CN106972084A - 用于制备紫外led芯片的方法 - Google Patents
用于制备紫外led芯片的方法 Download PDFInfo
- Publication number
- CN106972084A CN106972084A CN201710117152.3A CN201710117152A CN106972084A CN 106972084 A CN106972084 A CN 106972084A CN 201710117152 A CN201710117152 A CN 201710117152A CN 106972084 A CN106972084 A CN 106972084A
- Authority
- CN
- China
- Prior art keywords
- parts
- substrate
- led chip
- sodium
- preparing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims abstract description 14
- 239000000758 substrate Substances 0.000 claims abstract description 40
- 238000000407 epitaxy Methods 0.000 claims abstract description 16
- 229910052594 sapphire Inorganic materials 0.000 claims abstract description 16
- 239000010980 sapphire Substances 0.000 claims abstract description 16
- JKNCOURZONDCGV-UHFFFAOYSA-N 2-(dimethylamino)ethyl 2-methylprop-2-enoate Chemical class CN(C)CCOC(=O)C(C)=C JKNCOURZONDCGV-UHFFFAOYSA-N 0.000 claims description 9
- RFVNOJDQRGSOEL-UHFFFAOYSA-N 2-hydroxyethyl octadecanoate Chemical class CCCCCCCCCCCCCCCCCC(=O)OCCO RFVNOJDQRGSOEL-UHFFFAOYSA-N 0.000 claims description 9
- 239000004793 Polystyrene Substances 0.000 claims description 9
- 235000010290 biphenyl Nutrition 0.000 claims description 9
- 239000004305 biphenyl Substances 0.000 claims description 9
- 150000001642 boronic acid derivatives Chemical class 0.000 claims description 9
- 229910000420 cerium oxide Inorganic materials 0.000 claims description 9
- KTWOOEGAPBSYNW-UHFFFAOYSA-N ferrocene Chemical compound [Fe+2].C=1C=C[CH-]C=1.C=1C=C[CH-]C=1 KTWOOEGAPBSYNW-UHFFFAOYSA-N 0.000 claims description 9
- JRZJOMJEPLMPRA-UHFFFAOYSA-N olefin Natural products CCCCCCCC=C JRZJOMJEPLMPRA-UHFFFAOYSA-N 0.000 claims description 9
- ZUOUZKKEUPVFJK-UHFFFAOYSA-N phenylbenzene Natural products C1=CC=CC=C1C1=CC=CC=C1 ZUOUZKKEUPVFJK-UHFFFAOYSA-N 0.000 claims description 9
- 229920002223 polystyrene Polymers 0.000 claims description 9
- VZOPRCCTKLAGPN-UHFFFAOYSA-L potassium;sodium;2,3-dihydroxybutanedioate;tetrahydrate Chemical class O.O.O.O.[Na+].[K+].[O-]C(=O)C(O)C(O)C([O-])=O VZOPRCCTKLAGPN-UHFFFAOYSA-L 0.000 claims description 9
- 229910010271 silicon carbide Inorganic materials 0.000 claims description 9
- 229910052708 sodium Inorganic materials 0.000 claims description 9
- 239000011734 sodium Substances 0.000 claims description 9
- 235000019832 sodium triphosphate Nutrition 0.000 claims description 9
- QRUDEWIWKLJBPS-UHFFFAOYSA-N benzotriazole Chemical compound C1=CC=C2N[N][N]C2=C1 QRUDEWIWKLJBPS-UHFFFAOYSA-N 0.000 claims description 6
- 239000012964 benzotriazole Substances 0.000 claims description 6
- AFCAKJKUYFLYFK-UHFFFAOYSA-N tetrabutyltin Chemical compound CCCC[Sn](CCCC)(CCCC)CCCC AFCAKJKUYFLYFK-UHFFFAOYSA-N 0.000 claims description 6
- 150000001565 benzotriazoles Chemical class 0.000 claims description 3
- 238000005457 optimization Methods 0.000 abstract description 3
- 239000000463 material Substances 0.000 description 12
- 238000005299 abrasion Methods 0.000 description 4
- 239000003963 antioxidant agent Substances 0.000 description 4
- 230000003078 antioxidant effect Effects 0.000 description 4
- 235000006708 antioxidants Nutrition 0.000 description 4
- 238000005260 corrosion Methods 0.000 description 4
- 230000007797 corrosion Effects 0.000 description 4
- 239000003063 flame retardant Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000000844 anti-bacterial effect Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000004332 deodorization Methods 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 235000013399 edible fruits Nutrition 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 238000004020 luminiscence type Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000001954 sterilising effect Effects 0.000 description 1
- 238000004659 sterilization and disinfection Methods 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/005—Processes
- H01L33/0093—Wafer bonding; Removal of the growth substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/005—Processes
- H01L33/0062—Processes for devices with an active region comprising only III-V compounds
- H01L33/0066—Processes for devices with an active region comprising only III-V compounds with a substrate not being a III-V compound
- H01L33/007—Processes for devices with an active region comprising only III-V compounds with a substrate not being a III-V compound comprising nitride compounds
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/48—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
- H01L33/64—Heat extraction or cooling elements
- H01L33/641—Heat extraction or cooling elements characterized by the materials
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Compositions Of Macromolecular Compounds (AREA)
- Led Devices (AREA)
Abstract
Description
Claims (3)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201710117152.3A CN106972084B (zh) | 2017-03-01 | 2017-03-01 | 用于制备紫外led芯片的方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201710117152.3A CN106972084B (zh) | 2017-03-01 | 2017-03-01 | 用于制备紫外led芯片的方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN106972084A true CN106972084A (zh) | 2017-07-21 |
CN106972084B CN106972084B (zh) | 2018-10-19 |
Family
ID=59328368
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201710117152.3A Active CN106972084B (zh) | 2017-03-01 | 2017-03-01 | 用于制备紫外led芯片的方法 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN106972084B (zh) |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005129821A (ja) * | 2003-10-27 | 2005-05-19 | Jsr Corp | 面実装型led素子 |
CN101197408B (zh) * | 2003-02-25 | 2010-12-08 | 株式会社钟化 | 遮光用树脂及形成方法、发光二极管用管壳及半导体装置 |
CN103022301A (zh) * | 2011-09-20 | 2013-04-03 | 上海蓝光科技有限公司 | 具有光抽取微结构的大功率GaN基垂直结构LED及其制备方法 |
CN106025020A (zh) * | 2016-06-24 | 2016-10-12 | 闽南师范大学 | 具有高反射欧姆接触电极的短波紫外led芯片制造方法 |
CN106187204A (zh) * | 2016-07-20 | 2016-12-07 | 合肥毅创钣金科技有限公司 | 一种氟羟基磷灰石改性的高致密度大功率led散热陶瓷基板 |
-
2017
- 2017-03-01 CN CN201710117152.3A patent/CN106972084B/zh active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101197408B (zh) * | 2003-02-25 | 2010-12-08 | 株式会社钟化 | 遮光用树脂及形成方法、发光二极管用管壳及半导体装置 |
JP2005129821A (ja) * | 2003-10-27 | 2005-05-19 | Jsr Corp | 面実装型led素子 |
CN103022301A (zh) * | 2011-09-20 | 2013-04-03 | 上海蓝光科技有限公司 | 具有光抽取微结构的大功率GaN基垂直结构LED及其制备方法 |
CN106025020A (zh) * | 2016-06-24 | 2016-10-12 | 闽南师范大学 | 具有高反射欧姆接触电极的短波紫外led芯片制造方法 |
CN106187204A (zh) * | 2016-07-20 | 2016-12-07 | 合肥毅创钣金科技有限公司 | 一种氟羟基磷灰石改性的高致密度大功率led散热陶瓷基板 |
Also Published As
Publication number | Publication date |
---|---|
CN106972084B (zh) | 2018-10-19 |
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PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
GR01 | Patent grant | ||
GR01 | Patent grant | ||
TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20240425 Address after: 224300 East of Fujian Circuit and South of North 3rd Ring Road, Sheyang Economic Development Zone, Yancheng, Jiangsu Province Patentee after: Jiangsu Wenyang Semiconductor Technology Co.,Ltd. Country or region after: China Address before: 224000 Optoelectronic Industrial Park, No. 66 Lijiang Road, Economic Development Zone, Yancheng City, Jiangsu Province Patentee before: YANCHENG DONGZI OPTOELECTRONICS TECHNOLOGY CO.,LTD. Country or region before: China |