CN106980028B - Gas analyzing apparatus - Google Patents

Gas analyzing apparatus Download PDF

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Publication number
CN106980028B
CN106980028B CN201610027806.9A CN201610027806A CN106980028B CN 106980028 B CN106980028 B CN 106980028B CN 201610027806 A CN201610027806 A CN 201610027806A CN 106980028 B CN106980028 B CN 106980028B
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CN
China
Prior art keywords
gas
main pipeline
pipeline
analyzing apparatus
detection
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CN201610027806.9A
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Chinese (zh)
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CN106980028A (en
Inventor
于甄
解金库
高建聪
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Zhangjiagang Kangdexin Optronics Material Co Ltd
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Zhangjiagang Kangdexin Optronics Material Co Ltd
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Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N35/00Automatic analysis not limited to methods or materials provided for in any single one of groups G01N1/00 - G01N33/00; Handling materials therefor
    • G01N35/10Devices for transferring samples or any liquids to, in, or from, the analysis apparatus, e.g. suction devices, injection devices
    • G01N35/1004Cleaning sample transfer devices

Abstract

The present invention provides a kind of gas analyzing apparatus, gas analyzing apparatus includes main pipeline, for being passed through gas to be detected;The detection port of detection device, detection device is connected to main pipeline, and detection device is used to detect the gas to be detected in main pipeline;Pipeline is cleaned, is connected to the pipeline section of main pipeline, cleaning pipeline is for being passed through clean gas.The technical solution provided through the invention, is able to solve that gas clean-up time in the prior art is long, problem of elimination effect difference.

Description

Gas analyzing apparatus
Technical field
The present invention relates to gas analysis technology fields, in particular to a kind of gas analyzing apparatus.
Background technique
Currently, needing using gas analyzer when analyzing the residual gas ingredient in vacuum system to vacuum System is analyzed.It is to be connected to gas analyzer on the branch of vacuum pipe to measure in the prior art, is needed after measurement Residual gas in vacuum pipe is removed, is had an impact to avoid to measurement next time.In the prior art to residual gas It is evacuation processing to be carried out to vacuum pipe, but its evacuated time is long and residual gas elimination effect is poor when being purged.
Summary of the invention
The present invention provides a kind of gas analyzing apparatus, and to solve, gas clean-up time in the prior art is long, elimination effect The problem of difference.
A kind of gas analyzing apparatus provided according to the present invention, gas analyzing apparatus includes main pipeline, to be checked for being passed through Survey gas;The detection port of detection device, detection device is connected to main pipeline, and detection device is to be checked in main pipeline for detecting Survey gas;Pipeline is cleaned, is connected to the pipeline section of main pipeline, cleaning pipeline is for being passed through clean gas.
Further, main pipeline has arrival end and outlet end, and cleaning pipeline is arranged between detection device and arrival end.
Further, clean gas is nitrogen.
Further, gas analyzing apparatus further includes valve, and valve setting is on cleaning pipeline.
Further, gas analyzing apparatus further includes lateral, and the first end of lateral and the pipeline section of main pipeline connect Logical, the detection port of detection device is connect with lateral.
Further, gas analyzing apparatus further includes guiding device, the first guide section including being arranged in main pipeline and The second guide section in lateral is extended to, the first guide section is connected to the second guide section, and by the detection gas in main pipeline Body is directed into lateral.
Further, main pipeline has arrival end and outlet end, and the arrival end of opening towards the main pipeline of the first guide section is set It sets.
Further, guiding device includes collection portion, and the opening of the first guide section is arranged in collection portion.
Further, there is preset distance between the second guide section and the detection port of detection device.
Further, annular slab is provided on the first guide section, annular slab is disc or infundibulate, and annular slab is to collect Portion.
Further, main pipeline includes first pipe and second pipe, and first pipe and second pipe are interconnected, collect Portion is arranged in the junction of first pipe and second pipe, collection portion by circlip respectively with first pipe and second pipe card It connects.
It applies the technical scheme of the present invention, by the way that cleaning pipeline is arranged on main pipeline, so that after terminating gas detection, Clean gas is passed through main pipeline from cleaning pipeline, and then the residual gas remained in main pipeline can be taken away by clean gas Body.Remaining detection gas so can be quickly and easily removed, avoid bringing interference to detection next time.
Detailed description of the invention
The accompanying drawings constituting a part of this application is used to provide further understanding of the present invention, and of the invention shows Examples and descriptions thereof are used to explain the present invention for meaning property, does not constitute improper limitations of the present invention.In the accompanying drawings:
Fig. 1 shows the structural schematic diagram of the gas analyzing apparatus provided according to embodiments of the present invention.
Wherein, the above drawings include the following reference numerals:
10, main pipeline;20, lateral;30, detection device;40, guiding device;41, collection portion;50, pipeline is cleaned; 51, valve.
Specific embodiment
It should be noted that in the absence of conflict, the features in the embodiments and the embodiments of the present application can phase Mutually combination.The present invention will be described in detail below with reference to the accompanying drawings and embodiments.
As shown in Figure 1, the embodiment of the present invention is a kind of gas analyzing apparatus, which includes: main pipeline 10, detection device 30 and cleaning pipeline 50.Wherein, main pipeline 10 is for being passed through detection gas, the detection port of detection device 30 and main pipeline 10 Connection, detection device 30 are used to detect the gas to be detected in main pipeline 10.Cleaning pipeline 50 is connected to the pipeline section of main pipeline 10, Cleaning pipeline 50 is for being passed through clean gas.After having carried out gas detection, it is passed through clean gas in cleaning pipeline 50, with logical It crosses clean gas and takes away remaining detection gas in the device.
Using embodiment provided by the invention, by the way that cleaning pipeline 50 is arranged on main pipeline 10, so that terminating gas After detection, clean gas is passed through main pipeline from cleaning pipeline 50, and then can take away by clean gas and remain in main pipeline Residual gas in 10.Residual gas so can be quickly and easily removed, avoids bringing interference to detection next time.
Wherein, in the case where main pipeline 10 is not passed through detection gas, it is only passed through clean gas, clean gas can be passed through With the detection gas in walking apparatus.Optionally, in order to further increase elimination effect, cleaning pipeline 50 is cleaned into pipeline 50 and is arranged Between detection device 30 and arrival end.
Optionally, in order to avoid the detection data to detection gas generates interference, nitrogen is chosen as clean gas.
For the ease of controlling clean gas flow, specifically, valve 51 is provided on cleaning pipeline 50.
In specific operation process, being passed through for detection gas is first closed, then opens nitrogen valve 51, and pass through valve 51 Nitrogen, is gradually passed into device by the flow for controlling nitrogen, and is kept for a period of time, and in the process, detection device 30 is held Continuous work closes valve 51 when detection device can't detect detection gas.
Specifically, which further includes lateral 20, first end and the main pipeline 10 of lateral 20 Pipeline section connection, the detection port of detection device 30 is connect with lateral 20.It is provided by lateral 20 to detection device 30 Connectivity port can so be detected convenient for detection device 30.
In embodiments of the present invention, which further includes guiding device 40, and guiding device 40 includes being arranged in main pipeline 10 Interior the first guide section and the second guide section in lateral 20 is extended to, the first guide section is connected to will with the second guide section Detection gas in main pipeline 10 import in lateral 20, can so increase the stream that detection gas are passed through in lateral 20 Amount, in order to which detection device 30 detects detection gas.Optionally, which is residual gas analyzer.
It applies the technical scheme of the present invention, by increasing guiding device 40, energy between main pipeline 10 and lateral 20 Enough increase the flow that detection gas enter lateral 20, so that the detection device 30 being located in lateral 20 detected Data are more accurate.
Specifically, which has arrival end and outlet end, the entrance of the opening of the first guide section towards main pipeline 10 Extreme direction setting, in order to which detection gas enter in guiding device 40, and is sent into lateral 20.
Optionally, in order to detect the gas imported by guiding device 40 easily by detection device 30, by guiding device 40 One end close to detection device 30 detection port be arranged.
In the present embodiment, in order to which the detection gas in further collecting main road 10, first in guiding device 40 are led It is provided with collection portion 41 in section, send in order to collect detection gas and will test gas to the detection port of detection device 30 Place.
Optionally, guide pipe can be selected in guiding device 40.The axis of the axis of first guide section and the second guide section is in folder Angle setting, optionally, which is 90 degree.
Wherein, collection portion 41 may be configured as infundibulate, and the extreme direction that is relatively large in diameter of funnel openings is towards main pipeline 10 Arrival end, can so increase into the volume in guiding device 40.It can also set collection portion 41 to disc, and the circle The end for being located at main pipeline 10 on guide pipe is arranged in disc-annular shape.Wherein, the diameter of annular slab can be equal to the internal diameter of main pipeline 10, So that detection gas all pass through guiding device 40 and enter lateral 20.
In the present embodiment, which includes first pipe and second pipe, and first pipe and second pipe It is interconnected, collection portion 41 is arranged in the junction of first pipe and second pipe, it so can be convenient for staff to guiding Device 40 is installed.Collection portion 41 can be fixed in several ways in main pipeline 10, can be carried out by connectors such as screws It is fixed, it can also be fixed on by welding in main pipeline 10, optionally, in the present embodiment, using circlip by collection portion 41 are clamped with first pipe and second pipe respectively.
As shown in Figure 1, the detection gas being passed through in main pipeline 10 enter lateral 20 by guiding device 40, from guiding Device 40 flow out after enter lateral 20, through detection device 30 detection after, from lateral 20 flow into main pipeline 10, finally with Detection gas in main pipeline 10 flow to outlet end.After finishing experiment, interior gas, Neng Goujie are managed by the cleaning cleaning of pipeline 50 Cleaning time is saved, so can improve cleaning efficiency while guaranteeing experiment accuracy rate next time.
The gas analyzing apparatus provided through the embodiment of the present invention can be improved gas analysis accuracy rate, also, the device Structure is simple, easy to produce or operation, being capable of removing easily and fast by cleaning pipeline 50 and after having carried out analysis Residual gas in device is reduced and is interfered subsequent detection bring.
The foregoing is only a preferred embodiment of the present invention, is not intended to restrict the invention, for the skill of this field For art personnel, the invention may be variously modified and varied.All within the spirits and principles of the present invention, made any to repair Change, equivalent replacement, improvement etc., should all be included in the protection scope of the present invention.

Claims (9)

1. a kind of gas analyzing apparatus, which is characterized in that the gas analyzing apparatus includes:
Main pipeline (10), for being passed through gas to be detected;
The detection port of detection device (30), the detection device (30) is connected to main pipeline (10), the detection device (30) For detecting the gas to be detected in the main pipeline (10);
It cleans pipeline (50), is connected to the pipeline section of the main pipeline (10), the cleaning pipeline (50) is for being passed through clean gas;
The first end of lateral (20), the lateral (20) is connected to the pipeline section of the main pipeline (10), the detection The detection port of device (30) is connect with the lateral (20);
Guiding device (40) including the first guide section being arranged in the main pipeline (10) and extends to the lateral (20) the second guide section in, first guide section are connected to second guide section, and will be in the main pipeline (10) Detection gas are directed into the lateral (20).
2. gas analyzing apparatus according to claim 1, which is characterized in that the main pipeline (10) has arrival end and goes out Mouth end, the cleaning pipeline (50) are arranged between the detection device (30) and the arrival end.
3. gas analyzing apparatus according to claim 1, which is characterized in that the clean gas is nitrogen.
4. gas analyzing apparatus according to claim 1, which is characterized in that the gas analyzing apparatus further include:
Valve (51), the valve (51) are arranged on the cleaning pipeline (50).
5. gas analyzing apparatus according to claim 4, the main pipeline (10) has arrival end and an outlet end, described the The arrival end of the opening of one guide section towards the main pipeline (10) is arranged.
6. gas analyzing apparatus according to claim 5, which is characterized in that the guiding device (40) includes collection portion (41), the opening of first guide section is arranged in the collection portion (41).
7. gas analyzing apparatus according to claim 6, which is characterized in that second guide section and the detection device (30) there is preset distance between detection port.
8. gas analyzing apparatus according to claim 7, which is characterized in that be provided with annular on first guide section Plate, the annular slab are disc or infundibulate, and the annular slab is the collection portion (41).
9. gas analyzing apparatus according to claim 8, which is characterized in that the main pipeline (10) include first pipe and Second pipe, the first pipe and the second pipe are interconnected, and the collection portion (41) is arranged in the first pipe With the junction of the second pipe, the collection portion (41) by circlip respectively with the first pipe and the second pipe Clamping.
CN201610027806.9A 2016-01-15 2016-01-15 Gas analyzing apparatus Active CN106980028B (en)

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Application Number Priority Date Filing Date Title
CN201610027806.9A CN106980028B (en) 2016-01-15 2016-01-15 Gas analyzing apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201610027806.9A CN106980028B (en) 2016-01-15 2016-01-15 Gas analyzing apparatus

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CN106980028A CN106980028A (en) 2017-07-25
CN106980028B true CN106980028B (en) 2018-12-07

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Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113092682A (en) * 2021-04-06 2021-07-09 广州佰迈起生物科技有限公司 Gas concentration monitoring method and device

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0042436B1 (en) * 1979-12-27 1985-04-17 Fuji Electric Co., Ltd. Measuring unit for determining the oxygen content of a gas
DE4430378A1 (en) * 1994-08-26 1996-02-29 Sick Optik Elektronik Erwin Dust concn. measurement in flue gas duct
CN1945232A (en) * 2006-09-30 2007-04-11 浙江麦姆龙仪表有限公司 Measuring method and its device for external leading sampling of pipeline gas flow
CN104271913A (en) * 2012-05-04 2015-01-07 斯堪尼亚商用车有限公司 Apparatus for measuring of contents in exhaust gases
CN104353651A (en) * 2014-08-19 2015-02-18 中国科学院广州地球化学研究所 Atmosphere sampling tank cleaning system and cleaning method
CN104764894A (en) * 2015-04-22 2015-07-08 苏州聚阳环保科技股份有限公司 Full-automatic gas sample retention device
CN205019858U (en) * 2015-10-10 2016-02-10 上海鲲盈环保科技有限公司 Air pipe purifier

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0042436B1 (en) * 1979-12-27 1985-04-17 Fuji Electric Co., Ltd. Measuring unit for determining the oxygen content of a gas
DE4430378A1 (en) * 1994-08-26 1996-02-29 Sick Optik Elektronik Erwin Dust concn. measurement in flue gas duct
CN1945232A (en) * 2006-09-30 2007-04-11 浙江麦姆龙仪表有限公司 Measuring method and its device for external leading sampling of pipeline gas flow
CN104271913A (en) * 2012-05-04 2015-01-07 斯堪尼亚商用车有限公司 Apparatus for measuring of contents in exhaust gases
CN104353651A (en) * 2014-08-19 2015-02-18 中国科学院广州地球化学研究所 Atmosphere sampling tank cleaning system and cleaning method
CN104764894A (en) * 2015-04-22 2015-07-08 苏州聚阳环保科技股份有限公司 Full-automatic gas sample retention device
CN205019858U (en) * 2015-10-10 2016-02-10 上海鲲盈环保科技有限公司 Air pipe purifier

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