CN106989699B - Laser centering instrument calibration equipment and method for measuring indication error of laser centering instrument through laser centering instrument calibration equipment - Google Patents
Laser centering instrument calibration equipment and method for measuring indication error of laser centering instrument through laser centering instrument calibration equipment Download PDFInfo
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- CN106989699B CN106989699B CN201710343457.6A CN201710343457A CN106989699B CN 106989699 B CN106989699 B CN 106989699B CN 201710343457 A CN201710343457 A CN 201710343457A CN 106989699 B CN106989699 B CN 106989699B
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- G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
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Abstract
The invention discloses a laser centering instrument calibration device and a method for measuring indicating value errors of a position sensitive sensor, an inclinometer and centering deviation of the laser centering instrument through the device. The rotation angles of the two rotating shafts are set, and the horizontal and vertical displacement and the pitching and yawing of the other rotating shaft are adjusted, so that the measurement of the horizontal and vertical displacement of the position sensitive sensor of the laser centering instrument, the rotation angle of the inclinometer and the indication error of the centering deviation can be realized. The device and the method provided by the invention can accurately simulate the running state of the actual laser centering instrument in the working process, can directly display the standard centering deviation of the measuring shaft in real time, and have more accurate calibration result and stronger operability in the measuring process.
Description
Technical Field
The invention relates to the field of instrument calibration, in particular to a laser centering instrument calibration device and a method for measuring displacement of a position sensitive sensor of a laser centering instrument in horizontal and vertical directions, an angle quantity of an inclinometer and a indicating value error of axial centering deviation of the laser centering instrument.
Background
The laser centering instrument is used for measuring the centering deviation (including the parallel deviation x in the horizontal and vertical directions) between mechanical connecting pieces 0 、y 0 And angular deviation theta // 、Θ ⊥ ) The apparatus of (1). In recent years, the laser centering instrument is widely applied to manufacturing, installation and debugging and real-time monitoring of large mechanical equipment such as wind power, hydropower, chemical industry, nuclear power, rail transit, ports and docks at home.
In China, a lot of researchers make a lot of researches on aspects such as measurement principles, algorithm optimization and the like of a laser centering technology, and mathematical models such as a position sensitive sensor seating quantity, a corner, centering deviation and the like are provided, so that a foundation is laid for localization of a laser centering instrument. However, the localization of the existing laser centering instrument is very low, and the measurement accuracy has a larger gap compared with that of an imported product, so that the development of the domestic laser centering instrument with simple operation and high precision and independent intellectual property rights has great significance for improving the economic benefit and the product quality of enterprises.
The measurement accuracy of the laser centering instrument is related to theoretical values of mathematical models of a seating scalar quantity, a corner and centering deviation, nonlinear compensation is needed, a more accurate model needs to be established, and therefore the laser centering instrument needs to be accurately measured, and a mathematical relation model of an indication value error of the laser centering instrument and the seating scalar quantity, the corner and the centering deviation is determined. However, at present, the calibration of alignment deviation indication errors of the laser alignment instrument in China is still in an exploration stage, only simple analog measurement is carried out, calibration alignment deviation values cannot be directly given, and the completion of the simple analog measurement needs to use a plurality of instruments for combined measurement. For example, the patent application No. 201310475057.2, china invention discloses a simple calibration method for a laser centering instrument, which utilizes a measuring mandrel with high precision and a universal tool microscope to combine a simple standard device, so as to realize simple calibration of a horizontal mechanical displacement centering indication value and a vertical mechanical displacement centering indication value of the laser centering instrument. The measuring method can only judge whether the working state of the centering instrument is normal, but cannot measure the indicating value error of the centering deviation, so that the value output by the laser centering instrument cannot be reliably evaluated. Moreover, the method for calibrating and measuring the laser centering instrument by combining various instruments has poor operability.
Disclosure of Invention
According to an aspect of the present invention, a laser centering instrument calibration apparatus is provided to solve at least one of the above problems. The calibration apparatus includes: the fixed rotating shaft and the adjustable rotating shaft are arranged on the base; the fixed rotating shaft comprises a driving shaft and a supporting frame for supporting the driving shaft; the adjustable rotating shaft comprises a supporting seat, a driven shaft, a first translation platform and a second translation platform, wherein the first translation platform is used for enabling the driven shaft to move in a manner of being vertical to the base in a horizontal plane, and the second translation platform is used for enabling the driven shaft to move in a manner of being vertical to the base in a vertical plane; braced frame and first translation platform set up respectively on the base, and the supporting seat setting is on first translation platform, and the second translation platform sets up on the supporting seat, and the driven shaft setting is on the second translation platform. According to the working principle of the laser centering instrument, the laser emitter and the position sensitive sensor are fixed on the fixed rotating shaft and the adjustable rotating shaft, and the first translation platform and the second translation platform are adjusted, so that the first translation platform and the second translation platform drive the driven shaft to translate in the horizontal direction and the vertical direction, the measurement of the displacement of the position sensitive sensor in the horizontal direction and the vertical direction can be realized, the calibration of the indication error of the position sensitive sensor is realized, the equipment cost is low, the calibration range is wide, the operation is simple, and the laser centering instrument is convenient to calibrate.
In some embodiments, the driving shaft and the driven shaft respectively comprise a motor hand wheel, a motor with an encoder, a coupler, a bearing seat and a simulation shaft which are connected in sequence, and the motor drives the simulation shaft to rotate between 0 and 360 degrees. Therefore, the calibration equipment can be used for simultaneously calibrating the position sensitive sensor and the inclinometer, is low in cost and convenient to operate, has multiple calibration measurement points, improves the calibration precision, and meets the actual use requirement.
According to another aspect of the present invention, there is provided a laser centering device calibration apparatus, including: the device comprises a base, a fixed rotating shaft and an adjustable rotating shaft, wherein the fixed rotating shaft and the adjustable rotating shaft are arranged on the base; the fixed rotating shaft comprises a driving shaft and a supporting frame for supporting the driving shaft; the adjustable rotating shaft comprises a supporting seat, a driven shaft, a first translation platform, a second translation platform, a deflection angle position platform and a pitching angle position platform, wherein the first translation platform is used for enabling the driven shaft to move in a horizontal plane perpendicular to the base, the second translation platform is used for enabling the driven shaft to move in a vertical plane perpendicular to the base, the deflection angle position platform is used for enabling the driven shaft to deflect in the azimuth direction, and the pitching angle position platform is used for enabling the driven shaft to deflect in a pitching mode; the supporting frame and the first translation platform are respectively arranged on the base, the deflection angle position platform is arranged on the first translation platform, the supporting seat is arranged on the deflection angle position platform, the second translation platform is arranged on the supporting seat, the pitching angle position platform is arranged on the second translation platform, and the driven shaft is arranged on the pitching angle position platform. The calibration equipment is provided with two mutually independent rotating shafts, the driven shaft can move horizontally and vertically through the first translation platform and the second translation platform, so that the indicating value error of the horizontal and vertical directions of the position sensitive sensor can be measured or the centering deviation of the driven shaft and the driving shaft in the horizontal and vertical directions can be changed, the driven shaft can also perform deflection and pitching rotation through the deflection angle platform and the pitching angle platform, the deflection angle deviation of two shafts can be provided, the running state in the working process of the laser centering instrument can be accurately simulated, the measurement of the indicating value error of the position sensitive sensor and the centering deviation of the laser centering instrument can be simultaneously realized on one calibration equipment, the operation is convenient, the measurement result is more accurate, and convenience is provided for the calibration of the laser centering instrument.
In some embodiments, two parallel guide rails are disposed on the base, a first table top and a second table top capable of sliding along the guide rails are disposed on the guide rails, the support frame is disposed on the first table top, and the first translation table is disposed on the second table top. Therefore, the distance between the two shafts can be conveniently adjusted according to measurement requirements, so that the measurement process can be closer to an actual running state, multiple times of measurement can be realized, and the calibration precision is improved.
In some embodiments, the device further comprises a locking mechanism capable of fixing the first table top and the second table top at specific positions, the locking mechanism comprises a locking sheet, a locking hand wheel and a locking nut, wherein the locking sheet, the first table top and the second table top are all provided with screw holes, the base is provided with a T-shaped groove, the locking sheet is fixedly connected with the first table-board and the second table-board through screw holes and screws respectively, and the locking hand wheel penetrates through the screw holes in the locking sheet to be inserted into the T-shaped groove and is buckled with the locking nut in the T-shaped groove. The first table board and the second table board are fixed at specific positions through the locking mechanism, the stability of the locked table board can be guaranteed, the table board is fixed on the side face through the locking sheet, the deformation of the table board caused by locking force in the locking process can be reduced, and the influence on the precision of the calibration table system is reduced.
In some embodiments, the first translation stage and the second translation stage are both electrically controlled translation stages provided with a grating ruler and a limit switch, wherein the first translation stage is fixed on the second table top along the horizontal direction, and the second translation stage is fixed on the support base along the vertical direction. From this, can conveniently realize the displacement of level and vertical direction through automatically controlled translation platform, and carry out closed-loop control through grating chi, make things convenient for direct real-time the acquisition displacement volume to compare with the indicating value error of laser centering instrument, realize the real-time measurement to the indicating value error, and can restrict first translation platform and second translation platform through limit switch and move in rated range, prevent to take place accident and hit car, avoid loss of precision. And the electric control translation table has various types and low price, and is beneficial to reducing the cost of equipment.
In some embodiments, the yaw angle table and the pitch angle table each include a rotary base, a rotary bearing, a rotary table top, a rotary driving translation table and an arc grating ruler, one end of the rotary base and one end of the rotary table top are connected through the rotary bearing, the other end of the rotary base and one end of the rotary table top are connected through the rotary driving translation table, the arc grating ruler is arranged on the edge of the rotary table top, which is close to the rotary driving translation table, and the rotary driving translation table drives the rotary table top to rotate. The rotary base is connected with one end of the rotary table top through a crossed roller bearing, and the rotary table top can rotate when the other end of the rotary drive translation table drives the rotary table top, so that azimuth deflection and pitching deflection are realized. And closed-loop control is carried out through the grating ruler, so that real-time display of the deflection deviation amount is facilitated, and the indication value error of the centering deviation is measured in real time.
In some embodiments, the rotary driving translation stage comprises an electrically controlled translation stage, a rotary stage pin shaft, a pin, a tension spring and a limiting block, the rotary stage pin shaft, the pin, the tension spring and the limiting block are arranged on a table top of the electrically controlled translation stage, the tension spring is supported between the pin and the rotary stage pin shaft, and the limiting block is fixed between the rotary stage pin shaft and the pin and is attached to the rotary stage pin shaft on the side surface; the rotary table is provided with a pin hole matched with the rotary pin shaft, the rotary driving translation table is fixed on the rotary base, and the rotary table pin shaft is inserted in the pin hole. The tension spring ensures that the rotary table pin shaft is in close contact with the side face of the limiting block, so that the rotary table pin shaft fixed on the table top can be stirred when the table top of the electric control translation table moves, and the rotary table top is driven to deflect. The mode realizes the driving of the rotating table board through the linear motion of the electric control translation table, the deflection amount is convenient to preset, the operation is convenient, and the precision is high.
In some embodiments, the driving shaft and the driven shaft respectively comprise a motor hand wheel, a motor with an encoder, a coupler, a bearing seat and a simulation shaft which are connected in sequence, and the motor drives the simulation shaft to rotate between 0 and 360 degrees. From this, just can realize the measurement to the indicating value error of position sensitive sensor, inclinometer and centering deviation simultaneously through this calibration equipment, convenient operation, calibration type is diversified, more accords with the actual service behavior of laser centering appearance, and can satisfy different user demands.
In some embodiments, the support base is a right angle rotating block, and the second translation stage is fixed on a vertical surface of the right angle rotating block. Therefore, the second translation platform can be conveniently fixed and installed, and the equipment structure is simple.
In some embodiments, the total length of the guide rail is 1000mm, the maximum translation stroke of the first translation stage and the maximum translation stroke of the second translation stage are both 100mm, and the angular deflection range of the yaw angle stage and the pitch angle stage are both-5 ° to +5 °. Within the range, the laser centering instrument more accords with the working principle and the range of the laser centering instrument, and can ensure the measurement precision.
According to another aspect of the present invention, there is also provided a method for measuring indication errors of a position sensitive sensor and an inclinometer of a laser centering instrument by using the calibration device of the laser centering instrument, the method comprising: resetting the calibration equipment, and vertically fixing a laser emitter and a position sensitive sensor of the laser centering instrument on a driving shaft and a driven shaft of the calibration equipment respectively; adjusting the positions of the laser emitter and the position sensitive sensor; clearing the reading of the position sensitive sensor, and controlling the movement of the driven shaft by adjusting the displacement of the first translation platform so as to measure the indicating value error of the position sensitive sensor in the horizontal direction; and (4) clearing the reading of the position sensitive sensor, and controlling the movement of the driven shaft in the vertical plane by adjusting the displacement of the second translation platform so as to measure the indication error of the position sensitive sensor in the vertical direction. The method for measuring by using the calibration equipment is simple to operate, can display indicating value errors in real time, can measure the deviation amount of the position sensitive sensors at different point positions by adjusting the first translation table and the second translation table, is more accurate in calibration, and is beneficial to the realization of the localization of the laser centering instrument.
In some embodiments, when the calibration device includes a first table and a second table that are movable along the guide rail, the method further includes the step of adjusting the first table and the second table of the calibration device to adjust the distance between the fixed rotating shaft and the adjustable rotating shaft after resetting the calibration device. Therefore, the position sensitive sensor can be conveniently measured at different distance positions according to requirements.
In some embodiments, the distance between the fixed and adjustable spindles is adjusted such that the laser transmitter is 150mm from the position sensitive sensor. According to the measuring principle of the laser centering instrument and the working principle of the position sensitive sensor, the distance can effectively reduce measuring errors.
In some embodiments, when the driving and driven shafts of the calibration device include motors with encoders, the method further comprises the step of measuring the indication error of the inclinometer, the step comprising: presetting motors of a driving shaft and a driven shaft of the calibration equipment, and starting the motors to drive the driving shaft and the driven shaft to rotate by a preset angle; and reading the indicating value of the inclinometer, and comparing the indicating value of the inclinometer with a preset angle to obtain the indicating value error of the inclinometer. According to the operation method of the motor, the rotation angle quantity is preset through the motor, the two shafts are driven by the motor to rotate, real-time measurement of the indication value error of the inclinometer can be achieved, the operation is very simple and convenient, and the motor-driven control precision is very high. Moreover, the rotation angle amount can be set arbitrarily through a driving program, measurement of different measurement points is achieved, and a calibration result can be more accurate.
According to another aspect of the present invention, there is also provided a method for measuring an indication error of a centering deviation of a laser centering instrument by using the aforementioned laser centering instrument calibration apparatus, the method including: resetting the calibration equipment, and vertically fixing a laser emitter and a position sensitive sensor of the laser centering instrument on a driving shaft and a driven shaft of the calibration equipment respectively; presetting a standard deviation value of the calibration equipment, and adjusting the positions of the first translation table, the second translation table, the deflection angle position table and the pitching angle position table according to the preset standard deviation value; selecting a measuring mode of the laser centering instrument, and inputting the distance between the laser transmitter and the position sensitive sensor; adjusting the rotation angles of the driving shaft and the driven shaft according to the measurement mode of the laser centering instrument, collecting data of each measurement point through the laser centering instrument, calculating and outputting a centering deviation value; and comparing the centering deviation value output by the laser centering instrument with a preset standard deviation value to obtain an indication value error of the centering deviation of the laser centering instrument. Therefore, the alignment deviation of the laser alignment instrument can be measured in real time, actual requirements are met, and a more valuable reference indication value error can be provided for calibration of the laser alignment instrument. Moreover, the method can be realized on one device, the operation process is simple and convenient, effective guarantee is provided for the calibration work of the laser centering instrument, and the production quantity of the laser centering instrument can be effectively promoted and the application of the laser centering instrument can be promoted.
In some embodiments, when the calibration apparatus includes the first table and the second table that are movable along the guide rail, the input distance between the laser transmitter and the position sensitive sensor may be input according to a requirement, and after the input, the method further includes the step of adjusting and fixing the positions of the fixed rotating shaft and the adjustable rotating shaft according to the input distance. Therefore, the positions of the fixed rotating shaft and the adjustable rotating shaft can be adjusted at will according to needs, so that the distances between the two transmitters (LD) and the position sensitive sensor are changed, and the measurement of the centering deviation amount of the two shafts under different distance conditions is realized. Each distance can be measured for many times as a measuring process, and the precision can be further ensured while different measuring requirements are met.
In some embodiments, the preset standard deviation values include a parallel deviation of the first translation stage in a horizontal plane perpendicular to the rail direction, a parallel deviation of the second translation stage in a vertical plane perpendicular to the rail direction, a yaw angle deviation of the yaw angle stage, and a pitch angle deviation of the pitch angle stage, and the adjusting the positions of the first translation stage, the second translation stage, the yaw angle stage, and the pitch angle stage according to the preset standard deviation values includes: setting a parallel deviation amount and an angle deviation amount through driving programs of motors of a first translation table, a second translation table, a deflection angle position table and a pitching angle position table respectively; the motor driving programs of the first translation platform and the second translation platform drive the translation table tops of the first translation platform and the second translation platform to move corresponding distances according to the parallel deviation value; and the motor driving programs of the deflection angle position table and the pitching angle position table drive the table top of the precision translation table to move according to the angle deviation, and the precision translation table drives the rotating table tops of the deflection angle position table and the pitching angle position table to deflect corresponding angles. From this, can predetermine through the motor, realize the real-time measurement to the presetting of four standard deviation values and four standard deviation, more accord with the running state among the actual work process of laser centering instrument, it is very convenient to operate, and the driver control deviation through the motor, and is more accurate to measurement result's reliability has been guaranteed.
In some embodiments, the rotation angle of each measurement point is not less than 20 °, and the measurement points for each measurement process are at least three, the sum of the angles of rotation of the three measurement points being not less than 60 °. Therefore, the centering deviation amount can be obtained by measuring a plurality of measuring points and collecting a plurality of groups of data for calculation, so that the measured centering deviation indicating value is more consistent with the actual state of the calibrated instrument.
Drawings
FIG. 1 is a schematic diagram of the device principle of the laser centering instrument calibration apparatus of the present invention;
FIG. 2 is a schematic axial view of the structure and coordinates of a laser centering device calibration apparatus according to an embodiment of the present invention;
FIG. 3 is a schematic diagram of the laser centering apparatus of FIG. 2;
FIG. 4 is a schematic diagram of an exploded view of the laser centering apparatus shown in FIGS. 2 and 3;
FIG. 5 is a schematic view of another view of the laser centering apparatus calibration device shown in FIG. 3;
FIG. 6 is a schematic structural diagram of the first mobile platform and the second mobile platform shown in FIG. 3;
FIG. 7 is a schematic view of the structure of the yaw and pitch stages of FIG. 3;
FIG. 8 is a schematic view of the rotationally driven translation stage of FIG. 7;
FIG. 9 is a schematic view of the mounting structure of the guide rail, the first table and the second table on the base;
FIG. 10 is a schematic structural view of a driving shaft and a driven shaft;
FIG. 11 is a schematic flow chart illustrating a method for measuring an indication error of a position sensitive sensor of a laser centering device by a laser centering device calibration apparatus according to an embodiment of the present invention;
FIG. 12 is a schematic flow chart of a method for measuring an indication error of an inclinometer of a laser centering instrument through a laser centering instrument calibration device according to an embodiment of the invention;
fig. 13 is a schematic flow chart of a method for measuring an indication error of a centering deviation of a laser centering instrument by a laser centering instrument calibration device according to an embodiment of the present invention.
Detailed Description
Embodiments of the present invention will be described in detail below with reference to the accompanying drawings.
The laser centering instrument can realize the functions of automatic data acquisition, automatic data processing, real-time adjustment amount display and the like, and the main core components of the laser centering instrument are a semiconductor laser with high safety level, a high-sensitivity position sensitive sensor (a photoelectric sensitive sensor PSD or an image sensor CCD) and an inclinometer, and the laser centering instrument has the working principle that: the laser alignment instrument comprises a position sensitive sensor, a display system, a laser transmitter, a position sensor, a display system and a centering deviation model, wherein light beams emitted by the laser form tracks on the position sensitive sensor, if the relative position of a measured object changes, the position (PSD or CCD coordinate value) of the position sensitive sensor changes, the display system of the laser alignment instrument automatically processes and compensates data according to a coordinate quantity acquired by the position sensitive sensor, a turning angle quantity of the inclinometer, the distance from the manually input laser transmitter to a receiving surface of the position sensitive sensor and the mathematical relationship model of the centering deviation, and then centering deviation value output is obtained.
According to the working principle and function of the laser centering instrument, the calibration of a measuring device (such as the laser centering instrument) consisting of a laser transmitter, a position sensitive sensor, an inclinometer and a special display can be known, and mainly the calibration of the angle quantity of the inclinometer, the seating quantity of the position sensitive sensor in the horizontal and vertical directions and the centering deviation indicating value error of the laser centering instrument are calibrated. The horizontal and vertical sitting quantity of the position sensitive sensor can be calibrated on a translation table capable of moving back and forth or up and down, the angle quantity of the inclinometer can be calibrated on an angle indexing table, and the indication error of the centering deviation can be calibrated through a calibration device capable of measuring the sitting quantity, the deflection and the pitching deviation quantity of the position sensitive sensor at the same time. It is therefore an object of the present invention to provide such a calibration device to enable calibration of the position sensitive sensor seating amount, inclinometer angular amount, and alignment deviation indication error of a laser alignment instrument. Fig. 1 shows the working principle of the calibration apparatus according to the present invention, and as shown in fig. 1, a fixed part (i.e. the driving shaft part in fig. 1) and an adjustable part (i.e. the driven shaft part in fig. 1) can be disposed in the calibration apparatus, and the laser emitter (i.e. the LD in fig. 1) and the position-sensitive sensor (i.e. the PSD or CCD in fig. 1) of the laser centering instrument are disposed on the driving shaft and the driven shaft, respectively, so that the measurement can be calibrated by adjusting the driven shaft. Fig. 2 to 10 show a laser centring device according to a preferred embodiment of the present invention. The structure of the laser centering device calibration apparatus will be described in detail below by taking the preferred embodiments of fig. 2 to 10 as examples.
As shown in fig. 2 to 5, the laser centering device calibration apparatus in this embodiment includes a base 1, a fixed rotating shaft 2, and an adjustable rotating shaft 3, where the fixed rotating shaft 2 and the adjustable rotating shaft 3 are disposed on the base 1, and the adjustable rotating shaft 3 can be adjusted in the X-axis, Y-axis, and Z-axis directions. As shown in fig. 3, the fixed rotary shaft 2 includes a driving shaft 23 and a support frame 22 for supporting the driving shaft 23, and the adjustable rotary shaft 3 includes a support base 34, a driven shaft 37, a first translation stage 32 for moving the driven shaft 37 in a horizontal plane perpendicular to the guide rail (i.e., moving forward and backward in the Y direction shown in fig. 2), a second translation stage 35 for moving the driven shaft 37 in a vertical plane perpendicular to the guide rail (i.e., moving up and down in the Z direction shown in fig. 2), a yaw angle stage 33 for azimuthally deflecting the driven shaft 37 (i.e., performing a yaw motion within a certain angle range about the Z axis shown in fig. 2), and a pitch angle stage 36 for pitch deflecting the driven shaft 37 (i.e., performing a pitch motion within a certain angle about the Y axis shown in fig. 2). As shown in fig. 3 and 9, two parallel guide rails 11 with sliders 111 are disposed on the base 1, two table tops, namely a first table top 21 and a second table top 31, are disposed on the guide rails 11, and the first table top 21 and the second table top 31 are disposed on the guide rails 11 through the sliders 111 and can slide along the guide rails 11 in the X-axis direction. The support frame 22 is arranged on the first table top 21, the first translation stage 32 is arranged on the second table top 31, the deflection angle stage 33 is arranged on the first translation stage 32, the support base 34 is arranged on the deflection angle stage 33, the second translation stage 35 is arranged on the support base 34, the pitch angle stage 36 is arranged on the second translation stage 35, and the driven shaft 37 is arranged on the pitch angle stage 36. In order to accommodate the feature that the second translation stage 35 moves up and down in the Z-axis direction, as shown in fig. 3, 4 and 5, the support base 34 is designed as a right-angle turning block in the preferred embodiment, the horizontal plane of the right-angle turning block is set on the yaw angle table 33, and the second translation stage 35 is fixed on the vertical plane of the right-angle turning block. However, the design of the supporting seat 34 in this embodiment should not be considered as a limitation to the invention, and it can be understood by those skilled in the art that other structures are matched as long as the translation stage can drive the driven shaft to move up and down in the Z-axis direction, and all the specific implementations based on the principle concept of the invention are within the protection scope of the invention.
In order to ensure the stability of the first table 21 and the second table 31 in specific positions, as shown in fig. 3, the apparatus of the embodiment of the present invention further includes a locking mechanism 4 capable of fixing the first table 21 and the second table 31 in specific positions. As shown in fig. 9, in a specific embodiment, the locking mechanism 4 comprises a locking plate 41, a locking hand wheel 43 and a locking nut (not shown), wherein screw holes (such as the screw hole 42 on the locking plate and the screw hole on the side of the second table 31 in fig. 9) are respectively arranged on corresponding positions of the locking plate 41, the first table 21 and the second table 31, a T-shaped groove 12 is arranged on the base 1, the upper end of the locking plate 41 is fixed on the side of the first table 21 and the second table 31 through the screw hole 42, and the lower end of the locking plate 41 is inserted into the T-shaped groove 12 through the screw hole on the lower end of the locking plate 41 by the locking hand wheel 453 and is buckled with the locking nut in the groove of the T-shaped groove 12.
Fig. 6 to 10 show the specific structure of each main component in the preferred embodiment shown in fig. 2 to 5, respectively. Fig. 6 shows the structures of the first translation stage and the second translation stage, fig. 7 and 8 show the structures of the yaw angle stage and the pitch angle stage, fig. 9 shows the mounting structure of two table tops on the base with the guide rails, and fig. 10 shows the structures of the driving shaft and the driven shaft.
Wherein, first translation platform 32 and second translation platform 35 all can select for use the automatically controlled translation platform that has grating chi and limit switch. Fig. 6 shows an electric control translation stage with a specific structure, as shown in fig. 6, the electric control translation stage may be an electric control translation stage including a translation stage base 324, a translation stage table 325, a first front bearing seat 322, a first rear bearing seat 329, a first ball screw 323, a translation stage driving motor 321, a limit switch 328 and a translation stage grating scale 326, the translation stage driving motor 321 is disposed at one end of the translation stage base 324, the first front bearing seat 322 is disposed at a driving motor end of the translation stage base 324, the first rear bearing seat 329 is disposed at an opposite end of the translation stage base 324, the first ball screw 323 is disposed on the translation stage base 324, and one end thereof is connected to the translation stage driving motor 321 through the first front bearing seat 322, and the other end thereof is fixed on the first rear bearing seat 329, two translation stage guide rails 327 disposed in parallel on the translation stage base 324, the translation stage table 325 is disposed on the translation stage guide rails 327 and fixed together with the first ball screw 323, the translation stage grating scale 326 is disposed on the translation stage base 326, and the limit switch 328 is disposed at an inner side of the bearing seats (i.e., the first front bearing seats and the first rear bearing seats). The specific installation mode of the electric control translation stage with the structure can be realized by referring to the prior art, and the installation sequence is not repeated herein.
As shown in fig. 7, each of the yaw-angle stage 33 and the pitch-angle stage 36 includes a rotating base 331, a rotating bearing 333, a rotating table surface 332, a rotation driving translation stage 334, and an arc grating ruler (not shown, disposed on an arc edge of the rotating table surface 332, visible in fig. 7). One end of the rotating base 331 is connected with one end of the rotating table surface 332 through a rotating bearing 333, the other end of the rotating base is connected with the other end of the rotating table surface through a rotating driving translation table 334, the arc grating ruler is arranged on the edge of the rotating table surface 332 close to the rotating driving translation table 334, and the rotating table surface can deflect under the driving of the rotating driving translation table. The specific principle is that, as shown in fig. 8, the rotationally driven translation stage 334 is designed to include a compact electrically controlled translation stage, and a rotating stage pin shaft 3342, a pin 3341, an extension spring 3343 and a limit block 3344 which are arranged on the top surface of the electrically controlled translation stage, wherein the extension spring 3343 is supported between the pin 3341 and the rotating stage pin shaft 3342, and the limit block 3344 is fixed between the rotating stage pin shaft 3342 and the pin 3341 and has a side surface attached to the rotating stage pin shaft 3342. As shown in fig. 7, a pin hole 335 is provided in the rotary table surface, the rotary drive translation table 334 is fixed to the rotary base 331, and the rotary table pin 3342 can fix the rotary table surface 332 through the pin hole 335. The limiting block 3344 preferably has a high side flatness, and the tension spring 3343 ensures that the rotary table pin shaft 3342 is in close contact with the side of the limiting block 3344, so that when the close electric control translation table moves under the driving of the motor, the rotary table surface 332 can be pushed to rotate by the movement of the rotary table pin shaft 3342. It should be noted that the structure of the precision translation stage used for the rotation driving translation stage 334 may be the same as the structure of the electrically controlled translation stage used for the first translation stage and the second translation stage shown in fig. 6, and therefore, the details are not repeated herein. Of course, it can be understood by those skilled in the art that the specific structure of the first translation stage, the second translation stage and the precision translation stage used by the rotation driving translation stage can be selected from other suitable types of electric control or manual translation stages as long as the purpose of the invention can be achieved.
As shown in fig. 10, the driving shaft and the driven shaft may be configured to each include a simulation shaft 236, a bearing seat 234, a motor 232 with an encoder, and a motor handwheel 231, wherein the simulation shaft 236 may be configured to be fixed to the bearing seat 234 by a pair of angular contact bearings, the bearing seat 234 is configured on the motor 232, the simulation shaft 236 is connected to the motor 232 by a coupling (not shown), and the motor 232 drives the simulation shaft 236 to rotate by a rotational angle of 360 °. In a specific use, calibration of the angular amount of the inclinometer can be performed by providing the laser emitter and position sensitive sensor (integral with the inclinometer) of the laser centering instrument on the simulation shaft 236, and simulating the amount of rotation of the shaft 236 under the drive of the motor 232. As shown in fig. 2 to 5, since the driven shaft 37 is disposed on the pitch angle stage 36 and the pitch angle stage 36 is disposed on the second translation stage 35, the horizontal and vertical displacements of the position sensitive sensor can be calibrated by Y-direction translation and Z-direction translation of the analog shaft 236 of the driven shaft 37 driven by the first translation stage 32 and the second translation stage 35, and the measurement of the indication error of the centering deviation of the laser centering device can also be performed by the measurement of the yaw and pitch angles of the two angle stages. The laser emitter and the position-sensitive sensor may be disposed on the simulation shaft 236, for example, by a clamp, which may be designed integrally with the simulation shaft or detachably mounted on the clamp.
In order to meet the measurement requirements of laser centering instruments with different measuring ranges and ensure the accuracy of distance setting between the position-sensitive sensor and the laser emitter in the preferred embodiment, as the first table top and the second table top are capable of translating along the guide rail, a digital display scale 5 is further arranged on the base 1 in the preferred embodiment, as shown in fig. 3 and 9. As shown in fig. 9, the digital display scale 5 is fixed on the base through the fixing frames 52 at both ends thereof, and after the first table 21 and the second table 31 are moved, the calipers 51 of the digital display scale 5 are respectively attached to the locking handwheels 43 placed at the inner sides of the locking sheets 4 (i.e. two locking handwheels closest to each other in the two locking sheets of the first table and the second table, as shown in the figure), and the precise distance between the simulation axis of the driving shaft 23 and the simulation axis of the driven shaft 37, that is, the distance between the position sensitive sensor and the receiving surface of the laser emitter, can be obtained through the reading difference between the two calipers 51.
According to the measuring principle of the laser centering instrument and the working principle of the position sensitive sensor, in order to reduce measuring errors, when the position sensitive sensor is calibrated, the distance between the laser transmitter and the receiving surface of the position sensitive sensor is generally 150mm, and the receiving surface of the position sensitive sensor is ensured to be perpendicular to a light beam emitted by the laser transmitter, therefore, in some preferred embodiments of the invention, the total length of the guide rail can be set to be 1000mm, the maximum translation travel of the first translation platform and the second translation platform is set to be 100mm, the straightness is set to be 0.01/600mm, and the movement angle range of the deflection angle platform and the pitch angle platform is set to be between-5 degrees and +5 degrees. The grating rulers of the first translation stage, the second translation stage, the deflection angle stage and the pitching angle stage are all high-precision absolute grating rulers, and in order to ensure the precision of the grating rulers after calibration, 304 stainless steel with a small thermal expansion coefficient is preferably selected as each main body part in the embodiment of the invention.
In a preferred embodiment, the base can be a marble base to ensure high rigidity, high precision and low thermal expansion coefficient of the base.
In other embodiments, planetary reducers may also be provided on the driving and driven shafts.
While the above description is based on the preferred embodiment of the laser centering device calibration apparatus of fig. 2-10, it is contemplated that other combinations of the parts of the calibration apparatus may be implemented, for example, in some embodiments, the calibration apparatus of the present invention may only measure the vertical and horizontal displacements of the position sensitive sensor, in such an embodiment, the adjustable rotating shaft may not have a yaw angle stage and a pitch angle stage, and the driving shaft and the driven shaft may only be a simple analog shaft that cannot be rotated. For another example, in some embodiments, the calibration apparatus of the present invention may also be capable of measuring the vertical and horizontal displacements of a position sensitive sensor and the tilt angle of an inclinometer, and in such embodiments, the adjustable axis may be free of a yaw angle stage and a pitch angle stage, with the drive and driven axes being in the most preferred embodiment a structure that includes a simulated axis that is capable of 360 ° rotation. For another example, in some embodiments, the calibration apparatus of the present invention may be designed to measure the three indicating errors simultaneously, but the base may have no guide rail and first and second table surfaces, and the support frame for fixing the rotating shaft is directly disposed on the base, and the first translation table for adjusting the rotating shaft is also directly disposed on the base (in this case, only some indicating values of the laser centering apparatus at a specific distance can be calibrated, and some laser centering apparatuses of specific models or ranges are suitable). In specific use, the user can modify the calibration according to the common calibration requirement and the comprehensive consideration of the cost, and the modification is regarded as the modification based on the concept of the invention and belongs to the protection scope of the invention.
Fig. 11-13 illustrate a method for measuring the position sensitive sensor, inclinometer and indication error of centering deviation of a laser centering instrument by using the laser centering instrument calibration device in the embodiment of the invention.
Fig. 11 is a flow chart of a method for measuring a value error of a position-sensitive sensor of a laser centering device, as shown in fig. 11, taking a first table top and a second table top which are arranged on a base and can move along a guide rail as an example, the method includes:
step S110: resetting the calibration device and adjusting the distance between the fixed rotating shaft and the adjustable rotating shaft.
The first translation stage and the second translation stage of the calibration apparatus are both returned to zero positions, and in embodiments where there are angular stages in the apparatus, the drive shaft, the driven shaft, the yaw angular stage, and the pitch angular stage are also all returned to zero positions. And then, the distance between the fixed rotating shaft and the adjustable rotating shaft of the calibration equipment is adjusted in a manual mode, namely, the first table top and the second table top are moved to required positions by manually loosening the locking mechanism, and then the locking structure is fixed so as to adjust the distance between the fixed rotating shaft and the adjustable rotating shaft and fix the fixed rotating shaft and the adjustable rotating shaft at a specific position. In the preferred embodiment, the distance between the fixed rotating shaft and the adjustable rotating shaft is adjusted to be 150mm between the laser transmitter and the position sensitive sensor.
Step S111: and installing a laser transmitter and a position sensitive sensor of the laser centering instrument on the calibration equipment.
A laser emitter and a position sensitive sensor of the laser centering instrument are respectively and vertically fixed on a driving shaft and a driven shaft of the calibration device, for example, fixed on a simulation shaft through a clamp.
Step S112: and adjusting the positions of the laser emitter and the position sensor.
And adjusting the positions of the laser emitter and the position sensitive sensor to enable laser to strike at the middle position of the receiving surface of the position sensitive sensor, ensuring that the axis of the laser is vertical to the receiving surface of the position sensitive sensor, and ensuring that the horizontal and vertical coordinate axes of the position sensitive sensor are respectively parallel to the movement axes of the first translation table and the second translation table of the calibration equipment.
Step S113: the indication error of the position sensitive sensor in the horizontal direction is measured.
And clearing the reading of the position sensitive sensor, adjusting the first translation table to enable the driven shaft to move back and forth in a horizontal plane perpendicular to the guide rail, and respectively reading indication values of the position sensitive sensor and the first translation table to obtain an indication value error of the position sensitive sensor in the horizontal direction, namely, the difference between the indication value of the position sensitive sensor and the indication value of the grating ruler of the first translation table is the indication value error of the position sensitive sensor of the laser centering instrument in the horizontal direction.
Step S114: the indication error of the position sensitive sensor in the vertical direction is measured.
And clearing the reading of the position sensitive sensor, adjusting the second translation platform to enable the driven shaft to move vertically in a vertical plane perpendicular to the guide rail, and respectively reading indication values of the position sensitive sensor and the second translation platform to obtain an indication value error of the position sensitive sensor in the vertical direction, namely, the difference between the indication value of the position sensitive sensor and the indication value of a grating ruler of the second translation platform is the indication value error of the position sensitive sensor of the laser centering instrument in the vertical direction.
Therefore, according to the maximum displacement strokes of the first translation table and the second translation table, any point position of the position sensitive sensor of the laser centering instrument can be measured in the maximum strokes, and the calibration result is more accurate.
Fig. 12 is a method for measuring a registration error of an inclinometer of a laser centering apparatus, for example, in the case that the distance between a fixed shaft and a driven shaft on a calibration device for measurement is fixed, that is, a fixed rotating shaft and an adjustable rotating shaft cannot move in the X-axis direction, as shown in fig. 12, the method includes:
step S120: the calibration device is reset.
The first translation stage and the second translation stage of the calibration device are all restored to zero positions, and in the embodiment with the angular stage in the device, the driving shaft, the driven shaft, the yaw angular stage and the pitch angular stage are all restored to zero positions.
Step S121: and installing a laser emitter and a position sensor of the laser centering instrument on the calibration equipment.
Step S121 is the same as step S111, and the above description can be referred to.
Step S122: and adjusting the position of the position sensor.
And adjusting the position of the position sensitive sensor to ensure that the receiving surface of the position sensitive sensor is vertical to the axis of the rotating shaft. .
Step S123: the error in the indication of the angular quantity of the inclinometer is measured.
The motors of the driving shaft and the driven shaft of the calibration equipment are preset, namely the rotating angle of the simulation shaft and the operation method of the used motor are enabled to rotate according to requirements, and firstly, the rotating angle of the motor is enabled to rotate in a driving program of the motor. After setting, the motor is started to drive the driving shaft and the driven shaft to rotate by a preset angle. When the driving shaft and the driven shaft rotate to the preset angle position, the indication value of the inclinometer is read, comparison is carried out according to the indication value of the inclinometer and the preset angle, and the difference between the indication values is the indication value error of the angle quantity of the inclinometer.
It should be noted that, when the indication error of the inclinometer is measured, the analog shafts of the driving shaft and the driven shaft are required to rotate, so that in the application occasion that only the inclination angle of the inclinometer needs to be calibrated, the structure of the calibration equipment can enable the structure of the adjustable rotating shaft to be similar to that of the fixed rotating shaft, the equipment structure is simpler, and the cost is saved.
Fig. 13 is a flow chart of a method for measuring an indication error of a centering deviation of a laser centering device, as shown in fig. 13, for example, a calibration apparatus for measurement including a first table and a second table slidable along a guide rail, the method including:
step S130: the calibration device is reset.
And restoring the first translation table, the second translation table, the driving shaft, the driven shaft, the deflection angle table and the pitching angle table of the calibration equipment to zero positions.
Step S131: and respectively and vertically fixing a laser emitter and a position sensitive sensor of the laser centering instrument on a driving shaft and a driven shaft of the calibration equipment.
Step S132: and presetting a standard deviation value of the calibration equipment, and adjusting the positions of the first translation table, the second translation table, the deflection angle position table and the pitching angle position table according to the preset standard deviation value.
The preset standard deviation values comprise parallel deviation of the first translation table in the horizontal plane perpendicular to the direction of the guide rail, parallel deviation of the second translation table in the vertical plane perpendicular to the direction of the guide rail, deflection angle deviation of the deflection angle position table and pitching angle deviation of the pitching angle position table. The standard deviation value of the preset calibration equipment is set through a driving program of a motor, and the standard deviation value comprises a parallel deviation value and an angle deviation value which are set through the driving program of the motor of the first translation table, the second translation table, the deflection angle position table and the pitching angle position table. And then starting the motors, wherein the motor driving programs of the first translation platform and the second translation platform drive the translation table tops of the first translation platform and the second translation platform to move corresponding distances according to the parallel deviation amount, the motor driving programs of the deflection angle position platform and the pitching angle position platform drive the table top of the precision translation platform to move according to the angle deviation amount, and the precision translation platform drives the rotating table tops of the deflection angle position platform and the pitching angle position platform to deflect corresponding angles.
Step S133: and selecting a measurement mode of the laser centering instrument, and setting the distance between the laser transmitter and the position sensitive sensor.
The measuring mode of the laser centering instrument is selected, and the distance between the laser transmitter and the position sensitive sensor is input (the selection setting and the input operation can be carried out by referring to the operation instruction of the laser centering instrument). And then, manually adjusting and fixing the positions of the first table top and the second table top of the calibration equipment according to the input distance, namely manually loosening the locking mechanism to move the first table top and the second table top to the required positions, and then fixing the locking structure to adjust the distance between the fixed rotating shaft and the adjustable rotating shaft and fix the fixed rotating shaft and the adjustable rotating shaft at the specific positions. It should be noted that after the position is fixed, the position is fixed during one measurement, that is, the whole measurement process of a specific position is a measurement process.
Step S134: and setting measuring points, collecting data of each measuring point by a laser centering instrument, calculating and outputting a centering deviation value.
And adjusting the rotation angles of the driving shaft and the driven shaft according to the measurement mode of the laser centering instrument, wherein each rotation angle is a measurement point. In a preferred embodiment, the rotation angle of each measuring point is not less than 20 °, and the measuring points of one measuring process are at least three, and the sum of the angles of rotation of the three measuring points is not less than 60 °. The laser alignment instrument collects data of each measuring point, including coordinate values of the position sensitive sensor and angle values of the inclinometer, calculates alignment deviation values according to the data of each measuring point, and then outputs the four calculated alignment deviation values.
Step S135: and measuring the indication error of the centering deviation of the laser centering instrument.
The alignment deviation value output by the laser alignment instrument is compared with a preset standard deviation value, the difference between the alignment deviation value and the preset standard deviation value is an indication error, and the step can be obtained through manual calculation or can be realized through comparison and output through specific software or a device.
The measurement method of fig. 11 to 13 can be implemented by one calibration device, or can be applied to a calibration device (such as the case of some other non-optimal embodiments described above) which can only implement one or two measurements, and the present invention is not limited to this, and it is important how to implement the measurement of the indication errors of the three indications of the laser centering device by using the calibration device designed based on the inventive concept.
What has been described above are merely some embodiments of the present invention. It will be apparent to those skilled in the art that various changes and modifications can be made without departing from the inventive concept thereof, and these changes and modifications can be made without departing from the spirit and scope of the invention.
Claims (17)
1. Laser centering appearance calibration equipment, its characterized in that includes: the device comprises a base (1), a fixed rotating shaft (2) and an adjustable rotating shaft (3), wherein the fixed rotating shaft (2) and the adjustable rotating shaft (3) are arranged on the base (1);
the fixed rotating shaft (2) comprises a driving shaft (23) and a supporting frame (22) for supporting the driving shaft;
the adjustable rotating shaft (3) comprises a supporting seat (34), a driven shaft (37), a first translation platform (32) for enabling the driven shaft to move in a horizontal plane perpendicular to the base, a second translation platform (35) for enabling the driven shaft to move in a vertical plane perpendicular to the base, a deflection angle position platform (33) for enabling the driven shaft to deflect in azimuth, and a pitch angle position platform (36) for enabling the driven shaft to deflect in pitch;
the supporting frame (22) and the first translation table (32) are respectively arranged on the base (1), the deflection angle table (33) is arranged on the first translation table (32), the supporting seat (34) is arranged on the deflection angle table (33), the second translation table (35) is arranged on the supporting seat (34), the pitch angle table (36) is arranged on the second translation table (35), and the driven shaft (37) is arranged on the pitch angle table (36);
the driving shaft (23) and the driven shaft (37) can rotate 360 degrees.
2. Calibration device according to claim 1, characterized in that two guide rails (11) parallel to each other are arranged on the base (1), a first table top (21) and a second table top (31) are arranged on the guide rails (11) and can slide along the guide rails, the support frame (22) is arranged on the first table top (21), and the first translation stage (32) is arranged on the second table top (31).
3. The calibration device of claim 2, wherein the device further comprises a locking mechanism (4) capable of fixing the first table top (21) and the second table top (31) at a specific position, the locking mechanism (4) comprises a locking sheet (41), a locking hand wheel (43) and a locking nut, wherein the locking sheet (41), the first table top (21) and the second table top (31) are all provided with screw holes, the base (1) is provided with a T-shaped groove (12), the locking sheet (41) is fixedly connected with the first table top (21) and the second table top (31) through the screw holes and the screws respectively, and the locking hand wheel (43) penetrates through the screw holes in the locking sheet to be inserted into the T-shaped groove (12) and is buckled with the locking nut in the T-shaped groove.
4. Calibration device according to claim 3, wherein the first translation stage (32) and the second translation stage (35) are electrically controlled translation stages provided with a grating ruler and a limit switch, wherein the first translation stage (32) is fixed on the second table top (31) in a horizontal direction and the second translation stage (35) is fixed on the support base (34) in a vertical direction.
5. The calibration device according to claim 4, wherein the yaw angle stage (33) and the pitch angle stage (36) each comprise a rotary base (331), a rotary bearing (333), a rotary table top (332), a rotary driving translation stage (334) and a circular arc grating ruler, wherein the rotary base (331) and the rotary table top (332) are connected through the rotary bearing (333) at one end and the rotary driving translation stage (334) at the other end, the circular arc grating ruler is arranged at the edge of the rotary table top (332) close to the rotary driving translation stage (334), and the rotary driving translation stage (334) drives the rotary table top (332) to rotate.
6. The calibration device according to claim 5, wherein the rotationally driven translation stage (334) comprises an electrically controlled translation stage, a rotation stage pin (3342), a pin (3341), a tension spring (3343), and a stop block (3344), wherein the rotation stage pin (3342), the pin (3341), the tension spring (3343), and the stop block (3344) are disposed on a top surface of the electrically controlled translation stage, the tension spring (3343) is supported between the pin (3341) and the rotation stage pin (3342), the stop block (3344) is fixed between the rotation stage pin (3342) and the pin (3341) and laterally abuts the rotation stage pin (3342); wherein the content of the first and second substances,
be equipped with on rotatory mesa (332) with pinhole (335) of rotatory round pin axle adaptation, rotation drive translation platform (334) are fixed on rotating base (331), it alternates in to revolve a round pin axle (3342) in pinhole (335).
7. The calibration device according to any one of claims 1 to 6, wherein the driving shaft (23) and the driven shaft (37) each comprise a motor hand wheel (231), a motor (232) with an encoder, a coupling, a bearing seat (234) and a simulation shaft (236) which are connected in sequence, and the motor (232) drives the simulation shaft (236) to rotate between 0 and 360 degrees.
8. Calibration device according to any of claims 1 to 6, wherein the support base (34) is a quarter turn block and the second translation stage (35) is fixed on a vertical face of the quarter turn block.
9. Calibration apparatus according to any of claims 2 to 6, characterized in that the guide rail (11) has a total length of 1000mm, the maximum translation travel of the first translation stage (32) and the second translation stage (35) are each 100mm, and the angular yaw angle stage (33) and the pitch angle stage (36) have an angular yaw range of-5 ° to +5 °.
10. The method for measuring the indication errors of the position sensitive sensor and the inclinometer of the laser centering instrument comprises the following steps:
resetting the calibration equipment, and vertically fixing a laser emitter and a position sensitive sensor of the laser centering instrument on a driving shaft and a driven shaft of the calibration equipment respectively;
adjusting the positions of the laser emitter and the position sensitive sensor;
clearing the reading of the position sensitive sensor, and controlling the movement of the driven shaft by adjusting the displacement of the first translation platform so as to measure the indicating value error of the position sensitive sensor in the horizontal direction;
the reading of the position sensitive sensor is cleared, and the movement of the driven shaft in the vertical plane is controlled by adjusting the displacement of the second translation platform so as to measure the indication error of the position sensitive sensor in the vertical direction;
wherein the calibration device is the laser centering device as claimed in any one of claims 1 to 9.
11. The method of claim 10, wherein when the calibration apparatus includes a first table and a second table that are movable along the rail, after resetting the calibration apparatus, further comprising the step of adjusting the distance between the fixed pivot and the adjustable pivot by adjusting the first table and the second table of the calibration apparatus.
12. The method of claim 11, wherein the distance between the fixed and adjustable shafts is adjusted such that the laser transmitter is 150mm from the position sensitive sensor.
13. The method according to any one of claims 10 to 12, wherein when the driving and driven shafts of the calibration apparatus include motors with encoders, the method further comprises the step of measuring the indication error of the inclinometer, the step comprising:
presetting motors of a driving shaft and a driven shaft of the calibration equipment, and starting the motors to drive the driving shaft and the driven shaft to rotate by a preset angle;
and reading the indicating value of the inclinometer, and comparing the indicating value of the inclinometer with a preset angle to obtain the indicating value error of the inclinometer.
14. A method for measuring an indication error of a centering deviation of a laser centering instrument comprises the following steps:
resetting the calibration equipment, and vertically fixing a laser emitter and a position sensitive sensor of a laser centering instrument on a driving shaft and a driven shaft of the calibration equipment respectively;
presetting a standard deviation value of the calibration equipment, and adjusting the positions of the first translation table, the second translation table, the deflection angle position table and the pitching angle position table according to the preset standard deviation value;
selecting a measurement mode of a laser centering instrument, and inputting the distance between a laser transmitter and a position sensitive sensor;
adjusting the rotation angles of the driving shaft and the driven shaft according to the measurement mode of the laser centering instrument, collecting data of each measurement point through the laser centering instrument, calculating and outputting a centering deviation value;
comparing the centering deviation value output by the laser centering instrument with a preset standard deviation value to obtain an indication value error of the centering deviation of the laser centering instrument;
wherein the calibration apparatus is the laser centering apparatus of any one of claims 1 to 9.
15. The method of claim 14, wherein when the calibration device comprises a first table and a second table movable along the guide rail, the input distance between the laser transmitter and the position sensitive sensor can be input according to the requirement, and after the input, the method further comprises the step of adjusting and fixing the positions of the fixed rotating shaft and the adjustable rotating shaft according to the input distance.
16. The method of claim 15, wherein the preset standard deviation values include a parallel deviation of the first translation stage in a horizontal plane perpendicular to the rail direction, a parallel deviation of the second translation stage in a vertical plane perpendicular to the rail direction, a yaw angle deviation of the yaw angular position stage, and a pitch angle deviation of the pitch angular position stage, and the adjusting the positions of the first translation stage, the second translation stage, the yaw angular position stage, and the pitch angular position stage according to the preset standard deviation values includes:
setting a parallel deviation amount and an angle deviation amount through driving programs of motors of a first translation table, a second translation table, a deflection angle position table and a pitching angle position table respectively;
the motor driving programs of the first translation platform and the second translation platform drive the translation table surfaces of the first translation platform and the second translation platform to move corresponding distances according to the parallel deviation value;
and the motor driving programs of the deflection angle position table and the pitching angle position table drive the table top of the precise translation table to move according to the angle deviation, and the precise translation table drives the rotating table tops of the deflection angle position table and the pitching angle position table to deflect corresponding angles.
17. The method of claim 14 or 15 or 16, wherein the rotation angle of each measurement point is not less than 20 °, and the measurement points of each measurement process are at least three, the sum of the angles of rotation of the three measurement points being not less than 60 °.
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