CN106972084A - 用于制备紫外led芯片的方法 - Google Patents

用于制备紫外led芯片的方法 Download PDF

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CN106972084A
CN106972084A CN201710117152.3A CN201710117152A CN106972084A CN 106972084 A CN106972084 A CN 106972084A CN 201710117152 A CN201710117152 A CN 201710117152A CN 106972084 A CN106972084 A CN 106972084A
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CN106972084B (zh
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齐胜利
沈春生
李玉荣
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Jiangsu Wenyang Semiconductor Technology Co ltd
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Yancheng East Photoelectric Technology Co Ltd
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/005Processes
    • H01L33/0093Wafer bonding; Removal of the growth substrate
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/005Processes
    • H01L33/0062Processes for devices with an active region comprising only III-V compounds
    • H01L33/0066Processes for devices with an active region comprising only III-V compounds with a substrate not being a III-V compound
    • H01L33/007Processes for devices with an active region comprising only III-V compounds with a substrate not being a III-V compound comprising nitride compounds
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/48Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
    • H01L33/64Heat extraction or cooling elements
    • H01L33/641Heat extraction or cooling elements characterized by the materials

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  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
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  • Compositions Of Macromolecular Compounds (AREA)
  • Led Devices (AREA)

Abstract

本发明公开了一种用于制备紫外LED芯片的方法,包括如下步骤:1)制备蓝宝石衬底;2)将蓝宝石衬底抛光;3)在蓝宝石衬底上制备GaN外延;4)将蓝宝石衬底从GaN外延底面剥离;5)在GaN外延顶面制备电极;6)将GaN外延底面固定于基底上,制得紫外LED芯片。本发明用于制备紫外LED芯片的方法,采用经过特殊优化的基底,基底的导热性能好,能提高紫外LED的性能。

Description

用于制备紫外LED芯片的方法
技术领域
本发明涉及用于制备紫外LED芯片的方法。
背景技术
紫外LED一般指发光中心波长在400nm以下的LED,但有时将发光波长大于380nm时称为近紫外LED,而短于300nm时称为深紫外LED。因短波长光线的杀菌效果高,因此紫外LED常用于冰箱和家电等的杀菌及除臭等用途。
紫外LED的性能与紫外LED芯片息息相关,特别是紫外LED芯片的散热性能,很大程度上决定了紫外LED的性能。
发明内容
本发明的目的在于提供一种用于制备紫外LED芯片的方法,采用经过特殊优化的基底,基底的导热性能好,且基底还具有耐热、抗氧化、耐腐蚀、耐磨擦、阻燃的性能,可靠性好,能提高紫外LED的性能。
为实现上述目的,本发明的技术方案是设计一种用于制备紫外LED芯片的方法,包括如下步骤:
1)制备蓝宝石衬底;
2)将蓝宝石衬底抛光;
3)在蓝宝石衬底上制备GaN外延;
4)将蓝宝石衬底从GaN外延底面剥离;
5)在GaN外延顶面制备电极;
6)将GaN外延底面固定于基底上,制得紫外LED芯片;
按重量份计,所述基底由以下组分组成:
34~41份聚苯乙烯,
28~32份氯磺化聚乙烯橡胶,
2~4份碳化硅,
3~5份酒石酸钾钠,
2~6份甲基丙烯酸二甲氨基乙酯,
2~5份二苯基丁二酮,
1~4份苯三唑,
2~3份纳米氧化铈,
6~8份乙二醇单硬脂酸酯,
2~7份硼酸钙,
1~4份四丁基锡,
1~2份二茂铁,
2~3份三聚磷酸钠,
4~6份α-烯基磺酸钠。
优选的,按重量份计,所述基底由以下组分组成:
34份聚苯乙烯,
28份氯磺化聚乙烯橡胶,
2份碳化硅,
3份酒石酸钾钠,
2份甲基丙烯酸二甲氨基乙酯,
2份二苯基丁二酮,
1份苯三唑,
2份纳米氧化铈,
6份乙二醇单硬脂酸酯,
2份硼酸钙,
1份四丁基锡,
1份二茂铁,
2份三聚磷酸钠,
4份α-烯基磺酸钠。
优选的,按重量份计,所述基底由以下组分组成:
41份聚苯乙烯,
32份氯磺化聚乙烯橡胶,
4份碳化硅,
5份酒石酸钾钠,
6份甲基丙烯酸二甲氨基乙酯,
5份二苯基丁二酮,
4份苯三唑,
3份纳米氧化铈,
8份乙二醇单硬脂酸酯,
7份硼酸钙,
4份四丁基锡,
2份二茂铁,
3份三聚磷酸钠,
6份α-烯基磺酸钠。
本发明的优点和有益效果在于:提供一种用于制备紫外LED芯片的方法,采用经过特殊优化的基底,基底的导热性能好,且基底还具有耐热、抗氧化、耐腐蚀、耐磨擦、阻燃的性能,可靠性好,能提高紫外LED的性能。
基底的性能是基于其材料的,而基底材料的性能是由其组分及配比所决定的,本发明对基底材料的组分及配比进行特殊优化,使基底材料具有优异的导热性能,且基底材料还具有耐热、抗氧化、耐腐蚀、耐磨擦、阻燃的性能,可靠性好,非常适用于紫外LED芯片。
基底材料的性能是由其组分及配比所决定的,而组分及配比的确定非简单地“加法”,即并非将各个组分的性能一一累加就可得出基底材料的性能;基底材料中的不同组分会相互影响,如果组分及其配比不相互协调,单个组分所带来的有益效果,会被其他组分消减甚至消除,严重的时候,不同组分相互抵触,起不到整体综合作用,产生负作用和次品。本发明通过大量创造性劳动、反复验证,得到基底材料的最优组分及配比,使得多个组分综合在一起、相互协调、并产生正向综合效应,最终使基底材料具有优异的导热性能,还进一步使基底材料具有耐热、抗氧化、耐腐蚀、耐磨擦、阻燃性能,基底可靠性好,非常适用于紫外LED芯片。
具体实施方式
下面结合实施例,对本发明的具体实施方式作进一步描述。以下实施例仅用于更加清楚地说明本发明的技术方案,而不能以此来限制本发明的保护范围。
本发明具体实施的技术方案是:
实施例1
一种用于制备紫外LED芯片的方法,包括如下步骤:
1)制备蓝宝石衬底;
2)将蓝宝石衬底抛光;
3)在蓝宝石衬底上制备GaN外延;
4)将蓝宝石衬底从GaN外延底面剥离;
5)在GaN外延顶面制备电极;
6)将GaN外延底面固定于基底上,制得紫外LED芯片;
按重量份计,所述基底由以下组分组成:
34~41份聚苯乙烯,
28~32份氯磺化聚乙烯橡胶,
2~4份碳化硅,
3~5份酒石酸钾钠,
2~6份甲基丙烯酸二甲氨基乙酯,
2~5份二苯基丁二酮,
1~4份苯三唑,
2~3份纳米氧化铈,
6~8份乙二醇单硬脂酸酯,
2~7份硼酸钙,
1~4份四丁基锡,
1~2份二茂铁,
2~3份三聚磷酸钠,
4~6份α-烯基磺酸钠。
实施例2
在实施例1的基础上,区别在于,按重量份计,所述基底由以下组分组成:
34份聚苯乙烯,
28份氯磺化聚乙烯橡胶,
2份碳化硅,
3份酒石酸钾钠,
2份甲基丙烯酸二甲氨基乙酯,
2份二苯基丁二酮,
1份苯三唑,
2份纳米氧化铈,
6份乙二醇单硬脂酸酯,
2份硼酸钙,
1份四丁基锡,
1份二茂铁,
2份三聚磷酸钠,
4份α-烯基磺酸钠。
实施例3
在实施例1的基础上,区别在于,按重量份计,所述基底由以下组分组成:
41份聚苯乙烯,
32份氯磺化聚乙烯橡胶,
4份碳化硅,
5份酒石酸钾钠,
6份甲基丙烯酸二甲氨基乙酯,
5份二苯基丁二酮,
4份苯三唑,
3份纳米氧化铈,
8份乙二醇单硬脂酸酯,
7份硼酸钙,
4份四丁基锡,
2份二茂铁,
3份三聚磷酸钠,
6份α-烯基磺酸钠。
以上所述仅是本发明的优选实施方式,应当指出,对于本技术领域的普通技术人员来说,在不脱离本发明技术原理的前提下,还可以做出若干改进和润饰,这些改进和润饰也应视为本发明的保护范围。

Claims (3)

1.用于制备紫外LED芯片的方法,其特征在于,包括如下步骤:
1)制备蓝宝石衬底;
2)将蓝宝石衬底抛光;
3)在蓝宝石衬底上制备GaN外延;
4)将蓝宝石衬底从GaN外延底面剥离;
5)在GaN外延顶面制备电极;
6)将GaN外延底面固定于基底上,制得紫外LED芯片;
按重量份计,所述基底由以下组分组成:
34~41份聚苯乙烯,
28~32份氯磺化聚乙烯橡胶,
2~4份碳化硅,
3~5份酒石酸钾钠,
2~6份甲基丙烯酸二甲氨基乙酯,
2~5份二苯基丁二酮,
1~4份苯三唑,
2~3份纳米氧化铈,
6~8份乙二醇单硬脂酸酯,
2~7份硼酸钙,
1~4份四丁基锡,
1~2份二茂铁,
2~3份三聚磷酸钠,
4~6份α-烯基磺酸钠。
2.根据权利要求1所述的用于制备紫外LED芯片的方法,其特征在于,按重量份计,所述基底由以下组分组成:
34份聚苯乙烯,
28份氯磺化聚乙烯橡胶,
2份碳化硅,
3份酒石酸钾钠,
2份甲基丙烯酸二甲氨基乙酯,
2份二苯基丁二酮,
1份苯三唑,
2份纳米氧化铈,
6份乙二醇单硬脂酸酯,
2份硼酸钙,
1份四丁基锡,
1份二茂铁,
2份三聚磷酸钠,
4份α-烯基磺酸钠。
3.根据权利要求1所述的用于制备紫外LED芯片的方法,其特征在于,按重量份计,所述基底由以下组分组成:
41份聚苯乙烯,
32份氯磺化聚乙烯橡胶,
4份碳化硅,
5份酒石酸钾钠,
6份甲基丙烯酸二甲氨基乙酯,
5份二苯基丁二酮,
4份苯三唑,
3份纳米氧化铈,
8份乙二醇单硬脂酸酯,
7份硼酸钙,
4份四丁基锡,
2份二茂铁,
3份三聚磷酸钠,
6份α-烯基磺酸钠。
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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005129821A (ja) * 2003-10-27 2005-05-19 Jsr Corp 面実装型led素子
CN101197408B (zh) * 2003-02-25 2010-12-08 株式会社钟化 遮光用树脂及形成方法、发光二极管用管壳及半导体装置
CN103022301A (zh) * 2011-09-20 2013-04-03 上海蓝光科技有限公司 具有光抽取微结构的大功率GaN基垂直结构LED及其制备方法
CN106025020A (zh) * 2016-06-24 2016-10-12 闽南师范大学 具有高反射欧姆接触电极的短波紫外led芯片制造方法
CN106187204A (zh) * 2016-07-20 2016-12-07 合肥毅创钣金科技有限公司 一种氟羟基磷灰石改性的高致密度大功率led散热陶瓷基板

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101197408B (zh) * 2003-02-25 2010-12-08 株式会社钟化 遮光用树脂及形成方法、发光二极管用管壳及半导体装置
JP2005129821A (ja) * 2003-10-27 2005-05-19 Jsr Corp 面実装型led素子
CN103022301A (zh) * 2011-09-20 2013-04-03 上海蓝光科技有限公司 具有光抽取微结构的大功率GaN基垂直结构LED及其制备方法
CN106025020A (zh) * 2016-06-24 2016-10-12 闽南师范大学 具有高反射欧姆接触电极的短波紫外led芯片制造方法
CN106187204A (zh) * 2016-07-20 2016-12-07 合肥毅创钣金科技有限公司 一种氟羟基磷灰石改性的高致密度大功率led散热陶瓷基板

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