CN106980028A - Gas analyzing apparatus - Google Patents

Gas analyzing apparatus Download PDF

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Publication number
CN106980028A
CN106980028A CN201610027806.9A CN201610027806A CN106980028A CN 106980028 A CN106980028 A CN 106980028A CN 201610027806 A CN201610027806 A CN 201610027806A CN 106980028 A CN106980028 A CN 106980028A
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CN
China
Prior art keywords
gas
pipeline
analyzing apparatus
main pipeline
gas analyzing
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Application number
CN201610027806.9A
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Chinese (zh)
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CN106980028B (en
Inventor
于甄
解金库
高建聪
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Zhangjiagang Kangdexin Optronics Material Co Ltd
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Zhangjiagang Kangdexin Optronics Material Co Ltd
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Priority to CN201610027806.9A priority Critical patent/CN106980028B/en
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N35/00Automatic analysis not limited to methods or materials provided for in any single one of groups G01N1/00 - G01N33/00; Handling materials therefor
    • G01N35/10Devices for transferring samples or any liquids to, in, or from, the analysis apparatus, e.g. suction devices, injection devices
    • G01N35/1004Cleaning sample transfer devices

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Sampling And Sample Adjustment (AREA)

Abstract

The invention provides a kind of gas analyzing apparatus, gas analyzing apparatus includes main pipeline, for being passed through gas to be detected;Detection means, the detection port of detection means is connected with main pipeline, and detection means is used to detect the gas to be detected in main pipeline;Pipeline is cleaned, is connected with the pipeline section of main pipeline, cleaning pipeline is used to be passed through clean gas.The technical scheme provided by the present invention, can solve the problem that the problem of gas clean-up time length of the prior art, elimination effect are poor.

Description

Gas analyzing apparatus
Technical field
The present invention relates to gas analysis technology field, in particular to a kind of gas analyzing apparatus.
Background technology
At present, when the residual gas composition in vacuum system is analyzed, it is necessary to be entered using gas analyzer to vacuum system Row analysis.It is that gas analyzer is connected on the branch road of vacuum pipe to measure in the prior art, is needed vacuum after measurement Residual gas in pipeline is removed, to avoid producing influence to measurement next time.In the prior art when being purged to residual gas, It is that evacuation processing is carried out to vacuum pipe, but its evacuated time length and residual gas elimination effect is poor.
The content of the invention
The present invention provides a kind of gas analyzing apparatus, and to solve, gas clean-up time length of the prior art, elimination effect are poor to ask Topic.
A kind of gas analyzing apparatus provided according to the present invention, gas analyzing apparatus includes main pipeline, for being passed through gas to be detected; Detection means, the detection port of detection means is connected with main pipeline, and detection means is used to detect the gas to be detected in main pipeline; Pipeline is cleaned, is connected with the pipeline section of main pipeline, cleaning pipeline is used to be passed through clean gas.
Further, main pipeline has arrival end and the port of export, and cleaning pipeline is arranged between detection means and arrival end.
Further, clean gas is nitrogen.
Further, gas analyzing apparatus also includes valve, and valve is arranged on cleaning pipeline.
Further, gas analyzing apparatus also includes lateral, and the first end of lateral is connected with the pipeline section of main pipeline, examines The detection port for surveying device is connected with lateral.
Further, gas analyzing apparatus also includes guider, including the first guide section for being arranged in main pipeline and extends to The second guide section in lateral, the first guide section is connected with the second guide section, and the detection gas in main pipeline is directed into In lateral.
Further, main pipeline has arrival end and the port of export, and the opening of the first guide section is set towards the arrival end of main pipeline.
Further, guider includes collection portion, and collection portion is arranged at the opening of the first guide section.
Further, there is preset distance between the second guide section and the detection port of detection means.
Further, annular slab is provided with the first guide section, annular slab is disc or infundibulate, and annular slab is collection portion.
Further, main pipeline includes the first pipeline and second pipe, and the first pipeline is interconnected with second pipe, and collection portion is set Put the junction in the first pipeline and second pipe, collection portion by jump ring respectively with the first pipeline and second pipe clamping.
Apply the technical scheme of the present invention, by setting cleaning pipeline on main pipeline so that after gas detection is terminated, will be clear Clean gas is passed through main pipeline from cleaning pipeline, and then the residual gas remained in main pipeline can be taken away by clean gas.Such as This can quickly and easily remove the detection gas of residual, it is to avoid next detection band is disturbed.
Brief description of the drawings
The Figure of description for constituting the part of the application is used for providing a further understanding of the present invention, schematic reality of the invention Apply example and its illustrate to be used to explain the present invention, do not constitute inappropriate limitation of the present invention.In the accompanying drawings:
Fig. 1 shows the structural representation of the gas analyzing apparatus provided according to embodiments of the present invention.
Wherein, above-mentioned accompanying drawing is marked including the following drawings:
10th, main pipeline;20th, lateral;30th, detection means;40th, guider;41st, collection portion;50th, cleaning pipe Road;51st, valve.
Embodiment
It should be noted that in the case where not conflicting, the feature in embodiment and embodiment in the application can be mutually combined. Describe the present invention in detail below with reference to the accompanying drawings and in conjunction with the embodiments.
As shown in figure 1, the embodiment of the present invention is a kind of gas analyzing apparatus, the device includes:Main pipeline 10, detection means 30 And cleaning pipeline 50.Wherein, main pipeline 10 is used to be passed through detection gas, detection port and the main pipeline 10 of detection means 30 Connection, detection means 30 is used to detect the gas to be detected in main pipeline 10.The pipeline section for cleaning pipeline 50 and main pipeline 10 connects Logical, cleaning pipeline 50 is used to be passed through clean gas.After gas detection has been carried out, clean gas is passed through in cleaning pipeline 50, To take away the detection gas remained in device by clean gas.
The embodiment provided using the present invention, by setting cleaning pipeline 50 on main pipeline 10 so that after gas detection is terminated, By clean gas from cleaning pipeline 50 be passed through main pipeline, and then can be taken away by clean gas remain in it is residual in main pipeline 10 Residual air body.It so can quickly and easily remove residual gas, it is to avoid next detection band is disturbed.
Wherein, in the case where main pipeline 10 is not passed through detection gas, clean gas is only passed through, can be taken away by clean gas Detection gas in device.Alternatively, in order to further improve elimination effect, cleaning pipeline 50 is cleaned into pipeline 50 and is arranged on Between detection means 30 and arrival end.
Alternatively, in order to avoid to detecting that the detection data of gas produce interference, selection nitrogen is used as clean gas.
For the ease of control clean gas flow, specifically, valve 51 is provided with cleaning pipeline 50.
In specific operation process, being passed through for detection gas is first closed, nitrogen valve 51 is then opened, and control by valve 51 Nitrogen, is gradually passed into device by the flow of nitrogen, and is kept for a period of time, in the process, and detection means 30 continues work Make, when detection means can't detect detection gas, close valve 51.
Specifically, the gas analyzing apparatus also includes lateral 20, the first end of lateral 20 and the pipeline section of main pipeline 10 Connection, the detection port of detection means 30 is connected with lateral 20.By lateral 20 company is provided to detection means 30 Port is connect, so detection means 30 can be easy to detect.
In embodiments of the present invention, the device also includes guider 40, and guider 40 includes being arranged in main pipeline 10 First guide section and the second guide section extended in lateral 20, the first guide section are connected with the second guide section with by main pipeline Detection gas in 10 is imported in lateral 20, can so increase the flow that detection gas is passed through in lateral 20, so as to Detected in 30 pairs of detection gases of detection means.Alternatively, the detection means 30 is residual gas analyzer.
Apply the technical scheme of the present invention, by increasing guider 40, Neng Gouzeng between main pipeline 10 and lateral 20 Plus detection gas enters the flow of lateral 20, and then the data that the detection means 30 in lateral 20 is detected It is more accurate.
Specifically, the main pipeline 10 has arrival end and a port of export, and the opening of the first guide section is towards the arrival end side of main pipeline 10 To setting, in order to detect that gas enters in guider 40, and lateral 20 is sent into.
Alternatively, in order that the gas imported by guider 40 is easily detected by detection means 30, it is directed to the one of device 40 End is set close to the detection port of detection means 30.
In the present embodiment, for the detection gas in further collecting main road 10, in the first guide section of guider 40 On be provided with collection portion 41, in order to collect detection gas and will detect that gas delivers to the detection port of detection means 30.
Alternatively, guider 40 can select guide pipe.The axis of the axis of first guide section and the second guide section is set in angle, Alternatively, the angle is 90 degree.
Wherein, collection portion 41 may be configured as infundibulate, and an extreme direction the entering towards main pipeline 10 that funnel openings are relatively large in diameter Mouth end, can so increase the volume into guider 40.Collection portion 41 can be also set to disc, and the disk Annular is arranged on the end for being located at main pipeline 10 on guide pipe.Wherein, the diameter of annular slab can be equal to the internal diameter of main pipeline 10, So that detection gas all enters lateral 20 by guider 40.
In the present embodiment, the main pipeline 10 includes the first pipeline and second pipe, and the first pipeline is mutually interconnected with second pipe It is logical, collection portion 41 is arranged on to the junction of the first pipeline and second pipe, can so be easy to staff to guider 40 Installed.Collection portion 41 can be fixed in main pipeline 10 in several ways, can be fixed by connectors such as screws, Also it can be fixed on by way of welding in main pipeline 10, alternatively, in the present embodiment, using jump ring by 41 points of collection portion Not with the first pipeline and second pipe clamping.
As shown in figure 1, the detection gas being passed through in main pipeline 10 enters lateral 20 by guider 40, filled from being oriented to Put and enter lateral 20 after 40 outflows, after device 30 is detected after testing, flow into main pipeline 10 from lateral 20, finally With the detection gas flow port of export in main pipeline 10.After experiment is finished, by cleaning gas, energy in the cleaning pipe of pipeline 50 Cleaning time is enough saved, so cleaning efficiency can be improved while experiment accuracy rate next time is ensured.
Pass through gas analyzing apparatus provided in an embodiment of the present invention, it is possible to increase gas analysis accuracy rate, also, the apparatus structure Simply, it is easy to produce or operate, and after analysis has been carried out, by cleaning the remove device that pipeline 50 can be easily and fast Interior residual gas, reduces the interference brought to subsequent detection.
The preferred embodiments of the present invention are the foregoing is only, are not intended to limit the invention, for those skilled in the art For, the present invention can have various modifications and variations.Any modification within the spirit and principles of the invention, being made, etc. With replacement, improvement etc., it should be included in the scope of the protection.

Claims (11)

1. a kind of gas analyzing apparatus, it is characterised in that the gas analyzing apparatus includes:
Main pipeline (10), for being passed through gas to be detected;
Detection means (30), the detection port of the detection means (30) is connected with main pipeline (10), the detection dress Putting (30) is used to detect the gas to be detected in the main pipeline (10);
Pipeline (50) is cleaned, is connected with the pipeline section of the main pipeline (10), the cleaning pipeline (50) is used to be passed through clearly Clean gas.
2. gas analyzing apparatus according to claim 1, it is characterised in that the main pipeline (10) has arrival end and gone out Mouth end, the cleaning pipeline (50) is arranged between the detection means (30) and the arrival end.
3. gas analyzing apparatus according to claim 1, it is characterised in that the clean gas is nitrogen.
4. gas analyzing apparatus according to claim 1, it is characterised in that the gas analyzing apparatus also includes:
Valve (51), the valve (51) is arranged on the cleaning pipeline (50).
5. gas analyzing apparatus according to any one of claim 1 to 4, it is characterised in that the gas analyzing apparatus is also Including:
Lateral (20), the first end of the lateral (20) is connected with the pipeline section of the main pipeline (10), institute The detection port for stating detection means (30) is connected with the lateral (20).
6. gas analyzing apparatus according to claim 5, it is characterised in that the gas analyzing apparatus also includes:
Guider (40), including the first guide section for being arranged in the main pipeline (10) and extend to the branched pipe The second guide section in road (20), first guide section is connected with second guide section, and by the main pipeline (10) Interior detection gas is directed into the lateral (20).
7. gas analyzing apparatus according to claim 6, the main pipeline (10) has arrival end and a port of export, described the The opening of one guide section is set towards the arrival end of the main pipeline (10).
8. gas analyzing apparatus according to claim 7, it is characterised in that the guider (40) includes collection portion (41), The collection portion (41) is arranged at the opening of first guide section.
9. gas analyzing apparatus according to claim 8, it is characterised in that second guide section and the detection means (30) Detection port between have preset distance.
10. gas analyzing apparatus according to claim 9, it is characterised in that be provided with annular slab on first guide section, The annular slab is disc or infundibulate, and the annular slab is the collection portion (41).
11. gas analyzing apparatus according to claim 10, it is characterised in that the main pipeline (10) include the first pipeline and Second pipe, first pipeline is interconnected with the second pipe, and the collection portion (41) is arranged on described first The junction of pipeline and the second pipe, the collection portion (41) by jump ring respectively with first pipeline and described Second pipe clamping.
CN201610027806.9A 2016-01-15 2016-01-15 Gas analyzing apparatus Active CN106980028B (en)

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Application Number Priority Date Filing Date Title
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CN106980028B CN106980028B (en) 2018-12-07

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113092682A (en) * 2021-04-06 2021-07-09 广州佰迈起生物科技有限公司 Gas concentration monitoring method and device

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0042436B1 (en) * 1979-12-27 1985-04-17 Fuji Electric Co., Ltd. Measuring unit for determining the oxygen content of a gas
DE4430378A1 (en) * 1994-08-26 1996-02-29 Sick Optik Elektronik Erwin Dust concn. measurement in flue gas duct
CN1945232A (en) * 2006-09-30 2007-04-11 浙江麦姆龙仪表有限公司 Measuring method and its device for external leading sampling of pipeline gas flow
CN104271913A (en) * 2012-05-04 2015-01-07 斯堪尼亚商用车有限公司 Apparatus for measuring of contents in exhaust gases
CN104353651A (en) * 2014-08-19 2015-02-18 中国科学院广州地球化学研究所 Atmosphere sampling tank cleaning system and cleaning method
CN104764894A (en) * 2015-04-22 2015-07-08 苏州聚阳环保科技股份有限公司 Full-automatic gas sample retention device
CN205019858U (en) * 2015-10-10 2016-02-10 上海鲲盈环保科技有限公司 Air pipe purifier

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0042436B1 (en) * 1979-12-27 1985-04-17 Fuji Electric Co., Ltd. Measuring unit for determining the oxygen content of a gas
DE4430378A1 (en) * 1994-08-26 1996-02-29 Sick Optik Elektronik Erwin Dust concn. measurement in flue gas duct
CN1945232A (en) * 2006-09-30 2007-04-11 浙江麦姆龙仪表有限公司 Measuring method and its device for external leading sampling of pipeline gas flow
CN104271913A (en) * 2012-05-04 2015-01-07 斯堪尼亚商用车有限公司 Apparatus for measuring of contents in exhaust gases
CN104353651A (en) * 2014-08-19 2015-02-18 中国科学院广州地球化学研究所 Atmosphere sampling tank cleaning system and cleaning method
CN104764894A (en) * 2015-04-22 2015-07-08 苏州聚阳环保科技股份有限公司 Full-automatic gas sample retention device
CN205019858U (en) * 2015-10-10 2016-02-10 上海鲲盈环保科技有限公司 Air pipe purifier

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113092682A (en) * 2021-04-06 2021-07-09 广州佰迈起生物科技有限公司 Gas concentration monitoring method and device

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