CN106975841A - 飞秒激光双脉冲空气中一步法制备金属拉曼基底 - Google Patents

飞秒激光双脉冲空气中一步法制备金属拉曼基底 Download PDF

Info

Publication number
CN106975841A
CN106975841A CN201611018428.4A CN201611018428A CN106975841A CN 106975841 A CN106975841 A CN 106975841A CN 201611018428 A CN201611018428 A CN 201611018428A CN 106975841 A CN106975841 A CN 106975841A
Authority
CN
China
Prior art keywords
femtosecond
raman substrate
double pulses
metal
laser
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201611018428.4A
Other languages
English (en)
Inventor
姜澜
许永达
李欣
孟革
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Beijing Institute of Technology BIT
Original Assignee
Beijing Institute of Technology BIT
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Beijing Institute of Technology BIT filed Critical Beijing Institute of Technology BIT
Publication of CN106975841A publication Critical patent/CN106975841A/zh
Pending legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/062Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
    • B23K26/0622Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/0643Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising mirrors
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/0665Shaping the laser beam, e.g. by masks or multi-focusing by beam condensation on the workpiece, e.g. for focusing
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/352Working by laser beam, e.g. welding, cutting or boring for surface treatment
    • B23K26/3568Modifying rugosity
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/70Auxiliary operations or equipment
    • B23K26/702Auxiliary equipment
    • B23K26/704Beam dispersers, e.g. beam wells

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)

Abstract

本发明涉及飞秒激光双脉冲空气中一步法制备金属拉曼基底,属于飞秒激光应用技术领域。本发明利用飞秒激光双脉冲,在不同延时下,直接在空气环境下加工金属基底,其中所述加工采用的金属为金、银、铜,无需其他辅助环境,从而得到表面附着金属纳米颗粒的表面增强拉曼基底。该方法可实现简单、快速、环境友好、均匀的金属表面增强拉曼基底制备。

Description

飞秒激光双脉冲空气中一步法制备金属拉曼基底
技术领域
本发明涉及一种飞秒激光双脉冲在空气中一步法制备金属表面增强拉曼基底,属于飞秒激光应用技术领域。
背景技术
表面拉曼增强散射Surface-enhanced Raman scattering(简称SERS)是一种光学增强效应,可以将吸附在基底上分子的微弱信号增强102-1014倍。因此,表面拉曼增强散射技术在物理、化学、医学、环境监测等方面具有很大的发展潜力。传统的表面增强拉曼基底的制备方法有离子束刻蚀法、离子束溅射沉积法、真空镀膜、化学合成法等方法,但这些方法存在步骤繁琐、费用昂贵、污染环境、均匀性差等缺点。随着飞秒激光技术的不断发展,飞秒激光加工表面微纳结构成为一种简便、有效的表面加工技术,也为制备表面增强拉曼基底提供了一种新的思路。
贵金属纳米粒子可以产生较强的表面拉曼增强效应。在文章“Cheng-Hsiang Lin,Lan Jiang,and Hai-Lung Tsai,Opt.Lett.35,7(2010)”中作者利用纳秒激光对镀在硅表面的金膜进行加热,产生了金纳米颗粒,通过调节参数调控了金纳米颗粒的粒径分布,从而使其产生了较强的拉曼增强效应。在文献“Ning,Zhang,Xin,Li,Lan,Jiang,Xuesong,Shi,Cong, Li,Yongfeng,Lu.Opt.Lett.38,18(2013)”中,作者利用飞秒激光还原硝酸银,在硅的表面产生了银纳米颗粒,从而得到了表面拉曼增强基底。然而上述两种产生贵金属纳米粒子的方法加工周期较长,离子镀膜费用较高,光化学还原法容易对环境产生污染。
发明内容
本发明的目的是为了克服传统制备表面增强拉曼基底存在的步骤繁琐、费用昂贵、污染环境、均匀性差等缺点,提出了一种飞秒激光双脉冲一步法制备表面增强拉曼基底,利用飞秒激光双脉冲,在不同延时下,直接在空气环境下加工金属基底,其中所述加工采用的金属为金、银、铜,无需其他辅助环境,从而得到表面附着金属纳米颗粒的表面增强拉曼基底。
本发明的目的是通过以下技术来实现的:
飞秒激光双脉冲空气中一步法制备金属拉曼基底,即在空气中利用飞秒激光双脉冲一步法加工得到附着有金属纳米颗粒的加工区域,无需其他辅助环境,包括如下步骤:
步骤一,通过分束合束,将传统的飞秒激光脉冲在时域上通过迈克尔逊干涉装置调制为飞秒激光双脉冲,且两个子脉冲的时间间隔可以调节;
步骤二,将金属基底放置在六轴平移台上,通过照明系统和CCD系统,使步骤一得到的飞秒激光聚焦到金属的表面;
步骤三,采用步骤一中所得到的飞秒激光双脉冲在空气中对金属基底进行加工,使其表面产生金属纳米颗粒,进而得到均匀、高效的表面增强拉曼基底。
装置包括:飞秒激光器;第一半波片;第一偏振片;分束镜;第一反射镜;第二反射镜;第三反射镜;光快门;第二半波片;第二偏振片;二向色镜;CCD成像系统;计算机;六轴平移台;样品;物镜。
连接关系:飞秒激光器产生飞秒激光经过第一半波片和第一偏振片初步降低能量后,经过分束镜被分成两束激光,两束激光分别由第一反射镜和第二反射镜反射返回至分束镜进行合束,再经过反射镜,通过光快门,经由第二半波片和第二偏振片精细地调节能量后,通过反射镜,由物镜聚焦到样品表面,样品固定于六轴平移台上,通过CCD成像系统进行观察。其中,飞秒激光器、第一反射镜、光快门、六轴平移台均通过计算机进行控制。
工作过程为:
步骤一:飞秒激光器产生激光。
步骤二:激光通过分束合束后产生脉冲序列,且脉冲序列延时可调节,之后通过物镜聚焦到样品表面。
步骤三:通过计算机控制得到不同的脉冲延时,同时通过半波片和偏振片调节能量,控制六轴平移台对金属进行加工。
有益效果
1.本发明利用飞秒激光双脉冲在空气中一步法加工金属表面,步骤简单,对环境没有污染。
2.本发明制备的表面增强拉曼基底均匀性良好,可以进行快速制备。
附图说明
图1为本发明的步骤示意图。
其中,1-飞秒激光双脉冲2-物镜3-未加工金属基底4-加工后金属基底5-加工表面放大示意图
图2为飞秒激光加工光路。
其中,1-飞秒激光器2-第一半波片3-第一偏振片4-分束镜5-第一反射镜6-第二反射镜7-第三反射镜8-光快门9-第二半波片10-第二偏振片11-二向色镜12-CCD成像系统13-计算机14-六轴平移台15-样品16-物镜
具体实施方式
下面结合附图和实施例对本发明做进一步说明。
飞秒激光系统采用美国光谱物理(SpectrumPhysics)公司生产的激光器,产生的飞秒激光为线偏振,中心波长800nm,脉冲宽度35fs,重复频率1KHz,单脉冲最大能量3mJ,光强分布为高斯型。
本实施例是在图2所示的光路图中实施,首先飞秒激光器产生飞秒激光经过第一半波片和第一偏振片初步降低能量后,经过分束镜被分成两束激光,两束激光分别由第一反射镜和第二反射镜垂直反射返回至分束镜进行合束,再经过反射镜,通过光快门,经由第二半波片和第二偏振片精细地调节能量后,通过反射镜,由物镜聚焦到样品表面,样品固定于六轴平移台上,通过CCD成像系统进行观察。其中,飞秒激光器、第一反射镜、光快门、六轴平移台均通过计算机进行控制。
实验选择的材料为金属银,规格是10mm×10mm×1mm,双面进行光学级抛光,表面粗糙度小于10埃。
步骤如图1所示。
步骤一:飞秒激光器产生激光。
步骤二:飞秒激光经过分束合束光路,产生飞秒激光双脉冲,之后通过物镜聚焦到样品表面。
步骤三:通过计算机控制得到脉冲延时为3ps,同时通过半波片和偏振片调节合适的能量为0.28J/cm2,扫在描速度为200μm/s下对样品表面进行“S”形路线加工,在样品表面直接得到银纳米颗粒。
步骤四:用去离子水清洗加工过的样品表面,干燥,得到表面增强拉曼基底。
本实施例克服了传统制备表面增强拉曼基底方法存在的步骤繁琐、费用昂贵、污染环境、均匀性差等缺点,利用飞秒激光双脉冲,直接在空气环境下加工金属银基底,从而得到表面附着银纳米颗粒的表面增强拉曼基底,其增强因子可以达到109

Claims (2)

1.飞秒激光双脉冲空气中一步法制备金属拉曼基底,其特征在于:利用飞秒激光双脉冲,在不同延时下,直接在空气环境下加工金属基底,无需其他辅助环境,从而得到表面附着金属纳米颗粒的表面增强拉曼基底;包括步骤如下:
步骤一,通过分束合束,将传统的飞秒激光脉冲通过迈克尔逊干涉装置在时域上调制为飞秒激光双脉冲,且两个子脉冲的时间间隔可以调节;
步骤二,将金属基底放置在六轴平移台上,通过照明系统和CCD系统,使步骤一得到的飞秒激光聚焦到金属的表面;
步骤三,采用步骤一中所得到的飞秒激光双脉冲在空气中对金属基底进行加工,使其表面产生金属纳米颗粒,进而得到均匀、高效的表面增强拉曼基底。
2.根据权利要求1所述的一种飞秒激光双脉冲一步法制备表面增强拉曼基底,其特征在于:所述加工采用的金属为金、银、铜。
CN201611018428.4A 2016-03-07 2016-11-16 飞秒激光双脉冲空气中一步法制备金属拉曼基底 Pending CN106975841A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CN201610127866.8A CN105728945A (zh) 2016-03-07 2016-03-07 一种飞秒激光双脉冲一步法制备表面增强拉曼基底
CN2016101278668 2016-03-07

Publications (1)

Publication Number Publication Date
CN106975841A true CN106975841A (zh) 2017-07-25

Family

ID=56249375

Family Applications (2)

Application Number Title Priority Date Filing Date
CN201610127866.8A Pending CN105728945A (zh) 2016-03-07 2016-03-07 一种飞秒激光双脉冲一步法制备表面增强拉曼基底
CN201611018428.4A Pending CN106975841A (zh) 2016-03-07 2016-11-16 飞秒激光双脉冲空气中一步法制备金属拉曼基底

Family Applications Before (1)

Application Number Title Priority Date Filing Date
CN201610127866.8A Pending CN105728945A (zh) 2016-03-07 2016-03-07 一种飞秒激光双脉冲一步法制备表面增强拉曼基底

Country Status (1)

Country Link
CN (2) CN105728945A (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110026684A (zh) * 2019-04-24 2019-07-19 北京理工大学 一种飞秒激光制备体状二硫化钼表面拉曼增强基底的方法

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107538017B (zh) * 2017-08-21 2020-04-21 北京理工大学 一种光生电子还原制备金属-二硫化钼复合结构的方法
CN108226123B (zh) * 2017-12-12 2021-02-23 华南师范大学 一种飞秒激光制备表面增强拉曼散射基底的方法
CN108436253B (zh) * 2018-02-26 2020-07-17 北京航空航天大学 一种sers-荧光双模式金属增强基底的制备方法
CN109848547A (zh) * 2019-04-08 2019-06-07 北京理工大学 飞秒激光高效稳定改性透明材料均匀成丝方法
CN110280776B (zh) * 2019-04-15 2020-10-16 清华大学 基于飞秒双脉冲激光的金纳米棒增强整形方法及其系统
CN112130439B (zh) * 2020-09-25 2021-07-13 北京理工大学 一种基于飞秒激光制备的可变防伪计算机全息图
CN115770945A (zh) * 2021-09-06 2023-03-10 长春理工大学 一种精确设计的双脉冲飞秒激光制备纳米孔的加工方法

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006212646A (ja) * 2005-02-01 2006-08-17 Canon Machinery Inc 周期構造作成方法
CN103862171A (zh) * 2014-03-28 2014-06-18 南开大学 双波长飞秒激光制备二维周期金属颗粒阵列结构的方法
CN103994830A (zh) * 2014-04-24 2014-08-20 南开大学 一种获得双脉冲间隔、脉冲宽度和强度比的方法和系统
CN204771160U (zh) * 2015-06-26 2015-11-18 中国工程物理研究院上海激光等离子体研究所 一种高深径比微孔的制备装置
CN105088231A (zh) * 2015-08-25 2015-11-25 华东理工大学 一种表面增强拉曼散射基底的简易制备方法

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006212646A (ja) * 2005-02-01 2006-08-17 Canon Machinery Inc 周期構造作成方法
CN103862171A (zh) * 2014-03-28 2014-06-18 南开大学 双波长飞秒激光制备二维周期金属颗粒阵列结构的方法
CN103994830A (zh) * 2014-04-24 2014-08-20 南开大学 一种获得双脉冲间隔、脉冲宽度和强度比的方法和系统
CN204771160U (zh) * 2015-06-26 2015-11-18 中国工程物理研究院上海激光等离子体研究所 一种高深径比微孔的制备装置
CN105088231A (zh) * 2015-08-25 2015-11-25 华东理工大学 一种表面增强拉曼散射基底的简易制备方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110026684A (zh) * 2019-04-24 2019-07-19 北京理工大学 一种飞秒激光制备体状二硫化钼表面拉曼增强基底的方法

Also Published As

Publication number Publication date
CN105728945A (zh) 2016-07-06

Similar Documents

Publication Publication Date Title
CN106975841A (zh) 飞秒激光双脉冲空气中一步法制备金属拉曼基底
Žemaitis et al. Highly-efficient laser ablation of copper by bursts of ultrashort tuneable (fs-ps) pulses
CN108015410A (zh) 一种基于飞秒激光诱导无定形GemSbnTek薄膜制备晶态纳米结构的方法
CN108213718B (zh) 一种飞秒激光调控GemSbnTek晶态纳米结构几何形态方法
CN107132210B (zh) 一种基于电子动态调控的表面增强拉曼的基底制造方法
TWI331945B (en) Method and system pf controlled optical beam for mold fabrication by ultra-fast laser technique
Qi et al. Time-resolved analysis of thickness-dependent dewetting and ablation of silver films upon nanosecond laser irradiation
CN107971628A (zh) 基于飞秒激光电子动态调控定制金属铜表面周期结构的方法
CN106744662A (zh) 一种利用电子动态调控制备硅纳米线结构的方法
TW202030046A (zh) 濾光片的雷射切割方法及裝置
WO2016015599A1 (zh) 一种大面积表面增强拉曼光谱单晶硅基底的快速制备方法
Li et al. High period frequency LIPSS emerging on 304 stainless steel under the irradiation of femtosecond laser double-pulse trains
Smirnov et al. Femtosecond laser ablation of a thin silver film in air and water
Ji et al. High-precision micro-through-hole array in quartz glass machined by infrared picosecond laser
CN109827947A (zh) 一种基于局域光场增强的飞秒激光光还原制造表面增强拉曼基底的方法
CN106970068B (zh) 一种快速制备大面积表面增强拉曼散射基底的方法
CN110026684B (zh) 一种飞秒激光制备体状二硫化钼表面拉曼增强基底的方法
Saikiran et al. Ultrafast laser induced subwavelength periodic surface structures on semiconductors/metals and application to SERS studies
Shaheen et al. Experimental studies on ablation characteristics of alumina after irradiation with a 193-nm ArF excimer laser
Blothe et al. Nanostructured back surface amorphization of silicon with picosecond laser pulses
Wang et al. Microsized structures assisted nanostructure formation on ZnSe wafer by femtosecond laser irradiation
CN102909382B (zh) 一种在有机溶剂中制备金属纳米颗粒的装置
Hwang et al. Resonance colors in an amorphous-Si thin layer irradiated by an ultraviolet nanosecond laser
Liang et al. Study of the optical and absorption properties of micro-nanostructure on metal surfaces
Fazio et al. Synthesis by picosecond laser ablation of ligand-free Ag and Au nanoparticles for SERS applications

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
WD01 Invention patent application deemed withdrawn after publication
WD01 Invention patent application deemed withdrawn after publication

Application publication date: 20170725