CN116560305B - High-speed precise control device and method for multi-axis motion table - Google Patents
High-speed precise control device and method for multi-axis motion table Download PDFInfo
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- G—PHYSICS
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- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
- G05B19/414—Structure of the control system, e.g. common controller or multiprocessor systems, interface to servo, programmable interface controller
- G05B19/4142—Structure of the control system, e.g. common controller or multiprocessor systems, interface to servo, programmable interface controller characterised by the use of a microprocessor
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
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Abstract
A high-speed precise control device and method for a multi-axis motion table relate to the field of high-speed precise control of multi-axis motion tables and are used for solving the problems of insufficient control precision and speed of the multi-axis motion table of the existing photoetching machine and mutual interference of communication among different boards. According to the high-speed precise control device and method for the multi-axis motion platform, data interaction and parameter setting are carried out through the Ethernet, command processing is carried out through the VME bus, data processing is carried out through the SRIO bus, and control commands and data processing are operated separately, so that a control protocol is simple, logic design is simplified, and complex programming work caused by the fact that unified VME bus processing commands and data is adopted is effectively avoided. Compared with the traditional VME bus, the SRIO bus ensures the control of one core and multiple axes by the multi-core processor, and avoids mutual interference among communication among multiple boards. The invention is suitable for high-speed precise control of the multi-axis motion platform.
Description
Technical Field
The invention relates to the field of high-speed precise control of multi-axis motion tables.
Background
The multi-axis high-speed control device is equivalent to the brain and nerve center of a multi-axis motion platform of the photoetching machine, effectively connects all subsystems of the photoetching machine, and realizes the control of all functional modules of the photoetching machine through upper software of the photoetching machine. The main aim of the control device architecture is to provide a platform with reliable and stable performance and better compatibility for the lithography machine subsystem, so as to realize that the lithography machine multi-axis motion platform meets the performance index requirement. However, as the lithography machine needs more and more high-speed and real-time data acquisition and processing, the conventional lithography machine control device based on the VME bus cannot meet the requirement of improving the data transmission bandwidth, so that the motion precision and speed of the lithography machine are affected. In addition, communication interference between different boards exists in the control device of the photoetching machine, so that the performance index of the multi-axis motion table of the photoetching machine is affected.
Disclosure of Invention
The invention aims to solve the problems of insufficient control precision and speed of a multi-axis motion table of the existing photoetching machine and mutual interference of communication among different boards, thereby providing a high-speed precise control device and method for the multi-axis motion table.
The high-speed precise control device of the multi-axis motion table comprises an upper computer (020), a VME BUS (090), a P2BUS BUS (110), an SRIO BUS (100) and a multifunctional serial communication card (140),
the VME bus: the command transmission is used for the VME master station to access each slave station address, the VME master station command issuing and the VME interrupt receiving;
the P2BUS BUS: the self-defined bus is used for the acquisition card to acquire the sampling length.
The SRIO bus: for data transfer between boards.
The method is characterized in that: it also includes single board computer (030), motion control card (040), synchronous clock card (050), SRIO exchange card (060), acquisition card, high-precision AD conversion card 150 and high-precision DA conversion card 120;
the upper computer (020) is connected with the single board computer (030) and is used for carrying out parameter setting, instruction sending and data monitoring on each board card;
the single board computer (030) is used for task scheduling and controlling the operation of all communication, on one hand, the single board computer performs data interaction with the upper computer (020) through a TCP/IP network protocol, and on the other hand, the single board computer initializes each service board card and issues commands through an SRIO bus protocol;
the motion control card (040) is used for real-time data processing, receives data through the P2BUS, calculates the data and sends the data through the SRIO BUS;
-said synchronous clock card (050): the system is used for providing a clock reference for the system through the VME bus and is responsible for receiving commands generated by a single board computer (030) and sending clock signals to other board cards;
the SRIO exchange card (060) is used for exchanging SRIO data in the motion control card;
the acquisition card is used for acquiring clock information through the VME BUS, then transmitting the original data to the single board computer (030) through the P2BUS by the data acquired by the sensor.
The high-precision AD conversion card 150 is configured to convert the received analog quantity into a corresponding digital quantity and send the digital quantity to the motion control card (040);
the high-precision DA conversion card 120 is configured to receive the digital quantity sent by the motion control card (040), convert the digital quantity into a corresponding analog quantity, and output the analog quantity;
the synchronous clock card (050) comprises an external DDR3 dynamic memory, an FPGA chip (051) is distributed to a memory (052) with the capacity of 1GB, and a DSP chip (053) is distributed to a memory (054) with the capacity of 2 GB; both main chips are externally provided with NORFLASH for program loading; the EMIF line of the DSP chip (053) is externally hung with NANDFLASH for accessing various parameters in operation, the system refers to various reference clock configurations, the initial power-on sequence of the system, the resetting of each IC and the reference clock configuration are all managed by a small-scale FPGA, wherein the communication interaction between the FPGA chip 051 and the DSP chip (053) is SRIO; the FPGA chip (051) is connected with a P0 region of the backboard interface through SRIO, is connected with a P1 region through VMEbus, and is connected with a P2 region through VMEbus and P2 bus; the DSP chip 053 is connected with the P0 region of the backboard interface through SRIO; the synchronous clock card (050) is used for generating a high-precision synchronous clock signal and sending the high-precision synchronous clock signal to other subsystems and other boards in the electric control system.
The high-speed precise control method of the multi-axis motion platform based on the device comprises the following steps:
step one, a single board computer (030) receives a command from an upper computer (020) through an Ethernet, and performs an initialization operation, wherein the initialization operation comprises zero-return-bit motion and track planning of a multi-axis motion platform, and then forwards a control command to an SRIO exchange card (060) through an SRIO bus (100);
step two, a synchronous clock card (050) generates a high-precision synchronous clock signal and synchronously transmits the high-precision synchronous clock signal to other subsystems and other boards in an electric control system through a VME bus (090) so as to realize a synchronous function;
step three, the motion control card (040) receives a control instruction of the single board computer (30) through the P1 area VME bus (090) of the backboard, converts the control instruction into a set value, starts a periodic signal after receiving a synchronous clock signal of the synchronous clock card (050), and forwards the converted set value to the high-precision DA conversion card (120) through an optical fiber;
step four, the high-precision DA conversion card (120) converts the set value received from the motion control card into an analog quantity of +/-10V and distributes the analog quantity to each motor driver;
step five, after each motor driver receives a set value from the high-precision DA conversion card (120), outputting current through a driving module to drive each motor to operate;
step six, the multifunctional serial port communication card (140), the high-precision AD conversion card (150) and the acquisition card transmit the acquired position signal data of the multi-axis motion platform to the motion control card (040) to form closed-loop control;
step seven, after the synchronous clock card (050) starts a synchronous period, the multifunctional serial port communication card (140), the high-precision AD conversion card (150) and the acquisition card send position sampling data to the motion control card (040) at the same frequency;
step eight, after receiving the position sampling data, the motion control card (040) compensates according to the real-time position sampling data to generate a new set value, and then forwards the new set value to the high-precision DA conversion card (120) through the optical fiber interface, and then drives and compensates the motor through the driver; the high-speed precise control of the multi-axis motion table is completed once.
The invention has the following outstanding substantive features and remarkable progress;
according to the high-speed precise control device and method for the multi-axis motion platform, data interaction and parameter setting are carried out through the Ethernet, command processing is carried out through the VME bus, data processing is carried out through the SRIO bus, and control commands and data processing are operated separately, so that a control protocol is simple, logic design is simplified, and complex programming work caused by the fact that unified VME bus processing commands and data is adopted is effectively avoided. Compared with the traditional VME bus, the SRIO bus effectively improves the bandwidth, ensures the reliability and the transmission speed of data transmission, thereby improving the motion precision and the motion speed of a multi-axis motion platform of the photoetching machine. The SRIO communication between different boards is carried out by taking the SRIO exchange card as a bridge, so that the real-time synchronization performance is good when the communication between multiple boards is ensured, the data can be interacted, and the movement speed and the precision control of the multi-axis movement table control device can be further improved.
Drawings
FIG. 1 is a schematic diagram of the architecture of a high-speed precision control device for a multi-axis motion stage;
FIG. 2 is a schematic diagram of a high-speed precision control device chassis of the multi-axis motion stage;
FIG. 3 is a functional schematic of a chassis backplane;
FIG. 4 is a schematic diagram of the connection of boards in a first embodiment of a high-speed precise control device for a multi-axis motion stage;
FIG. 5 is a schematic diagram of the data flow of the high-speed precise control device of the multi-axis motion stage;
FIG. 6 is a schematic diagram of the connection of boards in a second embodiment of a high-speed precise control device for a multi-axis motion stage;
Detailed Description
1-5, the high-speed precise control device of the multi-axis motion platform comprises an upper computer 020, a single board computer 030, a VME BUS 090, a P2BUS BUS 110, an SRIO BUS 100, a motion control card 040, a synchronous clock card 050, an SRIO exchange card 060, an acquisition card 070, a high-precision AD conversion card 150, a high-precision DA conversion card 120 and a multifunctional serial port communication card 140;
wherein, the single board computer 030, the motion control card 040, the synchronous clock card 050, the SRIO switching card 060 and the acquisition card 070 are connected by the VME BUS 090 and the P2BUS BUS 110 for command processing and the motion control card obtaining sampling length.
Wherein, the single board computer 030, the motion control card 040, the synchronous clock card 050 and the SRIO switch card 060 are connected by the SRIO bus 100 for transmitting data.
The input end of a certain channel of the high-precision AD conversion card 150 is connected with the motion control card 040 through an optical fiber, the output end of a certain channel of the high-precision AD conversion card 150 is connected with the driver 130 through a cable, and then the driver 130 is connected with the motor 131 of the multi-axis motion stage of the lithography machine through a cable.
Wherein the driver 130 is connected to the micro motor 131, the macro motor 132 and the HALL133 by cables.
The motion control card 040 is connected with the multifunctional serial communication card 140 and the high-precision DA conversion card 120 through optical fibers, the multifunctional serial communication card 140 is connected with the grating ruler 141 through cables, and the high-precision DA conversion card 120 is connected with the electric vortex sensor 151 through cables.
Referring to fig. 1 and 5, a motion control principle of a multi-axis motion stage of a lithography machine according to a first embodiment of the present invention is as follows:
the upper computer 020 sends a command to a single board computer of the control cabinet through the gigabit Ethernet;
the single board computer 030 receives the control command (1) sent by the upper computer 020 through the gigabit Ethernet, then analyzes the command into the command (2) of each system, and executes the equipment initialization; then the command (2) is transmitted to the SRIO exchange card 060 through the SRIO bus
The SRIO switch card 060 forwards the received internal command (2) to the motion control card 040 via the SRIO bus.
Meanwhile, the motion control card 040 receives an internal instruction (5) of the single board computer 030 through the VME bus 090, converts the instructions (2) and (5) into a set value (3) through a control model and input actual data (4), distributes the set value (3) to the high-precision DA conversion card 120 through an optical fiber, and simultaneously receives a position signal (4) fed back from the high-precision AD conversion card 150 and the multifunctional serial port communication card 140, and also receives state information fed back by other modules.
The high-precision DA conversion card 120 sends the set value (3) to the drivers 130 of the respective axes;
the driver 130 drives the motor to operate according to the set value (3).
The multifunctional serial communication card 140 and the high-precision AD conversion card 150 collect position data of the driving motor through the grating ruler and the eddy current sensor and feed the position data back to the motion control card to form closed-loop motion control.
The position measuring unit 170 collects position data (4) in real time through the grating ruler 141 and the eddy current sensor 151, and transmits the position data to the motion control card 040 in a synchronous period. The motion control card compensates according to the real-time position information and the control model, so as to generate a new set value (3), and then the set value (3) is sent to the drivers 130 of the shafts through the high-precision DA conversion card 120, so that the driving compensation of the motor motion control is realized.
Referring to fig. 1, the high-speed precision motion device and method for a multi-axis motion platform according to the first embodiment of the present invention further includes a synchronous clock card 050, where the synchronous clock card 050 is used to provide clock references for a single board computer 030, a motion control card 040, an SRIO switch card 060, and an acquisition card 070, so as to prevent a motion error phenomenon caused by control timing confusion.
Referring to fig. 2, the control cabinet 080 is configured to carry a single board computer 030, a motion control card 040, a synchronous clock card 050, an SRIO switch card 060 and an acquisition card 070. The system also comprises a power module 210, a VME backboard 220 and a fixed fan 230, wherein a single board computer 030, a motion control card 040, a synchronous clock card 050, an SRIO exchange card 060 and an acquisition card 070 are arranged on the VME backboard 220. The VME back plate 220 is a 16-slot custom 6U size. The fixed fan is used for exhausting downwards, and the case is ventilated from top to bottom and used for heat dissipation of the case. The power module 210 is used for providing power to the control box. The inter-board interconnect includes: VME bus, SRIO, synchronous clock signal, P2bus, etc., all slots support the post-transmission module.
Referring to fig. 3, the VME backboard 220 complies with the VITA1.1 specification, uses a star topology, and the first 10 slots of the backboard all include a P1 area 221, which is mainly used for the master station to access each slave station address, issue master station commands, interrupt reception, etc., and complies with standard VME bus protocol and SRIO protocol; the P0 region 222 is an SRIO bus, and is mainly used for DSP data transfer and data sharing between boards. The P2 area 223 is a custom bus for the computing card to acquire sample card data. The back plate of the last 6 slots includes a P1 region and a P2 region.
The upper computer 020 is a workstation of X64, and runs a windows operating system and a Vxworks real-time operating system.
Referring to FIG. 4, a single board computer 030 employs 1 Power PC P2040 chip 031 and is equipped with a 64-bit DDR3/3L memory controller 032, with data frequency up to 1.2GHz,1 Kintex-7 FPGA chip 033, and 4GB DDR3 memory 034. The Power PC P2040 chip 031 and the FPGA chip 033 are connected through SRIO. The Power PC P2040 chip 031 is connected with the backboard interface P0 region through SRIO, and the FPGA chip 033 is connected with the backboard interface P1 and P2 regions through VMEbus. Meanwhile, the front panel of the board card is provided with an RJ45 ethernet interface 035, a JTAG interface 036 and an RS232 interface 037.JTAG interface 036 is used for debugging and burning chip, ethernet interface 035 is used for transmitting control data and control instruction, and RS232 interface 037 is used for program debugging. The single board computer 030 is configured to receive a control instruction of the upper computer 020, serve as a master station of the whole system, and is responsible for issuing a command by a non-substation and receiving status feedback of each substation, initialize a device, schedule the device, and the like. The P2040 chip of the PowerPc architecture is adopted to match with an embedded VxWorks7.0 operating system, and the software development environment is WorkBench4.0. The workflow is P2040, which communicates with the FPGA in the form of data packets via SRIO to transmit VME bus data. In the first embodiment of the invention, the single board computer 030 adopts the architecture mode of the Power PC and the FPGA, so that the operation speed and the operation capability are improved.
Referring to fig. 4, the motion control card 040 employs 1-piece kinex-7 FPGA chip 041, while it is configured with 4GB DDR3 memory 042,1 pieces 6678 DSP chip 043, while it is configured with multiple pieces DDR3 chip 044, providing up to 2GB memory capability for large-scale real-time signal processing. Wherein, the FPGA chip 041 and the DSP chip 043 are connected through SRIO. The FPGA chip 041 is connected with the P0 area of the backboard interface through SRIO, is connected with the P1 area through VMEbus, and is connected with the P2 area through VMEbus and P2 bus. In addition, FPGA chip 041 is also connected to a plurality of small pluggable packaged optical modules 045. The DSP chip 043 is connected with the backplane interface P0 region through SRIO. JTAG interface 046, optical module 045 and the like are reserved on the front panel of the board card. The motion control card 040 is used for realizing a control function and mainly comprises various control algorithms and a track planning algorithm. The motion control card 040 of the first embodiment of the invention adopts the architecture mode of the DSP and the FPGA, thereby improving the operation speed and the operation capability.
Referring to fig. 4, the synchronous clock card 050 mainly includes an external DDR3 dynamic memory, the FPGA chip 051 is allocated to a 1GB capacity size memory 052, and the dsp chip 053 is allocated to a 2GB capacity size memory 054; both main chips are externally provided with NORFLASH for program loading; the EMIF line plug-in NANDFLASH of the DSP chip 053 is used for accessing various parameters in operation. The system refers to various reference clock configurations, the initial power-on sequence of the system, the reset of each IC and the reference clock configuration are all managed by a small-scale FPGA. Wherein the communication interaction between the FPGA chip 051 and the DSP chip 053 is SRIO; the FPGA chip 051 is connected with the P0 area of the backboard interface through SRIO, is connected with the P1 area through VMEbus, and is connected with the P2 area through VMEbus and P2 bus. The DSP chip 053 is connected with the backplane interface P0 region through SRIO. The synchronous clock card 050 is used for generating a high-precision synchronous clock signal and sending the high-precision synchronous clock signal to other subsystems and other boards in the electric control system.
Referring to fig. 4, the srio switch card 060 adopts a piece of FPGA chip 061 and matches with an ARM memory extension 063 of 8 Gbit; a piece of CPS1848 chip 062. The communication interaction between the FPGA chip 061 and the CPS1848 chip 062 is SRIO, the CPS1848 chip 062 is connected with the PO area through the SRIO, the FPGA chip 061 is connected with the P1 area through the VMEbus, and the FPGA chip 061 is connected with the P2 area through the P2 bus. The SRIO card 060 is driven 1848 chip through I2C to complete the data exchange.
Referring to fig. 4, the high-precision AD conversion card 150 employs one FPGA chip 152, one SFP optical module 153, one AD chip 154, and one RS422 transceiver 155,8 LOMO interfaces 156. And the AD chip and the FPGA are used for data transmission, and the RS422 receives the clock signal, so that the AD card can sample through the optical fiber sampling instruction.
Referring to fig. 4, the high-precision DA conversion card 120 employs a piece of FPGA chip 121, a piece of SFP optical module 122, a piece of DA chip 123, a RS422 transceiver 124, and 12 LOMO interfaces 125. And the DA chip and the FPGA are used for data transmission, and the RS422 receives the clock signal, so that the DA card can receive and output the writing instruction of the optical fiber interface.
Referring to fig. 4, the multifunctional serial port communication card 140 adopts an FPGA chip 142, an SFP optical module 143, an RS422 transceiver 144, and 12J 30J interfaces 145, wherein the DA chip and the FPGA data are transmitted, the RS422 receives a clock signal, and the multifunctional serial port communication card 140 samples by an optical fiber interface sampling instruction.
The following describes in detail, with reference to fig. 1 to 4, the specific steps of a method for controlling a motion control device for a multi-axis motion stage of a lithography machine according to a first embodiment of the present invention:
step one, a single board computer 030 receives a command from an upper computer 020 through an Ethernet and performs initialization operations, wherein the operations comprise zero-returning actions of a motion platform, track planning and the like, and then forwards a control command to an SRIO exchange card 060 through an SRIO bus;
step two, the SRIO exchange card 060 forwards the command to the motion control card 040 needing to participate through the SRIO bus;
step three: the synchronous clock card 050 generates a high-precision synchronous clock signal and sends the high-precision synchronous clock signal to other sub-systems and other boards in the electric control system through the VME bus so as to realize a synchronous function.
Step four: the motion control card 040 receives the control command of the single board computer 030 through the P1 zone VME bus of the backboard 220, converts the control command into a set value through a control model, starts a periodic signal after receiving the synchronous signal of the synchronous clock card 050, and distributes the converted set value to the high-precision DA conversion card 120 through an optical fiber.
Step five: the high-precision DA conversion card 120 converts the set value received from the motion control card 040 into an analog quantity of ±10v, and distributes it to the respective drivers 130.
Step six: after receiving the set values from the high-precision DA conversion card 120, the driver 130 outputs current through the driving module, and drives each motor to operate.
Step seven: the multifunctional serial communication card 140 and the high-precision AD conversion card 150 transmit the collected position signal data of the photoetching machine motion table to the motion control card 040 through optical fibers to form closed-loop control.
Step eight: after the synchronization clock card 050 starts the synchronization period, the multifunctional serial communication card 140 and the high-precision AD conversion card 150 send position sampling data to the motion control card 040 at the same frequency.
Step nine: after receiving the position sampling data, the motion control card 040 compensates according to the real-time position sampling data and the control model, generates a new set value at the same time, forwards the new set value to the high-precision DA conversion card 120 through the optical fiber interface, and then performs driving compensation on the motor through the driver 130.
Referring to fig. 5, the data flow relationship of the multi-axis motion stage motion control apparatus and method according to the first embodiment of the present invention is as follows:
the actually collected position data (4) is transmitted to the multi-function serial communication card 140 and the high-precision AD conversion card 150.
The multifunctional serial communication card 140sss and the high-precision AD conversion card 150 send the position data (4) to the motion control card 040 through optical fibers;
the control principle of the method is as follows:
the upper computer 020 sends a command (1) to the single board computer 030 through the gigabit Ethernet;
the single board computer 030 receives the control command (1) sent by the upper computer 020 through the gigabit Ethernet, then analyzes the control command into the internal command (2) of each system, and executes equipment initialization; then, the internal command (2) is transmitted to the SRIO exchange card 060 through the SRIO bus;
the SRIO switch card 060 forwards the received internal command (2) to the motion control card 040 via the SRIO bus 100.
The motion control card 040 receives the internal command (2) of the single-board computer 030 through the SRIO bus 100, converts the internal command (2) into a set value (3) through the control model, and distributes the set value (3) to the high-precision DA conversion card 120 through an optical fiber.
The high-precision DA conversion card 120 receives the set value (3) and sends the set value to the bottom layer, thereby completing the motor operation.
The motion control card 040 may send the system feedback position data (4) to the SRIO switch card 060 via the SRIO bus of the backplane 220.
After receiving the fed back position data (4), the SRIO switch card 060 sends the position data to the single board computer 030 through the SRIO bus of the back board 220, and then the single board computer 030 sends the position data to the upper computer 020.
In the specific embodiment of the invention, the command is issued through the Ethernet, and the data is processed through the SRIO bus. Compared with the traditional VME bus, the SRIO bus has higher bandwidth, and the reliability and the transmission speed of data in the transmission process are increased, so that the movement speed and the movement precision of a movement table of the photoetching machine are improved. Meanwhile, in the specific embodiment, optical fibers are used in certain links, so that enough anti-interference capability is ensured, and the movement speed of the system is improved.
Referring to fig. 6, a control device for a multi-axis motion stage of a lithography machine according to a second embodiment of the present invention is improved on the basis of the first embodiment, and the difference between the two is a manner and a control architecture for acquiring actual position data. That is, the actual position of the second embodiment of the present invention is obtained by transmitting the collected position signal to the acquisition card 070 via the optical fiber by the laser interferometer 160. The acquisition card 070 transmits the acquired position signal to the motion control card 040 through the P2BUS, and receives an instruction from the single-board computer 030 through the VME BUS.
Referring to fig. 4, the acquisition card 070 adopts two pieces of FPGA chips 071 and stores 072,4 LPF 073,4 AD chips 074,4 ST fiber interfaces 075 for its collocation with EEPROM. The communication interaction between the FPGA chips 071 is SRIO, and the FPGA chip 061 is connected with the P1 area through VMEbus and the P2 area through P2 bus. The acquisition card 070 is connected with an interferometer measurement system through an optical fiber. The acquisition card 070 is used for processing and converting the optical signals acquired by the laser interferometer 160 into position digital signals which can be directly utilized by the motion control card.
The movement control device and method for the multi-axis movement table of the lithography machine provided by the second embodiment of the invention are different from the first embodiment in the way that the movement control card receives actual position data, and the data is transmitted through the P2BUS BUS of the back plate P2 area by the acquisition card directly, so that the transmission efficiency is improved, and meanwhile, the stability and the anti-interference capability of the transmission are improved.
Compared with the first embodiment, the embodiment of the invention has the advantage that when the data of the bottom layer is uploaded, the data of the bottom layer has better anti-interference capability. Compared with LEMO connectors and J30J connectors, the optical fiber transmission method has less interference by electronic signals. In addition, the resolution of the laser interferometer 160 is lower, and the acquired position signals are accurate, which is beneficial to improving the control precision of the moving stage of the photoetching machine.
Claims (8)
1. The high-speed precise control device of the multi-axis motion table comprises an upper computer (020), a VME BUS (090), a P2BUS BUS (110), an SRIO BUS (100) and a multifunctional serial communication card (140),
the VME bus: the command transmission is used for the VME master station to access each slave station address, the VME master station command issuing and the VME interrupt receiving;
the P2BUS BUS: the self-defined bus is a self-contained self-defined bus of the acquisition card and is used for acquiring the sampling length by the motion control card;
the SRIO bus: the device is used for data transmission between the boards;
the system also comprises a single board computer (030), a motion control card (040), a synchronous clock card (050), an SRIO exchange card (060), an acquisition card, a high-precision AD conversion card (150) and a high-precision DA conversion card (120);
the upper computer (020) is connected with the single board computer (030) and is used for carrying out parameter setting, instruction sending and data monitoring on each board card;
the single board computer (030) is used for task scheduling and controlling the operation of all communication, on one hand, the single board computer performs data interaction with the upper computer (020) through a TCP/IP network protocol, and on the other hand, the single board computer initializes each service board card and issues commands through an SRIO bus protocol;
the motion control card (040) is used for real-time data processing, receives data through the P2BUS, calculates the data and sends the data through the SRIO BUS;
-said synchronous clock card (050): the system is used for providing a clock reference for the system through the VME bus and is responsible for receiving commands generated by a single board computer (030) and sending clock signals to other board cards;
the SRIO exchange card (060) is used for exchanging SRIO data in the motion control card;
the acquisition card is used for acquiring clock information through the VME BUS, then transmitting the original data to the single board computer (030) through the P2BUS by the data acquired by the sensor;
the high-precision AD conversion card (150) is used for converting the received analog quantity into a corresponding digital quantity and transmitting the digital quantity to the motion control card (040);
the high-precision DA conversion card (120) is used for receiving the digital quantity sent by the motion control card (040) and converting the digital quantity into a corresponding analog quantity to be output;
the method is characterized in that:
the synchronous clock card (050) comprises an external DDR3 dynamic memory, an FPGA chip (051) is distributed to a memory (052) with the capacity of 1GB, and a DSP chip (053) is distributed to a memory (054) with the capacity of 2 GB; both main chips are externally provided with NORFLASH for program loading; the EMIF line of the DSP chip (053) is externally hung with NANDFLASH for accessing various parameters in operation, the system refers to various reference clock configurations, the initial power-on sequence of the system, the resetting of each IC and the reference clock configuration are all managed by a small-scale FPGA, wherein the communication interaction between the FPGA chip (051) and the DSP chip (053) is SRIO; the FPGA chip (051) is connected with a P0 region of the backboard interface through SRIO, is connected with a P1 region through VMEbus, and is connected with a P2 region through VMEbus and P2 bus; the DSP chip (053) is connected with the backboard interface P0 area through SRIO; the synchronous clock card (050) is used for generating a high-precision synchronous clock signal and sending the high-precision synchronous clock signal to other subsystems and other boards in the electric control system.
2. The high-speed precise control device of the multi-axis motion stage according to claim 1, wherein the single board computer (030) comprises a CPU main control module, an FPGA module, a clock module and a power module;
the CPU main control module is used for realizing the functions of a PowerPC system, DDR storage, flash storage and Ethernet access;
the FPGA module is used for realizing conversion between VEMbus protocol and PCIe;
the clock module is used for providing working clocks for the CPU main control module and the FPGA module;
the power module is also used for providing various power supplies required by the single board computer (030).
3. The high-speed precise control device for a multi-axis motion stage according to claim 1, wherein the high-precision AD conversion card (150) and the high-precision DA conversion card (120) are connected to the eddy current sensor (151) and the driver (130) through a LEMO connector, respectively;
the eddy current sensor (151) is used for measuring the relative position of the detected body and the probe end face;
the driver (130) is used for receiving the set value from the high-precision DA conversion card (120) so as to drive each motor to operate.
4. The high-speed precise control device of the multi-axis motion stage according to claim 1, wherein the SRIO switch card (060) comprises an FPGA chip (061), a memory (063) collocated with the FPGA chip (061), and an srio_sw chip (062); the data interaction between the FPGA chip (061) and the SRIO_SW chip (062) is performed through an SRIO bus, the SRIO_SW chip (062) is connected with a P0 area of the SRIO switch card (060) through the SRIO bus, the FPGA chip (061) is connected with a P1 area of the SRIO switch card (060) through a VMEbus, and the FPGA chip (061) is connected with a P2 area of the SRIO switch card (060) through a P2 bus.
5. The high-speed precise control device of the multi-axis motion stage according to claim 1, wherein the high-precision AD conversion card (150) comprises an FPGA chip, an SFP optical module, an AD chip, an RS422 transceiver, and 8 LEMO interfaces; the AD chip and the FPGA chip transmit data, the RS422 receives a clock signal, and the AD chip samples through an optical fiber sampling instruction.
6. The high-speed precise control device of the multi-axis motion stage according to claim 1, wherein the high-precision DA conversion card (120) comprises an FPGA chip, an SFP optical module, an DA chip, an RS422 transceiver, and 12 LEMO interfaces; the DA chip and the FPGA chip transmit data, the RS422 receives a clock signal, and the DA chip receives and outputs a write instruction of the optical fiber interface.
7. The high-speed precise control device of the multi-axis motion stage according to claim 1, wherein the multifunctional serial communication card (140) comprises an FPGA chip, an SFP optical module, an RS422 transceiver, and 12J 30J interfaces, wherein the SFP optical module is in data transmission with the FPGA chip, the RS422 receives a clock signal, and the multifunctional serial communication card (140) samples by an optical fiber interface sampling instruction.
8. The high-speed precise control method for the multi-axis motion stage based on the high-speed precise control device for the multi-axis motion stage according to claim 1, which is characterized by comprising the following steps: it comprises the following steps:
step one, a single board computer (030) receives a command from an upper computer (020) through an Ethernet, and performs an initialization operation, wherein the initialization operation comprises zero-return-bit motion and track planning of a multi-axis motion platform, and then forwards a control command to an SRIO exchange card (060) through an SRIO bus (100);
step two, a synchronous clock card (050) generates a high-precision synchronous clock signal and synchronously transmits the high-precision synchronous clock signal to other subsystems and other boards in an electric control system through a VME bus (090) so as to realize a synchronous function;
step three, the motion control card (040) receives a control instruction of the single board computer (030) through the P1 area VME bus (090) of the backboard, converts the control instruction into a set value, starts a periodic signal after receiving a synchronous clock signal of the synchronous clock card (050), and forwards the converted set value to the high-precision DA conversion card (120) through an optical fiber;
step four, the high-precision DA conversion card (120) converts the set value received from the motion control card into an analog quantity of +/-10V and distributes the analog quantity to each motor driver;
step five, after each motor driver receives a set value from the high-precision DA conversion card (120), outputting current through a driving module to drive each motor to operate;
step six, the multifunctional serial port communication card (140), the high-precision AD conversion card (150) and the acquisition card transmit the acquired position signal data of the multi-axis motion platform to the motion control card (040) to form closed-loop control;
step seven, after the synchronous clock card (050) starts a synchronous period, the multifunctional serial port communication card (140), the high-precision AD conversion card (150) and the acquisition card send position sampling data to the motion control card (040) at the same frequency;
step eight, after receiving the position sampling data, the motion control card (040) compensates according to the real-time position sampling data to generate a new set value, and then forwards the new set value to the high-precision DA conversion card (120) through the optical fiber interface, and then drives and compensates the motor through the driver; the high-speed precise control of the multi-axis motion table is completed once.
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Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104950768A (en) * | 2015-06-24 | 2015-09-30 | 哈尔滨工业大学 | VME (Versa module Eurocard) bus based multi-board-card communication method of dual-stage lithography control system |
| CN105867072A (en) * | 2016-04-14 | 2016-08-17 | 清华大学 | VME-S bus based working table movement control system |
| CN106933050A (en) * | 2015-12-30 | 2017-07-07 | 上海微电子装备有限公司 | A kind of litho machine synchronous control system and method |
| US10162787B1 (en) * | 2016-06-24 | 2018-12-25 | Rockwell Collins, Inc. | Multicore safe PCIe solution |
| CN110874020A (en) * | 2018-08-30 | 2020-03-10 | 上海微电子装备（集团）股份有限公司 | Photoetching machine control system and method |
| CN114035474A (en) * | 2021-11-10 | 2022-02-11 | 中国科学院微电子研究所 | Sampling signal synchronous control system |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8751098B2 (en) * | 2008-01-25 | 2014-06-10 | Omnitracs, Llc | Method of monitoring CANbus information |
-
2023
- 2023-06-13 CN CN202310698169.8A patent/CN116560305B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104950768A (en) * | 2015-06-24 | 2015-09-30 | 哈尔滨工业大学 | VME (Versa module Eurocard) bus based multi-board-card communication method of dual-stage lithography control system |
| CN106933050A (en) * | 2015-12-30 | 2017-07-07 | 上海微电子装备有限公司 | A kind of litho machine synchronous control system and method |
| CN105867072A (en) * | 2016-04-14 | 2016-08-17 | 清华大学 | VME-S bus based working table movement control system |
| US10162787B1 (en) * | 2016-06-24 | 2018-12-25 | Rockwell Collins, Inc. | Multicore safe PCIe solution |
| CN110874020A (en) * | 2018-08-30 | 2020-03-10 | 上海微电子装备（集团）股份有限公司 | Photoetching machine control system and method |
| CN114035474A (en) * | 2021-11-10 | 2022-02-11 | 中国科学院微电子研究所 | Sampling signal synchronous control system |
Non-Patent Citations (3)
| Title |
|---|
| Raghavan Komanduri and D. Thirugnana Murthy.Design and Development of FPGA based VMEbus Interface Controller (VIC) for Computer based I&C systems of Fast Reactors.2013 Annual IEEE India Conference (INDICON).2013,第1-6页. * |
| 安效君.基于VPX 的高速跳频信号接收处理平台设计.计算机与网络.2022,第52-55页. * |
| 柴娟芳 等.复杂系统实时仿真平台关键技术探讨.上海航天.2019,第57-64页. * |
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