CN107003113B - Shape measuring apparatus and process for measuring shape - Google Patents

Shape measuring apparatus and process for measuring shape Download PDF

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Publication number
CN107003113B
CN107003113B CN201580064614.9A CN201580064614A CN107003113B CN 107003113 B CN107003113 B CN 107003113B CN 201580064614 A CN201580064614 A CN 201580064614A CN 107003113 B CN107003113 B CN 107003113B
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Prior art keywords
shape
region
lens face
face
measuring
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CN107003113A (en
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植木伸明
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Fujifilm Corp
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Fujifilm Corp
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)

Abstract

The present invention provides a kind of shape measuring apparatus and process for measuring shape of the global shape that lens face can be accurately measured with minimum measurement exponent number.Shape measuring apparatus involved by the mode of the present invention obtain the 1st region at the face center for by each area test including lens face shape and a part and the 1st area coincidence and include lens face peripheral part a part the 2nd region shape obtained by measuring shape result.The measuring shape result in the 2nd region is multiple in lens face configuration by the configuration with rotational symmetry centered on the center of face, and opening synthesis processing is implemented to the measuring shape result configured with the 2nd multiple regions.To being fitted operation by the shape that synthesis is handled that is open, to the rotational symmetry ingredient of operation lens face.Operation is fitted to the measuring shape result in the 1st region, to the asymmetrical ingredient of operation lens face.According to the 1st operational part and the global shape of the operation result operation lens face of the 2nd operational part.

Description

Shape measuring apparatus and process for measuring shape
Technical field
The present invention relates to a kind of shape measuring apparatus and process for measuring shape of the shape measuring lens face.
Background technology
In recent years, the shape measuring apparatus as the shape for the lens face for using interferometer measurement lens, it is known to a kind of Shape measuring apparatus, using it is so-called opening synthesize facture (also known as splicing method) measure than interferometer measurement range more The shape (referenced patent document 1 and patent document 2) of big lens face.It refers to following method that the opening, which synthesizes facture,：It will be saturating The whole region of minute surface is divided into more than two subregions, and adjacent subregion is made to overlap a part each other While by each section each area test, each of each section is made according to shape related with the region for overlapping and measuring The shape in a region engages, so as to find out the shape of the whole region of lens face.
A kind of shape measuring apparatus is disclosed in patent document 1, and there is the shared base to coincide with one another with multiple portions region Lens face is divided into multiple portions region by the mode in quasi- region, and after measuring the shape of these each subregions, phase So that each section region is engaged reference area, thus accurately measures the global shape of lens face.
A kind of shape measuring apparatus is disclosed in patent document 2, synthesizing facture by opening measures dome shape lens face Shape.The shape measuring apparatus utilizes lens face (spherical surface) after measuring the shape of each subregion of lens face Polar coordinate system, interferometer image-forming component image pickup plane plane coordinate system and be set as be open synthesis shared coordinate The shape conversion in each region is the different synthesis shape in each region corresponding from shared coordinate system by the correspondence of system.It connects It, the shape measuring apparatus synthesis different to each region shape is implemented opening synthesis and handled, so as to find out the entirety of lens face Shape.Thereby, it is possible to accurately find out the global shape of the lens face of dome shape.
Existing technical literature
Patent document
Patent document 1：Japanese Unexamined Patent Publication 2004-286561 bulletins
Patent document 2：No. 3661865 bulletins of Japanese Patent No.
Invention content
The invention technical task to be solved
However, in shape measuring apparatus recorded in patent document 1 and patent document 2, need at least to divide lens face Be segmented into 4 or more subregions measure these each subregions shape (for example, Fig. 2 of referenced patent document 1 and Fig. 7), therefore measurement exponent number becomes more.For example, when the measurement range relative to interferometer, the ruler of the lens face as measure object It is very little when there is twice of size, need to 8 positions at the center of lens face and lens face periphery (0 degree, 45 degree, 90 degree, 135 degree, 180 degree, 225 degree, 270 degree, 315 degree), i.e. add up to 9 positions be measured, to operation lens face whole region shape Shape.It needs to spend the time when as a result, leading to the problem of measurement.
The present invention is to complete in light of this situation, its purpose is to provide it is a kind of can be high with minimum measurement exponent number Measure to precision the shape measuring apparatus and process for measuring shape of the global shape of lens face.
Means for solving technical task
Have for realizing the shape measuring apparatus of the purpose of the present invention：Acquisition unit obtains and makees by each area test For lens face a part and include lens face face center the 1st region shape and a part with the 1st area coincidence and packet Include measuring shape result obtained by the shape in the 2nd region of a part for the peripheral part of lens face；Opening synthesis processing unit, will be by The measuring shape result in the 2nd region that acquisition unit obtains is by the configuration with rotational symmetry centered on the center of face saturating Minute surface configuration is multiple, and implements opening synthesis processing to the measuring shape result configured with the 2nd multiple regions；1st operational part, To being fitted operation by the shape that synthesis is handled that is open, to the rotational symmetry ingredient of operation lens face；2nd operation The measuring shape result in portion, the 1st region to being obtained by acquisition unit is fitted operation, non-right to the rotation of operation lens face Claim ingredient；And the 3rd operational part, according to the 1st operational part and the global shape of the operation result operation lens face of the 2nd operational part.
In accordance with the invention it is possible to according to the 1st region of lens face and the measuring shape result accurately operation in the 2nd region The global shape of lens face.
Also, have for realizing the shape measuring apparatus of the purpose of the present invention：Acquisition unit, by each area test packet It includes the shape of a part for the peripheral part of lens face and the 1st region at face center and is located at from the 1st region using face center in Position that the heart is rotated by 90 ° and include peripheral part a part and face center the 2nd region shape obtained by measuring shape knot Fruit；Opening synthesis processing unit is set when by the position for rotating 180 degree centered on the center of face respectively from the 1st region and the 2nd region For the 3rd region and 4 region when, by the measuring shape result in each region respectively by having centered on the center of face The configuration of 180 degree rotational symmetry is configured at the 3rd region and the 4th region, and to the measuring shape knot in the 1st region to the 4th region Fruit applies opening synthesis processing；1st operational part, to being fitted operation by the shape that synthesis is handled that is open, to transport Calculate the rotational symmetry ingredient of lens face；2nd operational part, to being fitted operation by the shape that synthesis is handled that is open, from And the asymmetrical ingredient of operation lens face；And the 3rd operational part, it is transported according to the operation result of the 1st operational part and the 2nd operational part Calculate the global shape of lens face.
In accordance with the invention it is possible to according to the 1st region of lens face and the measuring shape result accurately operation in the 2nd region The global shape of lens face.
In shape measuring apparatus involved by the another way of the present invention, have：Interferometer, have interference optics and The injection part for measuring light is projected to lens face by interference optics, and more straight than lens face to lens face outgoing beam diameter The small measurement light of diameter；Displacement portion makes lens face be incident in the 1st of the 1st region to light is measured relative to the relative position of interferometer Position and measurement light are incident in the 2nd position displacement in the 2nd region；Image pickup part is reflected into lens face by the shooting of each region The interference of the measurement light in each region and the reference light by configuring the reflection of the plane of reference in the light path of interference optics Light；And the 4th operational part, by image pickup signal that image pickup part obtains come the shape in each region of operation, acquisition unit obtains for analysis The operation result of 4th operational part is used as the measuring shape result in each region.Thereby, it is possible to accurately measure size ratio Interferometer can measurement range bigger lens face shape.
In shape measuring apparatus involved by the another way of the present invention, acquisition unit obtains the saturating of size ratio plane of reference bigger The measuring shape result in each region of minute surface.It can measurement range thereby, it is possible to accurately measure size ratio interferometer The shape of the lens face of bigger.
In shape measuring apparatus involved by the another way of the present invention, have：Storage part is previously stored with expression reference The shape information of the shape in face；And subtraction unit, before the operation based on the 1st operational part and the 2nd operational part, according to being stored in The shape of the plane of reference is individually subtracted from the measuring shape result in each region obtained by acquisition unit for the shape information of storage part Shape.Thereby, it is possible to inhibit the error of the measuring shape result of the lens face caused by the form error of the plane of reference.
In shape measuring apparatus involved by the another way of the present invention, the 1st operational part utilizes Zernike multinomials and power Any of series multinomial is fitted operation.Thereby, it is possible to the rotational symmetry ingredients of operation lens face.
In shape measuring apparatus involved by the another way of the present invention, the 2nd operational part utilizes Zernike multinomials and power Any of series multinomial is fitted operation.Thereby, it is possible to the asymmetrical ingredients of operation lens face.
Also, have for realizing the process for measuring shape of the purpose of the present invention：Obtaining step obtains and presses each region It measures the part as lens face and includes the shape and a part of and the 1st region weight in the 1st region at the face center of lens face Close and include measuring shape result obtained by the shape in the 2nd region of a part for the peripheral part of lens face；Be open synthesis processing Step, by the measuring shape result in the 2nd region obtained by obtaining step by having rotation pair centered on the center of face The configuration of title property is multiple in lens face configuration, and implements opening synthesis to the measuring shape result configured with the 2nd multiple regions Processing；1st calculation step, to being fitted operation by the shape that synthesis is handled that is open, to the rotation of operation lens face Turn symmetrical composition；The measuring shape result of 2nd calculation step, the 1st region to being obtained by obtaining step is fitted operation, To the asymmetrical ingredient of operation lens face；And the 3rd calculation step, according to the 1st calculation step and the fortune of the 2nd calculation step Calculate the global shape of result operation lens face.
Also, have for realizing the process for measuring shape of the purpose of the present invention：Obtaining step, by each area test The shape in a part for the peripheral part including lens face and the 1st region at face center and positioned at from the 1st region using face center as Position that center is rotated by 90 ° and include peripheral part a part and face center the 2nd region shape obtained by measuring shape knot Fruit；Opening synthesis processing step, when the position of 180 degree will be rotated centered on the center of face respectively from the 1st region and the 2nd region When being set as the 3rd region and 4 region, by the measuring shape result in each region respectively by having centered on the center of face The configuration of 180 degree rotational symmetry is configured at the 3rd region and the 4th region, and to the measuring shape knot in the 1st region to the 4th region Fruit applies opening synthesis processing；1st calculation step, to being fitted operation by the shape that synthesis is handled that is open, to The rotational symmetry ingredient of operation lens face；2nd calculation step, to being fitted fortune by the shape that synthesis is handled that is open It calculates, to the asymmetrical ingredient of operation lens face；And the 3rd operational part, according to the 1st calculation step and the 2nd calculation step The global shape of operation result operation lens face.
In process for measuring shape involved by the another way of the present invention, have：Step is projected, from interferometric optical system System and the interferometer for the injection part for measuring light is projected to lens face outgoing beam diameter ratio to lens face by interference optics The small measurement light of the diameter of lens face；Displacement step makes lens face be incident in relative to the relative position of interferometer to light is measured 1st position in the 1st region and measurement light are incident in the 2nd position displacement in the 2nd region；Image pickup step is shot by each region The measurement light for being reflected into each region of lens face is reflected with by configuring the plane of reference in the light path of interference optics Reference light interference light；And the 4th calculation step, the image pickup signal obtained by image pickup step is analyzed come each region of operation Shape, the operation result that obtaining step obtains the 4th calculation step is used as the measuring shape result in each region.
Invention effect
The shape measuring apparatus and process for measuring shape of the present invention can accurately be measured thoroughly with minimum measurement exponent number The global shape of minute surface.
Description of the drawings
Fig. 1 is the schematic diagram of the shape measuring apparatus of the 1st embodiment.
Fig. 2 is the schematic diagram of interferometer.
Fig. 3 is the definition graph of the optical axis state parallel and consistent with the optical axis of reference lens for illustrating to make lens.
Part (A) of Fig. 4 and (B) be partly for illustrating the definition graph to locate on lens face, the part (C) and (D) it is partly for illustrating the definition graph in the measuring shape result of the lens face for the measurement that respectively locates.
Fig. 5 is the block diagram for the electric structure for indicating apparatus main body.
Fig. 6 is the definition graph of 3 spherical aberration ingredients for illustrating lens face.
Fig. 7 is the definition graph of 3 astigmatism components for illustrating lens face.
Fig. 8 is the definition graph of the opening synthesis processing for illustrating to be synthesized processing unit progress by opening.
Fig. 9 is for illustrating froming the perspective of from the calculation process of 3 spherical aberration ingredients of whole region data operation lens face Bright figure.
Figure 10 is for illustrating the polynomial definition graphs of Zernike.
Figure 11 is operation place for illustrating 3 astigmatism components from the measuring shape result operation lens face of central area The definition graph of reason.
Figure 12 is for illustrating (45 degree) fortune of 3 astigmatism components (0 degree, 90 degree) and 3 astigmatism components from central area Calculate the explanation of 3 astigmatism components (0 degree, 90 degree) of the entire surface relative to lens face and the processing of 3 astigmatism components (45 degree) Figure.
Figure 13 is the definition graph of the processing of 3 astigmatism components for illustrating operation lens face.
Figure 14 is the definition graph of the calculation process of the global shape for illustrating lens face.
Figure 15 is the flow chart of the flow of the measuring shape processing for the lens face for indicating to be carried out by shape measuring apparatus.
The part (A), (B) in Figure 16 are partly for illustrating locating on the lens face in the 2nd embodiment Definition graph, the part (C), (D) are partly for illustrating the explanation in the measuring shape result of the lens face for the measurement that respectively locates Figure.
Figure 17 is the block diagram of the electric structure for the shape measuring apparatus for indicating the 2nd embodiment.
Figure 18 is for illustrating that the opening by the 2nd embodiment synthesizes the explanation for synthesizing and handling that is open of processing unit progress Figure.
Figure 19 is for illustrating froming the perspective of from the flow of the calculation process of the global shape of whole region data operation lens face Bright figure.
Figure 20 is to indicate that the measuring shape of the lens face of the lens carried out by the shape measuring apparatus of the 2nd embodiment is handled Flow flow chart.
Figure 21 is for illustrating that the opening by the 1st embodiment synthesizes another reality for synthesizing and handling that is open of processing unit progress Apply the definition graph of example.
Specific implementation mode
[shape measuring apparatus of the 1st embodiment]
Fig. 1 is the shape measuring apparatus 10 of the 1st embodiment of the global shape for the dome shape lens face 9a for measuring lens 9 Schematic diagram.As shown in Figure 1, shape measuring apparatus 10 has interferometer 12, image pickup part 13, mounting table 14 and shape measuring apparatus 10 apparatus main body 15.In addition, in the 1st embodiment, the lens face 9a for becoming measure object is concave surface, but may be convex Face, shape are not particularly limited.
Fig. 2 is the schematic diagram of interferometer 12.As shown in Fig. 2, interferometer 12 is so-called striking rope (Fizeau) type interferometer. In addition, as interferometer 12, the interferometer other than striking rope type can also be used.
Interferometer 12 has laser light source (injection part for being equivalent to the present invention) 20, beam diameter expansion lens 21, divides Beam device 22, lens 23, collimation lens 24, the reference lens 26 of tool area's plane of reference (also known as reference plane) 25 and imaging len 27. In addition, beam diameter expansion lens 21, beam splitter 22, lens 23, collimation lens 24 and reference lens 26 are equivalent to the present invention Interference optics.
Laser light source 20 is the light source of interferometer 12, such as projects He-Ne laser (wavelength X=632.8nm).The laser light He-Ne laser beams are projected with lens 21 to beam diameter expansion and be used as measurement light 30 in source 20.Beam diameter, which expands, uses lens 21 It is projected expanding from the beam diameter (Beam diameter) of the incident measurement light 30 of laser light source 20 to beam splitter 22.
Beam splitter 22 has light beam divisional plane 22a.Light beam divisional plane 22a, which is reflected to lens 23 from beam diameter, to be expanded with saturating The incident measurement light 30 of mirror 21.Also, light beam divisional plane 22a make from the directly transmission of the incident aftermentioned interference light 34 of lens 23 and to Imaging len 27 projects.
Lens 23 project the measurement light 30 reflected by light beam divisional plane 22a to collimation lens 24.Collimation lens 24 to from The incident measurement light 30 of lens 23 is collimated (parallel photochemical) and is projected to reference lens 26.
The lens face 9a smallers of the size ratio lens 9 of the plane of reference 25 of reference lens 26.To which shape measuring apparatus 10 is surveyed It is sized the shape of the lens face 9a than 25 bigger of the plane of reference.Here, the lens face 9a with 25 bigger of the size ratio plane of reference Lens 9 refer to the lens more brighter than reference lens 26, specifically, compared with reference lens 26, it is more for opening number, or The lens of person's F values smaller or bore bigger.
The plane of reference 25 is located at from the light path of the incident measurement light 30 of collimation lens 24, and a part for the measurement light 30 is made to return It penetrates as referring to light 32, and makes the remainder directly transmission of measurement light 30 and projected to the lens face 9a of lens 9.This When, the position (plane of reference 25 is at a distance from lens face 9a) of adjustment lens face 9a, and make the measurement light 30 projected from the plane of reference 25 Be normally incident in lens face 9a, from there through the measurement light 30 of lens face 9a reflection return to original light path and with as with reference to face The reference light 32 of 25 reflected light is interfered.
Here, the beam diameter of the measurement light 30 projected from the plane of reference 25 (interferometer 12) to lens face 9a is than lens face 9a Diameter smaller, therefore incident in lens face 9a there is the region for measuring light 30 to become to carry out shape by shape measuring apparatus 10 What is measured locates.Moreover, the measurement light 30 for being incident on lens face 9a is reflected by lens face 9a, the reflection of the measurement light 30 Light 30R returns to the light path of original measurement light 30 and is incident in the plane of reference 25 again.
The reflected light 30R of the plane of reference 25 is incident on the interference of above-mentioned reference light 32 and as interference light 34.Striking rope type interference In instrument 12, only because there are air layers between the plane of reference 25 and lens face 9a, and measurement light 30 more more forwardly of than the plane of reference 25 Light path is shared.Therefore, in interference light 34, the difference of the plane of reference 25 and lens face 9a become interference fringe.Moreover, the plane of reference 25 with The difference of lens face 9a essentially becomes the shape of lens face 9a.
In addition, shape measuring apparatus 10 is used as the figure from the interference fringe based on interference light 34 using strip-scanning method As the method for the shape of data operation lens face 9a, therefore 26 illustration omitted of reference lens, such as the item by having piezoelectric element Line scanning adapter is kept.The strip-scanning adapter makes reference lens 26 to its optical axis side when carrying out strip-scanning measurement To fine motion.
Interference light 34 is incident in the light beam divisional plane 22a of beam splitter 22 via collimation lens 24 or lens 23, and directly thoroughly It penetrates the light beam divisional plane 22a and is incident in imaging len 27.
Imaging len 27 makes (also known as to image flat from the incident interference light 34 of beam splitter 22 in the imaging surface of image pickup part 13 Face) imaging.
Image pickup part 13 uses CCD (Charge Coupled Device) imaging sensors or CMOS (Complementary Metal Oxide Semiconductor) imaging sensor (image-forming component) etc..The image pickup part 13 by imaging len 27 to being existed The interference light 34 of imaging surface imaging is shot, and obtains the image based on the interference fringe by shooting obtained image pickup signal Data (hereinafter referred to as interference fringe image data), to which the interference fringe image data are output to apparatus main body 15.
In addition, shape measuring apparatus 10 is used as the image data operation lens from interference fringe using strip-scanning method The method of the shape of face 9a, therefore image pickup part 13 locates by each and is carried out continuously obtaining for multiple interference fringe image data It takes.
Back to Fig. 1, mounting table 14 is equivalent to the displacement portion of the present invention, this 3 axis directions can adjust position to XYZ Mode keep lens 9, and keep the lens 9 in a manner of it can surround the rotation of its optical axis L.The mounting table 14 has XYZ Platform 41 and the rotating platform 44 being arranged on XYZ platforms 41.XYZ platforms 41 are with being capable of the X-direction into figure, Y-axis respectively The lens 9 that the mode of direction and Z-direction adjustment position keeps rotating platform 44 and kept by the rotating platform 44.
Rotating platform 44 keeps lens 9 in a manner of it can surround the rotation of its optical axis L.Also, rotating platform 44 is with opposite So that the optical axis L of lens 9 is tilted in the optical axis O of reference lens 26 and is equivalent to angle of inclinationThe state of the amount of degree keeps lens 9.By This, arbitrary inclination is equivalent in the optical axis L for making lens 9 relative to optical axis O inclinationsIn the state of the amount of degree, it can make Mirror 9 is equivalent to the amount of arbitrary rotation angle α degree centered on its optical axis L around optical axis L rotation.In addition, angle of inclinationThat spends is big It is small to be adjusted by changing the type of rotating platform 44.Also, when rotating platform 44 itself has adjustment angle of inclination It, can be by rotating platform 44 by angle of inclination when functionDegree is adjusted to any angle.
By rotating platform 44, the optical axis L of lens 9 is made to be equivalent to angle of inclination relative to optical axis O inclinationsThe amount of degree, by This can make measurement light 30 be incident in the end regions of lens face 9a.Moreover, making optical axis L tiltIn the state of degree, make lens 9 are equivalent to the amount of rotation angle α degree around the rotation of its optical axis L, and thus, it is possible to change to measure the incident region of light 30.
In this way, by adjusting XYZ platforms 41 and rotating platform 44 (hereinafter, suitably referred to as each platform 41,44), it can Adjust relative positions of the lens face 9a of lens 9 relative to interferometer 12.As a result, it is possible to survey is freely adjusted on lens face 9a Determine the incident region of light 30.In addition, if relative positions of the lens face 9a of lens 9 relative to interferometer 12 can be adjusted, Then 12 displacement of interferometer can for example be made to make 9 displacement of lens to substitute.
Fig. 3 is the state (inclination angle parallel and consistent with the optical axis O of reference lens 26 for illustrating the optical axis L for making lens 9 Degree=0 degree) definition graph.In addition, in the 1st embodiment, the angle of inclination of rotating platform 44 is adjusted to 0 using fixture 44A Degree, but lens 9 can also be directly configured on XYZ platforms 41.Also, it has been observed that rotating platform 44 itself can have inclination Adjustment mechanism, and adjust inclined method and be not particularly limited.
As shown in figure 3, the inclination of adjustment rotating platform 44 is flat relative to optical axis O (with reference to figure 1) to make the optical axis L of lens 9 It goes and consistent, thus enables that and measure the central area that light 30 is incident in lens face 9a.
< is about the > that locates
The measurement on lens face 9a when part (A) of Fig. 4, (B) are for illustrating to measure the shape of lens face 9a partly The definition graph of position.Also, part (C) of Fig. 4, (D) are partly used to illustrate each shown in part (A) of Fig. 4, the part (B) The definition graph of the measuring shape result of the lens face 9a for the measurement that locates.
In 1st embodiment, when measuring the shape of lens face 9a, the inclination of lens 9 is adjusted by rotating platform 44, by This makes portion (B) of end position and Fig. 4 shown in the parts (A) of lens face 9a relative to the relative position of interferometer 12 to Fig. 4 The two displacements that locate of center shown in point, to be measured respectively locating.Here, end position is suitable In the 2nd position of the present invention, center is equivalent to the 1st position of the present invention.
End position shown in part (A) of Fig. 4 is to measure light 30 to be incident in a part of region as lens face 9a End regions RE (the 2nd region for being equivalent to the present invention) locates.End regions RE is a part and aftermentioned central area RC overlaps and includes the region of a part for the peripheral part of lens face 9a." part for peripheral part " described herein refers to, when When the radius of the minute surface of lens face 9a is set as r1, the region of 0.7 × r1 to 1.0 × r1.
About the range of end regions RE, the angle of inclination of the optical axis L of change lens 9 can be passed throughThe size of degree, lens 9 position on the directions XYZ etc. adjusts.For example, in the 1st embodiment, angle of inclination is determined by the type of lens 9Degree and Position etc. on the directions XYZ.Therefore, according to the content of the determination, each platform 41,44 is adjusted by operator, so as to make Minute surface 9a relative to interferometer 12 relative position to end position displacement.
Center shown in part (B) of Fig. 4 is to measure light 30 to be incident in a part of region as lens face 9a Central area RC (the 1st region for being equivalent to the present invention) locates.Central area RC is to be made with the face center of lens face 9a Centered on region.In addition, in the 1st embodiment, the center of central area RC is consistent with the face center of lens face 9a, if in but Heart district domain RC includes the face center of lens face 9a, then in regulation permissible range, the center of central area RC can be relative to saturating The face off-centring of minute surface 9a.Specifically, when the radius of central area RC is set as r2, the centre bit of preferred lens face 9a In the range of the center to 0.3 × r2 from central area RC.
Lens face 9a is set, to when the displacement of center, to use fixture 44A to adjust first relative to the relative position of interferometer 12 The inclination of rotating platform 44, so that the angle of inclination of the optical axis L of lens face 9a becomes 0 degree.Then, XYZ is adjusted by operator to put down Platform 41, so that the face center of lens face 9a is consistent with optical axis O (including roughly the same situation).In addition, the model of central area RC Enclosing can be adjusted by XYZ platforms 41, such as in the 1st embodiment, determine lens 9 on the directions XYZ by the type of lens 9 Position.
In this way, in the 1st embodiment, the angle of inclination of the optical axis L of lens face 9a is made to existDisplacement between degree and 0 degree, thus It can make relative position end position and center between displacements of the lens face 9a relative to interferometer 12.As a result, such as Part (C) of Fig. 4, shown in the part (D), detailed content will be described later, but the end regions RE of lens face 9a can be obtained Measuring shape result 45C in measuring shape result 45E and central area RC.
In addition, in the 1st embodiment, without making rotating platform 44 be rotated around optical axis L, therefore end position and centre bit Rotation angle in setting is 0 degree.Also, in the 1st embodiment, lens face 9a phases are made by the manual operation carried out by operator Relative position displacement for interferometer 12, but can also be by the control of aftermentioned control unit 46 (with reference to figure 5) etc. come automatic It carries out.
The structure > of < apparatus main bodies
Fig. 5 is the block diagram for the electric structure for indicating apparatus main body 15.As the apparatus main body 15, such as personal meter can be used Calculation machine (including display screen).As shown in figure 5, if substantially distinguishing, apparatus main body 15 has control unit 46, storage part 47, operation Input unit 48 and display unit 49.
Control unit 46 for example by include CPU (Central PROcessing Unit) variously-shaped operational part or Reason portion and constitute, according to the control signal from operation inputting part 48, execute the various programs or information read from storage part 47, Thus each portion of centralized control shape measuring apparatus 10.Also, detailed content will be described later, but control unit 46 is according in the past State the global shape of the lens face 9a of the interference fringe image data operation lens 9 of the input of image pickup part 13.
It is stored in storage part 47 and (is equivalent to the shape of the present invention including measuring shape program 51 and plane of reference shape information Information) 52 various information.Measuring shape program 51 is used in the fortune of the global shape of the lens face 9a carried out by control unit 46 In calculation.Plane of reference shape information 52 is the information of the shape for the plane of reference 25 (with reference to figure 2) for indicating reference lens 26, such as the It is the information of the deviation of the shape of the practical plane of reference 25 of the design value relative to the plane of reference 25 in 1 embodiment.
Operation inputting part 48 is used in the survey of the measuring shape of lens face 9a started involved by operation and the measuring shape Determine the input of input data.About input data is measured, in addition to lens 9 and the respective F values and spotlight diameter of reference lens 26, Detailed content will be described later, the rotation angle α degree on the optical axis L periphery of the lens 9 when further including measuring shape, lens 9 The angle of inclination of optical axis LDegree, the analysis data number on optical axis L periphery, image pickup part 13 imaging sensor each pixel length And the valid pixel number of imaging sensor.In addition, " length of each pixel of imaging sensor " described herein is aftermentioned The value being open used in synthesis processing indicates that (interferometer 12 is opened relative to captured opening for 1 pixel of imaging sensor Mouthful) become several mm.
Display unit 49 is, for example, liquid crystal display etc., and show the global shape of the lens face 9a carried out by control unit 46 Operation result.
The structure > of < control units
Control unit 46 respectively forwardly states end position and centre bit in lens face 9a relative to the relative position of interferometer 12 When set moves, end regions RE from image pickup part 13 to lens face 9a and central area RC is obtained, i.e. total two regions are done Relate to stripe image data.Then, control unit 46 is used as saturating according to the interference fringe image data operation in two acquired regions 3 spherical aberration ingredients of the rotational symmetry ingredient of the entire surface of minute surface 9a and the rotation of the entire surface as lens face 9a are non-right Claim 3 astigmatism (astigmatisms of ingredient：Astigmatism) ingredient.Then, control unit 46 is according to these spherical aberration ingredients and astigmatism The global shape of the operation result operation lens face 9a of ingredient.
Fig. 6 is the definition graph of 3 spherical aberration ingredients for illustrating lens face 9a, and the horizontal axis of Fig. 6 indicates the straight of lens 9 Diameter direction, the longitudinal axis indicate deviations of the lens face 9a relative to standard spherical surface (illustration omitted).In addition, in Fig. 6, by deviation ratio reality Border situation is more emphasized and is illustrated.
Lens 9 are usually manufactured by processing (grinding) based on rotary motion, therefore are easy tod produce and revolved relative to optical axis L Turn symmetrical form error.Therefore, as shown in fig. 6,3 spherical aberration ingredients indicate to produce (when grinding) in the manufacture of lens 9 Form errors of the raw lens face 9a relative to standard spherical surface, and be the ingredient (shape) relative to optical axis L rotational symmetry.
Fig. 7 is the definition graph of 3 astigmatism components for illustrating lens face 9a.It is generated in the processing (grinding) of lens 9 Mastery shape is 3 astigmatism components in the shape of asymmetrical.As shown in fig. 7,3 astigmatism components are the system in lens 9 It is bent with 90 degree of spacing sines highly to surround optical axis L for the saddle ingredient (saddle shape) of the lens face 9a generated (when grinding) when making Threadiness variation (top/bottom/top/bottom).In addition, about 3 astigmatism components, the section shape from its center to top section Shape becomes along Y=X22 functions shape (with reference to figure 12), from its center to the cross sectional shape of bottom part become along Y=- X22 functions shape.
In this way, control unit 46 is conceived to and is easy in the manufacture of lens 9 to generate (when grinding) and can be in the manufacture of lens 9 Modified 3 spherical aberration ingredients and 3 astigmatism components in process (grinding process) and the global shape for calculating lens face 9a.
Back to Fig. 5, control unit 46 is by executing from the measuring shape program 51 that storage part 47 is read as acquisition unit 59 and it is equivalent to the shape operational part 60 of the 4th operational part of the present invention, subtraction unit 61, opening synthesis processing unit 62, quite It is transported in the spherical aberration ingredient operational part 63 of the 1st operational part of the present invention, the astigmatism component for the 2nd operational part for being equivalent to the present invention Calculation portion 64 and be equivalent to the present invention the 3rd operational part global shape operational part 65 and function.
Acquisition unit 59 is, for example, (including to be connect via communication networks such as networks with 13 wired connection or wireless connection of image pickup part The case where) interface.The acquisition unit 59 obtains end regions RE and central area the RC (reference of lens face 9a from image pickup part 13 successively Fig. 4), add up to the interference fringe image data in two regions.In addition, acquisition unit 59, which can obtain, is stored in advance in storage card etc. The interference fringe image data of recording medium, in this case, loading the filling portion of storage card becomes acquisition unit 59.
Shape operational part 60 is equipped in acquisition unit 59.Shape operational part 60 carry out based on strip-scanning method analysis (from Each multiple interference image data to locate calculates phase, and carries out phase connection), to operation end regions RE and The shape of central area RC.Acquisition unit 59 can be obtained as shown in part (C) of earlier figures 4 and part (D) of Fig. 4 as a result, The measuring shape result 45C of the measuring shape result 45E and central area RC of end regions RE.Moreover, acquisition unit 59 is to subtraction Operational part 61 exports the measuring shape result 45E and measuring shape result 45C in each region.
Subtraction unit 61 subtracts respectively from the measuring shape result 45E and measuring shape result 45C inputted by acquisition unit 59 Go the shape of the plane of reference 25 based on the plane of reference shape information 52 read by storage part 47.In addition, subtraction processing exists It is carried out before aftermentioned spherical aberration ingredient operational part 63 (opening synthesis processing unit 62) and the operation of astigmatism component operational part 64.And And subtraction unit 61 to opening synthesis processing unit 62 export subtraction after measuring shape result 45E, and to astigmatism at Operational part 64 is divided to export the measuring shape result 45C after subtraction.Detailed content will be described later, by carrying out this subtract Method calculation process can inhibit the error of the measuring shape result of the lens face 9a caused by the form error of the plane of reference 25.
The operation of < spherical aberration ingredients：Opening synthesis processing >
As shown in earlier figures 6,3 spherical aberration ingredients of lens face 9a are relative to optical axis L rotational symmetry.Therefore, will subtract The measuring shape result 45E of end regions RE after method operation rotates in such a way that all areas on the peripheries lens face 9a are embedded in While configure, so as to find out 3 spherical aberration ingredients.
Fig. 8 is the definition graph for illustrating to synthesize the opening synthesis processing that processing unit 62 carries out by opening.As shown in figure 8, Opening synthesis processing unit 62 is by the measuring shape result 45E of the end regions RE after subtraction with all of the peripheries lens face 9a The mode that region is embedded in, by the configuration with rotational symmetry centered on the face center with lens face 9a in lens face 9a Circumferential arrangement it is multiple.In addition, in the 1st embodiment, by measuring shape result 45E centered on the face center of lens face 9a 4 are configured with 90 degree of interval.
First, as shown in part (A) of Fig. 8, opening synthesis processing unit 62 does not make the measuring shape result after subtraction 45E rotates and is configured at the periphery of lens face 9a at (0 degree).Later, as shown in part (B) of Fig. 8, opening synthesis processing unit 62 From initial allocation position with the 2nd allocation position after being rotated by 90 ° centered on the center of face, by the shape after subtraction Shape measurement result 45E is carried out by the configuration (state after being rotated by 90 °) with rotational symmetry centered on the center of face Configuration.
Then, as shown in part (C) of Fig. 8, opening synthesis processing unit 62 is made from initial allocation position with face center Centered on rotation 180 degree after the 3rd allocation position, the measuring shape result 45E after subtraction is passed through with face center Centered on the configuration (rotation 180 degree after state) with rotational symmetry configured.Later, such as part (D) of Fig. 8 Shown, opening synthesizes the 4th that processing unit 62 is rotated centered on from initial allocation position with face center after 270 degree and matches Measuring shape result 45E after subtraction is passed through the configuration with rotational symmetry centered on the center of face by seated position (state after 270 degree of rotation) is configured.
In addition, end regions RE is the region with required area, thus 90 degree described herein, 180 degree, in 270 degree Including substantially 90 degree (in the range of 90 degree ± 10 degree), substantially 180 degree (in the range of 180 degree ± 10 degree), substantially 270 degree (270 In the range of ± 10 degree of degree).
Also, be configured at the quantity of the measuring shape result 45E of the end regions RE on the peripheries lens face 9a according to relative to The size of the measurement range of the interferometer 12 of the size of lens face 9a determines.The quantity of the measuring shape result is set to lead to Cross the quantity that operation inputting part 48 is inputted as " the analysis data number on optical axis L periphery ".
Then, opening synthesis processing unit 62 is to there is the measuring shape of 4 end regions RE in lens face 9a circumferential arrangements As a result implement opening synthesis processing, and engage the measuring shape result 45E of 4 end regions RE, to generate (E) such as Fig. 8 Whole region data 69 shown in part.
Lens face 9a at this time is spherical surface, thus the synthesis processing unit 62 that is open can utilize it is recorded in above patent document 2 Method find out whole region data 69.Specifically, opening synthesis processing unit 62 is used as survey using by operation inputting part 48 Determine the rotation angle α degree (0 degree) on the optical axis L periphery of the lens 9 of input data input and the angle of inclination of optical axis LDegree, and profit With the polar coordinate system of lens face 9a, the image pickup plane of image pickup part 13 plane coordinate system and be configured to opening synthesis share The measuring shape result 45E coordinates of 4 end regions RE are transformed to corresponding with shared coordinate system by the correspondence of coordinate system The different synthesis shape in each region.Here, needing the information that 1 pixel of imaging sensor is several mm in coordinate transform, but close In the information, can be obtained from " length of each pixel of imaging sensor " for being input to aforementioned operation input unit 48.Moreover, Opening synthesis processing unit 62 synthesis different to each region shape implements opening synthesis processing, and finds out the entire of lens face 9a Area data 69, to which whole region data 69 are output to spherical aberration ingredient operational part 63.This opening synthesis processing Specific method is substantially the same with method recorded in above patent document 2, therefore omits illustrate herein.
In addition, it has been observed that opening synthesis processing unit 62 is to the end regions after the subtraction based on subtraction unit 61 The measuring shape result 45E of RE carries out opening synthesis.It is synthesized as a result, by being open, can prevent from producing in whole region data 69 The GCMS computer shape of the error of the plane of reference 25 (deviation of the shape of the practical plane of reference 25 of the design value relative to the plane of reference 25) Shape error.For example, when the error of the plane of reference 25 is with 2 function representations, using 1/2 region of lens face 9a as end regions RE and measure, and opening synthesis processing unit 62 by be open synthesis find out whole region data 69 in the case of, the plane of reference 25 Error due to increasing to 4 times with 2 function representations.Therefore, which is λ/20 (≈ 30nm：Wherein λ=632.8nm) When, whole region data 69 become 120nm.To be handled, can be pressed down by carrying out the subtraction based on subtraction unit 61 Make the error of the measuring shape result of the lens face 9a caused by the error of the plane of reference 25.
The operation of < spherical aberration ingredients：Fitting operation >
Fig. 9 is for illustrating 3 times by spherical aberration ingredient operational part 63 from 69 operation lens face 9a of whole region data The definition graph of the calculation process of spherical aberration ingredient 71.As shown in figure 9, the part (A) of spherical aberration ingredient operational part 63 to Fig. 9 Shown in whole region data 69 carry out using Zernike (also known as Ze Nike or Zernike) fitting of a polynomial operation, by 3 spherical aberration ingredients 71 shown in part (B) of this arithmograph 9.Specifically, spherical aberration ingredient operational part 63 makes entirely Area data 69 is similar to Zernike multinomials to calculate Zernike coefficients, thus 3 spherical aberration ingredients 71 of operation.With Under, the calculation process of 3 spherical aberration ingredients 71 is illustrated.
Polar coordinates centered on the optical axis L of lens face 9a are set as (ρ, θ), with Wi(ρ, θ) [wherein, i is 1 or more And K integers below, K are the valid pixel number of the imaging sensor of image pickup part 13] it is denoted as the shape data of lens face 9a Whole region data 69 when, which is indicated with the approximate function W (ρ, θ) as shown in following formula (1)i(ρ, θ).In addition, K can be by Operation inputting part 48 is set.
[numerical expression 1]
Here, in formula (1), fj(ρ, θ) is j-th of Zernike multinomial, ZjIt is corresponding with j-th of Zernike multinomial Zernike coefficients, J be for the polynomial quantity of approximate Zernike.In addition, J's is sized to accurately to count Calculate the size of the degree of 3 spherical aberration ingredients 71 or Zernike coefficients corresponding with aftermentioned 3 astigmatism components.
Figure 10 is for illustrating the polynomial definition graphs of Zernike.As shown in Figure 10, about Zernike multinomials, if will N is set as 0 or more integer, and m is set as integer, then is prescribed, is had by the exponent number m of the exponent number n of radiation direction and direction of rotation When be referred to as the Zernike multinomials of (n, m) pattern.Here, exponent number n becomes the most high-order of the ρ in Zernike multinomials Exponential.Also, allocation position when indicating to arrange each (n, m) pattern in the proper sequence with serial number j sometimes.
Zernike coefficients are related with Seidel aberration as is well known, in shape measuring apparatus 10 it is important that Z as Zernike coefficients corresponding with 3 spherical aberration ingredients9With as corresponding with aftermentioned 3 astigmatism components The Z of Zernike coefficients5、Z6.Spherical aberration ingredient operational part 63 makes 69 approximation Zernike multinomials of whole region data, specifically For, it is utilized and such as each function shown in Fig. 10 is multiplied and is added with unknown counting, and by measurement shape and most Small square law finds out the fitting operation of least square method of unknowm coefficient etc., to operation Zernike coefficients Z9.Then, spherical surface Aberration ingredient operational part 63 is according to Zernike coefficients Z9Operation result, can from 3 spherical aberrations of above-mentioned formula (1) operation at Divide 71 (with reference to parts (B) of figure 9).Spherical aberration ingredient operational part 63 exports the operation result of 3 spherical aberration ingredients 71 To global shape operational part 65.
The operation > of 3 astigmatism components of <
Figure 11 is the measuring shape knot for illustrating the central area RC by astigmatism component operational part 64 after subtraction The definition graph of the calculation process of 3 astigmatism components 73 of fruit 45C operation lens faces 9a.As shown in figure 11, astigmatism component operational part The measuring shape result 45C of central area RC shown in part (A) of 64 couples of Figure 11 carries out utilizing Zernike fitting of a polynomials Operation, thus 3 astigmatism components 73 shown in part (B) of arithmograph 11.
First, astigmatism component operational part 64 keeps the measuring shape result 45C of the central area RC after subtraction approximate Zernike multinomials, specifically, carry out the fitting operations such as aforementioned least square method, thus operation and 3 astigmatism components (0 Degree, 90 degree) corresponding Zernike coefficients Z5The corresponding Zernike coefficients Z with 3 times astigmatism component (45 degree)6.Then, astigmatism Ingredient operational part 64 is according to Zernike coefficients Z5、Z6Operation result, from 3 astigmatism of above-mentioned formula (1) arithmetic center region RC Ingredient (0 degree, 90 degree) and 3 astigmatism components (45 degree).
Figure 12 is for illustrating 3 astigmatism components (0 degree, 90 degree) from central area RC and 3 astigmatism components (45 degree) Operation is relative to 3 astigmatism components (0 degree, 90 degree) of the entire surface of lens face 9a and the processing of 3 astigmatism components (45 degree) Definition graph.
As shown in earlier figures 7,3 astigmatism components are saddle ingredient, and the cross sectional shape at center to top section becomes along Y =X22 functions shape, and its center to bottom part cross sectional shape become along Y=-X22 functions shape. That is, central area RC 3 astigmatism components (0 degree, 90 degree) and 3 astigmatism components (45 degree) with relative to the entire of lens face 9a 3 astigmatism components (0 degree, 90 degree) in face and 3 (45 degree) of astigmatism components become similar shape.To astigmatism component operational part 64 can be from 3 astigmatism components (0 degree, 90 degree) of central area RC and 3 astigmatism component (45 degree) operations relative to lens face 3 astigmatism components (0 degree, 90 degree) of the entire surface of 9a and 3 astigmatism components (45 degree).
As shown in figure 12, for example, the radius for illustrating the central area RC of lens face 9a is 50mm, lens face 9a's is whole The radius in a face is 100mm, 3 astigmatism components (0 degree, 90 degree) (45 degree) respective center of central area RC to top section Height be A the case where.In this case, relative to 3 astigmatism components of the entire surface of lens face 9a (0 degree, 90 degree) (45 Degree) height of respective center to top section becomes 4A=A × (100mm/50mm)2.It is same as below, according to central area RC 3 astigmatism components (0 degree, 90 degree) (45 degree) respective center to the height of bottom part, can also find out relative to lens face 3 astigmatism components (0 degree, 90 degree) (45 degree) respective center of the entire surface of 9a to bottom part height.
In this way, astigmatism component operational part 64 is multiplied by [thoroughly 3 astigmatism components (0 degree, 90 degree) (45 degree) of central area RC The size (diameter) of size (diameter)/central area RC of minute surface 9a]2, thus find out 3 of the entire surface relative to lens face 9a Secondary astigmatism component (0 degree, 90 degree) (45 degree).In addition, multiplying in 3 astigmatism components (0 degree, 90 degree) (45 degree) to central area RC With [the F values of F values/reference lens 26 of lens 9]2In the case of similarly find out 3 of entire surface relative to lens face 9a Secondary astigmatism component (0 degree, 90 degree) (45 degree).
Figure 13 is the definition graph of the processing of 3 astigmatism components 73 for illustrating operation lens face 9a.As shown in figure 13, it dissipates Operation result 73a and 3 astigmatism components (45 of the light ingredient operational part 64 to 3 astigmatism components (0 degree, 90 degree) of lens face 9a Degree) operation result 73b synthesized, to operation lens face 9a 3 astigmatism components 73.Then, astigmatism component operational part The operation result of 3 astigmatism components 73 of lens face 9a is output to global shape operational part 65 (with reference to figure 5) by 64.
Figure 14 is the calculation process of the global shape 75 of the lens face 9a for illustrating to be carried out by global shape operational part 65 Definition graph.Global shape operational part 65 shown in part (A) such as Figure 14 from spherical aberration ingredient operational part 63 by inputting 3 spherical aberration ingredients 71 operation result with such as part (B) of Figure 14 shown in from astigmatism component operational part 64 input 3 The add operation of the operation result of secondary astigmatism component 73 finds out the global shape of the lens face 9a as shown in part (C) of Figure 14 75.The operation result of the global shape 75 is stored in storage part 47 (with reference to figure 5), and is shown at display unit 49 (with reference to figure 5).
[effect of the shape measuring apparatus of the 1st embodiment]
Then, using Figure 15, to the shape of the lens face 9a of the lens 9 carried out by the shape measuring apparatus 10 of above structure Measurement processing (process for measuring shape) illustrates.Figure 15 is the shape for the lens face 9a for indicating to be carried out by shape measuring apparatus 10 Measure the flow chart of the flow of processing.As shown in figure 15, first, operator is by the reference lens 26 of the interferometer 12 of measured in advance Plane of reference shape information 52 apparatus main body 15 is input to by operation inputting part 48, and the plane of reference shape information 52 is stored In storage part 47 (step S1).
Then, [the F values and optically focused of lens 9 are straight by the measurement input data determined corresponding to type of lens 9 etc. by operator Diameter, rotation angle α degree (0 degree), angle of inclinationEach pixel of degree, the analysis data number on optical axis L periphery, imaging sensor The valid pixel number etc. of length, imaging sensor] it is input to apparatus main body 15 (step S2).Input data is measured as a result, to be deposited It is stored in storage part 47.
The operation > of 3 spherical aberration ingredients of <
Operator is after the input of plane of reference shape information 52 and measurement input data (can also be before input), by lens 9 are arranged on the rotating platform 44 of mounting table 14.Incline as a result, relative to the optical axis O of reference lens 26 in the optical axis L for making lens 9 Tiltedly it is equivalent to angle of inclinationIn the state of the amount of degree, lens 9 keep (step S3) by rotating platform 44.That is, lens face 9a is opposite It is arranged at end position (with reference to part (A) of figure 4) in the relative position of interferometer 12 and (is equivalent to the displacement steps of the present invention Suddenly).
Start to operate if operator carries out measuring shape by operation inputting part 48, from laser light source 20 to lens face 9a The outgoing beam diameter measurement light 30 (He-Ne laser beam) smaller than the diameter of lens face 9a (is equivalent to the injection step of the present invention Suddenly).The measurement light 30 is incident in the end regions RE (rotation angles 0 of lens face 9a via beam splitter 22 and reference lens 26 etc. Degree, angle of inclinationDegree).Then, it measures light 30 to reflect in end regions RE, the reflected light 30R of the measurement light 30 is returned originally It measures the light path of light 30 and is incident in the plane of reference 25 again.Then, reflected light 30R and the reference light 32 reflected by reference to face 25 Interference and become interference light 34, the interference light 34 via beam splitter 22 etc., and by imaging len 27 image pickup part 13 camera shooting Face is imaged.
Image pickup part 13 shoots the interference light 34 being imaged in imaging surface by imaging len 27, to obtain interference item Print image data, and the interference fringe image data are output to apparatus main body 15 (the shooting step for being equivalent to the present invention).By This, terminates the measuring shape (strip-scanning measurement) (step S4) of end regions RE.
The acquisition unit 59 of apparatus main body 15 obtains the interference fringe image data of the end regions RE inputted from image pickup part 13. Then, shape operational part 60 carries out the analysis based on well known strip-scanning method to interference fringe image data, to operation The shape of end regions RE (step S5 is equivalent to the 4th calculation step of the present invention).Acquisition unit 59 can obtain end as a result, The measuring shape result 45E (obtaining step for being equivalent to the present invention) of region RE, and acquired measuring shape result 45E is defeated Go out to subtraction unit 61.
Subtraction unit 61 is subtracted from the measuring shape result 45E that is inputted by acquisition unit 59 based on being read by storage part 47 The shape (step S6) of the plane of reference 25 of plane of reference shape information 52.Thereby, it is possible to inhibit the form error because of the plane of reference 25 to draw The error of the measuring shape result 45E of the end regions RE risen.Then, subtraction unit 61 is by the measuring shape after subtraction As a result 45E is output to opening synthesis processing unit 62.
Opening synthesis processing unit 62 first according to be input to operation inputting part 48 optical axis L periphery analysis data number ( This is " 4 "), the measuring shape result 45E of subtraction treated end regions RE is passed through with the face center of lens face 9a Centered on rotational symmetry configuration configure 4 (0 degree, 90 degree, 180 degree, 270 degree：With reference to figure 8 (A) part~ (D) part).
Then, opening synthesis processing unit 62 utilizes the rotation on the optical axis L periphery of the lens 9 inputted by operation inputting part 48 The angle of inclination of angle [alpha] degree (0 degree) and optical axis LDegree, and by method recorded in above patent document 2, in lens face The circumferential arrangement of 9a has 4 measuring shape result 45E to implement opening synthesis processing, and (step S7 is equivalent to the opening of the present invention Synthesize processing step).Whole region data 69 are found out as a result,.At this point, opening synthesis processing unit 62 is to being based on subtraction unit 61 Measuring shape result 45E after subtraction carries out opening synthesis, therefore can prevent from generating synthesis in whole region data 69 The form error of the error of the plane of reference 25.Then, whole region data 69 are output to sphere mapping by opening synthesis processing unit 62 Poor ingredient operational part 63.
Spherical aberration ingredient operational part 63 utilizes the whole region data 69 inputted from opening synthesis processing unit 62 Zernike fitting of a polynomial operations, to calculate Zernike coefficient (step S8) corresponding with 3 spherical aberration ingredients. Then, according to the result of calculation, 63 operation of spherical aberration ingredient operational part, 3 spherical aberration ingredients 71 are (with reference to portion (B) of figure 9 Point) (step S9 is equivalent to the 1st calculation step of the present invention).Spherical aberration ingredient operational part 63 is by 3 spherical aberration ingredients 71 Operation result be output to global shape operational part 65.
The operation > of 3 astigmatism components of <
Operator adjusts the inclination of rotating platform 44 using fixture 44A and is set as the angle of inclination of the optical axis L of lens 9 0 degree, and adjust XYZ platforms 41 (step S10) in a manner of keeping the face center of lens face 9a consistent with optical axis O.Lens as a result, Face 9a is arranged on center (with reference to part (B) of figure 4) relative to the relative position of interferometer 12 and (is equivalent to the present invention's Displacement step).
Start to operate if operator carries out measuring shape by operation inputting part 48, from laser light source 20 to lens face 9a The outgoing beam diameter measurement light 30 (He-Ne laser beam) smaller than the diameter of lens face 9a (is equivalent to the injection step of the present invention Suddenly).The measurement light 30 is incident in the central area RC (rotation angles 0 of lens face 9a via beam splitter 22 and reference lens 26 etc. Degree, 0 degree of angle of inclination).Then, it measures light 30 to reflect in central area RC, the reflected light 30R of the measurement light 30 is returned originally It measures the light path of light 30 and is incident in the plane of reference 25 again.Moreover, reflected light 30R and the reference light 32 reflected by reference to face 25 Interfere and becomes interference light 34.The interference light 34 via beam splitter 22 etc., and by imaging len 27 image pickup part 13 camera shooting Face is imaged.
Image pickup part 13 shoots the interference light 34 being imaged in imaging surface by imaging len 27, to obtain interference item Print image data, and the interference fringe image data are output to apparatus main body 15 (the shooting step for being equivalent to the present invention).By This, terminates the measuring shape (strip-scanning measurement) (step S11) of central area RC.
If the acquisition unit 59 of apparatus main body 15 obtains the interference fringe image number of the end regions RE inputted from image pickup part 13 According to then shape operational part 60 carries out the analysis based on well known strip-scanning method to interference fringe image data, to operation The shape of central area RC (step S12 is equivalent to the 4th calculation step of the present invention).Acquisition unit 59 can obtain center as a result, The measuring shape result 45C (obtaining step for being equivalent to the present invention) of region RC, and acquired measuring shape result 45C is defeated Go out to subtraction unit 61.
Subtraction unit 61 is subtracted from the measuring shape result 45C of the central area RC inputted by acquisition unit 59 based on by depositing The shape (step S13) of the plane of reference 25 for the plane of reference shape information 52 that storage portion 47 is read.Thereby, it is possible to inhibit because of the plane of reference 25 Form error caused by central area RC measuring shape result 45C error.Then, subtraction unit 61 is by subtraction Measuring shape result 45C afterwards is output to astigmatism component operational part 64.
Astigmatism component operational part 64 carries out Zernike is utilized more to the measuring shape result 45C after subtraction first The fitting operation of formula, to operation Zernike coefficients corresponding with 3 times astigmatism component (0 degree, 90 degree) and with 3 astigmatism at Divide (45 degree) corresponding Zernike coefficients (step S14).Then, as shown in earlier figures 12, astigmatism component operational part 64 is to center 3 astigmatism components (0 degree, 90 degree) (45 degree) of region RC are multiplied by the [size of size (diameter)/central area RC of lens face 9a (diameter)]2Or [the F values of F values/reference lens 26 of lens 9]2.Operation is dissipated relative to 3 times of entire surface of lens face 9a as a result, Light ingredient (0 degree, 90 degree) (45 degree).
Then, as shown in earlier figures 13,3 astigmatism of the astigmatism component operational part 64 to the entire surface relative to lens face 9a The operation result 73a of ingredient (0 degree, 90 degree) and the operation result 73b of 3 astigmatism components (45 degree) are synthesized, to operation 3 astigmatism components 73 of the entire surface of lens face 9a (step S15 is equivalent to the 2nd calculation step of the present invention).Astigmatism component is transported The operation result of 3 astigmatism components 73 of lens face 9a is output to global shape operational part 65 by calculation portion 64.
The operation > of the global shape of < lens faces
As shown in earlier figures 14, global shape operational part 65 passes through 3 balls being inputted from spherical aberration ingredient operational part 63 The addition of the operation result of surface aberration ingredient 71 and the operation result of 3 astigmatism components 73 inputted from astigmatism component operational part 64 Operation finds out the global shape 75 of lens face 9a (step S16 is equivalent to the 3rd calculation step of the present invention).Lens face 9a's is whole Shape 75 is stored in storage part 47, and is shown in display unit 49.More than, terminate the measuring shape processing of lens face 9a.And And when measuring the shape of other lenses 9, the processing of These steps is executed repeatedly.
The effect > of the 1st embodiments of <
As more than, in the shape measuring apparatus 10 of the 1st embodiment, by carrying out the end regions RE of lens face 9a in Heart district domain RC, the measurement (that is, minimum measurement exponent number) for adding up to two positions, can accurately measure than interferometer 12 The global shape of the lens face 9a of measurement range bigger.
[shape measuring apparatus of the 2nd embodiment]
Then, the shape measuring apparatus of the 2nd embodiment is illustrated.The measuring shape of above first embodiment fills In setting 10, operation is saturating by carrying out the measurement of the end regions RE and central area RC of lens face 9a, i.e. total two positions The global shape 75 of minute surface 9a.In contrast, carrying out the lens face 9a's different from the 1st embodiment in the 2nd embodiment The measurement at two positions, the thus global shape 75 of operation lens face 9a.
In addition, in the 2nd embodiment, the shape measuring apparatus 10 to locate with the 1st embodiment on lens face 9a Difference, structure in addition to this are substantially identical as the 1st embodiment.Therefore, in function, structure with above-mentioned 1st embodiment party The identical part of formula marks identical symbol, and the description thereof will be omitted.
Locate >s of the < about the 2nd embodiment
Part (A) of Figure 16, (B) are partly for illustrating locating on the lens face 9a in the 2nd embodiment Definition graph.Also, part (C) of Figure 16, (D) are partly for illustrating respectively to survey shown in part (A) of Figure 16, the part (B) Determine the definition graph of the measuring shape result of the lens face 9a of position finding.
In 2nd embodiment, when measuring the shape of lens face 9a, keep the optical axis L of lens 9 opposite by rotating platform 44 It is equivalent to angle of inclination in the optical axis O inclinations of reference lens 26In the state of the amount of degree, the rotation of rotating platform 44 is made to make lens 9 rotate around its optical axis L, thus make relative position displacements of the lens face 9a relative to interferometer 12.Specifically, by making rotation Turn the rotation of platform 44 to make 0 degree of rotation shown in the parts (A) of lens face 9a relative to the relative position of interferometer 12 to Figure 16 90 degree of rotation position displacements shown in position and part (B) of Figure 16.Here, 0 degree of rotation position is equivalent to the 1st of the present invention It sets, 90 degree of rotation positions are equivalent to the 2nd position of the present invention.In addition, the symbol T in part (A) of Figure 16, the part (B) is table Show the rotation position mark of the rotation position (0 degree of rotation position, 90 degree of rotation positions) of lens 9.
0 degree of rotation position is the measurement for measuring 0 degree of region RO that light 30 is incident in a part of region as lens face 9a Position.0 degree of region RO is equivalent to the 1st region of the present invention, and is a part and the face center for the peripheral part for including lens face 9a Region.In this case, the relationship for meeting the F values of the < lens 9 of the F values of reference lens 26/2, to which 0 degree of region RO includes A part for the peripheral part of lens face 9a and face center.In addition, " part for the peripheral part of lens face 9a " described herein It defines identical as the 1st embodiment.
90 degree of rotation positions are the survey for measuring 90 degree of region RP that light 30 is incident in a part of region as lens face 9a Positioning is set.90 degree of region RP are equivalent to the 2nd region of the present invention, to be made with the face center of lens face 9a positioned at from 0 degree of region RO Centered on the position that is rotated by 90 ° and include lens face 9a peripheral part a part and face center region.In addition, 0 degree of region RO and 90 degree of region RP is all the region with required area, therefore, " position being rotated by 90 ° " described herein further include The position rotated in the range of 90 degree ± 10 degree.
90 degree of region RP are also identical as 0 degree of region RO, meet the F value relationships of the < lens 9 of the F values of reference lens 26/2, because This includes a part and the face center of the peripheral part of lens face 9a.Moreover, making opposite positions of the lens face 9a relative to interferometer 12 It sets from 0 degree of rotation position to when 90 degree of rotation position displacements, operator keeps rotating platform 44 (flat with optical axis L around its rotary shaft Capable axis) it is rotated by 90 °.
In this way, in the 2nd embodiment, make the rotation angle α degree (with reference to figure 1) of the optical axis L around lens face 9a at 0 degree and Displacement between 90 degree, so as to make lens face 9a relative to the relative position of interferometer 12 in 0 degree of rotation position and 90 degree of rotations Displacement between indexing is set.As a result, detailed content will be described later, as shown in part (C) of Figure 16, the part (D), can be obtained The measuring shape result 78P in measuring shape result 78O and 90 degree of region RP in 0 degree of region RO of lens face 9a.
In addition, carrying out lens face 9a relative to interference also by the manual operation carried out by operator in the 2nd embodiment The displacement of the relative position of instrument 12, but can also automatically be carried out by the control of aftermentioned control unit 46A etc..
The structure > of the shape measuring apparatus of the 2nd embodiments of <
Figure 17 is the block diagram of the electric structure for the shape measuring apparatus 80 for indicating the 2nd embodiment.As shown in figure 17, shape is surveyed Determine device 80 and have the control unit 46A different from the 1st embodiment, structure in addition to this substantially with the 1st embodiment Shape measuring apparatus 10 is identical.
Control unit 46A executes the measuring shape program 51A read from storage part 47, thus as acquisition unit 59A and aforementioned Shape operational part 60, subtraction unit 61A, opening synthesis processing unit 62A, the sphere mapping for being equivalent to the 1st operational part of the invention Poor ingredient operational part 63A, the astigmatism component operational part 64A for being equivalent to the 2nd operational part of the invention and aforementioned global shape operation Portion 65 and function.
Acquisition unit 59A is substantially identical as the acquisition unit 59 of the 1st embodiment.But the acquisition unit of the 2nd embodiment 59A obtains 0 degree of region RO and 90 degree of region RP (with reference to figure 16), i.e. total two regions of lens face 9a from image pickup part 13 successively Interference fringe image data.In addition, the shape operational part 60 of the 2nd embodiment is identical as the 1st embodiment, by carrying out base Carry out the shape of operation 0 degree of region RO and 90 degree of region RP in the analysis of well known strip-scanning method.Acquisition unit 59A energy as a result, Enough obtain the measuring shape result 78P of the measuring shape result 78O and 90 degree of region RP of 0 degree of region RO.Then, acquisition unit 59A Measuring shape result 78O and measuring shape result 78P are output to subtraction unit 61A.
Subtraction unit 61A is substantially identical as the subtraction unit 61 of the 1st embodiment, is inputted from by acquisition unit 59A The measuring shape result 78P of measuring shape result 78O and 90 degree of region RP of 0 degree of region RO be individually subtracted based on plane of reference shape The shape of the plane of reference 25 of shape information 52.It is identical as the 1st embodiment as a result, the form error because of the plane of reference 25 can be inhibited The error of the measuring shape result of caused lens face 9a.Then, subtraction unit 61 is by the measuring shape knot after subtraction Fruit 78O and measuring shape result 78P is output to opening synthesis processing unit 62A.
The opening synthesis processing > of the 2nd embodiments of <
Figure 18 is that opening for illustrate by the 2nd embodiment being open of synthesize that processing unit 62A carries out synthesizes saying of handling Bright figure.As shown in part (A) of Figure 18, after opening synthesis processing unit 62A is to 0 degree of region RO configuration subtractions of lens face 9a Measuring shape result 78O, and as shown in part (B) of Figure 18, after 90 degree of region RP configuration subtractions of lens face 9a Measuring shape result 78P.In addition, 90 degree of region RP are to be rotated by 90 ° from 0 degree of region RO relative to the face center of lens face 9a Position, therefore the measuring shape result 78P of 90 degree of region RP is configured with the state that is rotated by 90 °.
Also, 180 degree will be rotated centered on the face center of lens face 9a respectively from 0 degree of region RO and 90 degree of region RP Position be set as 180 degree region RQ and 270 degree of region RR.Here, 180 degree region RQ be equivalent to the present invention the 3rd region, 270 Degree region RR is equivalent to the 4th region of the present invention.In addition, it has been observed that 0 degree of region RO and 90 degree of region RP are all with predetermined surface Long-pending region, therefore, " position of rotation 180 degree " described herein are included in the position rotated in the range of 180 degree ± 10 degree.
Opening synthesizes processing unit 62A by the measuring shape after the measuring shape result 78O and subtraction after subtraction As a result 78P (as shown in part (B) of Figure 18) is respectively by having 180 degree rotation pair centered on the face center with lens face 9a The configuration of title property is in 180 degree region RQ and 270 degree of region RR configurations (coordinate transform) (with reference to the part (C), the portion (D) of figure 18 Point).4 each measuring shape results 78O, 78P configure in such a way that the whole region on the periphery of lens face 9a is embedded in as a result,. In addition, the measuring shape result 78P for being configured at 270 degree of region RR is to make configuration in the measuring shape result 78P of 90 degree of region RP The measuring shape of (with reference to part (B) of figure 18) rotation 180 degree is as a result, in other words, for before making to be configured at 90 degree of region RP Measuring shape result 78P originally rotates 270 degree of measuring shape result (with reference to part (D) of figure 18).
Then, opening synthesis processing unit 62A is to configuring the shape survey in each region RO, RP, RQ, the RR on the peripheries lens face 9a Determine result 78O, 78P and implement opening synthesis processing, and engage each measuring shape result 78O, 78P, to generate (E) such as Figure 18 Whole region data 69A shown in part.At this point, lens face 9a is spherical surface, therefore the synthesis processing unit 62A that is open is with above-mentioned the The identical method of 1 embodiment (recorded method in above patent document 2) carries out opening synthesis processing.Then, opening is closed The whole region data 69A that the lens face 9a found out is handled by the synthesis that is open is respectively outputted to sphere mapping at processing unit 62A Poor ingredient operational part 63A and astigmatism component operational part 64A.
Figure 19 is the stream of the calculation process for illustrating the global shape 75 from whole region data 69A operation lens faces 9a The definition graph of journey.
3 spherical aberration ingredient operation > of <
Spherical aberration ingredient operational part 63A (with reference to figure 17) whole region data 69A operations shown in the part Figure 19 (A) 3 spherical aberration ingredients 71 of the entire surface of lens face 9a (with reference to part (B) of figure 9).It has been observed that 3 balls of lens face 9a Surface aberration ingredient is relative to optical axis L rotational symmetry.Therefore, it is possible to from each measuring shape result to each region RO, RP, RQ, RR Whole region data 69A finds out 3 spherical aberration ingredients 71 obtained from 78O, 78P implement opening synthesis processing.
Specifically, spherical aberration ingredient operational part 63A is identical as the 1st embodiment, it is multinomial by using Zernike The fitting operation of formula, that is, make whole region data 69A approximation Zernike multinomials to calculate Zernike coefficients, thus operation 3 Secondary spherical aberration ingredient 71 (with reference to part (B) of figure 9).Then, spherical aberration ingredient operational part 63 is by 3 spherical aberration ingredients 71 operation result is output to global shape operational part 65.
3 astigmatism component operation > of <
Astigmatism component operational part 64A (with reference to figure 17) shown in part (C) of whole region data 69A arithmographs 13 thoroughly 3 astigmatism components 73 of minute surface 9a.It has been observed that 3 astigmatism components 73 are saddle ingredient (saddle shape) as shown in Figure 7, it is high Degree is changed (top/bottom/top/bottom) around optical axis L with 90 degree of spacing sine curve-likes.
On the other hand, become the areas measuring shape result 78O Ji90Du of 0 degree of region RO of the base of whole region data 69A The measuring shape result 78P of domain RP is centered on the face center of lens face 9a with the data (reference chart of 90 degree of measuring spaces 16).Therefore, bent with 90 degree of spacing sines around optical axis L comprising height in measuring shape result 78O and measuring shape result 78P The information of 3 astigmatism components 73 of threadiness variation.Therefore, it is possible to by the measuring shape result of 0 degree of region RO and 90 degree of region RP The whole region data 69A that 78O, 78P are constituted finds out 3 astigmatism components 73 (with reference to figure 18).
Astigmatism component operational part 64A is identical as the 1st embodiment, by using the operation of Zernike fitting of a polynomials, That is, making whole region data 69A approximation Zernike multinomials and operation is corresponding with 3 times astigmatism component (0 degree, 90 degree) Zernike coefficients and Zernike coefficients corresponding with 3 times astigmatism component (45 degree).At this point, in the 2nd embodiment, it is real with the 1st Mode difference is applied, makes whole region data 69A approximation Zernike multinomials, therefore can from the operation result of each Zernike coefficients Directly obtain 3 astigmatism components (0 degree, 90 degree) of the entire surface relative to lens face 9a operation result 73a and 3 astigmatism at Divide the operation result 73b of (45 degree).
Secondly, operations of the astigmatism component operational part 64A to 3 astigmatism components (0 degree, 90 degree) of the entire surface of lens face 9a As a result the operation result 73b of 73a and 3 astigmatism component (45 degree) is synthesized, to calculate 3 times of entire surface of lens face 9a Astigmatism component 73.Then, the operation result of 3 astigmatism components 73 is output to global shape operation by astigmatism component operational part 64A Portion 65.
The operation > of the global shape of < lens faces
Global shape operational part 65 is identical as the 1st embodiment, by inputted from spherical aberration ingredient operational part 63A 3 The operation result of the operation result of secondary spherical aberration ingredient 71 and 3 astigmatism components 73 inputted from astigmatism component operational part 64A Add operation find out the global shape 75 of the lens face 9a as shown in part (B) of Figure 19.The operation knot of the global shape 75 Fruit is stored in storage part 47 (with reference to figure 5), and is shown at display unit 49 (with reference to figure 5).
[effect of the shape measuring apparatus of the 2nd embodiment]
Then, using Figure 20, the shape of the lens face 9a of the lens 9 of the shape measuring apparatus 80 based on above structure is surveyed Fixed processing (process for measuring shape) illustrates.Figure 20 is the lens face 9a for indicating the lens 9 based on shape measuring apparatus 80 The flow chart of the flow of measuring shape processing.As shown in figure 20, identical (with reference to figure 15) as aforementioned 1st embodiment, operator Plane of reference shape information 52 and measurement input data are input to apparatus main body 15 in advance and are stored in storage part 47 (step S21, Step S22).In addition, " the analysis data number on optical axis L periphery " of the measurement input data of the 2nd embodiment is " 4 ".
Operator is after the input of plane of reference shape information 52 and measurement input data (can also be before input), by lens 9 are set on the rotating platform 44 of mounting table 14.The optical axis L of lens 9 is set to tilt relative to the optical axis O of reference lens 26 as a result, It is equivalent to angle of inclinationIn the state of the amount of degree, lens 9 keep (step S23) by rotating platform 44.In this case, it encloses Rotation angle around the optical axis L of lens 9 is 0 degree, therefore lens face 9a is arranged at 0 degree relative to the relative position of interferometer 12 Rotation position (with reference to part (A) of figure 16) (the displacement step for being equivalent to the present invention).
Start to operate if operator carries out measuring shape by operation inputting part 48, from laser light source 20 to lens face 9a The outgoing beam diameter measurement light 30 (He-Ne laser beam) smaller than the diameter of lens face 9a (is equivalent to the injection step of the present invention Suddenly).The measurement light 30 is incident in 0 degree of region RO (rotation angle 0 of lens face 9a via beam splitter 22 and reference lens 26 etc. Degree, angle of inclinationDegree).Then, it measures light 30 to reflect in 0 degree of region R O, and the reflected light 30R of the measurement light 30 is returned originally Measurement light 30 light path and be incident in the plane of reference 25 again.Moreover, reflected light 30R and the reference light reflected by reference to face 25 32 interference and become interference light 34, and the interference light 34 is via beam splitter 22 etc., and by imaging len 27 in image pickup part 13 Imaging surface is imaged.
Image pickup part 13 shoots the interference light 34 being imaged in imaging surface by imaging len 27, to obtain interference item Print image data, and the interference fringe image data are output to apparatus main body 15 (image pickup step for being equivalent to the present invention).By This, terminates the measuring shape (strip-scanning measurement) (step S24) of 0 degree of region RO.
The acquisition unit 59A of apparatus main body 15 obtains the interference fringe image data of the 0 degree of region RO inputted from image pickup part 13. Then, shape operational part 60 carries out the analysis based on well known strip-scanning method to interference fringe image data, to operation 0 Spend the shape of region RO (step S25 is equivalent to the 4th calculation step of the present invention).Acquisition unit 59A can obtain 0 degree of area as a result, The measuring shape result 78O (obtaining step for being equivalent to the present invention) of domain RO, and acquired measuring shape result 78O is exported To subtraction unit 61A.
Subtraction unit 61A from the measuring shape result 78O of the 0 degree of region RO inputted by acquisition unit 59A subtract based on by The shape (step S26) of the plane of reference 25 for the plane of reference shape information 52 that storage part 47 is read.Thereby, it is possible to inhibit because of the plane of reference The error of measuring shape result 78O caused by 25 form error.Then, subtraction unit 61 surveys the shape after subtraction Determine result 78O and is output to opening synthesis processing unit 62A.
Then, operator makes rotating platform 44 be rotated by 90 ° around optical axis L, and lens 9 is thus made to be rotated by 90 ° (step S27).Lens face 9a is arranged at 90 degree of rotation positions (with reference to (B) of figure 16 relative to the relative position of interferometer 12 as a result, Part) (the displacement step for being equivalent to the present invention).
Start to operate if operator carries out measuring shape by operation inputting part 48, from laser light source 20 to lens face 9a The outgoing beam diameter measurement light 30 (He-Ne laser beam) smaller than the diameter of lens face 9a (is equivalent to the injection step of the present invention Suddenly).The measurement light 30 is incident in 90 degree of region RP (rotation angles 90 of lens face 9a via beam splitter 22 or reference lens 26 etc. Degree, angle of inclinationDegree).Then, it measures light 30 to reflect in 90 degree of region RP, and the reflected light 30R of the measurement light 30 is returned originally Measurement light 30 light path and be incident in the plane of reference 25 again.Moreover, reflected light 30R and the reference light reflected by reference to face 25 32 interference and become interference light 34, and the interference light 34 is via beam splitter 22 etc., and by imaging len 27 in image pickup part 13 Imaging surface is imaged.
Image pickup part 13 shoots the interference light 34 being imaged in imaging surface by imaging len 27, to obtain interference item Print image data, and the interference fringe image data are output to apparatus main body 15 (image pickup step for being equivalent to the present invention).By This, terminates the measuring shape (strip-scanning measurement) (step S28) of 90 degree of region RP.
If acquisition unit 59A obtains the interference fringe image data of the 90 degree of region RP inputted from image pickup part 13, shape fortune Calculation portion 60 carries out the analysis based on well known strip-scanning method to interference fringe image data, to 90 degree of region RP's of operation Shape (step S29 is equivalent to the 4th calculation step of the present invention).Acquisition unit 59A can obtain the shape of 90 degree of region RP as a result, Shape measurement result 78P (obtaining step for being equivalent to the present invention), and measuring shape result 78P is output to subtraction unit 61A。
Subtraction unit 61A is subtracted from the measuring shape result 78P of the 90 degree of region RP inputted by acquisition unit 59 based on ginseng Examine the shape (step S30) of the plane of reference 25 of face shape information 52.Thereby, it is possible to inhibit the form error because of the plane of reference 25 to cause Measuring shape result 78P error.Then, the measuring shape result 78P after subtraction is output to by subtraction unit 61 Opening synthesis processing unit 62A.
< opening synthesis processing >
Opening synthesis processing unit 62A is first according to the analysis data number on the optical axis L periphery for being input to operation inputting part 48 " 4 ", the measuring shape result 78O (with reference to part (A) of figure 18) after 0 degree of region RO configuration subtractions of lens face 9a, And the measuring shape result 78P after 90 degree of region RP of lens face 9a configure subtraction (with reference to part (B) of figure 18).And And opening synthesis processing unit 62A by measuring shape result 78O, 78P after subtraction (measuring shape result 78P such as Figure 18's (B) shown in part) respectively by the configuration with 180 degree rotational symmetry centered on the face center with lens face 9a 180 Spend region RQ and 270 degree of region RR configurations (coordinate transform) (with reference to the part (C), the part (D) of figure 18).
Then, opening synthesis processing unit 62A is to configuring the shape survey in each region RO, RP, RQ, the RR on the peripheries lens face 9a Determine result 78O, 78P and implement opening synthesis processing (step S31 is equivalent to the opening synthesis processing step of the present invention).It asks as a result, Go out whole region data 69A.At this point, opening synthesis processing unit 62A is to the shape after the subtraction based on subtraction unit 61A Measurement result 78O, 78P has carried out opening synthesis, therefore can prevent from having synthesized the plane of reference 25 in the 69A generations of whole region data The form error of error.Whole region data 69A is respectively outputted to spherical aberration ingredient operational part by opening synthesis processing unit 62A 63A and astigmatism component operational part 64A.
The operation > of 3 spherical aberration ingredients of < and 3 astigmatism components
Spherical aberration ingredient operational part 63A carries out profit to the whole region data 69A inputted from opening synthesis processing unit 62A With Zernike fitting of a polynomial operations, to calculate Zernike coefficients (step corresponding with 3 spherical aberration ingredients S32).Then, according to the result of calculation, spherical aberration ingredient operational part 63A 3 spherical aberration ingredients 71 of operation are (with reference to figure 9 (B) part), and the operation result of 3 spherical aberration ingredients 71 is output to global shape operational part 65 (step S33, is equivalent to The 1st calculation step of the present invention).
Also, astigmatism component operational part 64A to whole region data 69A carries out that Zernike fitting of a polynomials are utilized Operation, to calculate corresponding with 3 times astigmatism component (0 degree, 90 degree) Zernike coefficients and right with 3 astigmatism components (45 degree) The Zernike coefficients answered.Then, according to the result of calculation, the entire surface of spherical aberration ingredient operational part 63A operation lens faces 9a 3 astigmatism components (0 degree, 90 degree) and 3 astigmatism components (45 degree), and these operation results are synthesized, to operation lens face 3 astigmatism components 73 of the entire surface of 9a (step S34 is equivalent to the 2nd calculation step of the present invention).Spherical aberration ingredient operation The operation result of 3 astigmatism components 73 is output to global shape operational part 65 by portion 63A.
In addition, in the 2nd embodiment, it is single respectively by spherical aberration ingredient operational part 63A and astigmatism component operational part 64A Only 3 spherical aberration ingredients 71 of operation and 3 astigmatism components 73, but spherical aberration ingredient operational part 63A and astigmatism component operation Portion 64A can also be integrally formed.I.e., it is possible to carry out Zernike is utilized to whole region data 69A by an operational part more The fitting operation of formula, thus both 3 spherical aberration ingredients 71 of operation and 3 astigmatism components 73.
The operation > of the global shape of < lens faces
Global shape operational part 65 is identical as the 1st embodiment, by inputted from spherical aberration ingredient operational part 63A 3 The operation result of the operation result of secondary spherical aberration ingredient 71 and 3 astigmatism components 73 inputted from astigmatism component operational part 64A Add operation find out lens face 9a global shape 75 (step S35, be equivalent to the present invention the 3rd calculation step).Lens face The global shape 75 of 9a is stored in storage part 47, and is shown in display unit 49.More than, at the measuring shape of end lens face 9a Reason.Moreover, when measuring the shape of other lenses 9, the processing of These steps is executed repeatedly.
The effect > of the 2nd embodiments of <
As more than, in the shape measuring apparatus 80 of the 2nd embodiment, by the 0 degree of region RO and 90 for carrying out lens face 9a The measurement (that is, minimum measurement exponent number) spent region RP, add up to two positions, can accurately measure than interferometer 12 The global shape of the lens face 9a of measurement range bigger.
[other]
Figure 21 is for illustrating that the opening by above first embodiment synthesizes what the opening synthesis that processing unit 62 carries out was handled The definition graph of another embodiment.In above first embodiment, by opening synthesize processing unit 62 carry out opening synthesis processing when, by The measuring shape result 45E of end regions RE after subtraction lens face 9a circumferential arrangement 4 (with reference to figures 8), but The configuration quantity of measuring shape result 45E as described above can be according to the survey of the interferometer 12 of the size relative to lens face 9a The size of range is determined to determine.To, such as shown in figure 21, measuring shape result 45E is passed through in the face of lens face 9a Circumferential arrangement 8 (or number 4,8 other than of the configuration with rotational symmetry in lens face 9a centered on the heart Amount) etc., it can suitably change the configuration quantity of measuring shape result 45E.
In the respective embodiments described above, has been illustrated and dome shape is measured by shape measuring apparatus 10, shape measuring apparatus 80 The case where shape of lens face 9a, but in the case of the shape of the invention that the planar lens face of measurement can also be applied to.At this In the case of kind, reference lens 26 shown in Fig. 2 are substituted, the datum plate with the planar plane of reference is set to interferometer 12.
In the respective embodiments described above, to by using Zernike fitting of a polynomial operations, finding out 3 spherical aberrations The example of ingredient 71 and 3 astigmatism components 73 is illustrated, but can also be by using power series fitting of a polynomial operation To find out these.
In the respective embodiments described above, rotational symmetry ingredient and asymmetrical ingredient as the present invention find out 3 spherical surfaces Aberration ingredient 71 and 3 astigmatism components 73, but can also be found out by using Zernike fitting of a polynomial operations 3 times with On 5 times, 7 inferior high order rotational symmetry ingredients and asymmetrical ingredient.
In the respective embodiments described above, the method as the shape from interference fringe image data operation lens face 9a uses Strip-scanning method, but can also for example use Fourier transform.
In the respective embodiments described above, has been illustrated and have interferometer 12 and the shape measuring apparatus 10 of image pickup part 13, shape Shape measurement device 80, but the shape measuring apparatus of the present invention can be only made of apparatus main body 15.That is, the present invention can also apply In following shape measuring apparatus, i.e., individually obtained by interferometer 12 and image pickup part 13 via acquisitions such as storage card or communication networks Interference fringe image data etc., and according to the shape of acquired data operation lens face 9a.
Symbol description
9- lens, 9a- lens faces, 10,80- shape measuring apparatus, 12- interferometers, 13- image pickup parts, 20- laser light sources, The 25- plane of references, 26- reference lens, 30- measurement light, 32- reference lights, 34- interference lights, 41-XYZ platforms, 44- rotating platforms, 52,52A- plane of references shape information, 59,59A- acquisition units, 60- shape operational parts, 61,61A- subtraction units, 62,62A- opens Mouthful synthesis processing unit, 63,63A- spherical aberration ingredient operational parts, 64,64A- astigmatism component operational parts, 65,65A- global shapes Operational part.

Claims (15)

1. a kind of shape measuring apparatus, has：
Acquisition unit is obtained by measuring shape knot obtained by the shape in each the 1st region of area test and the shape in the 2nd region Fruit, the 1st region be a part for lens face and include the lens face face center, the part in the 2nd region with it is described 1st area coincidence and include the lens face peripheral part a part；
Opening synthesis processing unit, by the measuring shape result in the 2nd region obtained by the acquisition unit to configure as follows It is multiple to be configured on the lens face, opening synthesis is implemented to the measuring shape result configured with multiple the 2nd regions Processing, wherein the configuration is as follows：There is rotational symmetry centered on the face center；
1st operational part is fitted operation, to lens described in operation to the shape handled by the opening synthesis The rotational symmetry ingredient in face；
The measuring shape result of 2nd operational part, the 1st region to being obtained by the acquisition unit is fitted operation, from And the asymmetrical ingredient of lens face described in operation；And
3rd operational part, according to the 1st operational part and the operation result of the 2nd operational part, lens face is whole described in operation Shape.
2. shape measuring apparatus according to claim 1, has：
Interferometer to the lens face is projected with interference optics and by the interference optics and measures penetrating for light Go out portion, the interferometer is to the lens face outgoing beam diameter measurement light smaller than the diameter of the lens face；
Displacement portion makes the lens face be incident on the described 1st to the measurement light relative to the relative position of the interferometer 1st position in region and the 2nd position displacement for measuring light and being incident on the 2nd region；
Image pickup part, by each described region, to by the measurement light and quilt of each region reflection of the lens face The interference light of the reference light of plane of reference reflection is shot, which is configured in the light path of the interference optics； And
4th operational part, analyzes the image pickup signal that is obtained by the image pickup part, the shape in each region described in operation,
The operation result that the acquisition unit obtains the 4th operational part is used as the measuring shape result in each region.
3. shape measuring apparatus according to claim 2, wherein
The acquisition unit obtains the measuring shape in each region of the lens face of plane of reference bigger described in size ratio As a result.
4. shape measuring apparatus according to claim 2, has：
Storage part is previously stored with the shape information for the shape for indicating the plane of reference；And
Subtraction unit, before the operation of the 1st operational part and the 2nd operational part, according to being stored in the storage part In the shape information, the measuring shape result in each region described in obtained by the acquisition unit is individually subtracted described The shape of the plane of reference.
5. shape measuring apparatus according to claim 1, wherein
1st operational part is carried out described quasi- using any one multinomial in Zernike multinomials and power series multinomial Close operation.
6. shape measuring apparatus according to claim 1, wherein
2nd operational part is carried out described quasi- using any one multinomial in Zernike multinomials and power series multinomial Close operation.
7. a kind of shape measuring apparatus, has：
Acquisition unit is obtained by measuring shape knot obtained by the shape in each the 1st region of area test and the shape in the 2nd region Fruit, the 1st region include a part and the face center of the peripheral part of lens face, and the 2nd region is located at from the 1st region with institute It states at the position centered on the center of face and after being rotated by 90 ° and includes a part for the peripheral part and the face center；
Opening synthesis processing unit, will from the 1st region and the 2nd region respectively by the face center centered on and rotate When position after 180 degree is as the 3rd region and 4 region, which synthesizes processing unit and surveys the shape in each region Determine result and the 3rd region and the 4th region are configured at following configuration respectively, to the 1st region to the 4th area The measuring shape result in domain implements opening synthesis processing, wherein the configuration is as follows：Have 180 centered on the face center Spend rotational symmetry；
1st operational part is fitted operation, to lens described in operation to the shape handled by the opening synthesis The rotational symmetry ingredient in face；
2nd operational part is fitted operation, to lens described in operation to the shape handled by the opening synthesis The asymmetrical ingredient in face；And
3rd operational part, according to the 1st operational part and the operation result of the 2nd operational part, lens face is whole described in operation Shape.
8. shape measuring apparatus according to claim 7, has：
Interferometer to the lens face is projected with interference optics and by the interference optics and measures penetrating for light Go out portion, the interferometer is to the lens face outgoing beam diameter measurement light smaller than the diameter of the lens face；
Displacement portion makes the lens face be incident on the described 1st to the measurement light relative to the relative position of the interferometer 1st position in region and the 2nd position displacement for measuring light and being incident on the 2nd region；
Image pickup part, by each described region, to by the measurement light and quilt of each region reflection of the lens face The interference light of the reference light of plane of reference reflection is shot, which is configured in the light path of the interference optics； And
4th operational part, analyzes the image pickup signal that is obtained by the image pickup part, the shape in each region described in operation,
The operation result that the acquisition unit obtains the 4th operational part is used as the measuring shape result in each region.
9. shape measuring apparatus according to claim 8, wherein
The acquisition unit obtains the measuring shape in each region of the lens face of plane of reference bigger described in size ratio As a result.
10. shape measuring apparatus according to claim 8, has：
Storage part is previously stored with the shape information for the shape for indicating the plane of reference；And
Subtraction unit, before the operation of the 1st operational part and the 2nd operational part, according to being stored in the storage part In the shape information, the measuring shape result in each region described in obtained by the acquisition unit is individually subtracted described The shape of the plane of reference.
11. shape measuring apparatus according to claim 7, wherein
1st operational part is carried out described quasi- using any one multinomial in Zernike multinomials and power series multinomial Close operation.
12. shape measuring apparatus according to claim 7, wherein
2nd operational part is carried out described quasi- using any one multinomial in Zernike multinomials and power series multinomial Close operation.
13. a kind of process for measuring shape, has：
Obtaining step is obtained by measuring shape knot obtained by the shape in each the 1st region of area test and the shape in the 2nd region Fruit, the 1st region be a part for lens face and include the lens face face center, the part in the 2nd region with it is described 1st area coincidence and include the lens face peripheral part a part；
Opening synthesis processing step, by the measuring shape result in the 2nd region obtained by the obtaining step with as follows Configuration is multiple to be configured on the lens face, implements opening to the measuring shape result configured with multiple the 2nd regions Synthesis is handled, wherein the configuration is as follows：There is rotational symmetry centered on the face center；
1st calculation step is fitted operation, to lens described in operation to the shape handled by the opening synthesis The rotational symmetry ingredient in face；
The measuring shape result of 2nd calculation step, the 1st region to being obtained by the obtaining step is fitted fortune It calculates, to the asymmetrical ingredient of lens face described in operation；And
3rd calculation step, according to the operation result of the 1st calculation step and the 2nd calculation step, lens face described in operation Global shape.
14. a kind of process for measuring shape, has：
Obtaining step is obtained by measuring shape knot obtained by the shape in each the 1st region of area test and the shape in the 2nd region Fruit, the 1st region include a part and the face center of the peripheral part of lens face, and the 2nd region is located at from the 1st region with institute It states at the position centered on the center of face and after being rotated by 90 ° and includes a part for the peripheral part and the face center；
Opening synthesis processing step, will from the 1st region and the 2nd region respectively by the face center centered on and revolve When position after turnback is set as the 3rd region and 4 region, by the measuring shape result in each region respectively with such as It is lower to configure to be configured at the 3rd region and the 4th region, to the measuring shape knot in the 1st region to the 4th region Fruit applies opening synthesis processing, wherein the configuration is as follows：There is 180 degree rotational symmetry centered on the face center；
1st calculation step is fitted operation, to lens described in operation to the shape handled by the opening synthesis The rotational symmetry ingredient in face；
2nd calculation step is fitted operation, to lens described in operation to the shape handled by the opening synthesis The asymmetrical ingredient in face；And
3rd operational part, according to the operation result of the 1st calculation step and the 2nd calculation step, lens face described in operation Global shape.
15. the process for measuring shape according to claim 13 or 14, has：
Step is projected, from interferometer to the lens face outgoing beam diameter measurement light smaller than the diameter of the lens face, wherein The interferometer has interference optics and projects the injection part for measuring light to the lens face by the interference optics；
Displacement step makes the lens face be incident on the described 1st to the measurement light relative to the relative position of the interferometer 1st position in region and the 2nd position displacement for measuring light and being incident on the 2nd region；
Image pickup step, by each region, to by the measurement light of each region reflection of the lens face with joined The interference light for examining the reference light of face reflection is shot, wherein the plane of reference is configured in the light path of the interference optics On；And
4th calculation step, analyzes the image pickup signal that is obtained by the image pickup step, the shape in each region described in operation,
The operation result that the 4th calculation step is obtained in the obtaining step is used as the shape survey in each region Determine result.
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