CN106933050B - A kind of litho machine synchronous control system and method - Google Patents
A kind of litho machine synchronous control system and method Download PDFInfo
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- CN106933050B CN106933050B CN201511026460.2A CN201511026460A CN106933050B CN 106933050 B CN106933050 B CN 106933050B CN 201511026460 A CN201511026460 A CN 201511026460A CN 106933050 B CN106933050 B CN 106933050B
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
- G03F7/70491—Information management, e.g. software; Active and passive control, e.g. details of controlling exposure processes or exposure tool monitoring processes
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
- G03F7/70491—Information management, e.g. software; Active and passive control, e.g. details of controlling exposure processes or exposure tool monitoring processes
- G03F7/70525—Controlling normal operating mode, e.g. matching different apparatus, remote control or prediction of failure
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70716—Stages
- G03F7/70725—Stages control
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- General Physics & Mathematics (AREA)
- Synchronisation In Digital Transmission Systems (AREA)
- Optical Communication System (AREA)
Abstract
The invention discloses a kind of litho machine synchronous control system and methods, the litho machine synchronous control system includes interferometer subsystem and external subsystem, the interferometer subsystem includes synchronously control card, multichannel optical fiber card and the interferometer numbered card connected by synchronous bus, the synchronously control card is connect by outer synchronizing channel with the external subsystem, and the multichannel optical fiber card is connect by optical-fibre channel with the external subsystem.Technical solution provided by the invention, by the way that the hardware of interferometer subsystem and workpiece platform mask platform subsystem is decoupled, so that the synchronously control card of interferometer subsystem is can connect more measurement axis and external subsystem, increases the scalability of interferometer subsystem and workpiece platform mask platform subsystem.By providing the outer synchronizing channel of format and interface standard unification, realizes the extension of external subsystem, improve the versatility of synchronous control system.
Description
Technical field
The present invention relates to a kind of litho machine synchronous control system and methods, belong to field of semiconductor manufacture.
Background technique
Litho machine is the core equipment of semiconductor processing technology, right with the fast development of semiconductor integrated circuit technology
More stringent requirements are proposed for the system design of litho machine.On the one hand, the integrated level of silicon wafer is continuously improved, and the requirement for line width is got over
Come higher, needs the measurement of litho machine and control system more accurate and complicate, need external part system to carry out more
Extension.On the other hand, with the continuous increase of exposure die size, especially flat display field, used substrate size
It is increasing, it is higher and higher for the control and measurement request of photo-etching machine work-piece platform and reticle stage system, it such as needs support higher
The laser interferometer measurement system of configuration.
Synchronous control system is the timing control maincenter of entire litho machine especially step-scan projection aligner, control
Timing of all related subsystems of litho machine in scan exposure, function be to be swept in each participation of correct time announcement
The subsystem retouched starts to execute corresponding operation.As the complexity of Optical Coatings for Photolithography is continuously improved, requirements at the higher level are needed
Synchronous control system meets the development of litho machine.
The prior art proposes the synchronous control system and the system of a kind of step-by-step scanning photo-etching device based on VME bus
Synchronisation control means.The core component synchronously control component of the synchronous control system is by VME64 custom protocol bus and swashs
Light counting component is connected with motion control component；By optical fiber and alignment controller, leveling and focusing controller, slit controller,
With high-order as controller connects, the data measured to laser counting component are transmitted for lighting controller, Dose Controller；Pass through
RS422 COM and alignment controller, leveling and focusing controller, slit controller, lighting controller, Dose Controller
With high-order as controller connects, each subsystem is made to keep synchronously control.The synchronously control component includes a, b two boards card,
Wherein, the DSP synchronization control algorithm module on a board completes the processing and operation of all synchronous related datas, calculates work stage
The location information of mask platform realizes synchronously control by VME bus.Be provided on b board 6 RS422 COMs with
And 4 optical communication interfaces, realize the extension of external coordination signaling interface.
Using this technology, have the following deficiencies: 1. with Optical Coatings for Photolithography complication, it is desirable that the laser of litho machine is dry
Interferometer measuring system has a large amount of measurement axis, if only not can guarantee by single DSP synchronization control algorithm module in 200us
Or in the shorter synchronously control period, realize to the operation of all measurement axis measurement data and to the synchronously control of subsystem.
2. can not be further expanded by the expansion interface on b board so that the versatility and scalability of entire synchronous control system by
To limitation.3. the various components of the technology are in a VME bus system, the synchronous control of internal subsystem may be implemented
System, but subsystem is such as aligned for each external subsystem, illuminates how subsystem realizes synchronously control, it is not provided with
Specific implementation method.
Prior art also teaches a kind of step scan projection stepper synchronous control systems, provide a kind of synchronous bus
Controller and synchronous control system realize the synchronization signal control of step-scan projection aligner exposure scan.The synchronization
Control system is transmitted using synchronous bus as time reference, and the minimum time unit transmitted by synchronous bus data is stringent to control
Make the time point of each signal, thus realize signal between each subsystem it is real-time with it is synchronous.The isochronous bus controller
Pass through the synchronous regime broadcast singal of synchronous bus, the control panel of realization and isochronous bus controller in the same VME cabinet
Block the synchronously control of (laser numbered card and workpiece platform mask platform motion control card etc.), i.e., internal subsystem is synchronous；Pass through single line
Synchronization signal and synchronous triggering signal are realized and the isochronous bus controller not external control panel in the same VME cabinet
The synchronously control of card, i.e., external subsystem are synchronous.
Using this technology, have the following deficiencies: that 1. inside subsystems include interferometer measuring system and work stage mask
The kinetic control system of platform is integrated in the same VME cabinet, is limited by standard VME bus Cabinet Size, in VME cabinet
Slot position limited amount, the quantity for measuring axis and workpiece platform mask platform control card to interferometer measuring system all limited,
It is unfavorable for the extension of litho machine kinetic control system.2. being realized by the way that single line is synchronous with the synchronous two different form of signal of triggering
The not external subsystem synchronously control of the external Control card in the same VME cabinet, for more different outer portions systems
System, needs isochronous bus controller to provide different a variety of external synchronization signal interfaces, is otherwise unable to satisfy complicated outer portion system
The outer sync cap demand of system, external sync control aspect is inconsistent, is equally unfavorable for litho machine complex external subsystem
Extension.
Therefore, prior art integrated interferometer measuring system and workpiece platform mask platform motion control in a VME cabinet
System, the shortcomings that limitation there are each subsystem scalability of litho machine by VME standard criterion, meanwhile, synchronous bus control
The synchronizing channel mode disunity of device and external subsystem, haves the defects that photoetching outboard portion set expandability receives limitation.
Summary of the invention
Technical problem to be solved by the invention is to provide one kind to make interferometer subsystem measurement axis and external subsystem tool
There are the litho machine synchronous control system and method for more preferable scalability.
To achieve the goals above, the present invention is realised by adopting the following technical scheme:
A kind of litho machine synchronous control system, including interferometer subsystem and external subsystem, the interferometer subsystem
Including the synchronously control card, multichannel optical fiber card and interferometer numbered card connected by synchronous bus, the synchronously control cartoon
It crosses outer synchronizing channel to connect with the external subsystem, the multichannel optical fiber card passes through optical-fibre channel and the external subsystem
Connection.
Preferably, the external subsystem includes workpiece platform mask platform subsystem, alignment subsystem and illumination subsystem；Institute
State synchronously control card by outer synchronizing channel respectively with workpiece platform mask platform subsystem, be aligned subsystem and illumination subsystem connect
It connects；The multichannel optical fiber card by optical-fibre channel respectively with workpiece platform mask platform subsystem, be directed at subsystem and illumination divide be
System connection.
Preferably, the external subsystem realizes that the internal synchronization of the external subsystem controls by interior synchronizing channel.
Preferably, the synchronous bus uses the data/address bus with data synchronized broadcast function.
Preferably, the synchronous bus uses customized synchronous bus.
Preferably, the synchronous bus uses VME bus, the synchronously control card, multichannel optical fiber card and interference instrument meter
Number card is arranged in VME cabinet.
Preferably, the outer synchronizing channel uses the data/address bus with synchronous regime transfer function.
Preferably, the outer synchronizing channel uses external sync bus.
Preferably, the outer synchronizing channel uses customized synchronous bus.
Preferably, the interferometer subsystem further includes interferometer subsystem CPU card, the interferometer subsystem CPU card
It is connect by control bus with the synchronously control card, multichannel optical fiber card and interferometer numbered card.
Preferably, the control bus uses STD bus.
Preferably, the control bus is using PCI, VME, Compact PCI, VXI, PXI, PCIe, SRIO or Ethernet
STD bus.
Preferably, the synchronously control card includes: clock crystal oscillator, provides clock signal of system；Servo timer, for pair
Clock signal of system is counted, and servo period trigger signal is issued；Synchronous bus interface control module receives the servo week
Phase trigger signal starts synchronous bus transport protocol；Outer synchronizing channel control module receives the servo period trigger signal,
Start outer synchronizing channel transport protocol.
A kind of litho machine synchronisation control means, comprising:
The synchronously control card of interferometer subsystem is right by synchronous bus connecting multi-channel sonet card and interferometer numbered card
Interferometer subsystem carries out interior synchronously control, and interferometer numbered card sticks into row data synchronous transfer to multichannel optical fiber；
The synchronously control card is connect by outer synchronizing channel with external subsystem, and external part system carries out outer synchronous control
System, the multichannel optical fiber card are connect by optical-fibre channel with external subsystem, and data synchronous transfer is carried out.
Preferably, interferometer subsystem CPU card passes through the control bus of interferometer subsystem, initial to interferometer subsystem
Change, synchronously control enable bit is set, starts the servo synchronization control of the synchronously control card, start servo period.
Preferably, the synchronously control card counts the multichannel optical fiber card and interferometer by the synchronous bus
The synchronous regime of card broadcast servo period, while the synchronous commencing signal to outside the outer synchronizing channel output, the outer portion system
The synchronization receiving module of system receives the outer synchronous commencing signal.
Preferably, the external subsystem realizes that the internal synchronization of the external subsystem controls by interior synchronizing channel,
And the motion control of the external subsystem is carried out by motion control card.
Compared with prior art, technical solution provided by the invention, by the way that synchronously control is arranged in interferometer subsystem
Card, synchronously control card is by synchronous bus connecting multi-channel sonet card and interferometer numbered card, in the progress of interferometer subsystem
Synchronously control, interferometer numbered card stick into row data synchronous transfer to multichannel optical fiber, and the synchronously control card passes through outer synchronization
Channel is connect with external subsystem, and external part system carries out outer synchronously control, and the multichannel optical fiber card passes through optical-fibre channel
It is connect with external subsystem, carries out data synchronous transfer.By by the hard of interferometer subsystem and workpiece platform mask platform subsystem
Part decoupling makes the synchronously control card of interferometer subsystem can connect more measurement axis and external subsystem, increases interference
The scalability of instrument subsystem and workpiece platform mask platform subsystem.By providing format and interface standard unified outer synchronous logical
Road realizes the extension of external subsystem, improves the versatility of synchronous control system.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of litho machine synchronous control system described in one embodiment of the invention；
Fig. 2 is the connection schematic diagram of synchronous bus described in one embodiment of the invention；
Fig. 3 is the schematic diagram of synchronous bus transport protocol described in one embodiment of the invention；
Fig. 4 is the connection schematic diagram of outer synchronizing channel described in one embodiment of the invention；
Fig. 5 is the schematic diagram of outer synchronizing channel transport protocol described in one embodiment of the invention；
Fig. 6 is the structural schematic diagram of synchronously control card described in one embodiment of the invention；
Fig. 7 is the structural schematic diagram of the subsystem of workpiece platform mask platform described in one embodiment of the invention；
Fig. 8 is the synchronously control schematic diagram of the subsystem of workpiece platform mask platform described in one embodiment of the invention.
It is as shown in the figure: 100, interferometer subsystem；101, control bus；102, synchronous bus；103, interferometer subsystem
CPU card；104, synchronously control card；105, multichannel optical fiber card；106, interferometer numbered card；110, outer synchronizing channel；112, work
The outer synchronizing channel of part platform mask platform subsystem；113, the outer synchronizing channel of alignment subsystem；114, the outer synchronizing channel of illumination subsystem；
120, optical-fibre channel；122, workpiece platform mask platform subsystem optical-fibre channel；123, it is directed at subsystem optical-fibre channel；124, illumination point
System optical-fibre channel；141, clock crystal oscillator；142, servo timer；143, synchronous bus interface control module；144, outer synchronization
Channel control module；200, workpiece platform mask platform subsystem；201, workpiece platform mask platform subsystem control bus；202, work stage
Synchronous bus in mask platform subsystem；300, it is directed at subsystem；400, subsystem is illuminated.
Specific embodiment
The present invention is described in detail with reference to the accompanying drawing:
Referring to Fig.1, litho machine synchronous control system of the invention, including interferometer subsystem 100 and external subsystem, institute
Stating interferometer subsystem 100 includes the synchronously control card 104 connected by synchronous bus 102, multichannel optical fiber card 105 and interference
Instrument numbered card 106, the synchronously control card 104 are connect by outer synchronizing channel 110 with the external subsystem, the multichannel
Sonet card 105 is connect by optical-fibre channel 120 with the external subsystem.
The external subsystem includes workpiece platform mask platform subsystem 200, alignment subsystem 300 and illumination subsystem 400；
The synchronously control card 104 by outer synchronizing channel respectively with workpiece platform mask platform subsystem 200, be aligned subsystem 300 and shine
Bright subsystem 400 connects；The multichannel optical fiber card 105 by optical-fibre channel respectively with workpiece platform mask platform subsystem 200, right
Quasi- subsystem 300 and illumination subsystem 400 connect.
Correspondingly, litho machine synchronisation control means of the invention, comprising:
The synchronously control card 104 of interferometer subsystem 100 is by 102 connecting multi-channel sonet card 105 of synchronous bus and does
Interferometer numbered card 106 carries out interior synchronously control to interferometer subsystem 100, and interferometer numbered card 106 is to multichannel optical fiber card
105 carry out data synchronous transfer；
The synchronously control card 104 is connect by outer synchronizing channel 110 with external subsystem, and external part system carries out outer
Synchronously control, the multichannel optical fiber card 105 are connect by optical-fibre channel 120 with external subsystem, and data synchronous transfer is carried out.
Technical solution proposed by the present invention is by by the hard of interferometer subsystem 100 and workpiece platform mask platform subsystem 200
Part decoupling makes the synchronously control card 104 of interferometer subsystem 100 can connect more measurement axis and external subsystem, increases
The scalability of interferometer subsystem 100 and workpiece platform mask platform subsystem 200.It is unified by providing format and interface standard
Outer synchronizing channel 110, realize the extension of external subsystem, improve the versatility of synchronous control system.
Preferably, the synchronous bus 102 is using the data/address bus with data synchronized broadcast function.
Preferably, the synchronous bus 102 uses customized synchronous bus.
Preferably, the synchronous bus 102 uses VME bus, the synchronously control card 104,105 and of multichannel optical fiber card
Interferometer numbered card 106 is arranged in VME cabinet.
Preferably, the outer synchronizing channel 110 is using the data/address bus with synchronous regime transfer function.
Preferably, the outer synchronizing channel 110 uses external sync bus.
Preferably, the outer synchronizing channel 110 uses customized synchronous bus.
As shown in Figure 1, as one embodiment, this litho machine synchronous control system includes interferometer subsystem 100 and outer
Part system, the interferometer subsystem 100 include synchronously control card 104, the multichannel optical fiber connected by synchronous bus 102
Card 105 and interferometer numbered card 106, further include interferometer subsystem CPU card 103, and the interferometer subsystem CPU card 103 is logical
Control bus 101 is crossed to connect with the synchronously control card 104, multichannel optical fiber card 105 and interferometer numbered card 106.It is described same
Step control card 104 by outer synchronizing channel 110 with outside workpiece platform mask platform subsystem 200, be aligned subsystem 300 and illuminate
Subsystem 400 connects, and the multichannel optical fiber card 105 passes through optical-fibre channel 120 and external workpiece platform mask platform subsystem
200, it is directed at subsystem 300 and illumination subsystem 400 connects.Wherein, outer synchronizing channel 110 includes workpiece platform mask platform subsystem
Outer synchronizing channel 112, the outer synchronizing channel 113 of alignment subsystem and the outer synchronizing channel 114 of illumination subsystem；Optical-fibre channel 120 is wrapped
Include workpiece platform mask platform subsystem optical-fibre channel 122, alignment subsystem optical-fibre channel 123 and illumination subsystem optical-fibre channel 124.
Said external subsystem realizes that the internal synchronization of respective system controls by interior synchronizing channel.
Preferably, the control bus 101 is using PCI, VME, Compact PCI, VXI, PXI, PCIe, SRIO or ether
The universal standards buses such as net.
Wherein, the interferometer subsystem CPU card 103 actively accesses interferometer subsystem 100 by control bus 101
The register of interior all boards realizes control to these boards, issues, together including system initialization, synchronous scanning parameter
Walk the execution of scan control software, synchronization system executes the control functions such as the interrupt processing of state.
Wherein, the interferometer numbered card 106 carries out position measurement to workpiece platform mask platform, obtains reflection work stage and covers
The interferometer measurement fringe number of die station physical location, and under the control of synchronously control card 104, pass through interferometer subsystem 100
Interior synchronous bus 102, by the interferometer measurement fringe number synchronized broadcast to multichannel optical fiber card 105.
Wherein, the multichannel optical fiber card 105 passes through interferometer subsystem 100 under the control of synchronously control card 104
Synchronous bus 102, the interferometer measurement fringe number for carrying out interferometer numbered card 106 is received, by optical-fibre channel 120 by striped
Number is respectively sent to workpiece platform mask platform subsystem 200, alignment subsystem 300 and illumination subsystem 400.
Wherein, referring to shown in Fig. 6, the synchronously control card 104 includes: clock crystal oscillator 141, provides clock signal of system；
Servo timer 142 is connect with clock crystal oscillator 141, for counting to clock signal of system, issues servo period triggering letter
Number；Synchronous bus interface control module 143 receives the servo period trigger signal, starts synchronous bus transport protocol；It is outer same
Channel control module 144 is walked, the servo period trigger signal is received, starts outer synchronizing channel transport protocol.
Above-mentioned synchronously control card 104 is realized the synchronous sampling control of interferometer numbered card 106, is done by synchronous bus 102
Interferometer measures the interior synchronization of the interferometers subsystems 100 such as the interior synchronized broadcast of fringe number, the synchronous triggering of multichannel optical fiber card 105
Function；The synchronously control card 104 by outer synchronizing channel 110, realize with workpiece platform mask platform subsystem 200, be aligned and point be
The servo synchronization control of system 300 and illumination subsystem 400.The synchronously control card 104 is Optical Coatings for Photolithography synchronously control process
Core, the subsystem for synchronization in need provides unified time reference.
Referring to shown in Fig. 2-3, the Principle of Synchronic Control of the synchronous bus 102 is as follows.
The synchronous bus 102 is the self-defining data transfer bus with data synchronized broadcast function.Fig. 2 is the synchronization
The connection schematic diagram of bus 102 includes three classes signal: 10 bit address signal Addr, 32 data-signals in synchronous bus 102
Data and 1 control signal ADVn.Wherein, the address signal Addr and control signal ADVn are exported by synchronously control card 104,
All multichannel optical fiber cards 105 and interferometer numbered card 106 receive these two types of signals；Data-signal Data is by address signal Addr
The interferometer numbered card 106 addressed exports, and all multichannel optical fiber cards 105 receive the interferometer in data-signal Data and survey
Measure fringe number.
Fig. 3 show the implementation of the transport protocol of the synchronous bus 102, and synchronously control card 104 is watched with fixed
Cycle T servo is taken, continuous output has the address signal Addr of fixed time sequence and control signal ADVn, timing cycles are
Tcycle, Tservo=nTcycle.One servo period Tservo includes two class address signal Addr, wherein servo period
First address that Tservo starts is synchronous regime broadcast address Addr_sync, and remaining address is interferometer measurement striped
Number broadcast address Addr_1~Addr_n-1.
Within the synchronous regime broadcast address Addr_sync period, decline of the synchronously control card 104 in control signal ADVn
Edge exports the synchronous regime code Sync_State of this servo period to data-signal Data；All multichannel optical fiber cards
105 and interferometer numbered card 106, in the rising edge of control signal ADVn, the synchronous regime code is received from data-signal Data
Sync_State realizes the servo synchronization of all boards in interferometer subsystem 100.
Within interferometer measurement fringe number broadcast address Addr_1~Addr_n-1 period, interferometer numbered card 106 is being controlled
The failing edge of signal ADVn processed, the fringe number Data_1 that interferometer measurement axis corresponding with Addr_1~Addr_n-1 is measured~
Data_n-1 is exported to data-signal Data；All multichannel optical fiber cards 105 will be counted in the rising edge of control signal ADVn
It is believed that the interferometer measurement fringe number on number Data is saved to its memory space, realize that synchronizing for interferometer measurement fringe number is wide
It broadcasts.
Referring to shown in Fig. 4-5, the Principle of Synchronic Control of the outer synchronizing channel 110 is as follows.
The outer synchronizing channel 110 is the customized external sync bus with synchronous regime transfer function.Fig. 4 is that this is outer
The connection schematic diagram of synchronizing channel 110, each outer synchronizing channel 110 includes two signals: being driven by synchronously control card 104 same
Step output signal SyncOut and synchronous input signal SyncIn by outer portion system drive.The outer synchronizing channel 110 is same
Under the control for walking control card 104, with fixed servo period Tservo, transmitted by SyncOut signal to each external subsystem
The synchronous regime in current servo period passes through the synchronous scanning execution state information of each external subsystem of SyncIn signal acquisition.
The outer synchronizing channel 110 that all external subsystems use, electric interfaces having the same and synchronous regime transmission
Agreement, convenient for the extension of external subsystem and the foundation of synchronous control system hardware and software platform.Specifically, the outer synchronizing channel 110
SyncOut signal and SyncIn signal, use the balance differential-voltage digital interface circuit for meeting RS422 standard, realize system
High speed, the reliable transmission for synchronous regime of uniting pass through tetra- signal wires of SyncOut+, SyncOut-, SyncIn+ and SyncIn-
Realize the balance differential-voltage interface of input and output.
Fig. 5 show the implementation of the 110 synchronous regime transport protocol of outer synchronizing channel, each outer synchronizing channel
110 include two signals, synchronization output signal SyncOut and synchronous input signal SyncIn.Wherein, synchronously control card 104 with
Fixed servo period Tservo starts outer synchronizing channel transport protocol, successively exports 1 start bit by SyncOut signal
Start, 4 servo synchronization status code Sync_State (including Sync_State [0], Sync_State [1], Sync_State
[2] and Sync_State [3]), 1 bit check code S_Parity to each external subsystem；Simultaneously by SyncIn signal, receive each
The synchronous scanning execution state information of external subsystem, including 4 answer signal Ack (including Ack [0], Ack [1], Ack [2]
With Ack [3]) and its check code A_Parity.
Referring to shown in Fig. 7-8, by taking workpiece platform mask platform subsystem 200 as an example, illustrate litho machine synchronously control of the invention
System, to the servo synchronization control process of each subsystem of litho machine.
The interior synchronously control process of interferometer subsystem 100 is as follows:
Step 1: interferometer subsystem CPU card 103 passes through the control bus 101 of interferometer subsystem 100, completes to interference
Synchronously control enable bit is arranged in the initialization of instrument subsystem 100, starts the servo synchronization control function of synchronously control card 104, opens
Open first servo period Tservo；
Step 2: at the beginning of servo period Tservo, synchronously control card 104 is by synchronous bus 102, to interference
The synchronous regime of servo period Tservo is broadcasted inside instrument subsystem 100；Meanwhile it is synchronous to outside workpiece platform mask platform subsystem
Channel 112 exports outer synchronous commencing signal；
Step 3: synchronously control card 104 completes each interferometer measurement item of all workpiece platform mask platforms by synchronous bus 102
The synchronized broadcast of line number；
Step 4: multichannel optical fiber card 105 receives all interferometer measurement fringe numbers by synchronous bus 102, and will count
According in the memory space for being stored in optical fiber interface；
Step 5: the interferometer measurement fringe number that multichannel optical fiber card 105 will be deposited in optical fiber interface memory space is led to
It crosses workpiece platform mask platform subsystem optical-fibre channel 122 and is sent to workpiece platform mask platform subsystem 200；
Step 6: the circulation of synchronously control card 104 reads servo timer, judges whether current servo cycle T servo terminates:
If it is not, continuing to read servo timer terminates to current servo cycle T servo；
Step 7: synchronously control card 104 reads the synchronously control enable bit that interferometer subsystem CPU card 103 issues, judgement
Whether servo synchronization control is terminated: if it is not, the servo period Tservo that starting is new, repeats above-mentioned step 2；If so, ends with system
Synchronization control function.
Meanwhile the synchronously control process of workpiece platform mask platform subsystem 200 is as follows:
Step 1: workpiece platform mask platform subsystem CPU card passes through workpiece platform mask platform subsystem control bus 201, completion pair
Motion control parameter is arranged in the initialization of workpiece platform mask platform subsystem 200；
Step 2: the synchronization receiving module of workpiece platform mask platform subsystem 200 waits synchronous outside workpiece platform mask platform subsystem
The commencing signal in channel 112 waits the beginning of servo period Tservo；
Step 3: synchronous receiving module synchronizing channel 112 outside workpiece platform mask platform subsystem receives the current servo period
The synchronous regime of Tservo, and answer signal is exported simultaneously；
Step 4: synchronous receiving module is received by workpiece platform mask platform subsystem optical-fibre channel 122 is come interferometer point
The interferometer measurement fringe number of system 100；
Step 5: synchronous receiving module is come from by synchronous bus 202 in workpiece platform mask platform subsystem by what is received
The synchronous regime and interferometer measurement fringe number broadcast transmission of interferometer subsystem 100 move control to all workpiece platform mask platforms
Fabrication, and synchronous servo interrupt trigger signal is generated to each motion control card, make all motion control cards are synchronous to enter servo
Interrupt service routine；
Step 6: after motion control card enters servo interrupt service routine, carry out inside and outside synchronous regime compare, work stage
The operation such as mask platform actual calculation of location, output position control parameter；
Step 7: motion control card judges whether to terminate the SERVO CONTROL of workpiece platform mask platform: if it is not, repeating the above-mentioned 2nd
Step；If so, terminating the servo control of entire workpiece platform mask platform.
Claims (16)
1. a kind of litho machine synchronous control system, which is characterized in that including interferometer subsystem and external subsystem, the outside
Subsystem includes workpiece platform mask platform subsystem, alignment subsystem and illumination subsystem, and the interferometer subsystem includes passing through
Synchronously control card, multichannel optical fiber card and the interferometer numbered card of synchronous bus connection, the synchronously control card pass through outer synchronization
Channel respectively with workpiece platform mask platform subsystem, be aligned subsystem and illumination subsystem connection；The multichannel optical fiber card passes through
Optical-fibre channel respectively with workpiece platform mask platform subsystem, be aligned subsystem and illumination subsystem connection.
2. litho machine synchronous control system according to claim 1, which is characterized in that the external subsystem passes through interior same
Realize the internal synchronization control of the external subsystem in step channel.
3. litho machine synchronous control system according to claim 1, which is characterized in that the synchronous bus, which uses, has number
According to the data/address bus of synchronized broadcast function.
4. litho machine synchronous control system according to claim 1, which is characterized in that the synchronous bus is using customized
Synchronous bus.
5. litho machine synchronous control system according to claim 1, which is characterized in that the synchronous bus is total using VME
Line, the synchronously control card, multichannel optical fiber card and interferometer numbered card are arranged in VME cabinet.
6. litho machine synchronous control system according to claim 1, which is characterized in that the outer synchronizing channel, which uses, to be had
The data/address bus of synchronous regime transfer function.
7. litho machine synchronous control system according to claim 1, which is characterized in that the outer synchronizing channel is using external
Synchronous bus.
8. litho machine synchronous control system according to claim 1, which is characterized in that the outer synchronizing channel, which uses, to be made by oneself
Adopted synchronous bus.
9. litho machine synchronous control system according to claim 1, which is characterized in that the interferometer subsystem further includes
Interferometer subsystem CPU card, the interferometer subsystem CPU card pass through control bus and the synchronously control card, multichannel light
Fibre card and the connection of interferometer numbered card.
10. litho machine synchronous control system according to claim 9, which is characterized in that the control bus uses standard
Bus.
11. litho machine synchronous control system according to claim 9, which is characterized in that the control bus using PCI,
VME, Compact PCI, VXI, PXI, PCIe, SRIO or ethernet standard bus.
12. litho machine synchronous control system according to claim 1, which is characterized in that the synchronously control card includes:
Clock crystal oscillator provides clock signal of system；
Servo timer issues servo period trigger signal for counting to clock signal of system；
Synchronous bus interface control module receives the servo period trigger signal, starts synchronous bus transport protocol；
Outer synchronizing channel control module receives the servo period trigger signal, starts outer synchronizing channel transport protocol.
13. a kind of litho machine synchronisation control means characterized by comprising
The synchronously control card of interferometer subsystem is by synchronous bus connecting multi-channel sonet card and interferometer numbered card, to interference
Instrument subsystem carries out interior synchronously control, and interferometer numbered card sticks into row data synchronous transfer to multichannel optical fiber；
The synchronously control card by outer synchronizing channel respectively with the workpiece platform mask platform subsystem of external subsystem, be aligned and point be
System is connected with illumination subsystem, and external part system carries out outer synchronously control, and the multichannel optical fiber card passes through optical-fibre channel point
Not with the workpiece platform mask platform subsystem, be aligned subsystem and illumination subsystem connection, carry out data synchronous transfer.
14. litho machine synchronisation control means according to claim 13, which is characterized in that further include: interferometer subsystem
CPU card passes through the control bus of interferometer subsystem, initializes to interferometer subsystem, and synchronously control enable bit, starting is arranged
The servo synchronization of the synchronously control card controls, and starts servo period.
15. litho machine synchronisation control means according to claim 13, which is characterized in that the synchronously control card passes through institute
Synchronous bus is stated, to the synchronous regime of the multichannel optical fiber card and interferometer numbered card broadcast servo period, while to described
The outer outer synchronous commencing signal of synchronizing channel output, the synchronization receiving module of the external subsystem receive outer synchronize and start letter
Number.
16. litho machine synchronisation control means according to claim 13, which is characterized in that further include: the outer portion system
System realizes that the internal synchronization of the external subsystem controls by interior synchronizing channel, and carries out the outside by motion control card
The motion control of subsystem.
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| CN110874020A (en) * | 2018-08-30 | 2020-03-10 | 上海微电子装备（集团）股份有限公司 | Photoetching machine control system and method |
| CN111857088B (en) * | 2019-04-30 | 2022-06-17 | 上海微电子装备（集团）股份有限公司 | Fault diagnosis system of synchronous drive equipment and diagnosis method thereof |
| CN113983924A (en) * | 2021-10-27 | 2022-01-28 | 北京航天巨恒系统集成技术有限公司 | Coordinate calculation system, method and device of multi-axis laser interferometer |
| CN116560305B (en) * | 2023-06-13 | 2023-10-03 | 哈尔滨工业大学 | High-speed precise control device and method for multi-axis motion table |
| CN117055306B (en) * | 2023-10-11 | 2024-01-16 | 福建安芯半导体科技有限公司 | Automatic synchronous focusing system for step-and-scan lithography machine |
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| CN1967386A (en) * | 2005-11-17 | 2007-05-23 | 中国科学院电工研究所 | Wafer platform mask platform synchronous control system of step-scan photoetching machine |
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