CN106938503A - Crystal bar dicing method - Google Patents
Crystal bar dicing method Download PDFInfo
- Publication number
- CN106938503A CN106938503A CN201710159167.6A CN201710159167A CN106938503A CN 106938503 A CN106938503 A CN 106938503A CN 201710159167 A CN201710159167 A CN 201710159167A CN 106938503 A CN106938503 A CN 106938503A
- Authority
- CN
- China
- Prior art keywords
- crystal
- discharging
- crystal holder
- slide rail
- crystal bar
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000013078 crystal Substances 0.000 title claims abstract description 106
- 238000000034 method Methods 0.000 title claims abstract description 19
- 238000007599 discharging Methods 0.000 claims abstract description 58
- 238000005520 cutting process Methods 0.000 claims abstract description 27
- 229910003460 diamond Inorganic materials 0.000 claims abstract description 22
- 239000010432 diamond Substances 0.000 claims abstract description 22
- 239000004570 mortar (masonry) Substances 0.000 claims description 20
- 229920005989 resin Polymers 0.000 claims description 13
- 239000011347 resin Substances 0.000 claims description 13
- 239000003822 epoxy resin Substances 0.000 claims description 9
- 229920000647 polyepoxide Polymers 0.000 claims description 9
- 239000003292 glue Substances 0.000 claims description 7
- 239000000463 material Substances 0.000 claims description 6
- 239000011248 coating agent Substances 0.000 claims description 4
- 238000000576 coating method Methods 0.000 claims description 4
- 239000011521 glass Substances 0.000 claims description 3
- 238000003825 pressing Methods 0.000 claims description 3
- 230000008450 motivation Effects 0.000 claims 1
- 238000005496 tempering Methods 0.000 claims 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 7
- 229910052710 silicon Inorganic materials 0.000 description 7
- 239000010703 silicon Substances 0.000 description 7
- 230000002745 absorbent Effects 0.000 description 4
- 239000002250 absorbent Substances 0.000 description 4
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000002459 sustained effect Effects 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- TZCXTZWJZNENPQ-UHFFFAOYSA-L barium sulfate Chemical compound [Ba+2].[O-]S([O-])(=O)=O TZCXTZWJZNENPQ-UHFFFAOYSA-L 0.000 description 1
- 238000009412 basement excavation Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000001574 biopsy Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000005266 casting Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 239000012634 fragment Substances 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 230000008092 positive effect Effects 0.000 description 1
- 238000012216 screening Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/04—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools
- B28D5/045—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools by cutting with wires or closed-loop blades
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
- B28D5/007—Use, recovery or regeneration of abrasive mediums
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
- B28D5/0082—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
Abstract
The invention discloses a kind of crystal bar dicing method, carry out according to the following steps：Sticky stick：Make to be firmly bonded between crystal bar, backing plate and crystal holder；Charging：The crystal holder for being loaded with crystal bar is fixed on the lifting platform in the cutting chamber of diamond cutting line slicing machine, it is arranged with two guide rollers in cutting chamber in parallel, diamond wire is wound with two guide rollers, there is the positioning runner extended along guide roller axis direction on lifting platform, there is the positioning sliding block for being suitable to be engaged with positioning runner, positioning sliding block coordinates with positioning runner grafting in place afterwards locks positioning sliding block so as to complete the fixation of crystal holder in positioning runner in crystal holder；Section：After the completion of charging procedure, start diamond cutting line slicing machine and cut into slices；Crystal holder is unloaded from lifting platform after the completion of discharging, slicing step and is transferred to next station；Device for discharging discharging is used in discharge step.In the present invention in discharge step, operation is more convenient and time saving and energy saving when crystal holder is unloaded from slicer, can effectively improve operating efficiency.
Description
Technical field
The present invention relates to a kind of silicon wafer manufacture field, and in particular to a kind of crystal bar dicing method.
Background technology
The production procedure of silicon wafer is the first ingot casting formation crystal ingot in ingot furnace, then evolution is formed on excavation machine by crystal ingot
Crystal bar, then by crystal bar bonding in crystal holder, is finally loaded on progress section on slicer by the crystal holder for being loaded with crystal bar and silicon wafer is made
Piece, silicon wafer finished product is obtained after eventually passing degumming, cleaning, drying.Lifting platform in the cutting chamber of slicer in the prior art
It is upper to have along the axially arranged positioning runner of guide roller, in the crystal holder there is the positioning being engaged with the positioning runner to slide
Block, clamping screw is tightened slided so as to which positioning sliding block is locked in into positioning again after being coordinated by positioning sliding block and positioning runner grafting
So as to complete the locking of crystal holder in groove, the locking of crystal holder is released after the completion of section and then crystal holder is pulled, makes discharging slide rail and track slot
Releasing cooperation can unload crystal holder from slicer, and the mode manually lifted mostly is fully relied in the prior art and completes crystal holder
Dismounting, due to heavier-weight, therefore operation is wasted time and energy, and is unfavorable for improving operating efficiency, and during unloading easily
Damage silicon wafer.
The content of the invention
In this regard, the technical problems to be solved by the invention are to unload crystal holder from the hoistable platform of slicer in the prior art
When operation waste time and energy, the problem of causing inefficiency.
Realizing the technical scheme of the object of the invention is：
A kind of crystal bar dicing method, is carried out according to the following steps：
Sticky stick：Crystal holder is lain in a horizontal plane on sticky stick platform, then being coated in crystal holder will pad after one layer of epoxide-resin glue
Plate is bonded, and crystal bar is bonded on backing plate after then coating one layer of epoxide-resin glue on backing plate, and weight is finally placed on crystal bar
Measure and pressurizeed for 20-30kg counterweight, pressing time makes epoxy resin adhesive curing for 30-50min, so that crystal bar, backing plate
It is firmly bonded between crystal holder；
Charging：The crystal holder for being loaded with crystal bar is fixed on the lifting platform in the cutting chamber of diamond cutting line slicing machine, the cutting
Interior, which is arranged with parallel on two guide rollers, two guide rollers, is wound with diamond wire, has on the lifting platform along wire wheel axis
There is the positioning sliding block for being suitable to be engaged with the positioning runner, the positioning in the positioning runner of direction extension, the crystal holder
Sliding block coordinates with the positioning runner grafting in place afterwards locks positioning sliding block so as to complete the fixation of crystal holder in positioning runner；
Section：After the completion of charging procedure, start diamond cutting line slicing machine and cut into slices；
Crystal holder is unloaded from lifting platform after the completion of discharging, slicing step and is transferred to next station；
Device for discharging discharging is used in discharge step, the device for discharging includes frame and installed in the bottom of the frame
Roller, the frame is described provided with crane moving up and down and the drive mechanism for driving the crane to move up and down
Discharging slide rail is fixed with crane in the horizontal direction, the crystal holder is provided with the track slot extended along crystal holder length direction, described
The cross sectional shape of discharging slide rail is close to the discharging on the inverted T-shaped matched with the track slot cross sectional shape, the crane
The position of slide rail root, which is provided with traction wheel, the traction wheel, is fixed with pull rope, and the free end of the pull rope is connected with
Suitable for the hook being connected with the crystal holder, the traction wheel sidepiece is fixed with the hand cranking handle for rotating traction wheel；Utilize this
When device for discharging carries out discharging, the device for discharging is moved to by diamond cutting line slicing machine, and adjusted crane by drive mechanism
It is whole to it is suitable highly make the discharging slide rail with the track slot in sustained height and align after, pushing unloading device makes forward
In the outer end insertion track slot of discharging slide rail, then the hanger mounting on the hook and crystal holder on pull rope is released to unloading simultaneously
Expect the locking of slide rail, wind pull rope finally by hand cranking handle is rotated, pull rope pulls crystal holder phase discharging in the process
Moved on slide rail, until crystal holder completely disengages from the hand cranking handle that stopped operating after lifting platform, at this moment crystal holder is transferred to discharging slide rail
On.
In above-mentioned technical proposal, the mortar that the bottom of the frame is fixed with all the time below the discharging slide rail is collected
Box, the mortar disposable box has the opening opened up upward.
In above-mentioned technical proposal, absorbent material layer is provided with the mortar disposable box.
In above-mentioned technical proposal, the bottom of the frame is provided with directive wheel, and the directive wheel is in horizontally disposed.
In above-mentioned technical proposal, the backing plate is armorplate glass or resin plate.
In above-mentioned technical proposal, the resin streak extended along boule length direction, institute are bonded with the upper surface of the crystal bar
The quantity for stating resin streak is two, and two resin streaks are parallel.
The present invention has positive effect：In discharge step in the present invention, crystal holder is unloaded from diamond cutting line slicing machine
When operation it is more convenient and time saving and energy saving, operation is easily convenient, is conducive to improving operating efficiency, and is saved in discharging
Manually lift link, therefore, it is possible to avoid human body from encountering chip by mistake and cause chip drop after departing from from crystal holder on the ground and
Damage.
Brief description of the drawings
Fig. 1 is the topology view of diamond cutting line slicing machine in the present invention；
Fig. 2 is the stereogram of device for discharging in the present invention；
Fig. 3 is the side view of crystal holder in the present invention；
Fig. 4 is the stereogram of crystal holder in the present invention.
Reference is shown in figure：1- crystal holders；2- backing plates；3- crystal bars；4- cutting chambers；5- lifting platforms；6- guide rollers；7-
Positioning runner；8- positioning sliding blocks；9- frames；10- cranes；11- discharging slide rails；12- track slots；13- traction wheels；14- pull ropes；
15- is linked up with；16- hand cranking handles；17- mortar disposable boxes；18- resin streaks；19- filters；20- mortar shutters.
Embodiment
The concrete structure of device for discharging in the present invention is done with explanation with reference to Figure of description：
Referring to shown in Fig. 1 to Fig. 4, a kind of crystal bar dicing method in the present embodiment is carried out according to the following steps：Sticky stick：Will
Crystal holder 1 is lain in a horizontal plane on sticky stick platform, is bonded backing plate 2 after then coating one layer of epoxide-resin glue in crystal holder 1, is then existed
Crystal bar 3 is bonded on backing plate 2 after coating one layer of epoxide-resin glue on backing plate 2, it is 20- that weight is finally placed on crystal bar 3
30kg counterweight is pressurizeed, and pressing time makes epoxy resin adhesive curing for 30-50min, so that crystal bar 3, backing plate 2 and crystal holder
It is firmly bonded between 1；Charging：The crystal holder 1 for being loaded with crystal bar 3 is fixed on to the lifting platform 5 in the cutting chamber 4 of diamond cutting line slicing machine
On, it is arranged with parallel in the cutting chamber 4 on two guide rollers 6, two guide rollers 6 and is wound with diamond wire, is had on the lifting platform 5
Have to have in the positioning runner 7 extended along the axis direction of guide roller 6, the crystal holder 1 and be suitable to what is be engaged with the positioning runner 7
Positioning sliding block 8, the positioning sliding block 8 coordinates in place afterwards by positioning sliding block 8 in positioning runner 7 with the grafting of positioning runner 7
Locking is so as to complete the fixation of crystal holder 1；Section：After the completion of charging procedure, start diamond cutting line slicing machine and cut into slices；Discharging, cuts
Crystal holder 1 is unloaded from lifting platform 5 after the completion of piece step and is transferred to next station i.e. degumming station progress degumming；In discharge step
Using device for discharging discharging, the device for discharging is included in frame 9 and the roller installed in the bottom of frame 9, the frame 9
Provided with crane 10 moving up and down and the drive mechanism for driving the crane 10 to move up and down, the drive mechanism can be adopted
With lead screw transmission mechanism (motor drive or driven by shaking) or cylinder, discharging is fixed with the horizontal direction on the crane 10
Slide rail 11, the crystal holder 1 is provided with the track slot 12 extended along the length direction of crystal holder 1, and the cross sectional shape of the discharging slide rail 11 is
Close to the position of the root of discharging slide rail 11 on the inverted T-shaped matched with the cross sectional shape of track slot 12, the crane 10
Be provided with traction wheel 13, the traction wheel 13 and be fixed with pull rope 14, the free end of the pull rope 14 be connected with suitable for
The hook 15 that the crystal holder 1 is connected, the sidepiece of traction wheel 13 is fixed with the hand cranking handle 16 for rotating traction wheel 13；Utilize
When the device for discharging carries out discharging, the device for discharging is moved to by diamond cutting line slicing machine, and by drive mechanism by crane
10 are adjusted to suitably highly to make after the discharging slide rail 11 and the track slot 12 be in sustained height and align, and promotion forward is unloaded
Material device makes the outer end of discharging slide rail 11 insert in track slot 12, then by the extension on the hook 15 on pull rope 14 and crystal holder 1
Tool mounting releases the locking to discharging slide rail 11 simultaneously, winds pull rope 14 finally by hand cranking handle 16 is rotated, herein mistake
Pull rope 14 is pulled in journey moves on the phase discharging slide rail 11 of crystal holder 1, until crystal holder 1 completely disengages from the hand that stopped operating after lifting platform 5
Crank hand 16, at this moment crystal holder 1 be transferred on discharging slide rail 11.In discharge step in the present invention, crystal holder is cut from diamond wire
When being unloaded on piece machine operation it is more convenient and time saving and energy saving, operation easily it is convenient, be conducive to improve operating efficiency, and
Eliminated during discharging and manually lift link, cause chip to fall after departing from from crystal holder therefore, it is possible to avoid human body from encountering chip by mistake
Fall to the ground and damage.
In the present embodiment, the bottom of frame 9 is fixed with the mortar disposable box all the time in the lower section of discharging slide rail 11
17, the mortar disposable box 17 has the opening opened up upward.When crystal holder 1 is unloaded into transfer from diamond cutting line slicing machine, due to
Mortar disposable box 4 is in below arm support, therefore enters mortar disposable box by opening by the mortar that is fallen on crystal holder 1 and silicon wafer
In 9, so as to avoid mortar from dropping on mill floor and influence workshop condition.
Further, absorbent material layer is provided with the mortar disposable box 17, the absorbent material layer is sponge or cloth, is set
Absorbent material layer is used for moisture absorption in mortar.
It is used as the further improvement of above-described embodiment：The bottom of the frame 9 is provided with directive wheel (not shown), institute
Directive wheel is stated in being horizontally disposed with, corresponding diamond cutting line slicing machine bottom is provided with the gathering sill being engaged with the directive wheel, described
Directive wheel coordinates the movement to discharging frock to play guide effect with gathering sill, so that by discharging slide rail 11 when being beneficial to unload crystal holder
Docked with track slot 12.
In the present embodiment, the resin streak 18 extended along the length direction of crystal bar 3, institute are bonded with the upper surface of the crystal bar 3
The quantity for stating resin streak 18 is two, and two resin streaks 18 are parallel, and in section, diamond wire is first contacted and cutting resin bar 18,
Crystal bar 3 then can be just cut to, the problem of diamond wire slight slip occurs when entering knife so can be effectively prevented, so as to ensure silicon wafer
The crudy of piece.
Further, (such as by way of clamping or screw) is detachably set in the outside of each guide roller 6 mortar screening
Baffle plate 20, the mortar splashed in section can be blocked by mortar shutter 10, it is to avoid mortar sputters biopsy chamber.
In practice operation, between two guide roller 6 lower section of the crystal bar 3 detachably set (such as by clamping or
The mode of screw) have filter bores are evenly equipped with filter 19, the filter 19, the aperture of the filter bores is less than 2mm, described
The periphery of filter 19 has the annular rib that raises up, can will be produced broken when cutting by setting for filter 19
Piece is filtered, and prevents that fragment from falling on the Buddha's warrior attendant silk of lower floor and being brought into the wire casing of guide roller 6.
Obviously, the above embodiment of the present invention is only intended to clearly illustrate example of the present invention, and is not pair
The restriction of embodiments of the present invention.For those of ordinary skill in the field, may be used also on the basis of the above description
To make other changes in different forms.There is no necessity and possibility to exhaust all the enbodiments.And these
The obvious change or variation that the connotation for belonging to of the invention is extended out still fall within protection scope of the present invention.
Claims (6)
1. a kind of crystal bar dicing method, is carried out according to the following steps：
Sticky stick：Crystal holder (1) is lain in a horizontal plane on sticky stick platform, then being coated in crystal holder (1) will after one layer of epoxide-resin glue
Backing plate (2) is bonded, and crystal bar (3) is bonded on backing plate (2) after then coating one layer of epoxide-resin glue on backing plate (2), finally
Place weight on crystal bar (3) to be pressurizeed for 20-30kg counterweight, pressing time consolidates epoxide-resin glue for 30-50min
Change, so as to be firmly bonded between crystal bar, backing plate and crystal holder；
Charging：The crystal holder (1) for being loaded with crystal bar (3) is fixed on the lifting platform (5) in the cutting chamber of diamond cutting line slicing machine (4),
It is arranged with parallel in the cutting chamber (4) on two guide rollers (6), two guide rollers (6) and is wound with diamond wire, the lifting platform
(5) have to have on the positioning runner (7) extended along guide roller (6) axis direction, the crystal holder (1) on and be suitable to and the positioning
The positioning sliding block (8) that chute (7) is engaged, the positioning sliding block (8) coordinates with the positioning runner (7) grafting in place afterwards will be fixed
Position sliding block (8) locks to complete the fixation of crystal holder (1) in positioning runner (7)；
Section：After the completion of charging procedure, start diamond cutting line slicing machine and cut into slices；
Crystal holder (1) is unloaded from lifting platform (5) after the completion of discharging, slicing step and is transferred to next station；
It is characterized in that：Device for discharging discharging is used in discharge step, the device for discharging includes frame (9) and installed in described
The roller of frame (9) bottom, the frame (9) is provided with crane moving up and down (10) and drives the crane (10)
It is fixed with the horizontal direction on the drive mechanism moved up and down, the crane (10) on discharging slide rail (11), the crystal holder (1)
Provided with the track slot (12) extended along crystal holder (1) length direction, the cross sectional shape of the discharging slide rail (11) is and the track slot
(12) position on the inverted T-shaped that cross sectional shape matches, the crane (10) close to discharging slide rail (11) root is set
Have and pull rope (14) is fixed with traction wheel (13), the traction wheel (13), the free end of the pull rope (14) is connected with suitable
In the hook (15) being connected with the crystal holder (1), traction wheel (13) sidepiece is fixed with the hand for rotating traction wheel (13)
Crank hand (16)；When carrying out discharging using the device for discharging, the device for discharging is moved to by diamond cutting line slicing machine, and by driving
Crane (10) is adjusted to suitably highly make the discharging slide rail (11) be in same height with the track slot (12) by motivation structure
After spending and aliging, pushing unloading device makes the outer end of discharging slide rail (11) insert in track slot (12) forward, then by pull rope
(14) hook (15) on releases the locking to discharging slide rail (11) with the hanger mounting in crystal holder (1) simultaneously, finally by turning
Dynamic hand cranking handle (16) winds pull rope (14), and pull rope (14) pulls crystal holder (1) phase discharging slide rail (11) in the process
Upper movement, until crystal holder (1) completely disengages from the hand cranking handle (16) that stopped operating after lifting platform (5), at this moment crystal holder (1) is transferred to
On discharging slide rail (11).
2. crystal bar dicing method according to claim 1, it is characterised in that：Frame (9) bottom is fixed with to be located all the time
Mortar disposable box (17) below the discharging slide rail (11), the mortar disposable box (17) has the opening opened up upward.
3. crystal bar dicing method according to claim 2, it is characterised in that：Provided with water suction in the mortar disposable box (17)
Material layer.
4. crystal bar dicing method according to claim 1, it is characterised in that：The bottom of the frame (9) is provided with guiding
Wheel, the directive wheel is in horizontally disposed.
5. the crystal bar dicing method according to claim 1 or 2 or 3 or 4, it is characterised in that：The backing plate (2) is tempering glass
Glass plate or resin plate.
6. the crystal bar dicing method according to claim 1 or 2 or 3 or 4, it is characterised in that：The upper surface of the crystal bar (3)
On be bonded with the resin streak (17) extended along crystal bar (3) length direction, the quantity of the resin streak (17) is two, two resins
Bar (17) is parallel.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710159167.6A CN106938503A (en) | 2017-03-17 | 2017-03-17 | Crystal bar dicing method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710159167.6A CN106938503A (en) | 2017-03-17 | 2017-03-17 | Crystal bar dicing method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN106938503A true CN106938503A (en) | 2017-07-11 |
Family
ID=59468758
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710159167.6A Pending CN106938503A (en) | 2017-03-17 | 2017-03-17 | Crystal bar dicing method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106938503A (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107538631A (en) * | 2017-11-03 | 2018-01-05 | 江阴东升新能源股份有限公司 | Small-sized side's silicon core hi-precision cutting technique |
| CN108705691A (en) * | 2018-07-27 | 2018-10-26 | 江苏美科硅能源有限公司 | A kind of integrated guide rail pad item |
| CN109624107A (en) * | 2018-11-16 | 2019-04-16 | 银川隆基硅材料有限公司 | A kind of silicon wafer slice Transfer method, slicer, manipulator and system |
| CN110370479A (en) * | 2019-07-15 | 2019-10-25 | 上海新昇半导体科技有限公司 | A kind of crystal bar cutter device and method |
| WO2021013238A1 (en) * | 2019-07-24 | 2021-01-28 | 徐州鑫晶半导体科技有限公司 | Method for cutting silicon rod and diamond multi-wire cutting device |
| CN113910477A (en) * | 2021-11-27 | 2022-01-11 | 阜宁协鑫光伏科技有限公司 | Diamond wire slicer |
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|---|---|---|---|---|
| CN107538631A (en) * | 2017-11-03 | 2018-01-05 | 江阴东升新能源股份有限公司 | Small-sized side's silicon core hi-precision cutting technique |
| CN107538631B (en) * | 2017-11-03 | 2019-11-19 | 江阴东升新能源股份有限公司 | Small-sized side's silicon core hi-precision cutting technique |
| CN108705691A (en) * | 2018-07-27 | 2018-10-26 | 江苏美科硅能源有限公司 | A kind of integrated guide rail pad item |
| CN109624107A (en) * | 2018-11-16 | 2019-04-16 | 银川隆基硅材料有限公司 | A kind of silicon wafer slice Transfer method, slicer, manipulator and system |
| CN110370479A (en) * | 2019-07-15 | 2019-10-25 | 上海新昇半导体科技有限公司 | A kind of crystal bar cutter device and method |
| WO2021013238A1 (en) * | 2019-07-24 | 2021-01-28 | 徐州鑫晶半导体科技有限公司 | Method for cutting silicon rod and diamond multi-wire cutting device |
| CN113910477A (en) * | 2021-11-27 | 2022-01-11 | 阜宁协鑫光伏科技有限公司 | Diamond wire slicer |
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Application publication date: 20170711 |