CN206974389U - Laser alignment instrument calibrator (-ter) unit - Google Patents
Laser alignment instrument calibrator (-ter) unit Download PDFInfo
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- CN206974389U CN206974389U CN201720541013.9U CN201720541013U CN206974389U CN 206974389 U CN206974389 U CN 206974389U CN 201720541013 U CN201720541013 U CN 201720541013U CN 206974389 U CN206974389 U CN 206974389U
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- 238000004088 simulation Methods 0.000 claims abstract description 20
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- 230000007246 mechanism Effects 0.000 claims description 9
- 230000008878 coupling Effects 0.000 claims description 3
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- 239000010963 304 stainless steel Substances 0.000 description 1
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- 238000004422 calculation algorithm Methods 0.000 description 1
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- 238000005516 engineering process Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000004579 marble Substances 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
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- 230000004048 modification Effects 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
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Abstract
The utility model discloses a kind of laser alignment instrument calibrator (-ter) unit, laser alignment instrument calibrator (-ter) unit of the present utility model has the rotating shaft of two separate 360 ° of rotations of energy, and a rotating shaft is fixing axle, is reference axis;Another rotating shaft is driven shaft, can in the horizontal direction, vertical direction is subjected to displacement and pitching and beat.The rotational angle of two rotating shafts is set, and the level of driven shaft, vertical displacement amount and pitching and amount of deflection are adjusted, the measurement of the error of indication to the position sensitive detector of laser alignment instrument displacement both horizontally and vertically, the corner amount of inclinator and alignment deviation can be realized.Equipment provided by the utility model can be in the accurate simulation practical laser centering instrument course of work running status, and be capable of the standard alignment deviation amount of the axle of real-time display two, calibration result is more accurate, and the operability of measurement process is stronger.
Description
Technical Field
The utility model relates to an instrument calibration field especially relates to a laser centering instrument calibrating device.
Background
The laser centering instrument is used for measuring the centering deviation (including the parallel deviation x in the horizontal and vertical directions) between mechanical connecting pieces0、y0And angular deviation theta//、Θ⊥) The apparatus of (1). In recent years, the laser centering instrument is widely applied to manufacturing, installation and debugging and real-time monitoring of large mechanical equipment such as wind power, hydropower, chemical industry, nuclear power, rail transit, ports and docks at home.
In China, a lot of researchers make a lot of researches on the aspects of measurement principles, algorithm optimization and the like of the laser centering technology, and provide mathematical models such as a coordinate quantity, a corner, centering deviation and the like of the position sensitive sensor, so that a foundation is laid for the localization of the laser centering instrument. However, the localization of the existing laser centering instrument is very low, and the measurement accuracy has a larger gap compared with that of an imported product, so that the development of the domestic laser centering instrument with simple operation and high precision and independent intellectual property rights has great significance for improving the economic benefit and the product quality of enterprises.
The measurement accuracy of the laser centering instrument is related to theoretical values of mathematical models of a sitting quantity, a rotating angle and centering deviation, nonlinear compensation is needed, a more accurate mathematical model is needed to be established, accurate measurement needs to be conducted on the laser centering instrument, and a mathematical relation model of indication errors of the laser centering instrument and the sitting quantity, the rotating angle and the centering deviation is determined. However, at present, the calibration of alignment deviation indication errors of the laser alignment instrument in China is still in an exploration stage, only simple analog measurement is carried out, calibration alignment deviation values cannot be directly given, and the completion of the simple analog measurement needs to use a plurality of instruments for combined measurement. For example, chinese patent application No. 201310475057.2 discloses a simple calibration method for a laser centering instrument, which uses a measuring mandrel and a universal tool microscope combined simple standard device with high precision to realize simple calibration of a horizontal mechanical displacement centering value and a vertical mechanical displacement centering value of the laser centering instrument. The measuring method can only judge whether the working state of the centering instrument is normal, but cannot measure the indicating value error of the centering deviation, so that the value output by the laser centering instrument cannot be reliably evaluated. Moreover, the method for calibrating and measuring the laser centering instrument by combining various instruments has poor operability.
SUMMERY OF THE UTILITY MODEL
According to an aspect of the present invention, a laser centering instrument calibration apparatus is provided to solve at least one of the above problems. The calibration apparatus includes: the fixed rotating shaft and the adjustable rotating shaft are arranged on the base; the fixed rotating shaft comprises a driving shaft and a supporting frame for supporting the driving shaft; the adjustable rotating shaft comprises a supporting seat, a driven shaft, a first translation platform and a second translation platform, wherein the first translation platform is used for enabling the driven shaft to move in a manner of being vertical to the base in a horizontal plane, and the second translation platform is used for enabling the driven shaft to move in a manner of being vertical to the base in a vertical plane; supporting frame and first translation platform set up respectively on the base, and the supporting seat sets up on first translation platform, and the second translation platform sets up on the supporting seat, and the driven shaft setting is on the second translation platform. According to the working principle of the laser centering instrument, the laser emitter and the position sensitive sensor are fixed on the fixed rotating shaft and the adjustable rotating shaft, and the first translation platform and the second translation platform are adjusted, so that the first translation platform and the second translation platform drive the driven shaft to translate in the horizontal direction and the vertical direction, the measurement of the displacement of the position sensitive sensor in the horizontal direction and the vertical direction can be realized, the calibration of the indication error of the position sensitive sensor is realized, the equipment cost is low, the calibration range is wide, the operation is simple, and the laser centering instrument is convenient to calibrate.
In some embodiments, the driving shaft and the driven shaft respectively comprise a motor hand wheel, a motor with an encoder, a coupler, a bearing seat and a simulation shaft which are connected in sequence, and the motor drives the simulation shaft to rotate between 0 and 360 degrees. Therefore, the calibration equipment can be used for simultaneously calibrating the position sensitive sensor and the inclinometer, is low in cost and convenient to operate, has multiple calibration measurement points, improves the calibration precision, and meets the actual use requirement.
According to the utility model discloses a laser centering appearance calibration equipment that another aspect provided, include: the fixed rotating shaft and the adjustable rotating shaft are arranged on the base; the fixed rotating shaft comprises a driving shaft and a supporting frame for supporting the driving shaft; the adjustable rotating shaft comprises a supporting seat, a driven shaft, a first translation platform, a second translation platform, a deflection angle position platform and a pitching angle position platform, wherein the first translation platform is used for enabling the driven shaft to move in a horizontal plane perpendicular to the base, the second translation platform is used for enabling the driven shaft to move in a vertical plane perpendicular to the base, the deflection angle position platform is used for enabling the driven shaft to deflect in the azimuth direction, and the pitching angle position platform is used for enabling the driven shaft to; the supporting frame and the first translation platform are respectively arranged on the base, the deflection angle position platform is arranged on the first translation platform, the supporting seat is arranged on the deflection angle position platform, the second translation platform is arranged on the supporting seat, the pitching angle position platform is arranged on the second translation platform, and the driven shaft is arranged on the pitching angle position platform. This calibration equipment has two mutually independent pivots, and the first translation platform of driven shaft accessible and second translation platform are at the level, the vertical direction removes, thereby change the centering deviation of driven shaft and driving shaft in horizontal direction and vertical direction, and the driven shaft still can carry out beat and every single move rotation through beat angle position platform and every single move angle position platform, thereby can provide the angular deviation of diaxon, can accurately simulate the running state of laser centering appearance working process, from this, just, can realize the calibration to laser centering appearance centering deviation indicating value error through this calibration equipment. The measurement of the position sensitive sensor of the laser centering instrument, the inclinometer and the indication error of the centering deviation can be realized on one calibration device, the operation is convenient, the measurement result is more accurate, and the calibration of the laser centering instrument is facilitated.
In some embodiments, two parallel guide rails are disposed on the base, a first table top and a second table top capable of sliding along the guide rails are disposed on the guide rails, the support frame is disposed on the first table top, and the first translation table is disposed on the second table top. Therefore, the distance between the two shafts can be conveniently adjusted according to measurement requirements, so that the measurement process can be closer to an actual running state, multiple times of measurement can be realized, and the calibration precision is improved.
In some embodiments, the device further comprises a locking mechanism capable of fixing the first table top and the second table top at specific positions, the locking mechanism comprises a locking sheet, a locking hand wheel and a locking nut, wherein the locking sheet, the first table top and the second table top are all provided with screw holes, a T-shaped groove is formed in the base, the locking sheet is fixedly connected with the first table top and the second table top through the screw holes and the screws respectively, and the locking hand wheel penetrates through the screw holes in the locking sheet to be inserted into the T-shaped groove and is buckled with the locking nut in the T-shaped groove. The first table board and the second table board are fixed at specific positions through the locking mechanism, the stability of the locked table board can be guaranteed, the table board is fixed on the side face through the locking sheet, the deformation of the table board caused by locking force in the locking process can be reduced, and the influence on the precision of the calibration table system is reduced.
In some embodiments, the first translation stage and the second translation stage are both electrically controlled translation stages provided with a grating ruler and a limit switch, wherein the first translation stage is fixed on the second table top along the horizontal direction, and the second translation stage is fixed on the support base along the vertical direction. Therefore, the horizontal and vertical displacement can be conveniently realized through the electric control translation platform, closed-loop control is performed through the grating ruler, the displacement is conveniently and directly acquired in real time, the indication value of the position sensitive sensor of the centering instrument is compared with the indication value of the position sensitive sensor of the laser, real-time measurement of the indication value error of the position sensitive sensor and the parallel deviation of the two shafts is realized, the first translation platform and the second translation platform can be limited to operate within a rated range through the limit switch, accidental collision is prevented, and precision loss is avoided. And the electric control translation table has various types and low price, and is beneficial to reducing the cost of equipment.
In some embodiments, the yaw angle table and the pitch angle table each include a rotary base, a rotary bearing, a rotary table top, a rotary driving translation table and an arc grating ruler, one end of the rotary base and one end of the rotary table top are connected through the rotary bearing, the other end of the rotary base and one end of the rotary table top are connected through the rotary driving translation table, the arc grating ruler is arranged on the edge of the rotary table top, which is close to the rotary driving translation table, and the rotary driving translation table drives the rotary table top to rotate. The rotary base is connected with one end of the rotary table top through a crossed roller bearing, and the rotary table top can rotate when the other end of the rotary drive translation table drives the rotary table top, so that azimuth deflection and pitching deflection are realized. And closed-loop control is carried out through the grating ruler, so that real-time display of the angle deviation of the two shafts is facilitated, and the real-time measurement of the indicating value error of the angle centering deviation of the two shafts is realized.
In some embodiments, the rotary driving translation stage comprises an electrically controlled translation stage, a rotary stage pin shaft, a pin, a tension spring and a limiting block, the rotary stage pin shaft, the pin, the tension spring and the limiting block are arranged on a table top of the electrically controlled translation stage, the tension spring is supported between the pin and the rotary stage pin shaft, and the limiting block is fixed between the rotary stage pin shaft and the pin and is attached to the rotary stage pin shaft on the side surface; the rotary table is provided with a pin hole matched with the rotary table pin shaft, the rotary driving translation table is fixed on the rotary base, and the rotary table pin shaft is inserted into the pin hole. The tension spring ensures that the rotary table pin shaft is in close contact with the side face of the limiting block, so that the rotary table pin shaft fixed on the table top can be stirred when the table top of the electric control translation table moves, and the rotary table top is driven to deflect. The mode realizes the driving of the rotating table board through the linear motion of the electric control translation table, the deflection amount is convenient to preset, the operation is convenient, and the precision is high.
In some embodiments, the driving shaft and the driven shaft respectively comprise a motor hand wheel, a motor with an encoder, a coupler, a bearing seat and a simulation shaft which are connected in sequence, and the motor drives the simulation shaft to rotate between 0 and 360 degrees. From this, just can realize the measurement to the indicating value error of position sensitive sensor, inclinometer and centering deviation simultaneously through this calibration equipment, convenient operation, calibration type is diversified, more accords with the actual service behavior of laser centering appearance, and can satisfy different user demands.
In some embodiments, the support base is a right angle rotating block, and the second translation stage is fixed on a vertical surface of the right angle rotating block. Therefore, the second translation platform can be conveniently fixed and installed, and the equipment structure is simple.
In some embodiments, the total length of the guide rail is 1000mm, the maximum translation stroke of the first translation stage and the maximum translation stroke of the second translation stage are both 100mm, and the angular deflection range of the yaw angle stage and the pitch angle stage are both-5 ° to +5 °. Within the range, the laser centering instrument more accords with the working principle and the range of the laser centering instrument, and can ensure the measurement precision.
Drawings
Fig. 1 is a schematic diagram of the device principle of the laser centering instrument calibration device of the present invention;
fig. 2 is a schematic view of the structure and coordinate axis of a laser centering device calibration apparatus according to an embodiment of the present invention;
FIG. 3 is a schematic diagram of the laser centering apparatus of FIG. 2;
FIG. 4 is a schematic diagram of an exploded view of the laser centering apparatus shown in FIGS. 2 and 3;
FIG. 5 is a schematic view of another view of the laser centering apparatus calibration device shown in FIG. 3;
FIG. 6 is a schematic structural diagram of the first mobile platform and the second mobile platform shown in FIG. 3;
FIG. 7 is a schematic view of the structure of the yaw and pitch stages of FIG. 3;
FIG. 8 is a schematic view of the rotationally driven translation stage of FIG. 7;
FIG. 9 is a schematic view of the mounting structure of the guide rail, the first table and the second table on the base;
FIG. 10 is a schematic structural view of a driving shaft and a driven shaft;
fig. 11 is a schematic flow chart of a method for measuring an indication error of a position sensitive sensor of a laser centering instrument by using a calibration device of the laser centering instrument according to an embodiment of the present invention;
fig. 12 is a schematic flow chart of a method for measuring an indication error of an inclinometer of a laser centering instrument through a laser centering instrument calibration device according to an embodiment of the present invention;
fig. 13 is a schematic flow chart of a method for measuring an indication error of a centering deviation of a laser centering device through a laser centering device calibration device according to an embodiment of the present invention.
Detailed Description
Embodiments of the present invention will be described in detail below with reference to the accompanying drawings.
The laser centering instrument can realize the functions of automatic data acquisition, automatic data processing, real-time adjustment amount display and the like, and the main core components of the laser centering instrument are a semiconductor laser with high safety level, a high-sensitivity position sensitive sensor (a photoelectric sensitive sensor PSD or an image sensor CCD) and an inclinometer, and the laser centering instrument has the working principle that: the laser alignment instrument comprises a position sensitive sensor, a display system, a laser transmitter, a position sensor, a display system and a centering deviation model, wherein light beams emitted by the laser form tracks on the position sensitive sensor, if the relative position of a measured object changes, the position (PSD or CCD coordinate value) of the position sensitive sensor changes, the display system of the laser alignment instrument automatically processes and compensates data according to a coordinate quantity acquired by the position sensitive sensor, a turning angle quantity of the inclinometer, the distance from the manually input laser transmitter to a receiving surface of the position sensitive sensor and the mathematical relationship model of the centering deviation, and then centering deviation value output is obtained.
According to the working principle and function of the laser centering instrument, the calibration of a measuring device (such as the laser centering instrument) consisting of a laser emitter, a position sensitive sensor, an inclinometer and a special display can be known, and mainly the calibration of the angle quantity of the inclinometer, the sitting quantity of the position sensitive sensor in the horizontal and vertical directions and the centering deviation indication error of the laser centering instrument are calibrated. The horizontal and vertical sitting quantity of the position sensitive sensor can be calibrated on a translation table capable of moving back and forth or up and down, the angle quantity of the inclinometer can be calibrated on an angle indexing table, and the indication error of the centering deviation can be calibrated through a calibration device capable of measuring the sitting quantity, the deflection and the pitching deviation quantity of the position sensitive sensor at the same time. Therefore, one of the objectives of the present invention is to provide a calibration device to calibrate the position sensitive sensor seating amount, inclinometer angle amount, and alignment deviation indication error of a laser centering device. Fig. 1 is the utility model discloses the theory of operation of calibration equipment that will provide, as shown in fig. 1, can set up a fixed part A (being initiative axle part) and an adjustable part B (being driven axle part) in calibration equipment, set up laser emitter LD and the position sensitive sensor PSD (or CCD) of laser centering instrument on driving shaft and driven shaft respectively, just can calibrate the measurement through adjusting the driven shaft. Fig. 2 to 10 show a laser centering device according to a preferred embodiment of the present invention. The structure of the laser centering device calibration apparatus will be described in detail below by taking the preferred embodiment of fig. 2 to 10 as an example.
As shown in fig. 2 to 5, the laser centering device calibration apparatus in this embodiment includes a base 1, a fixed rotating shaft 2, and an adjustable rotating shaft 3, where the fixed rotating shaft 2 and the adjustable rotating shaft 3 are disposed on the base 1, and the adjustable rotating shaft 3 can be adjusted in the X-axis, Y-axis, and Z-axis directions. As shown in fig. 3, the fixed rotary shaft 2 includes a driving shaft 23 and a support frame 22 for supporting the driving shaft 23, and the adjustable rotary shaft 3 includes a support base 34, a driven shaft 37, a first translation stage 32 for moving the driven shaft 37 in a horizontal plane perpendicular to the guide rail (i.e., moving forward and backward in the Y direction shown in fig. 2), a second translation stage 35 for moving the driven shaft 37 in a vertical plane perpendicular to the guide rail (i.e., moving up and down in the Z direction shown in fig. 2), a yaw angle stage 33 for azimuthally deflecting the driven shaft 37 (i.e., making a yaw movement within a certain angle range about the Z axis shown in fig. 2), and a pitch angle stage 36 for pitch deflecting the driven shaft 37 (i.e., making a pitch movement within a certain angle about the Y axis shown in fig. 2). As shown in fig. 3 and 9, two parallel guide rails 11 with sliders 111 are disposed on the base 1, two table tops, namely a first table top 21 and a second table top 31, are disposed on the guide rails 11, and the first table top 21 and the second table top 31 are disposed on the guide rails 11 through the sliders 111 and can slide along the guide rails 11 in the X-axis direction. The support frame 22 is provided on the first table surface 21, the first translation table 32 is provided on the second table surface 31, the yaw angle table 33 is provided on the first translation table 32, the support base 34 is provided on the yaw angle table 33, the second translation table 35 is provided on the support base 34, the pitch angle table 36 is provided on the second translation table 35, and the driven shaft 37 is provided on the pitch angle table 36. In order to accommodate the feature that the second translation stage 35 moves up and down in the Z-axis direction, as shown in fig. 3, 4 and 5, the support base 34 is designed as a right-angle turning block in the preferred embodiment, the horizontal plane of the right-angle turning block is set on the yaw angle table 33, and the second translation stage 35 is fixed on the vertical plane of the right-angle turning block. However, the design of the supporting seat 34 in this embodiment should not be regarded as the limitation of the present invention, and those skilled in the art can understand that other structures are matched with each other as long as the translation stage can drive the driven shaft to move up and down in the Z-axis direction, and all are based on the specific implementation of the principle concept of the present invention, which should be implemented in the protection scope of the present invention.
In order to ensure the stability of the first table top 21 and the second table top 31 in specific positions, as shown in fig. 3, the apparatus of the embodiment of the present invention further includes a locking mechanism 4 capable of fixing the first table top 21 and the second table top 31 in specific positions. As shown in fig. 9, in a specific embodiment, the locking mechanism 4 comprises a locking plate 41, a locking hand wheel 43 and a locking nut (not shown), wherein screw holes (such as the screw hole 42 on the locking plate and the screw hole on the side of the second table 31 in fig. 9) are respectively arranged on corresponding positions of the locking plate 41, the first table 21 and the second table 31, a T-shaped groove 12 is arranged on the base 1, the upper end of the locking plate 41 is fixed on the side of the first table 21 and the second table 31 through the screw hole 42, and the lower end of the locking plate 41 is inserted into the T-shaped groove 12 through the screw hole on the lower end of the locking plate 41 by the locking hand wheel 453 and is buckled with the locking nut in the groove of the T-shaped groove 12.
Fig. 6 to 10 show the specific structure of each main component in the preferred embodiment shown in fig. 2 to 5, respectively. Fig. 6 shows the structures of the first translation stage and the second translation stage, fig. 7 and 8 show the structures of the yaw angle stage and the pitch angle stage, fig. 9 shows the mounting structure of two table tops on the base with the guide rails, and fig. 10 shows the structures of the driving shaft and the driven shaft.
Wherein, first translation platform 32 and second translation platform 35 all can select for use the automatically controlled translation platform that has grating chi and limit switch. Fig. 6 shows an electric control translation stage with a specific structure, as shown in fig. 6, the electric control translation stage may be an electric control translation stage including a translation stage base 324, a translation stage table 325, a first front bearing seat 322, a first rear bearing seat 329, a first ball screw 323, a translation stage driving motor 321, a limit switch 328 and a translation stage grating ruler 326, the translation stage driving motor 321 is disposed at one end of the translation stage base 324, the first front bearing seat 322 is disposed at a driving motor end of the translation stage base 324, the first rear bearing seat 329 is disposed at an opposite end of the translation stage base 324, the first ball screw 323 is disposed on the translation stage base 324, and one end thereof is connected to the translation stage driving motor 321 through the first front bearing seat 322, and the other end thereof is fixed on the first rear bearing seat 329, two translation stage guide rails 327 disposed in parallel on the translation stage base 324, the translation stage table 325 is disposed on the translation stage guide rails 327 and fixed together with the first ball screw 323, the translation stage grating scale 326 is disposed on the translation stage base 324, and the limit switch 328 is disposed inside the bearing seats (i.e., the first front bearing seat and the first rear bearing seat). The specific installation mode of the electric control translation stage with the structure can be realized by referring to the prior art, and the installation sequence is not repeated herein.
As shown in fig. 7, each of the yaw angle stage 33 and the pitch angle stage 36 includes a rotating base 331, a rotating bearing 333, a rotating table surface 332, a rotation driving translation stage 334, and an arc grating ruler (not shown, disposed on an arc edge of the rotating table surface 332, visible in fig. 7). One end of the rotating base 331 is connected with one end of the rotating table surface 332 through a rotating bearing 333, the other end of the rotating base is connected with the other end of the rotating table surface through a rotating driving translation table 334, the arc grating ruler is arranged on the edge of the rotating table surface 332 close to the rotating driving translation table 334, and the rotating table surface can deflect under the driving of the rotating driving translation table. The specific principle is that, as shown in fig. 8, the rotationally driven translation stage 334 is designed to include a compact electrically controlled translation stage, and a rotating stage pin shaft 3342, a pin 3341, an extension spring 3343 and a limit block 3344 which are arranged on the top surface of the electrically controlled translation stage, wherein the extension spring 3343 is supported between the pin 3341 and the rotating stage pin shaft 3342, and the limit block 3344 is fixed between the rotating stage pin shaft 3342 and the pin 3341 and has a side surface attached to the rotating stage pin shaft 3342. As shown in fig. 7, a pin hole 335 is provided in the rotary table surface, the rotary drive translation table 334 is fixed to the rotary base 331, and the rotary table pin 3342 can fix the rotary table surface 332 through the pin hole 335. The limiting block 3344 preferably has high side flatness, and the tension spring 3343 ensures that the rotary table pin shaft 3342 is in close contact with the side of the limiting block 3344, so that when the close electric control translation table moves under the driving of the motor, the rotary table surface 332 can be pushed to rotate by the movement of the rotary table pin shaft 3342. It should be noted that the structure of the precision translation stage used for the rotation driving translation stage 334 may be the same as the structure of the electrically controlled translation stage used for the first translation stage and the second translation stage shown in fig. 6, and therefore, the details are not repeated herein. Of course, it can be understood by those skilled in the art that the specific structure of the precise translation stage used by the first translation stage, the second translation stage and the rotation driving translation stage can be selected from other suitable types of electric control or manual translation stages as long as the purpose of the utility model can be achieved.
As shown in fig. 10, the driving shaft and the driven shaft may be configured to each include a simulation shaft 236, a bearing seat 234, a motor 232 with an encoder, and a motor handwheel 231, wherein the simulation shaft 236 may be configured to be fixed to the bearing seat 234 by a pair of angular contact bearings, the bearing seat 234 is configured on the motor 232, the simulation shaft 236 is connected to the motor 232 by a coupling (not shown), and the motor 232 drives the simulation shaft 236 to rotate by a rotational angle of 360 °. In a specific use, calibration of the angular amount of the inclinometer can be performed by providing the laser emitter and position sensitive sensor (integral with the inclinometer) of the laser centering instrument on the simulation shaft 236, and simulating the amount of rotation of the shaft 236 under the drive of the motor 232. As shown in FIGS. 2-5, since the driven shaft 37 is disposed on the pitch angle table 36 and the pitch angle table 36 is disposed on the second translation table 35, the horizontal and vertical displacements of the position sensitive sensor can be calibrated by the Y-direction translation and the Z-direction translation of the analog shaft 236 of the driven shaft 37 driven by the first translation table 32 and the second translation table 35, and the indication error of the centering deviation of the laser centering instrument can also be measured by the measurement of the yaw and pitch angles of the two angle tables. The laser emitter and the position-sensitive sensor may be disposed on the simulation shaft 236, for example, by a clamp, which may be designed integrally with the simulation shaft or detachably mounted on the clamp.
In order to meet the measurement requirements of laser centering instruments with different measuring ranges and ensure the accuracy of distance setting between the position-sensitive sensor and the laser emitter in the preferred embodiment, as the first table top and the second table top are capable of translating along the guide rail, a digital display scale 5 is further arranged on the base 1 in the preferred embodiment, as shown in fig. 3 and 9. As shown in fig. 9, the digital display scale 5 is fixed on the base through the fixing frames 52 at the two ends thereof, and after the first table 21 and the second table 31 are moved, the calipers 51 of the digital display scale 5 are respectively and tightly attached to the locking handwheel 43 placed at the inner side of the locking sheet 4 (i.e. two locking handwheels closest to each other in the two locking sheets of the first table and the second table, as shown in the figure), and the accurate distance between the simulation axis of the driving shaft 23 and the simulation axis of the driven shaft 37, that is, the distance between the receiving surface of the position sensitive sensor and the laser emitter, can be obtained through the reading difference between the two calipers 51.
According to the measuring principle of laser centering instrument and the theory of operation of position sensitive sensor, in order to reduce measuring error, when carrying out the calibration to position sensitive sensor, the distance of laser emitter and position sensitive sensor receiving face is generally at 150mm to guarantee that position sensitive sensor receiving face is perpendicular with the light beam that laser emitter sent, for this reason, the utility model discloses some preferred embodiments can set up the guide rail overall length to 1000mm, set up the biggest translation stroke of first translation platform and second translation platform to 100mm, and the straightness accuracy sets up to 0.01/600mm, set up the removal angle scope of beat angle position platform and every single move angle position platform between-5 to + 5. And the grating chi of first translation platform, second translation platform, beat angle position platform and every single move angle position platform all selects high accuracy absolute formula grating chi, and in order to guarantee the precision of grating chi after the calibration, the embodiment of the utility model provides a less 304 stainless steel of the preferred coefficient of thermal expansion of each main part.
In a preferred embodiment, the base can be a marble base to ensure high rigidity, high precision and low thermal expansion coefficient of the base.
In other embodiments, planetary reducers may also be provided on the driving and driven shafts.
The above description is based on the preferred embodiment of the calibration apparatus for laser centering instrument of fig. 2 to 10, and it is foreseen that there may be other combinations of the parts in the calibration apparatus, for example, in some embodiments, the calibration apparatus of the present invention may also be capable of measuring only the vertical and horizontal displacement of the position sensitive sensor, in such an embodiment, the adjustable rotating shaft may not have a yaw angle stage and a pitch angle stage, and the driving shaft and the driven shaft may be only a simple analog shaft that cannot rotate. For another example, in some embodiments, the calibration device of the present invention may also be capable of measuring the vertical and horizontal displacement of the position sensitive sensor and the tilt angle of the inclinometer, and in such embodiments, the adjustable axis of rotation may be free of yaw and pitch stages, with the drive and driven shafts being the structure comprising the 360 ° rotating simulation axis in the preferred embodiment. For another example, in some embodiments, the calibration device of the present invention may be further designed to measure the above-mentioned three kinds of indication errors simultaneously, but the base may not have the guide rail and the first and second table-boards, but the support frame for fixing the rotating shaft is directly disposed on the base, and the first translation table for adjusting the rotating shaft is also directly disposed on the base (in this case, only some indication values of the laser centering instrument at a specific distance can be calibrated, and the laser centering instrument is suitable for some specific models or ranges). In concrete use, the user can modify according to own calibration needs commonly used and the comprehensive consideration to the cost, and these all should be regarded as being based on the utility model discloses the variant of thinking belongs to the utility model discloses a protection scope.
Fig. 11 to 13 show a method for measuring a position sensitive sensor, an inclinometer and an indication error of a centering deviation of a laser centering instrument by using the laser centering instrument calibration device according to an embodiment of the present invention.
Fig. 11 is a flow chart of a method for measuring a value error of a position-sensitive sensor of a laser centering device, as shown in fig. 11, taking a first table top and a second table top which are arranged on a base and can move along a guide rail as an example, the method includes:
step S110: resetting the calibration device and adjusting the distance between the fixed rotating shaft and the adjustable rotating shaft.
The first translation stage and the second translation stage of the calibration apparatus are both returned to zero positions, and in embodiments where there are angular stages in the apparatus, the drive shaft, the driven shaft, the yaw angular stage, and the pitch angular stage are also all returned to zero positions. And then, the distance between the fixed rotating shaft and the adjustable rotating shaft is adjusted in a manual mode, namely, the first table top and the second table top are moved to required positions by manually loosening the locking mechanism, and then the locking structure is fixed so as to adjust the distance between the fixed rotating shaft and the adjustable rotating shaft and fix the fixed rotating shaft and the adjustable rotating shaft at a specific position. In the preferred embodiment, the distance between the fixed rotating shaft and the adjustable rotating shaft is adjusted to be 150mm between the laser transmitter and the position sensitive sensor.
Step S111: and installing a laser transmitter and a position sensitive sensor of the laser centering instrument on the calibration equipment.
A laser emitter and a position sensitive sensor of the laser centering instrument are respectively and vertically fixed on a driving shaft and a driven shaft of the calibration device, for example, fixed on a simulation shaft through a clamp.
Step S112: and adjusting the positions of the laser emitter and the position sensitive sensor.
And adjusting the positions of the laser emitter and the position sensitive sensor to enable laser to strike at the middle position of the receiving surface of the position sensitive sensor, ensuring that the axis of the laser is vertical to the receiving surface of the position sensitive sensor, and ensuring that the horizontal and vertical coordinate axes of the position sensitive sensor are respectively parallel to the movement axes of the first translation table and the second translation table of the calibration equipment.
Step S113: the indication error of the position sensitive sensor in the horizontal direction is measured.
And clearing the reading of the position sensitive sensor, adjusting the first translation table to enable the driven shaft to move back and forth in a horizontal plane perpendicular to the guide rail, and respectively reading indication values of the position sensitive sensor and the first translation table to obtain an indication value error of the position sensitive sensor in the horizontal direction, namely, the difference between the indication value of the position sensitive sensor and the indication value of the grating ruler of the first translation table is the indication value error of the position sensitive sensor of the laser centering instrument in the horizontal direction.
Step S114: the indication error of the position sensitive sensor in the vertical direction is measured.
And clearing the reading of the position sensitive sensor, adjusting the second translation platform to enable the driven shaft to move vertically in a vertical plane perpendicular to the guide rail, and respectively reading indication values of the position sensitive sensor and the second translation platform to obtain an indication value error of the position sensitive sensor in the vertical direction, namely, the difference between the indication value of the position sensitive sensor and the indication value of a grating ruler of the second translation platform is the indication value error of the position sensitive sensor of the laser centering instrument in the vertical direction.
Therefore, according to the maximum displacement strokes of the first translation table and the second translation table, any point position of the position sensitive sensor of the laser centering instrument can be measured in the maximum strokes, and the calibration result is more accurate.
Fig. 12 is a method for measuring a registration error of an inclinometer of a laser centering apparatus, for example, in the case that the distance between a fixed shaft and a driven shaft on a calibration device for measurement is fixed, that is, a fixed rotating shaft and an adjustable rotating shaft cannot move in the X-axis direction, as shown in fig. 12, the method includes:
step S120: the calibration device is reset.
The first translation stage and the second translation stage of the calibration apparatus are both returned to zero positions, and in embodiments where there are angular stages in the apparatus, the drive shaft, the driven shaft, the yaw angular stage, and the pitch angular stage are also all returned to zero positions.
Step S121: and installing a laser emitter and a position sensor of the laser centering instrument on the calibration equipment.
Step S121 is the same as step S111, and the above description can be referred to.
Step S122: the position of the position sensitive sensor is adjusted.
And adjusting the position of the position sensitive sensor to ensure that the receiving surface of the position sensitive sensor is vertical to the axis of the rotating shaft.
Step S123: the error in the indication of the angular quantity of the inclinometer is measured.
The method comprises the steps of presetting motors of a driving shaft and a driven shaft of a calibration device, namely, setting an angle which needs to be rotated by the motors and an operation method of the motors used according to needs, and firstly setting an angle amount which needs to be rotated by the motors in a driving program of the motors. After setting, the motor is started to drive the driving shaft and the driven shaft to rotate by a preset angle. When the driving shaft and the driven shaft rotate to the preset angle position, the indication value of the inclinometer is read, comparison is carried out according to the indication value of the inclinometer and the preset angle, and the difference between the indication values is the indication value error of the angle quantity of the inclinometer.
It should be noted that, when the indication error of the inclinometer is measured, the analog shafts of the driving shaft and the driven shaft are required to rotate, so that in the application occasion that only the inclination angle of the inclinometer needs to be calibrated, the structure of the calibration equipment can enable the structure of the adjustable rotating shaft to be similar to that of the fixed rotating shaft, the equipment structure is simpler, and the cost is saved.
Fig. 13 is a flow chart of a method for measuring an indication error of a centering deviation of a laser centering device, as shown in fig. 13, for example, a calibration apparatus for measurement including a first table and a second table slidable along a guide rail, the method including:
step S130: the calibration device is reset.
And restoring the first translation table, the second translation table, the driving shaft, the driven shaft, the deflection angle table and the pitching angle table of the calibration equipment to zero positions.
Step S131: and respectively and vertically fixing a laser emitter and a position sensitive sensor of the laser centering instrument on a driving shaft and a driven shaft of the calibration equipment.
Step S132: and presetting a standard deviation value of the calibration equipment, and adjusting the positions of the first translation table, the second translation table, the deflection angle position table and the pitching angle position table according to the preset standard deviation value.
The preset standard deviation value comprises the parallel deviation of the first translation table in the horizontal plane perpendicular to the direction of the guide rail, the parallel deviation of the second translation table in the vertical plane perpendicular to the direction of the guide rail, the deflection angle deviation of the deflection angle position table and the pitch angle deviation of the pitch angle position table. The standard deviation value of the preset calibration equipment is set through a driving program of a motor, and the standard deviation value comprises a parallel deviation value and an angle deviation value which are set through the driving program of the motor of the first translation table, the second translation table, the deflection angle position table and the pitching angle position table. And then starting the motors, wherein the motor driving programs of the first translation platform and the second translation platform drive the translation table tops of the first translation platform and the second translation platform to move corresponding distances according to the parallel deviation amount, the motor driving programs of the deflection angle position platform and the pitching angle position platform drive the table top of the precision translation platform to move according to the angle deviation amount, and the precision translation platform drives the rotating table tops of the deflection angle position platform and the pitching angle position platform to deflect corresponding angles.
Step S133: and selecting a measurement mode of the laser centering instrument, and setting the distance between the laser transmitter and the position sensitive sensor.
The measuring mode of the laser centering instrument is selected, and the distance between the laser transmitter and the position sensitive sensor is input (the selection setting and the input operation can be carried out by referring to the operation instruction of the laser centering instrument). And then, manually adjusting the fixed rotating shaft and the adjustable rotating shaft according to the input distance, namely, manually loosening the locking mechanism to move the first table top and the second table top to the required positions, and then fixing the locking structure to adjust the distance between the fixed rotating shaft and the adjustable rotating shaft and fix the fixed rotating shaft and the adjustable rotating shaft at the specific positions. It should be noted that after the position is fixed, the position is fixed during one measurement, that is, the whole measurement process of a specific position is a measurement process.
Step S134: and setting measuring points, collecting data of each measuring point by a laser centering instrument, calculating and outputting a centering deviation value.
And adjusting the rotation angles of the driving shaft and the driven shaft according to the measurement mode of the laser centering instrument, wherein each rotation angle is a measurement point. In a preferred embodiment, the rotation angle of each measuring point is not less than 20 °, and the measuring points of one measuring process are at least three, and the sum of the angles of rotation of the three measuring points is not less than 60 °. The laser alignment instrument collects data of each measuring point, including coordinate values of the position sensitive sensor and angle values of the inclinometer, calculates alignment deviation values according to the data of each measuring point, and then outputs the four calculated alignment deviation values.
Step S135: and measuring the indication error of the centering deviation of the laser centering instrument.
The alignment deviation value output by the laser alignment instrument is compared with a preset standard deviation value, the difference between the alignment deviation value and the preset standard deviation value is an indication error, and the step can be obtained through manual calculation or can be realized through comparison and output through specific software or a device.
The measurement method of fig. 11 to 13 can be implemented by a calibration device, and can also be applied to a calibration device (such as the other non-optimal embodiments described above) that can only implement one or two measurements, which is not limited to this, but is important in how to implement the measurement of the indicating error of the three indicating values of the laser centering instrument by using the calibration device designed based on the inventive concept.
What has been described above are only some embodiments of the invention. For those skilled in the art, without departing from the inventive concept, several modifications and improvements can be made, which are within the scope of the invention.
Claims (11)
1. Laser centering appearance calibration equipment, its characterized in that includes: the device comprises a base (1), a fixed rotating shaft (2) and an adjustable rotating shaft (3), wherein the fixed rotating shaft (2) and the adjustable rotating shaft (3) are arranged on the base (1);
the fixed rotating shaft (2) comprises a driving shaft (23) and a supporting frame (22) for supporting the driving shaft;
the adjustable rotating shaft (3) comprises a supporting seat (34), a driven shaft (37), a first translation platform (32) and a second translation platform (35), wherein the first translation platform is used for enabling the driven shaft to move in a horizontal plane perpendicular to the base, and the second translation platform is used for enabling the driven shaft to move in a vertical plane perpendicular to the base;
the supporting frame (22) and the first translation platform (32) are respectively arranged on the base (1), the supporting seat (34) is arranged on the first translation platform (32), the second translation platform (35) is arranged on the supporting seat (34), and the driven shaft (37) is arranged on the second translation platform (35).
2. The calibration device according to claim 1, wherein the driving shaft (23) and the driven shaft (37) each comprise a motor hand wheel (231), a motor (232) with an encoder, a coupling, a bearing seat (234) and a simulation shaft (236) which are connected in sequence, and the motor (232) drives the simulation shaft (236) to rotate between 0 ° and 360 °.
3. Laser centering appearance calibration equipment, its characterized in that includes: the device comprises a base (1), a fixed rotating shaft (2) and an adjustable rotating shaft (3), wherein the fixed rotating shaft (2) and the adjustable rotating shaft (3) are arranged on the base (1);
the fixed rotating shaft (2) comprises a driving shaft (23) and a supporting frame (22) for supporting the driving shaft;
the adjustable rotating shaft (3) comprises a supporting seat (34), a driven shaft (37), a first translation platform (32) for enabling the driven shaft to move in a horizontal plane perpendicular to the base, a second translation platform (35) for enabling the driven shaft to move in a vertical plane perpendicular to the base, a deflection angle position platform (33) for enabling the driven shaft to deflect in azimuth, and a pitch angle position platform (36) for enabling the driven shaft to deflect in pitch;
the supporting frame (22) and the first translation table (32) are respectively arranged on the base (1), the deflection angle position table (33) is arranged on the first translation table (32), the supporting seat (34) is arranged on the deflection angle position table (33), the second translation table (35) is arranged on the supporting seat (34), the pitch angle position table (36) is arranged on the second translation table (35), and the driven shaft (37) is arranged on the pitch angle position table (36).
4. Calibration device according to claim 3, characterized in that two guide rails (11) parallel to each other are arranged on the base (1), that a first table top (21) and a second table top (31) are arranged on the guide rails (11) and can be moved along the guide rails, that the support frame (22) is arranged on the first table top (21), and that the first translation stage (32) is arranged on the second table top (31).
5. The calibration device of claim 4, wherein the device further comprises a locking mechanism (4) capable of fixing the first table top (21) and the second table top (31) at specific positions, the locking mechanism (4) comprises a locking sheet (41), a locking hand wheel (43) and a locking nut, wherein the locking sheet (41), the first table top (21) and the second table top (31) are all provided with screw holes, the base (1) is provided with a T-shaped groove (12), the locking sheet (41) is fixedly connected with the first table top (21) and the second table top (31) through the screw holes and the screws respectively, and the locking hand wheel (43) penetrates through the screw holes in the locking sheet to be inserted into the T-shaped groove (12) and is buckled with the locking nut in the T-shaped groove.
6. Calibration device according to claim 5, characterized in that the first translation stage (32) and the second translation stage (35) are electrically controlled translation stages provided with a grating ruler and a limit switch, wherein the first translation stage (32) is fixed on the second table top (31) in a horizontal direction and the second translation stage (35) is fixed on the support base (34) in a vertical direction.
7. The calibration device according to claim 6, wherein the yaw angle stage (33) and the pitch angle stage (36) each comprise a rotary base (331), a rotary bearing (333), a rotary table top (332), a rotary driving translation stage (334) and a circular arc grating ruler, wherein the rotary base (331) and the rotary table top (332) are connected through the rotary bearing (333) at one end and the rotary driving translation stage (334) at the other end, the circular arc grating ruler is arranged at the edge of the rotary table top (332) close to the rotary driving translation stage (334), and the rotary driving translation stage (334) drives the rotary table top (332) to rotate.
8. The calibration apparatus according to claim 7, wherein the rotationally driven translation stage (334) comprises an electrically controlled translation stage, a rotation stage pin (3342), a pin (3341), a tension spring (3343), and a stop block (3344), the rotation stage pin (3342), the pin (3341), the tension spring (3343), and the stop block (3344) are disposed on a top surface of the electrically controlled translation stage, the tension spring (3343) is supported between the pin (3341) and the rotation stage pin (3342), the stop block (3344) is fixed between the rotation stage pin (3342) and the pin (3341) and laterally abuts the rotation stage pin (3342); wherein,
be equipped with on rotatory mesa (332) with revolve a pinhole (335) of platform round pin axle adaptation, rotation drive translation platform (334) are fixed on rotating base (331), revolve a round pin axle (3342) and alternate in pinhole (335).
9. The calibration device according to any one of claims 3 to 8, wherein the driving shaft (23) and the driven shaft (37) each comprise a motor hand wheel (231), a motor (232) with an encoder, a coupling, a bearing seat (234) and a simulation shaft (236) which are connected in sequence, and the motor (232) drives the simulation shaft to rotate between 0 ° and 360 °.
10. Calibration device according to any of claims 3 to 8, wherein the support (34) is a quarter turn block and the second translation stage (35) is fixed on a vertical face of the quarter turn block.
11. The calibration apparatus according to any one of claims 4 to 8, wherein the total length of the guide rail (11) is 1000mm, the maximum translation strokes of the first translation stage (32) and the second translation stage (35) are both 100mm, and the angular deflection ranges of the yaw angle stage (33) and the pitch angle stage (36) are both-5 °.
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Cited By (5)
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CN110095101A (en) * | 2019-04-20 | 2019-08-06 | 北京工业大学 | A kind of coordinate system caliberating device and method for cylindrical parts measuring instrument |
CN111780782A (en) * | 2020-06-30 | 2020-10-16 | 中国航发南方工业有限公司 | Laser centering instrument calibrating device |
CN111964610A (en) * | 2020-08-07 | 2020-11-20 | 浙江理工大学 | Five-degree-of-freedom automatic centering method for electric connector headstock |
CN112361997A (en) * | 2020-11-30 | 2021-02-12 | 山东雁翔机电工程有限公司 | Size-adjustable laser centering instrument with high applicability |
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CN110095101A (en) * | 2019-04-20 | 2019-08-06 | 北京工业大学 | A kind of coordinate system caliberating device and method for cylindrical parts measuring instrument |
CN111780782A (en) * | 2020-06-30 | 2020-10-16 | 中国航发南方工业有限公司 | Laser centering instrument calibrating device |
CN111964610A (en) * | 2020-08-07 | 2020-11-20 | 浙江理工大学 | Five-degree-of-freedom automatic centering method for electric connector headstock |
CN111964610B (en) * | 2020-08-07 | 2021-12-07 | 浙江理工大学 | Five-degree-of-freedom automatic centering method for electric connector headstock |
CN112361997A (en) * | 2020-11-30 | 2021-02-12 | 山东雁翔机电工程有限公司 | Size-adjustable laser centering instrument with high applicability |
CN112611396A (en) * | 2020-12-31 | 2021-04-06 | 上海诺司纬光电仪器有限公司 | Method for calibrating a laser scanner |
CN112611396B (en) * | 2020-12-31 | 2024-05-03 | 上海诺司纬光电仪器有限公司 | Method for calibrating a laser scanner |
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