Magnetic compensation formula Hall current sensor is a kind of high accuracy, noncontact, but the transducer of the various waveform electric currents of observing and controlling, and it is widely used in the emerging power electronic technology, and magnetic core is one of its two big critical component.Usually require magnetic core to have following characteristic: 1) low remanence strength Br; 2) low coercivity H; 3) good frequency characteristic; 4) high saturated magnetic strength Bs; 5) good manufacture craft performance.
The available technology adopting of magnetic compensation formula Hall current sensor be the permalloy tape wound core that contains Ni80% that provides by West Germany, tape thickness is about 0.1mm.Through annealing--after dipping lacquer solidifies, its magnetic levels is: Bs0.8T, Br0.24T, Hc2.1A/m (0.0260e) carries out the air gap cutting to magnetic core then, the hall device of packing into uses, because band is thicker, high-gradient magnetism is relatively poor, and this has limited this improvement of transducer response time, its remanent magnetism Br and Hc are all bigger, have reduced the precision of transducer.In addition, as the soft magnetism band around the cutting magnetic core, in the prior art, also can adopt amorphous cutting magnetic core, patent CN1050108A for example, used Fe-based amorphous tape wound core, solidify the cutting method for making through annealing and epoxy perfusion, be used for power supply inductance magnetic device, because patent CN1050108A has adopted the Fe-based amorphous composition of ni content 0~4% (at), though Bs is higher, but Br and Hc value are also very high, respectively greater than 0.8T and 6.4A/M, and the magnetic after solidifying produces serious deterioration, and is not suitable for the requirement of Hall current sensor to its magnetic core.Though in recent years the development of power electronic technology, the TT﹠C requirement of high frequency, non-sinusoidal waveform electric current is increased gradually.Therefore need a kind ofly have better frequency characteristic, lower remanent magnetism and coercitive cutting magnetic core to satisfy the requirement of novel sensor.
This transducer that sell the domestic and international market is produced by Switzerland LAM company, provides the perm magnetic core by West Germany entirely, does not find to use in Hall current sensor the patent and the report of non-crystaline amorphous metal magnetic core so far.About traditional sensors in Vo1.9.No.8 (1989), 48, the quick man of straight well, mulberry field are good bright, in " wooden youngster's sub-prime type high-precision current " technology report are arranged.
The objective of the invention is to replace traditional permalloy magnetic core with amorphous iron core, and make band around cutting magnetic core to overcome the shortcoming of Fe base amorphous by the adjustment of amorphous component, improve the precision and the high frequency characteristics of transducer, and raising processing performance, reduce the deterioration tendency of solidifying, be applicable to production in enormous quantities magnetic.
Summary of the invention comprises: the chemical composition of non-crystaline amorphous metal (at%) is:
FezNiyMxSi7-10B12-15 (wherein M is Mo or Mn), 0.5<X≤5,32<Y≤40, z is a surplus, this non-crystaline amorphous metal has good high-frequency soft magnetic performance and belt making process performance, can reach Hc<1.6A/M under the annealing conditions of routine, Bs reaches 0.9T, saturated bysteresis coefficient of dilatation 10 * 10
-6Resistivity is 1.35 μ Ω .m.
The present invention adopts vacuum induction furnace smelting and casts bar-shaped mother metal, makes the amorphous band that requires width with single-roller method, is wound into annular or track-shaped magnetic core then.
The magnetic core of mentioned component can be undertaken by following annealing process:
Horizontal magnetic anneal, 400~430 ℃ of annealing temperatures, it is cold to be incubated 10~30 minutes stoves, and magnetic field intensity is greater than 1600A/M.The purpose of horizontal magnetic anneal is in order to reduce Br and to improve frequency characteristic.
A/m。The purpose of horizontal magnetic anneal is in order to reduce Br and to improve frequency characteristic.
Magnetic core after the annealing is cured processing, can adopts encapsulating method, also can adopt the method for encapsulation.Use low stress half flexible-epoxy to pour into, its formula components is:
Kind allocation ratio (weight)
Epoxy resin 100
Curing agent (anhydrides etc.) 8~16
Increase sword agent (poly-S rubber etc.) 5~30
Extender (Si micro mist etc.) 30~50
Solidifying stoving process is 150 ℃, 3 hours
Magnetic core after solidifying is cut into the size of gaps of required size with emery wheel slicing machine or wire cutting machine, so that put into the Hall semiconductor device.Above technology can guarantee not produce resin cracks in cutting process, takes off between belt to split and defectives such as air gap distortion.
Reach advantage compared with the prior art: now in magnetic and process aspect following difference is arranged with permalloy magnetic core and magnetic core of the present invention:
(1) now adopt the permalloy that contains Ni80% with magnetic core, the present invention adopts Fe-Ni base amorphous magnetic core.
(2) the present invention adopts process annealing (400~450 ℃), does not need coating, and the processing cycle is short, and not tight to the requirement of protection gas, technology is simple.(1050 * 4hr), its annealing operation is very complicated and now must adopt conventional insulation electrophoretic coating and high temperature to anneal often with the perm magnetic core.
(3) the present invention adopts epoxy resin enclosed curing, and now adopts dipping paint method with the perm magnetic core.Former approach can guarantee that soft magnet performance changes not quite after solidifying, and the latter then makes magnetic property descend greatly.For example concerning coercivity H, magnetic core of the present invention increases by 0~30% after solidifying, and now generally is increased to 400% with technology.
(4) dc magnetic of magnetic core before and after the cutting, both can do following comparison:
Table 1 is for solidifying the preceding magnetic core DC performance of back cutting relatively.Fig. 1 is then for cutting the contrast of back magnetic core magnetic hysteresis loop.(a) is magnetic core of the present invention among Fig. 1; (b) for now using the perm magnetic core.This shows that magnetic core of the present invention has the low advantage of Bs height, Br and Hc, and the linearity of curve is higher, is more suitable in Hall current sensor.
(5) about high frequency characteristics:
Under the state after curing before the cutting to magnetic core of the present invention with now carried out frequency characteristic comparison with the perm magnetic core, make electric bridge method, under Bm=5mT magnetic strength condition, measured of the variation of the elastic magnetic inductivity of two kinds of magnetic cores with operating frequency, the Dispersion of its magnetic permeability is shown in table 2, is begun obviously to descend from the 10KHz frequency by the visible traditional perm magnetic core of table.When 50KHz, magnetic permeability has been lower than 1000, only reduces by 18% and magnetic core of the present invention rises to the 150KHz magnetic permeability by 10KHz, and this magnetic core is particularly suitable for the observing and controlling to high-frequency current voltage.
Table 1: solidify the preceding magnetic core DC performance of back cutting relatively
|
Now use perm Ni80 |
The present invention |
Bs(T) |
0.8 |
0.9 |
Br(T) |
0.24 |
0.07 |
Hc(A/m) |
2.1 |
2.1 |
Table 2: the Dispersion that cuts the elastic magnetic inductivity of preceding two kinds of magnetic cores
Frequency KHz |
10 |
20 |
50 |
70 |
Now use perm Ni80 μ |
2850 |
1670 |
876 |
694 |
Magnetic core μ of the present invention |
5104 |
5030 |
4087 |
4760 |
Frequency KHz |
100 |
120 |
150 |
200 |
Now use perm Ni80 μ |
548 |
492 |
417 |
** |
Magnetic core μ of the present invention |
4560 |
4420 |
4190 |
3860 |