 33 is fixed on the mounting plate 13, the driving end of the third servo motor 33 is connected with the gear 34, the side wall of the sliding bar 15.3 is provided with a rack 15.5, the gear 34 is in meshed connection with the rack 15.5, and the third servo motor 33 is electrically connected with the industrial control system. Like this, be equivalent to first branch 15 for extending structure, extending structure can drive spray gun 9 adjustment spray gun 9's export and quasi-sample 3 surface between the distance to can be according to actual conditions adjustment, the heterogeneous particulate matter on sample 3 surface is aimed at in the export of convenient adjustment spray gun 9, thereby conveniently blow off heterogeneous particulate matter.

The gas source system comprises a gas filter 23, a flow control valve 24, a gas tank 25 and a gas bottle 26, wherein the gas bottle 26 is sequentially connected with the gas tank 25, the flow control valve 24, the gas filter 23 and the connector 14 through a gas pipe, and the flow control valve 24 is connected with the industrial control system. The gas filter 23 can ensure the purity of the gas when the gas in the gas cylinder 26 is blown to the surface of the sample 3 through the outlet of the spray gun 9, and avoid the influence of the impurity of the gas on the coating film. The air tank 25 is provided for buffering the air, and ensures the stability of the whole air source system.

The driving device comprises a second servo motor 27 and a worm 28 connected with the driving end of the second servo motor 27, the second servo motor 27 is fixed on the mounting table 7, a nut 29 is arranged below the mounting plate 13, the worm 28 is in threaded connection with the nut 29, and the second servo motor 27 is connected with an industrial control system.

The mounting plate 13 is slidably connected to the mounting table 7, a guide sleeve 30 is arranged under the mounting plate 13, a guide rail 31 is arranged on the mounting table 7, and the guide sleeve 30 is slidably connected with the guide rail 31. Of course, the mounting positions of the guide sleeve 30 and the guide rail 31 may be interchanged.

A baffle plate 32 for shielding the electrode 2 is fixedly arranged at the end part of the spray gun 9. Like this, when blowing device carries out the work of blowing off heterogeneous particulate matter, the baffle can block the electrode, is equivalent to suspending the coating film work, avoids still depositing at sample 3 surface at the work of blowing off heterogeneous particulate matter diamond, avoids causing the inhomogeneous of diamond at sample 3 surface deposition, improves the quality of final diamond film.

The sample table 4 comprises a rotary table 35, a first rotary shaft 36, a fourth servo motor 37, a mounting seat 38 and a claw 39; the fourth servo motor 37 is fixed on the mounting rack 40, one end of the first rotating shaft 36 is connected with the fourth servo motor 37, the other end of the first rotating shaft penetrates through the mounting rack 40 to be positioned in the film plating cavity 1 and is fixedly connected with the turntable 35, the mounting seat 38 is fixed on the turntable 35, the clamping claw 39 is rotationally connected to the mounting seat 38, the sample 3 is clamped at one end of the clamping claw 39, and the clamping claw 39 is connected with a power mechanism for driving the clamping claw 39 to rotate. Thus, the sample 3 can rotate along with the turntable when the sample 3 is coated with the diamond film when the diamond film is deposited, and the sample 3 rotates under the rotation action of the clamping jaw 39 while the sample 3 rotates along with the turntable, so that the uniformity of the coating film on the surface of the sample 3 is improved.

The power mechanism comprises a first bevel gear 41, a second bevel gear 42, a second rotating shaft 43, a roller 44 and an annular sliding rail 45, wherein the first bevel gear 41 is fixed on the rotating shaft of the claw 39, the second rotating shaft 43 penetrates through the rotary disc 35 and is rotationally connected with the rotary disc 35, one end of the second rotating shaft 43 is connected with the second bevel gear 42, the other end of the second rotating shaft 43 is connected with the roller 44, the annular sliding rail 45 is fixed at the inner bottom of the coating cavity 1, the annular sliding rail 45 and the rotary disc 35 are coaxially arranged, and the roller 44 is in rolling connection with the inner side wall of the annular sliding rail 45. When the turntable 35 rotates, the roller 44 is driven to revolve, the annular slide rail 45 is fixed at the inner bottom of the film plating cavity 1, the roller 44 is in rolling connection with the inner side wall of the annular slide rail 45, so that the roller 44 rotates, and when the roller 44 rotates, the claw 39 is driven to rotate through the transmission action of the first bevel gear 41 and the second bevel gear 42.

Of course, as shown in fig. 8, it is also possible to: the power mechanism comprises a first helical gear 41, a second helical gear 42, a second rotating shaft 43, an external gear member 46 and an annular internal gear member 47, wherein the first helical gear 41 is fixed on the rotating shaft of the claw 39, the second rotating shaft 43 penetrates through the rotary disc 35 and is rotationally connected with the rotary disc 35, one end of the second rotating shaft 43 is connected with the second helical gear 41, the other end of the second rotating shaft 43 is connected with the external gear member 46, the annular internal gear member 47 is fixed at the inner bottom of the coating cavity 1, the annular internal gear member 47 is coaxially arranged with the rotary disc 35, and the external gear member 46 is meshed with the annular internal gear member 47. The turntable 35 drives the external gear member 46 when rotating, the annular internal gear member 47 is fixed at the inner bottom of the coating cavity 1, the external gear member 46 is meshed with the annular internal gear member 47 so that the external gear member 46, and the external gear member 46 drives the claws 39 to rotate through the transmission action of the first helical gear 41 and the second helical gear 42.

The working process comprises the following steps: if heterogeneous particles are found on the surface of the sample 3, as shown in fig. 2, in the first step, the electric valve 6 of the auxiliary cavity 5 is opened;

secondly, the industrial control system controls the spray gun 9 to move towards the direction of the sample 3, and the outlet of the spray gun 9 is aligned with heterogeneous particles of the sample 3;

third, the industrial control system opens the flow control valve 24 to enable the inert gas stored in the gas cylinder 26 to blow the heterogeneous particulate matters away from the surface of the sample 3 through the outlet of the spray gun 9, and then resets.

Therefore, the influence of heterogeneous particles on the plated diamond film can be avoided, and the quality of the plated diamond film is ensured.

In an embodiment, the sample 3 may be a large piece injection molding machine screw, a screw-shaped milling cutter, a planar sample block, or the like.

The foregoing is merely illustrative of the preferred embodiments of the present application and is not intended to limit the scope of the claims, and other corresponding modifications, which would be apparent to those skilled in the art using the technical solutions and concepts of the present application, are intended to fall within the scope of the claims.

Claims

1. An air blowing device of equipment for plating a diamond film by chemical vapor deposition comprises a spray gun (9), a corrugated hose (10), a first supporting structure (11), a second supporting structure (12) and a mounting plate (13); the spray gun (9) is arranged on the mounting plate (13) through a first supporting structure (11) and a second supporting structure (12), the mounting plate (13) is connected to the mounting table (7) in a sliding mode, the first supporting structure comprises a first supporting rod (15) and a first clamping piece (16) movably connected with the first supporting rod (15), the second supporting structure (12) comprises a second supporting rod (17), a second clamping piece (18) and a pulley (19), the second clamping piece (18) is fixed at one end of the second supporting rod (17), the pulley (19) is connected with the other end of the second supporting rod (17), the spray gun (9) is fixed on the first clamping piece (16) and the second clamping piece (18), the mounting plate (13) is provided with a circular arc chute (20), the pulley (19) is in rolling connection with the first supporting rod (20), a driving mechanism for driving the pulley (19) to roll in the circular arc chute (20) is fixed on the mounting plate (13), the driving mechanism comprises a first motor (21) and a second motor (22) which are connected with the other end of the first swinging rod (22) and the second swinging rod (17), the first servo motor (21) is connected with an industrial control system of equipment for plating the diamond film by chemical vapor deposition; the first support rod (15) comprises a first rod body (15.1) and a second rod body (15.2), the first rod body (15.2) is fixed on the mounting plate (13), the first clamping piece (16) is connected with one end of the first rod body (15.1) through a universal joint, the second rod body (15.2) is in sliding connection with the first rod body (15.1), and a driving assembly for driving the second rod body (15.2) to slide up and down in the first rod body (15.1) is arranged between the second rod body (15.2) and the first rod body (15.1); a baffle plate (32) for shielding the electrode (2) in the equipment is fixedly arranged at the end part of the spray gun (9).

2. A blowing apparatus of an apparatus for chemical vapor deposition plating a diamond film according to claim 1, wherein: the second body of rod (15.2) and first body of rod (15.1) sliding connection mean, the one end that first holder (16) was kept away from to second body of rod (15.2) is equipped with draw runner (15.3), be equipped with on first body of rod (15.1) with draw runner (15.4) of draw runner (15.3) sliding connection, drive assembly includes third servo motor (33) and gear (34), third servo motor (33) are fixed on mounting panel (13), the drive end and the gear (34) of third servo motor (33) are connected, be equipped with rack (15.5) on the lateral wall of draw runner (15.3), gear (34) and rack (15.5) meshing are connected.