Magnetic compensation formula Hall current sensor is a kind of high accuracy, noncontact, but the novel sensor of the various waveform electric currents of observing and controlling, and it is widely used in the emerging power electronic technology, and magnetic core is one of its two big critical component.Usually require magnetic core to have following characteristic: 1) low remanence strength Br; 2) low coercivity H; 3) good frequency characteristic; 4) high saturated magnetic strength Bs; 5) good manufacture craft performance.
What prior art adopted is the permalloy tape wound core that provides magnetic core to contain Ni80% by West Germany, and tape thickness is about 0.1mm.After annealing-dipping lacquer solidified, its magnetic levels was: Bs 0.8T, Br 0.24T, Hc 2.1A/m(0.026Oe), because band is thicker, high-gradient magnetism is relatively poor, this has limited the improvement of transducer response time, and its remanent magnetism Br and Hc are all bigger, has reduced the precision of transducer.In recent years along with the development of power electronic technology, the TT﹠C requirement of high frequency, non-sinusoidal waveform electric current is increased gradually.Therefore need a kind ofly have better frequency characteristic, lower remanent magnetism and coercitive cutting magnetic core to satisfy the requirement of novel sensor.
This transducer that sell the domestic and international market is produced by Switzerland LAM company, provides the perm magnetic core by West Germany entirely, does not find to use the patent and the report of non-crystaline amorphous metal magnetic core so far.See document [1] about the reported in literature of traditional sensors.
The objective of the invention is to replace traditional permalloy magnetic core, to improve the precision and the high frequency characteristics of transducer with amorphous magnetic core.In addition,, make the transducer amorphous magnetic core be easy to processing and fabricating, improve industrial manufacture process stability, reduce cost, make it to be applicable to production in enormous quantities by the adjustment of amorphous component and the improvement of technology.
Summary of the invention comprises:
The composition of non-crystaline amorphous metal be FezNiyMxSi7-10B12~15(wherein M be Mo or Mn, x is 0~5, y is 0~40, z is 36-78), this non-crystaline amorphous metal has good high-frequency soft magnetic performance and belt making process performance, under the annealing conditions of routine, can reach Hc<1.6A/m Bs and reach 0.9T, the full magnetic hysteresis coefficient of dilatation 10 * 10 that closes
-6Resistivity is 1.35 μ Ω m.
The present invention adopts vacuum induction furnace smelting and casts bar-shaped mother metal, makes the amorphous band that requires width with single-roller method, is wound into annular or track-shaped magnetic core then.
The magnetic core of mentioned component can be undertaken by following two kinds of annealing processs:
A) partially-crystallized annealing is in nitrogen or argon protection gas, and annealing temperature is 410~450 ℃, is incubated 10~30 minutes, and air cooling can obtain high Bs and low Br and good high frequency characteristics.
B) horizontal magnetic anneal annealing temperature is 400~430 ℃, temperature retention time 10~30 minutes, and stove is cold.Magnetic field intensity is greater than 1600A/m.The purpose of horizontal magnetic anneal is in order to reduce Br and to improve frequency characteristic.
Magnetic core after the annealing is cured processing, can adopts encapsulating method, also can adopt the method for encapsulation.Use low stress half flexible-epoxy to pour into, its formula components is:
Kind allocation ratio (weight)
Epoxy resin 100
Curing agent (anhydrides etc.) 8~16
Increase sword agent (poly-S rubber etc.) 5~30
Extender (Si micro mist etc.) 30~50
Solidifying stoving process is 150 ℃, 3 hours
Magnetic core after solidifying is cut into the size of gaps of required size with emery wheel slicing machine or wire cutting machine, so that put into the Hall semiconductor device.Above technology can guarantee not produce resin cracks in cutting process, takes off between belt to split and defectives such as air gap distortion.
Reach advantage compared with the prior art:
Reach advantage compared with the prior art:
Now in magnetic and process aspect following difference is arranged with permalloy magnetic core and magnetic core of the present invention:
(1) now adopt the permalloy that contains Ni80% with magnetic core, the present invention adopts Fe-Ni base amorphous magnetic core.
(2) the present invention adopts process annealing (400~450 ℃), does not need coating, and the processing cycle is short, and not tight to the requirement of protection gas, technology is simple.And now with the perm magnetic core must adopt conventional insulation electrophoretic coating and high temperature often between annealing (1050 ℃ * 4hr), its annealing operation is very complicated.
(3) the present invention adopts epoxy resin enclosed curing, and now adopts dipping paint method with the perm magnetic core.Former approach can guarantee that soft magnet performance changes not quite after solidifying, and the latter then makes magnetic property descend greatly.For example concerning coercivity H, magnetic core of the present invention increases by 0~30% after solidifying, and now generally is increased to 400% with technology.
(4) dc magnetic of magnetic core before and after the cutting, both can do following comparison:
Table 1 is for solidifying the preceding magnetic core DC performance of back cutting relatively.Fig. 1 is then for cutting the contrast of back magnetic core magnetic hysteresis loop.(a) is magnetic core of the present invention among Fig. 1; (b) for now using the perm magnetic core.This shows that magnetic core of the present invention has the low advantage of Bs height, Br and Hc, and the linearity of curve is higher, is more suitable in Hall current sensor.
(5) about high frequency characteristics:
Under the state after curing before the cutting magnetic core of the present invention and existing perm magnetic core have been carried out frequency characteristic relatively, make electric bridge method, under Bm=5mT magnetic strength condition, measured of the variation of the elastic magnetic inductivity of two kinds of magnetic cores with operating frequency, the Dispersion of its magnetic permeability is shown in table 2, is begun obviously to descend from the 10KHz frequency by the visible traditional perm magnetic core of table.When 50KHz, magnetic permeability has been lower than 1000, only reduces by 18% and magnetic core of the present invention rises to the 150KHz magnetic permeability by 10KHz, and this magnetic core is particularly suitable for the observing and controlling to high-frequency current voltage.
Table 1: solidify the preceding magnetic core DC performance of back cutting relatively
|
Now use perm Ni80 |
The present invention |
Bs(T) |
0.8 |
0.9 |
Br(T) |
0.24 |
0.07 |
Hc(A/m) |
2.1 |
2.1 |
Table 2: the Dispersion that cuts the elastic magnetic inductivity of preceding two kinds of magnetic cores
Frequency KHZ |
10 |
20 |
50 |
70 |
100 |
120 |
150 |
200 |
Now use perm Ni80 |
2850 |
1670 |
876 |
694 |
548 |
492 |
417 |
〃 |
Magnetic core of the present invention |
5104 |
5030 |
4087 |
4760 |
4560 |
4420 |
4190 |
3860 |
[example 1]
With the vacuum induction furnace smelting composition is the Fe38Ni38Mn2Si8B14 mother metal, adopts single-roller method to make the wide amorphous ribbon of 10mm, is wound into the magnetic core of φ 18/ φ 24 * 10mm.Carry out horizontal magnetic anneal, magnetic field intensity 1600A/m subsequently.Adopt 410 ℃, 10 minutes annealing back stoves cold, magnetic core with the epoxy resin enclosed overall dimension of making φ 15/ φ 26 * 11.5mm, is cut the wide gap of 1.8mm on the emery wheel slicing machine.Obtain the direct current magnetic hysteresis loop as shown in Figure 1.Its average magnetic permeability is 125, and the static magnetic field when reaching capacity is 40AT/cm.
Making specified measurement electric current with this magnetic core is 100A(50Hz) magnetic compensation formula Hall current sensor, the result shows, its certainty of measurement<1%, measuring range expands to 0~150A, the response time is satisfied instructions for use less than 1 μ S.
[example 2]
Adopt the identical smelting system band method of example 1, making composition is the wide amorphous ribbon of 10mm of Fe77Si9B14, is wound into φ 18/ φ 24 * 10mm ring-shaped magnetic core.Subsequently after carrying out annealing in 430 ℃, 20 minutes under the Ar gas shiled; dc magnetic is: Bs=1.55T; Br=0.15T; Hc=7.96A/m; with magnetic core injection ring epoxy resins, baking and curing is handled back Bs=1.52T then, and its remanent magnetism Br and Hc change little; adopt the cutting of emery wheel slicing machine, width is the 1.7mm slit.The B100 of magnetic core is 1.45T behind the measurement otch, and average magnetic permeability is 180, is higher than 125 in the example 1.And, can enlarge current measuring range to 200A after making transducer because Bs is very high.
[annotating 1] quick male mulberry field of straight well is good bright, " ホ-Le sub-prime type high-precision current セ Application サ-" セ Application サ-technology.Vol.9.No.8(1989),48。