CN106969727B - Body surface three-dimensional roughness measurement method based on zoom technology - Google Patents

Body surface three-dimensional roughness measurement method based on zoom technology Download PDF

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CN106969727B
CN106969727B CN201710254466.8A CN201710254466A CN106969727B CN 106969727 B CN106969727 B CN 106969727B CN 201710254466 A CN201710254466 A CN 201710254466A CN 106969727 B CN106969727 B CN 106969727B
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image
ball
testee
width
optic probe
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CN106969727A (en
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史艳琼
卢荣胜
尹秋霞
李娟�
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Hefei University of Technology
Huainan Union University
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Hefei University of Technology
Huainan Union University
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical means
    • G01B11/30Measuring arrangements characterised by the use of optical means for measuring roughness or irregularity of surfaces

Abstract

The invention discloses a kind of body surface three-dimensional roughness measurement method based on zoom technology, which includes following hardware: " L " type z is to bearing support, stepper motor, ball-screw, a pair of of feed screw nut seat, upper limit switch, lower position switch, sliding link block, limit switch baffle, optic probe, scale grating and the grating reading head being made of optical lens and imaging sensor;Different z is under from testee in optic probe, and acquisition is from defocus to focusing again to the image sequence of defocus;By software programming, mainly acquired image sequence is handled with loading by means of digital image correlation method and focusing evaluation function, and obtains the three-dimensional roughness assessment parameters of body surface with roughness calculation formula.The present invention can be measured with various shapes, unlike material, the three-dimensional surface roughness of the complex geometry of different surfaces reflectivity, and measurement accuracy can achieve micro-nano rank.

Description

Body surface three-dimensional roughness measurement method based on zoom technology
Technical field
The present invention relates to a kind of surface three dimension roughness optical zoom measurement methods, are particularly suitable for key components and parts processing Aspect.
Background technique
High-precision roughness concentration is to the raising of parts machining precision and performance and measuring instrument or even China's observing and controlling The development of industry suffers from important function, is of great significance so studying high-precision roughness measurement method.
Currently, the roughness measurement method for complex geometry is broadly divided into two major classes: contact type measurement and non-connecing Touch measurement.Contact measurement method has three coordinate measuring machine and contourgraph, but the synthesis of the three coordinate measuring machine of industrial application Precision can only achieve micron grade, and the mechanical probes of contourgraph easily scratch measured surface in measurement, and there are contact stress And deformation.Contactless measurement has white light interferometer, from zoom microscope and scanning probe microscopy etc..But they are all difficult To measure the very big slope surface of gradient, white light interferometer and limited from zoom microscope lateral resolution, scanning probe is micro- Mirror is limited by longitudinal measurement range, is normally only used for two-dimentional roughness concentration.
Summary of the invention
The present invention for overcome the deficiencies in the prior art place, it is thick to provide a kind of body surface three-dimensional based on zoom technology Rugosity measurement method, to be able to achieve to the complexity with unlike material, different surfaces reflectivity, various shapes and steep sidewalls The micro-nano three-dimensional surface roughness of geometry measures, and improves measurement accuracy and reach micro-nano rank.
In order to achieve the above objectives, the technical solution adopted by the present invention are as follows:
A kind of measurement method of the body surface three-dimensional roughness concentration system based on zoom technology of the present invention, the object Surface three dimension roughness concentration system includes: " L " type z to bearing support, stepper motor, ball-screw, optic probe, a pair of of lead screw Nut seat, upper limit switch, lower position switch, ball nut link block, limit switch baffle, scale grating, grating reading head;
Upper left side is fixed with the stepper motor on the inside of longitudinal surface of " L " the type z to bearing support;The stepper motor Rotation axis connected with the ball-screw by shaft coupling, a pair of of feed screw nut seat is installed on the ball-screw;? " L " type z between the pair of feed screw nut seat is provided with the upper limit switch and lower position switch on bearing support;Institute It states and is provided with the ball nut link block on ball-screw;The limit is provided on the left of the ball nut link block Baffle is switched, so that the movement travel of the ball nut link block is limited between the upper limit switch and lower position switch Ball-screw on;The other side of the ball nut link block is connected with the optic probe;In " L " the type z to branch On bolster, the right vertical of the ball-screw is equipped with a line slideway auxiliary, and the optic probe is connected by guide rail slide block On the linear guide width, moved up and down under the drive of the ball nut link block;In the optic probe towards institute The side-lower for stating ball-screw is provided with the grating reading head, and scale grating corresponding with the grating reading head is fixed In " L " the type z on bearing support;Testee is provided with immediately below the optic probe;
The optic probe includes: imaging sensor, tube lens, spectroscope, microcobjective, collimating mirror, lighting source; Wherein, described image sensor, tube lens, spectroscope, microcobjective are arranged successively by sequence from top to bottom;It is described Collimating mirror is on spectroscopical right side, and the lighting source is on the right side of the collimating mirror;
The light that the lighting source issues forms collimated light beam after the collimating mirror and gets on the spectroscope, by institute The light for stating spectroscope reflection is irradiated to the surface of the testee, the table through the testee by the microcobjective After the reflection of face, then passes sequentially through the microcobjective, the spectroscope and tube lens and eventually arrive in described image sensor; To collect the image of testee described in a width by described image sensor;By lighting source modulating system, Obtain the image with different light exposures;
Drive the ball-screw that the ball nut link block and the optic probe is driven to exist by the stepper motor It is moved up and down between the upper limit switch and lower position switch, and institute is obtained by the grating reading head and the scale grating The z of optic probe is stated to displacement, so that described image sensor collects different z to the testee under operating distance Image, and constitute image sequence, the surface for obtaining the testee by focus algorithm by described image sequence is high Information is spent, and then obtains the surface three dimension roughness of the testee, its main feature is that, the measurement method is as follows It carries out:
The tested region of the testee is moved in the imaging region of the optic probe by step 1;
Step 2, according to described image sensor acquired image clarity, utilize the stepper motor to adjust the light The z of probe is learned to position, so that the optic probe is moved to the side on the upper side of the positive burnt position of the testee;
Step 3 is gradually moved the optic probe, and is obtained using described image sensor from the inclined of the positive burnt position Top is to the positive burnt position, then the image sequence that is constituted of n width image of the partial below to the positive coke position;Together When, the reading of the grating reading head when acquisition of every width image is recorded, to obtain z to displacement;
Step 4, using digital picture related algorithm search n width image x to y to offset;
Step 4.1, defined variable i, and initialize i=1;
Step 4.2, to the i-th width image, choose the central point O of the i-th width imagei;And with the center Point OiCentered on obtain a P × P zonule Ri
Step 4.3, in i+1 width image, choose the central point O of the i+1 width imagei+1Centered on, And with the central point Oi+1Centered on obtain a Q × Q zonule Ri+1;And P < Q;
Step 4.4, by digital picture related algorithm the i+1 width image zonule Ri+1In search The zonule R of the i-th width imageiPosition, to obtain the pixel of the i+1 width image relative to The offset D of the pixel of i width imagei
I+1 is assigned to i by step 4.5, and return step 4.2 executes, until i > n, to obtain n-1 offset Measure { D1,D2,…,Di,…,Dn-1};
Step 5 chooses area-of-interest corresponding with the tested region on any one width image, according to institute State n-1 offset { D1,D2,…,Di,…,Dn-1, it is the focusing template of M to the n width using focusing evaluation function and size Respective pixel point on image in area-of-interest carries out focusing process, obtains in the area-of-interest of n width image The focusing evaluation function value in the region M × M centered on each pixel;
Step 6, to each pixel in the area-of-interest, using the z to displacement as abscissa, with n width at As image focusing evaluation function value be ordinate, respectively obtain the scatter plot of respective pixel point;
Scatter plot corresponding to each pixel in the area-of-interest is fitted to full curve respectively by step 7 Figure;
Step 8 is respectively searched full curve figure corresponding to each pixel in the area-of-interest using maximum value Suo Fangfa is scanned for, and obtains z-axis displacement corresponding to the maximum value of each full curve figure;
Z-axis displacement corresponding to step 9, the maximum value using each full curve figure reconstructs three-dimension curved surface, is used for Observe imaging surface smoothness;
Step 10 is used as roughness assessment benchmark to the construction of three-dimension curved surface described in step 9 least square plane h=f (x, y) The roughness assessment datum level is individually subtracted in z-axis displacement corresponding to the maximum value of each full curve figure by face Corresponding height value h, obtain each point in the tested region on the testee surface to datum level distance, to obtain described The assessment parameters of testee surface three dimension roughness.
Compared with the prior art, the beneficial effects of the present invention are embodied in:
1, the present invention is based on zoom principles to have devised a set of optic probe z that may be implemented to mobile and Stratified Imaging dress It sets, and combines digital picture related algorithm in software processing, it can be to unlike material, different surfaces reflectivity, a variety of Shape and steep sidewalls, the complex geometry measured is difficult to general measure method and carries out three-dimensional roughness measurement, and is surveyed Micro/nano level can be improved in accuracy of measurement.
2, the present invention is to realize to measure based on zoom principle, by using the optical system with Limited field depths to tested The imaging of object tested region will not cause the shortcomings that damaging or destroying, overcome contact type measurement to testee;By to step Segmented into motor driver, the z of optic probe may be implemented to micro-displacement, so obtain between adjacent two images z to spacing compared with Small object z is to layered image sequence, to improve z to positioning accuracy and subsequent roughness assessment precision;Pass through image Measurement method can disposably measure the range of an entire image, and measurement efficiency is high;It is a kind of for being measured using zoom principle Three-dimensional measurement mode can overcome the locality and one-sidedness of two-dimentional roughness assessment.
3, the present invention obtains the image with different light exposures in each scanning layering by lighting source modulating system, can To overcome the influence of object material and reflectivity.
4, the present invention software processing in such a way that loading by means of digital image correlation method and focus algorithm combine, by preparatory The processing of digital picture related algorithm is carried out to image, reduces the error of perpendicularity of imaging sensor and optical lens during installation Caused by influence, improve measurement accuracy.
Detailed description of the invention
Fig. 1 is the left view of present system;
Fig. 2 is the flow chart of the method for the present invention;
Figure label: 1z is to bearing support;2 stepper motors;3 ball-screws;4 imaging sensors;5 tube lens;6 light point Mirror;7 microcobjectives;8 collimating mirrors;9 lighting sources;10 feed screw nut seats;11 upper limit switches;12 lower position switch;13 images Sequence;14 ball nut link blocks;15 limit switch baffles;16 scale gratings;17 grating reading heads.
Specific embodiment
In the present embodiment, a kind of body surface three-dimensional roughness concentration system based on zoom technology, as shown in Figure 1, packet Include: " L " type z is to bearing support 1, stepper motor 2, ball-screw 3, optic probe, a pair of of feed screw nut seat 10, upper limit switch 11, lower position switch 12, ball nut link block 14, limit switch baffle 15, scale grating 16, grating reading head 17;
Upper left side is fixed with stepper motor 2 on the inside of longitudinal surface of " L " the type z to bearing support 1, and the effect of stepper motor is band Dynamic optic probe moves up and down, and the revolving speed of stepper motor and steering can be controlled by software by motion control card control Stepper motor processed drives optic probe to move up or move down, mobile much distances, mobile with much speed, and can be by stepping electricity The subdivision of machine driver improves the running accuracy of motor, realizes the micro-displacement of optic probe, improves measurement accuracy;Stepper motor 2 Rotation axis is connected by shaft coupling and ball-screw 3, and a pair of of feed screw nut seat 10 is equipped on ball-screw 3;In a pair of of silk " L " type z between thick stick nut seat 10 is provided with upper limit switch 11 and lower position switch 12 on bearing support 1;In ball-screw 3 On be provided with ball nut link block 14;Limit switches baffle 15 is set in the left side of ball nut link block 14, so that rolling The movement travel of pearl nut link block 14 is limited on the ball-screw 3 between upper limit switch 11 and lower position switch 12;Rolling The other side of pearl nut link block 14 is connected with optic probe;In " L " type z on bearing support 1, the right side of ball-screw 3 is perpendicular One secondary linear guide is directly installed, optic probe is connected on linear guide width by guide rail slide block, in ball nut link block Moved up and down under 14 drive, in order to overcome the self weight of straight-line guide rail slide block and coupled optic probe, " L " type z to The back side of bracket hangs clump weight appropriate, moves optic probe smoothly;In optic probe towards ball-screw 3 One side-lower is provided with grating reading head 17, and scale grating 16 corresponding with grating reading head 17 is fixed on " L " type z to bearing On frame 1, the z of optic probe is to position when can learn acquisition layered image by the registration of grating reading head, and herein Grating also acts as a feedback effect, and actual displacement amount is fed back to motion control card, keeps entire motion control link more accurate; Testee is provided with immediately below optic probe;
Optic probe includes: imaging sensor 4, tube lens 5, spectroscope 6, microcobjective 7, collimating mirror 8, lighting source 9;Wherein, imaging sensor 4, tube lens 5, spectroscope 6, microcobjective 7 are arranged successively by sequence from top to bottom;It is quasi- Straight mirror 8 is on the right side of spectroscope 6, and lighting source 9 is on the right side of collimating mirror 8;
The light that lighting source 9 issues forms collimated light beam after collimating mirror 8 and gets on spectroscope 6, is reflected by spectroscope 6 Light be irradiated to the surface of testee by microcobjective 7, after the surface reflection of testee, then pass sequentially through micro- Object lens 7, spectroscope 6 and tube lens 5 eventually arrive on imaging sensor 4;To collect a width quilt by imaging sensor The image of object is surveyed, imaging sensor can be CCD or CMOS camera, and cooperation image pick-up card uses, by figure As capture card programming, RGB color information can also be utilized according to colour imagery shot with real-time display acquired image Further increase measurement accuracy;Meanwhile by existing lighting source modulating system, the image with different light exposures is obtained, Optimal imaging image is selected by image recognition algorithm, to overcome the influence of different objects material, different surfaces reflectivity;
Ball-screw 3 is driven to drive ball nut link block 14 and optic probe in upper limit switch 11 by stepper motor 2 It is moved up and down between lower position switch 12, and the z of optic probe is obtained to displacement from grating reading head 17 and scale grating 16 Amount, so that imaging sensor collects different z to the image of the testee under operating distance, and constitutes image sequence Column 13 obtain the apparent height information of testee by focus algorithm by image sequence 13, and then obtain the table of testee Face three-dimensional roughness.
In the present embodiment, as shown in Fig. 2, a kind of survey of the body surface three-dimensional roughness concentration system based on zoom technology Amount method is to carry out as follows:
The tested region of testee is moved in the imaging region of optic probe by step 1, since imaging system belongs to Micro-imaging, the image acquired every time is image formed by a very small region on testee, so to pass through before measuring Observation acquired image is moved to the tested region of testee in imaging region;
Step 2, according to imaging sensor acquired image clarity, using stepper motor 2 adjust the z of optic probe to Position needs when acquiring image sequence at this time light so that optic probe is moved to the side on the upper side of the positive burnt position of testee Probe to be learned to move down, then corresponding image sequence number is bigger when image objects are clear, indicate that object height herein is lower, Need grating reading head registration to do subtraction to indicate object actual height value, it in actual operation can also be optic probe It is moved to the partial below of the just burnt position of testee, then optic probe will move up, corresponding when image objects are clear at this time Image sequence number it is directly proportional to object height, directly adopt grating reading head registration;
Step 3 is gradually moved optic probe, and is obtained using imaging sensor from the side on the upper side of positive burnt position to positive burnt position It sets, then the image sequence 13 that is constituted of n width image of the partial below to positive burnt position;Meanwhile recording every width image The reading of grating reading head 17 when as acquisition, to obtain z to displacement;
Step 4, using digital picture related algorithm search n width image x to y to offset;
Step 4.1, defined variable i, and initialize i=1;
Step 4.2, to the i-th width image, choose the central point O of the i-th width imagei;And with central point OiCentered on Obtain the zonule R of a P × Pi, the region chosen at image center here is in order to avoid edge is leaned on very much in the region of selection It causes offset out-of-bounds and influences measurement accuracy, when actual implementation not necessarily chooses picture centre region, selects feature significantly non- Fringe region;
Step 4.3, in i+1 width image, choose i+1 width image central point Oi+1Centered on, and with Central point Oi+1Centered on obtain a Q × Q zonule Ri+1;And P < Q;
Step 4.4, by digital picture related algorithm i+1 width image zonule Ri+1In search the i-th width The zonule R of imageiPosition, to obtain the pixel of i+1 width image relative to the i-th width image The offset D of pixeli
I+1 is assigned to i by step 4.5, and return step 4.2 executes, until i > n, to obtain n-1 offset Measure { D1,D2,…,Di,…,Dn-1};
Step 5 chooses area-of-interest corresponding with tested region on any one width image, and removal collects Image on background parts, according to n-1 offset { D1,D2,…,Di,…,Dn-1, utilize focusing evaluation function and size Focusing process is carried out to the respective pixel point in area-of-interest on n width image for the focusing template of M, obtains the imaging of n width The focusing evaluation function value in the region M × M in the area-of-interest of image centered on each pixel, focusing evaluation function It needs to be specifically chosen according to the feature of image of acquisition with focusing template size;
Step 6, to each pixel in area-of-interest, using z to displacement as abscissa, with n width image Focusing evaluation function value is ordinate, respectively obtains the scatter plot of respective pixel point;
Scatter plot corresponding to each pixel in area-of-interest is fitted to full curve figure respectively by step 7, is led to The characteristics of crossing observation scatter plot selects suitable matched curve;
Step 8 uses maximum value search side to full curve figure corresponding to pixel each in area-of-interest respectively Method scans for, and obtains z-axis displacement corresponding to the maximum value of each full curve figure, and the maximum of points for curve of focusing indicates Objective point imaging is clearest at the position, and the registration of grating reading head is exactly the relative altitude value of object at this time;
Z-axis displacement corresponding to step 9, the maximum value using each full curve figure reconstructs three-dimension curved surface, is used for Observe imaging surface smoothness;
Step 10 is used as roughness assessment benchmark to three-dimension curved surface construction least square plane h=f (x, y) of step 9 Face, if the plane equation are as follows: ax+by+cz+d=0 meets a2+b2+c2=1, and utilize the square distance of the plane and measurement point These conditions find out least square plane h=f (x, y) with minimum.
Roughness assessment datum level pair is individually subtracted in z-axis displacement z corresponding to the maximum value of each full curve figure The height value h answered, obtain each point in the tested region on testee surface to datum level distance, and using formula (1), formula (2), Formula (3), formula (4) and formula (5) respectively obtain arithmetic average height sa, maximum height szWith the square height s of rootq, curved surface deviation proportion ssk, steepness skuThis five testee surface three dimension roughness evaluation parameters:
A is domain for assessment area in formula (1), formula (2), formula (3), formula (4) and formula (5), e (x, y)=z (x, y)-h (x, Y), average curvature furthermore can also be calculated, other evaluation parameters such as surface summit total curvature, three-dimensional evaluation is to body surface feature Description have it is of overall importance.

Claims (1)

1. a kind of measurement method of the body surface three-dimensional roughness concentration system based on zoom technology, the body surface three-dimensional Roughness concentration system includes: " L " type z to bearing support (1), stepper motor (2), ball-screw (3), optic probe, Yi Duisi Thick stick nut seat (10), upper limit switch (11), lower position switch (12), ball nut link block (14), limit switch baffle (15), scale grating (16), grating reading head (17);
Upper left side is fixed with the stepper motor (2) on the inside of longitudinal surface of " L " the type z to bearing support (1);The stepping electricity The rotation axis of machine (2) is connected by shaft coupling and the ball-screw (3), is equipped with a pair of of silk on the ball-screw (3) Thick stick nut seat (10);" L " type z between the pair of feed screw nut seat (10) is provided with the upper limit on bearing support (1) Bit switch (11) and lower position switch (12);The ball nut link block (14) is provided on the ball-screw (3);? The limit switch baffle (15) is provided on the left of the ball nut link block (14), so that the ball nut link block (14) movement travel is limited on the ball-screw (3) between the upper limit switch (11) and lower position switch (12);Institute The other side for stating ball nut link block (14) is connected with the optic probe;In " L " the type z on bearing support (1), institute The right vertical for stating ball-screw (3) is equipped with a line slideway auxiliary, and the optic probe is connected to described by guide rail slide block On linear guide width, moved up and down under the drive of the ball nut link block (14);In the optic probe described in One side-lower of ball-screw (3) is provided with the grating reading head (17), mark corresponding with the grating reading head (17) Ruler grating (16) is fixed on " L " the type z on bearing support (1);Testee is provided with immediately below the optic probe;
The optic probe includes: imaging sensor (4), tube lens (5), spectroscope (6), microcobjective (7), collimating mirror (8), lighting source (9);Wherein, described image sensor (4), tube lens (5), spectroscope (6), microcobjective (7) be by What sequence from top to bottom was arranged successively;The collimating mirror (8) exists in the right side of the spectroscope (6), the lighting source (9) The right side of the collimating mirror (8);
The light that the lighting source (9) issues forms collimated light beam after the collimating mirror (8) and gets to the spectroscope (6) On, the surface of the testee is irradiated to by the microcobjective (7) by the light of the spectroscope (6) reflection, through institute After the surface reflection for stating testee, then pass sequentially through the microcobjective (7), the spectroscope (6) and tube lens (5) most Zhongdao reaches on described image sensor (4);To collect the imaging of testee described in a width by described image sensor Image;By lighting source modulating system, the image with different light exposures is obtained;
The ball-screw (3) is driven to drive the ball nut link block (14) and the optics by the stepper motor (2) Probe moves up and down between the upper limit switch (11) and lower position switch (12), and by the grating reading head (17) and The scale grating (16) obtains the z of the optic probe to displacement, so that described image sensor collects different z The image of testee under to operating distance, and constitute image sequence (13), by described image sequence (13) by pair Burnt algorithm obtains the apparent height information of the testee, and then obtains the surface three dimension roughness of the testee;Its It is characterized in, the measurement method is to carry out as follows:
The tested region of the testee is moved in the imaging region of the optic probe by step 1;
Step 2, according to described image sensor acquired image clarity, utilize the stepper motor (2) to adjust the light The z of probe is learned to position, so that the optic probe is moved to the side on the upper side of the positive burnt position of the testee;
Step 3 gradually moves the optic probe, and obtains the side on the upper side from the positive burnt position using described image sensor To the positive burnt position, then the image sequence (13) that is constituted of n width image of the partial below to the positive coke position;Together When, the reading of the grating reading head (17) when the acquisition of every width image is recorded, to obtain z to displacement;
Step 4, using digital picture related algorithm search n width image x to y to offset;
Step 4.1, defined variable i, and initialize i=1;
Step 4.2, to the i-th width image, choose the central point O of the i-th width imagei;And with the central point OiFor Center obtains the zonule R of a P × Pi
Step 4.3, in i+1 width image, choose the central point O of the i+1 width imagei+1Centered on, and with The central point Oi+1Centered on obtain a Q × Q zonule Ri+1;And P < Q;
Step 4.4, by digital picture related algorithm the i+1 width image zonule Ri+1In search it is described The zonule R of i-th width imageiPosition, to obtain the pixel of the i+1 width image relative to the i-th width The offset D of the pixel of imagei
I+1 is assigned to i by step 4.5, and return step 4.2 executes, until i > n, to obtain n-1 offset {D1,D2,…,Di,…,Dn-1};
Step 5 chooses area-of-interest corresponding with the tested region on any one width image, according to the n- 1 offset { D1,D2,…,Di,…,Dn-1, the n width is imaged using the focusing template that focusing evaluation function and size are M Respective pixel point on image in area-of-interest carries out focusing process, obtains in the area-of-interest of n width image with every The focusing evaluation function value in the region M × M centered on a pixel;
Step 6, to each pixel in the area-of-interest, using the z to displacement as abscissa, with n width image The focusing evaluation function value of picture is ordinate, respectively obtains the scatter plot of respective pixel point;
Scatter plot corresponding to each pixel in the area-of-interest is fitted to full curve figure respectively by step 7;
Step 8 uses maximum value search side to full curve figure corresponding to each pixel in the area-of-interest respectively Method scans for, and obtains z-axis displacement corresponding to the maximum value of each full curve figure;
Z-axis displacement corresponding to step 9, the maximum value using each full curve figure reconstructs three-dimension curved surface, for observing Imaging surface smoothness;
Step 10 is used as roughness assessment datum level to the construction of three-dimension curved surface described in step 9 least square plane h=f (x, y), It is corresponding that the roughness assessment datum level is individually subtracted in z-axis displacement corresponding to the maximum value of each full curve figure Height value h, obtain each point in the tested region on the testee surface to datum level distance, to obtain described tested The assessment parameters of body surface three-dimensional roughness.
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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW200842319A (en) * 2007-04-25 2008-11-01 Academia Sinica Method for characterizing transparent thin-films using differential optical sectioning interference microscopy
JP2009288162A (en) * 2008-05-30 2009-12-10 Hitachi Kokusai Electric Inc Three-dimensional measuring device
CN102927933A (en) * 2012-10-16 2013-02-13 首钢总公司 Method of measuring surface roughness by using confocal laser scanning microscope
CN105241399A (en) * 2015-09-09 2016-01-13 合肥芯碁微电子装备有限公司 Method of measuring dynamic flatness of precision positioning platform
CN106403853A (en) * 2016-11-15 2017-02-15 沈阳建筑大学 Stone material surface roughness on-line detection device and stone material surface roughness on-line detection method

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20160061596A1 (en) * 2014-08-26 2016-03-03 Commonwealth Center for Advanced Manufacturing Portable Optical Profilometer Device, System and Method

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW200842319A (en) * 2007-04-25 2008-11-01 Academia Sinica Method for characterizing transparent thin-films using differential optical sectioning interference microscopy
JP2009288162A (en) * 2008-05-30 2009-12-10 Hitachi Kokusai Electric Inc Three-dimensional measuring device
CN102927933A (en) * 2012-10-16 2013-02-13 首钢总公司 Method of measuring surface roughness by using confocal laser scanning microscope
CN105241399A (en) * 2015-09-09 2016-01-13 合肥芯碁微电子装备有限公司 Method of measuring dynamic flatness of precision positioning platform
CN106403853A (en) * 2016-11-15 2017-02-15 沈阳建筑大学 Stone material surface roughness on-line detection device and stone material surface roughness on-line detection method

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
激光共聚焦显微镜在磨损表面粗糙度表征中的应用;孙大乐 等;《中国激光》;20080930;第35卷(第9期);第1410页第1栏第2段,图1

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